CN106733764A - Active optical equipment decontamination apparatus - Google Patents
Active optical equipment decontamination apparatus Download PDFInfo
- Publication number
- CN106733764A CN106733764A CN201611006113.8A CN201611006113A CN106733764A CN 106733764 A CN106733764 A CN 106733764A CN 201611006113 A CN201611006113 A CN 201611006113A CN 106733764 A CN106733764 A CN 106733764A
- Authority
- CN
- China
- Prior art keywords
- decontamination
- optical
- active
- optical material
- decontamination apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 91
- 238000005202 decontamination Methods 0.000 title claims abstract description 74
- 230000003588 decontaminative effect Effects 0.000 title claims abstract description 74
- 239000000463 material Substances 0.000 claims abstract description 44
- 239000012780 transparent material Substances 0.000 claims description 4
- 238000012545 processing Methods 0.000 claims description 2
- 230000002000 scavenging effect Effects 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 26
- 230000000694 effects Effects 0.000 description 9
- 238000004140 cleaning Methods 0.000 description 6
- 239000003344 environmental pollutant Substances 0.000 description 5
- 231100000719 pollutant Toxicity 0.000 description 5
- 239000000428 dust Substances 0.000 description 4
- 230000006872 improvement Effects 0.000 description 4
- BYACHAOCSIPLCM-UHFFFAOYSA-N 2-[2-[bis(2-hydroxyethyl)amino]ethyl-(2-hydroxyethyl)amino]ethanol Chemical compound OCCN(CCO)CCN(CCO)CCO BYACHAOCSIPLCM-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 229920000742 Cotton Polymers 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/20—Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
- B08B15/04—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area from a small area, e.g. a tool
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/041—Cleaning travelling work
Landscapes
- Apparatus For Disinfection Or Sterilisation (AREA)
Abstract
The present invention relates to optics decontamination apparatus field, a kind of active optical decontamination apparatus, including driver part are disclosed（1）, optical material part（2）With decontamination part（3）, the driver part（1）For driving the optical material part（2）Rotation, and at least optical material part when rotated（2）Surface to be decontaminated and the decontamination part（3）Effectively contact.Present invention decontamination efficiency high, equipment dependability is high, and decontamination scope is larger, uses it for not influenceing optical device normal work when work is decontaminated in optical device；Can be used in combination with various decontamination means, and can easily realize the two-sided decontamination to optical material part, scavenging effect is good；Simple structure, long service life；Have wide range of applications.
Description
Technical field
The present invention relates to optics decontamination field, more particularly to a kind of active optical equipment decontamination apparatus.
Background technology
Optical device has been come into mankind's daily life, industrial various applications, as human lives and work
Industry produces indispensable utensil.Optical device is sightless infrared, ultraviolet by receiving or launching visible ray or naked eyes
Light is acquired, its function is realized in computing, analysis etc..
But, optical device weakness maximum in use is interference and the shadow for being easily subject to pollutant in environment
Ring, the field very high for many required precisions, the interference of pollutant directly affects its measurement effect, or even allows many optics to set
For in actual industrial production with life, it is impossible to which real long-term, reliability is used.Optical device is decontaminated, it is dust-proof be a lot
The essential work of optical device, decontamination, the quality of dust-proof effect directly influence the using effect of optical device.
At present, the main method for separating polluted particles of optical device mainly has with device：
1st, manually cleaning method is actively wiped.The method effect of artificial actively cleaning is best, but the amount of labour is big, especially
It is that the optical device installation site that has or structure closure are strong, carries out the difficulty of clean operation than larger, efficiency is low.
2nd, windshield wiper type wiping tool wiping method.Windshield wiper type optical component passively wipes mode, and by windshield wiper type, mechanism exists
Under motor drives, optical component surfaces are wiped, optical component is passive wiping.This wiping mode structure is more complicated, wipes effect
It is really poor, it is impossible to apply to the decontamination work compared with the optical device under high pollution environment.There is wiped area simultaneously small；Wiping process
In, the interference optical device work of rain brush part；Pollutant reclaims difficult after wiping；And short life；Wipe content simple, wipe
The characteristics of effect difference.
3rd, gas purging method.In the mode that optical component gas barrier used above or gas are purged, general utilization
Under compared with low stain environment.Dust-proof scavenging effect is common, but cost is very high.
4th, ultrasonic wave blowing method.Decontamination dust-proof effect is poor, it is impossible to apply under larger pollution environment.
5th, optical material active replacing options.Laser measurement such as the patent No. 201120449961.2 of the present inventor sets
The method and apparatus of standby dust guard institute publicity.The method, dust-proof scavenging effect is good, but effect is difficult under compared with high pollution environment
With permanent.Structure is relative complex；Optical material especially as isolated part is high in larger pollution environment frequency of use；Cost
It is high；Maintenance is big；High cost.Meanwhile, overall dust proof member is due to the use of scrolling optical material, it is difficult to make in high temperature environments
With.
6th, surface dust-proof material smearing method.In the optical surface spraying hydrophobic material such as nanometer, dust-proof poor in timeliness, very
It is difficult to use for a long time, in cannot more applying to more severe pollution environment.
The content of the invention
Goal of the invention：For problems of the prior art, the present invention provides a kind of active optical equipment decontamination dress
Put, decontamination efficiency high, effect are good, can be applied in combination with various optical devices and not influence optical device normal work, structure
Simply, reliability is high.
Technical scheme：The invention provides a kind of active optical equipment decontamination apparatus, including driver part, optical material
Part and decontamination part, the driver part are used to drive the optical material part to rotate, the optical material part motion
When, and at least the surface to be decontaminated of the optical material part effectively contacts with the decontamination part when rotated.
Preferably, described active optical equipment decontamination apparatus are also comprising the dirt used cooperatively with the decontamination part
Collection device；The contaminants-collecting apparatus are pocket type contaminants-collecting apparatus or suction type contaminants-collecting apparatus.Contaminants-collecting apparatus
For the dirt-collecting that will be produced after decontamination, the centralized recovery of pollutant and treatment after simply realizing decontaminating.
Preferably, described active optical equipment decontamination apparatus also include APU, the arithmetic processing section
Part is connected with the driver part and/or the decontamination part respectively, for by pre-set programs control the driver part and/
Or the operation of the decontamination part.
Preferably, the driver part directly drives the optical material part motion；Or, the driver part passes through
Connection member drives the optical material part to move indirectly.
Preferably, the optical material part is planar structure, cylindrical structure, dome structure or endless belt structure.
Preferably, the optical material part is transparent material or reflecting material.
Present invention also offers a kind of optical device, comprising above-mentioned active optical equipment decontamination apparatus.
Present invention also offers a kind of electromagnetic wave device, comprising above-mentioned active optical equipment decontamination apparatus.
Beneficial effect：With the effective contact between decontamination part and relative rotation when the present invention is moved by optical material part
The active decontamination realized to optical material part is transferred, being moved reciprocatingly with decontamination part in the prior art carries out actively decontaminating phase
Than present invention decontamination scope is larger, efficiency high, uses it for not influenceing optical device normal when work is decontaminated in optical device
Work；Due to decontamination part can be designed to it is fixed, so decontamination part can be arranged to it is various decontamination components groups
Conjunction is used, so that the present invention can be used in combination with various decontamination means, and can easily realize removing the two-sided of optical material part
Dirt, scavenging effect is good；Present apparatus overall structure is simple, and reliability is high, long service life；Have wide range of applications.
Brief description of the drawings
Fig. 1 is active optical equipment decontamination apparatus structural representation in implementation method 1；
Fig. 2 is active optical equipment decontamination apparatus structural representation in implementation method 2；
Fig. 3 is active optical equipment decontamination apparatus structural representation in implementation method 3.
Specific embodiment
The present invention is described in detail below in conjunction with the accompanying drawings.
Implementation method 1：
Present embodiments provide for a kind of active optical equipment decontamination apparatus, as shown in figure 1, the decontamination apparatus are main by driving
Part 1, optical material part 2, decontamination part 3 and APU composition, wherein, driver part 1 and optical material portion
Part 2 directly drives connection by rotary shaft 5, optical material part 2 can be driven to rotate in one direction, along positive and negative both direction
Rotation or the reciprocating rotary in default angular range, when optical material part 2 rotates, the waiting of optical material part 2 is removed
Dirty surface effectively contacts with the decontamination part 3 being fixedly installed, and is achieved in when optical material part 2 rotates, and decontamination part 3 will
The greasiness removal on surface to be decontaminated；APU is connected with driver part 1, by default programme-control driver part 1
Optical material part 2 is driven to rotate.
In the present embodiment, above-mentioned optical material part 2 is the cylindrical structural of hard transparent material, in practical application
In, or hard transparent material planar structure, or hard reflecting material cylindrical structural or planar structure.
Certainly, above-mentioned decontamination part 3 can also be designed to what can be moved, and it is connected with APU, and by
APU controls its operation.
In the present embodiment, decontamination part 3 is made up of four parts, and the respectively first decontamination component 31, second is decontaminated
Component 32, cleaning assembly 33 and Wipe assembly 34, wherein, the first decontamination component 31 can be steel disc, for removing optical material
The bulky grain dust on the surface to be decontaminated of part 2, the second decontamination component 32 can be sheet rubber, for removing surface to be decontaminated
Little particle dust, the cleaning fluid in cleaning assembly 33 can be water or cleaning agent etc., for further removing surface to be decontaminated
On be difficult removal spot, Wipe assembly 34 can be cotton etc., for cleaning assembly 33 clean after surface to be decontaminated enter
Row is wiped.Four parts of above-mentioned decontamination part 3 may be used alone, can also be used in combination, and be applied in combination better, figure
1 is the schematic diagram that four parts are applied in combination.
Operationally, APU control driver part 1 drives optical material part 2 to rotate to present embodiment,
While rotation, the surface to be decontaminated of optical material part 2 effectively contacts with decontamination part 3, and four parts for decontaminating part 3 are same
When or be operated in succession, with realize treat decontamination surface decontamination work.
Implementation method 2：
Present embodiment is the further improvement of implementation method 1, is mainly theed improvement is that, in the present embodiment, drive division
Part 1 drives optical material part 2 to rotate indirectly by connection member 6, as shown in Fig. 2 because in actual applications, driver part
1 is placed in the centre of optical material part 2 may hinder whole equipment normal work, so in the present embodiment, preferably
Driver part 1 is driven the rotation of optical material part 2 indirectly by connection member 6, to increase the practicality of this equipment.
In addition, present embodiment is identical with implementation method 1, does not repeat herein.
Implementation method 3：
Present embodiment is the further improvement of implementation method 1 or 2, is mainly theed improvement is that, in the present embodiment, is being removed
The lower section of dirty part 3 is additionally provided with the contaminants-collecting apparatus 4 used cooperatively with it, as shown in figure 3, the contaminants-collecting apparatus 4 can be with
It is pocket type, or suction type, for the dirt-collecting that will be produced after decontamination, pollutant after simply realizing decontaminating
Centralized recovery and treatment.
In addition, present embodiment is identical with implementation method 1 or 2, does not repeat herein.
Implementation method 4：
Present embodiments provide for a kind of optical device, it is provided with the optical device active in any of the above-described implementation method
Optical device decontamination apparatus, active optical equipment decontamination apparatus set the front end with optical device, in order in optical device
Decontamination work is carried out during work, and does not influence the normal work of optical device.
Implementation method 5：
During any of the above-described implementation method can also be set present embodiments provide for a kind of electromagnetic wave device, in the electromagnetic wave device
Active optical equipment decontamination apparatus, active optical equipment decontamination apparatus set with the front end of electromagnetic wave device, in order to
Decontamination work is carried out when electromagnetic wave device works, and does not influence the normal work of electromagnetic wave device.
Above-mentioned implementation method technology design and feature only to illustrate the invention, technique is familiar with its object is to allow
People will appreciate that present disclosure and implement according to this that it is not intended to limit the scope of the present invention.It is all according to the present invention
Equivalent transformation or modification that Spirit Essence is done, should all be included within the scope of the present invention.
Claims (9)
1. a kind of active optical equipment decontamination apparatus, it is characterised in that including driver part（1）, optical material part（2）With
Decontamination part（3）, the driver part（1）For driving the optical material part（2）Rotation, and it is at least described when rotated
Optical material part（2）Surface to be decontaminated and the decontamination part（3）Effectively contact.
2. active optical equipment decontamination apparatus according to claim 1, it is characterised in that also comprising with the decontamination portion
Part（3）The contaminants-collecting apparatus for using cooperatively（4）.
3. active optical equipment decontamination apparatus according to claim 2, it is characterised in that the contaminants-collecting apparatus
（4）It is pocket type contaminants-collecting apparatus or suction type contaminants-collecting apparatus.
4. active optical equipment decontamination apparatus according to claim 1, it is characterised in that also including arithmetic processing section
Part, the APU respectively with the driver part（1）And/or the decontamination part（3）Connection, for by default
Driver part described in programme-control（1）And/or the decontamination part（3）Operation.
5. active optical equipment decontamination apparatus according to any one of claim 1 ~ 4, it is characterised in that the driving
Part（1）By rotary shaft（5）Directly drive the optical material part（2）Motion；
Or, the driver part（1）By connection member（6）The optical material part is driven indirectly（2）Motion.
6. active optical equipment decontamination apparatus according to any one of claim 1 ~ 4, it is characterised in that the optics
Material components（2）It is planar structure, cylindrical structure, dome structure or endless belt structure.
7. active optical equipment decontamination apparatus according to any one of claim 1 ~ 4, it is characterised in that the optics
Material components（2）It is transparent material or reflecting material.
8. a kind of optical device, it is characterised in that comprising the active light according to any one of claim 1 ~ 4 or 5 ~ 7
Equipment decontamination apparatus.
9. a kind of electromagnetic wave device, it is characterised in that comprising active according to any one of claim 1 ~ 4 or 5 ~ 7
Optical device decontamination apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611006113.8A CN106733764A (en) | 2016-11-16 | 2016-11-16 | Active optical equipment decontamination apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611006113.8A CN106733764A (en) | 2016-11-16 | 2016-11-16 | Active optical equipment decontamination apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106733764A true CN106733764A (en) | 2017-05-31 |
Family
ID=58968425
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611006113.8A Pending CN106733764A (en) | 2016-11-16 | 2016-11-16 | Active optical equipment decontamination apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106733764A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20060055800A (en) * | 2004-11-19 | 2006-05-24 | 삼성전자주식회사 | Device for cleaning wafer stage of semiconductor stepper |
| CN101437628A (en) * | 2004-12-13 | 2009-05-20 | 瓦利安半导体设备公司 | Technique for reducing backside particles |
| CN102522357A (en) * | 2011-12-28 | 2012-06-27 | 清华大学 | Brushing device for wafer |
| CN102773786A (en) * | 2011-05-11 | 2012-11-14 | 南亚科技股份有限公司 | Chemical mechanical polishing system |
| CN104438187A (en) * | 2014-11-28 | 2015-03-25 | 上海华力微电子有限公司 | Crystal edge cleaning device |
| CN206215574U (en) * | 2016-11-16 | 2017-06-06 | 上海云鱼智能科技有限公司 | Active optical equipment decontamination apparatus |
-
2016
- 2016-11-16 CN CN201611006113.8A patent/CN106733764A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20060055800A (en) * | 2004-11-19 | 2006-05-24 | 삼성전자주식회사 | Device for cleaning wafer stage of semiconductor stepper |
| CN101437628A (en) * | 2004-12-13 | 2009-05-20 | 瓦利安半导体设备公司 | Technique for reducing backside particles |
| CN102773786A (en) * | 2011-05-11 | 2012-11-14 | 南亚科技股份有限公司 | Chemical mechanical polishing system |
| CN102522357A (en) * | 2011-12-28 | 2012-06-27 | 清华大学 | Brushing device for wafer |
| CN104438187A (en) * | 2014-11-28 | 2015-03-25 | 上海华力微电子有限公司 | Crystal edge cleaning device |
| CN206215574U (en) * | 2016-11-16 | 2017-06-06 | 上海云鱼智能科技有限公司 | Active optical equipment decontamination apparatus |
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| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
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| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170531 |