CN106887375B - Ion source discharge module and its working method - Google Patents
Ion source discharge module and its working method Download PDFInfo
- Publication number
- CN106887375B CN106887375B CN201611268725.4A CN201611268725A CN106887375B CN 106887375 B CN106887375 B CN 106887375B CN 201611268725 A CN201611268725 A CN 201611268725A CN 106887375 B CN106887375 B CN 106887375B
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- CN
- China
- Prior art keywords
- outer diameter
- ion source
- smaller portions
- quartz ampoule
- diameter smaller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000000034 method Methods 0.000 title claims abstract description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 42
- 239000000919 ceramic Substances 0.000 claims abstract description 41
- 239000011521 glass Substances 0.000 claims abstract description 37
- 239000010453 quartz Substances 0.000 claims abstract description 35
- 239000003708 ampul Substances 0.000 claims abstract description 34
- 150000002500 ions Chemical class 0.000 claims description 23
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical group [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 6
- 230000007704 transition Effects 0.000 claims description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims description 2
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 229910000833 kovar Inorganic materials 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 239000011733 molybdenum Substances 0.000 claims description 2
- 229910052758 niobium Inorganic materials 0.000 claims description 2
- 239000010955 niobium Substances 0.000 claims description 2
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 239000004332 silver Substances 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 239000004575 stone Substances 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 229910052573 porcelain Inorganic materials 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000013467 fragmentation Methods 0.000 description 2
- 238000006062 fragmentation reaction Methods 0.000 description 2
- 229920000715 Mucilage Polymers 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electron Sources, Ion Sources (AREA)
- Gas-Filled Discharge Tubes (AREA)
Abstract
The present invention provides a kind of ion source discharge module and its working method, the ion source discharge module includes: ceramic tube, and the ceramic tube includes outer diameter major part and outer diameter smaller portions；Metalwork, the periphery of the outer diameter smaller portions is arranged in the metalwork, and links together with the outer diameter major part of the ceramic tube；The periphery of the outer diameter smaller portions is arranged in glass tube, the glass tube, and left side is connect with the metalwork, and right side connects quartz ampoule；The metalwork and glass tube and the outer diameter smaller portions it is outer it is intermarginal at a distance from be all larger than zero；Quartz ampoule, the quartz ampoule include internal diameter major part and internal diameter smaller portions, and the end of the internal diameter major part is connect with the right side of the glass tube；The quartz ampoule between the outer diameter smaller portions at a distance from be greater than zero.The present invention has good reliability, advantages of simple structure and simple.
Description
Technical field
The present invention relates to ion sources, in particular to ion source discharge module and its working method.
Background technique
Ceramic part in ion source discharge module and quartz glass tube need to seal assembly, prevent electric discharge rare gas from
Quartz glass tube outer surface is leaked into when ceramic part passes through, in order to avoid directly discharge with high-field electrode, to cause gas and energy
The Unexpected Losses of amount eventually lead to ion beam intensity not enough and bad stability.Currently, the technology solved mainly has:
1. high temperature mucilage binding technology: requiring gelatinous technique very high, it is also necessary to consider different materials in ultra-high temperature
Problem of stress concentration under (700 degrees centigrade).
2. a sealing technology: using the material of close thermal expansion coefficient, but for ceramic member and quartz glass this two
The material thermal expansion coefficient of kind difference an order of magnitude, and can not effectively be solved under applied at elevated temperature environment.
Summary of the invention
To solve the deficiency in above-mentioned prior art, the present invention provides a kind of good reliability, high temperature resistant, structure letters
Single ion source discharge module.
The purpose of the present invention is what is be achieved through the following technical solutions:
A kind of ion source discharge module；The ion source discharge module includes:
Ceramic tube, the ceramic tube include outer diameter major part and outer diameter smaller portions；
Metalwork, the metalwork are arranged in the periphery of the outer diameter smaller portions, and with the outer diameter of the ceramic tube compared with
Major part links together；
The periphery of the outer diameter smaller portions is arranged in glass tube, the glass tube, and left side is connect with the metalwork, right
Side connects quartz ampoule；The metalwork and glass tube and the outer diameter smaller portions it is outer it is intermarginal at a distance from be all larger than zero.
Quartz ampoule, the quartz ampoule include internal diameter major part and internal diameter smaller portions, the end of the internal diameter major part
Portion is connect with the right side of the glass tube；The quartz ampoule between the outer diameter smaller portions at a distance from be greater than zero.
The object of the invention is also to provide a kind of working method of above-mentioned ion source discharge module, the goal of the invention is logical
Following technical scheme is crossed to be achieved:
According to the working method of above-mentioned ion source discharge module, the working method are as follows:
Discharge gas flows successively through the inside of the ceramic tube, quartz ampoule, and the part of discharge gas enters ceramic tube, metal
In the space for the relative closure that part, glass tube, quartz ampoule surround, the interconnection of ceramic tube, metalwork, glass tube, quartz ampoule
The temperature at place is less than the temperature of discharge gas in the quartz ampoule.
Compared with prior art, the device have the advantages that are as follows:
1. the present invention is provided with transition member between ceramic tube resistant to high temperature and quartz ampoule, ceramic member-ceramic member is formed
With metal sealing face-metal-metal and simple glass pipe sealing surface-simple glass pipe-simple glass pipe and variable diameter quartz glass
Pipe sealing surface-variable diameter quartz glass tube structure prevents fragmentation problem caused by stress is excessively concentrated occur in junction；
From the point of view of external thermaltransmission mode, so that the temperature of junction will be much smaller than the temperature of quartzy bore smaller portions
Degree (outside is under room temperature environment), so that heatproof intensity > actual work temperature of junction, ensure that the reliability of connection,
Reduce the heatproof requirement of metalwork, glass tube；
Inner space is divided into 2 parts: the free air space in ceramic tube and quartzy bore small parts, and by ceramics
What pipe, metalwork, glass tube, quartz ampoule surrounded is in the relative closure that the free air space is peripheral and is connected to free air space
Space, most high-temperature gas first flows into metastable free air space, completes most of heat with ceramic tube, quartz ampoule
The exchange of amount, then fraction high-temperature gas flows into the space 9-10 of the relative closure, the poor fluidity of gas in the space,
Wherein the mobility of gas is worst in space 9, and generated heat transfer will be much smaller than direct heat transfer, so that the temperature of each junction
Degree is less than the temperature of temperature and ceramic tube and quartzy bore smaller portions in free air space, to improve connection
Reliability；
2. structure is simple, compact.
Detailed description of the invention
Referring to attached drawing, the disclosure of the present invention will become more readily understood.Skilled addressee readily understands that: this
It is only used to illustrate the technical scheme of the present invention for a little attached drawings, and is not intended to limit the scope of protection of the present invention.
In figure:
Fig. 1 is the structure diagram of according to embodiments of the present invention 1 ion source discharge module.
Specific embodiment
Fig. 1 and following description describe optional embodiment of the invention with instruct those skilled in the art how to implement and
Reproduce the present invention.In order to teach the technical scheme of the invention, it has simplified or omitted some conventional aspects.Those skilled in the art answer
The variation or replacement that the understanding is originated from these embodiments will within the scope of the invention.Under those skilled in the art should understand that
Stating feature can combine in various ways to form multiple modifications of the invention.The invention is not limited to following optional as a result,
Embodiment, and be only limited by the claims and their equivalents.
Embodiment 1:
Fig. 1 schematically illustrates the structure diagram of the ion source discharge module of the embodiment of the present invention, as shown in Figure 1, institute
Stating ion source discharge module includes:
Ceramic tube 1, such as high-purity type aluminium oxide ceramics, 99 porcelain, 95 porcelain, 90 porcelain or 85 porcelain, the ceramic tube include outer diameter compared with
Most of and outer diameter smaller portions；
The outer of the outer diameter smaller portions is arranged in metalwork 2, such as silver, molybdenum, niobium, tantalum or kovar alloy, the metalwork
It encloses, and links together with the outer diameter major part of the ceramic tube；
Glass tube 3, using simple glass, the periphery of the outer diameter smaller portions, left side and institute is arranged in the glass tube
Metalwork connection is stated, right side connects quartz ampoule；The metalwork and glass tube and the outer diameter smaller portions it is outer it is intermarginal away from
From being all larger than zero；
Quartz ampoule 4, such as quartz glass tube, the quartz ampoule includes internal diameter major part and internal diameter smaller portions, it is described in
The end of diameter major part is connect with the right side of the glass tube, and the part of internal diameter major part is covered in the outer diameter smaller portions
Periphery；The internal diameter of internal diameter smaller portions is identical as the internal diameter of the ceramic tube, and the central axis of ceramic tube and quartz ampoule is total
Line；The outer diameter of the internal diameter smaller portions is less than the internal diameter of the internal diameter major part；The quartz ampoule and the outer diameter are smaller
Distance between part is greater than zero, and the ceramic tube, metalwork, glass tube, quartz ampoule are surrounded in 11 periphery of free air space
And the space 9-10 of relative closure that is connected to free air space；
From ceramic tube, metalwork, glass tube to quartz ampoule, thermal expansion coefficient gradually transition forms ceramic member 1- ceramic member
With metal joint face 6- metal 2- metal and simple glass pipe joint face 7- simple glass pipe 3- simple glass pipe and variable diameter quartz
The structure of glass tube joint face 8- variable diameter quartz glass tube 4, prevents fragmentation caused by stress is excessively concentrated occur in junction
Problem.
The working method of the above-mentioned ion source discharge module of the embodiment of the present invention, the working method are as follows:
Discharge gas flows successively through the inside of the ceramic tube, quartz ampoule, and the part of discharge gas enters ceramic tube, metal
In the space for the relative closure that part, glass tube, quartz ampoule surround, the interconnection of ceramic tube, metalwork, glass tube, quartz ampoule
The temperature at place is less than the temperature of discharge gas in the quartz ampoule；The temperature of the discharge gas is more than 680 degree.
Claims (10)
1. a kind of ion source discharge module；It is characterized by: the ion source discharge module includes:
Ceramic tube, the ceramic tube include outer diameter major part and outer diameter smaller portions；
Metalwork, the metalwork are arranged in the periphery of the outer diameter smaller portions, and with the larger portion of the outer diameter of the ceramic tube
Divide and links together；
The periphery of the outer diameter smaller portions is arranged in glass tube, the glass tube, and left side is connect with the metalwork, and right side connects
Connect quartz ampoule；The metalwork and glass tube and the outer diameter smaller portions it is outer it is intermarginal at a distance from be all larger than zero；
Quartz ampoule, the quartz ampoule include internal diameter major part and internal diameter smaller portions, the end of the internal diameter major part with
The right side of the glass tube connects；The quartz ampoule between the outer diameter smaller portions at a distance from be greater than zero.
2. ion source discharge module according to claim 1, it is characterised in that: from ceramic tube, metalwork, glass tube to stone
Ying Guan, thermal expansion coefficient gradually transition.
3. ion source discharge module according to claim 2, it is characterised in that: the ceramic tube is aluminium oxide ceramics.
4. ion source discharge module according to claim 2, it is characterised in that: the metalwork be silver, molybdenum, niobium, tantalum or
Kovar alloy.
5. ion source discharge module according to claim 1, it is characterised in that: the internal diameter of the outer diameter smaller portions with it is interior
The internal diameter of diameter smaller portions is identical.
6. ion source discharge module according to claim 1, it is characterised in that: the outer diameter of the internal diameter smaller portions is less than
The internal diameter of the internal diameter major part.
7. ion source discharge module according to claim 1, it is characterised in that: the part of the internal diameter major part covers
The periphery of the outer diameter smaller portions.
8. ion source discharge module according to claim 1, it is characterised in that: the glass tube is simple glass.
9. the working method of -8 any ion source discharge modules according to claim 1, the working method are as follows:
Most of discharge gas flows successively through the inside of the ceramic tube, quartz ampoule, and fraction discharge gas enters ceramic tube, gold
In the space for belonging to the relative closure that part, glass tube, quartz ampoule surround, the mutually interconnection of ceramic tube, metalwork, glass tube, quartz ampoule
The temperature for meeting place is less than the temperature of discharge gas in the quartz ampoule.
10. working method according to claim 9, it is characterised in that: the temperature of the discharge gas is more than 680 degree.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611268725.4A CN106887375B (en) | 2016-12-31 | 2016-12-31 | Ion source discharge module and its working method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611268725.4A CN106887375B (en) | 2016-12-31 | 2016-12-31 | Ion source discharge module and its working method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106887375A CN106887375A (en) | 2017-06-23 |
| CN106887375B true CN106887375B (en) | 2019-03-05 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611268725.4A Active CN106887375B (en) | 2016-12-31 | 2016-12-31 | Ion source discharge module and its working method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106887375B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108428607A (en) * | 2017-12-31 | 2018-08-21 | 宁波大学 | Ion source with temperature controlling function and its working method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2760753Y (en) * | 2004-12-09 | 2006-02-22 | 中国科学院合肥物质科学研究院 | ultrahigh vacuum gas ionization device |
| CN103236394A (en) * | 2013-04-17 | 2013-08-07 | 四川大学 | Microwave plasma based atmospheric pressure desorption ion source and application thereof |
| CN206441695U (en) * | 2016-12-31 | 2017-08-25 | 宁波华仪宁创智能科技有限公司 | ion source discharge module |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE112005000696B4 (en) * | 2004-03-29 | 2017-05-24 | Waters Technologies Corp. (N.D.Ges.D. Staates Delaware) | Capillary emitter for electrospray mass spectrometry |
| JP5321234B2 (en) * | 2009-05-15 | 2013-10-23 | 日新イオン機器株式会社 | Ion source |
| JP2014139889A (en) * | 2013-01-21 | 2014-07-31 | Sumitomo Heavy Ind Ltd | Microwave ion source and plasma chamber |
| JP6282180B2 (en) * | 2014-06-05 | 2018-02-21 | 住友重機械工業株式会社 | Microwave ion source and ion generation method |
-
2016
- 2016-12-31 CN CN201611268725.4A patent/CN106887375B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2760753Y (en) * | 2004-12-09 | 2006-02-22 | 中国科学院合肥物质科学研究院 | ultrahigh vacuum gas ionization device |
| CN103236394A (en) * | 2013-04-17 | 2013-08-07 | 四川大学 | Microwave plasma based atmospheric pressure desorption ion source and application thereof |
| CN206441695U (en) * | 2016-12-31 | 2017-08-25 | 宁波华仪宁创智能科技有限公司 | ion source discharge module |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106887375A (en) | 2017-06-23 |
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| CP03 | Change of name, title or address |
Address after: West side of 1st floor, 1st floor, Building A, No. 288 Jingu Middle Road (East), Yinzhou District, Ningbo City, Zhejiang Province, 315000 Patentee after: CHINA INNOVATION INSTRUMENT Co.,Ltd. Country or region after: China Patentee after: Ningbo University Address before: Room 304, D Building, Kexin Building, 655 Xueshi Road, Yinzhou District, Ningbo City, Zhejiang Province, 315000 Patentee before: CHINA INNOVATION INSTRUMENT Co.,Ltd. Country or region before: China Patentee before: Ningbo University |
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