CN106711262A - Molybdenum/titanium/silver metal layered composite material used for space and preparation method thereof - Google Patents
Molybdenum/titanium/silver metal layered composite material used for space and preparation method thereof Download PDFInfo
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- CN106711262A CN106711262A CN201510781955.XA CN201510781955A CN106711262A CN 106711262 A CN106711262 A CN 106711262A CN 201510781955 A CN201510781955 A CN 201510781955A CN 106711262 A CN106711262 A CN 106711262A
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- titanium
- molybdenum
- foil
- pure
- silver
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- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 title claims abstract description 142
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 title claims abstract description 136
- 229910052750 molybdenum Inorganic materials 0.000 title claims abstract description 136
- 239000011733 molybdenum Substances 0.000 title claims abstract description 136
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 title claims abstract description 131
- 239000010936 titanium Substances 0.000 title claims abstract description 99
- 229910052719 titanium Inorganic materials 0.000 title claims abstract description 87
- 239000002131 composite material Substances 0.000 title claims abstract description 84
- 238000002360 preparation method Methods 0.000 title claims abstract description 37
- 239000011888 foil Substances 0.000 claims abstract description 59
- 238000000137 annealing Methods 0.000 claims abstract description 26
- 239000011261 inert gas Substances 0.000 claims abstract description 21
- ZPZCREMGFMRIRR-UHFFFAOYSA-N molybdenum titanium Chemical compound [Ti].[Mo] ZPZCREMGFMRIRR-UHFFFAOYSA-N 0.000 claims abstract description 4
- MZFIXCCGFYSQSS-UHFFFAOYSA-N silver titanium Chemical compound [Ti].[Ag] MZFIXCCGFYSQSS-UHFFFAOYSA-N 0.000 claims abstract description 4
- 238000005096 rolling process Methods 0.000 claims description 35
- 238000011282 treatment Methods 0.000 claims description 11
- 239000003960 organic solvent Substances 0.000 claims description 9
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 6
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 6
- 238000005488 sandblasting Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 5
- 238000012360 testing method Methods 0.000 claims description 4
- 238000002203 pretreatment Methods 0.000 claims description 3
- 238000011221 initial treatment Methods 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 abstract description 22
- 239000004332 silver Substances 0.000 abstract description 22
- 238000005516 engineering process Methods 0.000 abstract description 13
- 239000000463 material Substances 0.000 abstract description 5
- 238000010923 batch production Methods 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000005098 hot rolling Methods 0.000 abstract 3
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000004100 electronic packaging Methods 0.000 abstract 1
- 238000003475 lamination Methods 0.000 abstract 1
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 12
- 239000010944 silver (metal) Substances 0.000 description 12
- 238000004140 cleaning Methods 0.000 description 11
- 229910052751 metal Inorganic materials 0.000 description 10
- 239000002184 metal Substances 0.000 description 10
- 239000000243 solution Substances 0.000 description 9
- 239000012530 fluid Substances 0.000 description 8
- 238000007747 plating Methods 0.000 description 8
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 239000010946 fine silver Substances 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 229910000833 kovar Inorganic materials 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 238000009713 electroplating Methods 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 238000005406 washing Methods 0.000 description 4
- LFDBSBBPLDBESI-UHFFFAOYSA-N [Ag].[Ti].[Mo] Chemical compound [Ag].[Ti].[Mo] LFDBSBBPLDBESI-UHFFFAOYSA-N 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 238000005422 blasting Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- HRKQOINLCJTGBK-UHFFFAOYSA-N dihydroxidosulfur Chemical compound OSO HRKQOINLCJTGBK-UHFFFAOYSA-N 0.000 description 3
- IXCSERBJSXMMFS-UHFFFAOYSA-N hcl hcl Chemical compound Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N hydrofluoric acid Substances F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 3
- 239000011259 mixed solution Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000011536 re-plating Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 239000006104 solid solution Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 229910000967 As alloy Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 239000002905 metal composite material Substances 0.000 description 1
- 239000011156 metal matrix composite Substances 0.000 description 1
- FSVVWABMXMMPEE-UHFFFAOYSA-N molybdenum silver Chemical compound [Mo][Ag][Mo] FSVVWABMXMMPEE-UHFFFAOYSA-N 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/05—Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells
- H01L31/0504—Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells specially adapted for series or parallel connection of solar cells in a module
- H01L31/0512—Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells specially adapted for series or parallel connection of solar cells in a module made of a particular material or composition of materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21B—ROLLING OF METAL
- B21B1/00—Metal-rolling methods or mills for making semi-finished products of solid or profiled cross-section; Sequence of operations in milling trains; Layout of rolling-mill plant, e.g. grouping of stands; Succession of passes or of sectional pass alternations
- B21B1/40—Metal-rolling methods or mills for making semi-finished products of solid or profiled cross-section; Sequence of operations in milling trains; Layout of rolling-mill plant, e.g. grouping of stands; Succession of passes or of sectional pass alternations for rolling foils which present special problems, e.g. because of thinness
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21B—ROLLING OF METAL
- B21B45/00—Devices for surface or other treatment of work, specially combined with or arranged in, or specially adapted for use in connection with, metal-rolling mills
- B21B45/02—Devices for surface or other treatment of work, specially combined with or arranged in, or specially adapted for use in connection with, metal-rolling mills for lubricating, cooling, or cleaning
- B21B45/0269—Cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21B—ROLLING OF METAL
- B21B45/00—Devices for surface or other treatment of work, specially combined with or arranged in, or specially adapted for use in connection with, metal-rolling mills
- B21B45/04—Devices for surface or other treatment of work, specially combined with or arranged in, or specially adapted for use in connection with, metal-rolling mills for de-scaling, e.g. by brushing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21B—ROLLING OF METAL
- B21B47/00—Auxiliary arrangements, devices or methods in connection with rolling of multi-layer sheets of metal
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21B—ROLLING OF METAL
- B21B9/00—Measures for carrying out rolling operations under special conditions, e.g. in vacuum or inert atmosphere to prevent oxidation of work; Special measures for removing fumes from rolling mills
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
- H01L31/188—Apparatus specially adapted for automatic interconnection of solar cells in a module
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Sustainable Development (AREA)
- Life Sciences & Earth Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Sustainable Energy (AREA)
- Manufacturing & Machinery (AREA)
- Metal Rolling (AREA)
- Laminated Bodies (AREA)
Abstract
The invention relates to molybdenum/titanium/silver metal layered composite material used for space and a preparation method thereof. The composite material comprises a layer of pure molybdenum foil; two layers of pure titanium foils; and two layers of pure silver foils, wherein the foils are laminated into a similar "sandwich" structure according to the order of the pure silver foil, the pure titanium foil, the pure molybdenum foil, the pure titanium foil and the pure silver foil and connected as a whole, and the molybdenum-titanium interface and the silver-titanium interface are chemically and metallurgically bonded. The preparation method comprises the steps that a combined blank material of the similar "sandwich" structure is formed by orderly lamination; hot rolling composite connection is performed on the combined blank material, and annealing processing is further performed under the atmosphere of inert gas after hot rolling; and the molybdenum/titanium/silver metal layered composite material used for the space is obtained after annealing. The composite material has great space environment adaptability, thermal conductivity, electrical conductivity and weldability so as to meet the requirements of the space electronic packaging application; and the preparation method of the composite material realizes formation through hot rolling composite connection so that the manufacturing technology is simple, the quality is stable and controllable, operation is convenient and large-area automatic roll-to-roll batch production can be realized.
Description
Technical field
The present invention relates to space equipment and method field, more particularly to a kind of space molybdenum/titanium/silver metal stratiform composite wood
Material and preparation method thereof.
Background technology
Space technology develops and the space launch cost of costliness proposes new requirement to the spacecraft normal life-span in orbit.
Because space environment is severe, the effect to spacecraft surfacing is complicated and changeable, and long-term work is in the solar energy on spacecraft surface
Cell array will suffer from the erosion such as high energy particle, micrometeor, space junk, elemental oxygen, so as to influence aircraft normal in orbit
Life-span.
Solar array is to interconnect the array that concatenation is formed by metal by monomer gallium arsenide solar cell, empty at present
Between the interconnection metal material that uses on solar array be mainly fine silver interconnection piece, its space environment adaptability is poor, seriously
Constrain the spacecraft in-orbit flight life-span.
Metal molybdenum, can cut down（Kovar）The metal materials such as alloy are due to good conduction, heat conductivility and resistance to atom
Oxygen performance, and it is widely used in space electronic encapsulation field, relative to that can cut down-silver composite material, molybdenum-silver composite material has nothing
The advantages of remanent magnetism, intensity high, it is particularly suited for space electronic interconnection.In the side that molybdenum foil, Kovar alloy surface pass through electrosilvering
Laminar composite prepared by formula has been used for spacecraft solar cell interconnection package abroad, and confirms that this is combined
The space reliability of material, but because film purity that electroplating technology is coated with is low, compactness is poor, causes prepared mutually to weld in flakes
Connect reliability still cannot with fine silver mutually in flakes compared with；In recent years, as domestic long-life satellite technology develops, relevant unit
Carried out the development of the metallic composite of resistance to elemental oxygen, such as joint University Of Tianjin of research institute of electronics technology group the 18th use from
Silver particles are injected into molybdenum foil surface and carry out high-temperature heat treatment to it, then by electroplating silvery by beamlet injection technique in advance
It is standby mutually in flakes；In molybdenum foil, kovar alloy surface preplating cushion metal by the way of plating（Such as platinum, nickel, chromium, copper, titanium）,
Then re-plating silvery is standby mutually in flakes；Using prepared by the way of the gold-plated protection of silver surface mutually in flakes；Shanghai space power system research
Similar technology is also adopted by, is prepared mutually in flakes in Kovar alloy, molybdenum foil electroplate.But because Domestic Plating technology is relative
Also there is certain gap in foreign countries, the mutual solderability in flakes by plating mode preparation domestic at present is poor, coating firmness is poor, it is difficult to
Meet space application.For plating, vacuum coating technology particle energy is high, and coating purity is consistent with block, is coated with
Silver layer compactness is high, and based on this, Shanghai Institute of Space Power-Sources passes through layer buffer design, using vacuum coating technology in Kovar
Alloy, molybdenum foil surface deposition silvering are prepared mutually in flakes, prepared mutually to have good solderability in flakes, and it is empty to have passed through ground
Between environment examination, but vacuum plating silver high cost, be not easy to large area production, compactness of electroplating with respect to fine silver interconnect piece it is poor.
Notification number for 103681952A Chinese patent " spacecraft molybdenum/platinum/silver laminar metal matrix composite
Preparation technology ", wherein, molybdenum base electrosilvering is in flakes mutually to electroplate cushion metallic film in advance on molybdenum foil surface, then re-plating
Silver., due to being limited to plating solution and technogenic influence, plating silver layer purity is relatively low, compactness is poor for this preparation method, so as to cause system
Standby mutual solderability in flakes is poor, and firmness is poor, and surface state is easily affected by environment.
The content of the invention
It is an object of the invention to provide a kind of space molybdenum/titanium/silver metal laminar composite and preparation method thereof, with
Solve that layered metal composite material coating prepared by existing molybdenum base electrosilvering is insecure, compactness is poor, solderability is poor, electroplating quality
The problems such as uncontrollable, complex process.
In order to solve the above-mentioned technical problem, the technical scheme is that：A kind of space molybdenum/titanium/silver metal stratiform is answered
Condensation material, including：One layer of pure molybdenum foil；Two-layer pure titanium foil；Two-layer pure silver foil, according to the pure silver foil, pure titanium foil, described pure
The order of molybdenum foil, the pure titanium foil and the pure silver foil builds up class " sandwich " structure, and links into an integrated entity, molybdenum-titanium interface and
Silver-titanium interface is with enhanced primary treatment.
Further, in space molybdenum/titanium/silver metal laminar composite, the pure molybdenum foil, the pure titanium foil
It is all higher than being equal to 99.9% with the purity of the pure silver foil.
Further, in space molybdenum/titanium/silver metal laminar composite, the thickness of the pure molybdenum foil for 10 ~
80μm。
Further, in space molybdenum/titanium/silver metal laminar composite, the thickness of the pure titanium foil for 5 ~
15μm。
Further, in space molybdenum/titanium/silver metal laminar composite, the thickness of the pure silver foil for 8 ~
50μm。
Further, the space molybdenum/titanium/silver metal laminar composite is for space gallium arsenide solar cell
Series and parallel connects.
The present invention also provides a kind of preparation method of space molybdenum/titanium/silver metal laminar composite, and a kind of space is used
The preparation method of molybdenum/titanium/silver metal laminar composite, including：By respectively through the pure molybdenum foil of pretreatment, pure titanium foil and fine silver
Paper tinsel, class " three is built up according to the order of the pure silver foil, the pure titanium foil, the pure molybdenum foil, the pure titanium foil and the pure silver foil
The combination blank of Mingzhi " structure；
The combination blank is first carried out into constant temperature pretreatment under vacuum or inert gas shielding, Rolling compund company is then carried out again
Connect, the test specimen after rolling further makes annealing treatment under inert gas atmosphere, after the completion of annealing, acquisition space molybdenum/titanium/
Silver metal laminar composite.
Further, in the preparation method of space molybdenum/titanium/silver metal laminar composite, to the combination
Before blank carries out Rolling compund connection, the pretreatment of 500 ~ 750 °C of constant temperature is carried out to the combination blank, constant temperature time is 10 ~
30min。
Further, in the preparation method of space molybdenum/titanium/silver metal laminar composite, to the constant temperature
Pretreated combination blank carries out Rolling compund connection, wherein, rolling temperature is 650 ~ 750 °C, and reduction ratio is 10% ~ 40%,
Mill speed is 0.01 ~ 0.5m/s
Further, in the preparation method of space molybdenum/titanium/silver metal laminar composite, after the rolling
Test specimen further makes annealing treatment under inert gas atmosphere, wherein, annealing temperature is 400 ~ 650 °C, and annealing time is 0.5 ~ 3h
Further, in the preparation method of space molybdenum/titanium/silver metal laminar composite, Rolling compund environment is
Inert gas atmosphere or vacuum, wherein, the vacuum of vacuum environment is 1Pa ~ 1.0 × 10Pa。
Further, in the preparation method of space molybdenum/titanium/silver metal laminar composite, to the pure molybdenum
The pretreatment that paper tinsel is carried out includes：Molybdenum foil is carried out into surface sand-blasting, molybdenum foil surface and oil contaminant is removed using organic solvent, it is molten using soda acid
Liquid removes molybdenum foil surface oxide layer.
Further, in the preparation method of space molybdenum/titanium/silver metal laminar composite, to the fine silver
The pretreatment that paper tinsel is carried out includes：Using the greasy dirt on organic solvent removal silver foil surface, using acid-base solution removal silver foil surface
Oxide layer.
Further, in the preparation method of space molybdenum/titanium/silver metal laminar composite, to the pure titanium
The pretreatment that paper tinsel is carried out includes：Using the greasy dirt on organic solvent removal titanium foil surface, using acid-base solution removal titanium foil surface
Oxide layer.
Space molybdenum/titanium/silver metal laminar composite that the present invention is provided, because pure molybdenum foil has good vacuum-resistant
Elemental oxygen performance, block pure silver foil has compactness and good welding performance higher so that the molybdenum of preparation-titanium-Yin Jin
Category laminar composite has good space environment adaptability, and the interface cohesion of composite is firm, with good space
Environmental suitability, thermal conductivity, electric conductivity and solderability, meet the requirement of space electronic package application.
Further, the weld layer that space molybdenum/titanium/silver metal laminar composite is used is block pure silver foil, because
This, the relatively conventional space by prepared by electrosilvering or other vacuum plating silver technologies is with mutually weldability is good in flakes, technique is simple
Single controllable, achievable large area batch production etc..
The preparation method of space molybdenum/titanium/silver metal laminar composite that the present invention is provided, space molybdenum/titanium/silver gold
Category laminar composite passes through Rolling compund with pure molybdenum foil by bulk metal pure silver foil under vacuum environment or inert gas shielding
Connection is formed, and manufacture craft is simple, stable and controllable for quality, easy to operate, be capable of achieving large area automatic batch production.
Further, in the preparation method of space molybdenum/titanium/silver metal laminar composite, due to metal molybdenum and titanium
And Titanium and silver can form effective solid solution at a certain temperature, meanwhile, before Rolling compund connection, combination blank is entered
500 ~ 750 °C of constant temperature pretreatments of row, to reduce the resistance of deformation of each tinsel so that the molybdenum-titanium-silver metal of Rolling compund
Laminar composite interface cohesion is firm.
Brief description of the drawings
Invention is described further below in conjunction with the accompanying drawings：
Fig. 1 is the cross-sectional view of space molybdenum/titanium/silver metal laminar composite provided in an embodiment of the present invention；
The step of Fig. 2 is the preparation method of space molybdenum/titanium/silver metal laminar composite provided in an embodiment of the present invention flow
Schematic diagram.
Specific embodiment
Below in conjunction with the drawings and specific embodiments to a kind of space proposed by the present invention molybdenum/titanium/silver metal lamellar composite
Material and preparation method thereof is described in further detail.According to following explanation and claims, advantages and features of the invention
To become apparent from.It should be noted that, accompanying drawing using very simplify in the form of and use non-accurately ratio, be only used to conveniently,
Lucidly aid in illustrating the purpose of the embodiment of the present invention.
Core concept of the invention is, space molybdenum/titanium/silver metal laminar composite that the present invention is provided, due to
Pure molybdenum foil has good vacuum-resistant elemental oxygen performance, and block pure silver foil has compactness and good weldability higher
Can so that the molybdenum-titanium-silver metal laminar composite of preparation has good space environment adaptability, the interface of composite
It is firmly combined with, with good space environment adaptability, thermal conductivity, electric conductivity and solderability, meets space electronic package application
It is required that.The preparation method of space molybdenum/titanium/silver metal laminar composite that the present invention is provided, space molybdenum/titanium/silver metal
Laminar composite is connected under vacuum environment or inert gas shielding with pure molybdenum foil by bulk metal pure silver foil by Rolling compund
Connect to be formed, manufacture craft is simple, stable and controllable for quality, easy to operate, be capable of achieving large area automation volume to volume batch production.
Fig. 1 is that the cross-section structure of space molybdenum/titanium/silver metal laminar composite provided in an embodiment of the present invention is illustrated
Figure.Reference picture 1, there is provided a kind of space molybdenum/titanium/silver metal laminar composite, including：One layer of pure molybdenum foil 11；Two-layer is pure
Titanium foil 12；Two-layer pure silver foil 13, according to the pure silver foil 13, the pure titanium foil 12, the pure molybdenum foil 11, the and of the pure titanium foil 12
The order of the pure silver foil 13 builds up class " sandwich " structure, and links into an integrated entity, molybdenum-titanium interface and being of silver-titanium interface
Learn metallurgical binding.
In embodiments of the present invention, the purity of the pure molybdenum foil 11, the pure titanium foil 12 and the pure silver foil 13 is all higher than
Equal to 99.9%, the thickness of the pure molybdenum foil is 10 ~ 80 μm, and the thickness of the pure titanium foil is 5 ~ 15 μm, the thickness of the pure silver foil
It is 8 ~ 50 μm.
The step of Fig. 2 is the preparation method of space molybdenum/titanium/silver metal laminar composite provided in an embodiment of the present invention
Schematic flow sheet.Reference picture 2, the preparation method of space molybdenum/titanium/silver metal laminar composite, including：
S21, by respectively through the pure molybdenum foil of pretreatment, pure titanium foil and pure silver foil, according to the pure silver foil, the pure titanium foil, institute
The order for stating pure molybdenum foil, the pure titanium foil and the pure silver foil builds up the combination blank of class " sandwich " structure；
S22, by it is described combination blank Rolling compund connection is carried out under vacuum or inert gas environment, wherein, rolling temperature is
650 ~ 750 °C, reduction ratio is 10% ~ 40%, and mill speed is 0.01 ~ 0.5m/s；
S23, by it is described combination blank rolling after, under inert gas atmosphere further annealing, wherein annealing temperature is
400 ~ 650 °C, annealing time is 0.5 ~ 3h, after the completion of annealing, obtains space molybdenum/titanium/silver metal laminar composite.
Because metal molybdenum can form effective solid solution at a certain temperature with titanium and Titanium and silver, meanwhile, in rolling
Before composite joint, 500 ~ 750 °C of constant temperature pretreatments are carried out to combination blank, to reduce the resistance of deformation of each tinsel, make
Molybdenum-titanium-silver metal stratiform the composite material interface for obtaining Rolling compund is firmly combined with.
In embodiments of the present invention, in the preparation method of space molybdenum/titanium/silver metal laminar composite, roll
Combinational environment processed is inert gas atmosphere or vacuum, wherein, the vacuum of vacuum environment is 1Pa ~ 1.0 × 10Pa。
In the preparation method of space molybdenum/titanium/silver metal laminar composite, the pretreatment carried out to the pure molybdenum foil
Including：Molybdenum foil is carried out into surface sand-blasting, molybdenum foil surface and oil contaminant is removed using organic solvent, using acid-base solution removal molybdenum foil surface
Oxide layer；The pretreatment that the pure silver foil is carried out is included：It is molten using soda acid using the greasy dirt on organic solvent removal silver foil surface
The oxide layer on liquid removal silver foil surface；The pretreatment that the pure titanium foil is carried out is included：Using organic solvent removal titanium foil surface
Greasy dirt, using the oxide layer on acid-base solution removal titanium foil surface.
Embodiment 1
The pure molybdenum foil that intermediate layer thickness in space molybdenum/titanium/silver metal laminar composite is 50 μm, purity is 99.99%,
Both sides help the pure titanium foil that composite bed thickness is 8 μm, purity is 99.99%, outside two-layer weld layer thickness to be 20 μm, purity
It is 99.99% pure silver foil, is connected by Rolling compund between five layers and be combined as a whole, Ag/Ti/Mo/Ti/Ag interfaces is with chemistry
Metallurgical binding, space gallium arsenide solar cell is welded by the molybdenum/titanium/silver metal laminar composite using parallel resistance, its weldering
Point tensile strength is 6 ~ 8N, and obscission does not occur in interface.
The operation for preparing space molybdenum/titanium/silver metal laminar composite is operated as follows:By two piece of 20 silver foil of μ m-thick,
Two piece of 8 titanium foil of μ m-thick using isopropanol, semiconductor washing solution is successively respectively 1# electronics cleaning fluid removal silver foil and titanium foil
The greasy dirt on surface, using 25% hydrofluoric acid（HF）The aqueous solution removes the oxide layer on silver foil and titanium foil surface；Simultaneously by one piece 50
The molybdenum foil surface of μ m-thick carries out blasting treatment, and uses isopropanol, semiconductor washing solution successively（1# electronics cleaning fluids）Cleaning, with
The greasy dirt on molybdenum foil surface and sulfuric acid (H2SO2) and hydrochloric acid (HCl) mixed solution the removal molybdenum foil table using 5% after removal sandblasting
The oxide layer in face, the size of silver foil is consistent with molybdenum foil, is folded by the order of pure silver foil-pure titanium foil-pure molybdenum foil-pure titanium foil-pure silver foil
Into class " sandwich " structure（That is silver/titanium/molybdenum/titanium/silver：Ag/Ti/Mo/Ti/Ag）Combination blank；Combination blank is carried out
The pretreatment of 600 °C of constant temperature, constant temperature time is 15min, after the completion of combination blank is carried out into Rolling compund under inert gas shielding
Connect, inert gas uses argon gas in the present embodiment, rolling temperature is 750 °C, and reduction ratio is 20%, and mill speed is
0.02m/s, after rolling, further makes annealing treatment under inert gas atmosphere, and annealing temperature is 550 °C, and annealing time is 2h, is moved back
After the completion of fire treatment, space molybdenum/titanium/silver metal laminar composite is obtained.
Embodiment 2
The pure molybdenum foil that intermediate layer thickness in space molybdenum/titanium/silver metal laminar composite is 30 μm, purity is 99.99%,
Both sides help the pure titanium foil that composite bed thickness is 6 μm, purity is 99.99%, outside two-layer weld layer thickness to be 20 μm, purity
It is 99.99% pure silver foil, is connected by Rolling compund between five layers and be combined as a whole, Ag/Ti/Mo/Ti/Ag interfaces is with chemistry
Metallurgical binding, space gallium arsenide solar cell is welded by the molybdenum/titanium/silver metal laminar composite using parallel resistance, its weldering
Point tensile strength is 6 ~ 8N, and obscission does not occur in interface.
Titanium foil by two piece of 20 silver foil of μ m-thick, two piece of 6 μ m-thick using isopropanol, semiconductor washing solution is successively respectively 1#
Electronics cleaning fluid removes the greasy dirt on silver foil and titanium foil surface, using 25% hydrofluoric acid（HF）The aqueous solution removes silver foil and titanium
The oxide layer on paper tinsel surface；The molybdenum foil surface of one piece of 30 μ m-thick is carried out into blasting treatment simultaneously, and uses isopropanol, semiconductor successively
Cleaning fluid（1# electronics cleaning fluids）Cleaning, with remove the greasy dirt on molybdenum foil surface after sandblasting and the sulfuric acid (H2SO2) using 5% and
The oxide layer on hydrochloric acid (HCl) mixed solution removal molybdenum foil surface, the size of silver foil is consistent with molybdenum foil, by pure silver foil-pure titanium foil-pure
The order of molybdenum foil-pure titanium foil-pure silver foil builds up class " sandwich " structure（That is silver/titanium/molybdenum/titanium/silver：Ag/Ti/Mo/Ti/Ag）
Combination blank；The pretreatment of 700 °C of constant temperature is carried out to combination blank, constant temperature time is 20min, after the completion of will combination blank lazy
Property gas shield under carry out Rolling compund connection, inert gas uses argon gas in the present embodiment, and rolling temperature is 700 °
C, reduction ratio is 30%, and mill speed is 0.01m/s, after rolling, is further made annealing treatment under inert gas atmosphere, annealing temperature
It is 550 °C to spend, and annealing time is 2h, after the completion of annealing, obtains space molybdenum/titanium/silver metal laminar composite.
Embodiment 3
The pure molybdenum foil that intermediate layer thickness in space molybdenum/titanium/silver metal laminar composite is 15 μm, purity is 99.99%,
Both sides help the pure titanium foil that composite bed thickness is 6 μm, purity is 99.99%, outside two-layer weld layer thickness to be 20 μm, purity
It is 99.99% pure silver foil, is connected by Rolling compund between five layers and be combined as a whole, Ag/Ti/Mo/Ti/Ag interfaces is with chemistry
Metallurgical binding, space gallium arsenide solar cell is welded by the molybdenum/titanium/silver metal laminar composite using parallel resistance, its weldering
Point tensile strength is 6 ~ 8N, and obscission does not occur in interface.
Titanium foil by two piece of 20 silver foil of μ m-thick, two piece of 6 μ m-thick using isopropanol, semiconductor washing solution is successively respectively 1#
Electronics cleaning fluid removes the greasy dirt on silver foil and titanium foil surface, using 25% hydrofluoric acid（HF）The aqueous solution removes silver foil and titanium
The oxide layer on paper tinsel surface；The molybdenum foil surface of one piece of 15 μ m-thick is carried out into blasting treatment simultaneously, and uses isopropanol, semiconductor successively
Cleaning fluid（1# electronics cleaning fluids）Cleaning, with remove the greasy dirt on molybdenum foil surface after sandblasting and the sulfuric acid (H2SO2) using 5% and
The oxide layer on hydrochloric acid (HCl) mixed solution removal molybdenum foil surface, the size of silver foil is consistent with molybdenum foil, by pure silver foil-pure titanium foil-pure
The order of molybdenum foil-pure titanium foil-pure silver foil builds up class " sandwich " structure（That is silver/titanium/molybdenum/titanium/silver：Ag/Ti/Mo/Ti/Ag）
Combination blank；The pretreatment of 650 °C of constant temperature is carried out to combination blank, constant temperature time is 20min, after the completion of will combination blank lazy
Property gas shield under carry out Rolling compund connection, inert gas uses argon gas in the present embodiment, and rolling temperature is 700 °
C, reduction ratio is 40%, and mill speed is 0.01m/s, after rolling, is further made annealing treatment under inert gas atmosphere, annealing temperature
It is 550 °C to spend, and annealing time is 2h, after the completion of annealing, obtains space molybdenum/titanium/silver metal laminar composite.
Obviously, those skilled in the art can carry out various changes to the present invention and deform without deviating from essence of the invention
God and scope.So, if these modifications of the invention and modification belong to the scope of the claims in the present invention and its equivalent technologies
Within, then the present invention is also intended to comprising these changes and modification.
Claims (14)
1. a kind of space molybdenum/titanium/silver metal laminar composite, it is characterised in that including：
One layer of pure molybdenum foil；
Two-layer pure titanium foil；
Two-layer pure silver foil, according to the pure silver foil, the pure titanium foil, the pure molybdenum foil, the pure titanium foil and the pure silver foil
Order builds up class " sandwich " structure, and links into an integrated entity, and molybdenum-titanium interface and silver-titanium interface are with enhanced primary treatment.
2. space as claimed in claim 1 molybdenum/titanium/silver metal laminar composite, it is characterised in that the pure molybdenum foil,
The purity of the pure titanium foil and the pure silver foil is all higher than being equal to 99.9%.
3. space as claimed in claim 1 molybdenum/titanium/silver metal laminar composite, it is characterised in that the pure molybdenum foil
Thickness is 10 ~ 80 μm.
4. space as claimed in claim 1 molybdenum/titanium/silver metal laminar composite, it is characterised in that the pure titanium foil
Thickness is 5 ~ 15 μm.
5. space as claimed in claim 1 molybdenum/titanium/silver metal laminar composite, it is characterised in that the pure silver foil
Thickness is 8 ~ 50 μm.
6. space as claimed in claim 1 molybdenum/titanium/silver metal laminar composite, it is characterised in that use in the space
Molybdenum/titanium/silver metal laminar composite is connect for space gallium arsenide solar cell series and parallel.
7. the preparation method of a kind of space molybdenum/titanium/silver metal laminar composite, it is characterised in that including：
By respectively through the pure molybdenum foil of pretreatment, pure titanium foil and pure silver foil, according to the pure silver foil, pure titanium foil, described pure
The order of molybdenum foil, the pure titanium foil and the pure silver foil builds up the combination blank of class " sandwich " structure；
The combination blank is first carried out into constant temperature pretreatment under vacuum or inert gas shielding, Rolling compund company is then carried out again
Connect, the test specimen after rolling further makes annealing treatment under inert gas atmosphere, after the completion of annealing, acquisition space molybdenum/titanium/
Silver metal laminar composite.
8. the preparation method of space as claimed in claim 7 molybdenum/titanium/silver metal laminar composite, it is characterised in that right
Before the combination blank carries out Rolling compund connection, 500 ~ 750 °C of constant temperature pretreatments are carried out to the combination blank, during constant temperature
Between be 10 ~ 30min.
9. the preparation method of space as claimed in claim 7 molybdenum/titanium/silver metal laminar composite, it is characterised in that right
The pretreated combination blank of constant temperature carries out Rolling compund connection, wherein, rolling temperature is 650 ~ 750 °C, and reduction ratio is
10% ~ 40%, mill speed is 0.01 ~ 0.5m/s.
10. the preparation method of space as claimed in claim 7 molybdenum/titanium/silver metal laminar composite, it is characterised in that
Test specimen after the rolling is further made annealing treatment under inert gas atmosphere, wherein, annealing temperature is 400 ~ 650 °C, is moved back
The fiery time is 0.5 ~ 3h.
The preparation method of 11. spaces as claimed in claim 7 molybdenum/titanium/silver metal laminar composite, it is characterised in that
Rolling compund environment is inert gas atmosphere or vacuum, wherein, the vacuum of vacuum environment is 1Pa ~ 1.0 × 10Pa。
The preparation method of 12. spaces as claimed in claim 7 molybdenum/titanium/silver metal laminar composite, it is characterised in that
The pretreatment that the pure molybdenum foil is carried out is included：Molybdenum foil is carried out into surface sand-blasting process, using organic solvent removal molybdenum foil surface
Greasy dirt, molybdenum foil surface oxide layer is removed using acid-base solution.
The preparation method of 13. spaces as claimed in claim 7 molybdenum/titanium/silver metal laminar composite, it is characterised in that
The pretreatment that the pure silver foil is carried out is included：Using the greasy dirt on organic solvent removal silver foil surface, removed using acid-base solution
The oxide layer on silver foil surface.
The preparation method of 14. spaces as claimed in claim 7 molybdenum/titanium/silver metal laminar composite, it is characterised in that
The pretreatment that the pure titanium foil is carried out is included：Using the greasy dirt on organic solvent removal titanium foil surface, removed using acid-base solution
The oxide layer on titanium foil surface.
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| CN110872692A (en) * | 2018-08-29 | 2020-03-10 | 中国科学院宁波材料技术与工程研究所 | Molybdenum-silver laminated composite material, and preparation method and application thereof |
| CN113414238A (en) * | 2021-06-17 | 2021-09-21 | 陕西理工大学 | Ultrafine grain oriented molybdenum-nickel-boron cermet material and preparation method thereof |
| CN113927970A (en) * | 2020-06-29 | 2022-01-14 | 江苏欣恒蕴精密零件有限公司 | Silver/molybdenum/silver metal-based layered composite material and preparation process thereof |
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| US6909185B1 (en) * | 1998-12-07 | 2005-06-21 | Hitachi, Ltd. | Composite material including copper and cuprous oxide and application thereof |
| CN102169912A (en) * | 2011-01-17 | 2011-08-31 | 天津大学 | Mo/Ag laminated metal matrix composite for solar cell interconnected sheet and preparation process thereof |
| CN103681952A (en) * | 2013-08-20 | 2014-03-26 | 天津大学 | A preparation technique for spacecraft-used molybdenum/platinum/silver/ layered metal matrix composite materials |
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| US6909185B1 (en) * | 1998-12-07 | 2005-06-21 | Hitachi, Ltd. | Composite material including copper and cuprous oxide and application thereof |
| CN102169912A (en) * | 2011-01-17 | 2011-08-31 | 天津大学 | Mo/Ag laminated metal matrix composite for solar cell interconnected sheet and preparation process thereof |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110872692A (en) * | 2018-08-29 | 2020-03-10 | 中国科学院宁波材料技术与工程研究所 | Molybdenum-silver laminated composite material, and preparation method and application thereof |
| CN110872692B (en) * | 2018-08-29 | 2022-05-31 | 中国科学院宁波材料技术与工程研究所 | Molybdenum-silver laminated composite material, and preparation method and application thereof |
| CN113927970A (en) * | 2020-06-29 | 2022-01-14 | 江苏欣恒蕴精密零件有限公司 | Silver/molybdenum/silver metal-based layered composite material and preparation process thereof |
| CN113414238A (en) * | 2021-06-17 | 2021-09-21 | 陕西理工大学 | Ultrafine grain oriented molybdenum-nickel-boron cermet material and preparation method thereof |
| CN113414238B (en) * | 2021-06-17 | 2022-10-11 | 陕西理工大学 | Molybdenum-nickel-boron metal ceramic material with ultrafine grain oriented distribution and preparation method thereof |
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