CN106681081A - Efficient and nonlinear light polarization modulator based on metasurface and two-dimensional material and preparation method thereof - Google Patents
Efficient and nonlinear light polarization modulator based on metasurface and two-dimensional material and preparation method thereof Download PDFInfo
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- CN106681081A CN106681081A CN201710137988.XA CN201710137988A CN106681081A CN 106681081 A CN106681081 A CN 106681081A CN 201710137988 A CN201710137988 A CN 201710137988A CN 106681081 A CN106681081 A CN 106681081A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/002—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/355—Non-linear optics characterised by the materials used
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/37—Non-linear optics for second-harmonic generation
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Abstract
The invention discloses an efficient and nonlinear light polarization modulator based on a metasurface and a two-dimensional material and a preparation method thereof. The efficient and nonlinear light polarization modulator comprises a metal nanopore array located in a lower layer and the single-layer two-dimensional material located in an upper layer. A focused ion beam etching method is utilized to process a complete metal nano film so as to obtain a triangular nanopore array. The single-layer two-dimensional material is transferred to the surface of the nanopore array by adopting a hydrofluoric acid corrosion method so as to obtain the single-layer two-dimensional material and metal nanopore array compounded metasurface. By utilizing the compounded metasurface, second harmonic polarization direction for emergence can be modulated. Circularly polarized base-frequency incident light can produce oppositely and circularly polarized and frequency-multiplied emergent light, linearly polarized base-frequency incident light with a polarizing angle of theta can produce linearly polarized base-frequency emergent light with a polarizing angle of 2theta. In addition, compared with a traditional metal metasurface, the conversion efficiency is improved by about two magnitude orders. The efficient and nonlinear light polarization modulator is small in size, simple in structure and high in integration level.
Description
Technical field
The present invention relates to nanophotonics technical field, and in particular to a kind of efficient non-thread based on super surface two-dimensional material
Property light polarization modulator and preparation method thereof.
Background technology
, used as a kind of new manufactured nanamaterials, its minimum structural unit is similar to the atom in traditional material for Meta Materials
And molecule.By the shape and their arrangement that control minimum structural unit, Meta Materials can produce traditional material and chemistry conjunction
Into the physical property not available for material.In recent years, people are again reduced the bulk of Meta Materials, have prepared two dimension
Nano-structure array, here it is the super surface often said.The size of nanostructured, shape and arrangement in by changing super surface,
Many absorbing phenomenons and application, such as abnormal reflection and transmission, micronano optical slide and complicated light beam can be realized
Produce etc..At present, nonlinear Meta Materials and super surface have caused the concern of scientific circles.Control therein non-linear defeated
Go out to bring a brand-new basic research field, and for efficient, active, ultra-compact nonlinear optics integrated device
Development provides help.
Have document report one kind and second harmonic light polarization modulation is realized based on the super surface of metal.The structure is only included
Golden Triangle nanohole array, nano-pore arrangement mode is six sides arrangement.Super surface inspires under femtosecond laser vertical incidence
Second harmonic.The polarization angle of the polarization angle of outgoing second harmonic and incident fundamental frequency light is presented -2 times of relation.But due to
The golden low nonlinearity conversion efficiency of itself and its inherent absorption to visible ray in the structure, and triangular nano hole resonance peak
The mismatch with lambda1-wavelength is put, causes the second harmonic efficiency of structure very low, this limits it in optical integrated device significantly
In use.
Two-dimensional material refer to electronics only can on the non-nanosize (1-100nm) of two dimensions free movement (plane transport
It is dynamic) material, including Graphene, boron nitride BN, transient metal sulfide (MoS2、WS2、MoSe2、WSe2、Bi2Te3) and black phosphorus P
Etc..At present, two-dimensional material has extensive research in optics and Condensed Matter Physics field.Experiment shows that transition metal vulcanizes
Thing is a kind of excellent second harmonic luminescent material, exists only in the middle of odd-level and efficiency is most strong in monolayer.
The content of the invention
For the defect of prior art, it is an object of the invention to provide a kind of based on the efficient of super surface and two-dimensional material
Nonlinear optical light polarization modulator, it is intended to which the second harmonic efficiency for solving second harmonic light polarization modulation structure in prior art is low
Technical problem.
The invention provides it is a kind of based on super surface and the efficient non-linear light polarization modulator of two-dimensional material, including：Position
Metal nano hole array in lower floor and the monolayer two-dimensional material positioned at upper strata；Exciting light vertical incidence is to metal nano-void battle array
Row, and then act on outgoing frequency multiplication optical signal in two-dimensional material；Exciting light to be acted on and cause local fields in metal nano hole array
Enhancement effect, so as to cause the enhancing of two-dimensional material outgoing frequency multiplication optical signal；Exciting light is acted on and drawn in metal nano hole array
The near field distribution for playing outgoing changes, so as to cause the change of the second harmonic polarization direction of two-dimensional material outgoing.
Further, metal nano hole array has the unit of multiple periodic arrangements, and each unit is using with three
The nano-pore structure of fold rotational symmetry.
Further, the construction unit material of nanohole array is gold or silver；The thickness of thin film be 30nm~
200nm；The length of side of construction unit is 200nm~300nm；The cycle of construction unit is 300nm~500nm；Monolayer two-dimensional material
Thickness be 0.7nm.
Further, the cycle arrangement of nanohole array is unrestricted, and random two-dimensional spatial arrangement can realize this work(
Energy.
Further, two-dimensional material is the transient metal sulfide of monolayer.
Further, exciting light is first acted in metal nano hole array, and the frequency multiplication optical signal that two-dimensional material is produced is adopted
Collected with the mode of transmission.
Present invention also offers a kind of method for preparing above-mentioned efficient non-linear light polarization modulator, including following steps
Suddenly：
(1) deposited by electron beam evaporation plates on a quartz substrate layer of metal nano thin-film；
(2) nanohole array of triangle is carved on the metal nanometer thin film by focused-ion-beam lithography；
(3) the monolayer two-dimensional material that chemical vapour deposition technique grows is transferred on the metal nanometer thin film, and makes it
It is covered on the triangle nanohole array surface and forms the efficient non-linear light polarization modulator.
Further, in step (1), the thickness of metal nanometer thin film is 30nm~200nm.
Further, in step (2), the nanohole array intermediate cam shape length of side is 200nm~300nm, described
The cycle of nano-pore is 300nm~500nm in nanohole array.
Further, in step (3), facula area of the area coverage more than incident illumination.
In the present invention, exciting light vertical incidence acts on outgoing frequency multiplication in two-dimensional material to metal nano hole array
Optical signal, substitutes inefficient metal Nano structure and serves as non-linear Jie using the monolayer two-dimensional material of high non-linearity conversion efficiency
Matter, can solve the inefficient shortcoming of metal Nano structure device from root；Exciting light is acted in metal nano hole array,
Due to the distinctive local surface plasma resonance property of metal Nano structure, can be attached in body structure surface by incident illumination local
Closely, and then the effect between incident illumination and monolayer two-dimensional material can be strengthened, so as to cause two-dimensional material outgoing frequency multiplication optical signal
Enhancing, this can further improve the efficiency of overall nonlinear optical light polarization modulator；Exciting light acts on metal nano-void battle array
On row, cause the light near field distribution through metal Nano structure to change, and then act in two-dimensional material, due to monolayer two dimension material
The crystal structure of material has D3h symmetry, and this can cause the second harmonic polarization direction of two-dimensional material outgoing to change, from
And reach the purpose of the second harmonic polarization of modulation outgoing；The thickness of monolayer two-dimensional material is only 0.7nm, and this is ideally remained
Integrally-built compactedness.
The present invention adopt simply metal nano hole array overlying lid a layer thickness for 0.7nm monolayer two-dimensional material,
Inefficient metal Nano structure is substituted by the monolayer two-dimensional material with high non-linearity conversion efficiency and serves as nonlinear dielectric, with
And using the Localized field enhancement effect and near field regulating and controlling effect of metal nano hole array, remaining, the triple rotations of overall structure are right
Outside the effect of the nolinear modulation that title property reaches, the performance of such nonlinear optical light polarization modulator is substantially increased.It is overall
Physical dimension is little, and processing technology is simple, under conditions of its structural compactness is not destroyed, can improve in fact with material extensively
Border usable value.
Description of the drawings
Fig. 1 is the structural representation of efficient micro-nano nonlinear optical light polarization modulator of the invention；
Fig. 2 is the scanning electron microscope SEM figure of efficient micro-nano nonlinear optical light polarization modulator of the invention, and scale is
1um；
Fig. 3 is transmitted spectrum that efficient micro-nano nonlinear optical light polarization modulator experiment of the invention is measured and simulation calculation
Figure；
Fig. 4 is the second harmonic and traditional metal that efficient micro-nano nonlinear optical light polarization modulator experiment of the invention is measured
The conversion efficiency of second harmonic comparison diagram that array is measured；
Fig. 5 is that efficient micro-nano nonlinear optical light polarization modulator of the invention tests the outgoing second harmonic for measuring in left-handed circle
(a) and the corresponding Polarization Modulation figure of (b) difference under right-hand circular polarization fundamental frequency light action under polarization fundamental frequency light action；
Fig. 6 be micro-nano nonlinear optical light polarization modulator experiment of the invention efficient measure under the effect of linear polarization fundamental frequency light
The second harmonic polarization direction analysis chart of outgoing；
Fig. 7 is that the second harmonic of the outgoing that efficient micro-nano nonlinear optical light polarization modulator experiment of the invention is measured is inclined online
The Polarization Modulation figure shaken under fundamental frequency light action；
Fig. 8 is the present invention efficient micro-nano nonlinear optical light polarization modulator outgoing that (a) experiment is measured under six sides arrangement
Second harmonic polarization direction and the fundamental frequency light polarization direction of incidence graph of a relation (b), and under the arrangement for gradually rotating (c)
The second harmonic polarization direction of the outgoing that experiment is measured and the graph of a relation (d) of the fundamental frequency light polarization direction of incidence, rectangle frame mark
For in a cycle delthyrium nanostructured arrange, scale is 500nm.
Specific embodiment
In order that the objects, technical solutions and advantages of the present invention become more apparent, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that specific embodiment described herein is only to explain the present invention, and
It is not used in the restriction present invention.
The present invention proposes a kind of nonlinear optical light polarization modulator, and it consists of metal nano-void and monolayer two-dimensional material
The super surface texture being composited.Using the high conversion efficiency of second harmonic of monolayer two-dimensional material, it is replaced tradition poorly efficient by we
The metal Nano structure of rate which greatly enhances the effect of overall nonlinear optical light polarization modulator as the medium of non-linear conversion
Rate.The distinctive local surface plasma resonance property of metal nano hole array is utilized simultaneously, can be by incident illumination local in knot
Structure near surface, and then the effect between incident illumination and monolayer two-dimensional material can be strengthened, it is non-that this can further reach raising
The purpose of linear efficiency.And because the crystal structure of monolayer two-dimensional material used has D3hSymmetry, by it and triangle
The super surface texture that is composited of nano-pore, it is then this to be combined super surface and remain still with triple rotational symmetries
The effect of traditional nonlinear optical Polarization Modulation.The frequency doubled light of opposite circular polarization can be produced under the incidence of circularly polarized fundamental frequency light
Outgoing, and can produce the linear polarization frequency doubled light that the angle of polarization is -2 θ and go out in the case where the angle of polarization is for the linear polarization fundamental frequency light incidence of θ
Penetrate.The monolayer two-dimensional material for being about 0.7nm by simple covering a layer thickness substantially increases traditional nonlinear optical polarization and adjusts
The performance of device processed, under conditions of its structural compactness is not destroyed, improves its actual availability.Simultaneously it is also a kind of efficient
Micro-nano nonlinear optical light polarization modulator.
The micro-nano nonlinear optical light polarization modulator of the present invention includes following structure：Lower floor be metal nano hole array, upper strata
For the two-dimensional material of monolayer；Exciting light vertical incidence acts on outgoing frequency multiplication in two-dimensional material to metal nano hole array
Optical signal；Exciting light is acted in metal nano hole array, causes Localized field enhancement effect, so as to cause outgoing frequency multiplication optical signal
Enhancing；Exciting light is acted in metal nano hole array, and the near field distribution for causing outgoing fundamental frequency light changes, and acts on then
The second harmonic polarization direction for causing outgoing in monolayer two-dimensional material changes.
Metal nano-void array has the unit of multiple periodic arrangements, and each unit is using with triple rotational symmetries
Nano-pore structure.The construction unit material of nanohole array selects gold or silver；The thickness of thin film 30nm~200nm it
Between；The cycle of construction unit is between 300nm~500nm.
Two-dimensional material is transient metal sulfide, such as tungsten disulfide WS2, molybdenum bisuphide MoS2, two selenizing molybdenum MoSe2, two selenium
Change tungsten WSe2One kind therein.Two-dimensional material must be monolayer.
The present invention based on super surface and the preparation method of the efficient non-linear light polarization modulator of two-dimensional material, including with
Lower step：
(1) deposited by electron beam evaporation plates one layer of uniform metal nanometer thin film in clean quartz substrate, and evaporation rate is little
In 1 angstroms per second, final film thickness is between 30nm~200nm；
(2) nanohole array of triangle, focused ion beam are carved on thin film by the method for focused-ion-beam lithography
High pressure used is 30kV, and line is 6.9pA, and the etch thicknesses arranged during etching need to be slightly larger than the thickness of thin film, it is ensured that thin film
Can be cut through, between 200nm~300nm, the cycle of nano-pore is between 300nm~500nm for the triangle length of side of etching；
(3) method corroded using Fluohydric acid., monolayer two dimension chemical vapour deposition technique being grown in sapphire substrates
Material is transferred on PMMA (polymethyl methacrylate) thin film；Again metallic film is pressed in into PMMA thin film has the one of two-dimensional material
Face, is adsorbed two-dimensional material on metallic film using intermolecular force；Take metallic film, two-dimentional material off from PMMA thin film
Material can be covered on triangle nano-array surface, and facula area of the area coverage more than incident illumination is required in theory.
For the further description present invention, in conjunction with accompanying drawing and instantiation, details are as follows：
The efficient micro-nano nonlinear optical light polarization modulator that the present invention is improved, comprises the following steps：
(1) as shown in figure 1, plating gold nano of a layer thickness for 60nm on a quartz substrate first with electron beam evaporation gold
Thin film, adds the chromium of 5nm as adhesion layer between quartz substrate and gold nanometer film, then use poly- above gold nanometer film
Pyrophosphate ion Shu Fangfa processes the nanohole array of triangle, and the length of side of triangle is 250nm, and array period is 350nm, whole battle array
The size of row is 15um*15um；Followed by the method for Fluohydric acid. corrosion, chemical vapour deposition technique is grown in into sapphire substrates
On monolayer two-dimensional material be transferred on PMMA (polymethyl methacrylate) thin film, then by the metal foil mould for preparing before
Have in the one side of two-dimensional material in PMMA thin film, adsorbed two-dimensional material on metallic film, subsequently using intermolecular force
Take metal film sample off from PMMA thin film, two-dimensional material is covered on triangle nano-array surface, requires in theory
Facula area of the area coverage more than incident illumination.The structure for finally preparing as shown in the SEM figures in Fig. 2, black line mark
Darker regions are two-dimensional materials WS of monolayer2, bottom is the gold nano hole array of triangle, it is seen that monolayer two-dimensional material WS2It is smooth
Be covered on triangle nanohole array；
(2) linear microcell transmitted spectrum sign, the transmitted spectrum for measuring and simulation calculation are carried out to prepared structure
Transmitted spectrum as shown in figure 3, its transmission peak position is located at the wavelength 820nm places of incident fundamental frequency light, now tie by triangle nano-pore
Structure and incident illumination resonate, and can strengthen incident illumination and two dimension effectively by incident field local in triangle nano-pore
Material WS2Between interaction, so as to improve the second harmonic efficiency of final outgoing.
(3) second harmonic strength test is carried out to prepared structure using femtosecond laser, wavelength swashs for the femtosecond of 820nm
Light is focused on sample by 40 times of object lens, and the second harmonic of outgoing is collected by another identical object lens, finally
Reaching photomultiplier tube carries out second harmonic strength test.By prepared device with traditional Golden Triangle shape nano-array in phase
Same incident illumination is excited down and carries out second harmonic intensity contrast, as a result as shown in figure 4, the second harmonic intensity of its outgoing compares
Nearly two orders of magnitude are improve in traditional Golden Triangle shape nano-array, it was demonstrated that using the monolayer two dimension of high non-linearity conversion efficiency
Material WS2Substitute inefficient metal Nano structure and serve as nonlinear dielectric, can allow the non-of such nonlinear polarization manipulator
Linear transformation efficiency is greatly lifted；
(4) test of second harmonic circular polarization modulation effect is carried out to prepared structure with femtosecond laser, by half-wave plate
With the circular polarization state that a quarter slide can adjust incident fundamental frequency light, shown in final result such as Fig. 5 (a), in Left-hand circular polarization
Under the lower outgoing of fundamental frequency light (LCP) effect be right-hand circular polarization second harmonic (RCP), while as shown in Fig. 5 (b), on the right side
What the fundamental frequency light (RCP) under rounding polarization acted on lower outgoing is the second harmonic (LCP) of Left-hand circular polarization, it is seen that add crystal
Structure is D3hSymmetric monolayer two-dimensional material is not result in that circular polarization modulation is special on the basis of non-linear efficiency conversion is improved
The disappearance of property；
(5) test of second harmonic linear polarization modulation effect is carried out to prepared structure with femtosecond laser, in linear polarization
Under fundamental frequency light action under measure the second harmonic polarization state of outgoing, as a result as shown in Figure 6, it is seen that the second harmonic of outgoing is also
Linear polarization；The linear polarization of incident fundamental frequency light can be adjusted by half-wave plate, by changing incident fundamental frequency light polarization
Direction can regulate and control the second harmonic polarization direction of outgoing, as a result as shown in fig. 7, the fundamental frequency light change of polarized direction of incidence one
Angle, θ, the second harmonic polarization angle that can cause outgoing changes -2 θ, it is seen that add crystal structure for D3hSymmetric list
Layer two-dimensional material still remains the characteristic of linear polarization modulation on the basis of non-linear efficiency conversion is improved；
(6) when processing the nanohole array of Golden Triangle shape with focussed ion beam methods, the row of metal nano hole array is changed
Mode for cloth, respectively obtains triangle nano-pore that is six sides arrangement and gradually rotating arrangement, shown in such as Fig. 8 (a) and (c), repeats
Above sample is processed and the test of linear polarization modulation effect, can obtain identical result, respectively as shown in Fig. 8 (b) and (d), card
Bright this nonlinear polarization manipulator is not only restricted to the arrangement mode of metal nano hole array, and this potential this nonlinear optical of explanation is polarized
Manipulator can be realized in single triangle nano-pore, such that it is able to be substantially reduced its working volume.
In the embodiment of the present invention, efficient non-linear light polarization modulator structure includes：Substrate is vitreous silica substrate；Gold nano
Film thickness is 60nm, and 5nm chromium is added between gold thin film and quartz substrate as adhesion layer；Triangle nano-pore is shaped as equilateral
Triangle, the length of side is 250nm, and array period is 350nm；Two-dimensional material is the tungsten disulfide WS of monolayer2.The incident fundamental frequency light
For the femtosecond laser oscillator stage of wavelength 820nm, pulsewidth is 50fs, and repetition rate is 80MHz.
As it will be easily appreciated by one skilled in the art that the foregoing is only presently preferred embodiments of the present invention, not to
The present invention, all any modification, equivalent and improvement made within the spirit and principles in the present invention etc. are limited, all should be included
Within protection scope of the present invention.
Claims (10)
1. it is a kind of based on super surface and the efficient non-linear light polarization modulator of two-dimensional material, it is characterised in that to include：It is located at down
The metal nano hole array (1) and the monolayer two-dimensional material (2) positioned at upper strata of layer；Exciting light vertical incidence is to metal nano-void battle array
Row (1), and then act on outgoing frequency multiplication optical signal in two-dimensional material (2)；Exciting light is acted on and drawn in metal nano hole array (1)
Local fields enhancement effect is played, so as to cause the enhancing of two-dimensional material (2) outgoing frequency multiplication optical signal；Exciting light acts on metal nano
The near field distribution for causing outgoing in hole array (1) changes, so as to cause the second harmonic polarization direction of two-dimensional material (2) outgoing
Change.
2. efficient non-linear light polarization modulator as claimed in claim 1, it is characterised in that the metal nano hole array
(1) with the unit of multiple periodic arrangements, each unit is using the nano-pore structure with triple rotational symmetries.
3. efficient non-linear light polarization modulator as claimed in claim 2, it is characterised in that the nanohole array (1)
Construction unit material is gold or silver；The thickness of thin film is 30nm~200nm；The length of side of construction unit is 200nm~300nm；
The cycle of construction unit is 300nm~500nm；The thickness of monolayer two-dimensional material (2) is 0.7nm.
4. efficient non-linear light polarization modulator as claimed in claim 2, it is characterised in that the nanohole array (1)
Cycle arrangement is unrestricted, and random two-dimensional spatial arrangement can realize this function.
5. efficient non-linear light polarization modulator as claimed in claim 1, it is characterised in that the two-dimensional material (2) is single
The transient metal sulfide of layer.
6. the efficient non-linear light polarization modulator as described in any one of claim 1-5, it is characterised in that exciting light is first acted on
In metal nano hole array (1), the frequency multiplication optical signal that two-dimensional material (2) is produced is collected by the way of transmission.
7. a kind of method of the efficient non-linear light polarization modulator prepared described in claim 1, it is characterised in that including following
Step：
S1：Deposited by electron beam evaporation plates on a quartz substrate layer of metal nano thin-film；
S2：The nanohole array of triangle is carved on the metal nanometer thin film by focused-ion-beam lithography；
S3：The monolayer two-dimensional material that chemical vapour deposition technique grows is transferred on the metal nanometer thin film, and covers it
The efficient non-linear light polarization modulator is formed on the triangle nanohole array surface.
8. method as claimed in claim 7, it is characterised in that in step sl, the thickness of metal nanometer thin film be 30nm~
200nm。
9. method as claimed in claim 7 or 8, it is characterised in that in step s 2, the nanohole array intermediate cam shape side
A length of 200nm~300nm, the cycle of nano-pore is 300nm~500nm in the nanohole array.
10. the method as described in any one of claim 7-9, it is characterised in that in step s3, area coverage is more than incident illumination
Facula area.
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