CN106772988A - Cutting machine double microscope system and its course of work - Google Patents
Cutting machine double microscope system and its course of work Download PDFInfo
- Publication number
- CN106772988A CN106772988A CN201710199661.5A CN201710199661A CN106772988A CN 106772988 A CN106772988 A CN 106772988A CN 201710199661 A CN201710199661 A CN 201710199661A CN 106772988 A CN106772988 A CN 106772988A
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- Prior art keywords
- camera lens
- speculum
- camera
- image
- motor
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/241—Devices for focusing
- G02B21/242—Devices for focusing with coarse and fine adjustment mechanism
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
- G02B21/361—Optical details, e.g. image relay to the camera or image sensor
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- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Microscoopes, Condenser (AREA)
Abstract
The invention discloses a kind of cutting machine double microscope system, including camera lens 1, camera lens 2, speculum 1, speculum 2, flexible mirror, reflection mirror motor, camera, workbench, encoder and industrial computer.The present invention also provides the course of work of above-mentioned cutting machine double microscope system, comprises the following steps：1) there is chip to be processed on workbench, camera lens 2 first does thick identification, at this moment in right 45 degree of positions, image enters camera to flexible mirror by camera lens 2, speculum 2, flexible mirror, and industrial computer carries out treatment mobile platform further according to the image for obtaining；2) after the completion of thick identification, system will carry out fine alignment, and flexible mirror rotates to left 45 degree of positions, and at this moment image enters camera by camera lens 1, speculum 1, flexible mirror, and the image that industrial computer passes through to obtain carries out fine alignment action.The present invention can obtain different camera lenses into the image of camera by rotary moveable speculum, and system can switch between obstructed camera lens according to demand, the efficiency of system identification can so be improved in the case where precision is not lost, so as to improve the efficiency and reliability of whole machine.
Description
Technical field
The present invention relates to double microscope switching device, the free switching between different micro- lens heads, so as to improve system knowledge
Other speed and success rate.
Background technology
Cutting machine is a kind of semiconductor post package key equipment, and its effect is by Device singulation into single circuit unit.
There is special marking on device, cutting machine is directed at device and is cut by the mark on recognition means, and these are marked with
There is small, traditional equipment there was only a kind of microlens greatly, feature is not often full when this camera lens identification is marked greatly, easily identification mistake
When losing, and recognizing tick marks feature precision not enough, so cause cutting machine alignment when success rate and speed it is not high,
Have impact on producing line efficiency.
The content of the invention
It is an object of the invention to provide cutting machine double microscope system and its course of work, can guarantee that system is aobvious in difference
Free switching between micro lens, obtains most suitable image and is identified, and improves the efficiency of system alignment.
To achieve the above object, the present invention provides a kind of main shaft double microscope system, including camera lens 1, camera lens 2, speculum
1st, speculum 2, flexible mirror, reflection mirror motor, camera, workbench, encoder and industrial computer；Image is by camera lens 1, anti-
Penetrate mirror 1 or camera lens 2, speculum 2 enter flexible mirror, finally exported to industrial computer by camera；Flexible mirror is by anti-
Penetrate mirror motor and drive and can rotate freely, when the image of camera lens 1 is needed, motor drives flexible mirror to rotate to left 45 degree of positions
Put, it is necessary to during the image of camera lens 2, motor drives flexible mirror to rotate to right 45 degree of positions；Reflection mirror motor is mounted with coding
Device carrys out feedback activity reflector position, and industry control function reads reflector position in real time；Industrial computer is sentenced by reading platform position
The disconnected image using which camera lens, then control reflection mirror motor to rotate to the later acquisition camera image in relevant position.
Preferably, the running accuracy of mirror motor is reflected to increase, peace has turned an encoder reading on reflection mirror motor
The position of power taking machine, industrial computer is by position feedback come real-time adjustment motor position.
Preferably, speculum 1 and the position of speculum 2 and angle are immovable, can so stablize and change optical path direction.
Preferably, camera lens 1 and camera lens 2 can use different types of microlens, by adjust speculum material and
Setting angle comes compatible.
The present invention also provides the course of work of above-mentioned cutting machine double microscope system, comprises the following steps：
1) when the image of camera lens to be used 2 carries out coarse alignment, industrial computer control speculum motor drives flexible mirror rotation
Go to right 45 degree, industrial computer reads encoder position in real time, after specified location is reached system open camera gather camera lens 2,
The image that speculum 2 comes；
2) after the completion of coarse alignment, system needs to use the image of camera lens 1 to carry out fine alignment, at this moment industrial computer control speculum
It is left 45 degree that motor drives flexible mirror to rotate to, and industrial computer reads encoder position in real time, system after specified location is reached
The image that camera gathers camera lens 1, speculum 1 comes is opened, fine alignment is completed by image recognition.
The advantages of the present invention are：A kind of cutting machine double microscope system and its course of work, energy are provided
The free switching between different micro- lens heads, so as to improve the speed and success rate of system identification.
Brief description of the drawings
Fig. 1 is schematic diagram of the invention；
Fig. 2 is control figure of the invention.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiment of the invention is further described.Following examples are only
For clearly illustrating technical scheme, and can not be limited the scope of the invention with this.
The present invention specific implementation technical scheme be：
As shown in figure 1, a kind of cutting machine double microscope system, including camera lens 11, camera lens 22, speculum 13, speculum 24,
Flexible mirror 5, reflection mirror motor 6, camera 7, workbench 8, encoder 9 and industrial computer 10；Image is by camera lens 11, reflection
Mirror 11 or camera lens 22, speculum 24 enter flexible mirror 5, are finally exported to industrial computer 10 by camera 7；Flexible mirror
5 are driven by reflection mirror motor 6 and can rotated freely, and when the image of camera lens 11 is needed, motor 6 drives flexible mirror 5 to rotate
To right 45 degree positions, it is necessary to during the image of camera lens 22, motor 6 drives flexible mirror 5 to rotate to the 45 degree of positions in a left side；Industrial computer 10
Judge to use the image of which camera lens by the position of reading platform 8, then controlling reflection mirror motor 6, to rotate to relevant position later
The image of acquisition camera 7.
The present invention also provides the course of work of above-mentioned cutting machine double microscope system, comprises the following steps：
1) when the image of camera lens to be used 22 carries out coarse alignment, the control reflection mirror motor 6 drive activity reflection of industrial computer 10
Mirror 5 rotates to right 45 degree, real-time reading encoder 9 position of industrial computer 10, and system is opened camera 7 and adopted after specified location is reached
The image that collection camera lens 22, speculum 24 come；
2) after the completion of coarse alignment, system needs to use the image of camera lens 11 to carry out fine alignment, and at this moment industrial computer 10 is controlled instead
Penetrating mirror motor 6 drives flexible mirror 5 to rotate to 45 degree of a left side, and industrial computer 10 reads the position of encoder 9 in real time, when arrival specific bit
The image that system opens the collection of camera 7 camera lens 11, speculum 13 comes is postponed, fine alignment is completed by image recognition.
The above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, on the premise of the technology of the present invention principle is not departed from, some improvements and modifications can also be made, these improvements and modifications
Also should be regarded as protection scope of the present invention.
Claims (4)
1. double microscope system, it is characterised in that including camera lens 1, camera lens 2, speculum 1, speculum 2, flexible mirror, reflection
Mirror motor, camera, workbench, encoder, industrial computer；Image enters by camera lens 1, speculum 1 or camera lens 2, speculum 2
Flexible mirror, is finally exported to industrial computer by camera；Flexible mirror is driven by speculum motor and can rotated freely, when
When needing the image of camera lens 1, motor drives flexible mirror to rotate to left 45 degree of positions, it is necessary to during the image of camera lens 2, motor belt motor
Dynamic flexible mirror rotates to right 45 degree of positions；Reflection mirror motor is mounted with that encoder comes feedback activity reflector position, industry control
Function reads reflector position in real time；Industrial computer judges to use the image of which camera lens by reading platform position, then controls
Reflection mirror motor rotates to the later acquisition camera image in relevant position.
2. double microscope system according to claim 1, it is characterised in that in order to increase the rotation essence of reflection mirror motor
Degree, peace has turned the position that an encoder reads motor on reflection mirror motor, and industrial computer is by position feedback come real-time adjustment
Motor position.
3. double microscope system according to claim 1, it is characterised in that speculum 1 and the position of speculum 2 and angle are not
Movably, can so stablize and change optical path direction.
4. double microscope system according to claim 1, it is characterised in that camera lens 1 and camera lens 2 can use different type
Microlens, by adjusting the material and setting angle of speculum come compatible.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710199661.5A CN106772988A (en) | 2017-03-28 | 2017-03-28 | Cutting machine double microscope system and its course of work |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710199661.5A CN106772988A (en) | 2017-03-28 | 2017-03-28 | Cutting machine double microscope system and its course of work |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106772988A true CN106772988A (en) | 2017-05-31 |
Family
ID=58967982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710199661.5A Pending CN106772988A (en) | 2017-03-28 | 2017-03-28 | Cutting machine double microscope system and its course of work |
Country Status (1)
| Country | Link |
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| CN (1) | CN106772988A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112639623A (en) * | 2018-08-20 | 2021-04-09 | Asml荷兰有限公司 | Apparatus and method for measuring position of alignment mark |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4801197A (en) * | 1987-02-16 | 1989-01-31 | Olympus Optical Co., Ltd. | Adaptor for microscopes providing an odd number of reflections for providing an even number of reflections in conjunction with additional microscope reflection means |
| CN101285934A (en) * | 2007-04-11 | 2008-10-15 | 上海光远电子有限公司 | Rotating mirror-image type display screen |
| US20080266443A1 (en) * | 2007-04-30 | 2008-10-30 | Jung Yul Lee | Camera Module |
| CN101576657A (en) * | 2008-05-09 | 2009-11-11 | 日立比亚机械股份有限公司 | Electrical scanner device and laser machining apparatus having the electrical scanner device |
| CN105872325A (en) * | 2016-03-31 | 2016-08-17 | 北京格灵深瞳信息技术有限公司 | Image obtaining system |
-
2017
- 2017-03-28 CN CN201710199661.5A patent/CN106772988A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4801197A (en) * | 1987-02-16 | 1989-01-31 | Olympus Optical Co., Ltd. | Adaptor for microscopes providing an odd number of reflections for providing an even number of reflections in conjunction with additional microscope reflection means |
| CN101285934A (en) * | 2007-04-11 | 2008-10-15 | 上海光远电子有限公司 | Rotating mirror-image type display screen |
| US20080266443A1 (en) * | 2007-04-30 | 2008-10-30 | Jung Yul Lee | Camera Module |
| CN101576657A (en) * | 2008-05-09 | 2009-11-11 | 日立比亚机械股份有限公司 | Electrical scanner device and laser machining apparatus having the electrical scanner device |
| CN105872325A (en) * | 2016-03-31 | 2016-08-17 | 北京格灵深瞳信息技术有限公司 | Image obtaining system |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112639623A (en) * | 2018-08-20 | 2021-04-09 | Asml荷兰有限公司 | Apparatus and method for measuring position of alignment mark |
| CN112639623B (en) * | 2018-08-20 | 2024-05-14 | Asml荷兰有限公司 | Apparatus and method for measuring position of alignment mark |
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Application publication date: 20170531 |