CN106710847B - Plane type transformer and balun structure - Google Patents
Plane type transformer and balun structure Download PDFInfo
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- CN106710847B CN106710847B CN201510415515.2A CN201510415515A CN106710847B CN 106710847 B CN106710847 B CN 106710847B CN 201510415515 A CN201510415515 A CN 201510415515A CN 106710847 B CN106710847 B CN 106710847B
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Abstract
Disclosed herein plane type transformer structure and balun structures.Plane type transformer structure and balun include: one first plane formula coil, include one first cyclic structure, one second cyclic structure and an interconnecting piece, first cyclic structure and second cyclic structure are connected by the interconnecting piece；One second plane formula coil, range and the range of first cyclic structure are be overlapped at least partially；And a third plane formula coil, range and the range of second cyclic structure are be overlapped at least partially.The first plane formula coil and the second plane formula coil or the third plane formula coil constitute a transformer.
Description
Technical field
The present invention relates to transformers, especially with respect to the structure of plane type transformer and balun.
Background technique
Integrated circuit for RF signal receiving end often needs to adjust the impedance matching of signal using transformer.It is integrated
The transformer of circuit is nothing more than the coil comprising plane formula, and using the circle number of coil, when coupled relation reaches impedance matching
Effect.Other than impedance matching, the integrated circuit for RF signal receiving end may also be needed signal in common mode
It is converted between (common mode) mode and differential (differential) mode.This kind of conversion is often used a kind of balance
Imbalance converter (balanced-to-unbalanced transformer), or be balun (BALUN).Balancedunbalanced
Converter belongs to a kind of application of transformer, is formed in integrated circuits and by coil.Therefore, whether transformer or
How balun arranges its coil, and coil is made to have good coupling effect, high qualitative factor (quality
Factor) Q and avoid magnetic field scattering (radiation) with protect other components become important project.
Summary of the invention
In view of the deficiency of prior art, a purpose of the present invention is that providing a kind of plane type transformer and balancedunbalanced
The structure of converter, to improve qualitative factor Q and reduce magnetic field scattering.
Disclosed herein a kind of plane type transformer structures, include: one first plane formula coil, cyclic annular comprising one first
Structure, one second cyclic structure and an interconnecting piece, first cyclic structure and second cyclic structure are connected by the interconnecting piece
It connects；One second plane formula coil, range and the range of first cyclic structure are be overlapped at least partially；And one third it is flat
Face formula coil, range and the range of second cyclic structure are be overlapped at least partially；Wherein the first plane formula coil with
The second plane formula coil or the third plane formula coil constitute a transformer.
The present invention separately discloses a kind of plane formula balun structure, includes: one first plane formula coil, packet
Containing one first cyclic structure, one second cyclic structure and an interconnecting piece, first cyclic structure and second cyclic structure pass through
The interconnecting piece is connected；One second plane formula coil, range and the range of first cyclic structure are be overlapped at least partially,
With one first contact and one second contact；And a third plane formula coil, the range of range and second cyclic structure
It is overlapped at least partially, there is a third contact and one the 4th contact；Wherein, which is connected with the third contact
It connects, which is connected with the 4th contact.
The structure of plane type transformer and balun of the invention improves pair compared to the prior art
Title property and qualitative factor Q, and inductance value is easily adjusted therefore the demand of impedance matching is more easily achieved.Furthermore it is of the invention
Structure reduces the scattering in magnetic field also to protect other components.
Feature, implementation and effect for the present invention, hereby schema being cooperated to make preferred embodiment, detailed description are as follows.
Detailed description of the invention
Figure 1A to Fig. 1 D is the structure and its equivalent elements figure of the plane type transformer of an embodiment according to the present invention；
Fig. 2A and Fig. 2 B is the structure and its equivalent elements figure of the plane type transformer of another embodiment according to the present invention；
Fig. 3 is the structure of the plane type transformer of another embodiment according to the present invention；
Fig. 4 is the structure of the plane type transformer of another embodiment according to the present invention；
Fig. 5 is the structure of the plane type transformer of another embodiment according to the present invention；
Fig. 6 is the structure of the plane type transformer of another embodiment according to the present invention；
Fig. 7 is the structure of the balun of another embodiment according to the present invention；
Fig. 8 is the structure of the balun of another embodiment according to the present invention；
Fig. 9 is the structure chart of an embodiment of the inductance value that the present invention increases plane formula coil；And
Figure 10 is the sectional view of the semiconductor structure of corresponding transformer or balun of the invention.
Specific embodiment
The technical terms of following description refer to the idiom of the art, if this specification is to part term
It is illustrated or defines, the explanation or definition of this specification are subject in the explanation system of the part term.In exposure of the invention
Hold the structure comprising plane type transformer and balun, under the premise of being embodied as possible, the art tool
Usually intellectual can select equivalent component to realize the present invention according to the disclosure of this specification, that is, of the invention
Implement the embodiment chatted after being not limited to.Since the structure of plane type transformer and balun of the invention is wrapped
It may be known tip assemblies for the members contained are independent, therefore in the abundant exposure and exploitativeness for not influencing the device inventions
Under the premise of, illustrate that memorandum will be given for the details of known tip assemblies below.
Figure 1A to Fig. 1 D is please referred to, is that the structure of the plane type transformer of an embodiment according to the present invention is equivalent with it
Component drawings.Plane type transformer 100 shown in figure 1A is made of three plane formula coils.In order to understand illustrated planar formula transformer
Its thin portion component is shown in Figure 1B and Fig. 1 C by 100 structure.Figure 1B is a wherein plane formula coil 120, includes cyclic structure
130, interconnecting piece 140 and cyclic structure 150.Interconnecting piece 140 connects cyclic structure 130 and cyclic structure 150.Cyclic structure 130
And cyclic structure 150 respectively contains the metal wire sections for being surrounded by two circles.Wherein the metal wire sections of different pattern are represented to be located at and partly be led
Different metal layer in body structure, such as metal wire sections 132 (being indicated with striped) and metal wire sections 134 (being indicated with dotted) can
With super thick metal (Ultra Thick Metal, the UTM) layer being made in semiconductor structure respectively and reroute layer (Re-
Distribution Layer, RDL), or it is opposite.The metal wire sections of different metal layer are with partly leading perpendicular to the metal wire sections
Body structure (being indicated with black) is connected, such as connection structure 136.Connection structure 136 may, for example, be guide hole (via) structure.
Interconnecting piece 140 is the structure of a cross-like (crossing), therefore enters the electric current of cyclic structure 130 by contact 138 with inverse
After clockwise flows through the most metal wire sections of cyclic structure 130, enter cyclic structure 150 by metal wire sections 142.Electricity
Stream in cyclic structure 150 to flow through all metal wire sections clockwise after, then via metal wire sections 144 return to cyclic structure
130, plane formula coil 120 is finally flowed out by contact 139.So design is so that electric current has difference in two cyclic structures
Current direction, therefore cyclic structure 130 and the magnetic field generated of cyclic structure 150 can be mutually coupled, can be to avoid magnetic field four
Place's scattering.
Fig. 1 C display plane formula coil 160 and plane formula coil 170.Plane formula coil 160 and plane formula coil 170 are respective
Metal wire sections comprising being surrounded by three circles.Likewise, the metal wire sections (such as metal wire sections 166) indicated with grey with dotted
The metal wire sections (such as metal wire sections 168) of expression are located at the different metal layer in semiconductor structure.In one embodiment, it puts down
The metal wire sections of grey and the metal wire sections of striped in plane formula coil 120 make in face formula coil 160 and plane formula coil 170
Same layer in semiconductor structure may also be made in different layers in other embodiments.Plane formula coil 160 and plane formula
170 one symmetrical helical inductor of each self-forming of coil, and the both ends of two inductance are respectively contact 162,164 and connect
Point 172,174.
After the plane formula coil 120 of Figure 1B is combined with the plane formula coil 160 of Fig. 1 C and plane formula coil 170, just such as
Shown in the plane type transformer 100 of Figure 1A.Plane formula coil 160 is not interconnected with plane formula coil 120, likewise, plane
Formula coil 170 is not also interconnected with plane formula coil 120.The range of the range of plane formula coil 160 and cyclic structure 130 is extremely
Few a part overlapping, likewise, the range of plane formula coil 170 is Chong Die with the range of cyclic structure 150 at least part.Figure 1A
Plane type transformer 100 can use Fig. 1 D component indicate.Coil 125 represents plane formula coil 120, and coil 165 represents
Plane formula coil 160, coil 175 represent plane formula coil 170.The contact of the 152 corresponding diagram 1A of contact in the center of coil 125
152.This three coils are the function of realizing transformer.More particularly, coil 125 and coil 165 can form a transformer, line
Circle 125 can form another transformer with coil 175.In various embodiments, this three coils can also be used as balancedunbalanced
Converter uses.Three contacts of coil 125 can be used as the balance transmission end (balanced of balun
terminals)；And the contact 162 of coil 165 first can be connected to form the first contact with the contact 174 of coil 175, coil
165 contact 164 first can be connected to form the second contact with the contact 172 of coil 175, and the first contact and the second contact can be with
Uneven transmission end (unbalanced terminals) as balun.That is, when the present invention uses
In balun in application, above-mentioned coil 165 and coil 175 is in parallel relationship.Such connection relationship it is good
Place is, when cyclic structure 130 and the circle number difference of plane formula coil 160 are little, and cyclic structure 150 and plane formula coil 170
Circle number difference it is little when, plane formula coil can be adjusted by by plane formula coil 160 is in parallel with plane formula coil 170
120 with the ratio of the inductance value of plane formula coil 160 and plane formula coil 170, to adjust impedance matching.In addition, can Yu Renyi
Group input/output terminal one or more capacitors in parallel, also adjustable impedance matches.
Please refer to Fig. 2A and Fig. 2 B, be the plane type transformer of another embodiment according to the present invention structure and its etc.
Imitate component drawings.Plane type transformer 200 is equally made of three plane formula coils, respectively has contact 238 and contact 239
Plane formula coil 220, the plane formula coil 260 with contact 262 and contact 264 and with contact 272 and contact 274
Plane formula coil 270.Similar with plane formula coil 120, plane formula coil 220 is by two cyclic structures and an interconnecting piece institute group
At interconnecting piece connects two cyclic structures.Interconnecting piece is similarly the structure of cross-like, therefore electric current is in two cyclic structures
Direction is different, and the magnetic field for helping to reduce plane formula coil 220 scatters outward.Plane formula coil 260 and plane formula coil 270 are same
Sample is symmetrical helical inductor.Plane formula coil 260 also includes center tap (central tap) 266, plane formula coil
270 also include center tap 276.
The component that the plane type transformer 200 of Fig. 2A can use Fig. 2 B indicates.Coil 225 represents plane formula coil 220,
Coil 265 represents plane formula coil 260, and coil 275 represents plane formula coil 270.This three coils are the function for realizing transformer
Energy.More particularly, coil 225 and coil 265 can form a transformer, and coil 225 and coil 275 can form another transformation
Device.In various embodiments, this three coils can also be used as balun use.Two contacts of coil 225
It can be used as the uneven transmission end of balun；And the contact 262,264 and 266 of coil 265 can first be distinguished
It is connected with the contact 274,272 and 276 of coil 275.Coil 265 becomes a coil in parallel with coil 275 after connection.It should
Three contacts of coil in parallel can be used as the balance transmission end of balun.Likewise, by by coil simultaneously
Join the ratio of adjustable plane formula coil 220 and the inductance value of plane formula coil 260 and plane formula coil 270, with further
Adjust impedance matching.In addition, the present embodiment can be also separately connected by bridging metal wire sections are arranged on plane formula coil 220
The outer ring of a cyclic structure (figure left side) in plane formula coil 220 and inner ring and another cyclic structure (figure right side) it is outer
Circle and inner ring, such as bridging metal wire sections 222 and bridging metal wire sections 224.To bridge plane after metal wire sections connection Internal and external cycle
The inductance value of formula coil 220 will decline.That is, the present embodiment further adjusts impedance by setting bridging metal wire sections
Matching.The both ends of bridging metal wire sections 222 or 224 are separately connected the metal wire sections of the part of plane formula coil 220, by bridging gold
Belong to line segment 222 or bridge the metal wire sections that metal wire sections 224 connect and be substantially parallel to each other, and intermediate includes other components
Metal wire sections.For example, the metal wire sections connecting with bridging 222 both ends of metal wire sections are the metal wire of plane formula coil 220
Section, and the metal wire sections of middle section are the metal wire sections of plane formula coil 260.The metal wire sections of plane formula coil 260 not with
Bridging metal wire sections 222 and the metal wire sections of plane formula coil 220 are connected.It note that here only to bridge metal wire sections
222 and bridging metal wire sections 224 for explain, plane formula coil 220 may include as shown in Figure 2 A or more bridgings
Metal wire sections.
Referring to Fig. 3, it is the structure of the plane type transformer of another embodiment according to the present invention.The structure of Fig. 3 with
Fig. 2A is similar, and there are two contacts for the tool of plane formula coil 320, and plane formula coil 360 respectively has 3 with plane formula coil 370 and connects
Point.Therefore the equivalent elements figure of the structure of Fig. 3 is similar to Fig. 2 B.When applied to balun, it can will equally put down
Face formula coil 320 is as uneven transmission end, using the parallel connection of plane formula coil 360 and plane formula coil 370 as balance transmission
End.Unlike the embodiment of Fig. 2A, plane type transformer 300 does not bridge metal wire sections, and includes to be made in third layer
The metal wire sections of (being different from metal layer belonging to metal layer belonging to striped and grey metal line segment and dotted metal wire sections), i.e.,
Metal wire sections 322, metal wire sections 324 and metal wire sections 326.In addition, there are three the coils of endpoint for tool in the embodiment of Fig. 2A
The outmost turns of (i.e. plane formula coil 260 and plane formula coil 270) are located at coil (the i.e. plane formula coil with two endpoints
220) within outmost turns, but Fig. 3 is another different embodiment.
Referring to Fig. 4, it is the structure of the plane type transformer of another embodiment according to the present invention.Plane type transformer
400 plane formula coil 420, plane formula coil 460 and the configuration of plane formula coil 470 and the embodiment of Fig. 3 are similar, but plane
Formula coil 420 is not connected with its contact 438 and contact 439 directly.Contact 438 and contact 439 are directly connected to interconnecting piece
440, then plane formula coil 420 is connected by interconnecting piece 440.Contact 438 and contact 439 are set to plane formula coil 420
Centre can be improved the symmetry of plane formula coil 420, that is, plane formula coil 420 two cyclic structures with contact 438
And the online of contact 439 is symmetrical axial symmetry.Interconnecting piece 440 is no longer the structure of cross-like, but two Uncrossed metals
Line segment.Electric current still flows in different directions in two cyclic structures, so such plane formula coil 420 not only improves pair
Title property, and still have effects that magnetic field is avoided to scatter outward.It is learnt by experimental result, promotes symmetry and help raising plane formula line
The qualitative factor Q of circle 420.
Referring to Fig. 5, it is the structure of the plane type transformer of another embodiment according to the present invention.Plane type transformer
500 plane formula coil 520, plane formula coil 560 and the configuration of plane formula coil 570 and the embodiment of Fig. 4 are similar, plane formula
The contact 538 and contact 539 of coil 520 are similarly disposed at the center of plane formula coil 520 to promote plane formula coil 520
Symmetry and its qualitative factor Q.Contact 538 is directly connected to one of cyclic structure of plane formula coil 520, contact 539
It is directly connected to another cyclic structure of plane formula coil 520, rather than is connected by interconnecting piece 540.Plane in the present embodiment
Two cyclic structures of formula coil 520 equally have different current directions, scatter outward to avoid magnetic field.Compared to Fig. 4's
Embodiment after electric current enters plane formula coil 520 by any contact, can first flow through one whole in two cyclic structures,
Another cyclic structure is flow to via interconnecting piece 540 again.The time difference of this electric current makes the cyclic structure institute for first having current flowing
The magnetic field of generation can successfully with magnetic field coupling caused by another cyclic structure.It is learnt by experimental result, plane formula coil
520 magnetic field coupling effect improves the qualitative factor Q for helping and promoting plane formula coil 560 and plane formula coil 570.Therefore with figure
4 embodiment is compared, and the embodiment of Fig. 5 not only improves symmetry, also promotes qualitative factor Q.
Referring to Fig. 6, it is the structure of the plane type transformer of another embodiment according to the present invention.Plane type transformer
600 include plane formula coil 620, plane formula coil 660 and plane formula coil 670.It the contact 662 of plane formula coil 660 and connects
Point 664 forms transmission port 669 and the contact 672 and contact 674 of plane formula coil 670 form transmission port 679.Transmission port 669
The direction far from interconnecting piece 640 is respectively facing with transmission port 679.The online formation symmetry axis A- of transmission port 669 and transmission port 679
A ', plane formula coil 660 or plane formula coil 670 are symmetrical according to this symmetry axis A-A '.The advantages of designing in this way is plane formula
Coil 660 and plane formula coil 670 have better symmetry.More particularly, plane formula coil 660 and plane formula coil 670
Magnetic field coupling effect in the part close to interconnecting piece 640 is obvious.Though this coupling effect for plane formula coil 660 or
All it is for plane formula coil 670 symmetrical (being symmetrical with symmetry axis A-A ').Preferable symmetry help promoted its quality because
Plain Q.During this is implemented, though the contact 638 and contact 639 of plane formula coil 620 are set to one of ring of plane formula coil 620
In shape structure, however contact 638 and contact 639 can also be set to plane formula as Fig. 4 or embodiment shown in fig. 5
The middle position of coil 620.
Referring to Fig. 7, it is the structure of the balun of another embodiment according to the present invention.Balance is uneven
The converter 700 that weighs includes plane formula coil 720, plane formula coil 760 and plane formula coil 770.The transmission of plane formula coil 760
The transmission port 779 (being made of two contact) of port 769 (being made of two contact) and plane formula coil 770 court respectively
To interconnecting piece 740 (including metal wire sections 740-1 and metal wire sections 740-2).Similarly, the connection of transmission port 769 and transmission port 779
Machine forms symmetry axis (not shown), and whether plane formula coil 760 or plane formula coil 770 are all symmetrical with this symmetry axis.Plane
One of contact of formula coil 760 forms contact 782, plane after being connected with one of contact of plane formula coil 770
Another contact of formula coil 760 forms contact 784 after being connected with another contact of plane formula coil 770.In addition, plane
The center tap 766 of formula coil 760 can also be connect with the center tap 776 of plane formula coil 770.That is it is set such
It sets down, plane formula coil 760 is in parallel with 770 self-assembling formation of plane formula coil, so that plane formula coil 720 becomes balancedunbalanced
The uneven transmission end of converter 700, the become balancedunbalanced in parallel with plane formula coil 770 of plane formula coil 760 are converted
The balance transmission end of device 700.
Referring to Fig. 8, it is the structure of the balun of another embodiment according to the present invention.Balance is uneven
The converter 800 that weighs includes plane formula coil 820, plane formula coil 860 and plane formula coil 870.The transmission of plane formula coil 860
The transmission port 879 (being made of two contact) of port 869 (being made of two contact) and plane formula coil 870 court respectively
To the interconnecting piece of plane formula coil 820.In contrast to the embodiment of FIG. 7 this interconnecting piece is the structure of a cross-like.Transmission
The online formation symmetry axis (not shown) at port 869 and transmission port 879, whether plane formula coil 860 or plane formula coil 870 be all
It is symmetrical with this symmetry axis.One of contact of plane formula coil 860 is connected with one of contact of plane formula coil 870
Contact 882, shape after another contact of plane formula coil 860 is connected with another contact of plane formula coil 870 are formed afterwards
At contact 884.In addition, the center tap 866 of plane formula coil 860 can also connect with the center tap 876 of plane formula coil 870
It connects.That is under such arrangement, plane formula coil 860 is in parallel with 870 self-assembling formation of plane formula coil, so that plane formula
Coil 820 becomes the uneven transmission end of balun 800, plane formula coil 860 and plane formula coil 870 and
It is unified into the balance transmission end for balun 800.
Whether transformer or balun, when the inductance value of adjustment plane formula coil in need is reached
When the demand of impedance matching, can by by the metal wire sections of same plane formula coil side by side, with by improve metal wire sections between
Mutual inductance (mutual inductance) increase the inductance value of the plane formula coil.Referring to Fig. 9, it is increase of the present invention
The structure chart that one embodiment party of the inductance value of plane formula coil shows.Fig. 9 shows the partial structurtes of two plane formula coils, this two
Plane formula coil has least partially overlapped range.Metal wire sections 910 and metal wire sections 940 belong to a wherein plane formula line
Circle, metal wire sections 920 and metal wire sections 930 belong to another plane formula coil.930 adjacent row of metal wire sections 920 and metal wire sections
Column, metal wire sections of the centre not comprising other plane formula coils, therefore metal wire sections 920 have good with metal wire sections 930
Mutual inductance effect, help promoted its belonging to plane formula coil inductance value.In addition, one end of bridging metal wire sections 950 connects gold
Belong to line segment 910 (passing through connection structure 952), the other end connect metal wire sections 940 (passing through connection structure 954), among it across
The non-metal wire sections for belonging to coupled plane formula coil, that is, metal wire sections 920 and metal wire sections 930 not with metal wire sections
910 or metal wire sections 940 be connected.By the connection of bridging metal wire sections 950, belonging to metal wire sections 910 and metal wire sections 940
The inductance value of plane formula coil can reduce.By the design of Fig. 9, the inductance value of two plane formula coils can be further improved
Ratio, adjust impedance matching whereby.
Referring to Fig. 10, it is the section of the semiconductor structure of corresponding transformer of the invention or balun
Figure.It is oxide layer 1020 on substrate 1010.It include pattern ground protection layer (pattern-ground among oxide layer 1020
Shielding) 1022 and metal layer 1024.It is another metal layer 1030 on oxide layer 1020.Metal layer 1024 is, for example, half
Super thick metal layer in conductor processing procedure, metal layer 1030 are, for example, to reroute layer.In embodiment above-mentioned, with grey and striped table
The metal wire sections shown can be made in same metal layer, and can be made with the dotted metal wire sections (comprising bridging metal wire sections) indicated
In another metal layer.The most metal wire sections of namely three plane formula coils are all made in same metal layer.Other
Embodiment in, at least one of three plane formula coils can be made in different metal layers.However even if by helical form
There are two the plane formula coils of cyclic structure to be made in different metal layers from tool for the plane formula coil of inductance, still real between the two
There is the range of at least part overlapping in matter.Pattern ground protection layer 1022 can be avoided plane formula coil and substrate 1010 it
Between generate substrate loss, substrate loss the qualitative factor Q of plane formula coil can be made to decline.Connection structure 1040 i.e. represent Fig. 1~
The connection structure of black portions in Fig. 9, such as connection structure 136, connection structure 952,954.It note that even if three plane formulas
Coil is distributed in metal layer 1024 and metal layer 1030, and still using other metal layers in oxide layer 1020, (figure is not by the present invention
Show) make bridging metal wire sections.
Although plane formula coil and cyclic structure are by taking quadrangle as an example in the above embodiments, also it is possible to be other more
Side shape or circle.In addition, the circle number of plane formula coil is also not only restricted to the above embodiments.Before take off in icon, the shape of component
Shape, size and ratio etc. are only to illustrate, and are to understand the present invention for the art tool usually intellectual to be used, non-to limit
The system present invention.In addition, in be embodied as it is possible under the premise of, the art personage can disclosure under this invention and itself
Demand selectively implements some or all of any embodiment technical characteristic, or selectively implements a plurality of embodiments
The combination of part or all of technical characteristic increases the elasticity when present invention is implemented whereby.
Although the embodiment of the present invention is as described above, however those embodiments not are used to limit the present invention, this technology neck
The domain tool usually intellectual content that can express or imply according to the present invention imposes variation to technical characteristic of the invention, it is all this
Many variations may belong to patent protection scope sought by the present invention, and in other words, scope of patent protection of the invention must regard
Subject to the claim institute defender of this specification.
Symbol description
100,200,300,400,500,600 plane type transformer
120、160、170、220、260、270、320、360、370、420、460、470、520、560、570、620、660、
670,720,760,770,820,860,870 plane formula coil
125,165,175,225,265,275 coil
130,150 cyclic structure
132,134,142,144,166,168,322,324,326,910,920,930,940 metal wire sections
136,952,954,1040 connection structure
138、139、152、162、164、172、174、238、239、262、264、272、274、438、439、538、539、
638,639,662,664,672,674,782,784,882,884 contact
140,440,540,640,740 interconnecting piece
222,224,950 bridging metal wire sections
266,276,766,776,866,876 center tap
669,679,769,779,869,879 transmission port
700,800 balun
1010 substrates
1020 oxide layers
1022 pattern ground protection layers
1024,1030 metal layer
Claims (22)
1. a kind of plane type transformer structure, includes:
One first plane formula coil includes one first cyclic structure, one second cyclic structure and an interconnecting piece, the first cyclic annular knot
Structure and second cyclic structure are generally aligned in the same plane and are connected by the interconnecting piece；
One second plane formula coil, range and the range of first cyclic structure are be overlapped at least partially；
One third plane formula coil, range and the range of second cyclic structure are be overlapped at least partially；And
One bridging metal wire sections, both ends connection belong to first cyclic structure, second cyclic structure, the second plane formula line
One metal wire sections in circle and the third plane formula coil, intermediate portion is across one not be connected with the metal wire sections
Another metal wire sections；
Wherein, the first plane formula coil and the second plane formula coil or the third plane formula coil constitute a transformer.
2. plane type transformer structure according to claim 1, wherein the outmost turns of the first plane formula coil are located at should
Except second plane formula coil or the third plane formula coil.
3. plane type transformer structure according to claim 1, wherein the outmost turns of the first plane formula coil are located at should
Within second plane formula coil or the third plane formula coil.
4. plane type transformer structure according to claim 1, wherein the first plane formula coil has one first contact
And one second contact, first contact and second contact are directly connected to the interconnecting piece.
5. plane type transformer structure according to claim 1, wherein the first plane formula coil has one first contact
And one second contact, first contact and second contact are located at the middle section of the first plane formula coil, first contact
It is directly connected to first cyclic structure, which is directly connected to second cyclic structure.
6. plane type transformer structure according to claim 1, wherein the second plane formula coil has one first contact
And one second contact, first contact and second contact constitute one first transmission port, which has one the
Three contacts and one the 4th contact, the third contact and the 4th contact constitute one second transmission port, the second plane formula coil and
The third plane formula coil is respectively with the online for symmetrical axial symmetry of first transmission port and second transmission port.
7. plane type transformer structure according to claim 6, wherein first transmission port and the second transmission port direction
Direction far from the interconnecting piece.
8. plane type transformer structure according to claim 6, wherein first transmission port and the second transmission port direction
The interconnecting piece.
9. plane type transformer structure according to claim 1, wherein the second plane formula coil and the third plane formula
Coil is generally aligned in the same plane with the first plane formula coil.
10. plane type transformer structure according to claim 1, wherein the second plane formula coil and the third plane
At least one of formula coil is located at Different Plane with the first plane formula coil.
11. plane type transformer structure according to claim 1, wherein first cyclic structure, the second cyclic annular knot
A part of arranged adjacent of structure, the second plane formula coil and one metal wire sections in the third plane formula coil, and should
Other metal wire sections are not included between the metal wire sections of arranged adjacent.
12. plane type transformer structure according to claim 1, also includes:
One substrate；And
One pattern ground protection layer, is located at the substrate and the first plane formula coil, the second plane formula coil and the third are flat
Between the formula coil of face.
13. plane type transformer structure according to claim 1, wherein the electric current into first cyclic structure flows through
First cyclic structure is just left after all metal wire sections of first cyclic structure.
14. a kind of plane formula balun structure, includes:
One first plane formula coil includes one first cyclic structure, one second cyclic structure and an interconnecting piece, the first cyclic annular knot
Structure and second cyclic structure are generally aligned in the same plane and are connected by the interconnecting piece；
One second plane formula coil, range and the range of first cyclic structure are be overlapped at least partially, and have one
First contact and one second contact；
One third plane formula coil, range and the range of second cyclic structure are be overlapped at least partially, and have one
Third contact and one the 4th contact；And
One bridging metal wire sections, both ends connection belong to first cyclic structure, second cyclic structure, the second plane formula line
One metal wire sections in circle and the third plane formula coil, intermediate portion is across one not be connected with the metal wire sections
Another metal wire sections；
Wherein, which is connected with the third contact, which is connected with the 4th contact.
15. plane formula balun structure according to claim 14, wherein the first plane formula coil tool
There are one the 5th contact, one the 6th contact and one the 7th contact, the uneven transmission end packet of the one of the balun structure
First contact after being connected containing this and the third contact and second contact and the 4th contact after being connected, this is flat
One balance transmission end of the imbalance converter structure that weighs includes the 5th contact, the 6th contact and the 7th contact.
16. plane formula balun structure according to claim 14, wherein the second plane formula coil is also
Comprising one the 5th contact, which also includes one the 6th contact, and the 5th contact is connected with the 6th contact,
The first plane formula coil has one the 7th contact and one the 8th contact, and the one of the balun structure is uneven to be passed
Defeated end includes the 7th contact and the 8th contact, and a balance transmission end of the balun structure includes to be connected
First contact afterwards and the third contact, be connected after second contact and the 4th contact and after being connected this
Five contacts and the 6th contact.
17. plane formula balun structure according to claim 14, wherein the first plane formula coil tool
There are one the 5th contact and one the 6th contact, the 5th contact and the 6th contact are directly connected to the interconnecting piece.
18. plane formula balun structure according to claim 14, wherein the first plane formula coil tool
There are one the 5th contact and one the 6th contact, the 5th contact and the 6th contact are located at the middle part of the first plane formula coil
Point, the 5th contact is directly connected to first cyclic structure, and the 6th contact is directly connected to second cyclic structure.
19. plane formula balun structure according to claim 14, wherein first contact and this second
Contact constitutes one first transmission port of the second plane formula coil, and the third contact and the 4th contact constitute the third plane formula
One second transmission port of coil, the second plane formula coil and the third plane formula coil respectively with first transmission port and this
The online of two transmission ports is symmetrical axial symmetry.
20. plane formula balun structure according to claim 19, wherein first transmission port and this
Two transmission ports are directed away from the direction of the interconnecting piece.
21. plane formula balun structure according to claim 19, wherein first transmission port and this
Two transmission ports are towards the interconnecting piece.
22. plane formula balun structure according to claim 14, wherein enter first cyclic structure
Electric current flow through all metal wire sections of first cyclic structure after just leave first cyclic structure.
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| EP3712912B1 (en) * | 2017-12-27 | 2023-11-22 | Huawei Technologies Co., Ltd. | Oscillator system comprising a transformer |
| TWI643218B (en) | 2018-01-05 | 2018-12-01 | 瑞昱半導體股份有限公司 | Stacking inductor device |
| CN110033920B (en) * | 2018-01-11 | 2021-11-02 | 瑞昱半导体股份有限公司 | Stacked inductor device |
| CN110033921B (en) * | 2018-01-12 | 2021-09-14 | 瑞昱半导体股份有限公司 | Inductance device |
| CN110660556B (en) * | 2018-06-28 | 2021-11-12 | 瑞昱半导体股份有限公司 | Variable inductance device |
| US11569340B2 (en) | 2019-03-12 | 2023-01-31 | Analog Devices, Inc. | Fully symmetrical laterally coupled transformer for signal and power isolation |
| CN112448675B (en) * | 2019-08-27 | 2023-03-10 | 天津大学青岛海洋技术研究院 | Terahertz frequency band high-gain high-output power broadband power amplifier |
| CN113707422B (en) * | 2020-05-20 | 2023-09-08 | 瑞昱半导体股份有限公司 | Transformer device |
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