CN106899190B - A kind of micro-vibration electricity energy harvester improving generating efficiency using flux steering - Google Patents
A kind of micro-vibration electricity energy harvester improving generating efficiency using flux steering Download PDFInfo
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- CN106899190B CN106899190B CN201510968273.XA CN201510968273A CN106899190B CN 106899190 B CN106899190 B CN 106899190B CN 201510968273 A CN201510968273 A CN 201510968273A CN 106899190 B CN106899190 B CN 106899190B
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- soft magnetism
- soft
- permanent magnet
- magnetism
- swing arm
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K35/00—Generators with reciprocating, oscillating or vibrating coil system, magnet, armature or other part of the magnetic circuit
- H02K35/02—Generators with reciprocating, oscillating or vibrating coil system, magnet, armature or other part of the magnetic circuit with moving magnets and stationary coil systems
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
- H02K2201/18—Machines moving with multiple degrees of freedom
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2213/00—Specific aspects, not otherwise provided for and not covered by codes H02K2201/00 - H02K2211/00
- H02K2213/03—Machines characterised by numerical values, ranges, mathematical expressions or similar information
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2213/00—Specific aspects, not otherwise provided for and not covered by codes H02K2201/00 - H02K2211/00
- H02K2213/09—Machines characterised by the presence of elements which are subject to variation, e.g. adjustable bearings, reconfigurable windings, variable pitch ventilators
Abstract
The present invention discloses a kind of micro-vibration electricity energy harvester that generating efficiency is improved using flux steering, it include: substrate, insulating layer, induction coil winding, permanent magnet, soft magnet core, two sides soft magnetism, soft magnetism swing arm and soft magnetism oscillator, permanent magnet is arranged under substrate, under coil windings, induction coil is fixed in insulating substrate, the soft magnet core of winding two sides is respectively connected with the pole permanent magnetism N, S, winding central core is located at permanent magnet center, soft magnetism swing arm is connected with central core, and soft magnetism oscillator is located at soft magnetism swing arm end.Bistable state vibration occurs for soft magnetism oscillator, and magnetic flux inverts in coil, and magnetic flux is more concentrated, and machine-electric energy conversion is high-efficient, work belt is roomy, is easily integrated manufacture.
Description
Technical field
The present invention relates to a kind of collectors of field of micro electromechanical technology, especially a kind of to determine circle based on flux steering
Decline mechanical electromagnetic vibration energy collector.
Background technique
With deepening continuously for the researchs such as wireless sensor, all kinds of implantable sensors, how to power for these devices
The critical issue that solves is needed as its application study is pushed further into.Vibrational energy acquisition technique will can generally be deposited in environment
Low-frequency mechanical vibrations can be converted into electric energy, so that round-the-clock, long-term (10 years or more) output electric energy, overcome traditional battery
And it is laid with brought by power supply line power supply mode, replacement cost height, is difficult for the defects of built-in type device power supply, therefore had become
One of mainstream scheme to solve the above problems.
The bandwidth of operation of micromation vibration energy collector and output power are too low at present, it has also become limit the bottle of its application
One of neck problem.To find out its cause, according to theory analysis, for miniature vibration type energy collecting device, energy transfer process
Two stages can actually be divided into, be that forced vibration, reality occur under the action of the ambient vibration of input for internal oscillator first
The transmitting of existing mechanical energy；Followed by oscillator vibration leads to the change of flux by coil windings, imitates in faraday electromagnetic induction
Lower generation induced electromotive force should be acted on, conversion of the mechanical energy to electric energy is completed.Locating for the ambient vibration of input can depend on
Environment can not be adjusted arbitrarily, therefore how the key for the bandwidth of operation and output power for improving device is for input environment
The characteristics of vibration, improves energy transmission-transfer efficiency in above-mentioned link.
Existing research improves energy from using bistable state vibration raising vibrational energy transmission efficiency and using Optimize magnetic circult respectively
The angle of amount transfer efficiency has carried out a large amount of exploration, but due to only considering from one-sided factor, is confined to structural dynamic respectively
Learn optimization and Optimize magnetic circult field, it is difficult to which the angle that slave-electric flux transmits/converts overall process carries out energy conversion efficiency whole
Body optimization, it is difficult to sufficiently excavate both methods and complement each other, promoted the great potential of device aspect of performance.And many schemes
It is all the original reason test in macroscopic devices level, it is difficult to apply in miniaturized devices.How in the limited miniature device in space
In part, it is still key application problem urgently to be resolved that the integrated use above method, which improves device performance,.
It finds by prior art documents, Xing etc. is in " Applied Physics Letters " (Applied Physics
Flash report), Vol95, No.134103,2009 write articles " Wideband vibration energy harvester with high
Permeability magnetic material (wideband vibration energy collector based on high permeability magnetic material) ", should
Text proposes a kind of magnetic structure, during core vibration, between the biasing permanent magnet of two magnetic pole opposite directions back and forth
Switching not only changes the size of magnetic flux, more changes its direction, to significantly alter through the magnetic flux quantitative change in induction coil
Rate.The experimental results showed that under the effect of identical inputted vibration, compared with only changing magnetic flux size, simultaneously by the reversal of magnetism
Change flow direction and size, output voltage peak value can be promoted to 544mV from about 8mV, improve about two orders of magnitude.Meanwhile
Bandwidth of operation also obviously increases, and illustrates the great potential in terms of hoisting power transfer efficiency of Optimize magnetic circult.But it is above-mentioned
Scheme due to magnetic circuit be it is open, quite a few magnetic flux is not introduced into induction coil winding, but diverge come, from
The angle of Optimize magnetic circult still has huge potentiality not excavated sufficiently.
Summary of the invention
It is an object of the invention to overcome deficiency in the prior art, propose that a kind of improved using flux steering is generated electricity
The micro-vibration electricity energy harvester of efficiency, make it satisfaction is high-efficient to vibrational energy machine-electric energy conversion, work belt is roomy,
It is easily integrated the composite request of manufacture etc..
The present invention is achieved by the following technical solutions,
It is a kind of using flux steering improve generating efficiency micro-vibration electricity energy harvester, comprising: substrate, insulating layer,
Induction coil winding, permanent magnet, soft magnet core, two sides soft magnetism, soft magnetism swing arm and soft magnetism oscillator, permanent magnet are arranged under substrate,
Permanent magnet upper surface is concordant with substrate lower surface, is located under induction coil winding；Insulating layer is located in substrate；Induction coil winding
It fixes in a insulating layer；It is fixed in a insulating layer positioned at the two sides soft magnetism of induction coil winding, phase is distinguished with the pole permanent magnet N, S
Even；The soft magnet core of induction coil winding is located at permanent magnet center, and the lower half portion of soft magnet core is located in insulating layer, the upper half
Divide and is higher by insulating layer；Soft magnetism swing arm is connected with soft magnet core top half；Soft magnetism oscillator is located at soft magnetism swing arm end.
Further, the permanent magnetism shape is cube or cylindrical body, and magnetic pole is located at permanent magnet left and right side, permanent magnetism
It is fixed under substrate, upper surface is concordant with substrate lower surface, motionless relative to substrate in the course of work.
Further, the soft magnet core cube or cylindrical body are located among permanent magnet, and connection permanent magnet passes through induction
Coil windings center, lower half portion are located in insulating layer, and top half is higher by insulating layer.
Further, the two sides soft magnetism is located at permanent magnet both ends, carries out magnetic with soft magnetism oscillator during the work time
Conduction, so that magnetic circuit is closed.The area of the tail portion (far from permanent magnetism end) of the soft magnetism at permanent magnet both ends increases, so as to soft magnetism oscillator
Effectively carry out magnetic conduction.
Further, the soft magnetism swing arm is cantilever beam, is connect with soft magnet core, is suspended on above insulating layer, and length is
1-10 millimeters, width 10-50um, with a thickness of 30-100 microns.Thick width ratio guarantees in 5:1 or more.Biggish slenderness ratio guarantees
Cantilever beam is vibrated in the form of euler beam, works along working face direction of vibration, does not occur the vibration or torsion in other directions.
Further, the soft magnetism oscillator is cube or cylindrical body, and the either pole N or the pole S is for soft magnetism oscillator
Amount of force is equal, contrary, and the biggish area of soft magnetism oscillator, which ensure that, effectively carries out magnetic conduction with two sides soft magnetism.
Further, the induction coil winding, is fixed in insulating layer, motionless relative to substrate in the course of work,
Combined and constituted in such a way that spiral gradually out by rectangular or circular multilayer multiturn spiral metal copper coil, the height of coil, line width,
The distance between circle and circle are all in 10 micron of -30 micron range.
Present invention is mainly used for the various vibrational energies being widely present in highly effective gathering nature environment.Permanent magnet is fixed on base
Beneath, compared with traditional moving-iron type energy collecting device, the Integrated manufacture of permanent magnetism is more convenient, the pole N, S respectively with winding two
The soft magnet core of side is connected, and winding central core is located at permanent magnet center.The either work of the pole N or the pole S for soft magnetism oscillator
Firmly equal in magnitude, contrary, when extraneous vibration input, soft magnetism oscillator is moved to side, is less than with side iron core distance
The other side, magnetic balanced to be broken, the hanging swing arm of soft magnetism is under extraneous ambient vibration and unbalance magnetic force collective effect in two sides
Bistable state vibration occurs between soft survey iron core.When soft magnetism swing arm motion is to the soft magnetism side being extremely connected with N, in the pole permanent magnetism N-permanent magnetism
M- soft magnet core-soft magnetism swing arm-soft magnetism oscillator-left side soft magnetism-pole permanent magnetism N forms the magnetic circuit of a closure, by coil
Magnetic flux is from top to bottom；When soft magnetism swing arm motion is to the soft magnetism side being extremely connected with S, m- soft magnet in the pole permanent magnetism S-permanent magnetism
Core-soft magnetism swing arm-soft magnetism oscillator-right side soft magnetism-pole permanent magnetism S forms the magnetic circuit of a closure, is served as reasons by the magnetic flux in coil
It is lower upward.To which in vibration processes, by the magnetic flux in induction coil winding, not only size changes but also direction is sent out
Raw reversion makes it export induced voltage and dramatically increases, while widening operating frequency range, hence it is evident that increase output power.
Compared with prior art, the present invention is with following the utility model has the advantages that the reversal of magnetism and bistable state are vibrated organic melt
It closes, the effect between permanent magnetism and soft magnetism oscillator is so that the work of soft magnetism oscillator has widened operating frequency range, permanent magnetism in bistable state
The circuit constituted with soft magnetism so that in vibration processes, by the magnetic flux in induction coil winding not only size change,
And direction inverts, and closed circuit concentrates the magnetic line of force more, so that it is exported induced voltage and dramatically increases, is widening
While operating frequency range, hence it is evident that increase output power.Permanent magnet is fixed under substrate by the present invention, with traditional moving-iron type
Energy collecting device is compared, and the difficulty in permanent magnetism assembly is reduced, and Integrated manufacture is more convenient.What two sides soft magnetism tail area increased
Design, so that the magnetic conduction between soft magnetism is more efficient.Last designed fixed coil structure is convenient for using micro mechanical technology system
Make, compared with the scheme of moving coil, is easy to make the more coil windings of the number of plies without largely using expensive instrument
Equipment simplifies processing step to reduce the cost of element manufacturing, is easy to realize batch using integrated circuit processing technology
Metaplasia produces.
Detailed description of the invention
Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other feature of the invention,
Objects and advantages will become more apparent upon:
Fig. 1 is the structural schematic diagram of one embodiment of the invention；
Fig. 2 is the operation schematic diagram of structure of the invention.
Specific embodiment
The present invention is described in detail combined with specific embodiments below.Following embodiment will be helpful to the technology of this field
Personnel further understand the present invention, but the invention is not limited in any way.It should be pointed out that the ordinary skill of this field
For personnel, without departing from the inventive concept of the premise, various modifications and improvements can be made.These belong to the present invention
Protection scope.
As shown in Figure 1, the present embodiment includes: substrate 1, insulating layer 2, induction coil winding 3, permanent magnet 4, central soft magnet
Core 5, left side soft magnetism 6, right side soft magnetism 7, soft magnetism swing arm 8 and soft magnetism oscillator 9.
The substrate 1 is glass or silicon, and 40-45 millimeters a length of, width is 30-35 millimeters, thickness 0.5mm-3mm.
The insulating layer 2 is aluminium oxide or polyimides, is located in substrate 1, with a thickness of 10-30 microns.
The induction coil winding 3 is fixed on 2 in insulating layer, motionless relative to substrate 1 in the course of work, by rectangular
Or circular multilayer multiturn spiral metal copper coil combines composition, the height of induction coil winding 3, line in such a way that spiral is gradually opened
The distance between wide, circle and circle are all in 10 micron of -30 micron range.There are aluminium oxide or polyamides sub- between induction coil winding 3
The insulating materials such as amine or Parylene C.
4 shape of permanent magnet is cube or cylindrical body, and magnetic pole is located at 4 left and right side of permanent magnet, and permanent magnet 4 is fixed
In in substrate 1, upper surface is concordant with 1 upper surface of substrate, motionless relative to substrate 1 in the course of work.
5 cube of soft magnet core or cylindrical body, be located at permanent magnet 4 among, connection permanent magnet 4 pass through induction coil around
Group 3.
The N that the left side soft magnetism 6 is located at permanent magnet 4 is extreme, carries out magnetic conduction with soft magnetism oscillator 9 during the work time, makes
Obtain magnetic circuit closure.The area of the tail portion (far from permanent magnetism end) of the soft magnetism at 4 both ends of permanent magnet increases, so as to effective with soft magnetism oscillator 9
Carry out magnetic conduction.
It is extreme that the left side soft magnetism 7 is located at permanent magnet S, magnetic conduction is carried out with soft magnetism oscillator 9 during the work time, so that magnetic
Road closure.The area of the tail portion (far from permanent magnetism end) of the soft magnetism at 4 both ends of permanent magnet increases, effectively to carry out with soft magnetism oscillator 9
Magnetic conduction.
The soft magnetism swing arm 8 is cantilever beam, and length is 10-20 millimeters, width 5-10mm, with a thickness of 30-100 microns.
Slenderness ratio guarantees in 100:1 or more.Biggish slenderness ratio ensure that cantilever beam is vibrated in the form of euler beam, shake along working face
Dynamic direction work, does not occur the vibration or torsion in other directions.
The soft magnetism oscillator 9 is cube or cylindrical body, and for the side length or diameter of soft magnetism oscillator in 50-200um, correspondence is larger
Area ensure that and effectively carry out magnetic conduction with the soft magnetism of two sides.
Permanent magnet 4 is fixed in substrate 1, and compared with traditional moving-iron type energy collecting device, the Integrated manufacture of permanent magnetism is more
Convenient, the pole N, S is connected with left side iron core 6 and right side iron core 7 respectively, and soft magnet core 5 is located at 4 center of permanent magnet.The either pole N
Or the pole S is equal for the amount of force of soft magnetism oscillator 9, contrary, when extraneous vibration input, soft magnetism oscillator 9 to one
Side movement, with side iron core distance be less than the other side, it is magnetic balanced to be broken, soft magnetism swing arm 8 extraneous ambient vibration with it is unbalance
Bistable state vibration occurs under magnetic force collective effect between the soft magnet core of two sides.When soft magnetism swing arm 8 moves to left side soft magnetism 7 (with N
Extremely be connected) side when, m- soft magnet core-soft magnetism swing arm-soft magnetism oscillator-left side soft magnetism-pole permanent magnetism N in the pole permanent magnet N-permanent magnetism
The magnetic circuit for forming a closure is from top to bottom by the magnetic flux in induction coil winding 3；When soft magnetism swing arm 8 moves to and the pole S
When connected soft magnetism side, m- soft magnet core-soft magnetism swing arm-soft magnetism oscillator-right side soft magnetism-pole permanent magnetism S in the pole permanent magnetism S-permanent magnetism
The magnetic circuit for forming a closure is from bottom to top by the magnetic flux in induction coil winding 3.To pass through in vibration processes
Not only size changes magnetic flux in induction coil winding 3 but also direction inverts, and so that it is exported induced voltage significant
Increase, while widening operating frequency range, hence it is evident that increase output power.
Specific embodiments of the present invention are described above.It is to be appreciated that the invention is not limited to above-mentioned
Particular implementation, those skilled in the art can make various deformations or amendments within the scope of the claims, this not shadow
Ring substantive content of the invention.
Claims (10)
1. a kind of micro-vibration electricity energy harvester for improving generating efficiency using flux steering, comprising: substrate, insulating layer, sense
Answer coil windings, permanent magnet, soft magnet core, left side soft magnetism, right side soft magnetism, soft magnetism swing arm and soft magnetism oscillator, it is characterised in that: forever
Magnet is arranged under substrate, and permanent magnet upper surface is concordant with substrate lower surface, is located under induction coil winding；Insulating layer is located at base
On bottom；Induction coil winding is fixed in a insulating layer；Left side soft magnetism and right side soft magnetism positioned at induction coil winding two sides are fixed
In a insulating layer, it is respectively connected with the pole permanent magnet N, S；The soft magnet core of induction coil winding is located at permanent magnet center, soft magnet
The lower half portion of core is located in insulating layer, and top half is higher by insulating layer；Soft magnetism swing arm is connected with soft magnet core top half；It is soft
Magnon is located at soft magnetism swing arm end.
2. the apparatus according to claim 1, characterized in that the permanent magnet, shape are cube or cylindrical body, magnetic pole position
In permanent magnet left and right side, permanent magnet is fixed under substrate, and permanent magnet upper surface is concordant with substrate lower surface, in the course of work
It is motionless relative to substrate.
3. the apparatus according to claim 1, characterized in that the soft magnet core is cube or cylindrical body, is located at permanent magnetism
Among body, connection permanent magnet passes through induction coil winding center.
4. the apparatus according to claim 1, characterized in that left side soft magnetism and right side soft magnetism are located at permanent magnet both ends,
Magnetic conduction is carried out with soft magnetism oscillator during the work time, so that magnetic circuit is closed, the area of the tail portion of the soft magnetism at permanent magnet both ends increases
Greatly, effectively to carry out magnetic conduction with soft magnetism oscillator.
5. the apparatus according to claim 1, characterized in that the soft magnetism swing arm is cantilever beam, is connect with soft magnet core, is hanged
Sky is above insulating layer.
6. device according to claim 5, characterized in that the soft magnetism swing arm, length are 1-10 millimeters, width 10-
50um, it is thick wide than guaranteeing to guarantee that cantilever beam is vibrated in the form of euler beam, along work in 5:1 or more with a thickness of 30-100 microns
The work of plane vibration direction, does not occur the vibration or torsion in other directions.
7. device according to claim 1-6, characterized in that the soft magnetism oscillator be cube or cylindrical body,
The either pole N or the pole S is equal for the amount of force of soft magnetism oscillator, contrary.
8. device according to claim 1-6, characterized in that the soft magnetism swing arm is in extraneous ambient vibration and loses
Bistable state vibration occurs under the magnetic force collective effect that weighs between left side soft magnetism and right side soft magnetism.
9. device according to claim 1-6, characterized in that the circuit that the permanent magnet and soft magnetism are constituted makes
It obtains in vibration processes, by the magnetic flux in induction coil winding, not only size changes but also direction inverts, and
Closed circuit concentrates the magnetic line of force more.
10. device according to claim 1-6, characterized in that the induction coil winding is fixed on insulation
It is motionless relative to substrate in the course of work in layer, it is gradually opened by rectangular or circular multilayer multiturn spiral metal copper coil by spiral
Mode combine composition, the distance between height, line width, circle and circle of coil are all in 10 micron of -30 micron range.
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| CN201510968273.XA CN106899190B (en) | 2015-12-21 | 2015-12-21 | A kind of micro-vibration electricity energy harvester improving generating efficiency using flux steering |
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| CN201510968273.XA CN106899190B (en) | 2015-12-21 | 2015-12-21 | A kind of micro-vibration electricity energy harvester improving generating efficiency using flux steering |
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| WO1999049556A1 (en) * | 1998-03-25 | 1999-09-30 | Detra S.A. | Converter of mechanical energy into electric energy and apparatus equipped with same |
| GB2425222B (en) * | 2005-04-12 | 2008-11-05 | Perpetuum Ltd | An electromechanical generator for converting mechanical vibrational energy into electrical energy |
| JP2007020269A (en) * | 2005-07-06 | 2007-01-25 | Tokai Rika Co Ltd | Power generator |
| FR2893780A1 (en) * | 2005-11-22 | 2007-05-25 | Schneider Electric Ind Sas | Electric energy generation device for e.g. supplying transmitter, has magnetic circuit formed of movable part and fixed part that traverses central opening of coil two times by forming loop, where circuit is made of ferromagnetic material |
| CN202094879U (en) * | 2011-03-02 | 2011-12-28 | 上海博悦信息科技有限公司 | Self-power-supplying wireless bidirectional communication sensor |
| ES2643396T3 (en) * | 2011-07-28 | 2017-11-22 | National University Corporation Okayama University | Dynamo |
| WO2013031127A1 (en) * | 2011-08-29 | 2013-03-07 | パナソニック株式会社 | Electric power generating device |
| CN102790507B (en) * | 2012-08-02 | 2014-05-07 | 江苏博悦物联网技术有限公司 | Vibration self-generation module |
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