CN106802200B - A kind of flexibility vector tactile and slip sense compound sensor - Google Patents

A kind of flexibility vector tactile and slip sense compound sensor Download PDF

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Publication number
CN106802200B
CN106802200B CN201710100759.0A CN201710100759A CN106802200B CN 106802200 B CN106802200 B CN 106802200B CN 201710100759 A CN201710100759 A CN 201710100759A CN 106802200 B CN106802200 B CN 106802200B
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China
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layer
flexible
power
electrode
sensor
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CN201710100759.0A
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Chinese (zh)
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CN106802200A (en
Inventor
蒋永刚
刘梦洋
张德远
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北京航空航天大学
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/20Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress

Abstract

The invention discloses a kind of flexible vector tactile and slip sense compound sensors, are related to robot flexibility touch sensor and intelligent operation instrument field.Flexible vector tactile and slip sense compound sensor of the invention includes the upper layer flexible substrates fitted closely from top to bottom, power sensing structure layer and lower layer's flexible substrate.Power sensing structure layer includes top electrode layer, flexible pressure drag material layer and bottom electrode layer from top to bottom.There is equidistant micro structure array in the upper layer flexible substrates upper surface;The power sensing structure layer is fitted closely with lower layer's flexible substrate upper surface, and lower layer's flexible substrate has periodic symmetrical bulge-structure along sensor thickness direction, and the symmetrical quick unit of power is located at the two sides of the symmetrical bulge-structure.The present invention can judge to slide situation, measure normal pressure, frictional force and sliding velocity by internal simple symmetrical bulge-structure;There is micro structure array in sensor upper surface, improves clamping stability and safety.

Description

A kind of flexibility vector tactile and slip sense compound sensor
Technical field
The present invention relates to a kind of tactile and slip sense compound sensors, more particularly, to robot flexibility touch sensor field and intelligence A kind of flexible vector tactile and slip sense compound sensor of energy field of surgical.
Background technique
Flexible tactile and slip sense compound sensor is that mechanical hand or Minimally Invasive Surgery instrument acquisition clamp position information are indispensable Means.According to the signal of sensor feedback, normal pressure between clamping device and gripped object, frictional force, opposite fortune can be calculated The physical quantitys such as dynamic state, steadily clamp gripped object with realizing.Current most of touch sensors can only detect forward direction and connect Touch does not have sliding feel perceptional function.
Therefore, highly sensitive and wide range flexible vector tactile and slip sense compound sensor is developed, it can be convenient, close It pastes on machine watch face or Minimally Invasive Surgery clamping surface, while can detect that the power such as contact pressure, frictional force, slip state Information is learned, instrument intelligence can be promoted, improve safety and the practicability of Minimally Invasive Surgery.
China national patent of invention (application number 201410451649.5) discloses a kind of based on the soft of pressure-sensitive conductive rubber Property tactile and slip sense composite sensing array, the sensor using conductive rubber unit and test electrode mechanism formed four it is mutually perpendicular Resistance derives three-dimensional force by four varistor change in resistance of test.But the flexible sensing array electrode structure of the structure is multiple It is miscellaneous and low using single layer electrode structure sensitivity, also have in terms of distinguishing the static friction of sliding friction and variation structured Limitation.In addition, highest Applicable temperature is 50 using the Inastomer conductive rubber of INABA company production as pressure sensitive Degree, is not suitable for hot environment, being unable to satisfy surgical clamp needs the actual requirement of high-temperature sterilization.
Summary of the invention
Normal pressure can only be detected for most MEMS touch sensors and can not detect sliding, and sensor surface is without anti-skidding function Can defect, the present invention proposes a kind of flexible vector tactile and slip sense compound sensor, can measure contact surface power (including normal pressure And stiction) size and direction, judge whether slide when contact, realize it is stable it is sliding feel signal output, calculate and slide Move speed.Mechanical hand or intelligent operation equipment surfaces portable can be mounted on, mechanical information when obtaining clamping in real time is realized steady Fixed, safety holding.
Flexibility vector tactile and slip sense compound sensor provided by the invention, including the upper layer flexibility base fitted closely from top to bottom Bottom, power sensing structure layer and lower layer's flexible substrate.Power sensing structure layer include from top to bottom top electrode layer, flexible pressure drag material layer and Bottom electrode layer.
The upper layer flexible substrates by flexible composite by pouring, the techniques preparation such as nano-imprint process is described Power sensing structure layer, the power transfer layer as power sensing structure layer.There are equidistant micro structure array, and micro-structure cross section in upper surface For rectangle or trapezoidal.
The power sensing structure layer is fitted closely with lower layer's flexible substrate upper surface.Lower layer's flexible substrate is multiple by flexibility Condensation material is made, and has periodic symmetrical bulge-structure along sensor thickness direction, therefore the power sensing structure layer includes The multipair symmetrical quick unit of power of periodic arrangement.The quick unit of symmetrical power is located at the symmetrical bulge-structure Two sides.
The power sensing structure layer includes flexible pressure drag material layer, top electrode layer and bottom electrode layer, the top Electrode layer segmentation is discontinuous, and each section is symmetrically distributed in flexible pressure drag material layer upper surface in pairs, by micro-nano technology art pattern CAD Change.
The bottom electrode layer is integral continuous electrode film, sputters or be vaporized on flexible pressure drag material layer following table Face, each section of top electrode layer form a quick unit of power with corresponding bottom electrode layer, are symmetrically distributed in symmetrical bulge-structure Two sides.
The flexibility pressure drag material layer is rectangle composite conducting pressure drag material, total with top electrode layer and bottom electrode layer With composition power sensing structure layer.Power sensing structure layer, which is integrally bonded, to be bonded in lower layer's flexible substrate, and it is soft to be symmetrically arranged amongst lower layer in pairs The power sensing structure layer of the symmetrical bulge-structure two sides of property upper surface of substrate forms the quick unit of left and right two power.When flexible vector touches When sliding feel compound sensor is acted on by constant stiction, the difference output of the pairs of quick unit of two power is steady state value;Work as flexibility When vector tactile and slip sense compound sensor is acted on by the stiction of alternation, the difference output of the pairs of quick unit of two power is alternation letter Number;When flexible vector tactile and slip sense compound sensor is with occurring opposite sliding by contact object, the pairs of quick cell voltage of two power is defeated Frequency out is directly proportional to sliding speed, and the speed and cunning that can be slided by the output signal comprehensive judgement of the quick unit of multiple power The size of kinetic force of friction.Therefore the present invention judges whether sliding generates, slides using the output signal and its variation of the quick unit of multiple power Dynamic speed, the size of normal pressure and frictional force and direction.
The beneficial effects of the present invention are:
(1) flexible vector tactile and slip sense compound sensor of the invention can be sentenced by internal simple symmetrical bulge-structure It is disconnected to go out to slide situation, measure normal pressure, frictional force and sliding velocity;There is micro structure array in sensor upper surface, improves clamping Stability and safety.
(2) use flexible composite as upper layer flexible substrates and lower layer's flexible substrate material in the present invention, it is reliable resistance to With can satisfy the use condition of high-temperature sterilization.
(3) electrode layer structure is simple in the present invention, only need to using at symmetrical structure the quick unit of left and right two power it is defeated Out, i.e. three electrodes, can be obtained required physical quantity.
Detailed description of the invention
Fig. 1 is tactile and slip sense compound sensor sectional view of the invention.
Fig. 2 is tactile and slip sense compound sensor structural schematic diagram of the invention.
Fig. 3 is upper layer flexible substrate oblique view of the invention.
Fig. 4 is the oblique view of power sensing structure layer of the invention.
Fig. 5 is the quick unit stress deformation schematic diagram of power at a triangular hill structure of the invention.
In figure:
1. upper layer flexible substrates;2. power sensing structure layer;3. lower layer's flexible substrate;
201. top electrode layer;202. bottom electrode layer;203. flexible pressure drag material layers.
Specific embodiment
The present invention is described in detail with reference to the accompanying drawings and examples.
The present invention provides a kind of flexible vector tactile and slip sense compound sensor, the sensor generally rectangular parallelepiped structure, Surface has equidistant micro structure array, for contacting and conduction surfaces normal pressure or frictional force;Middle layer has multiple groups pairs of The quick unit of power, differential output signal is provided;Bottom surface and mechanical hand or equipment surfaces bond.The quick unit of pairs of power point It Wei Yu not symmetrical bulge-structure two sides.Specifically, as depicted in figs. 1 and 2, the sensor include: upper layer flexible substrates 1, Power sensing structure layer 2 and lower layer's flexible substrate 3, the power sensing structure layer 2 include top electrode layer 201 from top to bottom, bottom Electrode layer 202 and flexible pressure drag material layer 203.The power sensing structure layer 2 is fixed on upper layer flexible substrates 1 and lower layer's flexible liner Between bottom 3, the lower surface bonds of lower layer's flexible substrate 3 are fixed in mechanical hand or equipment surfaces, upper layer flexible substrates 1 it is upper Surface has micro-structure, for directly carrying and transmitting forces.
Spacing of the upper surface of the upper layer flexible substrates 1 there are equidistant micro structure array, between the micro-structure It is 10~500 μm, the section of micro-structure is rectangle or trapezoidal, as shown in Figure 3.Entire upper layer flexible substrates 1 by pouring, nanometer The techniques preparation such as coining or photoetching is on the power sensing structure layer 2.The upper surface micro-structure of upper layer flexible substrates 1, which can increase, rubs It wipes, it is whole to transmit pressure and frictional force, calculate sliding velocity.The upper layer flexible substrates 1 can be by epoxy resin or PDMS material Material is made, and maximum gauge is 50~1000 μm.
The power sensing structure layer 2 is adhered to the upper surface of lower layer's flexible substrate 3, and the upper table with lower layer's flexible substrate 3 is presented The identical shape and structure in face.Induction element as sensor perceives external forces, by top electrode layer 201 and bottom electrode The upper and lower surface that layer 202 is respectively attached to flexible pressure drag material layer 203 is constituted, as shown in Figure 4.
The material of the top electrode layer 201 and bottom electrode layer 202 is conductive metal.By sputtering or being deposited difference The upper and lower surface prepared in flexible pressure drag material layer 203 forms upper/lower electrode.Wherein make top by techniques such as etching, corrosion The top electrode segmentation of electrode layer 201 is discontinuous, exists only at the left and right sides of symmetrical bulge-structure, and be symmetric, bottom Two of the continuously distributed lower surface in flexible pressure drag material layer 203 of portion's electrode layer 202, each symmetrical bulge-structure two sides power on The lower electrode of pole and corresponding position forms two symmetrical quick units of power.
The flexibility pressure drag material layer 203, is the combined pressure material based on graphene, have excellent piezoresistive characteristic, Lag performance, flexibility and machinability have good voltage-sensitive effect to slight vibration, can detect that the power letter of high frequency short arc Number.Graphene film interlayer spacing reduces in pressure drag material when by compression, and tunnel current enhancing, resistance reduces;Conversely, electric Resistance increases.
The upper surface of lower layer's flexible substrate 3 has periodic symmetrical bulge-structure, such as isosceles triangle, isosceles ladder Shape or parabola shaped equal symmetric shapes.The bottom electrode layer 202 of power sensing structure layer 2 is bonded in lower layer's flexible substrate 3 Upper surface makes capable sensing structure layer 2 form shape identical with the Cycle-symmetry bulge-structure, and the top The top electrode of electrode layer 201 is located at the two sides of the bulge-structure, between the top electrode of two sides and the lower electrode of corresponding position Form one group of quick unit of pairs of power.3 lower surface of lower layer's flexible substrate and mechanical hand or equipment surfaces by micro-force sensing technique into Row bonding.The maximum gauge h of lower layer's flexible substrate 3 is 500~2000um, as shown in Figure 1.
The working principle of the invention:
The sensor is based on flexibility vector tactile and slip sense compound sensor made of piezoresistive effect.As shown in Figure 1, upper layer is soft Property substrate 1 is by the pressure conduction of horizontal friction force and vertical direction to power sensing structure layer 2.Due to power sensing structure layer 2 The symmetrical bulge-structure of piezoresistive effect and lower layer's flexible substrate 3, between the top electrode of symmetrical bulge-structure two sides and lower electrode respectively There are two equivalent resistance R1And R2.As shown in figure 5, making R under the action of power1And R2Resistance value changes.
Normal pressure sensing principle: normal pressure is conducted to power sensing structure layer 2 by upper layer flexible substrates 1 straight down, Under the action of normal pressure, symmetrical bulge-structure two sides are compressed by equivalent, then equivalent resistance R1And R2Reduce simultaneously, voltage output Become larger, and increment value is identical, increase is related with pressure size.Positive pressure value can be calculated after summation output.It can be by more The output signal comprehensive judgement normal pressure distribution situation of a quick unit of power.
Vector static friction sensing principle: the stiction Fx of horizontal direction passes through the upper layer flexible substrates 1 with micro-structure Power is conducted to power sensing structure layer 2, under the action of horizontal force, the resistance value of different parts flexibility pressure drag material layer 203 occurs Different variations can calculate stiction size and Orientation.Now by taking triangular hill structural capacity sensing structure layer 2 at one as an example Explanation.When stiction horizontally to the right when, the quick unit of power is compressed on the left of triangular hill structure, and power quick unit in right side is drawn It stretches, the equivalent resistance R of the quick unit of left side power1It is decreased to R1', the equivalent resistance R of the quick unit of right side power2Increase to R2', such as Fig. 5 institute Show;When stiction level to the left when, power quick unit in left side is stretched, and power quick unit in right side is compressed, the quick unit of left side power Equivalent resistance R1Increase, the equivalent resistance R of the quick unit of right side power2Reduce;The resistance value increase and decrease of the equivalent resistance of each quick unit of power is big Small identical, differential voltage output is a steady state value relevant to frictional force size.The size and just exported by differential voltage It is negative can determined level direction stiction size and direction.
Sliding speed detects mode: since there are micro-structure, gripped object and sensors for the upper surfaces of upper layer flexible substrates 1 Actually contact-separation-contact recurrent state when surface slides, voltage differential exports high potential, separation when contact When voltage differential export low potential, difference output is that relevant to a micro-structure period and Relative sliding speed exchange is believed at this time Number.It is determined when the micro-structure period, then the frequency of the quick cell voltage output of power is directly proportional to sliding speed, and can be quick by multiple power The speed of the output signal comprehensive judgement sliding of unit and the size of force of sliding friction.
Flexibility vector tactile and slip sense compound sensor provided by the invention the preparation method comprises the following steps: first by 201 He of top electrode layer Bottom electrode layer 202 is bonded in two surfaces up and down of flexible pressure drag material layer 203;Then bottom electrode layer 202 is bonded in The upper surface of lower layer's flexible substrate 3 makes capable sensing structure layer 1 that structure identical with the upper surface of lower layer flexible substrate 3 be presented;Most Upper layer flexible substrates 1 are poured afterwards, the preparation of nano impression or photolithographicallpatterned is on power sensing structure layer 2.

Claims (6)

1. a kind of flexibility vector tactile and slip sense compound sensor, it is characterised in that: the sensor includes close from top to bottom pastes Upper layer flexible substrates, power sensing structure layer and the lower layer's flexible substrate of conjunction;Table on the power sensing structure layer and lower layer's flexible substrate Face fits closely;Lower layer's flexible substrate is made of flexible composite, and it is periodically right to have along sensor thickness direction Claim bulge-structure, therefore the power sensing structure layer includes the multipair symmetrical quick unit of power of periodic arrangement;Described is symmetrical The quick unit of power be located at the two sides of the symmetrical bulge-structure;The upper layer flexible substrates preparation is quick in the power On structure sheaf, as the power transfer layer of power sensing structure layer, there is equidistant micro structure array in the upper surface of upper layer flexible substrates;It is described Power sensing structure layer include flexible pressure drag material layer, top electrode layer and bottom electrode layer, the top electrode layer segmentation is not Continuously, it is symmetrically distributed in flexible pressure drag material layer upper surface in pairs for each section, by micro-nano technology art pattern CAD;The bottom electricity Pole layer is integral continuous electrode film, sputters or be vaporized on flexible pressure drag material layer lower surface, each section of top electrode layer A quick unit of power is formed with corresponding bottom electrode layer, is symmetrically distributed in the two sides of symmetrical bulge-structure;The flexibility pressure drag Material layer is the combined pressure material based on graphene, and graphene film interlayer spacing subtracts in pressure drag material when by compression Small, tunnel current enhancing, resistance reduces;Conversely, resistance increases.
2. a kind of flexible vector tactile and slip sense compound sensor according to claim 1, it is characterised in that: the micro-structure it Between spacing be 10~500 μm, the cross section of the micro-structure is rectangle or trapezoidal.
3. a kind of flexible vector tactile and slip sense compound sensor according to claim 1, it is characterised in that: the upper layer is soft Property substrate be made of epoxy resin or PDMS material, maximum gauge be 50~1000 μm.
4. a kind of flexible vector tactile and slip sense compound sensor according to claim 1, it is characterised in that: the upper electrode Layer and the material of bottom electrode layer are conductive metal, are prepared above and below flexible pressure drag material layer respectively by sputtering or being deposited Surface forms upper/lower electrode.
5. a kind of flexible vector tactile and slip sense compound sensor according to claim 1, it is characterised in that: described is symmetrical convex Playing structure is isosceles triangle, isosceles trapezoid or parabola shaped.
6. a kind of flexible vector tactile and slip sense compound sensor according to claim 1, it is characterised in that: the lower layer is soft Property substrate maximum gauge h be 500~2000um.
CN201710100759.0A 2017-02-23 2017-02-23 A kind of flexibility vector tactile and slip sense compound sensor CN106802200B (en)

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CN108051027B (en) * 2017-11-23 2019-12-31 清华-伯克利深圳学院筹备办公室 Sliding sense sensor capable of measuring pressure and sliding simultaneously
CN109269694B (en) * 2018-11-08 2019-10-29 清华大学 Softness haptic perception sensing device, system and its manufacturing method
CN109580050B (en) * 2018-12-14 2020-02-11 电子科技大学 Flexible mechanical patterned sensor and preparation method thereof
CN109696260A (en) * 2018-12-25 2019-04-30 电子科技大学 A kind of novel pressure sensitivity meta structure
CN110095223A (en) * 2019-05-29 2019-08-06 京东方科技集团股份有限公司 A kind of pressure sensor
CN110487450A (en) * 2019-08-23 2019-11-22 南方科技大学 A kind of flexible touch sensation sensor and its preparation method and application
CN111735562B (en) * 2020-08-06 2021-01-15 钛深科技(深圳)有限公司 Film pressure sensor and preparation method thereof

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JP2002340700A (en) * 2001-05-14 2002-11-27 Matsushita Electric Ind Co Ltd Piezoelectric sensor
JP2003050165A (en) * 2001-08-06 2003-02-21 Sumitomo Wiring Syst Ltd Pressure-sensitive sensor
CN100541151C (en) * 2008-02-29 2009-09-16 合肥工业大学 Touch sensor based on flexible pressure-sensitive conductive rubber
CN102706489B (en) * 2012-06-13 2014-01-29 哈尔滨工业大学 Flexible three-dimensional force touch sensor of multi-fingered hands of human-simulated robot and three-dimensional force detecting system thereof
CN103134622B (en) * 2013-01-31 2014-12-10 中国科学院合肥物质科学研究院 Three-dimensional soft tactile sensor array
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