CN106881029A - Manual-automatic integral gaseous mixture configures system - Google Patents

Manual-automatic integral gaseous mixture configures system Download PDF

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Publication number
CN106881029A
CN106881029A CN201710141378.7A CN201710141378A CN106881029A CN 106881029 A CN106881029 A CN 106881029A CN 201710141378 A CN201710141378 A CN 201710141378A CN 106881029 A CN106881029 A CN 106881029A
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CN
China
Prior art keywords
gas circuit
gas
valve
component
gaseous mixture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201710141378.7A
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Chinese (zh)
Other versions
CN106881029B (en
Inventor
夏红真
华承贺
邵艳龙
王云龙
乔晓梅
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Dalian Special Gas Industry Co
Xinjiang Date Gas Co ltd
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Dalian Great Te Gas Co Ltd
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Priority to CN201710141378.7A priority Critical patent/CN106881029B/en
Publication of CN106881029A publication Critical patent/CN106881029A/en
Application granted granted Critical
Publication of CN106881029B publication Critical patent/CN106881029B/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/10Mixing gases with gases
    • B01F23/19Mixing systems, i.e. flow charts or diagrams; Arrangements, e.g. comprising controlling means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20Measuring; Control or regulation
    • B01F35/21Measuring
    • B01F35/211Measuring of the operational parameters
    • B01F35/2113Pressure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20Measuring; Control or regulation
    • B01F35/22Control or regulation
    • B01F35/221Control or regulation of operational parameters, e.g. level of material in the mixer, temperature or pressure
    • B01F35/2214Speed during the operation
    • B01F35/22141Speed of feeding of at least one component to be mixed
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17DPIPE-LINE SYSTEMS; PIPE-LINES
    • F17D1/00Pipe-line systems
    • F17D1/02Pipe-line systems for gases or vapours
    • F17D1/04Pipe-line systems for gases or vapours for distribution of gas
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17DPIPE-LINE SYSTEMS; PIPE-LINES
    • F17D3/00Arrangements for supervising or controlling working operations
    • F17D3/01Arrangements for supervising or controlling working operations for controlling, signalling, or supervising the conveyance of a product

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)

Abstract

Manual-automatic integral gaseous mixture disclosed by the invention configures system, can allow operating personnel according to actual conditions(The size of addition)Selection gas circuit, when addition is relatively small, may be selected the gas circuit with mass flowmenter, and due to the control of mass flowmenter so that the component of addition is influenceed small by extraneous factor, configuration concentration scope is big, and value is accurate;If addition is relatively large, directly can be conveyed by another road gas circuit, to reach time saving purpose;Directly be placed on the gaseous mixture gas cylinder of finished product on electronic balance by the system, can reduce and, to the disassembling section of gas cylinder, error be reduced, while the abrasion for gas cylinder can also be reduced due to weighing needs during gas configuration, the operating time is saved, operating efficiency is improved;Most importantly, it can allow operating personnel as needed manually operated and switch between being automatically brought into operation.

Description

Manual-automatic integral gaseous mixture configures system
Technical field
The present invention relates to a kind of gaseous mixture configuration system, particularly a kind of manual-automatic integral gaseous mixture configuration system.
Background technology
With determining to constitute, the accurate mixed gas of value can be used as a kind of measurement instrument.As in extensive standard substance Gas reference material, be widely used in the fields such as petrochemical industry, Medical Devices, environmental monitoring, electronics technology.With science and technology Development, the continuous improvement of product quality in industrial production, control of product quality is stricter, and this is accomplished by the calibrating gas for using With precision higher, Stability and veracity.Therefore, there is higher wanting for the precision and performance of Gas Mixture Preparation device Ask.
The preparation of gaseous mixture mainly has two kinds of static volumetric method and Devince By Dynamic Gas Ration Method.Static volumetric method is by gaseous feed gas It is filled into the container of known volume, is re-filled with Balance Air, is mixed using gas diffusion, or carry out mechanical mixing.Static state is matched somebody with somebody Gas method can not meet the production of the gaseous mixture of large usage quantity;Devince By Dynamic Gas Ration Method is to mix component gas in proportion with Balance Air, with Constant ratio is continuously filled with gas cylinder, realizes continuous preparation.Devince By Dynamic Gas Ration Method value accuracy is poor, and uncertainty is larger.
At present, gravimetric method prepares the main method that gaseous mixture is prepared as domestic gas.And, domestic gas prepares one As be artificial operation so that product varies with each individual, and substantially, uncertainty is relatively large, and stability is undesirable for difference in quality.It is external Better than the country, quality testing department or manufacturing enterprise are equipped with automatic production device to distribution technology.But expensive, complex operation, Domestic many enterprises cannot receive, so that can not extensive use.In order to reduce the gap of domestic and international gas preparation technique, state is improved Interior mixed gas quality, develops automated gas divider imperative.Larger, the Gong Renshi from the leap for being formulated into automatic production manually Answering property is poor, therefore it is particularly important to develop the air distributing device of manual-automatic integral.
The content of the invention
The present invention is, in order to solve the above-mentioned deficiency existing for prior art, to propose that one kind can operated manually and automatically Between switch over, can improve operating efficiency, save the manual-automatic integral gaseous mixture configuration system of labour cost.
Technical solution of the invention is:A kind of manual-automatic integral gaseous mixture configures system, it is characterised in that:Described System includes component gas circuit 1, and component gas cylinder 2 is connected with the air inlet end of component gas circuit 1, the outlet side of component gas circuit 1 simultaneously with First conveying gas circuit 3 is connected with the second conveying gas circuit 4, is disposed between the outlet side of component gas cylinder 2 and component gas circuit 1 Filter 5, needle valve 6 and component gas pneumatic diaphragm valve 7, are provided with the first pneumatic diaphragm valve 8, subtract in the first conveying gas circuit 3 Pressure valve 9, the pneumatic diaphragm valve 11 of mass flowmenter 10 and second, to be provided with ball valve 12 and the 3rd pneumatic in the second conveying gas circuit 4 Diaphragm valve 13, the outlet side of the first conveying conveying gas circuit 4 of gas circuit 3 and second is connected with outlet pipe 14 simultaneously, outlet pipe 14 On be provided with outlet pneumatic diaphragm valve 15, and the end of outlet pipe 14 is connected with gaseous mixture gas cylinder 16, described gaseous mixture Gas cylinder 16 is located on electronic balance 17,
Described system also includes spirit gas circuit 18, and filter 5, needle valve 6 and spirit gas are provided with the spirit gas circuit 18 Dynamic diaphragm valve 19, the setting being connected with spirit gas circuit 18 is known how things stand and feel confident and detects gas circuit 20, is provided with spirit detection gas circuit 20 Pressure sensor 21 and by pressure test valve 22 be connected to spirit detect gas circuit 20 on pressure gauge 23,
Outlet detection gas circuit 24 is connected with described outlet pipe 14, pressure sensor is provided with outlet detection gas circuit 24 21 and by pressure test valve 22 be connected to outlet detect gas circuit 24 on pressure gauge 23,
Gas exhaust piping 25 is connected with described component gas circuit 1, the exhaust He of pneumatic diaphragm valve 26 is provided with gas exhaust piping 25 Needle valve 27,
Vacuum line 28 is connected with described component gas circuit 1, vavuum pump 29, pressure sensor is provided with vacuum line 28 21st, ball valve 12 and Pneumatic vacuum diaphragm valve 30,
The gentle road 32 of taking offence of purging gas circuit 31 parallel with one another is also associated with described component gas circuit 1, in purging gas circuit 31 Pressure-reducing valve 9 is provided with, and ball valve 12 is then provided with pneumatic gas circuit 32, in purging gas circuit 31, pneumatic gas circuit 32 and component gas circuit 1 Connecting line on, be additionally provided with filter 5, needle valve 6 and pressure sensor 21.
The component gas circuit 1 and component gas cylinder 2 of described matching are between multiple, and a plurality of component gas circuit 1 mutually simultaneously Connection.
The present invention compared with the existing technology, has the following advantages that:
This kind of manual-automatic integral gaseous mixture configuration system of structure type, can allow operating personnel according to actual conditions(Addition Size)Selection gas circuit, when addition is relatively small, may be selected the gas circuit with mass flowmenter, due to mass flowmenter Control so that the component of addition is influenceed small by extraneous factor, and configuration concentration scope is big, and value is accurate;If added Amount is relatively large, then directly can be conveyed by another road gas circuit, to reach time saving purpose;The system directly will be into The gaseous mixture gas cylinder of product is placed on electronic balance, can be reduced during gas configuration because weighing needs to gas cylinder Disassembling section, reduces error, while the abrasion for gas cylinder can also be reduced, saves the operating time, improves operating efficiency;It is most main Want, it can allow operating personnel as needed manually operated and switch between being automatically brought into operation, and fully take into account On the premise of the actual conditions that China's gaseous mixture is filled, a kind of inexpensive, efficient automatic gaseous mixture configuration system is obtained, and And the system operatio is easy, and the present situation that domestic gaseous mixture is filled can be met completely, its market prospects is very wide.
Brief description of the drawings
Fig. 1 is the system composition figure of the embodiment of the present invention.
Specific embodiment
Below in conjunction with brief description of the drawings specific embodiment of the invention.As shown in Figure 1:A kind of manual-automatic integral gaseous mixture Configuration system, including component gas circuit 1, component gas cylinder 2, and the component gas circuit 1 for matching are connected with the air inlet end of component gas circuit 1 Multiple is with component gas cylinder 2, while parallel with one another between a plurality of component gas circuit 1;
The outlet side of all of component gas circuit 1 is connected with the first conveying conveying of gas circuit 3 and second gas circuit 4 simultaneously, in component gas Filter 5, needle valve 6 and component gas pneumatic diaphragm valve 7 are disposed between bottle 2 and the outlet side of component gas circuit 1, first The first pneumatic diaphragm valve 8, pressure-reducing valve 9, the pneumatic diaphragm valve 11 of mass flowmenter 10 and second are provided with conveying gas circuit 3, the The pneumatic diaphragm valve 13 of ball valve 12 and the 3rd is provided with two conveying gas circuits 4, the first conveying gas circuit 3 and second conveys going out for gas circuit 4 Gas end is connected with outlet pipe 14 simultaneously, is provided with outlet pneumatic diaphragm valve 15 on outlet pipe 14, and outlet pipe 14 end End is connected with gaseous mixture gas cylinder 16, and described gaseous mixture gas cylinder 16 is located on electronic balance 17,
Described system also includes spirit gas circuit 18, and filter 5, needle valve 6 and spirit gas are provided with the spirit gas circuit 18 Dynamic diaphragm valve 19, the setting being connected with spirit gas circuit 18 is known how things stand and feel confident and detects gas circuit 20, is provided with spirit detection gas circuit 20 Pressure sensor 21 and by pressure test valve 22 be connected to spirit detect gas circuit 20 on pressure gauge 23,
Outlet detection gas circuit 24 is connected with described outlet pipe 14, pressure sensor is provided with outlet detection gas circuit 24 21 and by pressure test valve 22 be connected to outlet detect gas circuit 24 on pressure gauge 23,
Gas exhaust piping 25 is connected with described component gas circuit 1, the exhaust He of pneumatic diaphragm valve 26 is provided with gas exhaust piping 25 Needle valve 27,
Vacuum line 28 is connected with described component gas circuit 1, vavuum pump 29, pressure sensor is provided with vacuum line 28 21st, ball valve 12 and Pneumatic vacuum diaphragm valve 30,
The gentle road 32 of taking offence of purging gas circuit 31 parallel with one another is also associated with described component gas circuit 1, in purging gas circuit 31 Pressure-reducing valve 9 is provided with, and ball valve 12 is then provided with pneumatic gas circuit 32, in purging gas circuit 31, pneumatic gas circuit 32 and component gas circuit 1 Connecting line on, be additionally provided with filter 5, needle valve 6 and pressure sensor 21;
Above-mentioned all of executing agency(Such as pneumatic diaphragm valve, vavuum pump, mass flowmenter, electronic balance)And detection means (Such as pressure gauge, pressure sensor)Unify to be controlled by control system.
The course of work of the manual-automatic integral gaseous mixture configuration system of the embodiment of the present invention is as follows:As needed, select not Same component gas cylinder 2, and by each component gas cylinder 2 one component gas circuit 1 of access, it is desirable to component gas cylinder 2 and connecting line Between silk mouthful matching, to meet the use requirement of phase of suppressing;
Pipeline first to the side of component gas cylinder 2 is vacuumized, and in the case of other valve closings, opens component gas circuit 1 On component gas pneumatic diaphragm valve 7 and needle valve 6, open vacuum line 28 on ball valve 12 and Pneumatic vacuum diaphragm valve 30, open Dynamic vavuum pump 29, the pipeline to the side of component gas cylinder 2 carries out vacuum pumping, and the pressure sensing on vacuum line 28 is observed at any time Device 21, after vacuum meets requirement, by the ball valve 12 on component gas pneumatic diaphragm valve 7, needle valve 6, vacuum line 28 and very Empty pneumatic diaphragm valve 30 is closed, and then opens the gas cylinder valve on component gas cylinder 2, is ready for filling;
Component gas pneumatic diaphragm valve 7 and needle valve 6 in component gas circuit 1 all the way are first turned on, the corresponding component of the gas circuit is conveyed Component gas in gas cylinder 2 is flowed into component gas circuit 1, if the input quantity of the component raw material gas is relatively small, less than in advance in control The reference point set in system processed, then open the first pneumatic diaphragm valve 8 and the second pneumatic diaphragm valve 11, and the component raw material gas leads to Cross the first conveying gas circuit 3 to be transported in outlet pipe 14, now the outlet pneumatic diaphragm valve 15 on outlet pipe 14 is opened, the group Unstripped gas is divided to be input in gaseous mixture gas cylinder 16, because mass flowmenter 10 can be accurately controlled gas flow, while electronics Balance 17 also can be in real time to gaseous mixture gas cylinder 16 gross mass detect, therefore a certain component raw material gas can be realized Accurate input;After input quantity needed for reaching, by the valve closing of above-mentioned participation work;
If the input quantity of the component raw material gas is relatively large, more than the reference point for setting in the controls in advance, then beat The 3rd pneumatic diaphragm valve 13 is opened, the component raw material gas is delivered directly in outlet pipe 14 by the second conveying gas circuit 4, is now gone out Outlet pneumatic diaphragm valve 15 on air pipe 14 is opened, and the component raw material gas is input in gaseous mixture gas cylinder 16, due to electronics day Equal 17 gross masses that can be in real time to gaseous mixture gas cylinder 16 to detect, therefore the fast of a certain component raw material gas can be realized Speed, accurate input;After input quantity needed for reaching, by the valve closing of above-mentioned participation work;
That is, when the input quantity of a certain component raw material gas is larger, selection second conveys gas circuit 4 and conveys, aid in electricity Sub- balance 17, it is possible to achieve the input of relatively accurate and quick component raw material gas;When the input quantity of a certain component raw material gas When smaller, selection first conveys gas circuit 4 and conveys, and mass flowmenter 10 can accurately control the flow of gas, so as to realize accurate Component raw material gas input;
When component raw material gas passes through from the first conveying conveying gas circuit 4 of gas circuit 3 or second, the pressure gauge in outlet detection gas circuit 24 23 pressure values that can detect the gas that will enter in outlet pipe 14, are easy to the actual conditions to the various pieces of the system Effectively grasped;
After all of component raw material gas is all according to corresponding mass input gaseous mixture gas cylinder 16, then by spirit gas circuit 18 to mixed Spirit is input into conjunction gas bottle 16(Generally nitrogen), the needle valve 6 and spirit pneumatic diaphragm valve 19 in spirit gas circuit 18 are opened Open, nitrogen is in entering outlet pipe 14, and eventually enter into gaseous mixture gas cylinder 16 after the filtering of filter 5;In the process, Spirit detection gas circuit 20 is detected to the vacuum and pressure value of the gas circuit at any time;Because electronic balance 17 can be right in real time The gross mass of gaseous mixture gas cylinder 16 is detected, therefore can realize quick, the accurate input of spirit;Reach required input quantity Afterwards, by the valve closing of above-mentioned participation work;Charge operation is completed, gaseous mixture gas cylinder 16 is torn open from outlet pipe 14 Under, a gaseous mixture gas cylinder 16 for sky is reconnected, wait is filled next time;
Before operation is filled next time, the outlet pneumatic diaphragm valve 15 on outlet pipe 14 is closed first, open blast pipe Exhaust pneumatic diaphragm valve 26 and needle valve 27 on road 25, will remain gas discharge in the present system everywhere, the row of being then shut off Gas pneumatic diaphragm valve 26 and needle valve 27, and open corresponding valve in the system, repeat it is above-mentioned vacuumize, be input into spirit, The processes such as finished product gas are input into respectively;
After end-of-job, using purging gas circuit 31 to nitrogen is blowed in the system each several part pipeline, purged online;
The filter 5 set everywhere in the system, can prevent the large granular impurity in gas from entering system, it is ensured that final to obtain Mixed gas purity level;
The pressure gauge 23 set everywhere in the system, can detect the pressure in corresponding pipeline, and pressure value is conveyed To control system, unified monitoring is carried out by control system, once noting abnormalities, control system can in time close related valve, Closing associated pipe, prevents gas from leaking;
The pressure sensor 21 set everywhere in the system, can detect the pressure and vacuum degree in corresponding pipeline, And testing result is conveyed to control system, and it is monitored by control system unification, once noting abnormalities, illustrate there may be and let out Leak source, control system can in time send alarm, remind operating personnel to be disposed;
In due to each pipeline of the present apparatus, it is substantially all while be configured with needle valve 6 and pneumatic diaphragm valve, wherein needle valve 6 It is available for operating personnel to control manually, and pneumatic diaphragm valve can be then driven using source of the gas, you can realize the switch of automation Operation(Pneumatic gas circuit 32 provides source of the gas for it), that is to say, that when all of pneumatic diaphragm valve keeps it turned on, by right The operation of each needle valve 6, it is possible to achieve the cylinder filling operation of manualization, when all of needle valve 6 is opened, using control System is controlled and associative operation to each pneumatic diaphragm valve, it is possible to achieve the cylinder filling operation of automation, that is to say, that The present apparatus can be automatically brought into operation and free switching is being carried out under manually operated both of which.

Claims (2)

1. a kind of manual-automatic integral gaseous mixture configures system, it is characterised in that:Described system includes component gas circuit(1), in group Divide gas circuit(1)Air inlet end be connected with component gas cylinder(2), component gas circuit(1)Outlet side simultaneously with first conveying gas circuit(3)With Second conveying gas circuit(4)It is connected, in component gas cylinder(2)With component gas circuit(1)Outlet side between be disposed with filter (5), needle valve(6)With component gas pneumatic diaphragm valve(7), gas circuit is conveyed first(3)On be provided with the first pneumatic diaphragm valve (8), pressure-reducing valve(9), mass flowmenter(10)With the second pneumatic diaphragm valve(11), gas circuit is conveyed second(4)On be provided with ball Valve(12)With the 3rd pneumatic diaphragm valve(13), the first conveying gas circuit(3)With the second conveying gas circuit(4)Outlet side simultaneously and outlet Pipeline(14)It is connected, outlet pipe(14)On be provided with outlet pneumatic diaphragm valve(15), and outlet pipe(14)End with it is mixed Close gas bottle(16)It is connected, described gaseous mixture gas cylinder(16)Positioned at electronic balance(17)On,
Described system also includes spirit gas circuit(18), the spirit gas circuit(18)On be provided with filter(5), needle valve(6) With spirit pneumatic diaphragm valve(19), with spirit gas circuit(18)The setting being connected is known how things stand and feel confident detection gas circuit(20), in spirit detection Gas circuit(20)On be provided with pressure sensor(21)With by pressure test valve(22)It is connected to spirit detection gas circuit(20)On Pressure gauge(23),
With described outlet pipe(14)It is connected with outlet detection gas circuit(24), gas circuit is detected in outlet(24)On be provided with pressure Sensor(21)With by pressure test valve(22)It is connected to outlet detection gas circuit(24)On pressure gauge(23),
With described component gas circuit(1)It is connected with gas exhaust piping(25), in gas exhaust piping(25)On be provided with exhaust pneumatic diaphragm Valve(26)And needle valve(27),
With described component gas circuit(1)It is connected with vacuum line(28), vacuum line(28)On be provided with vavuum pump(29), pressure Sensor(21), ball valve(12)With Pneumatic vacuum diaphragm valve(30),
With described component gas circuit(1)It is also associated with purging gas circuit parallel with one another(31)Gentle road of taking offence(32), in purge gass Road(31)On be provided with pressure-reducing valve(9), and pneumatic gas circuit(32)On be then provided with ball valve(12), in purging gas circuit(31), it is pneumatic Gas circuit(32)With component gas circuit(1)Connecting line on, be additionally provided with filter(5), needle valve(6)And pressure sensor (21).
2. manual-automatic integral gaseous mixture according to claim 1 configures system, it is characterised in that:The component of described matching Gas circuit(1)With component gas cylinder(2)It is multiple, and a plurality of component gas circuit(1)Between it is parallel with one another.
CN201710141378.7A 2017-03-10 2017-03-10 Manual-automatic integrated mixed gas configuration system Active CN106881029B (en)

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CN106881029B CN106881029B (en) 2022-10-18

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110207010A (en) * 2019-07-08 2019-09-06 深圳融科半导体装备有限公司 A kind of movable type air tower
CN111185106A (en) * 2020-01-24 2020-05-22 杭州制氧机集团股份有限公司 Device and method for mixing high-precision low-uncertainty binary standard gas
CN112007529A (en) * 2020-07-20 2020-12-01 上海伟创标准气体分析技术有限公司 Standard mixed gas preparation device
CN117482770A (en) * 2023-12-29 2024-02-02 赛悟德半导体科技(上海)股份有限公司 Concentration-based gas mixing control method and system

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101812671A (en) * 2010-01-07 2010-08-25 中国科学院半导体研究所 Gas path device for metal organic chemical vapor deposition equipment
CN201915163U (en) * 2010-09-26 2011-08-03 北京京仪世纪电子股份有限公司 Air charging device for solar energy silicon single crystal furnace
CN102500253A (en) * 2011-11-09 2012-06-20 西南化工研究设计院 Novel device for distributing standard gas
CN202478880U (en) * 2012-03-09 2012-10-10 江苏海立普电力科技有限公司 Dynamic gas distribution instrument
EP2667276A1 (en) * 2012-05-24 2013-11-27 Air Products And Chemicals, Inc. Method of, and apparatus for, providing a gas mixture
CN104888635A (en) * 2015-06-11 2015-09-09 中国船舶重工集团公司第七一八研究所 Device and method for compounding multiple cylinders of mixed gas
CN105013772A (en) * 2015-07-29 2015-11-04 南方英特空调有限公司 Cleaning device and method for car air conditioning system
CN205762817U (en) * 2016-06-21 2016-12-07 湖北恒丰医疗制药设备有限公司 A kind of CIP on-line cleaning system
CN206762678U (en) * 2017-03-10 2017-12-19 大连大特气体有限公司 Manual-automatic integral gaseous mixture configures system

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101812671A (en) * 2010-01-07 2010-08-25 中国科学院半导体研究所 Gas path device for metal organic chemical vapor deposition equipment
CN201915163U (en) * 2010-09-26 2011-08-03 北京京仪世纪电子股份有限公司 Air charging device for solar energy silicon single crystal furnace
CN102500253A (en) * 2011-11-09 2012-06-20 西南化工研究设计院 Novel device for distributing standard gas
CN202478880U (en) * 2012-03-09 2012-10-10 江苏海立普电力科技有限公司 Dynamic gas distribution instrument
EP2667276A1 (en) * 2012-05-24 2013-11-27 Air Products And Chemicals, Inc. Method of, and apparatus for, providing a gas mixture
CN104888635A (en) * 2015-06-11 2015-09-09 中国船舶重工集团公司第七一八研究所 Device and method for compounding multiple cylinders of mixed gas
CN105013772A (en) * 2015-07-29 2015-11-04 南方英特空调有限公司 Cleaning device and method for car air conditioning system
CN205762817U (en) * 2016-06-21 2016-12-07 湖北恒丰医疗制药设备有限公司 A kind of CIP on-line cleaning system
CN206762678U (en) * 2017-03-10 2017-12-19 大连大特气体有限公司 Manual-automatic integral gaseous mixture configures system

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110207010A (en) * 2019-07-08 2019-09-06 深圳融科半导体装备有限公司 A kind of movable type air tower
CN111185106A (en) * 2020-01-24 2020-05-22 杭州制氧机集团股份有限公司 Device and method for mixing high-precision low-uncertainty binary standard gas
CN112007529A (en) * 2020-07-20 2020-12-01 上海伟创标准气体分析技术有限公司 Standard mixed gas preparation device
CN117482770A (en) * 2023-12-29 2024-02-02 赛悟德半导体科技(上海)股份有限公司 Concentration-based gas mixing control method and system
CN117482770B (en) * 2023-12-29 2024-03-19 赛悟德半导体科技(上海)股份有限公司 Concentration-based gas mixing control method and system

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