CN106887375A - Ion source discharge module and its method of work - Google Patents
Ion source discharge module and its method of work Download PDFInfo
- Publication number
- CN106887375A CN106887375A CN201611268725.4A CN201611268725A CN106887375A CN 106887375 A CN106887375 A CN 106887375A CN 201611268725 A CN201611268725 A CN 201611268725A CN 106887375 A CN106887375 A CN 106887375A
- Authority
- CN
- China
- Prior art keywords
- external diameter
- ion source
- smaller portions
- earthenware
- glass tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 42
- 239000011521 glass Substances 0.000 claims abstract description 37
- 239000010453 quartz Substances 0.000 claims abstract description 35
- 239000003708 ampul Substances 0.000 claims abstract description 34
- 229910052571 earthenware Inorganic materials 0.000 claims abstract description 31
- 150000002500 ions Chemical class 0.000 claims description 23
- 239000000919 ceramic Substances 0.000 claims description 10
- 229910052573 porcelain Inorganic materials 0.000 claims description 8
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical group [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 6
- 230000007704 transition Effects 0.000 claims description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims description 2
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 229910000833 kovar Inorganic materials 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 239000011733 molybdenum Substances 0.000 claims description 2
- 229910052758 niobium Inorganic materials 0.000 claims description 2
- 239000010955 niobium Substances 0.000 claims description 2
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 239000004332 silver Substances 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- 239000004575 stone Substances 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 238000007789 sealing Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 230000001603 reducing effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000013467 fragmentation Methods 0.000 description 2
- 238000006062 fragmentation reaction Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229920000715 Mucilage Polymers 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electron Sources, Ion Sources (AREA)
- Gas-Filled Discharge Tubes (AREA)
Abstract
The invention provides a kind of ion source discharge module and its method of work, the ion source discharge module includes：Earthenware, the earthenware includes external diameter major part and external diameter smaller portions；Metalwork, the metalwork is arranged on the periphery of the external diameter smaller portions, and is linked together with the external diameter major part of the earthenware；Glass tube, the glass tube is arranged on the periphery of the external diameter smaller portions, and left side is connected with the metalwork, right side connection quartz ampoule；The metalwork and glass tube are all higher than zero with the outer intermarginal distance of the external diameter smaller portions；Quartz ampoule, the quartz ampoule includes internal diameter major part and internal diameter smaller portions, and the end of the internal diameter major part is connected with the right side of the glass tube；Distance between the quartz ampoule and the external diameter smaller portions is more than zero.The present invention has good reliability, advantages of simple structure and simple.
Description
Technical field
The present invention relates to ion gun, more particularly to ion source discharge module and its method of work.
Background technology
Ceramic part in ion source discharge module needs sealing assembling with quartz glass tube, prevent electric discharge rare gas from
Ceramic part by when leak into quartz glass tube outer surface, in order to avoid directly discharged with high-field electrode, so as to cause gas and energy
The Unexpected Losses of amount, ultimately result in ion beam intensity not enough and bad stability.At present, the technology of solution mainly has：
1. high temperature mucilage binding technology：It is very high to gluey technological requirement, in addition it is also necessary to consider different materials in ultra-high temperature
Problem of stress concentration under (700 degrees centigrade).
2. a sealing technology：Using the material of close thermal coefficient of expansion, but for ceramic member and quartz glass this two
The material thermal expansion coefficient of difference an order of magnitude is planted, and cannot effectively be solved under applied at elevated temperature environment.
The content of the invention
To solve the deficiency in above-mentioned prior art, the invention provides a kind of good reliability, high temperature resistant, structure letter
Single ion source discharge module.
The purpose of the present invention is achieved through the following technical solutions：
A kind of ion source discharge module；The ion source discharge module includes：
Earthenware, the earthenware includes external diameter major part and external diameter smaller portions；
Metalwork, the metalwork is arranged on the periphery of the external diameter smaller portions, and with the external diameter of the earthenware compared with
Major part links together；
Glass tube, the glass tube is arranged on the periphery of the external diameter smaller portions, and left side is connected with the metalwork, right
Side connects quartz ampoule；The metalwork and glass tube are all higher than zero with the outer intermarginal distance of the external diameter smaller portions.
Quartz ampoule, the quartz ampoule includes internal diameter major part and internal diameter smaller portions, the end of the internal diameter major part
Portion is connected with the right side of the glass tube；Distance between the quartz ampoule and the external diameter smaller portions is more than zero.
The present invention also aims to provide a kind of method of work of above-mentioned ion source discharge module, the goal of the invention is led to
Following technical scheme is crossed to be achieved：
According to the method for work of above-mentioned ion source discharge module, the method for work is：
Discharge gas flows successively through the inside of the earthenware, quartz ampoule, and the part of discharge gas enters earthenware, metal
In the space of the relative closure that part, glass tube, quartz ampoule are surrounded, earthenware, metalwork, glass tube, the interconnection of quartz ampoule
Temperature of the temperature at place less than discharge gas in the quartz ampoule.
Compared with prior art, the device have the advantages that being：
1. the present invention is provided with transition member between resistant to elevated temperatures earthenware and quartz ampoule, forms ceramic member-ceramic member
With metal sealing face-metal-metal and simple glass pipe sealing surface-simple glass pipe-simple glass pipe and reducing quartz glass
The structure of pipe sealing surface-reducing quartz glass tube, prevents fragmentation problem caused by stress is excessively concentrated occur in junction；
From the point of view of outside thermaltransmission mode so that the temperature of junction will be much smaller than the temperature of quartzy bore smaller portions
Degree (outside is under room temperature environment) so that the heatproof intensity of junction>Actual work temperature, it is ensured that the reliability of connection,
Reduce the heatproof requirement of metalwork, glass tube；
Inner space is divided into 2 parts：Free air space in earthenware and quartzy bore small parts, and by ceramics
The relative closure that is in free air space periphery and being connected with free air space that pipe, metalwork, glass tube, quartz ampoule are surrounded
Space, most high-temperature gas first flows into metastable free air space, and most of heat is completed with earthenware, quartz ampoule
The exchange of amount, then fraction high-temperature gas flow into the space 9-10 of the relative closure, the poor fluidity of gas in the space,
Wherein the mobility of gas is worst in space 9, and produced heat transfer will be much smaller than direct heat transfer so that the temperature of each junction
Degree less than the temperature in free air space, and earthenware and quartzy bore smaller portions temperature, so as to improve connection
Reliability；
2. simple structure, compact.
Brief description of the drawings
Referring to the drawings, the disclosure will be easier to understand.Skilled addressee readily understands that be：This
A little accompanying drawings are used only for illustrating technical scheme, and are not intended to be construed as limiting protection scope of the present invention.
In figure：
Fig. 1 is the structure diagram of according to embodiments of the present invention 1 ion source discharge module.
Specific embodiment
Fig. 1 and following description describe optional embodiment of the invention with instruct those skilled in the art how to implement and
Reproduce the present invention.In order to instruct technical solution of the present invention, some conventional aspects are simplified or have eliminated.Those skilled in the art should
The understanding is derived from the modification of these implementation methods or replacement will within the scope of the invention.Those skilled in the art should understand that under
Stating feature can combine to form multiple modifications of the invention in a variety of ways.Thus, the invention is not limited in following optional
Implementation method, and only limited by claim and their equivalent.
Embodiment 1：
Fig. 1 schematically illustrates the structure diagram of the ion source discharge module of the embodiment of the present invention, as shown in figure 1, institute
Stating ion source discharge module includes：
Earthenware 1, such as high-purity type aluminium oxide ceramics, 99 porcelain, 95 porcelain, 90 porcelain or 85 porcelain, the earthenware include external diameter compared with
Most of and external diameter smaller portions；
Metalwork 2, such as silver, molybdenum, niobium, tantalum or kovar alloy, the metalwork are arranged on the outer of the external diameter smaller portions
Enclose, and linked together with the external diameter major part of the earthenware；
Glass tube 3, using simple glass, the glass tube is arranged on the periphery of the external diameter smaller portions, left side and institute
State metalwork connection, right side connection quartz ampoule；The metalwork and glass tube and the external diameter smaller portions it is outer intermarginal away from
From being all higher than zero；
Quartz ampoule 4, such as quartz glass tube, the quartz ampoule include internal diameter major part and internal diameter smaller portions, described interior
The end of footpath major part is connected with the right side of the glass tube, and the part of internal diameter major part is enclosed within the external diameter smaller portions
Periphery；The internal diameter of internal diameter smaller portions is identical with the internal diameter of the earthenware, and the central axis of earthenware and quartz ampoule is total to
Line；Internal diameter of the external diameter of the internal diameter smaller portions less than the internal diameter major part；The quartz ampoule is smaller with the external diameter
Distance between part is more than zero, and the earthenware, metalwork, glass tube, quartz ampoule are surrounded in the periphery of the free air space 11
And the space 9-10 of relative closure that is connected with free air space；
From earthenware, metalwork, glass tube to quartz ampoule, thermal coefficient of expansion progressively transition forms ceramic member 1- ceramic members
With metal joint face 6- metal 2- metals and simple glass pipe joint face 7- simple glass pipe 3- simple glasses pipes and reducing quartz
The structure of glass tube joint face 8- reducings quartz glass tube 4, prevents fragmentation caused by stress is excessively concentrated occur in junction
Problem.
The method of work of the above-mentioned ion source discharge module of the embodiment of the present invention, the method for work is：
Discharge gas flows successively through the inside of the earthenware, quartz ampoule, and the part of discharge gas enters earthenware, metal
In the space of the relative closure that part, glass tube, quartz ampoule are surrounded, earthenware, metalwork, glass tube, the interconnection of quartz ampoule
Temperature of the temperature at place less than discharge gas in the quartz ampoule；The temperature of the discharge gas is more than 680 degree.
Claims (10)
1. a kind of ion source discharge module；It is characterized in that：The ion source discharge module includes：
Earthenware, the earthenware includes external diameter major part and external diameter smaller portions；
Metalwork, the metalwork is arranged on the periphery of the external diameter smaller portions, and with the larger portion of the external diameter of the earthenware
Divide and link together；
Glass tube, the glass tube is arranged on the periphery of the external diameter smaller portions, and left side is connected with the metalwork, and right side connects
Connect quartz ampoule；The metalwork and glass tube are all higher than zero with the outer intermarginal distance of the external diameter smaller portions；
Quartz ampoule, the quartz ampoule include internal diameter major part and internal diameter smaller portions, the end of the internal diameter major part with
The right side connection of the glass tube；Distance between the quartz ampoule and the external diameter smaller portions is more than zero.
2. ion source discharge module according to claim 1, it is characterised in that：From earthenware, metalwork, glass tube to stone
Ying Guan, thermal coefficient of expansion progressively transition.
3. ion source discharge module according to claim 2, it is characterised in that：The earthenware is aluminium oxide ceramics, 99
Porcelain, 95 porcelain, 90 porcelain or 85 porcelain.
4. ion source discharge module according to claim 2, it is characterised in that：The metalwork be silver, molybdenum, niobium, tantalum or
Kovar alloy.
5. ion source discharge module according to claim 1, it is characterised in that：The internal diameter of the external diameter smaller portions with it is interior
The internal diameter of footpath smaller portions is identical.
6. ion source discharge module according to claim 1, it is characterised in that：The external diameter of the internal diameter smaller portions is less than
The internal diameter of the internal diameter major part.
7. ion source discharge module according to claim 1, it is characterised in that：The part of the internal diameter major part is enclosed within
The periphery of the external diameter smaller portions.
8. ion source discharge module according to claim 1, it is characterised in that：The glass tube is simple glass.
9., according to the method for work of any described ion source discharge modules of claim 1-8, the method for work is：
Discharge gas flows successively through the inside of the earthenware, quartz ampoule, the part of discharge gas enter earthenware, metalwork,
In the space of the relative closure that glass tube, quartz ampoule are surrounded, earthenware, metalwork, glass tube, at the interconnection of quartz ampoule
Temperature of the temperature less than discharge gas in the quartz ampoule.
10. method of work according to claim 9, it is characterised in that：The temperature of the discharge gas is more than 680 degree.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611268725.4A CN106887375B (en) | 2016-12-31 | 2016-12-31 | Ion source discharge module and its working method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611268725.4A CN106887375B (en) | 2016-12-31 | 2016-12-31 | Ion source discharge module and its working method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106887375A true CN106887375A (en) | 2017-06-23 |
| CN106887375B CN106887375B (en) | 2019-03-05 |
Family
ID=59176675
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611268725.4A Active CN106887375B (en) | 2016-12-31 | 2016-12-31 | Ion source discharge module and its working method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106887375B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108428607A (en) * | 2017-12-31 | 2018-08-21 | 宁波大学 | Ion source with temperature controlling function and its working method |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2760753Y (en) * | 2004-12-09 | 2006-02-22 | 中国科学院合肥物质科学研究院 | ultrahigh vacuum gas ionization device |
| US20070267293A1 (en) * | 2004-03-29 | 2007-11-22 | Waters Investments Limited | Capillary Emitter for Electrospray Mass Spectrometry |
| JP2010267504A (en) * | 2009-05-15 | 2010-11-25 | Nissin Ion Equipment Co Ltd | Ion source |
| CN103236394A (en) * | 2013-04-17 | 2013-08-07 | 四川大学 | Microwave plasma based atmospheric pressure desorption ion source and application thereof |
| JP2014139889A (en) * | 2013-01-21 | 2014-07-31 | Sumitomo Heavy Ind Ltd | Microwave ion source and plasma chamber |
| JP2015230832A (en) * | 2014-06-05 | 2015-12-21 | 住友重機械工業株式会社 | Microwave ion source, and ion generating method |
| CN206441695U (en) * | 2016-12-31 | 2017-08-25 | 宁波华仪宁创智能科技有限公司 | ion source discharge module |
-
2016
- 2016-12-31 CN CN201611268725.4A patent/CN106887375B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070267293A1 (en) * | 2004-03-29 | 2007-11-22 | Waters Investments Limited | Capillary Emitter for Electrospray Mass Spectrometry |
| CN2760753Y (en) * | 2004-12-09 | 2006-02-22 | 中国科学院合肥物质科学研究院 | ultrahigh vacuum gas ionization device |
| JP2010267504A (en) * | 2009-05-15 | 2010-11-25 | Nissin Ion Equipment Co Ltd | Ion source |
| JP2014139889A (en) * | 2013-01-21 | 2014-07-31 | Sumitomo Heavy Ind Ltd | Microwave ion source and plasma chamber |
| CN103236394A (en) * | 2013-04-17 | 2013-08-07 | 四川大学 | Microwave plasma based atmospheric pressure desorption ion source and application thereof |
| JP2015230832A (en) * | 2014-06-05 | 2015-12-21 | 住友重機械工業株式会社 | Microwave ion source, and ion generating method |
| CN206441695U (en) * | 2016-12-31 | 2017-08-25 | 宁波华仪宁创智能科技有限公司 | ion source discharge module |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108428607A (en) * | 2017-12-31 | 2018-08-21 | 宁波大学 | Ion source with temperature controlling function and its working method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106887375B (en) | 2019-03-05 |
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| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
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Address after: West side of 1st floor, 1st floor, Building A, No. 288 Jingu Middle Road (East), Yinzhou District, Ningbo City, Zhejiang Province, 315000 Patentee after: CHINA INNOVATION INSTRUMENT Co.,Ltd. Country or region after: China Patentee after: Ningbo University Address before: Room 304, D Building, Kexin Building, 655 Xueshi Road, Yinzhou District, Ningbo City, Zhejiang Province, 315000 Patentee before: CHINA INNOVATION INSTRUMENT Co.,Ltd. Country or region before: China Patentee before: Ningbo University |
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