EP2236978B8 - Optical measuring device and method to determine the shape of an object and a machine to shape the object. - Google Patents

Optical measuring device and method to determine the shape of an object and a machine to shape the object. Download PDF

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Publication number
EP2236978B8
EP2236978B8 EP09157091.1A EP09157091A EP2236978B8 EP 2236978 B8 EP2236978 B8 EP 2236978B8 EP 09157091 A EP09157091 A EP 09157091A EP 2236978 B8 EP2236978 B8 EP 2236978B8
Authority
EP
European Patent Office
Prior art keywords
shape
machine
measuring device
optical measuring
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP09157091.1A
Other languages
German (de)
French (fr)
Other versions
EP2236978B1 (en
EP2236978A1 (en
Inventor
Marijn Sandtke
Lun-Kai Cheng
Dario Maria Rosario Lo Cascio
Teunis Cornelis Van Den Dool
Guido Petrus Herman Gubbels
Peter Martijn Toet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nederlandse Organisatie voor Toegepast Natuurwetenschappelijk Onderzoek TNO
Original Assignee
Nederlandse Organisatie voor Toegepast Natuurwetenschappelijk Onderzoek TNO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nederlandse Organisatie voor Toegepast Natuurwetenschappelijk Onderzoek TNO filed Critical Nederlandse Organisatie voor Toegepast Natuurwetenschappelijk Onderzoek TNO
Priority to EP09157091.1A priority Critical patent/EP2236978B8/en
Publication of EP2236978A1 publication Critical patent/EP2236978A1/en
Publication of EP2236978B1 publication Critical patent/EP2236978B1/en
Application granted granted Critical
Publication of EP2236978B8 publication Critical patent/EP2236978B8/en
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
EP09157091.1A 2009-04-01 2009-04-01 Optical measuring device and method to determine the shape of an object and a machine to shape the object. Not-in-force EP2236978B8 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP09157091.1A EP2236978B8 (en) 2009-04-01 2009-04-01 Optical measuring device and method to determine the shape of an object and a machine to shape the object.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP09157091.1A EP2236978B8 (en) 2009-04-01 2009-04-01 Optical measuring device and method to determine the shape of an object and a machine to shape the object.

Publications (3)

Publication Number Publication Date
EP2236978A1 EP2236978A1 (en) 2010-10-06
EP2236978B1 EP2236978B1 (en) 2013-09-18
EP2236978B8 true EP2236978B8 (en) 2013-12-04

Family

ID=40756463

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09157091.1A Not-in-force EP2236978B8 (en) 2009-04-01 2009-04-01 Optical measuring device and method to determine the shape of an object and a machine to shape the object.

Country Status (1)

Country Link
EP (1) EP2236978B8 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI457535B (en) * 2013-01-18 2014-10-21 Univ Nat Formosa Measurement method and device of irregular object size
DE102014216829B4 (en) * 2014-08-25 2021-08-05 Trumpf Laser- Und Systemtechnik Gmbh Device and method for temperature-compensated interferometric distance measurement during laser processing of workpieces
EP3614098A1 (en) 2018-08-24 2020-02-26 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Device and method for interferometric measurement of a two or three dimensional translation of an object
TWI809705B (en) 2022-02-09 2023-07-21 財團法人工業技術研究院 Processing path generating method and device

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6134003A (en) * 1991-04-29 2000-10-17 Massachusetts Institute Of Technology Method and apparatus for performing optical measurements using a fiber optic imaging guidewire, catheter or endoscope
US5410410A (en) 1992-12-29 1995-04-25 Mitutoyo Corporation Non-contact type measuring device for measuring three-dimensional shape using optical probe
DE19808273A1 (en) * 1998-02-27 1999-09-09 Bosch Gmbh Robert Interferometric measuring device for detecting the shape or the distance, especially of rough surfaces
US6147764A (en) * 1998-04-03 2000-11-14 Mitutoyo Corporation Of Kamiyokoba Optical interference profiler having shadow compensation
DE10244552B3 (en) * 2002-09-25 2004-02-12 Robert Bosch Gmbh Interferometric measuring device for determining the shape, roughness or distance of the surface of a measurement object comprises a measurement probe coupled to an interferometer via an optical fiber arrangement
NL1021600C2 (en) 2002-10-08 2004-04-13 Tno Measuring an optical path length difference.
EP1519144A1 (en) 2003-09-29 2005-03-30 Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO Free-form optical surface measuring apparatus and method
US7417740B2 (en) * 2004-11-12 2008-08-26 Medeikon Corporation Single trace multi-channel low coherence interferometric sensor
EP1939581A1 (en) * 2006-12-27 2008-07-02 Heliotis AG Apparatus for the contact-less, interferometric determination of surface height profiles and depth scattering profiles

Also Published As

Publication number Publication date
EP2236978B1 (en) 2013-09-18
EP2236978A1 (en) 2010-10-06

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