CN106771959A - A kind of wafer test system - Google Patents
A kind of wafer test system Download PDFInfo
- Publication number
- CN106771959A CN106771959A CN201611009771.2A CN201611009771A CN106771959A CN 106771959 A CN106771959 A CN 106771959A CN 201611009771 A CN201611009771 A CN 201611009771A CN 106771959 A CN106771959 A CN 106771959A
- Authority
- CN
- China
- Prior art keywords
- test
- station
- transmitter
- test machine
- receiver
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
- G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates
Abstract
The present invention provides a kind of wafer test system, including：Probe station, for obtaining current position coordinates, and test result is shown；Work station, for the current position coordinates to be sent into test machine with test instruction is started, and receives the test result of test machine；Test machine, for starting test according to current position coordinates；Probe station receiver, for receiving test result；Probe station transmitter, for sending position coordinates to work station；Work station receiver, for receiving the position coordinates of probe station and the test result of test machine；Work station transmitter, for sending position coordinates to test machine, sends test sign on and sends test result to probe station to test machine；Test machine transmitter, for sending test result to work station；Test machine receiver, for receiving test sign on, save space and reduces wiring difficulty.
Description
Technical field
The present invention relates to semiconductor applications, more particularly to a kind of wafer test system.
Background technology
During integrated circuit On-Wafer Measurement, work station, test machine and probe station are an entirety, work station, test machine and
Need to receive the instruction sent of other side and also other side need to be sent instructions between probe station, needed by respective between them
Line reaches the purpose of communication, needs to be connected with each other by pci interface between work station and test machine, work station and probe station it
Between need by GPIO interface be connected with each other, they are connected therebetween by the line of entity, and entity line will necessarily be received
It is too short possibly to connect corresponding interface to the influence of this body length of line, it is oversize and easily cause to loosen by external force influence etc.
Problem, and need to consider the practical layout demand of workshop.
Prior art one：Work station and test machine are connected by pci interface
With reference to Fig. 1, the running of work station whole-process control test program, test machine is tested and is returned to work station inspection
The result of survey, so needing communication between them.There is one block of special hardware plate to be responsible for communication on test machine, have above
Pci interface, is connected on work station by entity line, reaches communication between the two.Once this line takes off in testing engineering
Fall or damaged, operating personnel have been difficult to pinpoint the problems, caused the waste of testing time, and the length of line determines both
Space layout.
Prior art two：Work station and probe station are connected by GPIO interface
With continued reference to Fig. 1, work station needs to control the movement of probe station, and probe station to be also required to tell that work station is tested
Chip coordinate complete data, so need to reach the purpose of communication by GPIB lines between them.GPIB lines should not mistake
It is long, should not bend, can otherwise cause the problem not communicated, once damaging, change cumbersome, because the GPIB of probe station connects
Mouth is hidden comparing.
The content of the invention
In order to solve the above technical problems, the invention provides a kind of wafer test system, save space and wiring is reduced
Difficulty.
A kind of wafer test system, including：Probe station, for obtaining current position coordinates, and test result is shown
Show；Work station, for the current position coordinates to be sent into test machine with test instruction is started, and receives the test of test machine
As a result；Test machine, for starting test according to current position coordinates；Probe station receiver, for receiving test result；Probe station
Transmitter, for sending position coordinates to work station；Work station receiver, position coordinates and test machine for receiving probe station
Test result；Work station transmitter, for test machine send position coordinates, to test machine send test sign on and
Test result is sent to probe station；Test machine transmitter, for sending test result to work station；Test machine receiver, is used for
Receiving position coordinate and test sign on.
It is of the invention compared with prior art, advantage is：
The present invention by respectively install on work station, test machine and probe station a wireless receiver and radio transmitters come
Reach the purpose of wireless telecommunications, it is possible to the inconvenience for avoiding entity line from being brought, and facilitate the layout of workshop, reach section
The purpose of save space and reduction wiring difficulty.
Brief description of the drawings
Drawings below of the invention is in this as a part of the invention for understanding the present invention.Shown in the drawings of this hair
Bright embodiment and its description, for explaining principle of the invention.
Fig. 1 is the connected mode of the work station, test machine and probe station of prior art；
Fig. 2 is wafer test system of the invention by replacing the signal of entity line with wireless receiver and radio transmitters
Figure；
Fig. 3 is the interactive relation between each equipment of wafer test system of the invention.
Specific embodiment
In the following description, a large amount of concrete details are given to provide more thorough understanding of the invention.So
And, it is obvious to the skilled person that the present invention can be able to without one or more of these details
Implement.In other examples, in order to avoid obscuring with the present invention, do not enter for some technical characteristics well known in the art
Row description.
It should be appreciated that the present invention can be implemented in different forms, and should not be construed as being limited to what is proposed here
Embodiment.On the contrary, providing these embodiments disclosure will be made thoroughly and complete, and will fully convey the scope of the invention to
Those skilled in the art.In the accompanying drawings, for clarity, the size and relative size in Ceng He areas may be exaggerated.From start to finish
Same reference numerals represent identical element.
During integrated circuit On-Wafer Measurement, work station, test machine and probe station are an entirety, work station, test machine and
Need to receive the instruction sent of other side and also other side need to be sent instructions between probe station, needed by respective between them
Line reaches the purpose of communication, needs to be connected with each other by pci interface between work station and test machine, work station and probe station it
Between need by GPIO interface be connected with each other, they are connected therebetween by the line of entity, and entity line will necessarily be received
It is too short possibly to connect corresponding interface to the influence of this body length of line, it is oversize and easily cause to loosen by external force influence etc.
Problem, and need to consider the practical layout demand of workshop.
The present invention is to solve to use entity during integrated circuit On-Wafer Measurement between work station, test machine and probe station
The problem of various inconvenience, is thus provided that a kind of wafer test system, including probe station caused by line communication, current for obtaining
Position coordinates, and test result is shown；Work station, for the current position coordinates to be sent with test instruction is started
To test machine, and receive the test result of test machine；Test machine, for starting test according to current position coordinates；Probe station connects
Device is received, for receiving test result；Probe station transmitter, for sending position coordinates to work station；Work station receiver, is used for
Receive the position coordinates of probe station and the test result of test machine；Work station transmitter, for sending position coordinates to test machine,
Test sign on is sent to test machine and send test result to probe station；Probe station receiver, receives test result.
One wireless receiver and radio transmitters are respectively installed in work station, test machine and probe station, are passed through between them
The mode of Wireless transceiver is communicated, and each wireless receiver only receives the instruction sent with the radio transmitters oneself bound,
It does not interfere with each other.After without the constraint of entity line, the device layout in workshop can for example be arranged work station with more flexible
It is in a row, facilitate technical staff to check data, also there is no concern that personnel walk about can by certain single line to tearing off or loosen, once
Volume production is got up the problem that the poor connectivity of line can cause in test, is not easy to be found, and wireless receiver and wireless transmission
Device has the detection function to signal in itself, once go wrong can be found than faster, so as to save many investigation failures
Time, improve testing efficiency.
Fig. 1 is the connected mode of the work station, test machine and probe station of prior art, and work station passes through pci interface line
Reach communication purpose to test machine, while work station is wired to probe station by gpib interface reaches communication purpose, both for
Entity line is connected.
Fig. 2 is that the present invention replaces the schematic diagram of entity line by using wireless receiver and radio transmitters, in work station, is surveyed
It is each on test-run a machine and probe station that a wireless receiver and radio transmitters are installed, reach interaction effect by wireless telecommunications.
Fig. 3 is the interactive relation between each equipment of the invention, and the wireless receiver 1 of work station is used for receiving the nothing of test machine
The instruction that the radio transmitters 3 of line transmitter 2 and probe station send, the wireless receiver 2 of test machine and the wireless of probe station connect
Receive device 3 and be used for the instruction that the radio transmitters 1 of receiving workstation send.
It is described in detail below in conjunction with the accompanying drawings.
As shown in Fig. 2 the present invention provides a kind of wafer test system, including probe station 101, sat for obtaining current location
Mark, and test result is shown；Work station 100, for the current position coordinates to be sent to test instruction is started
Test machine 102, and receive the test result of test machine 102；Test machine 102, for starting test according to current position coordinates；Visit
Pin platform transmitter 101a, for sending position coordinates to work station；Probe station receiver 101b, the position for receiving probe station
The test result of coordinate and test machine；Work station transmitter 100a, for sending position coordinates to test machine 102, to test machine
Send test sign on and send test result to probe station；Work station receiver 100b, the position for receiving probe station
Put the test result of coordinate and test machine；Test machine transmitter 102a, for sending test result to work station；Test machine is received
Device 102b, for receiving the position coordinates that the work station sends.
Specifically, wafer sort and last test are typically to be tested using probe station 101 and test machine 102, institute
State probe station can for probe station of the prior art, for example, the probe card that there are some probes using, by probe with it is solid
The integrated circuit of the wafer being scheduled on plummer is contacted, and applies test signal to the integrated circuit, to judge its electricity
Whether performance is good.
Probe station 101 can be probe station of the prior art, and probe station includes plummer (chuck) and probe card, visits
Several probes are provided with pin card, probe card is fixed on a levelling bench in test process, keep probe card motionless；Hold
Wafer (wafer) is placed on microscope carrier, plummer can be moved along X, Y, Z-direction so that the probe phase below wafer and probe card
Contact.
The test machine 102 can be test machine of the prior art, for controlling probe station 101 to survey wafer
Examination.
Also, the probe station 101 also includes display, for showing test result.
The probe station transmitter 101a, is RF transmitter, for sending position coordinates to work station.
The probe station receiver 101b, is radio frequency receiver, for receiving test result.
The work station receiver 100b, the position coordinates for receiving probe station transmission, and receive test machine return
Test result.
Work station 100, for sending test sign on to test machine 102 according to position coordinates, for example work station 100 can
Think processor.
Work station transmitter 100a, for sending test sign on to test machine 102, and sends work to probe station 101
Instruct.
Test machine receiver 102b, for receiving test sign on and test instruction, so as to coordinate with probe station 101
Start test.
Test machine 102, test is started for starting control probe station 101 according to the test of work station 100 instruction.
Test machine transmitter 102a, for test result to be sent into work station 100.
Work station, test machine and probe station are an entirety, and mutually communication is needed constantly between them to complete whole survey
Examination, so needing wireless receiver and the two equipment of radio transmitters to complete.
In the present embodiment, each equipment has the MAC Address of oneself, can in advance in wireless receiver equipment need
The MAC Address of the radio transmitters of reception, it is ensured that only receive the device directive specified, work station needs to receive test machine and probe
The instruction of platform, so two MAC Address of binding, and the instruction of test machine and probe station receiving workstation, therefore only need to respectively tie up
A fixed MAC Address, has so reached absolute one-to-one communication between any two in work station, test machine and probe station.
With reference to Fig. 3, probe station first is sent to work station receiver 100b instructions and tells by probe station transmitter 101a
The current coordinate of work station, work station sends instructions to test machine receiver after receiving instruction by work station transmitter 100a
102b starts test, and test machine sends instructions to work station receiver 100b by test machine transmitter 102a after the completion of test,
Test result is told, then work station issues probe station receiver 101b test results by work station transmitter 100a again, visited
Pin platform shows result after receiving instruction on the display screen of oneself, for manually checking, and begins to move into next wafer position
On, the action before repeating.
Obviously, those skilled in the art can carry out various changes and modification without deviating from spirit of the invention to invention
And scope.So, if these modifications of the invention and modification belong to the claims in the present invention and its equivalent technologies scope it
Interior, then the present invention is also intended to comprising these changes and modification.
Claims (8)
1. a kind of wafer test system, it is characterised in that including：
Probe station, for obtaining current position coordinates, and test result is shown；
Work station, for the current position coordinates to be sent into test machine with test instruction is started, and receives the survey of test machine
Test result；
Test machine, for starting test according to current position coordinates；
Probe station receiver, for receiving test result；
Probe station transmitter, for sending position coordinates to work station；
Work station receiver, for receiving the position coordinates of probe station and the test result of test machine；
Work station transmitter, for sending position coordinates to test machine, test sign on is sent and to probe to test machine
Platform sends test result；
Test machine transmitter, for sending test result to work station；
Test machine receiver, for receiving position coordinate and test sign on.
2. wafer test system according to claim 1, it is characterised in that institute work station transmitter, probe station transmitter
It is radio transmitters with test machine transmitter.
3. wafer test system according to claim 2, it is characterised in that institute work station transmitter, probe station transmitter
It is less radio-frequency transmitter with test machine transmitter.
4. wafer test system according to claim 1, it is characterised in that the station receiver that works, probe station receiver
It is wireless receiver with test machine receiver.
5. wafer test system according to claim 4, it is characterised in that the station receiver that works, probe station receiver
It is wireless RF receivers with test machine receiver.
6. wafer test system according to claim 1, it is characterised in that the worked station receiver, probe station connect
Receive device, test machine receiver and work station transmitter, probe station transmitter and test machine transmitter and be each equipped with address.
7. wafer test system according to claim 6, it is characterised in that the work station receiver is configured with two and connects
Address is received, the address of probe station transmitter and test machine transmitter is matched respectively.
8. wafer test system according to claim 6, it is characterised in that the probe station receiver is configured with and connects
Receive the address of address, matching and work station transmitter；The test machine receiver is configured with a reception address, matching and work
Stand transmitter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611009771.2A CN106771959A (en) | 2016-11-16 | 2016-11-16 | A kind of wafer test system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611009771.2A CN106771959A (en) | 2016-11-16 | 2016-11-16 | A kind of wafer test system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106771959A true CN106771959A (en) | 2017-05-31 |
Family
ID=58969104
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611009771.2A Pending CN106771959A (en) | 2016-11-16 | 2016-11-16 | A kind of wafer test system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106771959A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107976620A (en) * | 2017-11-20 | 2018-05-01 | 上海华力微电子有限公司 | A kind of crystal round test approach |
| CN108106563A (en) * | 2017-12-12 | 2018-06-01 | 上海华岭集成电路技术股份有限公司 | The detection method of Wafer alignment state in a kind of wafer transport system |
| CN108172154A (en) * | 2018-01-03 | 2018-06-15 | 惠科股份有限公司 | A kind of test method and test equipment |
| CN108400100A (en) * | 2018-02-27 | 2018-08-14 | 上海华岭集成电路技术股份有限公司 | A kind of wafer test parameters setting method |
| CN110470975A (en) * | 2019-08-29 | 2019-11-19 | 上海华虹宏力半导体制造有限公司 | Silicon wafer characteristic test system and method |
| CN112600737A (en) * | 2020-12-15 | 2021-04-02 | 厦门芯泰达集成电路有限公司 | Communication test method, medium, device and system |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107976620A (en) * | 2017-11-20 | 2018-05-01 | 上海华力微电子有限公司 | A kind of crystal round test approach |
| CN108106563A (en) * | 2017-12-12 | 2018-06-01 | 上海华岭集成电路技术股份有限公司 | The detection method of Wafer alignment state in a kind of wafer transport system |
| CN108172154A (en) * | 2018-01-03 | 2018-06-15 | 惠科股份有限公司 | A kind of test method and test equipment |
| CN108400100A (en) * | 2018-02-27 | 2018-08-14 | 上海华岭集成电路技术股份有限公司 | A kind of wafer test parameters setting method |
| CN110470975A (en) * | 2019-08-29 | 2019-11-19 | 上海华虹宏力半导体制造有限公司 | Silicon wafer characteristic test system and method |
| CN112600737A (en) * | 2020-12-15 | 2021-04-02 | 厦门芯泰达集成电路有限公司 | Communication test method, medium, device and system |
| CN112600737B (en) * | 2020-12-15 | 2022-03-04 | 厦门芯泰达集成电路有限公司 | Communication test method, computer readable storage medium, device and system |
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Application publication date: 20170531 |