CN101162195A - Dust particle counter and method of use thereof - Google Patents
Dust particle counter and method of use thereof Download PDFInfo
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- CN101162195A CN101162195A CNA2007101901151A CN200710190115A CN101162195A CN 101162195 A CN101162195 A CN 101162195A CN A2007101901151 A CNA2007101901151 A CN A2007101901151A CN 200710190115 A CN200710190115 A CN 200710190115A CN 101162195 A CN101162195 A CN 101162195A
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Abstract
The invention provides an airborne particle counter and the method of application. The counter comprises a shell and an optical sensor and a preamplifier arranged inside the shell. An air pressure system of the optical sensor comprises an inlet of aerosol, an outlet of aerosol, an light scattering chamber, an air pump and an air filter; the air filter comprises a filter seat and a filter cover which are connected with each other and a filter membrane and a plunger ring which are arranged inside; the plunger ring is provided with a plurality of small holes to enable the air flows to go through the filter membrane evenly. The invention is an airborne particle counter with multiple functions, high testing accuracy, and rapid speed, and operates conveniently.
Description
Technical field
The present invention relates to a kind of testing tool and using method thereof of measuring the interior contained dust particle number of unit volume air in the clean environment.
Background technology
The critical piece of airborne particle counter is an optical sensor, its light scattering phenomenon that produces in light beam with dust particle is a principle, knows the mass concentration of dust particle contained in the size of particle and the air by inference by measuring scattered light intensity that dust particle produces.
Formerly in the technology, the technical scheme that optical sensor adopted of airborne particle counter can be referring to the patent of invention " optical sensor of airborne particle counter " (patent No. be ZL94239551.4) of people such as the Wu Jun people of Suzhou Decontamination Equipment Plant in application on October 28th, 1994.Measure the optical sensor of dust particle and be made up of illuminator, scattered light collection system, photoelectric commutator, air-channel system usually, the axes intersect of illuminator wherein, scattered light collection system and air-channel system is in the light sensitive area central point.During work, air-channel system is with the light sensitive area in the tested air suction optical sensor, dust particle wherein produces under beam lighting and the proportional scattered light signal of particle size, scattered light signal is scattered and is incident on the photoelectric commutator after light collecting system receives, the electric signal that photoelectric commutator output is directly proportional with scattered light intensity, the follow-up signal disposal system provides the mass concentration of dust particle in particle size and the air according to the amplitude of this electric signal.Because the scattered light signal of dust particle is and is faint, thus do not allow veiling glare to enter photoelectric commutator, otherwise measurement result will be incredible.
Formerly in the technology, in order to obtain the volume little optical sensor of trying one's best, usually the structural design of optical sensor is got very simple, in illuminator and scattered light collection system, saved the mechanism of necessary elimination veiling glare, the veiling glare composition that photoelectric commutator is received is many, causes the signal to noise ratio (S/N ratio) of scattered light signal low; And simple air-channel system can cause the reduction of the self-cleaning properties of counter itself.
Summary of the invention
The objective of the invention is to overcome the shortcoming of above-mentioned technology formerly, provide a kind of function many, the measuring accuracy height, speed is fast, easy to operate airborne particle counter.
Purpose of the present invention realizes by following technical solution:
A kind of airborne particle counter, include housing and be arranged on the optical sensor and the prime amplifier of enclosure interior, described optical sensor comprises illuminator, scattered light collection system, photoelectric commutator and air-channel system, the axes intersect of described illuminator, scattered light collection system and air-channel system is in the light sensitive area central point, and vertical in twos; In described illuminator, be disposed with condenser lens, light sensitive area and light trapping on the collimated laser beam working direction of sending along semiconductor laser elements; Described air-channel system comprises draft tube, light sensitive area and escape pipe; Described scattered light collection system is the spherical reflector in single aperture, the position of light sensitive area and photoelectric commutator photosurface lays respectively near the conjugate plane place of the both sides of the spherical reflector centre of sphere, air-channel system comprises gasoloid inlet, gasoloid outlet, light scattering chamber, air pump and air strainer, described air strainer comprises filter seat and the strainer cover that is mutually permanently connected, and its inner filtering membrane and trim ring is set, be disposed with several apertures on the trim ring, make air-flow can pass through filtering membrane equably.
Described scattered light collection system also can be made up of the rotation concave mirror, light sensitive area, diaphragm, the relay lens group that set gradually, described light sensitive area and diaphragm lay respectively at two conjugate position places of rotation concave mirror, described relay lens group is arranged between diaphragm and the photoelectric commutator, and diaphragm and photoelectric commutator sensitive area lay respectively at two conjugate position places of relay lens group.
Described light trapping is the biconial structure, and along being followed successively by inlet, middle part and bottom on the laser beam working direction, its size is earlier little from changing to greatly, and is big from changing to for a short time again.
The wavelength of described semiconductor laser elements is 780nm.
Described photoelectric commutator is a photodiode.
Described prime amplifier adopts broadband type logarithm amplifying circuit, and its bandwidth is consistent with the spectrum width of scattered light pulse.
The form of AC/DC is adopted in the design of the electric power system of this airborne particle counter.
Described electric power system also comprises a battery protecting circuit.
The using method of described airborne particle counter may further comprise the steps:
(1) prepares and measurement
After preheating, by measuring key, instrument promptly begins a sense cycle under standby condition, and this moment measures pilot lamp and the program pilot lamp is bright, and air pump is started working, and at this moment, the sampling flow that can observe on the rear panel shows, if flow is normal, can measure; If flow is higher or lower than 2.83L, then available little bottle opener transfers to 2.83L by flow regulation with flow, " READY " printed words original on Multi-Function Display disappear, shown data are " 0 ", if the original demonstration time, then remain unchanged, up to just beginning to show population by clock/data key once more;
(2) measuring operation
The self-cleaning of i instrument: with flexible pipe thief hatch is connected with the self-cleaning mouth, making 0.3 μ m shelves tale is zero continuous three times, and each 1 minute, then the visual equipment self-cleaning finished;
Ii is connected the flexible pipe two-port respectively with thief hatch, sampling hydraucone (annex), instrument enters the measurement state, for the dust particle that prevents inner-walls of duct absorption influences measurement result, should let slip measurement data one to two time;
Iii is in measuring process, and by measuring key, then instrument stops to measure immediately, if press clear key in measuring process, finish then current measuring period, and data are invalid, and begin next measuring period immediately;
(3) print
When measurement result need be printed, can be by printing key, at this moment print indicator is bright, after the expression sense cycle finishes, can print testing result automatically, presses printing key once more, and print indicator goes out, and print command is removed;
(4) charging operations
When the battery electric quantity in the instrument uses up, instrument will cut out automatically, treat could use after charged.
The invention has the beneficial effects as follows: because the improvement of filtrator in the air-channel system, prevented to damage filtering membrane, thereby improved the self-cleaning properties of airborne particle counter owing to air-flow is inhomogeneous; And measuring accuracy height of the present invention, speed is fast, and is easy to operate.
Description of drawings
Fig. 1 is the synoptic diagram of optical sensor of the present invention.
Fig. 2 be among Fig. 1 along A-A to cut-open view.
Fig. 3 is the synoptic diagram of air strainer of the present invention.
Fig. 4 is the enlarged drawing of A part among Fig. 3.
Fig. 5 is process of gas path figure of the present invention.
Fig. 6 is a front panel arrangenent diagram of the present invention.
Fig. 7 is a rear panel arrangenent diagram of the present invention.
Wherein:
1: semiconductor laser elements, 2: condenser lens, 3: light sensitive area, 4: light trapping, 5: the rotation concave mirror, 6: diaphragm, 7: relay lens group, 8: photoelectric commutator, 9: draft tube, 10: escape pipe, 11: filter seat, 12: filtering membrane, 13: the soft seal pad, 14: trim ring, the 15:O RunddichtringO, 16: strainer cover, 17: the light scattering chamber, 18: flowmeter, 19: air pump, 20: air strainer, 21: Multi-Function Display, 22: measure key, 23: the particle diameter key, 24: printing key, 25: options button, 26: adjust key, 27: data/clock key, 28: clear key, 29: periodical chain, the 30:UCL key, 31: key is set, 32: built-in printer, 33: thief hatch, 34: the self-cleaning mouth, 35: sampling flow shows, 36: flow regulation, 37: outlet, 38: power switch.
Embodiment
Airborne particle counter of the present invention includes housing and is arranged on the optical sensor and the prime amplifier of enclosure interior.Wherein optical sensor is become by illuminator, scattered light collection system, photoelectric commutator 8 and gas circuit set of systems, prime amplifier adopts broadband type logarithm amplifying circuit, this is the dynamic range that can survey particle diameter in order to enlarge, and its bandwidth is consistent with the spectrum width of scattered light pulse.Prime amplifier is with the electric impulse signal filtering low-frequency noise of photoelectric commutator 8 output and send into the subsequent process circuit of laser dust particle counter after being amplified to suitable amplitude, subsequent treatment is differentiated tested particle size according to the peak value of electric impulse signal, and stepping counting, obtain the particle number concentrations of various particle diameter dust particles in the tested air at last.
Optical sensor is a most important component in the airborne particle counter inner structure, below is the concrete introduction of optical sensor of the present invention.
Axis AA, BB and the CC of described illuminator, scattered light collection system and air-channel system intersect at the light sensitive area center O
1, and vertical in twos.As shown in Figure 1, in described illuminator, on the collimated laser beam working direction of sending along semiconductor laser elements 1, be equipped with condenser lens 2, light sensitive area 3 and light trapping 4 according to this, the central point O of the focus of condenser lens 2 and light sensitive area
1Overlap.The wavelength of semiconductor laser elements 1 is 780nm.
Described light trapping 4 is the biconial structure, promptly is made of inlet DD, middle part EE and bottom FF, and its size is varied down to middle part EE from inlet DD, become greater to bottom FF from middle part EE again, and the light trapping inwall is processed into zigzag and is coated with delustring pitch-dark.The effect of the light trapping of this biconial structure is, the incident illumination laser beam at first enters first taper DD-EE from inlet DD, after repeatedly reflecting, first taper DD-EE inwall enters second taper EE-FF, because the size of middle part EE is less than bottom FF, be difficult to reflect so enter the light of second taper EE-FF, promptly in second taper EE-FF, after repeatedly reflecting, absorbed fully.
Described scattered light collection system comprises rotation concave mirror 5, light sensitive area 3, diaphragm 6, the relay lens group 7 that sets gradually along its axis, and described relay lens group 7 is arranged between diaphragm 6 and the photoelectric commutator 8.
Described light sensitive area 3 lays respectively at two conjugate position O that rotate concave mirror 5 with diaphragm 6
1And O
2The place, promptly light sensitive area 3 satisfies object-image relation with diaphragm 6.The clear aperture of diaphragm 6 is corresponding with the size of light sensitive area 3, if promptly the imaging multiplying power of rotation concave mirror 5 is α times, light sensitive area 3 is of a size of a * b, and then diaphragm 6 is of a size of α a * α b.The effect of diaphragm 6 is only to allow the scattered light that dust particle sends in the light sensitive area 3 to pass through, and stops that the veiling glare beyond the light sensitive area 3 enters subsequent optical path.
The sensitive area of described diaphragm 6 and photoelectric commutator 8 lays respectively at two conjugate position places of relay lens group 7, and promptly diaphragm 6 satisfies object-image relation with the sensitive area of photoelectric commutator 8.Relay lens group 7 images in diaphragm 6 on the sensitive area of photoelectric commutator 8 with certain multiplying power β, and the imaging multiplying power of relay lens group 7 is β.
In described scattered light collection system, the absolute value of the total multiplying power α * β of the imaging system of being made up of rotation concave mirror 5 and relay lens group 7 is less than 1, promptly rotates to image on the sensitive area of photoelectric commutator 8 after concave mirror 5 and relay lens group 7 are dwindled light sensitive area 3.Like this, can use the little photoelectric commutator of sensitive area area.The photoelectric commutator that the sensitive area area is little can reduce dark noise, obtains high signal to noise ratio (S/N ratio).
Certainly, in order to save the space, reduce the volume of airborne particle counter, the scattered light collection system only adopts the spherical reflector of the single large-numerical aperture of prior art, and it brings up to 70 ° to the collection half-angle of scattered light by original 44 °.The position of light sensitive area 3 and photoelectric commutator 8 photosurfaces lays respectively near the conjugate plane place of the both sides of the spherical reflector centre of sphere.This simplicity of design is easily gone, the collection efficiency height.Spherical reflector reflecting surface plating medium total reflection film, approaching at the reflectivity at optical maser wavelength 780nm place with 1.Photoelectric commutator in the optical sensor 8 adopts PIN type photodiode rather than side-on photomultiplier simultaneously, and the volume of optical sensor is by 180 * 160 * 40mm like this
3Become 105 * 28 * 32mm
3, be about 1/10 of original volume, reached microminiaturized purpose.
As shown in Figure 2, described air-channel system is made of draft tube 9, light sensitive area 3 and escape pipe 10.In conjunction with the process of gas path figure of Fig. 5, sampling gas can pass through light scattering chamber 17, flowmeter 18, air pump 19, air strainer 20 successively.Sampling flow is 2.83L/min, and simple and clear smooth cavity design, appropriate gasoloid inlet diameter have guaranteed that dust particle does not produce turbulent flow in scattering chamber 17, once by light sensitive area 3.
Filtrator is the very important parts in the air-channel system, as shown in Figure 4 and Figure 5, described air strainer 20 comprises filter seat 11 and the strainer cover 16 that is mutually permanently connected, and its inner filtering membrane 12 and trim ring 14 are set, and is disposed with several apertures on the trim ring 14.The air-flow that enters filtrator is handled through 90 ° of right angles, and by behind the aperture, and air-flow is during equably by filtering membrane 12, has prevented to damage owing to air-flow is inhomogeneous filtering membrane 12, thereby has improved self-cleaning properties.
The course of work of optical sensor of the present invention is as follows:
The collimated laser beam line focus lens 2 that semiconductor laser elements 1 sends focus on light sensitive area 3, and the dust particle in the illumination light sensitizing range 3 enters light trapping 4 at last, is absorbed; Dust particle to be measured enters light sensitive area 3 through draft tube 9, produces and the proportional scattered light signal of its size under laser beam irradiation, is flowed out by escape pipe 10 then; Scattered light images in diaphragm 6 places after 5 reflections of rotation concave mirror, imaged on the sensitive area of photoelectric commutator 8 electric signal that photoelectric commutator 8 outputs are directly proportional with the scattered light intensity that dust particle produces after diaphragm 6 is eliminated veiling glare by relay lens group 7; Prime amplifier is with the electric impulse signal filtering low-frequency noise of photoelectric commutator 8 output and send into the subsequent process circuit of laser dust particle counter after being amplified to suitable amplitude, subsequent treatment is differentiated tested particle size according to the peak value of electric impulse signal, and stepping counting, obtain the particle number concentrations of various particle diameter dust particles in the tested air at last.
Control Software design of the present invention has taken into full account the needs that the user handles data, worked out the several data handling procedure, comprised by printer prints: the information such as English metric system data-switching of confidence upper limit and 0.5 μ m, 5.0 μ m particles bring great convenience to the user.
For instrument is used more easily, the form that AC/DC is adopted in the design of electric power system of the present invention is equipped with high performance lithium battery in the machine, the power supply of dependence self-contained battery, stream time is not less than 5 hours, and by the self-contained battery power supply, stream time takes the lead at home.In the circuit also specialized designs a battery protecting circuit, when this battery protecting circuit has low-voltage, the indication of LED luminotron, hummer prompting; Automatically close the function of instrument when dead electricity is pressed, protected battery effectively.
The present invention uses the ingenious design of hardware and software, makes like product only will be reduced to the counting interface that 48 integrated circuit are formed with 6 integrated circuit, has both reduced power consumption, has improved the reliability of instrument again.
Every gauging instrument must carry out the correction of meticulous strictness according to any difference of external factor and internal factor.Corrective system of the present invention has adopted the measuring system to complete machine, comprises that measuring system itself proofreaies and correct.The principle of this corrective system is that the electric signal of light signal in the scattering chamber that will collect and amplifier is sent into computing machine and handled, and is proofreaied and correct alignment precision≤2% automatically according to the data of timing signal by computing machine.
Interference free performance is one of important indicator of instrument performance, and self-contained circuit of the present invention is comparatively complicated, comprises following effective measures: 1. anti-jamming power-supply; 2. peripheral circuit adopts CMOS, reduces power consumption, has improved stability; 3. design a hardware anti-interference circuit, sealed disturbing pulse automatically; 4. software design has identification error code ability, error correction automatically.
Fig. 6 and Fig. 7 have disclosed the arrangenent diagram of button on the housing of the present invention.Front panel comprises Multi-Function Display 21, measurement key 22, particle diameter key 23, printing key 24, options button 25, adjusts key 26, data/clock key 27, clear key 28, periodical chain 29, UCL key 30, key 31, built-in printer 32, thief hatch 33 is set; Rear panel comprises self-cleaning mouth 34, sampling flow demonstration 35, flow regulation 36, outlet 37, power switch 38.
Below the simple function of each button down of introducing:
(1) Multi-Function Display (LED display)---by button operation, can show year, month, day; Branch, the time, second; The particle diameter shelves are not and the measurement data of dust granules.
(2) data/clock key---show year, month, day; Branch, the time, second.
(3) measure key---by this key, air pump is started working in the instrument, instrument is in measures or the self-cleaning state; Press once, air pump quits work again, and instrument is in standby condition.
(4) particle diameter key---whenever press once, instrument is just by 0.3,0.5,0.7,1.0,2.0,5.0 (μ m) ... sequential loop shows the population of a certain particle diameter.
(5) adjust key---select to be provided with content.Whenever press once, just per year → moon → day → time → minute → second → year → month ... the order change is provided with content.
(6) options button---whenever by once, change display mode once, its in proper order for journey show → choosing shows → window shows → observation → journey is apparent ...
(7) printing key---press primary key, instrument is carried out printing function, again by a print command cancellation.
(8) clear key---press primary key, the measurement data zero clearing, restart measuring period.
(9) periodical chain---whenever by instrument just press 1min → 2min → 3min → 10min → 1min → ... select measuring period.
(10) UCL key---instrument enters the confidence upper limit computing function.
(11) key is set---revise year, month, day, hour, min, second data.
(12) built-in printer---print paper delivery and place instrument top.
(13) thief hatch---spot sampling import.
(14) self-cleaning mouth---instrument is under the self-cleaning state and is connected use with thief hatch (being positioned at the instrument top) flexible pipe.
(15) sampling flow meter---indication sampling flow.
(16) flow regulation---regulate sampling flow.
(17) outlet---insert the 220V/50Hz alternating current.
(18) power switch---being switched on or switched off of control instrument power supply.
Using method of the present invention may further comprise the steps:
(1) prepares and measurement
After preheating, by measuring key 22, instrument promptly begins a sense cycle under standby condition, and this moment measures pilot lamp and the program pilot lamp is bright, and air pump 19 is started working, and at this moment, the sampling flow that can observe on the rear panel shows 35, if flow is normal, can measure; If flow is higher or lower than 2.83L, then available little bottle opener transfers to 2.83L by flow regulation 36 with flow, " READY " printed words original on Multi-Function Display 21 disappear, shown data are " 0 ", if the original demonstration time, then remain unchanged, up to just beginning to show population by clock/data key 27 once more;
(2) measuring operation
The self-cleaning of i instrument: with flexible pipe thief hatch 33 is connected with self-cleaning mouth 34, making 0.3 μ m shelves tale is zero continuous three times, and each 1 minute, then the visual equipment self-cleaning finished;
Ii is connected the flexible pipe two-port respectively with thief hatch 33, sampling hydraucone (annex), instrument enters the measurement state, for the dust particle that prevents inner-walls of duct absorption influences measurement result, should let slip measurement data one to two time;
Iii is in measuring process, and by measuring key 22, then instrument stops to measure immediately, if press clear key 28 in measuring process, finish then current measuring period, and data are invalid, and begin next measuring period immediately;
(3) print
When measurement result need be printed, can be by printing key, at this moment print indicator is bright, after the expression sense cycle finishes, can print testing result automatically, presses printing key 24 once more, and print indicator goes out, and print command is removed;
(4) charging operations
When the battery electric quantity in the instrument uses up, instrument will cut out automatically, treat could use after charged.
Under the powered-down on off state, instrument connects charger and just charges, and the pilot lamp demonstration is red on the charger at this moment, when pilot lamp shows green, represents to charge and finishes.The time of the each charging of suggestion is: 6 hours (off-mode).
Except that above-mentioned preferred embodiment, the present invention still has multiple concrete embodiment.All employings are equal to replacement or equivalent transformation and all technical schemes of forming, all drop within the scope of protection of present invention.
Claims (9)
1. airborne particle counter, include housing and be arranged on the optical sensor and the prime amplifier of enclosure interior, described optical sensor comprises illuminator, scattered light collection system, photoelectric commutator (8) and air-channel system, the axes intersect of described illuminator, scattered light collection system and air-channel system is in the light sensitive area central point, and vertical in twos; In described illuminator, be disposed with condenser lens (2), light sensitive area (3) and light trapping (4) on the collimated laser beam working direction of sending along semiconductor laser elements (1); Described air-channel system comprises draft tube (9), light sensitive area (3) and escape pipe (10); Described scattered light collection system is the spherical reflector in single aperture, the position of light sensitive area (3) and photoelectric commutator (8) photosurface lays respectively near the conjugate plane place of the both sides of the spherical reflector centre of sphere, it is characterized in that: air-channel system comprises the gasoloid inlet, the gasoloid outlet, light scattering chamber (17), air pump (19) and air strainer (20), described air strainer (20) comprises filter seat (11) and the strainer cover (16) that is mutually permanently connected, and its inner filtering membrane (12) and trim ring (14) be set, trim ring is disposed with several apertures on (14), makes air-flow can pass through filtering membrane (12) equably.
2. airborne particle counter according to claim 1, it is characterized in that: described scattered light collection system also can be made up of the rotation concave mirror (5) that sets gradually, light sensitive area (3), diaphragm (6), relay lens group (7), described light sensitive area (3) lays respectively at two conjugate position places that rotate concave mirror (5) with diaphragm (6), described relay lens group (7) is arranged between diaphragm (6) and the photoelectric commutator (8), and diaphragm (6) and photoelectric commutator (8) sensitive area lay respectively at two conjugate position places of relay lens group (7).
3. airborne particle counter according to claim 1 is characterized in that: described light trapping (4) is the biconial structure, and along being followed successively by inlet, middle part and bottom on the laser beam working direction, its size is earlier little from changing to greatly, and is big from changing to for a short time again.
4. airborne particle counter according to claim 1 is characterized in that: the wavelength of described semiconductor laser elements (1) is 780nm.
5. airborne particle counter according to claim 1 is characterized in that: described photoelectric commutator (8) is a photodiode.
6. airborne particle counter according to claim 1 is characterized in that: described prime amplifier adopts broadband type logarithm amplifying circuit, and its bandwidth is consistent with the spectrum width of scattered light pulse.
7. airborne particle counter according to claim 1 is characterized in that: the form of AC/DC is adopted in the design of the electric power system of this airborne particle counter.
8. airborne particle counter according to claim 1 is characterized in that: described electric power system also comprises a battery protecting circuit.
9. the using method of the described airborne particle counter of claim 1 may further comprise the steps:
(1) prepares and measurement
After preheating, by measuring key (22), instrument promptly begins a sense cycle under standby condition, this moment measures pilot lamp and the program pilot lamp is bright, and air pump (19) is started working, at this moment, the sampling flow that can observe on the rear panel shows (35), if flow is normal, can measure; If flow is higher or lower than 2.83L, then available little bottle opener transfers to 2.83L by flow regulation (36) with flow, going up original " READY " printed words when Multi-Function Display (21) disappears, shown data are " 0 ", if the original demonstration time, then remain unchanged, up to just beginning to show population by clock/data key (27) once more;
(2) measuring operation
The self-cleaning of i instrument: with flexible pipe thief hatch (33) is connected with self-cleaning mouth (34), making 0.3 μ m shelves tale is zero continuous three times, and each 1 minute, then the visual equipment self-cleaning finished;
Ii is connected the flexible pipe two-port respectively with thief hatch (33), sampling hydraucone (annex), instrument enters the measurement state, for the dust particle that prevents inner-walls of duct absorption influences measurement result, should let slip measurement data one to two time;
Iii is in measuring process, and by measuring key (22), then instrument stops to measure immediately, if press clear key (28) in measuring process, finish then current measuring period, and data are invalid, and begin next measuring period immediately;
(3) print
When measurement result need be printed, can be by printing key, at this moment print indicator is bright, after the expression sense cycle finishes, can print testing result automatically, presses printing key (24) once more, and print indicator goes out, and print command is removed;
(4) charging operations
When the battery electric quantity in the instrument uses up, instrument will cut out automatically, treat could use after charged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200710190115 CN101162195B (en) | 2007-11-16 | 2007-11-16 | Dust particle counter |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200710190115 CN101162195B (en) | 2007-11-16 | 2007-11-16 | Dust particle counter |
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| CN101162195A true CN101162195A (en) | 2008-04-16 |
| CN101162195B CN101162195B (en) | 2011-08-17 |
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| CN 200710190115 Expired - Fee Related CN101162195B (en) | 2007-11-16 | 2007-11-16 | Dust particle counter |
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