CN106686874A - Plasma dielectric barrier discharging circuit - Google Patents
Plasma dielectric barrier discharging circuit Download PDFInfo
- Publication number
- CN106686874A CN106686874A CN201710200832.1A CN201710200832A CN106686874A CN 106686874 A CN106686874 A CN 106686874A CN 201710200832 A CN201710200832 A CN 201710200832A CN 106686874 A CN106686874 A CN 106686874A
- Authority
- CN
- China
- Prior art keywords
- voltage
- electrode
- driving circuit
- plasma
- dielectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007599 discharging Methods 0.000 title claims abstract description 8
- 230000004888 barrier function Effects 0.000 title abstract 4
- 239000000956 alloy Substances 0.000 claims description 5
- 229910045601 alloy Inorganic materials 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 4
- 239000010445 mica Substances 0.000 claims description 4
- 229910052618 mica group Inorganic materials 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 abstract 1
- 210000002381 plasma Anatomy 0.000 description 14
- 238000005406 washing Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 206010044565 Tremor Diseases 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2418—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the electrodes being embedded in the dielectric
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/48—Generating plasma using an arc
Abstract
The invention discloses a plasma dielectric barrier discharging circuit. The plasma dielectric barrier discharging circuit comprises a dielectric plate and a high-voltage alternating current power supply driving circuit; a high-voltage electrode is arranged on one side surface of the dielectric plate while grounding electrodes are arranged on the other side surface of the dielectric plate; the high-voltage electrode is connected with the high-voltage output end of the high-voltage alternating current power supply driving circuit; the grounding electrodes are connected with the grounding end of the high-voltage alternating current power supply driving circuit; and the high-voltage alternating current power supply driving circuit is provided with a pulse width modulation module used for controlling high voltage output. The plasma dielectric barrier discharging circuit can generate plasma and can be applied to ionic industrial cleaning equipment.
Description
Technical field
The present invention relates to plasma medium block discharge circuit.
Background technology
Need to use ion industrial washing device in liquid crystal panel manufacture and flexible PCB manufacturing industry, ion industry is clear
The equipment of washing needs to design plasma medium block discharge circuit, to produce plasma.
The content of the invention
It is an object of the invention to provide a kind of plasma medium block discharge circuit, it can produce plasma, can
Apply on ion industrial washing device.
To achieve the above object, the technical scheme is that designing a kind of plasma medium block discharge circuit, including
Dielectric-slab and High Level AC Voltage source driving circuit；
One side surface of the dielectric-slab is provided with high-voltage electrode,
Another side surface of the dielectric-slab is provided with earth electrode；
The high-voltage electrode is connected with the high-voltage output end of High Level AC Voltage source driving circuit,
The earth electrode is connected with the earth terminal of High Level AC Voltage source driving circuit；
The High Level AC Voltage source driving circuit is provided with the pulse width modulation module of control High voltage output.
Preferably, the dielectric-slab is mica sheet.
Preferably, the high-voltage electrode and earth electrode are alloy sheet.
Preferably, the pulse width modulation module includes 555 timers for producing pulse signal.
Preferably, the pulse width modulation module includes the BUZ11 switching tubes switched as control High voltage output.
Preferably, the high-voltage electrode, dielectric-slab and earth electrode are under the driving of High Level AC Voltage source driving circuit
Plasma, discharge process is produced to occur in closed atmosphere body, discharging gap is 4mm.
The advantages of the present invention are：A kind of plasma medium block discharge circuit is provided, it can be produced
Plasma, can be applicable on ion industrial washing device.
The present invention, as medium, is placed on two panels alloy sheet using mica sheet, and this alloy sheet is exactly electrode, discharge process
Can occur in closed atmosphere body, High Level AC Voltage frequency is 30kHz upper and lower, discharging gap is that 4mm. plasmas are just being situated between
Matter surface generates.
The present invention can be used for plasma industrial washing device, have wide in liquid crystal panel manufacture and flexible PCB manufacturing industry
General application.
The characteristics of control frequency shakiness unstable instant invention overcomes many product high pressures of in the market.
The present invention can produce stabilization 10kv high pressures, and 15kHz frequency modulation(PFM).
Brief description of the drawings
Fig. 1 is the schematic diagram of High Level AC Voltage source driving circuit；
Fig. 2 is the schematic diagram of high-voltage electrode, dielectric-slab and earth electrode.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiment of the invention is further described.Following examples are only
For clearly illustrating technical scheme, and can not be limited the scope of the invention with this.
The present invention specific implementation technical scheme be：
As depicted in figs. 1 and 2, a kind of plasma medium block discharge circuit, including dielectric-slab 1 and high-voltage ac power drive electricity
Road；
One side surface of the dielectric-slab 1 is provided with high-voltage electrode 2,
Another side surface of the dielectric-slab 1 is provided with earth electrode 3；
The high-voltage electrode 2 is connected with the high-voltage output end of High Level AC Voltage source driving circuit,
The earth electrode 3 is connected with the earth terminal of High Level AC Voltage source driving circuit；
The High Level AC Voltage source driving circuit is provided with the pulse width modulation module of control High voltage output.
The dielectric-slab 1 is mica sheet.
The high-voltage electrode 2 and earth electrode 3 are alloy sheet.
The pulse width modulation module includes 555 timers for producing pulse signal.
The pulse width modulation module includes the BUZ11 switching tubes switched as control High voltage output.
The high-voltage electrode 2, dielectric-slab 1 and earth electrode 3 are produced under the driving of High Level AC Voltage source driving circuit
Plasma, discharge process occurs in closed atmosphere body, and discharging gap is 4mm.
The above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, on the premise of the technology of the present invention principle is not departed from, some improvements and modifications can also be made, these improvements and modifications
Also should be regarded as protection scope of the present invention.
Claims (6)
1. plasma medium block discharge circuit, it is characterised in that：
Including dielectric-slab and High Level AC Voltage source driving circuit；
One side surface of the dielectric-slab is provided with high-voltage electrode,
Another side surface of the dielectric-slab is provided with earth electrode；
The high-voltage electrode is connected with the high-voltage output end of High Level AC Voltage source driving circuit,
The earth electrode is connected with the earth terminal of High Level AC Voltage source driving circuit；
The High Level AC Voltage source driving circuit is provided with the pulse width modulation module of control High voltage output.
2. plasma medium block discharge circuit according to claim 1, it is characterised in that the dielectric-slab is mica
Piece.
3. plasma medium block discharge circuit according to claim 2, it is characterised in that the high-voltage electrode and connect
Ground electrode is alloy sheet.
4. plasma medium block discharge circuit according to claim 3, it is characterised in that the pulse width modulation module bag
Include 555 timers for producing pulse signal.
5. plasma medium block discharge circuit according to claim 4, it is characterised in that the pulse width modulation module bag
Include the BUZ11 switching tubes switched as control High voltage output.
6. plasma medium block discharge circuit according to claim 5, it is characterised in that the high-voltage electrode, Jie
Scutum and earth electrode produce plasma, discharge process to occur big in closing under the driving of High Level AC Voltage source driving circuit
In gas, discharging gap is 4mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710200832.1A CN106686874A (en) | 2017-03-30 | 2017-03-30 | Plasma dielectric barrier discharging circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710200832.1A CN106686874A (en) | 2017-03-30 | 2017-03-30 | Plasma dielectric barrier discharging circuit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106686874A true CN106686874A (en) | 2017-05-17 |
Family
ID=58829377
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710200832.1A Pending CN106686874A (en) | 2017-03-30 | 2017-03-30 | Plasma dielectric barrier discharging circuit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106686874A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1937879A (en) * | 2006-08-14 | 2007-03-28 | 成都理工大学 | Digital low power consumption high-precision high voltage generator |
| CN102162644A (en) * | 2010-02-24 | 2011-08-24 | 中国科学院工程热物理研究所 | Dielectric barrier discharge plasma swirling device |
| CN102307044A (en) * | 2011-09-14 | 2012-01-04 | 深圳航天科技创新研究院 | Switching power supply PWM (pulse width modulation) controller with variable frequencies |
| CN102595758A (en) * | 2011-01-12 | 2012-07-18 | 中国科学院工程热物理研究所 | Dielectric barrier discharge (DBD) plasma trailing edge jetting device and method |
| CN103118467A (en) * | 2013-02-18 | 2013-05-22 | 盐城工学院 | High-power LED constant current driving circuit and parameter algorithm thereof |
| CN103485992A (en) * | 2013-10-14 | 2014-01-01 | 上海交通大学 | Controllable plasma propulsion device working under atmospheric pressure |
| CN104601033A (en) * | 2015-02-06 | 2015-05-06 | 中国人民解放军信息工程大学 | High-voltage pulse type magnetron power source |
| CN206640853U (en) * | 2017-03-30 | 2017-11-14 | 苏州普斯玛特精密科技有限公司 | Plasma medium block discharge circuit |
-
2017
- 2017-03-30 CN CN201710200832.1A patent/CN106686874A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1937879A (en) * | 2006-08-14 | 2007-03-28 | 成都理工大学 | Digital low power consumption high-precision high voltage generator |
| CN102162644A (en) * | 2010-02-24 | 2011-08-24 | 中国科学院工程热物理研究所 | Dielectric barrier discharge plasma swirling device |
| CN102595758A (en) * | 2011-01-12 | 2012-07-18 | 中国科学院工程热物理研究所 | Dielectric barrier discharge (DBD) plasma trailing edge jetting device and method |
| CN102307044A (en) * | 2011-09-14 | 2012-01-04 | 深圳航天科技创新研究院 | Switching power supply PWM (pulse width modulation) controller with variable frequencies |
| CN103118467A (en) * | 2013-02-18 | 2013-05-22 | 盐城工学院 | High-power LED constant current driving circuit and parameter algorithm thereof |
| CN103485992A (en) * | 2013-10-14 | 2014-01-01 | 上海交通大学 | Controllable plasma propulsion device working under atmospheric pressure |
| CN104601033A (en) * | 2015-02-06 | 2015-05-06 | 中国人民解放军信息工程大学 | High-voltage pulse type magnetron power source |
| CN206640853U (en) * | 2017-03-30 | 2017-11-14 | 苏州普斯玛特精密科技有限公司 | Plasma medium block discharge circuit |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20170922 Address after: Kunshan Dianshan Lake Town City Suzhou city Jiangsu province 215300 000 Road No. 66 building 203 room A06 Applicant after: SUZHOU PUSIMATE PRECISION TECHNOLOGY CO.,LTD. Address before: 11 Innovation Park No. 215500 Jiangsu city of Suzhou province Changshu economic and Technological Development Zone Applicant before: SUZHOU PLASMA PRECISION TECHNOLOGY CO.,LTD. |
|
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170517 |