CN106735944A - A kind of modified laser micropore manufacture experimental technique based on penetration-detection technology - Google Patents
A kind of modified laser micropore manufacture experimental technique based on penetration-detection technology Download PDFInfo
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- CN106735944A CN106735944A CN201611165542.XA CN201611165542A CN106735944A CN 106735944 A CN106735944 A CN 106735944A CN 201611165542 A CN201611165542 A CN 201611165542A CN 106735944 A CN106735944 A CN 106735944A
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- pulse number
- laser
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- hole
- detection technology
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
Experimental technique is manufactured the invention discloses a kind of modified laser micropore based on penetration-detection technology, is comprised the following steps：S1, required pulse number when through hole in laser micropore manufacture is formed, and pulse number threshold value are obtained using penetration-detection technology；S2, using pulse number threshold value as the pulse number that uses under different parameters combination in experiment, so as to be improved to control variate method, orthogonal experiment；S3, the influence using modified control variate method, each influence factor of improved orthogonal experimental method research to laser micropore workmanship, optimize laser micropore fabrication process parameters.The present invention obtains the pulse number threshold values for just getting through material by penetration-detection technology, using pulse number threshold values as laser boring pulse number in experiment, exclude through hole and form influence of the afterpulse laser to through hole taper, reduce heat affecting, the reliability of research is improved, the efficiency that laser gets through hole is further improved.Compensate for the deficiency of Traditional control quantity method and orthogonal experiment.
Description
Technical field
The invention belongs to laser micro/nano manufacture field, more particularly to a kind of modified laser based on penetration-detection technology
Micropore manufactures experimental technique.
Background technology
Laser boring is a very important laser processing application technology, and laser beam is focused by condenser lens
The hot spot of diameter very little can be obtained, temperature very high is formed in focal point.In the presence of pulse laser, material constantly melts
And evaporation.Finally, the plasma that gas and punching are formed can produce high pressure that magazine is blown out into hole, form micropore.Relative to
Traditional machine drilling mode, laser boring has unique advantage and irreplaceable effect, such as efficiency high, high precision, nothing
Mechanical stress and without tool loss etc., it has also become one of the key technology in modern micro hole machining field.
Research about laser boring at present uses control variate method and orthogonal experiment analysis process parameter to micro- mostly
The influence of hole quality, control variate method and orthogonal experiment in the case of influence of the pulse number to microvia quality is not studied, often
Pulse number is often set as a definite value, influence of the research other specification to drilling quality, after not accounting for being formed after through hole
Continuous influence of the pulse laser to drilling quality.
In laser boring research, material is got through required pulse number difference very by different laser parameter combinations
Greatly, thus can not simply using control variate method and orthogonal experiment carry out laser get through hole study.Studying different factors
When the influence of hole taper is got through to laser, it is necessary to assure through hole is in the complete lucky formation of pulsed laser action, otherwise through hole shape
Cheng Hou, the taper of succeeding impulse device to hole will be impacted, and the power for having about 90% is absorbed by hole wall, increase heat affecting, and punching
Efficiency can also be reduced.Therefore during hole is got through, the pulse number threshold values that acquisition just gets through material is extremely important, with arteries and veins
Number threshold values is rushed as laser boring pulse number in experiment, through hole can be excluded and formed shadow of the afterpulse laser to through hole taper
Ring, reduce heat affecting, improve the reliability of research, further improve the efficiency that laser gets through hole.
In a word, traditional control variate method and orthogonal experiment do not account for forming succeeding impulse laser air exercise after through hole
The influence of hole quality.There is through hole and form influence of the afterpulse laser to through hole taper, increase heat affected area.
The content of the invention
In order to overcome the shortcomings of above-mentioned existing laser micropore manufacture test method, it is based on penetrating inspection the invention provides one kind
The modified laser micropore manufacture experimental technique of survey technology.
The technical scheme is that：A kind of modified laser micropore manufacture experimental technique based on penetration-detection technology,
Comprise the following steps：
S1, required pulse number when through hole in laser micropore manufacture is formed, and pulse are obtained using penetration-detection technology
Number threshold value N；
S2, using pulse number threshold value N as the pulse number that uses under different parameters combination in experiment, so as to become to control
Amount method, orthogonal experiment are improved；
S3, study each influence factor and laser micropore is manufactured using modified control variate method, improved orthogonal experimental method
The influence of quality, optimizes laser micropore fabrication process parameters.
In such scheme, the penetration-detection technology in the step S1 is passed using the luminous intensity being built in optical system
Sensor measures the intensity of reflected light of sample material surface in drill process, and the change by intensity of reflected light is micro- come judgement material
Whether hole is got through.
In such scheme, the intensity of reflected light after through hole is formed is pre-set by computer system, it is anti-when what is detected
When penetrating luminous intensity less than preset value, acquiescence hole has been got through.
In such scheme, the pulse number threshold value N in the step S2 is the laser according to setting by computer system
Repetition rate and the laser that obtains of detection are got through the hole time and are calculated automatically, and the computing formula of specific pulse number threshold value N is such as
Under：
N=(t1-t0)·f
In formula, t0For the time point that punching starts；
t1For the time point that material is got through；
F is pulse recurrence frequency.
In such scheme, modified control variate method and improved orthogonal test method(s) in the step S3 are controlled in tradition
On the basis of quantity method processed and orthogonal experiment, the pulse number of original setting in every group of experiment parameter is changed to pulse number threshold
Value N.
In such scheme, the modified control variate method is that control variate method is changed using pulse number threshold value N
Enter, obtain being got through exclusively for laser the modified control variate method of hole experimental design.
In such scheme, described improved orthogonal test method(s) is that orthogonal experiment method is carried out using pulse number threshold value N
Improve, obtain being got through exclusively for laser the improved orthogonal experimental method of hole experimental design.
Compared with prior art, the beneficial effects of the invention are as follows：The present invention is obtained material just by penetration-detection technology
The pulse number threshold values that material is got through, using pulse number threshold values as laser boring pulse number in experiment, after exclusion through hole is formed
Influence of the pulse laser to through hole taper, reduces heat affecting, improves the reliability of research, further improves the effect that laser gets through hole
Rate, compensate for the deficiency of Traditional control quantity method and orthogonal experiment.
Brief description of the drawings
Fig. 1 is the penetration-detection that a kind of modified laser micropore based on penetration-detection technology of the present invention manufactures experimental technique
Schematic diagram；
Fig. 2 is punching time of the present invention and intensity of reflected light graph of a relation.
In figure, 1, sample；2nd, incident light；3rd, light intensity sensor；4th, reflected light；5th, micropore.
Specific embodiment
The present invention is described in further detail with reference to the accompanying drawings and detailed description, but protection scope of the present invention
It is not limited to this.
Penetration-detection technology of the present invention is as shown in figure 1, mainly use the luminous intensity being built in optical system
Sensor 3 measures the reflected light semi-finals degree of the material surface of sample 1 in drill process, is judged by the change of reflected light semi-finals degree
Whether material micropore 5 is got through.For workpiece material species thickness, through hole forms metapore exit and is likely to occur residue etc. to surveying
The influence of result is measured, the intensity of reflected light after causing different materials actual conditions lower through-hole to be formed is different, and the present invention can be according to tool
Body physical condition, the intensity of reflected light after through hole is formed is pre-set by computer system, when the intensity of reflected light for detecting
During less than preset value, acquiescence hole has been got through, and further improves the accuracy of measurement.
As shown in Fig. 2 the time point that punching starts is t0, before material is got through, substantial amounts of light reflects upwards, reflective light intensity
Degree is high；The time point that material is got through is t1, hereafter material got through, upwards reflection light drastically reduce and tend to be steady, instead
Penetrate luminous intensity low.By t1With t0Subtract each other and obtain t the time required to laser gets through hole, further combined with the pulse used in experiment
Repetition rate f and laser can be tried to achieve get through pulse number threshold values N needed for hole.The computing formula of pulse number threshold value N is as follows：
N=(t1-t0)·f (1)
The height of perforating efficiency is may determine that using pulse number threshold values N sizes.N is bigger for pulse number threshold value, represents material
Material is more difficult to be got through, and perforating efficiency is lower；N is smaller for pulse number threshold value, represents that material is easier and is got through, and perforating efficiency is got over
It is high.
Modified control variate method of the present invention is combined as different parameters in experiment by the use of pulse number threshold value N
The lower pulse number for using, so as to be improved control variate method, has obtained getting through changing for hole experimental design exclusively for laser
Enter type control variate method.As a example by studying the influence that defocusing amount gets through hole to laser, when other parameters are constant, defocus quantitative change is studied
The modified control variate method (being shown in Table 1) of hole influence is got through in change on laser.In table 1, N1~N7It is corresponding from different defocusing amounts
Pulse number threshold value (is obtained) by penetration-detection.The modified control variate method that research other parameters get through hole influence on laser is same
Table 1.
The modified control variate method of table 1
Improved orthogonal test method(s) of the present invention is combined as different parameters in experiment by the use of pulse number threshold value N
The lower pulse number for using, so as to be improved orthogonal experiment method, has obtained getting through changing for hole experimental design exclusively for laser
Enter type orthogonal experiment method.By taking an experiment of the factor of four level five as an example.In table 2, N1~N16Under being respectively 16 groups of experiment parameters
Pulse number threshold value (by penetration-detection obtain).Study the same table of improved orthogonal experimental method of other different factor varying levels
2.This kind of method, it is adaptable to which pulse number eliminates conventional orthogonal test method(s) through hole not as the situation of factor in orthogonal experiment
Influence of the succeeding impulse to thru-hole quality after formation, further increases the accuracy and reliability of orthogonal experiment.
The improved orthogonal test method(s) of table 2
A kind of modified laser micropore manufacture experimental technique implementation steps based on penetration-detection technology of the present invention：
S1, required pulse number when through hole in laser micropore manufacture is formed, and pulse are obtained using penetration-detection technology
Number threshold value；
S2, using pulse number threshold value as the pulse number that uses under different parameters combination in experiment, so as to become to control
Amount method, orthogonal experiment are improved；
S3, study each influence factor and laser micropore is manufactured using modified control variate method, improved orthogonal experimental method
The influence of quality, optimizes laser micropore fabrication process parameters.
Above-mentioned technical proposal embodies the preferred scheme of patent of the present invention, and those skilled in the art are to partial function
Modify and embody this patent principle, belong within this patent protection domain.
Claims (7)
1. a kind of modified laser micropore based on penetration-detection technology manufactures experimental technique, it is characterised in that including following step
Suddenly：
S1, required pulse number when through hole in laser micropore manufacture is formed, and pulse number are obtained using penetration-detection technology
Threshold value N；
S2, using pulse number threshold value N as the pulse number that uses under different parameters combination in experiment, so as to control variables
Method, orthogonal experiment are improved；
S3, each influence factor is studied to laser micropore workmanship using modified control variate method, improved orthogonal experimental method
Influence, optimize laser micropore fabrication process parameters.
2. the modified laser micropore based on penetration-detection technology according to claim 1 manufactures experimental technique, its feature
It is that the penetration-detection technology in the step S1 is the light intensity sensor (3) using being built in optical system to measure
Reflected light (4) intensity of sample (1) material surface in drill process, the change by reflected light (4) intensity is micro- come judgement material
Whether hole (5) is got through.
3. the modified laser micropore based on penetration-detection technology according to claim 2 manufactures experimental technique, its feature
It is that the intensity of the reflected light after through hole is formed (4) is pre-set by computer system, when the reflected light (4) for detecting is strong
When degree is less than preset value, acquiescence hole has been got through.
4. the modified laser micropore based on penetration-detection technology according to claim 1 manufactures experimental technique, its feature
It is that the pulse number threshold value N in the step S2 is the laser repetition rate and detection by computer system according to setting
The laser for obtaining is got through the hole time and is calculated automatically, and the computing formula of specific pulse number threshold value N is as follows：
N=(t1-t0)·f
In formula, t0For the time point that punching starts；t1For the time point that material is got through；F is pulse recurrence frequency.
5. the modified laser micropore based on penetration-detection technology according to claim 1 manufactures experimental technique, its feature
It is that the modified control variate method and improved orthogonal test method(s) in the step S3 are in Traditional control quantity method and orthogonal
On the basis of test method(s), the pulse number of original setting in every group of experiment parameter is changed to pulse number threshold value N.
6. the modified laser micropore based on penetration-detection technology according to claim 5 manufactures experimental technique, its feature
It is that the modified control variate method is the arteries and veins used under being combined as different parameters in experiment by the use of pulse number threshold value N
Number is rushed, so as to be improved to control variate method, obtains being got through exclusively for laser the modified control variables of hole experimental design
Method.
7. the modified laser micropore based on penetration-detection technology according to claim 5 manufactures experimental technique, its feature
It is that described improved orthogonal test method(s) is used as in experiment by the use of pulse number threshold value N under different parameters combination
Pulse number, so as to be improved to control orthogonal experiment method, is obtaining the modified for getting through hole experimental design exclusively for laser just
Hand over experimental method.
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Cited By (8)
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| CN108393599A (en) * | 2018-05-14 | 2018-08-14 | 华南师范大学 | A kind of device and method of laser segmented scanning micropore |
| CN109693033A (en) * | 2019-02-28 | 2019-04-30 | 大族激光科技产业集团股份有限公司 | A kind of method of the laser welding system and automatic focusing of automatic focusing |
| CN109993034A (en) * | 2017-12-29 | 2019-07-09 | 大族激光科技产业集团股份有限公司 | A kind of laser beam perforation detection judgment method |
| CN110340552A (en) * | 2019-08-06 | 2019-10-18 | 上海维宏智能技术有限公司 | For realizing the laser head of penetration-detection function |
| CN112730341A (en) * | 2020-11-30 | 2021-04-30 | 南京理工大学北方研究院 | Laser penetration detection method based on different media |
| CN113414507A (en) * | 2021-07-12 | 2021-09-21 | 深圳来福士雾化医学有限公司 | Micropore processing method for polyimide film atomization sheet |
| CN113953663A (en) * | 2021-10-21 | 2022-01-21 | 武汉锐科光纤激光技术股份有限公司 | Laser welding monitoring devices and laser welding system |
| TWI821580B (en) * | 2019-07-08 | 2023-11-11 | 日商維亞機械股份有限公司 | Laser processing method and laser processing device |
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Cited By (9)
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| CN109993034A (en) * | 2017-12-29 | 2019-07-09 | 大族激光科技产业集团股份有限公司 | A kind of laser beam perforation detection judgment method |
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| CN108393599A (en) * | 2018-05-14 | 2018-08-14 | 华南师范大学 | A kind of device and method of laser segmented scanning micropore |
| CN109693033A (en) * | 2019-02-28 | 2019-04-30 | 大族激光科技产业集团股份有限公司 | A kind of method of the laser welding system and automatic focusing of automatic focusing |
| TWI821580B (en) * | 2019-07-08 | 2023-11-11 | 日商維亞機械股份有限公司 | Laser processing method and laser processing device |
| CN110340552A (en) * | 2019-08-06 | 2019-10-18 | 上海维宏智能技术有限公司 | For realizing the laser head of penetration-detection function |
| CN112730341A (en) * | 2020-11-30 | 2021-04-30 | 南京理工大学北方研究院 | Laser penetration detection method based on different media |
| CN113414507A (en) * | 2021-07-12 | 2021-09-21 | 深圳来福士雾化医学有限公司 | Micropore processing method for polyimide film atomization sheet |
| CN113953663A (en) * | 2021-10-21 | 2022-01-21 | 武汉锐科光纤激光技术股份有限公司 | Laser welding monitoring devices and laser welding system |
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Application publication date: 20170531 |