CN106825978A - A kind of solder and welding method for welding for china with metal - Google Patents

A kind of solder and welding method for welding for china with metal Download PDF

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Publication number
CN106825978A
CN106825978A CN201710103807.1A CN201710103807A CN106825978A CN 106825978 A CN106825978 A CN 106825978A CN 201710103807 A CN201710103807 A CN 201710103807A CN 106825978 A CN106825978 A CN 106825978A
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CN
China
Prior art keywords
welding
metal
solder
china
ceramics
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Granted
Application number
CN201710103807.1A
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Chinese (zh)
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CN106825978B (en
Inventor
李明雨
陈建强
缪伟亮
雷晴
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Shenzhen Graduate School Harbin Institute of Technology
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Shenzhen Graduate School Harbin Institute of Technology
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Priority to CN201710103807.1A priority Critical patent/CN106825978B/en
Publication of CN106825978A publication Critical patent/CN106825978A/en
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Publication of CN106825978B publication Critical patent/CN106825978B/en
Expired - Fee Related legal-status Critical Current
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/02Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
    • B23K35/0222Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/19Soldering, e.g. brazing, or unsoldering taking account of the properties of the materials to be soldered
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/16Composite materials, e.g. fibre reinforced

Abstract

The invention provides a kind of solder and welding method for welding for china with metal, the solder for welding for china with metal is bi-based glass material, and the component and its mass percent that the bi-based glass material is included are Bi2O360 80%, B2O35 20%, ZnO 7 20%, remaining is trace additives;The trace additives include SiO2、TiO2, one or more in MgO.Technical scheme, chemical interaction based on metal Yu bismuth oxide, obtain bond strength higher, ceramics different from the past and the simple glassy bond of metal and the connection method of high temperature sintering, the method is simple, low cost, it is workable, for microdevice manufacture provides another practicable method.

Description

A kind of solder and welding method for welding for china with metal
Technical field
It is the invention belongs to process for fabrication of semiconductor device technical field more particularly to a kind of for welding for china with metal Solder and welding method.
Background technology
Ceramics have important application with the field of semiconductor manufacture that is connected to of metal.Ceramics are packaged with metal, are By the important step of ceramic applications to electrical part.Produced heat is mainly and is covered by ceramics in high power density Electronic Packaging Metallic plate is transmitted to shell and distributes, most commonly ceramic copper-clad, and current ceramic copper-clad plate mainly passes through high connductivity Oxygen-free copper is bonded directly to ceramic surface and is formed at high temperature.It had both had high-termal conductivity, high electrical insulating properties, the machine high of ceramics The characteristics such as tool intensity, low bulk, and the high conductivity with anaerobic copper metal and excellent welding performance, and can be as PCB circuits Plate equally etches various figures, is the critical material of field of power electronics power module package connection chip and heat radiation substrate. But this method high cost, and complex operation, are not easy to control.
Another ceramics are active metal brazing methods with the interconnection technique of metal, because it has applied widely, connection Intensity is high, low production cost, high efficient and reliable the advantages of, and enjoy the favor of people.This method is generally using containing appropriate living Property element special solder, be directly connected under vacuum ceramics and metal.In brazing process, the active element in solder exists There is metallurgical reaction with ceramics under uniform temperature, formed at ceramics/solder interface certain thickness can be moistened by liquid metal solder Wet transition zone, so as to realize the chemical bond of ceramics and metal.But the method commonly uses substantial amounts of silver, silver is in solder In accounting more than 70%, it is with high costs.This method does not use noble metal, with low cost, and can reach bonding strength higher, For the connection of ceramic copper-clad provides a kind of new method again.
But, the bond strength that the above method is obtained still has much room for improvement, and the former high cost, complex operation, inconvenience In control.
The content of the invention
For above technical problem, the invention discloses a kind of solder and welding method for welding for china with metal, The method breaches the conventional method for preparing ceramic copper-clad, reduces preparation cost.
In this regard, the technical solution adopted by the present invention is:
A kind of solder for welding for china with metal, it is bi-based glass material, component that the bi-based glass material is included and its Mass percent is:Bi2O360-80%, B2O35-20%, ZnO 7-20%, remaining is trace additives;The micro addition Element includes SiO2、TiO2, one or more in MgO.Technical scheme, using containing oxidation bi content high Bi-based glass material is chemically reacted using bismuth glass crystallization under high temperature as Electroplating welding materials with metal so that welding solidification Afterwards intensity higher is obtained between ceramics and metal.
As a further improvement on the present invention, the mass percent of the trace additives is 2 ~ 6%;Preferably, it is described The mass percent of trace additives is 3 ~ 5%.
As a further improvement on the present invention, the component and its mass percent that it is included be:Bi2O365-75%, B2O3 8-18%, ZnO 10-16%, remaining is trace additives.The trace additives comprise at least SiO2、TiO2、MgO。
As a further improvement on the present invention, the profile of the solder for welding for china with metal be bulk, film, Micro wire, micro belt, micron tube, micron particles, nano wire, nanobelt, nanotube or nano particle.
As a further improvement on the present invention, the ceramics are aluminium oxide ceramics, aluminium nitride ceramics or silicon nitride ceramics.
As a further improvement on the present invention, the metal is copper, aluminium or silver.For the metal more active than bismuth, using this The technical scheme of invention, bismuth glass crystallization chemically reacts with metal under being conducive to high temperature, after solidification between ceramics and metal Obtain the welding of higher intensity.
As a further improvement on the present invention, it uses following steps to prepare paste solder:By the bi-based glass It is 10 ~ 50 μm of powder of particle diameter that material grinds, and is then 1 with mass ratio:(2~4)Ethyl cellulose and terpinol mixture prepare Bismuth-containing glass cream must be made, the bi-based glass material is 7 with the mixing quality ratio of ethyl cellulose and the mixture of terpinol:3.
Present invention also offers a kind of welding method for welding for china with metal, it is used described in as above any one The solder for welding for china with metal, by the solder for welding for china with metal be placed in ceramics and metal between enter Row reflow soldering, the maximum temperature of the reflow soldering is 600-1000 DEG C.
As a further improvement on the present invention, the described solder for welding for china with metal can be bulk, film, micro- The shapes such as rice noodles, micro belt, micron tube, micron particles, nano wire, nanobelt, nanotube or nano particle.
As a further improvement on the present invention, the ceramics are aluminium oxide ceramics, aluminium nitride ceramics or silicon nitride ceramics.
As a further improvement on the present invention, the metal is copper, aluminium or silver.
As a further improvement on the present invention, the reflow soldering includes scaling powder volatilization area, recirculating zone and freezing range, The temperature of the recirculating zone is 500-1000 DEG C.
As a further improvement on the present invention, the reflow soldering is in air, vacuum, nitrogen, hydrogen or inert gas gas Carried out in atmosphere.
Compared with prior art, beneficial effects of the present invention are:
Technical scheme, the chemical interaction based on metal Yu bismuth oxide, obtains bond strength higher, no Ceramics in the past and the simple glassy bond of metal and the connection method of high temperature sintering are same as, the method is simple, and low cost is operable Property it is strong, for microdevice manufacture provides another practicable method.
Brief description of the drawings
Fig. 1 is the grip device structural representation that potsherd and sheet metal are fixed in embodiment.In figure:1- pressing plates;2- holds Microscope carrier;3- fixing nuts.
Fig. 2 is the grip device top view of embodiment 1.
Fig. 3 is the scanning electron microscope (SEM) photograph that aluminium oxide ceramics is connected with copper sheet in embodiment 1.
Fig. 4 is that bonding strength changes over time curve in embodiment 1.
The scanning electron microscope (SEM) photograph that Fig. 5 is connected for aluminium nitride ceramics in embodiment 2 with copper sheet.
Specific embodiment
Preferably embodiment of the invention is described in further detail below.
Refluxing unit used includes sample stationary fixture and reflow ovens in following examples, and the sample stationary fixture is preferred Structure as depicted in figs. 1 and 2, the device include pressing plate 1, sample stage 2 and fastening bolt 3;Pressing plate 1 and sample stage 2 are by tight Fixing bolt 3 is connected.
Above-mentioned sample stationary fixture is placed in reflow ovens, and high temperature reflux, prepared ceramics cover metal connecting structure.
Embodiment 1
A kind of solder for welding for china with metal, it is bi-based glass material, and its component for including and its mass percent are: Bi2O370%, B2O315%, ZnO 12%, remaining is trace additives;The trace additives include SiO2、TiO2、 MgO, its mass percent is respectively 1%, 1%, 1%.
The solder for welding for china with metal is prepared paste solder using following steps:
It is 20 μm of powder of particle diameter that first the bi-based glass material is ground, and is then 1 with mass ratio:3 ethyl celluloses and terpinol Mixture match somebody with somebody organic binder bond mixture be obtained, the bi-based glass material is mixed with the mixture of ethyl cellulose and terpinol It is 7 to close mass ratio:3, it is made bismuth-containing glass cream.
It is welding raw material with the bismuth-containing glass cream for preparing, pure copper sheet and aluminium oxide ceramics are welding base metal.Pars intermedia It is divided into bismuth-containing glass cream, top is copper sheet, bottom is alumina ceramic plate, copper sheet and aluminium oxide ceramics chip size be 5 × 5 × 1mm.By on glass cream brush to the alumina ceramic plate, then copper sheet is covered on glass cream.
The sample of above-mentioned bonding is placed on the sample stage of fixture, fastening screw makes compressing tablet compress sample.Then, by fixture It is placed in reflow ovens and sets reflux temperature as 700,800,850 and 900 DEG C respectively, nitrogen is led in reflux course, protects copper sheet It is not oxidized, subsequent furnace cooling.
After by resulting ceramic copper-clad pattern handling, electronic microscope photos is scanned to it, fig. 3, it is shown that Solder and ceramics there occurs metallurgical reaction, form a stratification compound;Compound is not formed between copper sheet and solder, but is leaned on Nearly copper side, forms one layer of bismuth metal in solder, bismuth is formd with copper and combined closely.And copper surface is corroded to form groove by bismuth Shape structure, also increases bond strength.Stretched experimental test, as shown in figure 4, the structure is in 850 DEG C of tensile strength maximums, Up to 12MPa, illustrate that the method can effectively connect aluminium oxide ceramics and copper.With the direct-connected method of existing ceramic copper-clad(DBC)Phase Than the method connection temperature only has 850 DEG C of 1060 DEG C much smaller than DBC;Active metal welding uses substantial amounts of noble metal It is welding raw material, by comparison, the method does not use noble metal, and cost is very low;Simple glass sealing (bonding) resistance to compression is not Tension, by comparison, the method has stronger tensile property, is better than glass sealing (bonding).
Embodiment 2
(1)From the structure in embodiment 1 as raw material matrix, aluminium oxide ceramics is changed to aluminium nitride ceramics, makes sample.
(2)Sample production method is similar with embodiment 1, and reflux temperature is 850 DEG C, nitrogen is led in reflux course, with stove Cooling.
Sample is obtained through surface sweeping electron microscopic observation, as shown in figure 5, forming fine and close tissue, stretched experimental test, the knot Structure tensile strength illustrates that the method can effectively connect aluminium nitride ceramics and copper also up to 10MPa.
Embodiment 3
On the basis of embodiment 1, the component and its mass percent that the bi-based glass material is included are:Bi2O380%, B2O3 7%, ZnO 9%, remaining is trace additives;The trace additives include SiO2、TiO2, MgO, its mass percent point Wei 1%, 1%, 2%.The preparation method of the solder for welding for china with metal is with embodiment 1.
Solder for welding for china with metal obtained above is used for the connection of copper sheet and aluminium nitride ceramics, by drawing Experimental test is stretched, the construction stretch intensity is 8.2MPa.
Embodiment 4
On the basis of embodiment 1, the component and its mass percent that the bi-based glass material is included are:Bi2O360%, B2O3 18%, ZnO 19%, remaining is trace additives;The trace additives include SiO2、TiO2, MgO, its mass percent Respectively 1%, 1%, 1%.The preparation method of the solder for welding for china with metal is with embodiment 1.
Solder for welding for china with metal obtained above is used for the connection of copper sheet and aluminium nitride ceramics, by drawing Experimental test is stretched, the construction stretch intensity is up to 7.6MPa.
Above content is to combine specific preferred embodiment further description made for the present invention, it is impossible to assert Specific implementation of the invention is confined to these explanations.For general technical staff of the technical field of the invention, On the premise of not departing from present inventive concept, some simple deduction or replace can also be made, should be all considered as belonging to of the invention Protection domain.

Claims (9)

1. a kind of solder for welding for china with metal, it is characterised in that:It is bi-based glass material, the bi-based glass material bag The component and its mass percent for containing be:Bi2O360-80%, B2O35-20%, ZnO 7-20%, remaining is trace additives; The trace additives include SiO2、TiO2, one or more in MgO.
2. the solder for welding for china with metal according to claim 1, it is characterised in that:Its component for including and its Mass percent is:Bi2O365-75%, B2O38-18%, ZnO 10-16%, remaining is trace additives.
3. the solder for welding for china with metal according to claim 1, it is characterised in that:It is described for ceramics and golden The profile for belonging to the solder of welding is bulk, film, micro wire, micro belt, micron tube, micron particles, nano wire, nanobelt, receive Mitron or nano particle.
4. the solder for welding for china with metal according to claim 1, it is characterised in that:The ceramics are aluminum oxide Ceramics, aluminium nitride ceramics or silicon nitride ceramics.
5. the solder for welding for china with metal according to claim 4, it is characterised in that:The metal is copper, aluminium Or silver.
6. the solder for welding for china with metal according to claim 1 ~ 5 any one, it is characterised in that:It is used Following steps prepare paste solder:It is 10 ~ 50 μm of powder of particle diameter that the bi-based glass material is ground, and is then with mass ratio 1:(2~4)Ethyl cellulose and terpinol mixture with being made bismuth-containing glass cream, the bi-based glass material and ethyl The mixing quality ratio of the mixture of cellulose and terpinol is 7:3.
7. a kind of welding method for welding for china with metal, it is characterised in that:It is used such as claim 1 ~ 6 any one The described solder for welding for china with metal, by the solder for welding for china with metal be placed in ceramics with metal it Between carry out reflow soldering, the maximum temperature of the reflow soldering is 600-1000 DEG C.
8. the welding method for welding for china with metal according to claim 7, it is characterised in that:The reflow soldering Including scaling powder volatilization area, recirculating zone and freezing range, the temperature of the recirculating zone is 500-1000 DEG C.
9. the welding method for welding for china with metal according to claim 8, it is characterised in that:The reflow soldering Carried out in air, vacuum, nitrogen, hydrogen or inert gas atmosphere.
CN201710103807.1A 2017-02-24 2017-02-24 A kind of solder and welding method for welding for china with metal Expired - Fee Related CN106825978B (en)

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Cited By (6)

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Publication number Priority date Publication date Assignee Title
CN110369904A (en) * 2019-06-27 2019-10-25 天通(嘉兴)新材料有限公司 A kind of sintering method of laser pipe cap
CN110524079A (en) * 2019-07-31 2019-12-03 常熟市银洋陶瓷器件有限公司 The silver-copper brazing alloy layer preparation method being brazed for metallized ceramic and metal parts
CN111566074A (en) * 2018-01-25 2020-08-21 三菱综合材料株式会社 Copper-ceramic joined body, insulated circuit board, method for producing copper-ceramic joined body, and method for producing insulated circuit board
CN112170997A (en) * 2020-09-25 2021-01-05 西华大学 Glass brazing filler metal for brazing MCT microwave dielectric ceramic and metal and brazing method thereof
CN112191968A (en) * 2020-10-14 2021-01-08 哈尔滨工业大学(深圳) Packaging method for enhancing metallurgy of nano solder interface
CN114940004A (en) * 2022-04-14 2022-08-26 天诺光电材料股份有限公司 Copper-clad nitride ceramic substrate and preparation method thereof

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CN104416252A (en) * 2013-08-28 2015-03-18 中国科学院金属研究所 Preparation method of preferred orientation texture welding spots
CN105418131A (en) * 2015-12-30 2016-03-23 哈尔滨工业大学 Alumina ceramic low temperature brazing connection method

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JPH08315634A (en) * 1995-05-23 1996-11-29 Murata Mfg Co Ltd Conductive paste and ceramic electronic component using it
CN102010127A (en) * 2009-09-07 2011-04-13 上海歌灵新材料科技有限公司 Lead-free solder glass
CN103113026A (en) * 2013-03-06 2013-05-22 广州市力银电子科技有限公司 Glass powder for electronic paste and preparation method thereof
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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111566074A (en) * 2018-01-25 2020-08-21 三菱综合材料株式会社 Copper-ceramic joined body, insulated circuit board, method for producing copper-ceramic joined body, and method for producing insulated circuit board
CN111566074B (en) * 2018-01-25 2022-04-22 三菱综合材料株式会社 Copper-ceramic joined body, insulated circuit board, method for producing copper-ceramic joined body, and method for producing insulated circuit board
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CN110524079A (en) * 2019-07-31 2019-12-03 常熟市银洋陶瓷器件有限公司 The silver-copper brazing alloy layer preparation method being brazed for metallized ceramic and metal parts
CN112170997A (en) * 2020-09-25 2021-01-05 西华大学 Glass brazing filler metal for brazing MCT microwave dielectric ceramic and metal and brazing method thereof
CN112191968A (en) * 2020-10-14 2021-01-08 哈尔滨工业大学(深圳) Packaging method for enhancing metallurgy of nano solder interface
CN112191968B (en) * 2020-10-14 2022-05-10 哈尔滨工业大学(深圳) Packaging method for enhancing metallurgy of nano solder interface
CN114940004A (en) * 2022-04-14 2022-08-26 天诺光电材料股份有限公司 Copper-clad nitride ceramic substrate and preparation method thereof
CN114940004B (en) * 2022-04-14 2023-12-22 天诺光电材料股份有限公司 Copper-clad nitride ceramic substrate and preparation method thereof

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