CN202663271U - Vibration energy collector based on micro electromechanical system (MEMS) - Google Patents
Vibration energy collector based on micro electromechanical system (MEMS) Download PDFInfo
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- CN202663271U CN202663271U CN 201220262675 CN201220262675U CN202663271U CN 202663271 U CN202663271 U CN 202663271U CN 201220262675 CN201220262675 CN 201220262675 CN 201220262675 U CN201220262675 U CN 201220262675U CN 202663271 U CN202663271 U CN 202663271U
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- permanent magnet
- thin plate
- induction coil
- graphite thin
- pyrolytic graphite
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Abstract
A vibration energy collector based on a micro electromechanical system (MEMS) comprises an upper-layer pyrolytic graphite thin plate, a suspension permanent magnet, a lower-layer pyrolytic graphite thin plate and a lifting permanent magnet. The upper-layer pyrolytic graphite thin plate, the suspension permanent magnet and the lower-layer pyrolytic graphite thin plate are arranged sequentially from the top to the bottom. An upper induction coil is arranged on the lower lateral side of the upper-layer pyrolytic graphite thin plate, and a lower induction coil is arranged on the upper lateral side of the lower-layer pyrolytic graphite thin plate. The permanent magnet is used as a suspension body in the vibration energy collector, an anti-magnetic material structure is respectively arranged on the upper side and the lower side of the permanent magnet, the induction coil is arranged on anti-magnetic materials, the lifting permanent magnet is arranged on the upper anti-magnetic material structure, the permanent magnet is suspended between the upper anti-magnetic structure and the lower anti-magnetic structure at a static state, and under the vibration effect of environment, the permanent magnet moves vertically without friction, so that inducted electromotive force is generated in the upper induction coil and the lower induction coil and stored through an electric power storage return circuit.
Description
Technical field
The utility model relates to a kind of electricity energy harvester, particularly utilizes the ambient vibration source to provide the device of power supply, specifically a kind of vibration energy collector based on MEMS for wireless senser or biological micro-nano mechanical autonomous system.
Background technology
Wireless senser or biological micro-nano mechanical autonomous system are more and more paid attention at present, and such as the Real-Time Monitoring of equipment service behaviour, and the portable biometric minute mechanical and electrical system is used.The power supply of these devices can not get good solution at present, limits it and uses widely.Energy acquisition (Energy harvesting, Energy scavenging) refers to that collecting the energy (such as luminous energy, heat energy, mechanical energy, wind energy homenergic) of not using in the environment by light, heat, vibration, biotechnology and other technologies converts operable electric energy to.At present the vibration energy collector of research mainly contains three kinds of electrostatic, piezoelectric type and electromagnetic types, because piezoelectric is widely used, therefore the research of piezoelectric vibration energy collector is comparatively deep, relates to the structural design of device, the layout of electrode and the research of piezoelectric performance; In the piezoelectric vibration energy collector, mainly use the d of piezoelectric
33And d
31Two kinds of mode of operations, this needs the cantilever beam or the vibrating membrane that utilize ambient vibration usually.And the electromagnetic energy harvester of existing research also is to utilize ambient vibration by a spring or vibrating membrane mostly, makes magnet and coil produce relative motion, and then obtains induced electromotive force.
The micro electromagnetic vibration energy harvester of the people such as Najafi of U.S. Michigan university report in 2008 can convert low-frequency vibration to the upper frequency vibration by an electromagnetic type frequency amplifying device, and then utilizes the law of electromagnetic induction that the kinetic energy that the upper frequency vibration has is converted to electric energy.The Wang Peihong of Shanghai Communications University proposes a kind of based on MEMS (Micro-Electro-Mechanical System, MEMS (micro electro mechanical system)) the novel electromagnetic vibration energy collector of micro-processing technology, this structure mainly comprises permanent magnet, silicon-base plane spiral type nickel spring and double-deck copper coil, spring wherein and coil adopt MEMS technique to make, the NdFeB permanent magnet by glue bond on planar spiral metal Ni spring.The electromagnetic vibration energy collector of D.Marioli research is sandwich structure, be fixed with magnet structure cylindrical drum top and bottom, it is the coil that is supported by ring spring between these two magnet structures, magnet structure comprises an annular permanent magnet and central permanent magnet piece, and the direction of magnetization of central permanent magnet and annular permanent magnet is opposite, and coil moving up and down in the magnetic field of magnet structure up and down just produces induced electromotive force.The electromagnetic vibration energy collector of the Zhang Haixia seminar research of Peking University, make copper coil in silicon base, a vibrating disk is supported on the silicon base by four snakelike cantilever beams, be electroplate with permanent magnet array on the vibrating disk, when vibrating disk moves up and down under extraneous effect of vibration, just produce induced electromotive force in copper coil, the characteristics of this vibration energy collector are all to adopt MEMS technique to make.
Owing to needing to utilize ambient vibration by the parts that are connected to support in the vibration energy collector that utilizes at present the ambient vibration source, in its energy acquisition course of work, can cause the additive decrementation of energy, it is not high to cause ambient vibration to be coupled to the efficient of absorbing parts, is unfavorable for the collection of little energy.
The utility model content
The purpose of this utility model is to provide a kind of vibration energy collector based on MEMS, described this vibration energy collector based on MEMS will solve that the mechanical type vibration energy collector need to pass through the support member supports oscillator in the prior art, thereby causes the inefficient technical problem of energy acquisition of extra energy resource consumption, Caused Vibration energy collecting device.
The purpose of this utility model is achieved through the following technical solutions: wherein, this vibration energy collector comprises upper strata pyrolytic graphite thin plate, the suspension permanent magnet body, lower floor's pyrolytic graphite thin plate and lifting permanent magnet, upper strata pyrolytic graphite thin plate, suspension permanent magnet body and lower floor's pyrolytic graphite thin plate set gradually from top to down, be provided with spacing between upper strata pyrolytic graphite thin plate and suspension permanent magnet body, be provided with spacing between suspension permanent magnet body and lower floor's pyrolytic graphite thin plate, upper strata graphite thin plate and lower floor's graphite thin plate are fixed on the support, promoting permanent magnet is located on the support, upper strata pyrolytic graphite thin plate downside is provided with induction coil, lower floor's pyrolytic graphite thin plate upper side is provided with lower induction coil, the suspension permanent magnet body is suspended state between upper strata graphite thin plate and lower floor's graphite thin plate, should upper induction coil two ends with on draw wire and be electrically connected, lower induction coil two ends with under draw wire and be electrically connected, draw on this wire with under draw wire and be connected with the electric power storage loop.
Further, upper induction coil and lower induction coil are made of copper, upper induction coil is made in upper strata graphite thin plate downside by electroplating technology, and lower induction coil is made in lower floor's graphite thin plate upper side by electroplating technology, and upper induction coil and lower induction coil are helical coils.
Further, the induction coil and the lower induction coil is constituted by the metal bismuth, the induction coil and the lower induction coil is a helical coil.
Further, promote permanent magnet and be annular, the suspension permanent magnet body is in the form of annular discs.
Further, the suspension permanent magnet body is made of SmCo permanent magnet, NdFeB permanent magnet or CoNiMnP permanent magnet.
Further, suspension permanent magnet body diameter is 2mm, and thickness is 50～200 μ m.
The utility model utilizes the variation of magnetic flux in the induction coil to produce induced electromotive force, and then from coil output voltage, realizes the collection of vibrational energy.The utility model adopts permanent magnet as suspended substance in based on the vibration energy collector of MEMS, respectively be provided with up and down the diamagnetic material structure at permanent magnet, be provided with induction coil at diamagnetic material, in order better to realize the suspension of permanent magnet, also be provided with one in the above on diamagnetic material structure and promote permanent magnet, can guarantee effectively that the suspension permanent magnet body is suspended in up and down between two diamagnetic material thin plates.Like this, permanent magnet is suspended in up and down between two diamagnetic body structures when inactive state, under the ambient vibration effect, this permanent magnet can frictionally not move up and down, and then producing induced electromotive force in two induction coils up and down, by wire output, by the electric power storage loop this induced electromotive force is stored.
Description of drawings
Fig. 1 is that the utility model is based on the structural representation of the vibration energy collector of MEMS.
Fig. 2 is that the utility model is based on another structural representation of the vibration energy collector of MEMS.
Embodiment
Embodiment:
The utility model is described in further detail by embodiment below in conjunction with accompanying drawing.
As depicted in figs. 1 and 2, this vibration energy collector based on MEMS of the present utility model, in the present embodiment, wherein, this vibration energy collector comprises upper strata pyrolytic graphite thin plate 1, suspension permanent magnet body 2, lower floor's pyrolytic graphite thin plate 3 and lifting permanent magnet 4, upper strata pyrolytic graphite thin plate 1, suspension permanent magnet body 2 and lower floor's pyrolytic graphite thin plate 3 set gradually from top to down, be provided with spacing between upper strata pyrolytic graphite thin plate and suspension permanent magnet body, be provided with spacing between suspension permanent magnet body and lower floor's pyrolytic graphite thin plate, upper strata graphite thin plate 1 and lower floor's graphite thin plate 3 are fixed on the support, in order to stress to represent the structure of this vibration energy collector, support not shown in FIG., promoting permanent magnet 4 is located on the support, upper strata pyrolytic graphite thin plate 1 downside is provided with induction coil 5, lower floor's pyrolytic graphite thin plate 3 upper sides are provided with lower induction coil 6, the suspension permanent magnet body is suspended state between upper strata graphite thin plate and lower floor's graphite thin plate, should upper induction coil 5 two ends with on draw wire and be electrically connected, lower induction coil two ends with under draw wire and be electrically connected, draw on this wire with under draw wire and be connected with the electric power storage loop.Upper induction coil can by the via hole on the pyrolytic graphite thin plate of upper strata with on draw wire and be connected, lower induction coil can by the via hole on lower floor's pyrolytic graphite thin plate with under draw wire, this realizes on manufacture craft easily, in order to stress the structure of vibration energy collector, do not draw among the figure draw wire and under draw wire.Because the particularity of this structure, all be provided with up and down the pyrolytic graphite thin plate at the suspension permanent magnet body, pyrolytic graphite is the strongest material of diamagnetic characteristic under the existing normal temperature, when the close pyrolytic graphite thin plate of permanent magnet, the pyrolytic graphite thin plate is to the suspension permanent magnet thrust body, so the suspension permanent magnet body can be suspended in up and down between two pyrolytic graphite thin plates reliably in this organization plan; The effect that promotes permanent magnet is the height when regulating suspension permanent magnet body steady stability.
Further, upper induction coil 5 and lower induction coil 6 are made of copper, upper induction coil 5 is made in upper strata graphite thin plate 1 downside by electroplating technology, and lower induction coil 6 is made in lower floor's graphite thin plate 3 upper sides by electroplating technology, and upper induction coil 5 and lower induction coil 6 are helical coils.The resistivity of copper is very little, is more satisfactory electric conducting material, and this can reduce the heat waste in this vibration energy collector work; The technique of electro-coppering coil is maturation process in the MEMS manufacture craft simultaneously, and making easily cross section is the foursquare copper coil of about 10 microns of the length of sides.
Further, promote permanent magnet and be annular, the suspension permanent magnet body is in the form of annular discs, and the magnetic potential energy well that annular promotes the permanent magnet generation can make the automatic centering of disc suspension permanent magnet body.
Further, suspension permanent magnet body CoNiMnP permanent magnet consists of, in this structure we at first to select levitated magnet be the CoNiMnP permanent magnet, this permanent magnet can be made by electroplating technology.
Further, in order to reduce the weight of suspension permanent magnet body, suspension permanent magnet body diameter is chosen as 2mm, and thickness is 100 μ m, and the external diameter of upper induction coil and lower induction coil and the diameter of suspension permanent magnet body adapt.
Certainly, this structure also has other distortion.For example, the induction coil and the lower induction coil is constituted by the metal bismuth, the induction coil and the lower induction coil is a helical coil, the metal bismuth is diamagnetic material, which can further improve the bottom plate of graphite in suspension repulsive force of the permanent magnet, while the suspension up and down movement of permanent magnets, the metal bismuth can be induced electromotive force in the coil.The suspension permanent magnet body also can be by SmCo permanent magnet or NdFeB permanent magnet, and the magnetic property of this bi-material is stronger.Simultaneously, the thickness of suspension permanent magnet body between 50～200 μ m all can, according to the weight of suspension permanent magnet body, regulate to promote permanent magnet, to guarantee its reliable suspension.The suspension permanent magnet body also can be square plate, and this is that upper induction coil and lower induction coil adopt the square spiral coil proper.Promote permanent magnet and also can adopt other shape, its Main Function is the suspension that helps to realize the suspension permanent magnet body.
Claims (6)
1. vibration energy collector based on MEMS, it is characterized in that: this vibration energy collector comprises upper strata pyrolytic graphite thin plate, the suspension permanent magnet body, lower floor's pyrolytic graphite thin plate and lifting permanent magnet, upper strata pyrolytic graphite thin plate, suspension permanent magnet body and lower floor's pyrolytic graphite thin plate set gradually from top to down, be provided with spacing between upper strata pyrolytic graphite thin plate and suspension permanent magnet body, be provided with spacing between suspension permanent magnet body and lower floor's pyrolytic graphite thin plate, upper strata graphite thin plate and lower floor's graphite thin plate are fixed on the support, promoting permanent magnet is located on the support, upper strata pyrolytic graphite thin plate downside is provided with induction coil, lower floor's pyrolytic graphite thin plate upper side is provided with lower induction coil, the suspension permanent magnet body is suspended state between upper strata graphite thin plate and lower floor's graphite thin plate, should upper induction coil two ends with on draw wire and be electrically connected, lower induction coil two ends with under draw wire and be electrically connected, draw on this wire with under draw wire and be connected with the electric power storage loop.
2. the vibration energy collector based on MEMS as claimed in claim 1, it is characterized in that: upper induction coil and lower induction coil are made of copper, upper induction coil is made in upper strata graphite thin plate downside by electroplating technology, lower induction coil is made in lower floor's graphite thin plate upper side by electroplating technology, and upper induction coil and lower induction coil are helical coils.
3 as claimed in claim 1, wherein said MEMS-based vibration energy collector, characterized in that: the induction coil and the lower induction coil is constituted by the metal bismuth, the induction coil and the lower induction coil is a helical coil.
4. as claimed in claim 2 or claim 3 based on the vibration energy collector of MEMS, it is characterized in that: promote permanent magnet and be annular, the suspension permanent magnet body is in the form of annular discs.
5. the vibration energy collector based on MEMS as claimed in claim 4, it is characterized in that: the suspension permanent magnet body is made of SmCo permanent magnet, NdFeB permanent magnet or CoNiMnP permanent magnet.
6. the vibration energy collector based on MEMS as claimed in claim 5, it is characterized in that: suspension permanent magnet body diameter is 2mm, thickness is 50～200 μ m.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201220262675 CN202663271U (en) | 2012-06-06 | 2012-06-06 | Vibration energy collector based on micro electromechanical system (MEMS) |
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| CN 201220262675 CN202663271U (en) | 2012-06-06 | 2012-06-06 | Vibration energy collector based on micro electromechanical system (MEMS) |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102694452A (en) * | 2012-06-06 | 2012-09-26 | 郑州大学 | Micro-electro-mechanical system (MEMS)-based vibration energy acquisition device |
| CN105006994A (en) * | 2015-08-25 | 2015-10-28 | 东南大学 | Piezoelectric-electromagnetic hybrid MEMS vibration energy collector and preparation method thereof |
| CN105846647A (en) * | 2016-04-19 | 2016-08-10 | 中北大学 | Coil suspension-type vibration driving electromagnetic energy harvester |
| CN105846641A (en) * | 2016-04-19 | 2016-08-10 | 中北大学 | Magnet suspension-type vibration driving electromagnetic energy harvester |
| CN105915117A (en) * | 2016-04-19 | 2016-08-31 | 中北大学 | Friction-piezoelectricity-magnetoelectricity composite vibration miniature energy collector |
| CN108377110A (en) * | 2018-02-08 | 2018-08-07 | 郑州大学 | One kind is based on anti-maglev flowed energy collector |
| CN110034653A (en) * | 2019-05-14 | 2019-07-19 | 深圳市航天华拓科技有限公司 | Miniature diamagnetic suspension vibrating energy collecting device and acquisition method for rail traffic |
-
2012
- 2012-06-06 CN CN 201220262675 patent/CN202663271U/en not_active Expired - Fee Related
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102694452A (en) * | 2012-06-06 | 2012-09-26 | 郑州大学 | Micro-electro-mechanical system (MEMS)-based vibration energy acquisition device |
| CN105006994A (en) * | 2015-08-25 | 2015-10-28 | 东南大学 | Piezoelectric-electromagnetic hybrid MEMS vibration energy collector and preparation method thereof |
| CN105006994B (en) * | 2015-08-25 | 2017-04-19 | 东南大学 | Piezoelectric-electromagnetic hybrid MEMS vibration energy collector and preparation method thereof |
| CN105846647A (en) * | 2016-04-19 | 2016-08-10 | 中北大学 | Coil suspension-type vibration driving electromagnetic energy harvester |
| CN105846641A (en) * | 2016-04-19 | 2016-08-10 | 中北大学 | Magnet suspension-type vibration driving electromagnetic energy harvester |
| CN105915117A (en) * | 2016-04-19 | 2016-08-31 | 中北大学 | Friction-piezoelectricity-magnetoelectricity composite vibration miniature energy collector |
| CN105846647B (en) * | 2016-04-19 | 2019-01-04 | 中北大学 | Coil floating type vibratory drive electromagnetic energy harvester |
| CN105846641B (en) * | 2016-04-19 | 2019-01-04 | 中北大学 | Magnet floating type vibratory drive electromagnetic energy harvester |
| CN108377110A (en) * | 2018-02-08 | 2018-08-07 | 郑州大学 | One kind is based on anti-maglev flowed energy collector |
| CN108377110B (en) * | 2018-02-08 | 2020-02-07 | 郑州大学 | Airflow energy collector based on anti-magnetic suspension |
| CN110034653A (en) * | 2019-05-14 | 2019-07-19 | 深圳市航天华拓科技有限公司 | Miniature diamagnetic suspension vibrating energy collecting device and acquisition method for rail traffic |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130109 Termination date: 20140606 |