CN106733440A - A kind of gluing head cleaning device - Google Patents
A kind of gluing head cleaning device Download PDFInfo
- Publication number
- CN106733440A CN106733440A CN201611096908.2A CN201611096908A CN106733440A CN 106733440 A CN106733440 A CN 106733440A CN 201611096908 A CN201611096908 A CN 201611096908A CN 106733440 A CN106733440 A CN 106733440A
- Authority
- CN
- China
- Prior art keywords
- cylinder
- cleaning
- link
- gluing head
- gluing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 56
- 238000004026 adhesive bonding Methods 0.000 title claims abstract description 36
- 238000010790 dilution Methods 0.000 claims abstract description 13
- 239000012895 dilution Substances 0.000 claims abstract description 13
- 238000007599 discharging Methods 0.000 claims abstract description 8
- 238000003892 spreading Methods 0.000 claims abstract description 3
- 238000003860 storage Methods 0.000 claims description 7
- 238000012423 maintenance Methods 0.000 abstract description 4
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Abstract
The present invention provides a kind of gluing head cleaning device; including positioned at gluing head lower section and being used for the cleaning head device for cleaning the gluing head, the cylinder, the containment vessel for isolating the cleaning head device and spreading roller that are arranged on cylinder track; the cleaning head device is fixedly connected by link with the side of the cylinder; the inclination lower baffle plate being connected with discharging tube is provided with below the link; the inclination overhead gage being connected with the containment vessel is provided with above the link, the overhead gage is fixed by the support frame being connected with the containment vessel.The present invention obtain beneficial effect be：Link is arranged at the side of cylinder, and sputtered at completely on inclined overhead gage and lower baffle plate from the dilution of cleaning head device spluttering, and flow to discharging tube along baffle plate, cylinder guide rail and circuit are caused to corrode or polluted so as to be prevented effectively from, the service life and maintenance period of equipment is extended.
Description
Technical field
The present invention relates to gluing cleaning device technical field, and in particular to a kind of gluing head cleaning device.
Background technology
Gold-tinted processing procedure is widely used in semiconductor lithography and display pannel photoetching process, the main process of gold-tinted processing procedure
Including gluing, exposure, development three parts, wherein gluing is a particularly important link, and the state of glue spreader is to product quality
There is large effect.
At present, it is also easy to produce dilution in the cleaning process in cleaning head device (Wash Head) to gluing head (Nozzle)
(Thinner) situation of spluttering, causes the dirty of cylinder track, influences the normal operation of cleaning head device.
As shown in figure 1, the structure of existing gluing head cleaning device is：Including positioned at the lower section of the gluing head 10 and being used for
The cleaning head device 1 that cleans the gluing head 10, the cylinder 3 being arranged on cylinder track 2, for isolating the cleaning head device
1 and the containment vessel 4 of spreading roller 11 (Uniformer), the cleaning head device 1 is connected with dilution service, the guarantor
Space between protective case 4 and cylinder 3 is circuit storage area Zl；The cleaning head device 1 passes through level connection joint frame 5 and the gas
The top of cylinder 3 is fixedly connected, and the cylinder 3 drives the cleaning head device 1 to move back and forth, to clean the gluing head
10；Baffle plate 7 is provided with the lower section of the level connection joint frame 5, the baffle plate 7 includes segmental arc baffle plate and tilting section baffle plate, described
Tilting section baffle plate connected drainage pipe 6.
The level connection joint that can be seen that connection cleaning head device and cylinder from the structure of above-mentioned gluing head cleaning device sets up
In cylinder head, during cylinder drives the cleaning head device to move back and forth, from cleaning head device spill it is dilute
Release liquid easily to flow on the circuit of cylinder track and the storage of circuit storage area, cause to corrode or pollute, baffle plate can not be to cylinder rail
Road and circuit are formed and are effectively protected, and reduce the service life of gluing head cleaning device, shorten the maintenance period of equipment.
The content of the invention
For above-mentioned the deficiencies in the prior art, the present invention provides a kind of gluing head cleaning device so that from cleaning head device
The dilution of spluttering is sputtered on baffle plate completely, and flows to discharging tube along baffle plate, so as to be prevented effectively to cylinder guide rail and line
Road is caused to corrode or is polluted, and extends the service life and maintenance period of equipment.
To solve the above problems, the present invention provides a kind of gluing head cleaning device, including positioned at gluing head lower section simultaneously
For clean the gluing head cleaning head device, be arranged on cylinder track cylinder, for protecting the cleaning head device
With the containment vessel of cylinder, the cleaning head device is fixedly connected by link with the side of the cylinder, in the link
Lower section be provided with the inclination lower baffle plate being connected with discharging tube, be provided with above the link and inclining that the containment vessel is connected
Oblique overhead gage, the overhead gage is fixed by the support frame being connected with the containment vessel.
Further, the cylinder drives the cleaning head device to move back and forth, to clean the gluing head.
Further, the link includes level connection joint frame and the inclination connection being arranged on the level connection joint frame
Frame.
Further, width of the width for inclining link more than the level connection joint frame.
Further, the cleaning head device is connected with dilution service.
Further, the space between the containment vessel and cylinder is circuit storage area.
The present invention obtain beneficial effect be：Link is arranged at the side of cylinder, and from cleaning head device spluttering
Dilution sputter at completely on inclined overhead gage and lower baffle plate, and flow to discharging tube along baffle plate, it is right so as to be prevented effectively from
Cylinder guide rail and circuit are caused to corrode or polluted, and extend the service life and maintenance period of equipment.
Brief description of the drawings
Fig. 1 is the structural representation of existing gluing head cleaning device；
Fig. 2 is the structural representation of gluing head cleaning device of the present invention.
Specific embodiment
Below in conjunction with accompanying drawing, technical scheme is clearly described, accompanying drawing is only for reference and explanation makes
With not constituting the limitation to scope of patent protection of the present invention.
The present embodiments relate to a kind of gluing head cleaning device, including positioned at the lower section of the gluing head 10 and for cleaning
The cleaning head device 1 of the gluing head, the cylinder 3 being arranged on cylinder track 2, for isolate the cleaning head device 1 and apply
The containment vessel 4 of glue cylinder 11, the containment vessel is metal-back or other housings, and the cylinder 3 drives the cleaning head device 1 to enter
Row is moved back and forth, to clean the gluing head 10；Space between the metal-back 4 and cylinder 3 is circuit storage area Zl；Institute
Cleaning head device 1 is stated to be connected with dilution service；
The cleaning head device 1 is fixedly connected by link 5 with the side of the cylinder 3, under the link 5
Side is provided with the inclination lower baffle plate 71 being connected with discharging tube 6, is provided with what is be connected with the metal-back 4 in the top of the link 5
Overhead gage 72 is inclined, the overhead gage 72 is fixed by the support frame 8 being connected with the metal-back 4, and support frame 8 is to overhead gage 72
Form effective twelve Earthly Branches support.
The link 5 is arranged at the side of cylinder 3, compared with cylinder top surface is arranged in the prior art, reduce from
The dilution of cleaning head device spluttering is splashed to the probability of cylinder track 2 and circuit storage area Zl, and the effect of link 5 is anti-
Only diluent stream is to cylinder 3, also, inclined overhead gage has blocked the dilution from the spluttering of cleaning head device 1, dilution along
Lower baffle plate flows to discharging tube, is effectively protected so as to be formed to cylinder guide rail and circuit.
In the present embodiment, the link 5 includes level connection joint frame 51 and is arranged on the level connection joint frame 51
Incline link 52.Width of the width for inclining link 52 more than the level connection joint frame 51, it is to avoid dilution edge
Level connection joint frame 51 and flow to cylinder 3, installing the bigger inclination link 52 of width additional prevents dilution from polluting cylinder and circuit.
If above-mentioned embodiment is the present invention preferably implementation method, but embodiments of the present invention do not receive above-described embodiment
Limitation, it is other it is any without departing from Spirit Essence of the invention and the change, modification, replacement made under principle, combine, it is simple
Change, should be equivalent substitute mode, be included within protection scope of the present invention.
Claims (6)
1. a kind of gluing head cleaning device, including the cleaning head dress positioned at gluing head lower section and for cleaning the gluing head
The cylinder put, being arranged on cylinder track, the containment vessel for isolating the cleaning head device and spreading roller, its feature exist
In：The cleaning head device is fixedly connected by link with the side of the cylinder, be provided with below the link with
The inclination lower baffle plate of discharging tube connection, is provided with the inclination overhead gage being connected with the containment vessel, institute above the link
Overhead gage is stated to be fixed by the support frame being connected with the containment vessel.
2. gluing head cleaning device as claimed in claim 1, it is characterised in that：
The cylinder drives the cleaning head device to move back and forth, to clean the gluing head.
3. gluing head cleaning device as claimed in claim 1, it is characterised in that：
The link includes level connection joint frame and the inclination link being arranged on the level connection joint frame.
4. gluing head cleaning device as claimed in claim 3, it is characterised in that：
Width of the width for inclining link more than the level connection joint frame.
5. gluing head cleaning device as claimed in claim 1 or 2, it is characterised in that：
The cleaning head device is connected with dilution service.
6. gluing head cleaning device as claimed in claim 1, it is characterised in that：
Space between the containment vessel and cylinder is circuit storage area.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611096908.2A CN106733440B (en) | 2016-12-02 | 2016-12-02 | A kind of gluing head cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611096908.2A CN106733440B (en) | 2016-12-02 | 2016-12-02 | A kind of gluing head cleaning device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106733440A true CN106733440A (en) | 2017-05-31 |
| CN106733440B CN106733440B (en) | 2019-06-07 |
Family
ID=58883284
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611096908.2A Active CN106733440B (en) | 2016-12-02 | 2016-12-02 | A kind of gluing head cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106733440B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06252541A (en) * | 1993-02-24 | 1994-09-09 | Matsushita Electric Ind Co Ltd | Viscous fluid applicator with nozzle cleaning |
| JP3667233B2 (en) * | 2001-01-05 | 2005-07-06 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
| CN101362123A (en) * | 2007-08-10 | 2009-02-11 | K.C.科技股份有限公司 | Nozzle cleaning device and cleaning method |
| CN104056748A (en) * | 2013-03-21 | 2014-09-24 | 株式会社东芝 | Nozzle Cleaning Unit And Nozzle Cleaning Method |
| CN205341179U (en) * | 2015-12-29 | 2016-06-29 | 无锡宏纳科技有限公司 | Self - cleaning device of photosensitive resist shower nozzle |
| CN105842991A (en) * | 2016-03-22 | 2016-08-10 | 信利（惠州）智能显示有限公司 | Photoresist spray device |
-
2016
- 2016-12-02 CN CN201611096908.2A patent/CN106733440B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06252541A (en) * | 1993-02-24 | 1994-09-09 | Matsushita Electric Ind Co Ltd | Viscous fluid applicator with nozzle cleaning |
| JP3667233B2 (en) * | 2001-01-05 | 2005-07-06 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
| CN101362123A (en) * | 2007-08-10 | 2009-02-11 | K.C.科技股份有限公司 | Nozzle cleaning device and cleaning method |
| CN104056748A (en) * | 2013-03-21 | 2014-09-24 | 株式会社东芝 | Nozzle Cleaning Unit And Nozzle Cleaning Method |
| CN205341179U (en) * | 2015-12-29 | 2016-06-29 | 无锡宏纳科技有限公司 | Self - cleaning device of photosensitive resist shower nozzle |
| CN105842991A (en) * | 2016-03-22 | 2016-08-10 | 信利（惠州）智能显示有限公司 | Photoresist spray device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106733440B (en) | 2019-06-07 |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |