CN106813680A - A kind of static demarcating method of high accuracy, high-resolution quartz immunity sensor - Google Patents
A kind of static demarcating method of high accuracy, high-resolution quartz immunity sensor Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
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Abstract
The invention discloses high accuracy, the static demarcating method of high-resolution quartz immunity sensor, due to mainly including：Simplify model equation when traditional accelerometer is tested under ground gravity using newton iteration formula, indexing panoramic table measurement weight component data input amount measures voltage data output quantity, determines input quantity and output magnitude relation and transmission function, data processing；Bias is corrected and error compensation；Such that it is able to overcome the error and measurement error defect advantage high that one-dimensional quartz flexibility acceleration sensor is present in the prior art.
Description
Technical field
The present invention relates to field of measuring technique, in particular it relates to a kind of high accuracy, high-resolution quartz immunity sensor
Static demarcating method.
Background technology
Acceleration transducer is one of inertial navigation and inertial guidance core parts, and its accuracy has weight to navigation accuracy
Want meaning.Mounting means is used especially for acceleration transducer（It is internal or external）Otherness, certainty of measurement can also be produced
Raw Different Effects.The error and measurement error defect high for overcoming existing one-dimensional quartz flexibility acceleration sensor to exist.
The content of the invention
It is an object of the present invention to regarding to the issue above, propose the quartzy immunity sensor of a kind of high accuracy, high-resolution
Static demarcating method, to realize both having met microgravimetry function and the performance indications requirement on ground in aerospace system field, together
Shi Zhenshi simulates the calibrating parameters in the in-orbit state in space station.After to in-orbit data analysis, its accuracy is true and reliable, is empty
Between stand related experiment expansion provide reliably ensure.
To achieve the above object, the technical solution adopted by the present invention is：A kind of high accuracy, high-resolution quartz immunity sensing
The static demarcating method of device, mainly includes：
Step 1：Simplify model equation when traditional accelerometer is tested under ground gravity using newton iteration formula；
Step 2：Measurement weight component data input amount；
Step 3：Measurement voltage data output quantity；
Step 4：Determine input quantity and output magnitude relation and transmission function；
Step 5：Data processing；
Step 6：Bias is corrected and error compensation.
Further, step 1 is specially model equation when traditional accelerometer is tested under ground gravity
（1）
Substitute into acceleration transducer model formation using different groups of calibrating parameters carries out numerical computations using newton iteration formula,
Constantly it is iterated using the equation, gradually close to optimal value, most system errors are controlled in specified scope at last, iteration
During solve coefficient using least square method, by formula（1）Finally it is reduced to,
It is constant multiplier（2）；
（3）.
Further, step 2 is specifically, input weight componentWhereinFor gravity plus
Velocity component,It is misalignment, to demarcating test indexing panoramic table " zeroing ", it is a0 to be tested after energization and noted down, if
Indexing panoramic table is put from after " 0 " angle a certain angle of rotation, and after system stabilization, measuring apparatus start to test and record gravity point
Amount a1, a2 ... ... an, are once again set up indexing panoramic table and reversely rotate a certain angle from measurement range maximum angle after the completion of record
Afterwards, and after system stabilization, measuring apparatus start to test and carry out record an ' ... a1 ', finally return to " 0 " angle position a0.
Further, acceleration analysis data are obtained into data i.e. magnitude of voltage after data processing software is parsed, in fortune
Row data processing software puts scale parameter, bias is, obtain measurement data output quantity。
Further, step 4 is specifically, the magnitude of voltage conduct measured by tested productOutput quantity, using gravity dip angle
Method is demarcated, and using one group of corresponding data between coordinate direction output and input acceleration, carries out linear fit
Obtain measuring the corresponding linear functional relation of acceleration and voltage, and obtain constant multiplier G1 and G2, and bias b1 and b2, than
Whether the difference compared with G1 and G2 is equal to 0, if not step 3 is then re-executed, if it is compares the difference of b1 and b2, if
There is deviation, and seek its bias average value b=1/2 (b1+b2), and bias is modified, then demarcate the established angle of test equipment
The bias b3 that degree brings, demarcates the level most table of test equipment in the angle error of test sample platform, and bias is tested using three coordinates
B4, difference is sought to same angle measurement data different rotary angular measurement, calculates the bias that its mounting surface irregularity degree is brought
B5, is added in matched curve b to b3, b4 and b5 summation.
Further, step 5 processes software specifically, test initial data is imported into microgravimeter ground data, enters
Row data are parsed, and obtain the assembly average of each measuring point gathered data, remove dynamic disturbance；It imported into Origin softwares
Row treatment, first-order linear fitting i.e. least square method is carried out using Origin softwares, obtains different channel sensors in not Tongfang
To relation equation and the linearity between the input acceleration and output voltage under demarcation state, fit correlation equation form is：
Nominal data linear fit treatment is carried out to each passage,
During ground test, refer to day according to tested product coordinate or refer to ground state different application different formulas；
Carried out averagely for same passage different directions constant multiplier, bias averagely obtain the demarcation of final passage to be measured
Equation, as in-orbit use formula；
The resolving of each error term is carried out using the data after treatment and carry out error analysis and error compensation.
Further, step 6 specifically, to install rudimentary horn test, then to test data absolute value weighted average
Count in bias, zero bias compares with measurement index estimates actual calculating, sensor drift index is moon composition error50µ
g0, it is not counted in bias, error compensation is modified using regression test to calibration function.
The high accuracy of various embodiments of the present invention, the static demarcating method of high-resolution quartz immunity sensor, due to main
Including：Simplify model equation when traditional accelerometer is tested under ground gravity using newton iteration formula, index panoramic table
Measurement weight component data input amount, measures voltage data data output amount, determines input quantity and output magnitude relation and transmission
Function, data processing；Bias is corrected and error compensation；Such that it is able to overcome one-dimensional quartz flexible acceleration sensing in the prior art
Error and measurement error defect advantage high that device is present.
Other features and advantages of the present invention will be illustrated in the following description, also, the partly change from specification
Obtain it is clear that or being understood by implementing the present invention.
Below by drawings and Examples, technical scheme is described in further detail.
Brief description of the drawings
Accompanying drawing is used for providing a further understanding of the present invention, and constitutes a part for specification, with reality of the invention
Applying example is used to explain the present invention together, is not construed as limiting the invention.In the accompanying drawings：
Fig. 1 is acceleration test system theory of constitution figure；
Fig. 2 constitutes structure chart to demarcate instrumentation system；
Fig. 3 refers to a day direction coordinate schematic diagram for+Z；
Fig. 4 refers to place to coordinate schematic diagram for+Z；
Fig. 5 schemes to demarcate test specific implementation.
Specific embodiment
The preferred embodiments of the present invention are illustrated below in conjunction with accompanying drawing, it will be appreciated that preferred reality described herein
Apply example to be merely to illustrate and explain the present invention, be not intended to limit the present invention.Present invention is built-in for acceleration transducer
Mounting structure, by sense accelerations signal, signal amplification, analog-to-digital conversion, processor data computing and by data transfer
Afterwards, computer obtains acceleration analysis data.Static demarcating finally is carried out by measuring apparatus are demarcated to measurement signal, its purpose
It is the accuracy for improving measurement data.
It is measurement space microgravity environment that purposes of the present invention is.Acceleration transducer type is passed using quartzy immunity acceleration
Sensor, the acceleration transducer has the special feature that and is：Designed using condenser type difference measurement, measurement frequency band range is wide, measurement essence
The features such as degree height, high resolution, big dynamic range, it is particularly suitable for measuring quasi-steady state acceleration and small acceleration signal.This
Invention can be applicable to space microgravity scientific experiment, satellite without scientific experiments such as towing control, active damping, satellite gravity surveys
The field such as satellite and space station.
The scaling method is by acceleration test system and demarcates the realization of test equipment two parts group：
1）Acceleration test system composition is shown in accompanying drawing 1；
2）Demarcate test equipment composition structure and see accompanying drawing 2.
Static demarcating mentality of designing：
1) simplified model equation：Model equation when traditional accelerometer is tested under ground gravity is：
（1）
（1）In formula,It is the bias of X-axis,It is the constant multiplier of X-axisIt is X-axis
Actual accelerationIt is the second order nonlinear coefficient of X-axis,It is the three of X-axis
Rank nonlinear factor, It is X-axis and the cross-coupling coefficient of Y-axis。For
The cross-coupling coefficient of X-axis and Z axisAndWithIt is actual accelerationCross-couplings are imitated
Should be the bias of acceleration transducer certain sensitive axes because simultaneously this is axial and orthogonal direction is subject to send out acceleration effect
The raw slight phenomenon for changing, variable quantity is directly proportional to the product of the two acceleration, and proportionality coefficient is referred to as cross-coupling coefficient.It is right
Coupling between two sensitive axes generally obtains the coefficient of coup using 8 methods rollings of gravity, in 360 ° of angular ranges angularly
Value, its angle is in saturation state or in frequency frequency integral multiple altogether for the sensor, and error of measured data is larger, coupling
Coefficient accuracy rate is relatively low.The characteristics of four-point method is the zero inclined and second order nonlinear coefficient for demarcating acceleration transducer, with test
Time is short, the characteristics of data processing is simple, is usually used in stability, reperformance test and other demarcation.But four-point method has cannot
The shortcoming of constant multiplier and third-order nonlinear optical coefficient is separated, therefore third-order nonlinear optical coefficient can not be solved, can not determine to intersect
The coefficient of coup, under conditions of third-order nonlinear optical coefficient is disregarded, four-point method can obtain constant multiplier and Input axis misalignment
Approximation.Demarcate constant multiplier and Input axis misalignment exactly, and determine the intersecting axle coefficient of coup, it is necessary to using 8 methods or
More points method is tested, but the result brought is test process complicated, repeated poor due to each installs fixture, it is system-level in
The change of each state influences original calibration result.Some take different groups of calibrating parameters to substitute into acceleration transducer model public affairs
Formula carries out numerical computations using newton iteration formula, is constantly iterated using the equation, gradually close to optimal value, most at last
System errors are controlled in specified scope.There is noise jamming during due to data acquisition, so in order to reduce noise
Then influence to final calibration coefficient precision, can be averaging in each station acquisition data as prolonged as possible, or
Coefficient is solved using least square method during choosing more positions, iteration, is characterized in that each two position difference is got over
Big better but small for range, this method of accuracy acceleration transducer high is difficult to meet and requires.It is right（1）Model formation
Simplify to obtain：
2）Measurement data input quantity：Being input into weight component isWhereinFor gravity accelerates
Degree component,It is misalignment）For quartz flexible accelerometer producer misalignment：≤210-3rad(=6 ), according to acceleration
Sensor parameters 5）Middle ultimate resolutionIts corresponding angle is≤110-4rad（=3 ") ' relative to inclination maximumObvious very little is about 5%, in actually measurement,.And when indexing panoramic table, the horizontality of sign of setting a table and actual water
The deviation of level state, the installation rudimentary horn between acceleration transducer pedestal and indexing panoramic table can all reflectIn.Therefore, it is static
The primary difficulty of demarcation is Accurate DeterminingValue.And it is ± 3 to index panoramic table precision circular dividing table error of tilt ", meet and accelerate
Count the measurement request of ultimate resolution.And in actually measurement, it is desirable to；
3）Measurement data output quantity：Acceleration analysis data are obtained into data after data processing software is parsed（Electricity
Pressure value）, putting scale parameter in service data treatment software is, bias is；
4）Input ~ output relation and transmission function：The magnitude of voltage conduct measured by tested productOutput quantity.Inclined using gravity
Horn cupping is demarcated.Then using one group of corresponding data between coordinate direction output and input acceleration, linear fit is carried out
Can obtain measuring the corresponding linear functional relation of acceleration and voltage；In view of the influence of bias, while being repaiied to bias
Just, the purpose is to fitting function linearity minimum, it is optimal to be close to 0 linearity.
5）Data processing：Test initial data is imported into microgravimeter ground data treatment software, data parsing is carried out,
The assembly average of each measuring point gathered data is obtained, dynamic disturbance is removed；It imported into Origin softwares and is processed, utilizes
Origin softwares carry out first-order linear fitting（Least square method）, obtain different channel sensors under different directions demarcation state
Input acceleration and output voltage between relation equation and the linearity, fit correlation equation form is：To each passage
Carry out nominal data linear fit treatment.During ground test, refer to day according to tested product coordinate or refer to ground state different application not
Same formula；Carried out averagely for same passage different directions constant multiplier, bias averagely obtain the mark of final passage to be measured
Equation is determined, as in-orbit use formula.Using the data after treatment carry out each error term resolving and carry out error analysis with
Error compensation is the basis that follow-up on-orbit calibration data are laid；
6）Bias is corrected and error compensation：See accompanying drawing 3 and the test of the method for accompanying drawing 4 in coordinate schematic diagram to installing rudimentary horn and using.So
Test data absolute value weighted average is counted afterwards in bias, zero bias compares with measurement index estimates actual calculating, sensed
Device drift index is moon composition error50µg0, it is not counted in bias, error compensation is entered using regression test to calibration function
Row amendment.
In view of this, the purpose of the present invention is in the error and survey existed to existing one-dimensional quartz flexibility acceleration sensor
Amount error defect high, proposes the test method after a kind of improvement, and its test calibration parameter is applied in practice, and nominal data is accurate
True property is obtaining sufficient checking in orbit aerocraft.Within ± 10%, the linearity is≤0.001 to its accuracy error.
The present invention demarcates method of testing has the product of in-orbit flying experience in the type quartz flexible accelerometer practical application
Sufficiently applied in product.Because the error for causing inertial instruments has a lot, including non-random error and random error,
Non-random error has including zero inclined (drift), installs the random errors such as system errors general height for regarding zero-mean as in analysis
This white noise.
The present invention realizes small-range, bandwidth, the static demarcating method of high precision from application of engineering project.There is provided
Reliably test experiments platform.And error conspicuousness point of other directions to test data during to one-dimensional acceleration sensor calibration
Analysis, after scale parameter is optimized after regression test, had both met the microgravimetry work(on ground in aerospace system field
Can be with performance indications requirement, while calibrating parameters of the true simulation in the in-orbit state in space station.After to in-orbit data analysis, its
Accuracy is true and reliable, is reliably ensured for the expansion of space station related experiment is provided.
The involved parameter index in actual calibration process：
1) 4 paths acceleration transducer, 3 sensitive directions（X, Y and Z-direction）；
2) measurement range：
X1 roads：（- 150~+150）mg0（Tolerance ± 15mg0）, X2, Y, Z road：（- 10~+10）mg0（Tolerance ±
1mg0）;
3) Measurement bandwidth≤300Hz；
According to two amounts journey, the arrangement of measuring point is calculated respectively.According to the requirement of rating test linear fit, 5 etc. are at least chosen
The measuring point of spacing.For small-range passage maximum 10mg, its corresponding angle is calculated for 0.6 ° by arcsine formula, therefore
Determine that 7 tested points are respectively -0.8 °, -0.6 °, -0.3 °, 0 °, 0.3 °, 0.6 °, 0.8 °.Similarly, 9 ° of correspondence acceleration magnitudes
156mg, determines that tested point is -12 °, -9 °, -4.5 °, 0 °, 4.5 °, 9 °, 12 ° for wide range passage；
4) resolution：Measurement range（- 150~+150）mg0,≤100 μ g0,
（- 10~+10）mg0,≤10 μ g0
Show by carrying out checking test result comprising operating mode in 24：Under different operating modes, in measurement equipment measurement range
Measurement error is less than 0.36mg0；Acceleration transducer signals are by amplitude-frequency amplitude relative error after detection circuit in 300Hz
Within interior error ± 10%.
Especially, it should be noted that, it is contemplated that factors above allows for measurement accuracy error within ± 10%, passes through
Drawn a conclusion after installation rudimentary horn, temperature drift and other factors are analyzed and are verified：The scaling method its composition error is most very much not
More than 0.36mg0If pressing small-range（- 10~+10）mg0From the point of view of, meet tolerance ± 1mg0It is required that, measuring accuracy error
It is 3.6%, equally meets requirement within design objective requirement ± 10%.When actually using the method, if to measurement error and survey
In the case that accuracy of measurement is less demanding, can omit to error compensation using regression test this process, to measurement data result not
Large effect is constituted, while decreasing workload, work validity is improve
Finally it should be noted that：The preferred embodiments of the present invention are the foregoing is only, is not intended to limit the invention, although
The present invention is described in detail with reference to the foregoing embodiments, for a person skilled in the art, it still can be right
Technical scheme described in foregoing embodiments is modified, or carries out equivalent to which part technical characteristic.It is all
Within the spirit and principles in the present invention, any modification, equivalent substitution and improvements made etc. should be included in protection of the invention
Within the scope of.
Claims (8)
1. a kind of high accuracy, the static demarcating method of high-resolution quartz immunity sensor, it is characterised in that including following step
Suddenly：
Step 1：Simplify model equation when traditional accelerometer is tested under ground gravity using newton iteration formula；
Step 2：Weight component data input amount is measured using panoramic table is indexed；
Step 3：Measurement voltage data output quantity；
Step 4：Determine input quantity and output magnitude relation and transmission function；
Step 5：Data processing；
Step 6：Bias is corrected.
2. high accuracy according to claim 1, the static demarcating method of high-resolution quartz immunity sensor, its feature exist
In step 1 is specially model equation when traditional accelerometer is tested under ground gravity
（1）
Substitute into acceleration transducer model formation using different groups of calibrating parameters carries out numerical computations using newton iteration formula,
Constantly it is iterated using the equation, gradually close to optimal value, most system errors are controlled in specified scope at last, iteration
During solve coefficient using least square method, by formula（1）Finally it is reduced to,
It is constant multiplier（2）；
（3）.
3. high accuracy according to claim 2, the static demarcating method of high-resolution quartz immunity sensor, its feature exist
In step 2 is specifically, input weight component, whereinIt is gravitational acceleration component,To lose
Quasi- angle, to demarcate test indexing panoramic table " zeroing ", it is a0 to be tested after energization and noted down, set index panoramic table from
After " 0 " angle rotates a certain angle, and after system stabilization, measuring apparatus start to test and record weight component a1, a2 ... ...
An, is once again set up indexing panoramic table from after the measurement range maximum angle a certain angle of reverse rotation after the completion of record, and system is steady
After fixed, measuring apparatus start to test and carry out record an ' ... a1 ', finally return to " 0 " angle position a0.
4. high accuracy according to claim 3, the static demarcating method of high-resolution quartz immunity sensor, its feature exist
In step 3 is specifically, by acceleration analysis data by obtaining data i.e. magnitude of voltage after data processing software parsing, running
Data processing software puts scale parameter=1, bias is, obtain measurement data output quantity。
5. high accuracy according to claim 4, the static demarcating method of high-resolution quartz immunity sensor, its feature exist
In step 4 is specifically, the magnitude of voltage conduct measured by tested productOutput quantity, is demarcated using gravity dip angle method, is utilized
The coordinate direction export and input acceleration between one group of corresponding data, carry out linear fit can obtain measurement acceleration with
The corresponding linear functional relation of voltage, and constant multiplier G1 and G2, and bias b1 and b2 are obtained, comparing the difference of G1 and G2 is
It is no to be equal to 0, if not step 3 is then re-executed, if it is compare the difference of b1 and b2, if deviation, and ask its inclined
Value average value b=1/2 (b1+b2), and bias is modified, the bias b3 that the setting angle of test equipment brings then is demarcated,
The level most table of test equipment is demarcated in the angle error of test sample platform, bias b4 is tested using three coordinates, to same angle measurement
Data different rotary angular measurement seeks difference, calculates the bias b5 that its mounting surface irregularity degree is brought, and b3, b4 and b5 are asked
Be added in matched curve b.
6. high accuracy according to claim 5, the static demarcating method of high-resolution quartz immunity sensor, its feature exist
In step 5 processes software specifically, test initial data is imported into microgravimeter ground data, carries out data parsing, obtains
The assembly average of each measuring point gathered data, removes dynamic disturbance；It imported into Origin softwares and is processed, utilizes
Origin softwares carry out the first-order linear i.e. least square method of fitting, obtain different channel sensors under different directions demarcation state
Input acceleration and output voltage between relation equation and the linearity, fit correlation equation form is：To each passage
Nominal data linear fit treatment is carried out,
During ground test, refer to day according to tested product coordinate or refer to ground state different application different formulas；
Carried out averagely for same passage different directions constant multiplier, bias averagely obtain the demarcation of final passage to be measured
Equation, as in-orbit use formula；
The resolving of each error term is carried out using the data after treatment and carry out error analysis and error compensation.
7. high accuracy according to claim 6, the static demarcating method of high-resolution quartz immunity sensor, its feature exist
In, step 6 specifically, testing installing rudimentary horn, then test data absolute value weighted average is counted in bias, zero is inclined
Value compares with measurement index estimates actual calculating, and sensor drift index is moon composition error50µg0, it is not counted in bias
In.
8. high accuracy according to claim 7, the static demarcating method of high-resolution quartz immunity sensor, its feature exist
In when composition error is maximum no more than 0.36mg0, by small-range（- 10~+10）mg0Refer to, it is allowed to deviation ± 1mg0, measurement
Accuracy errors are 3.6%, and when equally meeting within design objective requirement ± 10%, then step 6 also includes adopting error compensation
Calibration function is modified with regression test.
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| CN114047561B (en) * | 2021-09-28 | 2023-06-20 | 中国船舶重工集团公司第七0七研究所 | Static relative gravity meter inclination error compensation method |
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| CN117435860B (en) * | 2023-12-12 | 2024-03-15 | 无锡胜脉电子有限公司 | Method and device for determining pressure sensor calibration scheme |
| CN117606517A (en) * | 2024-01-22 | 2024-02-27 | 河北美泰电子科技有限公司 | Circuit for calibrating inertial sensor, inertial sensor package and calibration method |
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