CN106770460A - A kind of dew point sensor device based on double refrigeration sensitive faces - Google Patents
A kind of dew point sensor device based on double refrigeration sensitive faces Download PDFInfo
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- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/56—Investigating or analyzing materials by the use of thermal means by investigating moisture content
- G01N25/66—Investigating or analyzing materials by the use of thermal means by investigating moisture content by investigating dew-point
- G01N25/68—Investigating or analyzing materials by the use of thermal means by investigating moisture content by investigating dew-point by varying the temperature of a condensing surface
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Abstract
A kind of dew point sensor device based on double refrigeration sensitive faces, is made up of two groups of symmetrical copper matrixes, two-sided quartz wafer with symmetry electrode, two pieces of high thermal conductive silicon films, two semiconductor coolers, two radiators, PT100 platinum resistance thermometer sensor,s, four U-shaped supports and four screws；Two groups of copper matrixes are buckled together and constitute its main body；Quartz wafer is clamped by copper matrix；High thermal conductive silicon film is placed between copper matrix and quartz wafer；Semiconductor cooler is placed on the base of copper matrix；Radiator is close to the base of matrix and is affixed with the hot face of semiconductor cooler；PT100 platinum resistance thermometer sensor,s are placed between two groups of copper matrixes the non-electrode region for being affixed on quartz wafer；U-shaped support and screw are used to connect matrix and fix on a heat sink matrix, ultimately form a complete sensing device.The present invention ensures the oscillating mass of quartz wafer, possesses efficient heat transfer property, the characteristics of with stability and high efficiency.
Description
Technical field
The present invention relates to a kind of dew point sensor device based on double refrigeration sensitive faces, it using quartz-crystal resonator with
Semiconductor cooler is combined, and moisture condensation is produced by way of active temperature control, so as to carry out dew point identification to it, reaches dew
The purpose of point temperature survey, belongs to air status parameter field of measuring technique.
Background technology
In nature it is every have it is biological will necessarily where, in the middle of the atmospheric environment around it contain or it is many or
Few steam.In air moisture content number, indicate dry, the wet degree of air, i.e., represented with humidity.Atmospheric humidity exists
Method for expressing in physics and meteorology has many kinds, and every kind of expression has respective physical quantity and list corresponding thereto
Position.In the method for expressing of numerous atmospheric humiditys, accustomed to using is relative humidity, absolute humidity, dew (frost) point temperature etc..
The measurement of dew-point temperature by it is internationally recognized be most accurate humidity measuring method, the actual humidity amount in countries in the world
Value transmission is all realized by dew-point temperature.Dew-point temperature refers to air in all immovable condition of moisture content and air pressure
Under, temperature during saturation is cooled to, it is exactly temperature when vapor in air is changed into dewdrop figuratively.Through dew point
It is known that moisture content in air, thus dew point is an index for absolute humidity.Dew-point measuring method is according to principle
Difference, has chilled-mirror type photoelectric dew-point hygrometer, electric transducer formula dew point hygrometer, electrolysis dew point hygrometer, infrared dew point using more at present
Instrument, semiconductor transducer dew point hygrometer and resonant mode dew point hygrometer.
Resonant dew point measurement method is mainly based upon QCM technology.Micro- balance (the Quartz of quartz crystal oscillator
Crystal Microbalance, QCM) technology is a kind of novel sensor e measurement technology set up the sixties in 20th century.
The Sauerbrey equations that nineteen fifty-nine proposes are the bases of mass effect, and it establishes QCM surface rigidities quality and changes and its resonance
Linear relationship between frequency change, the quality testing of nanogram level can be carried out according to this principle, and the method has high accuracy, height
The advantages of sensitivity, low cost, the attention of scientists from all over the world is received, a research heat of sensor field has been turned at present
Point.In traditional Quartz Crystal Humidity Sensor field, wet sensory material coating processes are mainly employed, using in quartz-crystal body surface
Face coats wet sensory material so as to reach the absorption to moisture in air, and the sensor main of this technique will be with Relative Humidity Measuring
It is main.In for the method using quartz crystal measurement dew point, the knot of refrigeration system and quartz-crystal resonator is mainly employed
Close, its superficial air is reached saturation state i.e. quartz wafer surface to quartz wafer refrigeration and produce water to condense, using quartz-crystal
The frequency shift identification dew point of body, so as to reach the purpose of measurement dew-point temperature.
Report both at home and abroad to this kind of method is little, and mainly technique also has many technological difficulties, but utilizes
The dew point hygrometer that the method is developed is compared to more traditional Cold Mirrors photo-electric dew point hygrometer in the side such as sensitivity, certainty of measurement and response time
There is its larger advantage in face, has good application prospect especially in the environment of low humidity, while the more traditional suction of the method
Attached formula Quartz Crystal Humidity Sensor is compared, and has good dehumidification, thus with good repeatability.
The content of the invention
1st, purpose：The invention aims to provide a kind of dew point sensor device based on double refrigeration sensitive faces, it
Ensure that the two-sided quartz wafer with symmetry electrode maintains good resonant condition, and can largely to quartz
Chip is freezed, can actively producing condensation and being identified to it with fast and stable.The present apparatus has sensitivity high, rings
It is fast between seasonable, the advantage of good reliability.
2nd, technical scheme：
To achieve these goals, the present invention provides a kind of dew point sensor device based on double refrigeration sensitive faces；It is
By two groups of symmetrical copper matrixes, two-sided quartz wafer, two pieces of high thermal conductive silicon films, two semiconductor systems with symmetry electrode
Cooler, two radiators, a PT100 platinum resistance thermometer sensor, four U-shaped supports and four screw compositions.Copper matrix is by base
It is combined as a whole with cylindrical stent, two groups of symmetrical copper matrixes are buckled together the main body of composition sensing device；One two-sided
Quartz wafer with symmetry electrode, is also that Sensitive Apparatus most crucial in sensing device is used to carry as the condensation front of dew point
For rate-adaptive pacemaker value, two groups of symmetrical copper matrixes being buckled together are clamped；Two pieces of high thermal conductive silicon films, prop up as cylinder
Padded coaming between frame and quartz wafer, also serves as the dielectric material that cylindrical stent transmits temperature to quartz wafer, two pieces
High thermal conductive silicon film is individually positioned between two copper matrixes and quartz wafer in the middle of as copper matrix and quartz wafer
Buffering and coupling part；Two semiconductor coolers, for providing refrigeration to quartz wafer, are individually positioned in two copper matrixes
Base portion；Two radiators, respectively the hot face to two semiconductor coolers radiated, be close to the bottom of copper matrix
Seat is simultaneously affixed with the hot face of semiconductor cooler；One PT100 platinum resistance thermometer sensor, the temperature for measuring quartz wafer surface, puts
Put the non-electrode region that quartz wafer is affixed between two groups of symmetrical copper matrixes；Four U-shaped supports and four screws, are used for
Simultaneously be separately fixed at the base of two matrixes on a radiator by two symmetrical matrixes of connection, ultimately form one it is complete
Sensing device.
Two groups of described symmetrical copper matrixes are respectively two machined pieces of off-standard size, and material is brass,
With fabulous heat conductivility；
The described two-sided quartz wafer with symmetry electrode is from resonant frequency for the surface of 4MHz~6MHz is coated with
The quartz wafer of silver or gold electrode；
Two pieces of described high thermal conductive silicon film stock thickness be 1mm, thermal conductivity factor be 5w/m-k (w represents " watt " that m represents " rice ",
K is represented " Kelvin ")；
Two described semiconductor coolers are TEC1-3104 type semiconductor coolers；
Two described radiators are heat-pipe radiator；
A described PT100 platinum resistance thermometer sensor, is the accurate RTD of four-wire system；
Four described U-shaped supports are to be shaped as U-shaped and two ends to have the hole of a diameter of 4mm；
Four described screw diameters are 4mm；
Apply the technical scheme of the present invention, there is provided a kind of that the device for condensing is produced on quartz wafer surface, with specific reference to stone
There is the species of which physical change and output signal in English wafer surface, the present invention does not do to limit after producing condensation.
A kind of dew point sensor device based on double refrigeration sensitive faces of the present invention, its advantage is can both to ensure quartz wafer
Oscillating mass, can possess efficient heat transfer property again so that the characteristics of sensor construction has stability and high efficiency.
Brief description of the drawings
Fig. 1 is the profile of sensing device structure of the invention.
Fig. 2 is the top view of matrix.
Fig. 3 is the upward view of matrix.
Fig. 4 is the three-dimensional effect diagram of matrix.
Wherein, above-mentioned accompanying drawing includes reference：
1st, base；2nd, radiator；3rd, semiconductor cooler；4th, quartz wafer；5th, PT100 platinum resistance thermometer sensor,s；6th, screw；7th, circle
Cylindrical stent；8th, high thermal conductive silicon film；9th, U-shaped support.
Specific embodiment
Describe the present invention in detail below with reference to the accompanying drawings and in conjunction with the embodiments.
With reference to shown in Fig. 1 and Fig. 4, Fig. 4 is the three-dimensional effect diagram of matrix, and sensing device is mainly by two symmetrical matrix groups
Into, the material of matrix is brass, and with extraordinary heat conductivility, matrix mainly includes that cylindrical stent 7 and base 1 are constituted,
The damaged surface difference cruciform symmetry of cylindrical stent 7 cuts four ventilating openings, and cylindrical stent inside is sky, in upper end annulus
Place has the groove that depth is a millimeter from inside, and groove needs to be filled and led up with high thermal conductive silicon film 8.
As shown in Fig. 2 quartz wafer 4 is placed on above high thermal conductive silicon film 8, and it is uniform by the non-of quartz wafer 4
Electrode zone fits together with high thermal conductive silicon film 8, it is ensured that the high thermal conductive silicon film 8 of the annular at quartz wafer 4 and place
It is concentric circles, PT100 platinum resistance thermometer sensor,s 5 is placed on the non-electrode region on quartz wafer 4, then by another semi-symmetric matrix
It is buckled on this matrix, forms a main body for sensing device.
As shown in figure 3, have a groove for placement semiconductor cooler 3 at the back side of base 1, by two semiconductor refrigeratings
The huyashi-chuuka (cold chinese-style noodles) of device 3 is affixed on one side of two bases 1 near quartz wafer 4 respectively, then two radiators 2 are affixed on into two and half respectively lead
The hot face of chiller 3.Base 1 all breaks four silks that can be used to twist screw 6 with radiator 2 at four angles that it is fitted
The silk groove with the specification as radiator 2 of base 1 is all got at groove, four two ends of U-shaped support 9, is finally beaten four with screw 6
The U-shaped support 9 of good silk groove is fixed together with base 1 and radiator 2, forms complete sensing device.
Semiconductor cooler work refrigeration, quartz wafer 4 is passed to by low temperature by cylindrical stent 7, and quartz wafer 4 leads to
Cross outside drive circuit to be driven it, keep the resonant condition of stabilization, fixed frequency values are exported under reset condition, when
When the temperature of the electrode surface of quartz wafer 4 reaches dew-point temperature, the condensation of moisture can cause the electrode surface quality of quartz wafer 4 attached
Plus, so as to the output frequency for causing quartz wafer 4 changes, the condensation moment is recognized by obtaining the change of frequency, while
The surface temperature of quartz wafer 4 is measured by PT100 platinum resistance thermometer sensor,s 5, realizes the high-acruracy survey of dew point.
Above-described rate-adaptive pacemaker mode is only the preferred embodiments of the present invention, is not intended to limit the invention,
For a person skilled in the art, signal output can have various modifications and variations with detected mode in the present invention.
All any modification, equivalent substitution and improvements within the spirit and principles in the present invention, made etc., should be included in of the invention
Within protection domain.
Claims (9)
1. a kind of dew point sensor device based on double refrigeration sensitive faces, it is characterised in that：It is by two groups of symmetrical copper bases
Body, two-sided quartz wafer, two pieces of high thermal conductive silicon films, two semiconductor coolers, two radiators, one with symmetry electrode
Individual PT100 platinum resistance thermometer sensor,s, four U-shaped supports and four screw compositions；Copper matrix is combined into by base and cylindrical stent
Integrally, two groups of symmetrical copper matrixes are buckled together the main body for constituting sensing device；One two-sided quartz with symmetry electrode
Chip, is also that Sensitive Apparatus most crucial in sensing device is used to provide rate-adaptive pacemaker value as the condensation front of dew point, is buckled in
Two groups of symmetrical copper matrixes together are clamped；Two pieces of high thermal conductive silicon films, as between cylindrical stent and quartz wafer
Padded coaming, also serves as the dielectric material that cylindrical stent transmits temperature to quartz wafer, and two pieces of high thermal conductive silicon films are put respectively
Put between two copper matrixes and quartz wafer as the buffering in the middle of copper matrix and quartz wafer and coupling part；Two
Semiconductor cooler, for providing refrigeration to quartz wafer, is individually positioned in two base portions of copper matrix；Two radiatings
Device, respectively the hot face to two semiconductor coolers radiated, be close to copper matrix base and and semiconductor cooler
Hot face be affixed；One PT100 platinum resistance thermometer sensor, the temperature for measuring quartz wafer surface, be placed on two groups it is symmetrical copper
The non-electrode region of quartz wafer is affixed between matrix；Four U-shaped supports and four screws, for connecting two symmetrical matrixes
And the base of two matrixes is separately fixed on a radiator, ultimately form a complete sensing device.
2. a kind of dew point sensor device based on double refrigeration sensitive faces according to claim 1, it is characterised in that：It is described
Two groups of symmetrical copper matrixes be respectively two machined pieces of off-standard size, material is brass, is led with fabulous
Hot property.
3. a kind of dew point sensor device based on double refrigeration sensitive faces according to claim 1, it is characterised in that：It is described
The two-sided quartz wafer with symmetry electrode from resonant frequency for the surface of 4MHz~6MHz is coated with silver and gold electrode
Quartz wafer.
4. a kind of dew point sensor device based on double refrigeration sensitive faces according to claim 1, it is characterised in that：It is described
Two pieces of high thermal conductive silicon film stock thickness be 1mm, thermal conductivity factor is 5w/m-k.
5. a kind of dew point sensor device based on double refrigeration sensitive faces according to claim 1, it is characterised in that：It is described
Two semiconductor coolers be TEC1-3104 type semiconductor coolers.
6. a kind of dew point sensor device based on double refrigeration sensitive faces according to claim 1, it is characterised in that：It is described
Two radiators be heat-pipe radiator.
7. a kind of dew point sensor device based on double refrigeration sensitive faces according to claim 1, it is characterised in that：It is described
A PT100 platinum resistance thermometer sensor, for four-wire system accurate RTD.
8. a kind of dew point sensor device based on double refrigeration sensitive faces according to claim 1, it is characterised in that：It is described
Four U-shaped supports be to be shaped as U-shaped and two ends to have the hole of a diameter of 4mm.
9. a kind of dew point sensor device based on double refrigeration sensitive faces according to claim 1, it is characterised in that：It is described
Four screw diameters be 4mm.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109813866A (en) * | 2019-01-24 | 2019-05-28 | 中南大学 | The measuring system and measurement method of unsaturation frozen soil matric potential |
| CN109884119A (en) * | 2019-02-27 | 2019-06-14 | 深圳市伊索装备技术有限公司 | A kind of hydrophilic quartz resonance dew point recognition methods |
| CN111024762A (en) * | 2019-12-05 | 2020-04-17 | 北京航空航天大学 | High-temperature flue gas dew point identification method |
| CN111147041A (en) * | 2019-12-20 | 2020-05-12 | 中国电子科技集团公司第十三研究所 | Quartz crystal resonator lamination assembly structure and method and resonator |
| CN113804726A (en) * | 2021-08-11 | 2021-12-17 | 北京航空航天大学 | Manufacturing method of vibration-temperature measurement composite resonance humidity sensing chip for dew point measurement |
| CN114324470A (en) * | 2020-10-15 | 2022-04-12 | 北京航空航天大学 | Infrared resonance type rapid dew point measurement method |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109813866A (en) * | 2019-01-24 | 2019-05-28 | 中南大学 | The measuring system and measurement method of unsaturation frozen soil matric potential |
| CN109813866B (en) * | 2019-01-24 | 2021-08-17 | 中南大学 | Method for measuring matrix potential of unsaturated frozen soil |
| CN109884119A (en) * | 2019-02-27 | 2019-06-14 | 深圳市伊索装备技术有限公司 | A kind of hydrophilic quartz resonance dew point recognition methods |
| CN111024762A (en) * | 2019-12-05 | 2020-04-17 | 北京航空航天大学 | High-temperature flue gas dew point identification method |
| CN111147041A (en) * | 2019-12-20 | 2020-05-12 | 中国电子科技集团公司第十三研究所 | Quartz crystal resonator lamination assembly structure and method and resonator |
| CN111147041B (en) * | 2019-12-20 | 2023-10-20 | 中国电子科技集团公司第十三研究所 | Quartz crystal resonator lamination assembly structure and method and resonator |
| CN114324470A (en) * | 2020-10-15 | 2022-04-12 | 北京航空航天大学 | Infrared resonance type rapid dew point measurement method |
| CN113804726A (en) * | 2021-08-11 | 2021-12-17 | 北京航空航天大学 | Manufacturing method of vibration-temperature measurement composite resonance humidity sensing chip for dew point measurement |
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