CN106796097A - Apparatus and method for carrying out the interferometer type distance measurement by temperature-compensating in laser processing workpiece - Google Patents
Apparatus and method for carrying out the interferometer type distance measurement by temperature-compensating in laser processing workpiece Download PDFInfo
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- CN106796097A CN106796097A CN201580045781.9A CN201580045781A CN106796097A CN 106796097 A CN106796097 A CN 106796097A CN 201580045781 A CN201580045781 A CN 201580045781A CN 106796097 A CN106796097 A CN 106796097A
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- measurement
- optical fiber
- workpiece
- arm
- interferometer
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
- G01B5/0014—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to temperature
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
- G01B9/02019—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different points on same face of object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02049—Interferometers characterised by particular mechanical design details
- G01B9/0205—Interferometers characterised by particular mechanical design details of probe head
Abstract
In the device (3) of the spacing (A) when in laser processing workpiece (2) between the workpiece surface (2a) of the reflection of measurement workpiece (2) and the datum level (2b) of reflection, interferometer (5) is with beam splitter (6), interferometer light (7) is assigned in measurement arm (9) as measurement beam (10) and assigned on reference arm (11) as reference beam (12) by the beam splitter, and with detector (13), the detector detects the measurement beam (10) reflected on workpiece surface (2a) and the reference beam (12) reflected at datum level (2b) place, wherein, measurement arm (9) and reference arm (11) are isometric in the coherence length of interferometer light (7).It is arranged according to the present invention,Measurement arm (9) with measurement optical fiber (14) and reference arm (11) with reference optical fiber (15),Measurement optical fiber (14) and reference optical fiber (15) are over the whole length or over part of its length,Especially in optical fiber (14,15) in the case of length difference in the whole length compared with short fiber,Abreast each other it is other extend and with each other in thermally contacting,Measurement arm (9) with first surface region (2a) as reflection workpiece surface and second surface region (2b) of the reference arm (11) with workpiece (2) as reflect datum level,And,Steering light tool (16) is disposed between workpiece (2) and measurement optical fiber (14) and/or the end positioned at workpiece side of reference optical fiber (15),Steering light tool makes measurement beam (10) and/or reference beam (15) jointly or with being individually separated move across measuring surface and/or datum level (2a,2b).
Description
Technical field
The present invention relates to a kind of device, its be used in laser processing workpiece measurement the reflection of workpiece workpiece surface with
Spacing between the datum level of reflection, the device has interferometer, and the interferometer has：Beam splitter, the beam splitter will interfere
Instrument light is assigned to and as measurement beam and assigned on reference arm as reference beam on measurement arm；And detector, detector spy
The measurement beam for being reflected on the surface of the workpiece and the reference beam reflected on datum level are surveyed, wherein, measure arm and benchmark
Arm is isometric within the coherence length of interferometer light.
Background technology
Interferometer is used to carry out distance measurement during laser processing procedure.Therefore, by two interferometer arms (=measurement
Arm) in one radiation with processing laser be almost coaxially aligned workpiece, the workpiece be used as interference mirror.It is preferred that, measurement is penetrated
Beam was for example spatially superimposed and was had by processing light by the beam splitter in laser Machining head before focusing with processing beam
Focus on measuring point.During another interferometer arm (reference arm) is positioned in measuring appliance (there is beam source, beam splitter,
Detector and analysis and processing unit).Typically, two interferometer arms have approximately equalised optical path length.For interferometer type
Distance measurement it is important that understand light path change.In reality, the light path in measurement arm is not only possible due to be measured
Spacing and change, and be likely in the light path due to interferometer arm (unintentionally) change and change.For example, in fiber guides
Interferometer in, by the measurement optical fiber end above the welding position that is sensed heating and cause the temperature with reference optical fiber
Differ from and thereby cause the interference signal caused by temperature to change, interference signal change causes measurement error during distance measurement.
In addition relative measurement is usually needed, so as to the spacing between two points (or face) for determining workpiece, for example hole is relative to piece table
Face is solded into depth or capillary depth.
The content of the invention
And task of the invention is, the measurement caused by temperature is excluded in terms of the measurement apparatus of the type being initially mentioned and is missed
Pattern that is poor and sensing workpiece surface or execution are spatially averaging.
According to the present invention, the task is solved in the following manner：Measurement arm has measurement optical fiber and reference arm has reference light
Fibre, also, measurement optical fiber and reference optical fiber are over the whole length or on partial-length, especially in the feelings that the length of optical fiber is different
Under condition in the whole length compared with short fiber, abreast it extend side by side and mutually in thermo-contact, the measurement arm has
As the workpiece surface of reflection, reference arm has the second surface region of workpiece as the datum level of reflection in first surface region,
Also, steering light tool, the steering light tool are disposed between workpiece and measurement optical fiber and/or the workpiece side end of reference optical fiber
Make measurement beam and/or the measured face of reference beam associated movement and/or datum level or move across measurement with being individually separated
Face and/or datum level.
According to the present invention, measurement optical fiber and reference optical fiber are thermally coupled to each other so that occur without the temperature difference being worth mentioning,
But the systematically temperature fluctuation in compensation transmission distance.Measurement beam and reference beam are by corresponding close fiber optic ground at that
This other ground is still dividually directed so that light path slightly mutually staggers.As a result, the interference signal of two beams only takes
Relative spacing certainly between workpiece surface and datum level, because the optical path length in measurement arm and reference arm fluctuates due to described
Parallel embodiment and compensated to the full extent.Reference beam can thus redirect in component surface (datum level) simultaneously
And measurement beam is redirect in measurement point or measuring surface.Steering light tool makes it possible to measurement beam and/or reference beam is common
Ground dividually moves across measuring surface or datum level, to implement one-dimensional or two-dimensional measurement.Thus workpiece surface can be sensed
Pattern or execution are spatially averaging.
In advantageous embodiment, measurement optical fiber and reference optical fiber are two independent optical fiber, and they are in its whole length
On degree or on partial-length, especially mutually pasted in the whole length compared with short fiber in the case of the length difference of optical fiber
Lean on.The two optical fiber can for example be directed in common light guide cable or protecting hose in thermo-contact.In another favourable reality
Apply in mode, measurement optical fiber and reference optical fiber are formed by the core and inner cladding of doubly clad optical fiber.
For the measurement to the spacing between two surface regions, measurement arm has work of the surface region as reflection
Part surface, and reference arm has another surface region of workpiece as the datum level of reflection so that by between interferometer measurement
Away from measured and unrelated with the optical path length fluctuation along measurement optical fiber and reference optical fiber relative to workpiece surface.
Advantageously, moreover imaging can be arranged between workpiece and measurement optical fiber and/or the workpiece side end of reference optical fiber
Tool, the lighting pattern (such as point, line or circle) that imaging tool determines measurement beam and/or reference beam is in workpiece surface
Upper imaging.
Advantageously, measurement optical fiber and reference optical fiber are between its workpiece side end is spaced from each other and is several millimeters to the maximum
Away from so that the different surface region of measurement beam and reference beam alignment pieces.Reference beam can directive component surface and survey
Amount beam can directive face to be measured.Because optical fiber end separates spacing, so two optical fiber are only mutually pasted on partial-length
Lean on.
It is particularly preferred that measurement apparatus are arranged in the processing head of laser machine, to measure processing head to workpiece
Spacing.Measurement beam can with and if necessary reference beam can also by the beam splitter of processing head with processing beam in space
It is upper to be superimposed and focused on measuring point by processing light tool.
The present invention also relates to a kind of for measuring workpiece by the interferometer of fiber guides in laser processing workpiece
The method of the spacing between the workpiece surface of reflection and the datum level of reflection, wherein, the measurement beam and reference beam of interferometer
Measurement optical fiber and reference optical fiber in be directed, wherein, it is described measurement optical fiber and the reference optical fiber over the whole length or
On partial-length, especially abreast it is extend side by side in the whole length compared with short fiber in the case of the length difference of optical fiber
And mutually in thermo-contact, wherein, make measurement beam and/or reference beam jointly or pass through measuring surface with being individually separated
And/or datum level is turned to.
Finally, the invention further relates to a kind of two surfaces in laser processing workpiece by interferometer measurement workpiece
The method of the spacing between region, wherein, the measurement beam and reference beam of interferometer are anti-in described two surface regions
Penetrate, wherein, make measurement beam and/or reference beam jointly or turned to by measuring surface and/or datum level with being individually separated.It is excellent
Choosing, interferometer light workpiece be present in two surface regions between step at be geometrically divided into measurement beam and benchmark
Beam.
Other advantages of the invention are obtained by claims, specification and drawings.It is mentioning before and can carry afterwards
But to feature itself be used alone or use in any combination in the case of multiple features.Shown and described reality
The mode of applying should not be construed as exhaustion, but only have for illustrating example feature of the invention.
Brief description of the drawings
Accompanying drawing shows:
Fig. 1 measurement apparatus for measuring with the spacing of workpiece of the invention, it has the measurement optical fiber of thermal coupling
And reference optical fiber；
Another measurement apparatus of the spacing between Fig. 2 two surface regions for measuring workpiece of the invention, its
Measurement optical fiber and reference optical fiber with thermal coupling；
Fig. 3 a, 3b two surface regions for measuring workpiece by measurement beam and reference beam of the invention it
Between spacing measurement apparatus, the measurement beam and reference beam are with free beam propagation
(Freistrahlpropagation) mode of (Fig. 3 a) and it is directed in common transmission optical fiber (Fig. 3 b)；And
The measurement apparatus of the spacing between Fig. 4 a, 4b two surface regions for measuring workpiece of the invention, tool
There is transmission optical fiber, the transmission fiber arrangement before beam splitter (Fig. 4 a) or afterwards (Fig. 4 b).
In Description of Drawings below, identical or function identical component is provided with consistent reference.
Specific embodiment
Processing head 1 shown in Fig. 1 of laser machine (not shown) is used to add by processing laser beam (not shown)
Work workpiece 2 and with measurement apparatus 3, the measurement apparatus are used for the workpiece surface 2a and processing head 1 of the reflection for measuring workpiece 2,
More precisely the spacing A and between the datum level 4 of processing head 1.
Measurement apparatus 3 include interferometer 5, and it has beam splitter 6, and the beam splitter is by 7 points of the interferometer light of interferometer light source 8
As measurement beam 10 and assigned to as reference beam 12 on reference arm 11 on to measurement arm 9, and including detector 13, should
Detector detects the measurement beam 10 reflected on workpiece surface 2a and the reference beam 12 reflected on datum level 4.Survey
Amount arm 9 has measurement optical fiber 14 and reference arm 11 has reference optical fiber 15, both equal length and over the whole length
Abreast it extend side by side and mutually in thermo-contact.The mirror-polishing towards workpiece 2 that datum level 4 passes through reference optical fiber 15
Optical fiber end is formed.Alternatively, datum level can also be formed by the independent mirror in reference arm 11.With the difference shown in Fig. 1, survey
Amount optical fiber and reference optical fiber 14,15 can also length it is unequal, wherein, described two optical fiber 14,15 are shorter in this case
In the whole length of optical fiber, but abreast it is extend side by side only on the partial-length compared with long optical fibers and is mutually in thermo-contact
In.
In arm 9 is measured, measurement beam 10 is directed by measuring optical fiber 14, is reflected on workpiece surface 2a, and quilt
The measurement beam 10 of reflection is re-coupled to be turned to towards detector 13 in measurement optical fiber 14 and by beam splitter 6.In reference arm
In 11, reference beam 12 is directed by reference optical fiber 15, is reflected and is reflected on the datum level 4 of reference optical fiber 15
Reference beam 12 is turned to by beam splitter 6 towards detector 13.The measurement beam and reference beam 14,15 assembled again are by detector 13
Detection, and the spacing A between workpiece surface 2a and datum level 4 is can determine that according to interference.Due to two optical fiber 14,15 hot couplings
Close, so not resulting in the temperature difference being worth mentioning and thereby the measurement caused by temperature will not being caused in absolute distance measurement
Error.
Described two optical fiber 14,15 can for example connect in common a light guide cable or flexible pipe as individual fibers in heat
It is directed in the case of touching.Alternatively, measurement optical fiber 14 can also be formed by the core of doubly clad optical fiber and reference optical fiber 15 is then led to
The inner cladding for crossing doubly clad optical fiber is formed.
Different from Fig. 1, in the measurement apparatus 3 shown in Fig. 2, measurement arm 9 has the first surface region 2a conducts of workpiece 2
The workpiece surface of reflection and reference arm 11 has the second surface region 2b of the workpiece as the datum level of reflection.Measurement beam and
Reference beam 10,12 is tight abreast by corresponding optical fiber 14,15, but is dividually guided to workpiece 2 so that light path is omited
Microfacies mutually staggers.Thus reference beam 12 can be redirect to first surface region 2a (such as the workpiece surface of datum level) with
And measurement beam 10 is redirect to measurement point or measuring surface 2b.The measurement beam for being reflected and reference beam 14,15 assembled again
Detected by detector 13, and two workpiece surface 2a are determined according to their interference, the spacing A between 2b.Due to two light
Fine 14,15 thermal coupling is without the temperature difference that causes to be worth mentioning and thereby will not be caused by temperature when relative spacing is measured
The error for causing.
Steering light tool is disposed between workpiece 2 and measurement optical fiber and the workpiece side end of reference optical fiber 14,15 or is imaged
Light tool 16.Measurement beam and/or reference beam 10,12 can be made jointly or dividually to move across by steering light tool 16 described
Two surface regions 2a, 2b, to implement one-dimensional or two-dimensional measurement.Thus can for example sense the pattern of workpiece surface and perform
Spatially it is averaging.Have 16 formable measurement beams and/or reference beam 10,12 by imaging, so as on the surface
Region 2a, produces the lighting pattern (such as point, line or circle) of determination on 2b.
Can be as indicated in dotted line in fig. 2 by swingable to base with the datum level of the spacing of workpiece for measuring
Mirror 4 in quasi- arm 11 is formed.Thus can be in two methods of operation --- the measurement of temperature-compensating ground is mended with the spacing and temperature of workpiece
Measure the spacing between two surface regions with repaying --- between change.The measurement range of interferometer 5 is by interferometer light source 8
Spectral width and measurement arm determine with the path length difference of reference arm 9,11.In order to be adapted to the measurement range, can be by base
The mirror 4 of quasi- arm 11 is moved along optical axial and thereby is adapted to the path length of reference arm 11.
Different from shown in Fig. 2, measurement optical fiber and reference optical fiber 14,15 can separate most relative to each other in its workpiece side end
The spacing of big several millimeters so that measurement beam and reference beam 10,12 are mapped to the surface region for correspondingly separating spacing of workpiece 2
On 2a, 2b.
The optical element that the beam splitting need not be forced through measurement apparatus 3 is carried out, but can by workpiece 2 not
Obtained with reflection position.In the case of the measurement apparatus 3 shown in Fig. 3 a, by way of beam splitter 17 is with free beam propagation
Incident interferometer light 7 is present in two surface region 2a in workpiece 2, and just survey is geometrically being divided at the step 18 between 2b
Amount beam 10 and reference beam 12, i.e. interferometer light 7 in surface region 2a as measurement beam 10 by reflection on another surface
Reflected as reference beam 12 on the 2b of region.7 luminous point on the surface of the workpiece of interferometer light is big when for example in laser deep welding
When the diameter of capillary is welded, a part for interferometer light 7 is anti-from the workpiece surface in the surrounding environment of welding capillary
Penetrate and another part weld capillary in reflected, thereby interfere with instrument light 7 " naturally " and be divided into measurement beam and reference beam
10,12.The measurement beam for being reflected and reference beam 10,12 assembled again are turned to by beam splitter 17 towards detector 13.According to
The interference for detecting there can determine two workpiece surface 2a, the spacing A between 2b.
Different from Fig. 3 a, interferometer light 7 is guided to workpiece by transmitting optical fiber 19 in the measurement apparatus 3 shown in Fig. 3 b
2, and guided by transmitting optical fiber 19 in two upper measurement beams for being reflected of surface region 2a, 2b and reference beam 10,12
Return to beam splitter 17.
In the case of Fig. 4 a, the measurement apparatus 3 shown in 4b, interferometer light 7 splits into measurement beam and reference beam 10,
12 are carried out in independent beam splitter 6, are arranged in fig. 4b before the beam splitter is arranged in transmission optical fiber 19 in fig .4
After the transmission optical fiber.In fig. 4b, beam splitter 5 is also used for the difference of measurement beam and the alignment pieces 2 of reference beam 10,12
Surface region 2a, 2b.
Claims (8)
1. a kind of workpiece surface (2a) of the reflection for being used to measure the workpiece (2) at laser processing workpiece (2) and reflection
The device (3) of the spacing (A) between datum level (2b), the device has interferometer (5), and the interferometer has：Beam splitter (6；
18), interferometer light (7) is assigned in measurement arm (9) as measurement beam (10) and assigned on reference arm (11) by the beam splitter
As reference beam (12)；With detector (13), the detector measurement reflected on the workpiece surface (2a) of detection penetrates
Beam (10) and the reference beam (12) reflected on the datum level (2b), wherein, it is described to measure arm (9) and the reference arm
(11) it is isometric within the coherence length of the interferometer light (7), it is characterised in that
It is described measurement arm (9) with measurement optical fiber (14) and the reference arm (11) with reference optical fiber (15),
It is described measurement optical fiber (14) and the reference optical fiber (15) over the whole length or on partial-length, especially in optical fiber
In the case of the length difference of (14,15) in the whole length compared with short fiber, abreast it extend side by side and mutually in heat
In contact,
It is described to measure arm (9) with first surface region (2a) as the workpiece surface for reflecting, and the reference arm (11) has
The second surface region (2b) of the workpiece (2) as reflection datum level, and
In the workpiece side end and/or workpiece with the reference optical fiber (15) of the workpiece (2) and measurement optical fiber (14)
Steering light tool (16) is disposed between side end, steering light tool makes the measurement beam (10) and/or the reference beam
(15) measuring surface and/or datum level (2a, 2b) jointly or with being individually separated are moved across.
2. measurement apparatus according to claim 1, it is characterised in that the measurement optical fiber (14) and the reference optical fiber
(15) it is two independent optical fiber, described two independent optical fiber over the whole length or over part of its length, especially exist
During the length difference of optical fiber (14,15) in the whole length compared with short fiber, mutually recline.
3. measurement apparatus according to claim 1, it is characterised in that the measurement optical fiber (14) and the reference optical fiber
(15) formed by the core and inner cladding of doubly clad optical fiber.
4. measurement apparatus according to any one of the preceding claims, it is characterised in that the measurement optical fiber (14) and institute
State reference optical fiber (15) and be spaced from each other spacing in its workpiece side end.
5. measurement apparatus according to any one of the preceding claims, it is characterised in that the measurement apparatus (3) are arranged in
In the processing head (1) of laser machine.
6. the workpiece of the reflection of the interferometer (5) measurement workpiece (2) guided by optical fiber at laser processing workpiece (2) is used for
The method of the spacing (A) between the datum level (2b) of surface (2a) and reflection, wherein, the measurement beam of the interferometer (5)
(10) it is directed in measurement optical fiber (14) and in reference optical fiber (15) with reference beam (12), wherein, the measurement light
Fine (14) and the reference optical fiber (15) over the whole length or on partial-length, especially in the length of optical fiber (14,15)
In the case of difference in the whole length compared with short fiber, abreast it extend side by side and mutually in thermo-contact, wherein, make
The measurement beam (10) and/or the reference beam (15) jointly or be individually separated by the measuring surface and/or base
Quasi- face (2a, 2b) turns to.
7. be used at laser processing workpiece (2) by interferometer (5) measure the workpiece (2) two surface regions (2a,
The method of the spacing (A) between 2b), wherein, the measurement beam (10) and reference beam (12) of the interferometer (5) are described two
Reflected on individual surface region (2a, 2b), wherein, make the measurement beam (10) and/or the reference beam (15) jointly
Or turned to by measuring surface and/or datum level (2a, 2b) with being individually separated.
8. measuring method according to claim 7, it is characterised in that interferometer light (8) being present in the workpiece (2)
Step (18) between described two surface regions (2a, 2b) is in and be geometrically divided into measurement beam (10) and reference beam
(12)。
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102014216829.5A DE102014216829B4 (en) | 2014-08-25 | 2014-08-25 | Device and method for temperature-compensated interferometric distance measurement during laser processing of workpieces |
| DE102014216829.5 | 2014-08-25 | ||
| PCT/EP2015/069028 WO2016030246A1 (en) | 2014-08-25 | 2015-08-19 | Apparatus and method for the temperature-compensated interferometric measurement of a distance when laser-machining workpieces |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106796097A true CN106796097A (en) | 2017-05-31 |
| CN106796097B CN106796097B (en) | 2022-06-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201580045781.9A Active CN106796097B (en) | 2014-08-25 | 2015-08-19 | Device and method for temperature-compensated interferometric distance measurement during laser processing of workpieces |
Country Status (3)
| Country | Link |
|---|---|
| CN (1) | CN106796097B (en) |
| DE (1) | DE102014216829B4 (en) |
| WO (1) | WO2016030246A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112683185A (en) * | 2019-10-18 | 2021-04-20 | 三菱重工业株式会社 | Optical fiber detection device and method for detecting mechanical strain using optical fiber detection device |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102017001353B4 (en) | 2017-02-13 | 2022-12-15 | Lessmüller Lasertechnik GmbH | Device and method for monitoring a machining process for material machining using an optical measuring beam using temperature compensation |
| DE102019002942B4 (en) * | 2019-04-24 | 2023-08-03 | Lessmüller Lasertechnik GmbH | Measuring device and method for performing optical coherence tomography with a coherence tomograph |
| WO2022117207A1 (en) | 2020-12-04 | 2022-06-09 | Lessmueller Lasertechnik Gmbh | Method, device and machining system for monitoring a process for machining a workpiece by means of a high-energy machining beam |
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Also Published As
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| DE102014216829B4 (en) | 2021-08-05 |
| CN106796097B (en) | 2022-06-03 |
| WO2016030246A1 (en) | 2016-03-03 |
| DE102014216829A1 (en) | 2016-02-25 |
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