CN106769802A - A kind of low light bottom is made an uproar high-flux dust particle counter optical pickocff - Google Patents
A kind of low light bottom is made an uproar high-flux dust particle counter optical pickocff Download PDFInfo
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- CN106769802A CN106769802A CN201611192564.5A CN201611192564A CN106769802A CN 106769802 A CN106769802 A CN 106769802A CN 201611192564 A CN201611192564 A CN 201611192564A CN 106769802 A CN106769802 A CN 106769802A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 49
- 239000002245 particle Substances 0.000 title claims abstract description 42
- 239000000428 dust Substances 0.000 title claims abstract description 20
- 230000008033 biological extinction Effects 0.000 claims abstract description 20
- 238000005286 illumination Methods 0.000 claims abstract description 17
- 238000005070 sampling Methods 0.000 claims abstract description 11
- 239000011521 glass Substances 0.000 claims description 7
- 230000004313 glare Effects 0.000 claims description 5
- 239000003595 mist Substances 0.000 claims description 5
- 238000002310 reflectometry Methods 0.000 claims description 5
- 239000011358 absorbing material Substances 0.000 claims description 4
- 238000004364 calculation method Methods 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000003384 imaging method Methods 0.000 claims description 2
- 238000001514 detection method Methods 0.000 abstract description 5
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- 238000013461 design Methods 0.000 description 3
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- 238000012545 processing Methods 0.000 description 3
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- 238000004458 analytical method Methods 0.000 description 2
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- 239000003814 drug Substances 0.000 description 2
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- 238000012544 monitoring process Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000005693 optoelectronics Effects 0.000 description 2
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/10—Investigating individual particles
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- G01N2015/1022—
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- G01N2015/1024—
Abstract
Made an uproar high-flux dust particle counter optical pickocff the invention discloses a kind of low light bottom, including laser illumination system, KPT Scatter system, extinction coefficient and air-channel system, photosensitive area is formed between laser illumination system and extinction coefficient, KPT Scatter system is included along the first speculum and photodiode, air-channel system includes air inlet sampling pipe and escaping pipe, air inlet sampling pipe and escaping pipe direction are perpendicular to KPT Scatter system, and be distributed along primary optical axis both sides, extinction coefficient includes the light pipe being located on laser illumination system primary optical axis, it is located at light pipe end mouth of pipe side and is mutually the conical cavity of angle with light pipe axis and the light in light pipe can be reflexed to the second speculum in conical cavity.Extinction coefficient of the invention can make nearly all laser entered into extinction coefficient be unable to come back to photosensitive area, and the light bottom for so greatly reducing optical pickocff is made an uproar, and improves the signal to noise ratio of sensor, can realize the detection to smaller particle particle.
Description
Technical field
The clean room environment cleanliness monitoring instrument technical fields such as the present invention is for eating, medicine, it is more particularly to a kind of
Low light bottom is made an uproar high-flux dust particle counter optical pickocff.
Background technology
Laser dust particle counter is dust particle number concentration and particle size in the clean room environment such as food, medicine
The important instrument of monitoring, it is formed according to the principle design of Mie scattering.Its composition generally includes optical system, air-channel system
With the bulk of signal processing circuitry three, optical system is then by laser lighting module, scattering light collection module and matting module group
Into；And air-channel system is typically to be made up of air inlet sampling pipe and escaping pipe；Signal processing circuitry is by pre-amplification circuit
Constituted with the master control borad big module of control circuit two.During work, air pump is opened, and photosensitive area is flowed through, when particle is passed through steady air current
During photosensitive area, laser light incident particle produces scattering light, and the KPT Scatter light of certain angle scope is collected into just by spherical reflector
On the photodiode of top, then by opto-electronic conversion, scattered light signal is converted into electric signal, then enter by preamplifier
Row low level signal amplification, is then fed into being analyzed treatment to follow-up master control borad circuit, compare through oversampling circuit, screen after obtain not
With the population of particle diameter shelves.
Existing airborne particle counter delustring light path is typically fairly simple, typically straight incident taper ligh trap chamber, by
Limited in by mechanical processing technique condition, a point cannot be processed into taper ligh trap bottom of chamber portion, at least retained 1~2mm's
Disc, powerful laser is irradiated on disc, is reflected through disc, and light comes back to photosensitive area and forms veiling glare.In addition, existing
Some airborne particle counter KPT Scatter systems often only consider object image distance formula, and three-dimensional to uniform photosensitive area different zones
Angle change does not add theory analysis to the influence that KPT Scatter coefficient is brought, and so designed spherical reflector out is difficult to
Guarantee possesses resolution ratio higher.In actual application, due to being influenceed by the process limitation in such ligh trap chamber, smaller
The scattered signal of grain may mix with noise and be difficult to differentiate between, and then have influence on detection of the counter to smaller particle particle, this
The optical pickocff signal to noise ratio in ligh trap chamber typically all can be than larger；KPT Scatter system is due to lacking to photosensitive area edge solid angle
The caused scattering coefficient change of change carries out theory analysis, and the particle size resolution of the optical pickocff for designing is general also not
It is high.
The content of the invention
To solve the above problems, the present invention provides that a kind of signal to noise ratio is higher, and the lower low light bottom of detection particle diameter is made an uproar big flow
Optical sensor for dust particle counter.
The technical solution adopted for the present invention to solve the technical problems is：A kind of low light bottom is made an uproar high-flux dust particle counting
Device optical pickocff, including laser illumination system, KPT Scatter system, extinction coefficient and air-channel system, the laser lighting system
Photosensitive area is formed between system and extinction coefficient, the KPT Scatter system is included along the first speculum of primary optical axis side and along master
The photodiode of optical axis opposite side, the air-channel system includes air inlet sampling pipe and escaping pipe, air inlet sampling pipe and escaping pipe
Direction is distributed perpendicular to KPT Scatter system along primary optical axis both sides, and the extinction coefficient includes being located at the laser lighting system
Light pipe on system primary optical axis, be located at the light pipe end mouth of pipe side and with light pipe axis be mutually the conical cavity of angle with
And the light in light pipe can be reflexed to the second speculum in conical cavity.
The improvement of technical solution of the present invention is further used as, the light pipe has the taper pipe of inclined end face for end,
Second speculum is the plane mirror for being located at the inclined end face rear.
It is further used as the improvement of technical solution of the present invention, the axis of the light pipe and the primary optical axis of laser illumination system
Overlap, the axis of conical cavity is vertical with the axis of light pipe, form Vertical Structure, the plane mirror normal and conical cavity
Axis, light pipe axis institute angled are all 45 °.
The improvement of technical solution of the present invention is further used as, light pipe and conical cavity surfaces externally and internally are coated with black light-absorbing material
Material, plane mirror plates silverskin using glass surface, and reflectivity reaches more than 90%.
The improvement of technical solution of the present invention is further used as, plane mirror can be around perpendicular to paper direction and positioned at cone
Can be fixed after the axis in shape chamber rotates with the rotation axis of the axis intersection of light pipe, and position mixes up.
The improvement of technical solution of the present invention is further used as, plane mirror is around the angle rotated perpendicular to the direction of paper
It is 5.0 °~10.0 °.
The improvement of technical solution of the present invention is further used as, the axis of light pipe just falls with the crossing point of axes of conical cavity
On the preceding surface of plane mirror.
The improvement of technical solution of the present invention is further used as, first speculum is spherical reflector, spherical reflector
Meet the object image distance formula that reflecting sphere is imaged under paraxial condition relative to photosensitive district center with photodiode positions, sphere is anti-
Software for calculation is designed in conjunction forms using Geometric Modeling and MIST scattering to penetrate mirror, particle is passed through from photosensitive area margin and center
When the signal strength variance that receives of photodiode within 20%.
The improvement of technical solution of the present invention is further used as, spherical reflector inner surface plates silverskin using glass surface, interior
Surface smoothness reaches 60-40, and reflectivity reaches more than 90%.
The improvement of technical solution of the present invention is further used as, the laser illumination system includes that the semiconductor for setting gradually swashs
Optical diode, planoconvex spotlight and cylindrical mirror, added with veiling glare diaphragm and the black sealing of disappearing between the planoconvex spotlight and cylindrical mirror
Circle.
Beneficial effects of the present invention：Extinction coefficient of the invention uses the structure of light pipe, the second speculum and conical cavity
Form, the laser that laser illumination system passes through photosensitive area fully enters light pipe, and fraction of laser light is absorbed by light pipe, remaining
Laser is anti-in conical cavity by the second speculum, is absorbed through the multiple reflections of conical cavity, and small part is not by swashing that conical cavity absorbs
Light, no longer directly returns to photosensitive area, but reflex to other ligh trap cavity spaces through the reflection of the second speculum by light pipe
In, such nearly all laser entered into extinction coefficient is unable to come back to photosensitive area, so greatly reduces
The light bottom of optical pickocff is made an uproar, and improves the signal to noise ratio of sensor, can realize the detection to smaller particle particle.
Brief description of the drawings
The invention will be further described below in conjunction with the accompanying drawings：
Fig. 1 is light path schematic diagram of the present invention；
Fig. 2 is that the present invention inclines upward view；
Fig. 3 is oblique top view of the present invention；
Fig. 4 is extinction coefficient schematic diagram of the present invention；
Fig. 5 is index path of the present invention when light pipe and taper cavity wall are set to mirror materials during zemax is designed（Delustring
System returns to photosensitive area without laser）；
Fig. 6 is each parameter schematic diagram of spherical reflector of the present invention.
Specific embodiment
Referring to figs. 1 to Fig. 6, that show the concrete structure of the preferred embodiments of the invention.Will be detailed below this
Invent the design feature of each part, and be with shown in Fig. 1 if being described to during direction (upper and lower, left and right, before and after)
Structure is that, with reference to description, but actually used direction of the invention is not limited thereto.
Made an uproar high-flux dust particle counter optical pickocff the invention provides a kind of low light bottom, referring to Fig. 1, including swashed
Lighting system, KPT Scatter system, extinction coefficient and air-channel system, the laser illumination system include that what is set gradually partly leads
Volumetric laser diode 11, planoconvex spotlight 12 and cylindrical mirror 13, added with the veiling glare that disappears between the planoconvex spotlight 12 and cylindrical mirror 13
Diaphragm and black sealing ring.Photosensitive area is formed between the laser illumination system and extinction coefficient, power is the 808nm of 500mW
Semiconductor swashs the transmitting laser of diode 11, is assembled through the collimation of planoconvex spotlight 12 and cylindrical mirror 13, is formed in laser optical path front end
The photosensitive area of even light intensity and uniform thickness.The KPT Scatter system is included along the first speculum 21 of primary optical axis side and along master
The photodiode 22 of optical axis opposite side, the air-channel system includes air inlet sampling pipe 31 and escaping pipe 32, air inlet sampling pipe 31
With the direction of escaping pipe 32 perpendicular to KPT Scatter system, and it is distributed along primary optical axis both sides, during pump work, air-flow is with constant speed
Into air inlet sampling pipe 31, by being flowed out from escaping pipe 32 behind photosensitive area.When particle passes through photosensitive area, the scattering letter of particle
Number it is collected at photodiode 22 by the first speculum 21, then through opto-electronic conversion, passes the signal along to and process in subsequent conditioning circuit.
The extinction coefficient includes the light pipe 41 being located on the laser illumination system primary optical axis, is located at the tip tube of the light pipe 41
Mouth side is simultaneously mutually the conical cavity 42 of angle and can reflex in conical cavity the light in light pipe 41 with light pipe axis
The second speculum 43.Wherein, the light pipe 41 has the taper pipe of inclined end face for end, preferably, 28.3L optics
About 76.0 ° of sensor wedge pipe wedge angle, about 70.3 ° of 50.0L optical pickocff wedge pipe wedges angle, second speculum 43
To be located at the plane mirror at the inclined end face rear.The laser for passing through photosensitive area is all introduced into light pipe 41, reaches the
On two-mirror 43, the second speculum 43 reflexes to laser beam in conical cavity 42, through the multiple reflections of conical cavity 42, inhales
Receive, the laser from conical cavity 42 out directly will not be reflected in backscatter chamber by the second speculum 43, but is reflexed to and applied
It is covered with the ligh trap cavity wall of black light-absorbing material, wedge pipe wedge edge can equally keep out part swashing from the outgoing of conical cavity 42
Light, this extinction coefficient advantageously reduces the optical noise of big flow optical pickocff, so as to improve the signal to noise ratio of sensor and right
The ability of fine particle detection.
Referring to Fig. 2, Fig. 3, the present invention is arranged in shell, and shell includes base 51, the middle part case being located on base 51
52nd, the laser lighting case 53 for being located at the front side of the middle part case 52 and the delustring case 54 for being located at the rear side of middle part case 52, institute
State laser illumination system to be arranged in laser lighting case 53, extinction coefficient is arranged in delustring case 54, in middle part case 52
Portion forms photosensitive area, and the first speculum 21 of KPT Scatter system is arranged on the base 51 in middle part case 52, the pole of photoelectricity two
Pipe 22 is arranged on the middle part case 52 directly over base 51, and the air inlet sampling pipe 31 and escaping pipe 32 of air-channel system are respectively provided at
Before and after middle part case 52 on the shell wall of both sides.Referring to Fig. 4, the light pipe 41 is arranged on delustring case 54 by flange, taper
Chamber 42 is then threadedly attached on delustring cover 54.
As the preferred embodiment of the present invention, the axis of the light pipe 41 and the primary optical axis weight of laser illumination system
Close, the axis of conical cavity 42 is vertical with the axis of light pipe 41, form Vertical Structure, the plane mirror normal and taper
The axis of chamber 42, the axis of light pipe 41 institute angled are all 45 °.
There is a certain critical value in the cone angle of above-mentioned conical cavity 42, more or less than this critical value, from swashing for the outgoing of conical cavity 42
Light can be directly entered in scattering system through plane mirror reflection turns into veiling glare, and the cone angle critical value of wherein 28.3L is about
50.0 °, about 49.4 ° of the cone angle critical value of 50.0L.Certain this rectilinear light trap structures are not limited only to the optics of 28.3L and 50.0L
The optical pickocff of sensor, 100.0L or greater flow is equally applicable.
And, light pipe 41 and the surfaces externally and internally of conical cavity 42 are coated with black light-absorbing material, and plane mirror uses BK7 glass
Glass plated surface silverskin, reflectivity reaches more than 90%.The laser for passing through photosensitive area fully enters wedge pipe, and fraction of laser light is by table
The wedge pipe of face coating light absorbent absorbs, and remaining laser is anti-in conical cavity 42 by plane mirror, through conical cavity 42
Multiple reflections are absorbed, the laser that small part is not absorbed by conical cavity 42, and wedge pipe is no longer directly passed through through plane mirror reflection
And photosensitive area is returned to, but in reflexing to other ligh trap cavity spaces.Referring to Fig. 5, from index path, it can clearly be seen that into
Laser in extinction coefficient, in no longer backing within KPT Scatter system.
The axis of light pipe 41 just falls on the preceding surface of plane mirror with the crossing point of axes of conical cavity 42.Plane reflection
Mirror can revolve around the rotation axis of the axis perpendicular to paper direction and positioned at conical cavity 42 and the axis intersection of light pipe 41
Turn, and can fix after position mixes up.Plane mirror is 5.0 °~10.0 ° around the angle rotated perpendicular to the direction of paper.
First speculum 21 is spherical reflector, and spherical reflector is with the position of photodiode 22 relative to photosensitive area
Center meets the object image distance formula of reflecting sphere imaging under paraxial condition, and spherical reflector is using Geometric Modeling and MIST scatterometers
Calculate that software is designed in conjunction forms, make particle from photosensitive area margin and center pass through when the signal intensity that receives of photodiode
Deviation within 20%, innovate formula spherical reflector design, it is ensured that particle from photosensitive area margin and center pass through when detector
The signal strength variance for receiving is within 20% so that low light bottom is made an uproar the inspection of high-flux dust particle counter optical pickocff
Resolution ratio is surveyed to be greatly improved.Referring to Fig. 6,28.3L spherical reflectors scattering solid angle half angle β is 65.0 °, by just remaining
String formula counted positive drift angle γ and negative bias angle α is respectively 2.8 ° and 3.0 °；50.0L spherical reflectors scatter solid angle half angle β
It is 45.0 °, 2.7 ° and 3.0 ° is respectively by sine and cosine formula counted positive drift angle γ and negative bias angle α.Certainly, Geometric Modeling with
The method of MIST scattering software for calculation spherical reflectors designed in conjunction is not limited only to the optical pickocff of 28.3L and 50.0L,
The optical pickocff of 100.0L or greater flow is equally applicable.
The scattering coefficient deviation that calculates of software for calculation is scattered as shown in list below by MIST：
The 28.3L optical pickocffs of table 1, β angles are 65.0 °, the scattering coefficient and positive and negative deviation percentage of different-grain diameter
| Particle diameter（μm） | The scattering system of photosensitive district center Number（65.0 ° of angle of scattering） | Positively biased 1.75mm（65.0°- 2.8°）Scattering coefficient afterwards | Scattering coefficient just to the rear becomes The percentage of change | Negative bias 1.75mm（65.0°+3.0°） Scattering coefficient afterwards | Scattering coefficient becomes after negative bias The percentage of change |
| 0.3 | 0.0070 | 0.0061 | -12.86% | 0.0081 | 15.71% |
| 0.5 | 0.1016 | 0.0908 | -10.63% | 0.1149 | 13.09% |
| 1.0 | 0.4551 | 0.3923 | -13.80% | 0.5434 | 19.40% |
| 3.0 | 2.6121 | 2.3632 | -9.53% | 2.9523 | 13.02% |
| 5.0 | 4.6910 | 4.1815 | -10.86% | 5.3950 | 15.01% |
| 10.0 | 16.7524 | 14.7448 | -11.98% | 19.1711 | 14.44% |
The 50.0L optical pickocffs of table 2, β angles are 45.0 °, the scattering coefficient and positive and negative deviation percentage of different-grain diameter
| Particle diameter（μm） | The scattering system of photosensitive district center Number（45.0 ° of angle of scattering） | Positively biased 5.00mm（45.0°- 2.7°）Scattering coefficient afterwards | Scattering coefficient just to the rear becomes The percentage of change | Negative bias 5.00mm（45.0°+3.0°） Scattering coefficient afterwards | Scattering coefficient becomes after negative bias The percentage of change |
| 0.3 | 0.0020 | 0.0016 | -20.00% | 0.0025 | 25.00% |
| 0.5 | 0.0397 | 0.0345 | -13.10% | 0.0468 | 17.88% |
| 1.0 | 0.1581 | 0.1383 | -12.52% | 0.1856 | 17.39% |
| 3.0 | 1.3024 | 1.1735 | -9.90% | 1.4517 | 11.46% |
| 5.0 | 1.5956 | 1.3832 | -13.31% | 1.9373 | 21.42% |
| 10.0 | 6.0976 | 5.2229 | -14.34% | 7.3063 | 19.82% |
Preferably, spherical reflector inner surface plates silverskin using BK7 glass surfaces, inner surface finish reaches 60-40, instead
The rate of penetrating reaches more than 90%.
Certainly, the invention is not limited to above-mentioned implementation method, and those of ordinary skill in the art are without prejudice to originally
Equivalent variations or replacement can be also made on the premise of spirit, these equivalent modifications or replacement are all contained in the application right
It is required that in limited range.
Claims (10)
1. a kind of low light bottom is made an uproar high-flux dust particle counter optical pickocff, it is characterised in that：Including laser illumination system,
KPT Scatter system, extinction coefficient and air-channel system, form photosensitive area between the laser illumination system and extinction coefficient, described
KPT Scatter system is included along first speculum and the photodiode along primary optical axis opposite side of primary optical axis side, the gas circuit
System includes air inlet sampling pipe and escaping pipe, air inlet sampling pipe and escaping pipe direction perpendicular to KPT Scatter system, and along key light
Axle both sides are distributed, and the extinction coefficient includes the light pipe being located on the laser illumination system primary optical axis, is located at the leaded light
Pipe end mouth of pipe side is simultaneously mutually the conical cavity of angle and the light in light pipe can be reflexed into taper with light pipe axis
The second speculum in chamber.
2. low light bottom according to claim 1 is made an uproar high-flux dust particle counter optical pickocff, it is characterised in that：Institute
Stating light pipe has the taper pipe of inclined end face for end, and second speculum is the plane for being located at the inclined end face rear
Speculum.
3. low light bottom according to claim 2 is made an uproar high-flux dust particle counter optical pickocff, it is characterised in that：Institute
The axis of light pipe and the key light overlapping of axles of laser illumination system are stated, the axis of conical cavity is vertical with the axis of light pipe, formed
Vertical Structure, the plane mirror normal and taper cavity axis, light pipe axis institute is angled is all 45 °.
4. low light bottom according to claim 2 is made an uproar high-flux dust particle counter optical pickocff, it is characterised in that：Lead
Light pipe and conical cavity surfaces externally and internally are coated with black light-absorbing material, and plane mirror plates silverskin using glass surface, and reflectivity reaches
To more than 90%.
5. low light bottom according to claim 2 is made an uproar high-flux dust particle counter optical pickocff, it is characterised in that：It is flat
Face speculum can be around the axis perpendicular to paper direction and positioned at conical cavity and the rotation axis of the axis intersection of light pipe
Rotation, and can fix after position mixes up.
6. low light bottom according to claim 5 is made an uproar high-flux dust particle counter optical pickocff, it is characterised in that：It is flat
Face speculum is 5.0 °~10.0 ° around the angle rotated perpendicular to the direction of paper.
7. low light bottom according to claim 5 is made an uproar high-flux dust particle counter optical pickocff, it is characterised in that：Lead
The axis of light pipe just falls on the preceding surface of plane mirror with the crossing point of axes of conical cavity.
8. low light bottom according to claim 1 is made an uproar high-flux dust particle counter optical pickocff, it is characterised in that：Institute
The first speculum is stated for spherical reflector, spherical reflector meets paraxial bar with photodiode positions relative to photosensitive district center
The object image distance formula of reflecting sphere imaging under part, spherical reflector is combined with MIST scattering software for calculation using Geometric Modeling and set
Meter is formed, make particle from photosensitive area margin and center pass through when the signal strength variance that receives of photodiode within 20%.
9. low light bottom according to claim 8 is made an uproar high-flux dust particle counter optical pickocff, it is characterised in that：Ball
Face speculum inner surface plates silverskin using glass surface, and inner surface finish reaches 60-40, and reflectivity reaches more than 90%.
10. low light bottom according to claim 1 is made an uproar high-flux dust particle counter optical pickocff, it is characterised in that：
The laser illumination system includes the semiconductor laser diode, planoconvex spotlight and the cylindrical mirror that set gradually, the planoconvex spotlight
Added with veiling glare diaphragm and the black sealing ring of disappearing between cylindrical mirror.
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| CN201611192564.5A CN106769802B (en) | 2016-12-21 | 2016-12-21 | Optical sensor of low-light background noise large-flow dust particle counter |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110927842A (en) * | 2019-12-16 | 2020-03-27 | 中国计量科学研究院 | Spectrum absorber |
| CN111307677A (en) * | 2019-11-22 | 2020-06-19 | 北京雪迪龙科技股份有限公司 | Laser front scattering particulate matter monitoring device |
| CN112630127A (en) * | 2021-03-10 | 2021-04-09 | 中国科学院上海高等研究院 | Vacuum particle counter |
| CN112710597A (en) * | 2020-12-01 | 2021-04-27 | 兰州空间技术物理研究所 | Optical sensor structure design method suitable for space dust particle size measurement |
| CN113890908A (en) * | 2020-07-01 | 2022-01-04 | 深圳市万普拉斯科技有限公司 | Electronic device |
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