CN106725554B - X-ray flat panel detector capable of automatically exposing and detecting and sensor panel structure thereof - Google Patents
X-ray flat panel detector capable of automatically exposing and detecting and sensor panel structure thereof Download PDFInfo
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- 238000001514 detection method Methods 0.000 claims abstract description 27
- 238000003384 imaging method Methods 0.000 claims abstract description 17
- 238000004891 communication Methods 0.000 claims description 11
- 238000012545 processing Methods 0.000 claims description 11
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- 239000000758 substrate Substances 0.000 claims description 9
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- 230000005540 biological transmission Effects 0.000 claims 1
- 238000013461 design Methods 0.000 abstract description 6
- 238000010586 diagram Methods 0.000 description 5
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- MCVAAHQLXUXWLC-UHFFFAOYSA-N [O-2].[O-2].[S-2].[Gd+3].[Gd+3] Chemical compound [O-2].[O-2].[S-2].[Gd+3].[Gd+3] MCVAAHQLXUXWLC-UHFFFAOYSA-N 0.000 description 2
- XQPRBTXUXXVTKB-UHFFFAOYSA-M caesium iodide Chemical compound [I-].[Cs+] XQPRBTXUXXVTKB-UHFFFAOYSA-M 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
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- 230000008859 change Effects 0.000 description 1
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- 239000011521 glass Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
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- 238000002601 radiography Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
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- A61B6/4208—Arrangements for detecting radiation specially adapted for radiation diagnosis characterised by using a particular type of detector
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- A—HUMAN NECESSITIES
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Abstract
The invention provides an X-ray flat panel detector for automatic exposure detection and a sensor panel structure thereof, wherein the sensor panel structure comprises a first image sensor array layer for sensing incident light to realize X-ray imaging; and a second image sensor array layer located below the first image sensor array layer and sensing incident light passing through the first image sensor array layer to realize automatic exposure detection. The invention optimizes the design of the sensor panel in the flat panel detector, and adds the full-view AED sensor array positioned below the imaging sensor array in the sensor panel, thereby realizing the full-view AED function.
Description
Technical Field
The invention relates to the field of medical image diagnosis, in particular to an X-ray flat panel detector for automatic exposure detection and a sensor panel structure thereof.
Background
Radiography images by detecting the intensity of X-rays transmitted through an object, using the short wavelength, easily penetrable nature of X-rays, and the different characteristics of different tissues to absorb X-rays.
The X-ray imaging system has two important components, namely an X-ray flat panel detector and a device which can detect X-rays, convert the X-rays into electric signals and output the electric signals in an image form; the second is X-ray high voltage generator and X-ray bulb tube. At present, the industry still lacks the unified standard of software and hardware communication modes between the X-ray flat panel detector and the X-ray high-voltage generator, and the systematic integration of the X-ray flat panel detector and the X-ray high-voltage generator brings difficulty to system design.
There are several implementations of the exposure control function of an X-ray imaging system:
1. and (4) external synchronization. The X-ray high-voltage generator and the X-ray flat panel detector realize the exposure control function through wired or wireless communication signals. The problem of this method is that the interface compatibility of the X-ray flat panel detector and the X-ray high voltage generator cannot be guaranteed, and in some use environments, the X-ray flat panel detector and the imaging system may not be able to implement the exposure control function in an external synchronization manner.
AED (automatic exposure detection): the X-ray high-voltage generator and the X-ray flat panel detector do not need to be communicated through wired or wireless signals, and therefore the X-ray flat panel detector is required to sense exposure and start to collect signals. At present, there are two ways to realize automatic synchronization, one is to add an additional sensor behind the flat panel, and to sense the X-ray or visible light penetrating through the flat panel sensor of the detector itself through the sensor to sense the exposure, which is a problem of this implementation is that the additional sensor will increase the cost and the difficulty of the detector structure design, and this additional sensor will not generally cover the whole detection range of the detector, and it is possible that the exposure sensing fails because the additional sensor is located without dose or dose is too low, and the back scattering of the optical signal will be caused by the existence of the back sensor, resulting in the image quality reduction. The other implementation of automatic synchronization is to determine the exposure time point by calculating the gray value difference of the images before and after exposure through designing the working time sequence of the flat panel detector by an algorithm, but because the sensing panel in the flat panel detector is designed to meet various parameters such as certain resolution, frame rate and the like, if the sensing panel is used as an exposure sensing sensor, the response time, accuracy and the like may have problems.
Therefore, how to improve the exposure control function of the X-ray imaging system without affecting the sensing performance of the sensor panel itself and adding an additional sensing device has become one of the problems to be solved urgently by those skilled in the art.
Disclosure of Invention
In view of the above-mentioned prior art, an object of the present invention is to provide an X-ray flat panel detector for automatic exposure detection and a sensor panel structure thereof, which are used to solve the problems of exposure control of the X-ray imaging system in the prior art.
To achieve the above and other related objects, the present invention provides a sensor panel structure of an X-ray flat panel detector for automatic exposure detection, comprising:
a first image sensor array layer sensing incident light to realize X-ray imaging;
and the second image sensor array layer is positioned below the first image sensor array layer and senses incident light passing through the first image sensor array layer to realize automatic exposure detection.
Optionally, a substrate is disposed below the second image sensor array layer.
Optionally, the photosensitive region of the second image sensor array layer is located below the light-transmitting gap in the first image sensor array layer.
Further optionally, the second image sensor array layer includes a plurality of photosensitive regions, and the plurality of photosensitive regions are uniformly distributed below the first image sensor array layer.
Further optionally, the plurality of photosensitive regions of the second image sensor array layer vertically coincide with light-transmissive gaps between pixels of the first image sensor array layer.
Optionally, the number of sensors of the second image sensor array layer is less than the number of sensors of the first image sensor array layer.
Optionally, the electrode pads of the first and second image sensor array layers are located at edges of the sensor panel structure.
Optionally, a passivation layer covers both the first image sensor array layer and the second image sensor array layer.
Further optionally, the electrode pads of the first and second image sensor array layers are externally connected through vias passing through the passivation layer.
Optionally, a scintillator layer is disposed on the first image sensor array layer to convert incident X-rays into visible light.
To achieve the above and other related objects, the present invention also provides an X-ray flat panel detector for automatic exposure inspection, comprising:
the sensor panel structure, the control and processing module connected with the sensor panel structure and the communication module connected with the control and processing module;
the control and processing module outputs control signals to a first image sensor array layer and a second image sensor array layer of the sensor panel structure, reads image information of the first image sensor array layer according to incident light which is detected by the second image sensor array layer and penetrates through the first image sensor array layer, and processes the image information;
and the communication module outputs the processed image data.
As described above, the X-ray flat panel detector for automatic exposure detection and the sensor panel structure thereof according to the present invention have the following advantages:
aiming at the defects of an external synchronization mode and an AED (automated guided equipment) mode for realizing the exposure control function of an X-ray imaging system at present, the design of a sensor panel in a flat panel detector is optimized, and a full-view AED sensor array positioned below an imaging sensor array is added in the sensor panel on the premise of not influencing the sensing performance of the sensor panel and adding additional sensing devices, so that the full-view AED function is realized.
Drawings
Fig. 1 shows a schematic diagram of an X-ray flat panel detector for automatic exposure detection in the prior art.
Fig. 2 is a schematic structural diagram of a sensor panel of an X-ray flat panel detector for automatic exposure detection according to the present invention.
Fig. 3 is a schematic structural diagram of an X-ray flat panel detector for automatic exposure detection according to the present invention.
Fig. 4 is a schematic diagram illustrating an operating state of an X-ray flat panel detector for automatic exposure detection according to an embodiment of the present invention.
Fig. 5a to 5c are schematic diagrams illustrating a manufacturing process of a sensor panel structure of an X-ray flat panel detector for automatic exposure detection according to an embodiment of the present invention.
Description of the reference numerals
100' scintillator
200' sensor panel
201' sensor array
202' electrode pads of sensor array 201
203' substrate
300' AED sensing device
101 first image sensor array layer
1011 scintillator layer
102 second image sensor array layer
103 substrate
104 passivation layer
100 sensor panel structure
200 control and processing module
300 communication module
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention. It is to be noted that the features in the following embodiments and examples may be combined with each other without conflict.
It should be noted that the drawings provided in the following embodiments are only for illustrating the basic idea of the present invention, and the components related to the present invention are only shown in the drawings rather than drawn according to the number, shape and size of the components in actual implementation, and the type, quantity and proportion of the components in actual implementation may be changed freely, and the layout of the components may be more complicated.
The current AED solution is to add an additional exposure sensor, placed on the back of the panel, which takes up some structural space, as shown in fig. 1. Taking a flat panel detector with the scintillator 100 ' as an example, the scintillator 100 ' emits visible light after absorbing incident X-rays, and the visible light is absorbed by the sensor panel 200 '. The sensor panel 200 ' includes a sensor array 201 ', electrode pads 202 ' of the sensor array 201 ', and a substrate 203 ', which may be glass or other transparent material. After a part of visible light or X-rays which are not converted by the scintillator 100 'are transmitted through the sensor panel 200', the X-rays are sensed by the AED sensor devices 300 'arranged on the back side, i.e., exposure is sensed, and then the sensor panel 200' starts to collect signals. The problem with this implementation is that the additional sensor adds cost and difficulty to the detector design, and the additional sensor typically does not cover the entire detection range of the detector, possibly resulting in exposure sensing failure due to the additional sensor being positioned at no dose or at too low a dose, failing to perform full-field AED function, and the presence of the backside sensor and the opening of the structural middleware may cause back-scattering of the optical signal, resulting in reduced image quality.
The idea of the present invention is to add a full-view AED module in the sensor panel, enabling full-view AED functionality, without affecting the performance of the sensor itself.
Referring to fig. 2, the present invention provides a sensor panel structure of an X-ray flat panel detector for automatic exposure detection, including:
a first image sensor array layer 101 sensing incident light to realize X-ray imaging;
and a second image sensor array layer 102, located below the first image sensor array layer 101, for sensing incident light passing through the first image sensor array layer 101 to implement automatic exposure detection.
Specifically, located below the second image sensor array layer 102 is a substrate 103.
Specifically, the photosensitive region of the second image sensor array layer 102 may be located below the light-transmitting gap in the first image sensor array layer 101. In some embodiments of the present invention, the second image sensor array layer 102 includes a plurality of photosensitive regions uniformly distributed under the first image sensor array layer 101, so that a full-field AED function with higher reliability can be realized. For example, the plurality of photosensitive regions of the second image sensor array layer 102 may vertically coincide with the light-transmissive gaps between the pixels of the first image sensor array layer 101.
In some embodiments of the present invention, the number of sensors of the second image sensor array layer 102 may be less than the number of sensors of the first image sensor array layer 101. Compared with the first image sensor array layer 101 for imaging, the second image sensor array layer 102 is used for the full-view AED, so that high pixel density is not needed, wiring can be reduced, parasitic capacitance can be reduced, the anti-interference capability is high, false triggering is not easy to occur while detection sensitivity is guaranteed, and reliable full-view AED functions are achieved.
Specifically, the electrode pads of the first image sensor array layer 101 and the second image sensor array layer 102 may be located at the edge of the sensor panel structure. The circuits of the first image sensor array layer 101 and the second image sensor array layer 102 can be led out to the external circuit through pads at the panel edge.
Specifically, the first image sensor array layer 101 and the second image sensor array layer 102 are covered with a passivation layer 104. The electrode pads of the first and second image sensor array layers 101 and 102 may be connected to the outside through vias passing through the passivation layer 104.
In some embodiments of the present invention, a scintillator layer 1011 is disposed on the first image sensor array layer 101. Specifically, the scintillator layer 1011 is configured to receive X-rays and convert the X-rays into visible light, and may be a layer of cesium iodide (CsI) material, a layer of Gadolinium Oxysulfide (GOS) material, or other suitable materials and structures. The first image sensor array layer 101 and the second image sensor array layer 102 may absorb X-rays and convert them into electrical signals, and for the example where the scintillator layer 1011 is provided, they may absorb visible light and convert them into electrical signals, thereby acquiring image information, and they may be theoretically any suitable materials and structures. Specifically, the substrate 103 may be made of any suitable transparent material or opaque material.
Referring to fig. 3, the present invention further provides an X-ray flat panel detector for automatic exposure detection, including:
the sensor panel structure 100, the control and processing module 200 connected to the sensor panel structure 100, and the communication module 300 connected to the control and processing module 200;
the control and processing module 200 outputs control signals to the first image sensor array layer 101 and the second image sensor array layer 102 of the sensor panel structure 100, sends a signal for starting to acquire image information to the first image sensor array layer 101 according to incident light passing through the first image sensor array layer 101 and detected by the second image sensor array layer 102, reads the image information acquired by the first image sensor array layer 101, and processes the image information;
The communication module 300 outputs the processed image data.
As an embodiment of the present invention, an operation state of an X-ray flat panel detector for automatic exposure detection is shown in fig. 4, circuits of a first image sensor array layer 101 and a second image sensor array layer 102 are led out through pads at the edge of a sensor panel, and a control and processing module 200 and a communication module 300 are fabricated in a PCB below the sensor panel. When exposure occurs, the second image sensor array layer 102 serves as a full-view AED module, and is irradiated by incident light transmitted through the first image sensor array layer 101 to generate a signal, and internal communication stops emptying the pixel array of the first image sensor array layer 101, and starts to acquire an image. For a detector with scintillator layer 1011, the full-field AED module detects visible light, and for a scintillator-free detector, X-rays.
Compared with the manufacturing process of the sensor panel of the traditional X-ray flat panel detector, the full-view AED function is realized without an additional sensor device, but a full-view AED sensor array layer is inserted in the panel manufacturing process and is positioned between the pixel array layer of the traditional sensor and the panel substrate. Referring to FIGS. 5a-5c, the preparation process is as follows:
First, a second image sensor array layer 102 for full-field AED is prepared on a substrate 103, with the photosensitive structure below the light-transmissive void of the first image sensor array layer 101 to be fabricated for imaging. After the second image sensor array layer 102 is completed, a passivation layer 104 is covered thereon, as shown in fig. 5 a;
a first image sensor array layer 101 for imaging may then be prepared according to conventional steps, also overlying the passivation layer 104, as shown in fig. 5 b;
finally, a photolithography process may be used to open vias in the passivation layer 104, exposing the electrode pads of the first image sensor array layer 101 and the second image sensor array layer 102, as shown in fig. 5 c.
In some embodiments, the scintillator layer 1011 can be formed on the first image sensor array layer 101, which is well known in the art and therefore not described herein.
In summary, the present invention optimizes the design of the sensor panel in the flat panel detector to overcome the disadvantages of the external synchronization mode and the AED mode of the conventional X-ray imaging system, and adds the full-view AED sensor array located below the imaging sensor array in the sensor panel without affecting the sensing performance of the sensor panel and adding additional sensing devices, thereby achieving the full-view AED function. Therefore, the invention effectively overcomes various defects in the prior art and has high industrial utilization value.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (6)
1. A sensor panel structure of an X-ray flat panel detector for automatic exposure detection, comprising:
a first image sensor array layer sensing incident light to realize X-ray imaging;
the second image sensor array layer comprises a plurality of photosensitive areas, the plurality of photosensitive areas are uniformly distributed below the first image sensor array layer and are overlapped with light transmission gaps among pixels of the first image sensor array layer in the vertical direction, and incident light passing through the first image sensor array layer is induced to realize full-view automatic exposure detection;
the substrate is arranged below the second image sensor array layer far away from the first image sensor array layer;
Wherein a passivation layer covers both the first image sensor array layer and the second image sensor array layer.
2. The sensor panel structure of an automatic exposure detection X-ray flat panel detector according to claim 1, characterized in that: the number of sensors of the second image sensor array layer is less than the number of sensors of the first image sensor array layer.
3. The sensor panel structure of an automatic exposure detection X-ray flat panel detector according to claim 1, characterized in that: the electrode pads of the first and second image sensor array layers are located at edges of the sensor panel structure.
4. The sensor panel structure of an automatic exposure detection X-ray flat panel detector according to claim 1, characterized in that: the electrode pads of the first and second image sensor array layers are connected to the outside through via holes passing through the passivation layer.
5. The sensor panel structure of an automatic exposure detection X-ray flat panel detector according to claim 1, characterized in that: and a scintillator layer is arranged on the first image sensor array layer and used for converting incident X-rays into visible light.
6. An X-ray flat panel detector for automatic exposure detection, comprising:
the sensor panel structure of any one of claims 1-5, a control and processing module connected to the sensor panel structure, and a communication module connected to the control and processing module;
the control and processing module outputs control signals to a first image sensor array layer and a second image sensor array layer of the sensor panel structure, reads image information of the first image sensor array layer according to incident light which is detected by the second image sensor array layer and penetrates through the first image sensor array layer, and processes the image information;
and the communication module outputs the processed image data.
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| CN109833050A (en) * | 2018-07-20 | 2019-06-04 | 上海煜影光电科技有限公司 | X-ray automatic exposure control system and its control method |
| CN109833051A (en) * | 2018-07-20 | 2019-06-04 | 上海煜影光电科技有限公司 | X-ray exposure control system and its control method |
| CN112002718A (en) * | 2020-08-14 | 2020-11-27 | 上海奕瑞光电子科技股份有限公司 | X-ray detector and preparation method thereof |
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| US6404851B1 (en) * | 2000-03-30 | 2002-06-11 | General Electric Company | Method and apparatus for automatic exposure control using localized capacitive coupling in a matrix-addressed imaging panel |
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