CN106793436A - A kind of nickel nickel oxide magnesia composite cathode, preparation method and applications for strengthening atmospheric pressure plasma discharge intensity - Google Patents
A kind of nickel nickel oxide magnesia composite cathode, preparation method and applications for strengthening atmospheric pressure plasma discharge intensity Download PDFInfo
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- CN106793436A CN106793436A CN201611169318.8A CN201611169318A CN106793436A CN 106793436 A CN106793436 A CN 106793436A CN 201611169318 A CN201611169318 A CN 201611169318A CN 106793436 A CN106793436 A CN 106793436A
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- nickel
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- magnesia
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/304—Field-emissive cathodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
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Abstract
The present invention provides a kind of nickel nickel oxide magnesia composite cathode, preparation method and applications for strengthening atmospheric pressure plasma discharge intensity, described nickel nickel oxide magnesia composite cathode increases negative electrode release seed electrons quantity, and then enhanced discharge plasma intensity, include metallic nickel, intermediate oxidation nickel dam and magnesium oxide layer successively from bottom to top；20~50um magnesium oxide layers are applied in metal nickel surface, high-temperature calcination grown one layer of nickel oxide layer of densification between metallic nickel and magnesium oxide layer, constitute metallic nickel, intermediate oxidation nickel dam and magnesium oxide layer composite construction.Magnesia and nickel oxide insulators in the composite construction play a part of stored charge in whole discharge process, and it is higher than 10 to be formed between coating and metal surface6The highfield of V/cm, inducing metal nickel electronics is removed through magnesium oxide layer as seed electrons because of tunnel-effect.For atmospheric pressure plasma discharge, in fields such as chemical industry, material, biology and environmental protection, application provides reference to the present invention.
Description
Technical field
The present invention propose it is a kind of strengthen atmospheric pressure plasma discharge intensity nickel-nickel oxide-magnesia composite cathode and
Preparation method, belongs to the field on atmospheric pressure plasma discharge source basis and application technology.
Background technology
Atmosphere pressure discharging low temperature plasma has good application prospect in fields such as environmental protection, chemical industry, material and biologies,
By researcher's extensive concern.The research work of current atmosphere pressure discharging low temperature plasma method for generation, is concentrated mainly on electricity
Two aspects of pole structure and excitation power supply.Electrode structure is relevant with electric field space distribution, such as inhomogeneous field corona discharge,
The dielectric barrier discharge of even electric field, packed bed electric discharge, creeping discharge and slide the low temperature plasma generation side of arc discharge etc.
Method etc., discharge type, state and plasma intensity are regulated and controled by adjusting electrode structure.The voltage wave of excitation power supply output
Shape, such as DC voltage, alternating voltage, high frequency voltage, pulse voltage, electric field anaplasia at any time is adjusted by adjusting voltage waveform
Change, and then adjust acceleration and the energy processes of electronics and ion in electric field.Determine in electrode structure and excitation power supply, while
Under conditions of electrode local environment is also certain, discharge plasma intensity is influenceed by electrode material, especially cathode material
Influence of the structure to transmitting seed electrons number.Discharge plasma intensity is improved, increases the ionized space between electrode, electrode
Between there must be enough seed electrons, induce the avalanche and discharge of volume, increase discharge channel quantity.
Field emission is a kind of mode of cold electron emission, and its principle is that cathode surface is in high electric field (＞ 106V/m),
The fermi level of cathode surface is reduced, the electronics inside cathode material is discharged electronics by tunnel-effect, as electric discharge kind
Sub- electronics, maintains electric discharge persistently to carry out.In process gas discharge, when the cathode surface that discharges has oxide, positive charge exists
Oxide surface is accumulated, and because oxide skin(coating) is very thin, causes oxide skin(coating) to form high field, promotes cathode material conduction band electricity
Son overcomes negative electrode potential barrier to be escaped from cathode surface, reaches oxide layer surface, and these electronics part is neutralizing oxide surface just
Electric charge, and remainder electronics promotes the generation of whole bubble-discharge plasma as seed electrons.
Document (cold cathode and its application, Chen Juzhong etc., photoelectronics technology, the 36-43 pages, 1988) describes MgO
Film can produce cold electron emission under certain condition.Document (Abnormal electron emission from MgO
Thin film under ion irradiation, T Tsujita etc., Surface and Interface Analysis, the
Page 137-140, volume 37,2005) describe in plasma flat display board (PDP) coating MgO film as protective layer,
Increase negative electrode release electron amount and reduction punctures beginning voltage, and then reach reduction plasma panel display power consumption
Purpose.Document (medium protection film of plasma scope, analogy will agriculture etc., vacuum electronics technology, the 19-22 pages, the 2nd phase,
2001) describe the material and feature of plasma scope medium protection film, and MgO media to currently the only application are protected
The property and preparation method of cuticula are summarized.(MgO film secondary electron yield γ's grinds document in PDP devices
Study carefully, Cai Qiuping etc., Solid State Electronics research and progress, the 146-420 pages, volume 23, the 4th phase, 2003) describe PDP and put
The basic functional principle of electricity, and the process of MgO film secondary has been highlighted, explained from mechanism and be coated in electricity
Extremely go up the effect of the noble gas discharge process in display encapsulation of MgO film.In a word, MgO is prepared by cathode surface
Film, forms magnesia cathode construction, it is possible to achieve the field emission between magnesia cathode insulation layer and metal, induces secondary
The generation of electronics, reaches the purpose for increasing seed electrons number.
The content of the invention
Atmosphere pressure discharging low temperature plasma has good application prospect in fields such as environmental protection, chemical industry, material and biologies,
By researcher's extensive concern.The research work of current atmosphere pressure discharging low temperature plasma method for generation, is concentrated mainly on electricity
Two aspects of pole structure and excitation power supply, by adjusting electrode shape, electrode configuration, high tension voltage waveform, high tension voltage peak value
Etc. method, regulate and control plasma physical and chemical effect.
The present invention is for atmospheric pressure plasma discharge under different electrode structures and the regulation and control of high voltage power supply two ways
The seed electrons for still existing are few, discharge inception voltage problem high, it is proposed that one kind enhancing atmospheric pressure plasma discharge is strong
The nickel-nickel oxide of degree-magnesia composite cathode, for increasing negative electrode release seed electrons quantity, and then enhanced discharge plasma
Body intensity.
In order to achieve the above object, the technical scheme is that：
A kind of nickel-nickel oxide-magnesia composite cathode for strengthening atmospheric pressure plasma discharge intensity, described nickel-oxygen
Change nickel-magnesia composite cathode is composite construction, and described nickel-nickel oxide-magnesia composite cathode increases negative electrode release seed
Electron amount, and then enhanced discharge plasma intensity, include metallic nickel, intermediate oxidation nickel dam and magnesia successively from bottom to top
Three part of layer.Described metallic nickel is silvery white conductor；Described intermediate oxidation nickel dam is green insulating barrier, and its resistivity is about
1014~1015Ω cm, thickness is 1~20um；Described magnesium oxide layer is that (grain diameter is 30nm to white particulate material insulating barrier
~1um), there is hole between particle, its resistivity is about 1012~1013Ω cm, thickness is 1~100um；Due to intermediate oxidation
Nickel dam is that spontaneous length is formed between nickel metal and magnesium oxide layer in high-temperature burning process, therefore nickel, nickel oxide, magnesia three
Consolidation is combined between layer, mechanical performance is strong, resistance to particle bombardment.
Described magnesium oxide layer and intermediate oxidation nickel dam are insulating barrier, and stored charge is used in whole discharge process,
Formed between coating oxidation magnesium layer and metal nickel surface is higher than 106The uneven uniform electric field of V/cm, the electronics of inducing metal nickel because
Tunnel-effect is removed and through magnesium oxide layer and nickel oxide layer, emitted as seed electrons.
The preparation method of the nickel-nickel oxide-magnesia composite cathode of described enhancing atmospheric pressure plasma discharge intensity
Comprise the following steps：
The first step, magnesium oxide coating is prepared in metal nickel surface
At ambient temperature, by electrophoresis, sol-gel process, spin-coating method, plasma spraying process, vapour deposition process,
Deposits materials in metal nickel surface, are formed 1~100 μm of magnesium oxide layer by electron-beam vapor deposition method, spray pyrolysis；Described raw material
It is powder body material or the organic compound of magnesium, described powder body material includes magnesia, peromag, magnesium carbonate, nitric acid
Magnesium, magnesium hydroxide, the organic compound of described magnesium is etc. the alkoxide, organic-magnesium presoma of magnesium.
Second step, high-temperature calcination forms intermediate layer nickel oxide
The metallic nickel of deposition of magnesium layer is processed into 1~2h in 900-1200 DEG C of high-temperature calcination, the centre of 1~20um is generated
Layer nickel oxide.Described heating rate is set to 5 DEG C/min, and from room temperature, 20 DEG C start to warm up.
Above-mentioned nickel-nickel oxide-magnesia composite cathode is applied in the sparking electrode system that atmospheric pressure plasma discharge occurs
In system, as electric discharge negative electrode, seed electrons transmitting is induced.As electric discharge minus plate, spininess (line)-plate plasma discharging is applied to
In body generation system, compared with traditional metallic cathode, may be implemented under identical voltage conditions, improve discharge current value size
Effect, it was confirmed that nickel-nickel oxide-magnesia composite cathode has in enhancing atmospheric pressure plasma discharge intensity application field
Effect property.
Beneficial effects of the present invention are：Nickel-nickel oxide-magnesia composite cathode that the present invention is provided, increases from source
Seed electrons quantity, enhances plasma intensity, is atmospheric pressure plasma discharge in chemical industry, material, biology and environmental protection etc.
Field application provides reference.
Brief description of the drawings
Fig. 1 is the schematic diagram of spininess-plate corona discharge plasma system；
Fig. 2 is the discharge voltage of multi-needle-to-plate electrode system and the graph of a relation of discharge current；
Fig. 3 is the discharge voltage and discharge current ratio figure of multi-needle-to-plate electrode system；
In figure：1 positive polarity DC high-voltage power supply；2 multi-needle-to-plate electrode systems；3 dividers；4 direct current galvanometers；5 pins
Electrode；6 plate electrodes；7 wires.
Specific embodiment
The embodiment of the present invention is further illustrated below in conjunction with the accompanying drawings.
Plate electrode 6 is nickel-nickel oxide-magnesia composite cathode prepared by the present invention in figure, by electricity under room temperature condition
The magnesia white powder (grain diameter is 30nm) that be dispersed in for ultrasound in ethanol solution by swimming method is deposited on nickel metal watch
Face forms magnesium oxide layer, and deposit thickness is 80um, and there are hole, resistivity about 10 in surface12Ω·cm；With 5 DEG C/min heating rates,
When rising to 1000 DEG C from room temperature, to the metallic nickel of deposition of magnesium layer is carried out into high-temperature calcination treatment 2h, the green of 8.6um is formed
Intermediate layer nickel oxide, resistivity is about 1015Ω cm, obtain being from bottom to top metallic nickel, intermediate oxidation nickel dam and magnesium oxide layer
Nickel-nickel oxide-magnesia composite cathode.
Fig. 1 is that the system for including the nickel-nickel oxide-magnesia composite cathode for strengthening atmospheric pressure plasma discharge intensity is shown
It is intended to, system includes the portions such as positive polarity DC high-voltage power supply 1, multi-needle-to-plate electrode system 2, divider 3, direct current galvanometer 4
Part；Wherein positive polarity DC high-voltage power supply 1 is that, for being powered to multi-needle-to-plate electrode system 2, divider 3 and direct current inspection are flowed
The discharge voltages and discharge current of the test multi-needle-to-plate electrode system 2 respectively of meter 4, according to discharge voltage and discharge current data
Corresponding relation, draws discharge voltage and discharge current relation curve as shown in Figure 2, for analyzing plasma discharging bulk properties.
Multistylus electrode 5 is made of 6 stainless steel materials, and pin angle is 45 °, and by wire 7 and the height of positive polarity DC high-voltage power supply
Pressure output end connection.Be connected across divider 3 between multistylus electrode 5 and ground wire by wire 7, wire 7 by direct current galvanometer 4 with
Plate electrode 6 is connected, and is connected with ground wire finally by wire 7.The output voltage of adjustment positive polarity DC high-voltage power supply 1, records
The discharge current value in discharge voltage value and direct current galvanometer 4 on divider 3, then does horizontal seat with discharge voltage value
Mark, discharge current value do ordinate mapping.
Fig. 2 results show before puncturing to whole bubble-discharge from corona initial discharge that nickel+nickel oxide+magnesia is combined
The electric discharge U-I curves of negative electrode compared with the electric discharge U-I curves of nickel metallic cathode, after discharge voltage is more than 10kV, send out by curve
It is estranged from and under identical voltage conditions, the current value of composite cathode is bigger.Fig. 3 is displayed under identical voltage conditions, nickel+oxidation
The discharge current of nickel+magnesia composite cathode and the ratio size of nickel metallic cathode discharge current under different voltages, discharge
After 10kV, current ratio is 3.3 times to the maximum.It is big in enhancing that this sample result demonstrates nickel-nickel oxide-magnesia composite cathode
The validity of atmospheric pressure discharge plasma intensity application field.
Claims (7)
1. it is a kind of strengthen atmospheric pressure plasma discharge intensity nickel-nickel oxide-magnesia composite cathode, it is characterised in that institute
The nickel-nickel oxide stated-magnesia composite cathode is composite construction, and metallic nickel, intermediate oxidation nickel dam and oxygen are followed successively by from bottom to top
Change magnesium layer；Described metallic nickel is conductor；Described intermediate oxidation nickel dam is insulating barrier, and its resistivity is 1014~1015Ω·
Cm, thickness is 1~20um；Described magnesium oxide layer is there is hole between insulating barrier, the particle of magnesium oxide layer, and its resistivity is
1012~1013Ω cm, thickness is 1~100um.
2. a kind of nickel-nickel oxide-magnesia for strengthening atmospheric pressure plasma discharge intensity according to claim 1 is combined
Negative electrode, it is characterised in that described magnesium oxide layer and intermediate oxidation the nickel dam stored charge in whole discharge process, in magnesia
Formed between layer and metal nickel surface is higher than 106The uneven uniform electric field of V/cm, the electronics of inducing metal nickel is because of tunnel-effect shifting
Go out and through magnesium oxide layer and nickel oxide layer, emitted as seed electrons.
3. it is according to claim 1 and 2 it is a kind of strengthen atmospheric pressure plasma discharge intensity nickel-nickel oxide-magnesia
Composite cathode, it is characterised in that the grain diameter of described magnesium oxide layer is 30nm~1um.
4. nickel-nickel oxide-the oxidation of a kind of enhancing atmospheric pressure plasma discharge intensity described in a kind of claim 1 or 2 or 3
The preparation method of magnesium composite cathode, it is characterised in that following steps：
The first step, coating for metal surfaces is prepared in metal nickel surface
At ambient temperature, by deposits materials in metal nickel surface, 1~100 μm of magnesium oxide layer is formed；Described raw material is powder
The organic compound of material or magnesium, described powder body material includes magnesia, peromag, magnesium carbonate, magnesium nitrate, hydrogen-oxygen
Change magnesium, the organic compound of described magnesium is etc. the alkoxide, organic-magnesium presoma of magnesium；
Second step, high-temperature calcination forms intermediate layer nickel oxide
The metallic nickel of deposition of magnesium layer is processed into 1~2h in 900-1200 DEG C of high-temperature calcination, the intermediate layer oxygen of 1~20um is generated
Change nickel.
5. the preparation method of nickel-nickel oxide according to claim 4-magnesia composite cathode, it is characterised in that described
Deposits materials include that electrophoresis, sol-gel process, spin-coating method, plasma spraying process, gas phase are sunk in the method for metal nickel surface
Area method, electron-beam vapor deposition method or spray pyrolysis.
6. the preparation method of the nickel-nickel oxide according to claim 4 or 5-magnesia composite cathode, it is characterised in that institute
The heating rate stated is set to 5 DEG C/min.
7. the nickel-nickel oxide described in claim 1 or 2 or 3-magnesia composite cathode is applied and atmosphere pressure discharging plasma is occurring
In the sparking electrode system of body, as electric discharge negative electrode, seed electrons transmitting is induced.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113038680A (en) * | 2021-02-05 | 2021-06-25 | 浙江大学 | Arc ablation resistant electrode structure and preparation method thereof |
| CN114501763A (en) * | 2020-10-26 | 2022-05-13 | 新奥(天津)能源技术有限公司 | Cathode head of plasma torch and preparation method thereof |
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| CN113038680B (en) * | 2021-02-05 | 2022-06-28 | 浙江大学 | Arc ablation resistant electrode structure and preparation method thereof |
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