CN106868456B - Evaporation source and evaporated device - Google Patents
Evaporation source and evaporated device Download PDFInfo
- Publication number
- CN106868456B CN106868456B CN201710170761.5A CN201710170761A CN106868456B CN 106868456 B CN106868456 B CN 106868456B CN 201710170761 A CN201710170761 A CN 201710170761A CN 106868456 B CN106868456 B CN 106868456B
- Authority
- CN
- China
- Prior art keywords
- shell
- evaporation source
- noumenon
- ontologies
- arbitrary neighborhood
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001704 evaporation Methods 0.000 title claims abstract description 64
- 230000008020 evaporation Effects 0.000 title claims abstract description 64
- 238000010438 heat treatment Methods 0.000 claims description 8
- 238000001816 cooling Methods 0.000 claims description 7
- 230000000694 effects Effects 0.000 abstract description 8
- 238000002360 preparation method Methods 0.000 abstract description 3
- 238000004140 cleaning Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 5
- 235000013399 edible fruits Nutrition 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 238000000354 decomposition reaction Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention relates to display device preparation technical field, a kind of evaporation source and evaporated device are disclosed, to improve the display effect of evaporation efficiency and display device.Evaporation source, comprising: first shell, the interior hollow portion being equipped with for accommodating crucible of first shell, first shell includes at least two the first noumenons, is detachably connected between two neighboring the first noumenon, and first shell is equipped with multiple nozzles.Evaporation source provided by the invention, by setting the first shell for being used to accommodate crucible to removably, the service life of evaporation source can be improved convenient for cleaning to the inside of first shell, the evaporation efficiency of evaporation source is improved, to improve the display effect of display device.
Description
Technical field
The present invention relates to display preparation technical field more particularly to a kind of evaporation sources and evaporated device.
Background technique
Vacuum evaporation, which refers to, heats Coating Materials under high vacuum environment, so that it is distilled and forms a film on substrate.
It is mainly used for the production of the organic function layer in organic semiconductor device such as Organic Light Emitting Diode.Present evaporated device mainly divides
For embedded and circulating type.Embedded equipment is also known as linear device, and substrate is transmitted in vapor deposition chamber, and evaporation source is along substrate
Direction of transfer arrangement.As depicted in figs. 1 and 2, linear evaporation source 01 is mostly rectangular parallelepiped structure, and crucible 02, heater strip are placed in inside
It is placed in the cavity wall of evaporation source two sides, interior crucible is heated.Evaporation source is the inlet and outlet of crucible at both ends, is taken for placing
Crucible out, opening is sealed with thermal insulation layer and blind plate when evaporation source heats.In order to prevent heat leak, evaporation source in addition to crucible into
Outlet, other positions are Seal Design, can not be dismantled.
But in organic material evaporation process, some organic material is understood from crucible internal leakage, so evaporation source exists
After a period of use, inside will have impurity, need to clear up evaporation source inside even comprehensive cleaning.It is closed
Linear evaporation is due to non-dismountable, and length is long, clears up very inconvenient.
Summary of the invention
The present invention provides a kind of evaporation source and evaporated devices, and the display to improve evaporation efficiency and display device is imitated
Fruit.
In order to achieve the above objectives, the present invention the following technical schemes are provided:
The present invention provides a kind of evaporation sources, comprising:
First shell, the interior hollow portion being equipped with for accommodating crucible of the first shell, the first shell includes at least
Two the first noumenons are detachably connected between the two neighboring the first noumenon, and the first shell is equipped with multiple nozzles.
Evaporation source provided by the invention, by setting the first shell for being used to accommodate crucible to removably, Neng Goubian
It is cleaned in the inside to first shell, the service life of evaporation source can be improved, improve the evaporation efficiency of evaporation source, to mention
The display effect of high display device.
In some alternative embodiments, above-mentioned evaporation source, further includes: the second shell being wrapped in outside the first shell
Body, the second shell include at least two second ontologies, are detachably connected between two neighboring second ontology, and described
Second shell is equipped with the spout for corresponding with the nozzle and the corresponding nozzle being allowed to stretch out.Second shell is set
It sets, advantageously reduces scattering and disappearing for heat, play the role of keeping the temperature first shell.
In some alternative embodiments, the junction of arbitrary neighborhood two second ontologies is in the first shell
On projection be not overlapped with the junction of two the first noumenons of arbitrary neighborhood.Such structure setting, it is possible to reduce heat
It scatters and disappears the generation of phenomenon from junction.
In some alternative embodiments, the number of the first noumenon is four；And/or
The number of second ontology is four.
In some alternative embodiments, the first shell is cylinder；And/or the second shell is cylinder
Shape.Cylindrical evaporation source is convenient for crucible thermally equivalent.
In some alternative embodiments, heating unit is equipped in each the first noumenon and for described in cooling
The cooling unit of the first noumenon.
In some alternative embodiments, above-mentioned evaporation source, further includes:
The switch being arranged in a one-to-one correspondence with the first noumenon, for controlling, corresponding first is intracorporal to be added the switch
Hot cell opens and closes.Convenient for controlling the temperature of each the first noumenon.
In some alternative embodiments, mutual by bayonet and buckle between two the first noumenons of arbitrary neighborhood
Connection；And/or
Pass through at bayonet and buckle interconnection and the interconnection between arbitrary neighborhood two second ontologies also
Equipped with fastening screw, the fastening screw only mutually locks connected two second ontologies or the fastening screw will be connected
Second ontology and the connected the first noumenon lock.
In some alternative embodiments, the junction of two the first noumenons of arbitrary neighborhood is equipped with heat insulating mattress；
And/or
The junction of arbitrary neighborhood two second ontologies is equipped with heat insulating mattress.The setting of heat insulating mattress on the one hand can be with
Heat losses are reduced, the service life of junction on the other hand can be improved.
The present invention also provides a kind of evaporated devices, comprising: evaporation source described in any of the above embodiments.Due to above-mentioned evaporation source
It can be improved the display effect of evaporation efficiency and display device, therefore evaporated device provided by the invention, there is preferable vapor deposition effect
Fruit.
Detailed description of the invention
Fig. 1 is evaporation source structural schematic diagram in the prior art；
Fig. 2 is the structural schematic diagram that evaporation source in the prior art and crucible are combined；
Fig. 3 is the first structural decomposition diagram of evaporation source provided in an embodiment of the present invention；
Fig. 4 is second of structural decomposition diagram of evaporation source provided in an embodiment of the present invention；
Fig. 5 is second of structural schematic diagram of evaporation source provided in an embodiment of the present invention；
Fig. 6 is the end structure illustration of evaporation source provided in an embodiment of the present invention.
Appended drawing reference:
01- linear evaporation source 02- crucible
1- first shell 11- the first noumenon
111- nozzle 2- second shell
21- the second ontology 3- fastening screw
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment belongs to the range of the invention patent protection.
As shown in figure 3, the embodiment of the invention provides a kind of evaporation sources, comprising: first shell 1 is equipped in first shell 1
For accommodating the hollow portion of crucible, first shell 1 includes at least two the first noumenons 11, can between two neighboring the first noumenon 11
Dismantling connection, and first shell 1 is equipped with multiple nozzle (not shown)s.
Evaporation source provided by the invention, by setting the first shell 1 for being used to accommodate crucible to removably, Neng Goubian
It is cleaned in the inside to first shell 1, the service life of evaporation source can be improved, improve the evaporation efficiency of evaporation source, with
Improve the display effect of display device.
Further, as shown in Figure 4 and Figure 5, above-mentioned evaporation source, further includes: the second shell being wrapped in outside first shell 1
2, second shell 2 includes at least two second ontologies 21, is detachably connected between two neighboring second ontology 21, and second shell
2 are equipped with the spout for corresponding with nozzle 111 and corresponding nozzle 111 being allowed to stretch out.The setting of second shell 2, is conducive to
Scattering and disappearing for heat is reduced, plays the role of keeping the temperature first shell 1, the setting position of above-mentioned spout can be located at any second
On body 21, the junction of two the second ontologies 21 can also be located at.
In order to further prevent scattering and disappearing for heat, it is preferred that as shown in figure 4, the company of two the second ontologies 21 of arbitrary neighborhood
The projection being in first shell 1 is connect not to be overlapped with the junction of two the first noumenons 11 of arbitrary neighborhood.Such second ontology 21
The gap that junction between two internal the first noumenons 11 is formed can be covered in, prevent heat from two the first noumenons
Flow out evaporation source in the gap of junction between 11.
The number and second for the first noumenon 11 for including in first shell 1 in evaporation source provided in an embodiment of the present invention
The number for the second ontology 21 for including in shell 2 can there are many, optionally, the number of the first noumenon 11 is four；And/or
The number of second ontology 21 is four.That is, the number of the first noumenon 11 is four, of the second ontology 21
Number can not be four, such as two, three, six etc., will not enumerate here；Also or the number of the second ontology 21
It is four, and the number of the first noumenon 11 can not be four, such as two, three, six etc., just no longer arrange one by one here
It lifts.
The concrete shape of said first shell 1 and second shell 2 can there are many, optionally, first shell 1 be cylinder
Shape；And/or second shell 2 is cylinder.That is: first shell 1 be cylinder, 2 shell of second shell be it is rectangular, three
Angular etc. or first shell 1 is rectangular or triangle etc., and second shell 2 is cylinder, with other shapes of evaporation source phase
Than cylindrical evaporation source is convenient for crucible thermally equivalent.
Heating unit is equipped with for the ease of controlling the temperature of first shell 1, in each the first noumenon 11 and for cooling down
The cooling unit of the first noumenon 11.
Above-mentioned heating unit can be heater strip etc., and cooling unit can be that the coolant liquid being set in the first noumenon 11 is followed
Endless tube road.
In order to be more convenient for controlling the temperature of each the first noumenon 11, above-mentioned evaporation source, further includes:
The switch being arranged in a one-to-one correspondence with the first noumenon 11 is switched for controlling the heating list in corresponding the first noumenon 11
Member opens and closes.Heating unit is set as individually controlling, heating unit can be individually replaced, cost is relatively low and operation side
Just.
It can be accomplished in several ways and tear open between adjacent two the first noumenons 11 and two adjacent the second ontologies 21
Connection is unloaded, as shown in fig. 6, the present invention provides in a kind of optional embodiment, between two the first noumenons 11 of arbitrary neighborhood
It is connected with each other by bayonet and buckle；And/or
It is connected with each other and is additionally provided at interconnection tight by bayonet and buckle between two the second ontologies 21 of arbitrary neighborhood
Gu screw 3, fastening screw 3 only will connected two the second the second ontologies 21 that mutually locking or fastening screw 3 will be connected of ontologies 21
And connected the first noumenon 11 is locked.
Above-mentioned fastening screw 3 can be against on the first noumenon 11 only through the second ontology 21, i.e., only by two second
Ontology 21 is mutually locked, and can also be both passed through with the first noumenon 11 and the second ontology 21, by two the first noumenon 11, two second
Body 21 is locked.
In a kind of optional embodiment, the junction of two the first noumenons 11 of arbitrary neighborhood is equipped with heat insulating mattress；With/
Or,
The junction of two the second ontologies 21 of arbitrary neighborhood is equipped with heat insulating mattress.On the one hand the setting of heat insulating mattress can subtract
Few heat losses, on the other hand can be improved the service life of junction.
The present invention also provides a kind of evaporated devices, comprising: evaporation source described in any of the above embodiments.Due to above-mentioned evaporation source
It can be improved the display effect of evaporation efficiency and display device, therefore evaporated device provided by the invention, there is preferable vapor deposition effect
Fruit.
Obviously, various changes and modifications can be made to the invention without departing from essence of the invention by those skilled in the art
Mind and range.In this way, if these modifications and changes of the present invention belongs to the range of the claims in the present invention and its equivalent technologies
Within, then the present invention is also intended to include these modifications and variations.
Claims (10)
1. a kind of evaporation source characterized by comprising
First shell, the interior hollow portion being equipped with for accommodating crucible of the first shell, the first shell includes at least two
For surrounding the first noumenon of the first shell, it is detachably connected between the two neighboring the first noumenon, and described first
Shell is equipped with multiple nozzles.
2. evaporation source as described in claim 1, which is characterized in that further include: the second shell being wrapped in outside the first shell
Body, the second shell include at least two second ontologies, are detachably connected between two neighboring second ontology, and described
Second shell is equipped with the spout for corresponding with the nozzle and the corresponding nozzle being allowed to stretch out.
3. evaporation source as claimed in claim 2, which is characterized in that the junction of arbitrary neighborhood two second ontologies is in institute
The projection stated in first shell is not overlapped with the junction of two the first noumenons of arbitrary neighborhood.
4. evaporation source as claimed in claim 3, which is characterized in that the number of the first noumenon is four；And/or
The number of second ontology is four.
5. evaporation source as claimed in claim 2, which is characterized in that the first shell is cylinder；And/or described second
Shell is cylinder.
6. evaporation source as described in claim 1, which is characterized in that be equipped with heating unit and use in each the first noumenon
In the cooling unit of the cooling the first noumenon.
7. evaporation source as claimed in claim 6, which is characterized in that further include:
The switch being arranged in a one-to-one correspondence with the first noumenon, the switch are single for controlling the corresponding intracorporal heating of first
Member opens and closes.
8. evaporation source as claimed in any one of claims 2 to 7, which is characterized in that two the first noumenons of arbitrary neighborhood it
Between by bayonet and buckle be connected with each other；And/or
It is connected with each other between arbitrary neighborhood two second ontologies by bayonet and buckle and is additionally provided at the interconnection
Fastening screw, the fastening screw only will be connected two second ontologies mutually lock or the fastening screw will be connected institute
It states the second ontology and the connected the first noumenon is locked.
9. evaporation source as claimed in claim 8, which is characterized in that the junction of two the first noumenons of arbitrary neighborhood is equipped with
Heat insulating mattress；And/or
The junction of arbitrary neighborhood two second ontologies is equipped with heat insulating mattress.
10. a kind of evaporated device characterized by comprising evaporation source as described in any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710170761.5A CN106868456B (en) | 2017-03-21 | 2017-03-21 | Evaporation source and evaporated device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710170761.5A CN106868456B (en) | 2017-03-21 | 2017-03-21 | Evaporation source and evaporated device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106868456A CN106868456A (en) | 2017-06-20 |
| CN106868456B true CN106868456B (en) | 2019-03-12 |
Family
ID=59172799
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710170761.5A Expired - Fee Related CN106868456B (en) | 2017-03-21 | 2017-03-21 | Evaporation source and evaporated device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106868456B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102080210A (en) * | 2009-11-30 | 2011-06-01 | 鸿富锦精密工业（深圳）有限公司 | Evaporation plating device |
| CN102268642A (en) * | 2011-07-22 | 2011-12-07 | 上海奕瑞光电子科技有限公司 | Resistance heating evaporation source |
| CN103080366A (en) * | 2011-06-29 | 2013-05-01 | 松下电器产业株式会社 | Heating apparatus, vacuum-heating method and method for manufacturing thin film |
| CN103906856A (en) * | 2011-10-21 | 2014-07-02 | 瑞必尔 | Injection system for an apparatus for depositing thin layers by vacuum evaporation |
| KR20150114098A (en) * | 2014-03-31 | 2015-10-12 | 주식회사 선익시스템 | Linear Evaporator with Detachable Heater |
-
2017
- 2017-03-21 CN CN201710170761.5A patent/CN106868456B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102080210A (en) * | 2009-11-30 | 2011-06-01 | 鸿富锦精密工业（深圳）有限公司 | Evaporation plating device |
| CN103080366A (en) * | 2011-06-29 | 2013-05-01 | 松下电器产业株式会社 | Heating apparatus, vacuum-heating method and method for manufacturing thin film |
| CN102268642A (en) * | 2011-07-22 | 2011-12-07 | 上海奕瑞光电子科技有限公司 | Resistance heating evaporation source |
| CN103906856A (en) * | 2011-10-21 | 2014-07-02 | 瑞必尔 | Injection system for an apparatus for depositing thin layers by vacuum evaporation |
| KR20150114098A (en) * | 2014-03-31 | 2015-10-12 | 주식회사 선익시스템 | Linear Evaporator with Detachable Heater |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106868456A (en) | 2017-06-20 |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
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Granted publication date: 20190312 |