CN106835039A - A kind of preparation method of the adjustable amorphous state hard coat of long-life color clarity - Google Patents
A kind of preparation method of the adjustable amorphous state hard coat of long-life color clarity Download PDFInfo
- Publication number
- CN106835039A CN106835039A CN201611258094.8A CN201611258094A CN106835039A CN 106835039 A CN106835039 A CN 106835039A CN 201611258094 A CN201611258094 A CN 201611258094A CN 106835039 A CN106835039 A CN 106835039A
- Authority
- CN
- China
- Prior art keywords
- target
- long
- state hard
- amorphous state
- many
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/067—Borides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
Abstract
The present invention provides a kind of preparation method of the adjustable amorphous state hard coat of long-life color clarity, comprises the following steps：After cobalt, iron, thallium and boron powder are sufficiently mixed, flattened through surface respectively and melting casting, obtain powder target and alloy original blank；By alloy original blank through carrying out cold-rolling deformation after hot forging, it is heat-treated through high temperature re-crystallization, then agitated friction processing carries out crystal grain refinement, most afterwards through Low-temperature stress-relief annealing, metal alloy target is obtained, the wherein formula of powder target and metal alloy target is (CoFe)aBbTac, wherein abc is atomic percentage, and span is：35≤a≤80,15≤b≤35,0≤c≤25；Powder target and metal alloy target are placed in multi-target magnetic control sputtering equipment by several times, argon gas and oxygen is passed through, sputtering obtains the adjustable amorphous state hard coat of long-life color clarity.
Description
Technical field
The invention belongs to alloy coating material technical field, and in particular to a kind of adjustable amorphous of long-life color clarity
The preparation method of state hard coat.
Background technology
Amorphous metal coating has high intensity, high rigidity, high-wearing feature, high-fracture toughness, excellent anticorrosive and height
The excellent properties such as surface smoothness, therefore, the composite containing amorphous metal coating can not only increase substantially matrix material
The inherent mechanical property such as the intensity of material, hardness and wearability and decay resistance, extend the service life of matrix, can also change
The surface quality of kind matrix material.
A kind of preparation of high-performance iron based non-crystalline metal powder core and coating side disclosed in Chinese patent CN103065789B
Method, Fe-based amorphous material is broken for through ball-milling treatment it is powdered, through phosphorus acid passivation liquid be passivated after, through insulating compound, binding agent, profit
Lubrication prescription enrobed compacted and annealing, form iron based amorphous metal powder core, then apply on the surface of iron based amorphous metal powder core
Epoxy coating is covered, the insulating properties of iron based amorphous metal powder core are improved.Resist disclosed in Chinese patent CN101326303B
Etching resist, the transistion metal compound nanocrystal or sandwich construction of the erosion resistant coatings including Amorphous Phase, by tantalum,
Hafnium, niobium, molybdenum, titanium, boron, zirconium, aluminium, iron, copper, chromium, platinum, palladium, tungsten and combinations thereof as raw material, golden sputtering technology, prepare tantalum,
The nitride of hafnium, niobium, molybdenum, titanium, boron, zirconium, aluminium, iron, copper, chromium, platinum, palladium, tungsten and combinations thereof, carbide, silicide, and with ceramics
Layer is combined, and obtains the part of laminated coating structure.From above-mentioned prior art, raw material is used as by amorphous metal, passed through
Sputtering or pressing process can obtain the coating of excellent performance.But the amorphous coating for preparing at present is opaque metal
Gloss coating material, has limited to the outward appearance of coating material and has used field.Therefore a color and controllable non-of transparency are developed
Crystalline coatings material has very good market prospects.
The content of the invention
The technical problem to be solved in the present invention is to provide a kind of adjustable amorphous state hard coat of long-life color clarity
Preparation method, the target that cobalt, iron, thallium and boron powder using diameter less than 100 μm are prepared as raw material is more using ultrahigh vacuum
Target magnetic control sputtering equipment, polishing silicon, aluminium or ITO electro-conductive glass are substrate, and under argon gas and oxygen atmosphere, sputtering is obtained
To the adjustable amorphous state hard coat of long-life color clarity.The adjustable amorphous of long-life color clarity prepared by the present invention
The color and transparency of state hard coat are fully opaque black extremely fully transparent again to translucent golden yellow, can protection group
Material is from scratching, wearing and tearing and corrosion.
In order to solve the above technical problems, the technical scheme is that：
A kind of preparation method of the adjustable amorphous state hard coat of long-life color clarity, comprises the following steps：
(1) after cobalt by diameter less than 100 μm, iron, thallium and boron powder are sufficiently mixed, it is put into target container, surface pressure
It is flat, powder target is obtained, the wherein formula of powder target is (CoFe)aBbTac, wherein abc is atomic percentage, value model
Enclose for：35≤a≤80,15≤b≤35,0≤c≤25；
(2) after cobalt by diameter less than 100 μm, iron, thallium and boron powder are sufficiently mixed, prepared using the method for melting casting
Obtain alloy original blank；
(3) the alloy original blank for preparing step (2) is through carrying out the cold-rolling deformation of 60-90% after hot forging, warp
High temperature re-crystallization is heat-treated 2-3h, then agitated friction processing carries out crystal grain refinement, most afterwards through Low-temperature stress-relief annealing, obtains gold
Category alloy target material, the wherein formula of metal alloy target are (CoFe)aBbTac, wherein abc is atomic percentage, span
For：35≤a≤80,15≤b≤35,0≤c≤25；
(4) metal alloy target prepared by the powder target and step (3) for preparing step (1) is placed on magnetron sputtering by several times
In equipment, forvacuum to -10-4Pa is passed through argon gas and oxygen, and argon flow amount is 27sccm, and oxygen flow is 0-3.5sccm,
Operating air pressure is 0.7-0.8Pa, cools down 30min after sputtering 30min every time, and total sputtering time is 0.5-1.5h, and sputtering thickness is
100-400nm, obtains the adjustable amorphous state hard coat of long-life color clarity, and wherein long-life color clarity is adjustable
The color and transparency of amorphous state hard coat are fully opaque black extremely fully transparent again to translucent golden yellow.
Used as the preferred of above-mentioned technical proposal, the pressure that surface flattens in the step (1) is 100-150MPa, and the time is
5-10min。
Used as the preferred of above-mentioned technical proposal, the temperature of step (3) the high temperature dynamic recrystallization treatment is 600-800
℃。
Used as the preferred of above-mentioned technical proposal, the temperature of Low-temperature stress-relief annealing is 350-450 DEG C in the step (3).
Used as the preferred of above-mentioned technical proposal, the rotating speed of mixing yoghurt is 600-1000r/ in the step (3)
min。
Used as the preferred of above-mentioned technical proposal, magnetron sputtering apparatus are splashed for many target magnetic controls of ultrahigh vacuum in the step (4)
Jet device, the substrate of the magnetron sputtering apparatus is polishing silicon, aluminium or ITO electro-conductive glass, the target and substrate away from
From being 5-10cm.
Used as the preferred of above-mentioned technical proposal, the purity of argon gas is more than 99.999wt% in the step (4).
As the preferred of above-mentioned technical proposal, the base reservoir temperature of magnetron sputtering apparatus when sputtering starts in the step (4)
It is 100 DEG C.
Used as the preferred of above-mentioned technical proposal, the power of sputtering is 120-150W in the step (4).
As the preferred of above-mentioned technical proposal, the adjustable amorphous state hard of long-life color clarity in the step (4)
The hardness of coating is up to 35GPa.
Compared with prior art, the invention has the advantages that：
(1) the adjustable amorphous state hard coat of long-life color clarity prepared by the present invention is less than 100 μm using diameter
Cobalt, iron, thallium and boron powder prepare CoFeBTa powder target or metal alloy target as raw material, it is heavy using physical vapor
Technology is splashed in product control, under argon gas and oxygen atmosphere, is sputtered on polishing silicon, aluminium or ITO electro-conductive glass and is obtained long-life face
The adjustable amorphous state hard coat of color transparency, the color and transparency of the coating are adjustable, can be from fully opaque color to partly
Clear golden is again to fully transparent, and coating mechanical strength is big, maximum hardness up to 35Gpa, base material can be made from scratching,
Abrasion and corrosion.
(2) size of raw material is small in target prepared by the present invention, is evenly distributed, texture orientation random distribution, crystallite dimension
It is small, below 5 μm, therefore life-span of target can be improved, lift the utilization rate of target, the target system based on above-mentioned excellent performance
Standby coating layer thickness precision is more easily controlled, and is more beneficial for adjusting the color and transparency of coating.
(3) oxygen when the adjustable amorphous state hard coat of long-life color clarity prepared by the present invention is by adjusting sputtering
Content, adjust the oxygen content of coating, then adjust the color and transparency of coating, the adjusting method is simple, and controllability is strong,
And preparation process is simple, the prices of raw materials are cheap, environment-friendly.
Specific embodiment
Describe the present invention in detail below in conjunction with specific embodiment, herein illustrative examples of the invention and explanation
It is for explaining the present invention but not as a limitation of the invention.
Embodiment 1：
(1) after cobalt by diameter less than 100 μm, iron, thallium and boron powder are sufficiently mixed, it is put into target container,
100Mpa pressure lower surface flattens 5min, obtains powder target, and the wherein formula of powder target is (CoFe)aBbTac, wherein abc
Atomic percentage is, span is：35≤a≤80,15≤b≤35,0≤c≤25.
(2) after cobalt by diameter less than 100 μm, iron, thallium and boron powder are sufficiently mixed, prepared using the method for melting casting
Obtain alloy original blank, by alloy original blank through carried out after hot forging 60% cold-rolling deformation, through height at 600 DEG C
Warm dynamic recrystallization treatment 2h, then crystal grain refinement is carried out with the rotating speed mixing yoghurt of 600r/min, the finally low temperature at 350 DEG C
Stress relief annealing, obtains metal alloy target, and the wherein formula of metal alloy target is (CoFe)aBbTac, wherein abc is original
Sub- percentage, span is：35≤a≤80,15≤b≤35,0≤c≤25.
(3) powder target and metal alloy target are placed in magnetron sputtering apparatus by several times, aluminium is substrate, adjust target
It is 5cm, forvacuum to -10 with the distance of substrate-4Pa, is passed through argon gas and oxygen of the purity more than 99.999wt%, argon gas stream
It is 27sccm to measure, and operating air pressure is 0.7Pa, and the base reservoir temperature of magnetron sputtering apparatus is 100 DEG C, the power of sputtering when sputtering starts
It is 120W, total sputtering time is 1.5h, cools down 30min after sputtering 30min every time, obtains long-life color clarity adjustable non-
Crystalline state hard coat.
Embodiment 2：
(1) after cobalt by diameter less than 100 μm, iron, thallium and boron powder are sufficiently mixed, it is put into target container,
150Mpa pressure lower surface flattens 10min, obtains powder target, and the wherein formula of powder target is (CoFe)aBbTac, wherein
Abc is atomic percentage, and span is：35≤a≤80,15≤b≤35,0≤c≤25.
(2) after cobalt by diameter less than 100 μm, iron, thallium and boron powder are sufficiently mixed, prepared using the method for melting casting
Obtain alloy original blank, by alloy original blank through carried out after hot forging 90% cold-rolling deformation, through height at 800 DEG C
Warm dynamic recrystallization treatment 2-3h, then crystal grain refinement is carried out with the rotating speed mixing yoghurt of 1000r/min, finally at 450 DEG C
Low-temperature stress-relief annealing, obtains metal alloy target, and the wherein formula of metal alloy target is (CoFe)aBbTac, wherein abc is equal
It is atomic percentage, span is：35≤a≤80,15≤b≤35,0≤c≤25.
(3) powder target and metal alloy target are placed in magnetron sputtering apparatus by several times, aluminium is substrate, adjust target
It is 10cm, forvacuum to -10 with the distance of substrate-4Pa, is passed through argon gas and oxygen of the purity more than 99.999wt%, argon gas stream
It is 27sccm to measure, and oxygen flow is 2.0sccm, and operating air pressure is 0.8Pa, the base reservoir temperature of magnetron sputtering apparatus when sputtering starts
It it is 100 DEG C, the power of sputtering is 150W, and total sputtering time is 1.5h, cools down 30min after sputtering 30min every time, obtains the long-life
The adjustable amorphous state hard coat of color clarity.
Embodiment 3：
(1) after cobalt by diameter less than 100 μm, iron, thallium and boron powder are sufficiently mixed, it is put into target container,
120Mpa pressure lower surface flattens 6min, obtains powder target, and the wherein formula of powder target is (CoFe)aBbTac, wherein abc
Atomic percentage is, span is：35≤a≤80,15≤b≤35,0≤c≤25.
(2) after cobalt by diameter less than 100 μm, iron, thallium and boron powder are sufficiently mixed, prepared using the method for melting casting
Obtain alloy original blank, by alloy original blank through carried out after hot forging 70% cold-rolling deformation, through height at 750 DEG C
Warm dynamic recrystallization treatment 2.5h, then crystal grain refinement is carried out with the rotating speed mixing yoghurt of 800r/min, it is finally low at 400 DEG C
Warm stress relief annealing, obtains metal alloy target, and the wherein formula of metal alloy target is (CoFe)aBbTac, wherein abc is
Atomic percentage, span is：35≤a≤80,15≤b≤35,0≤c≤25.
(3) powder target and metal alloy target are placed in magnetron sputtering apparatus by several times, aluminium is substrate, adjust target
It is 8cm, forvacuum to -10 with the distance of substrate-4Pa, is passed through argon gas and oxygen of the purity more than 99.999wt%, argon gas stream
It is 27sccm to measure, and oxygen flow is 2.5sccm, and operating air pressure is 0.8Pa, the base reservoir temperature of magnetron sputtering apparatus when sputtering starts
It it is 100 DEG C, the power of sputtering is 140W, and total sputtering time is 0.5h, cools down 30min after sputtering 30min every time, obtains the long-life
The adjustable amorphous state hard coat of color clarity.
Embodiment 4：
(1) after cobalt by diameter less than 100 μm, iron, thallium and boron powder are sufficiently mixed, it is put into target container,
150Mpa pressure lower surface flattens 5min, obtains powder target, and the wherein formula of powder target is (CoFe)aBbTac, wherein abc
Atomic percentage is, span is：35≤a≤80,15≤b≤35,0≤c≤25.
(2) after cobalt by diameter less than 100 μm, iron, thallium and boron powder are sufficiently mixed, prepared using the method for melting casting
Obtain alloy original blank, by alloy original blank through carried out after hot forging 70% cold-rolling deformation, through height at 650 DEG C
Warm dynamic recrystallization treatment 2.5h, then crystal grain refinement is carried out with the rotating speed mixing yoghurt of 800r/min, it is finally low at 400 DEG C
Warm stress relief annealing, obtains metal alloy target, and the wherein formula of metal alloy target is (CoFe)aBbTac, wherein abc is
Atomic percentage, span is：35≤a≤80,15≤b≤35,0≤c≤25.
(3) powder target and metal alloy target are placed in magnetron sputtering apparatus by several times, polishing silicon is substrate, adjusts target
Material is 6cm, forvacuum to -10 with the distance of substrate-4Pa, is passed through argon gas and oxygen of the purity more than 99.999wt%, argon gas
Flow is 27sccm, and oxygen flow is 3.5sccm, and operating air pressure is 0.8Pa, the substrate temperature of magnetron sputtering apparatus when sputtering starts
It is 100 DEG C to spend, and the power of sputtering is 130W, and total sputtering time is 0.5h, cools down 30min after sputtering 30min every time, obtains longevity
The life adjustable amorphous state hard coat of color clarity.
Embodiment 5：
(1) after cobalt by diameter less than 100 μm, iron, thallium and boron powder are sufficiently mixed, it is put into target container,
110Mpa pressure lower surface flattens 6min, obtains powder target, and the wherein formula of powder target is (CoFe)aBbTac, wherein abc
Atomic percentage is, span is：35≤a≤80,15≤b≤35,0≤c≤25.
(2) after cobalt by diameter less than 100 μm, iron, thallium and boron powder are sufficiently mixed, prepared using the method for melting casting
Alloy original blank is obtained, by alloy original blank through carrying out the cold-rolling deformation of 60-90% after hot forging, at 650 DEG C
2-3h is heat-treated through high temperature re-crystallization, then crystal grain refinement is carried out with the rotating speed mixing yoghurt of 750r/min, finally at 380 DEG C
Lower Low-temperature stress-relief annealing, obtains metal alloy target, and the wherein formula of metal alloy target is (CoFe)aBbTac, wherein abc
Atomic percentage is, span is：35≤a≤80,15≤b≤35,0≤c≤25.
(3) powder target and metal alloy target are placed in magnetron sputtering apparatus by several times, ITO electro-conductive glass is substrate,
Regulation target is 8cm, forvacuum to -10 with the distance of substrate-4Pa, is passed through argon gas and oxygen of the purity more than 99.999wt%
Gas, argon flow amount is 27sccm, and oxygen flow is 0.5sccm, and operating air pressure is 0.75Pa, magnetron sputtering apparatus when sputtering starts
Base reservoir temperature be 100 DEG C, the power of sputtering is 150W, and total sputtering time is 1h, cools down 30min after sputtering 30min every time, is obtained
To the adjustable amorphous state hard coat of long-life color clarity.
Embodiment 6：
(1) after cobalt by diameter less than 100 μm, iron, thallium and boron powder are sufficiently mixed, it is put into target container,
130Mpa pressure lower surface flattens 6min, obtains powder target, and the wherein formula of powder target is (CoFe)aBbTac, wherein abc
Atomic percentage is, span is：35≤a≤80,15≤b≤35,0≤c≤25.
(2) after cobalt by diameter less than 100 μm, iron, thallium and boron powder are sufficiently mixed, prepared using the method for melting casting
Obtain alloy original blank, by alloy original blank through carried out after hot forging 75% cold-rolling deformation, through height at 750 DEG C
Warm dynamic recrystallization treatment 2h, then crystal grain refinement is carried out with the rotating speed mixing yoghurt of 1000r/min, it is finally low at 350 DEG C
Warm stress relief annealing, obtains metal alloy target, and the wherein formula of metal alloy target is (CoFe)aBbTac, wherein abc is
Atomic percentage, span is：35≤a≤80,15≤b≤35,0≤c≤25.
(3) powder target and metal alloy target are placed in magnetron sputtering apparatus by several times, polishing silicon, aluminium or ITO
Electro-conductive glass is substrate, and regulation target is 10cm, forvacuum to -10 with the distance of substrate-4Pa, is passed through purity and is more than
The argon gas and oxygen of 99.999wt%, argon flow amount are 27sccm, and oxygen flow is 3sccm, and operating air pressure is 0.7Pa, sputtering
The base reservoir temperature of magnetron sputtering apparatus is 100 DEG C during startup, and the power of sputtering is 120W, and total sputtering time is 1.2h, is splashed every time
30min is cooled down after penetrating 30min, the adjustable amorphous state hard coat of long-life color clarity is obtained.
After testing, embodiment 1-6 prepare the adjustable amorphous state hard coat of long-life color clarity sputtering thickness,
The result of hardness and outward appearance is as follows：
As seen from the above table, the thickness of the adjustable amorphous state hard coat of long-life color clarity prepared by the present invention can be grasped
Control property is strong, and hardness reaches as high as 35Gpa, and the transparency and color of coating are adjusted by the content of oxygen, then adjusts coating
Hardness.
The above-described embodiments merely illustrate the principles and effects of the present invention, not for the limitation present invention.It is any ripe
The personage for knowing this technology all can carry out modifications and changes under without prejudice to spirit and scope of the invention to above-described embodiment.Cause
This, those of ordinary skill in the art is complete with institute under technological thought without departing from disclosed spirit such as
Into all equivalent modifications or change, should be covered by claim of the invention.
Claims (10)
1. the preparation method of the adjustable amorphous state hard coat of a kind of long-life color clarity, it is characterised in that including following
Step：
(1) after cobalt by diameter less than 100 μm, iron, thallium and boron powder are sufficiently mixed, it is put into target container, surface flattens, and obtains
To powder target, the wherein formula of powder target is (CoFe)aBbTac, wherein abc is atomic percentage, and span is：
35≤a≤80,15≤b≤35,0≤c≤25；
(2) after cobalt by diameter less than 100 μm, iron, thallium and boron powder are sufficiently mixed, prepared using the method for melting casting
Alloy original blank；
(3) the alloy original blank for preparing step (2) is through carrying out the cold-rolling deformation of 60-90% after hot forging, through high temperature
Dynamic recrystallization treatment 2-3h, then agitated friction processing carries out crystal grain refinement, most afterwards through Low-temperature stress-relief annealing, obtains metal conjunction
Gold target material, the wherein formula of metal alloy target are (CoFe)aBbTac, wherein abc is atomic percentage, and span is：
35≤a≤80,15≤b≤35,0≤c≤25；
(4) metal alloy target prepared by the powder target and step (3) for preparing step (1) is placed on magnetron sputtering apparatus by several times
In, forvacuum to -10-4Pa is passed through argon gas and oxygen, and argon flow amount is 27sccm, and oxygen flow is 0-3.5sccm, work
Air pressure is 0.7-0.8Pa, cools down 30min after sputtering 30min every time, and total sputtering time is 0.5-1.5h, and sputtering thickness is 100-
400nm, obtains the adjustable amorphous state hard coat of long-life color clarity, the wherein adjustable amorphous of long-life color clarity
The color and transparency of state hard coat are fully opaque black extremely fully transparent again to translucent golden yellow.
2. the system of the amorphous state hard, wear-resistant anti-corrosion coating of many transparencies of many colors of a kind of long-life according to claim 1
Preparation Method, it is characterised in that：The pressure that surface flattens in the step (1) is 100-150MPa, and the time is 5-10min.
3. the system of the amorphous state hard, wear-resistant anti-corrosion coating of many transparencies of many colors of a kind of long-life according to claim 1
Preparation Method, it is characterised in that：The temperature of step (3) the high temperature dynamic recrystallization treatment is 600-800 DEG C.
4. the system of the amorphous state hard, wear-resistant anti-corrosion coating of many transparencies of many colors of a kind of long-life according to claim 1
Preparation Method, it is characterised in that：The temperature of Low-temperature stress-relief annealing is 350-450 DEG C in the step (3).
5. the system of the amorphous state hard, wear-resistant anti-corrosion coating of many transparencies of many colors of a kind of long-life according to claim 1
Preparation Method, it is characterised in that：The rotating speed of mixing yoghurt is 600-1000r/min in the step (3).
6. the system of the amorphous state hard, wear-resistant anti-corrosion coating of many transparencies of many colors of a kind of long-life according to claim 1
Preparation Method, it is characterised in that：Magnetron sputtering apparatus are ultrahigh vacuum multi-target magnetic control sputtering equipment, the magnetic in the step (4)
It is polishing silicon, aluminium or ITO electro-conductive glass to control the substrate of sputtering equipment, and the target is 5-10cm with the distance of substrate.
7. the system of the amorphous state hard, wear-resistant anti-corrosion coating of many transparencies of many colors of a kind of long-life according to claim 1
Preparation Method, it is characterised in that：The purity of argon gas is more than 99.999wt% in the step (4).
8. the system of the amorphous state hard, wear-resistant anti-corrosion coating of many transparencies of many colors of a kind of long-life according to claim 1
Preparation Method, it is characterised in that：The base reservoir temperature of magnetron sputtering apparatus is 100 DEG C when sputtering starts in the step (4).
9. the system of the amorphous state hard, wear-resistant anti-corrosion coating of many transparencies of many colors of a kind of long-life according to claim 1
Preparation Method, it is characterised in that：The power of sputtering is 120-150W in the step (4).
10. the amorphous state hard, wear-resistant anti-corrosion coating of many transparencies of many colors of a kind of long-life according to claim 1
Preparation method, it is characterised in that：The hardness of the adjustable amorphous state hard coat of long-life color clarity is most in the step (4)
A height of 35GPa.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611258094.8A CN106835039A (en) | 2016-12-30 | 2016-12-30 | A kind of preparation method of the adjustable amorphous state hard coat of long-life color clarity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611258094.8A CN106835039A (en) | 2016-12-30 | 2016-12-30 | A kind of preparation method of the adjustable amorphous state hard coat of long-life color clarity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106835039A true CN106835039A (en) | 2017-06-13 |
Family
ID=59114499
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611258094.8A Withdrawn CN106835039A (en) | 2016-12-30 | 2016-12-30 | A kind of preparation method of the adjustable amorphous state hard coat of long-life color clarity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106835039A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020077705A1 (en) * | 2018-10-19 | 2020-04-23 | 清华大学 | Method for regulating color of hard coating, and hard coating and preparation method therefor |
| CN113817983A (en) * | 2021-11-24 | 2021-12-21 | 武汉中维创发工业研究院有限公司 | Black nano composite material and preparation method and application thereof |
-
2016
- 2016-12-30 CN CN201611258094.8A patent/CN106835039A/en not_active Withdrawn
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020077705A1 (en) * | 2018-10-19 | 2020-04-23 | 清华大学 | Method for regulating color of hard coating, and hard coating and preparation method therefor |
| CN111074229A (en) * | 2018-10-19 | 2020-04-28 | 清华大学 | Method for regulating and controlling color of hard coating, hard coating and preparation method thereof |
| US20210222279A1 (en) * | 2018-10-19 | 2021-07-22 | Tsinghua University | Method for regulating color of hard coating, hard coating, and method for preparing the same |
| CN113817983A (en) * | 2021-11-24 | 2021-12-21 | 武汉中维创发工业研究院有限公司 | Black nano composite material and preparation method and application thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109516812B (en) | Superfine high-entropy solid solution powder and preparation method and application thereof | |
| CN105950937B (en) | A kind of carbide chip and preparation method thereof | |
| CN105648407B (en) | A kind of high-compactness molybdenum niobium alloy target and its preparation process | |
| CN112647009A (en) | High-strength high-wear-resistance medium-entropy alloy and preparation method thereof | |
| WO2017136969A1 (en) | Boron nitride composite coating, graded structure ultrafine hard alloy cutting tool with the composite coating, and method for manufacturing same | |
| CN103498101B (en) | The low cost household electrical appliances of resistance to timeliness colour coated plate and production method thereof | |
| CN110484886B (en) | Nickel-rhenium alloy rotary tubular target containing trace rare earth elements and preparation method | |
| CN111235453A (en) | Hard alloy with high-entropy alloy layer on surface and preparation method thereof | |
| CN109609926A (en) | A kind of chemical vapor deposition high purity tungsten sputtering target material production method | |
| CN106835039A (en) | A kind of preparation method of the adjustable amorphous state hard coat of long-life color clarity | |
| CN106119605B (en) | A kind of titanium alloy under ultra-high temperature condition and its preparation method and application | |
| CN113564577A (en) | Copper-based surface intermetallic compound reinforced gradient high-entropy alloy coating and preparation method thereof | |
| CN102922233A (en) | Method for preparing Ni-Cr magnetron sputtering target material | |
| CN106783129A (en) | The preparation method of low heavy rare earth high-coercive force neodymium iron boron magnetic body | |
| CN106783130B (en) | The method for preparing low heavy rare earth high-coercive force neodymium iron boron magnetic body | |
| CN107675106A (en) | A kind of ni-based amorphous alloy of surface pigmentable decoration | |
| CN107424697A (en) | The preparation method of neodymium iron boron fine powder | |
| WO2024017394A1 (en) | Aluminum-silicon-plated steel plate and thermoformed component, and manufacturing methods therefor | |
| CN106591758B (en) | A kind of method electric arc spraying solid silk material and its prepare high temperature coatings | |
| CN114990542B (en) | High-entropy alloy-based gradient composite ceramic wear-resistant coating and high-speed laser cladding in-situ preparation method thereof | |
| CN109967713A (en) | A kind of nuclear screening multiple tube and preparation method thereof | |
| CN106544616A (en) | A kind of preparation method of wear resistant corrosion resistant WC CoCr coatings | |
| WO2017212879A1 (en) | Al alloy sputtering target | |
| CN111893442A (en) | Molybdenum-tungsten sputtering target material and preparation method thereof | |
| CN101195884A (en) | Casting and rolling high purity aluminum plate substrates and producing method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20170613 |
|
| WW01 | Invention patent application withdrawn after publication |