CN106679217B - Mechanical vibration isolation liquid helium recondensation low-temperature refrigeration system - Google Patents

Mechanical vibration isolation liquid helium recondensation low-temperature refrigeration system Download PDF

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CN106679217B
CN106679217B CN201611170525.5A CN201611170525A CN106679217B CN 106679217 B CN106679217 B CN 106679217B CN 201611170525 A CN201611170525 A CN 201611170525A CN 106679217 B CN106679217 B CN 106679217B
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temperature
refrigeration
liquid helium
vibration isolation
helium
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CN106679217A (en
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吴施伟
周盛予
孙泽元
张帅
黄迪
殷立峰
高春雷
沈健
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Fudan University
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Fudan University
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Priority to PCT/CN2017/082517 priority patent/WO2018107643A1/en
Priority to US16/075,515 priority patent/US20190063790A1/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B49/00—Arrangement or mounting of control or safety devices
    • F25B49/02—Arrangement or mounting of control or safety devices for compression type machines, plants or systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00—Gas cycle refrigeration machines
    • F25B2309/14—Compression machines, plants or systems characterised by the cycle used 
    • F25B2309/1428—Control of a Stirling refrigeration machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2500/00—Problems to be solved
    • F25B2500/13—Vibrations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2700/00—Sensing or detecting of parameters; Sensors therefor
    • F25B2700/04—Refrigerant level
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2700/00—Sensing or detecting of parameters; Sensors therefor
    • F25B2700/21—Temperatures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2700/00—Sensing or detecting of parameters; Sensors therefor
    • F25B2700/21—Temperatures
    • F25B2700/2116—Temperatures of a condenser

Abstract

The invention belongs to the technical field of low-temperature refrigeration equipment, and particularly relates to a mechanical vibration isolation liquid helium recondensation low-temperature refrigeration system. The system of the invention comprises: a closed-cycle refrigerator system, a liquid helium recondensation refrigeration vibration isolation system and a temperature feedback control system. The invention uses a closed-cycle refrigerator system to achieve low temperatures as low as 4.2K with almost no helium and liquid helium consumption. The invention generates and maintains the liquid helium through the liquid helium recondensation refrigeration vibration isolation system, thereby not only effectively isolating the low-frequency vibration generated during the operation of the closed-cycle refrigerator, but also solving the problem of large temperature fluctuation of the traditional closed-cycle refrigerator. The invention can not only control the liquid level of the liquid helium generated by recondensation through the temperature feedback control system, but also realize temperature change regulation and control. The invention is suitable for the ultrahigh vacuum environment needing high-temperature baking.

Description

Mechanical vibration isolation liquid helium recondensation low-temperature refrigeration system
Technical Field
The invention belongs to the technical field of low-temperature refrigeration equipment, and particularly relates to a mechanical vibration isolation liquid helium recondensation low-temperature refrigeration system.
Background
The low-temperature environment refers to an environment at a temperature lower than-180 ℃ (93.15K), and has important application in the fields of physics, chemistry, materials, biology, national defense, information and the like. With the development of science and technology, advanced and sophisticated scientific research and technical applications require not only an environment close to a very low temperature (4.2K), but also a low vibration and ultra-high vacuum environment. At present, most of low-temperature refrigeration equipment meeting the indexes needs liquid helium which is scarce in resource and expensive, and the operation cost is higher. In order to get rid of the extreme dependence of cryogenic refrigeration equipment on liquid helium, there has recently been a mechanically vibration-isolated liquid helium-free cryogenic refrigeration system (ZL 201610002349.8). The low-temperature refrigeration system adopts the closed-cycle refrigerator without liquid helium consumption to refrigerate, and solves the problem that the traditional low-temperature equipment consumes a large amount of liquid helium; helium heat exchange gas is used as a heat conducting medium, so that the vibration of the refrigerating machine can be effectively isolated while refrigeration and temperature reduction are realized. However, the working principle of the closed-cycle refrigerator causes the periodic variation of the refrigeration power, and the refrigeration vibration isolation technology of helium heat exchange gas still has the limitations of low refrigeration power, large temperature fluctuation and the like on a vibration isolation interface. These reasons result in a cryogenic refrigeration system that consumes no liquid helium and still has lower refrigeration efficiency and lower temperature stability than a cryogenic refrigeration system that consumes liquid helium. It is of great interest to develop a cryogenic refrigeration system that consumes little liquid helium with high temperature stability and mechanical vibration isolation.
Disclosure of Invention
The invention aims to provide a low-temperature refrigeration system which is isolated by mechanical vibration, small in temperature fluctuation, high in refrigeration power and almost free of helium and liquid helium consumption, namely a liquid helium recondensing low-temperature refrigeration system isolated by mechanical vibration. The system can be operated in a low vibration environment and an ultrahigh vacuum environment.
The invention provides a mechanical vibration isolated liquid helium recondensation low-temperature refrigeration system, which comprises: a closed-cycle refrigerator system, a liquid helium recondensation refrigeration vibration isolation system and a temperature feedback control system. Wherein the closed cycle chiller system comprises: the system comprises a refrigeration head, a compressor and a helium gas conveying pipeline for connecting the compressor and the refrigeration head; the liquid helium recondensation refrigeration vibration isolation system comprises: a refrigeration vibration isolation interface, helium heat exchange gas, liquid helium generated by recondensation, soft rubber for sealing helium and isolating vibration and the like; the temperature feedback control system consists of a temperature measuring element, a heating element and a feedback temperature control circuit.
In the liquid helium recondensation refrigeration vibration isolation system, a refrigeration head of a closed-cycle refrigerator extends into a refrigeration vibration isolation interface, and helium heat exchange gas is filled between the refrigeration head and the refrigeration vibration isolation interface to serve as a refrigeration cooling medium; the soft rubber is connected with the upper end of the sealed refrigeration vibration isolation interface and the refrigeration head, and the low-frequency mechanical vibration of the refrigeration head can be isolated while helium gas is sealed for heat exchange and air exchange; because the temperature of the lowest temperature end of the refrigerating head is lower than 4.2K, helium heat exchange gas is condensed again in the refrigerating and vibration isolating interface to form liquid helium. The liquid helium formed by recondensation has larger latent heat, and the heat exchange capacity of a refrigerating head and a refrigerating vibration isolation interface is greatly improved, so that the mechanical vibration isolation liquid helium recondensation low-temperature refrigerating system provided by the invention has excellent refrigerating capacity and temperature stability while obtaining a low-temperature low-vibration environment.
In the temperature feedback control system, the heating element is arranged at the low-temperature end of the refrigeration vibration isolation interface, and the temperature measuring element is arranged on the refrigeration vibration isolation interface and covers the liquid level height of the liquid helium formed by recondensation in the height direction. The temperature measuring element is used for indirectly measuring the liquid level height of the liquid helium formed by recondensation, and the feedback temperature control circuit is used for controlling the output power of the heating element. The height of the liquid level of the liquid helium can be adjusted through the temperature feedback control system, and vibration caused by direct contact of the liquid level of the liquid helium and the refrigeration head is avoided; the temperature feedback control system can also achieve a wide range of temperature changes.
In the invention, a thermal radiation shielding cover can be arranged on the refrigeration vibration isolation interface and is used for shielding heat leakage caused by high-temperature radiation.
In order to make the mechanical vibration isolated liquid helium recondensing low-temperature refrigeration system provided by the invention compatible with the high-temperature baking condition required by the ultrahigh vacuum environment of a user, the liquid helium recondensing refrigeration vibration isolation system can adopt stainless steel, oxygen-free copper and other materials and welding and sealing technologies compatible with ultrahigh vacuum.
The types of closed-cycle refrigerators in the present invention include, but are not limited to, gifford-mcmahon refrigerators, stirling refrigerators, pulse tube refrigerators, and modified refrigerators based on these principles. The refrigeration power and the lowest temperature of the closed-cycle refrigerator are different according to the working principle and model of the refrigerator.
The invention has the following beneficial effects:
1. the closed-cycle refrigerator and the liquid helium recondensation refrigeration vibration isolation system adopted by the invention almost have no helium and liquid helium consumption in operation. The scheme solves the problem that the traditional low-temperature refrigeration equipment needs liquid helium which is scarce in resource and high in price.
2. The invention liquefies part of helium heat exchange gas by using the re-condensation technology to generate liquid helium at the low-temperature end, thereby greatly improving the refrigeration power and the temperature stability of the system. The scheme solves the problem that the traditional closed-cycle refrigerator has large temperature fluctuation at low temperature.
3. The helium heat exchange ventilation refrigeration vibration isolation interface effectively isolates low-frequency mechanical vibration when the closed cycle refrigerator works, and the scheme provides a low-temperature and low-vibration working environment at the same time.
4. The temperature feedback control system adopted by the invention can realize liquid helium level control and can also realize large-scale temperature change operation.
5. The scheme provided by the invention can realize low-temperature and low-vibration under the condition of almost no helium gas and liquid helium consumption, can work in an ultrahigh vacuum environment, and can bear high-temperature baking required by the ultrahigh vacuum environment.
Drawings
FIG. 1 is a schematic diagram of a mechanical vibration isolation liquid helium recondensation cryogenic refrigeration system apparatus according to the present invention.
FIG. 2 is a cross-sectional view of an assembly of an embodiment of a refrigeration head component, liquid helium recondensation refrigeration vibration isolation system in a closed cycle refrigerator.
FIG. 3 is a schematic view of an example assembly of a temperature feedback control system.
Reference numbers in the figures: 1-closed cycle refrigerator system, 2-liquid helium recondensation refrigeration vibration isolation system, 3-user sample or equipment, 4-temperature feedback control system, 5-vacuum cavity, 6-refrigeration head, 7-refrigeration vibration isolation interface, 8-helium heat exchange gas, 9-liquefied or recondensed liquid helium, 10-experimental sample or equipment, 11-heat radiation shielding cover, 12-soft rubber, 13-heating element, 14-first temperature measuring element and 15-second temperature measuring element.
Detailed Description
In order that the invention may be more clearly used, the invention will now be described in greater detail with reference to a specific embodiment thereof and with reference to the accompanying drawings.
The device of the invention comprises: a closed-cycle refrigerator system 1, a liquid helium recondensation refrigeration vibration isolation system 2; a temperature feedback control system 4. Wherein the content of the first and second substances,
the closed cycle chiller system 1 includes: a closed-cycle refrigeration head 6, a compressor, a helium gas delivery pipeline and the like. The liquid helium recondensation refrigeration vibration isolation system 2 includes: a refrigeration vibration isolation interface 7, helium heat exchange gas 8, liquid helium 9 formed by recondensation, a heat radiation shielding cover 11, soft rubber 12 and the like.
The temperature feedback control system 4 includes: a heating element 13, a first temperature sensing element 14 and a second temperature sensing element 15.
In the liquid helium recondensation refrigeration vibration isolation system, a refrigeration head 6 of a closed-cycle refrigerator system extends into a refrigeration vibration isolation interface 7, and helium heat exchange gas 8 is filled between the refrigeration head and the refrigeration vibration isolation interface to serve as a refrigeration cooling medium. The soft rubber 12 is connected with the upper end of the sealed refrigeration vibration isolation interface and the refrigeration head, and the low-frequency mechanical vibration of the refrigeration head can be isolated while helium gas is sealed for heat exchange and ventilation. The helium heat exchange gas can be condensed again in the refrigeration vibration isolation interface under the refrigeration action of the closed-cycle refrigeration head to generate liquid helium, so that the refrigeration capacity and the temperature stability between the refrigeration head and the refrigeration vibration isolation interface are greatly improved. The thermal radiation shielding cover 11 is fixed on the refrigeration vibration isolation interface and used for shielding heat leakage caused by high-temperature radiation.
The temperature feedback control system consists of a heating element 13, a first temperature measuring element 14, a second temperature measuring element 15 and a feedback temperature control circuit. Wherein, the first temperature measuring element 13 and the second temperature measuring element 14 are respectively arranged at the lower end and the upper end of the horizontal projection plane of the liquid helium. By measuring the temperature of the first and second temperature sensing elements, and in combination with feedback control, the height of the liquid helium within the refrigeration vibration isolation interface can be controlled: when no liquid helium exists in the refrigerating and vibration isolating interface, the temperature of the first temperature measuring element and the temperature of the second temperature measuring element are both higher than the phase transition point temperature (about 4.2K) of the helium gas; when the liquid helium level in the refrigeration vibration isolation interface is between the first temperature measuring element and the second temperature measuring element, the temperature of the first temperature measuring element is equal to the temperature of the phase change point, and the temperature of the second temperature measuring element is higher than the temperature of the phase change point; when the liquid level of the liquid helium is higher than that of the second temperature measuring element, the temperatures of the first temperature measuring element and the second temperature measuring element are both equal to the temperature of the phase change point. In addition, the temperature feedback control system can also realize wide-range temperature change operation.
In the embodiment, the closed-cycle refrigerator system is adopted to solve the problem that a large amount of liquid helium is needed in the traditional low-temperature refrigeration operation; the problem of micron-sized and above low-frequency mechanical vibration generated by the operation of a traditional refrigerator is solved by adopting a helium heat exchange air refrigeration vibration isolation interface; the problem of large temperature fluctuation at low temperature of the traditional closed-cycle refrigerator is solved by adopting a liquid helium recondensation technology; the temperature feedback control system is adopted for feedback temperature control, so that the liquid helium level formed by recondensation in the refrigeration vibration isolation interface can be controlled, and large-range temperature change operation can be realized; the refrigerating and vibration isolating interface in vacuum environment is made of stainless steel, oxygen-free copper and other materials and is compatible with high temperature baking condition required by ultrahigh vacuum environment.
The above-mentioned embodiments further describe the objects, technical solutions and advantages of the present invention. It should be understood that the above description is only exemplary of the present invention, and is not intended to limit the present invention. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (3)

1. A mechanical vibration isolated liquid helium recondensation cryogenic refrigeration system comprising: a closed cycle refrigerator system, a liquid helium recondensation refrigeration vibration isolation system and a temperature feedback control system; wherein the closed cycle chiller system comprises: the system comprises a refrigeration head, a compressor and a helium gas conveying pipeline for connecting the compressor and the refrigeration head; the liquid helium recondensation refrigeration vibration isolation system comprises: the system comprises a refrigeration vibration isolation interface, liquid helium generated by helium heat exchange gas and recondensation, and soft rubber for sealing the helium heat exchange gas and isolating vibration, wherein a thermal radiation shielding cover is also arranged on the refrigeration vibration isolation interface and used for shielding heat leakage caused by high-temperature radiation; the temperature feedback control system consists of a temperature measuring element, a heating element and a feedback temperature control circuit; the temperature measuring element is used for indirectly measuring the height of the liquid level of the liquid helium formed by recondensation, the feedback temperature control circuit is used for controlling the output power of the heating element, and the height of the liquid level of the liquid helium is adjusted through the temperature feedback control system, so that the vibration caused by the direct contact between the liquid level of the liquid helium and the refrigerating head is avoided;
in the liquid helium recondensation refrigeration vibration isolation system, a refrigeration head of a refrigerator extends into a refrigeration vibration isolation interface, and helium heat exchange gas is filled between the refrigeration head and the refrigeration vibration isolation interface to serve as a refrigeration cooling medium; the soft rubber is connected with the upper end of the sealed refrigeration vibration isolation interface and the refrigeration head, and the low-frequency mechanical vibration of the refrigeration head can be isolated while helium gas is sealed for heat exchange and air exchange; because the temperature of the lowest temperature end of the refrigerating head is lower than 4.2K, helium heat exchange gas is condensed in the refrigerating vibration isolation interface to form liquid helium;
in the temperature feedback control system, a heating element is arranged at the low-temperature end of a refrigeration vibration isolation interface, the heating element is positioned right below liquid helium formed by recondensation, and a temperature measuring element is arranged on the refrigeration vibration isolation interface; the temperature measuring element is used for indirectly measuring the liquid level height of the liquid helium formed by recondensation, and the feedback temperature control circuit is used for controlling the output power of the heating element; the height of the liquid level of the liquid helium can be adjusted through the temperature feedback control system, and vibration caused by direct contact of the liquid level of the liquid helium and the refrigeration head is avoided; the temperature measuring elements comprise a first temperature measuring element and a second temperature measuring element, the first temperature measuring element and the second temperature measuring element are respectively arranged at the lower end and the upper end of a liquid helium zone where liquid helium is located, and the height of the liquid helium in the refrigeration vibration isolation interface is controlled by measuring the temperature of the first temperature measuring element and the temperature of the second temperature measuring element and combining with feedback control: when no liquid helium exists in the refrigerating and vibration isolating interface, the temperature of the first temperature measuring element and the temperature of the second temperature measuring element are both higher than the phase transition point temperature of the helium gas by 4.2K; when the liquid helium level in the refrigeration vibration isolation interface is between the first temperature measuring element and the second temperature measuring element, the temperature of the first temperature measuring element is equal to the temperature of the phase change point, and the temperature of the second temperature measuring element is higher than the temperature of the phase change point; when the liquid level of the liquid helium is higher than that of the second temperature measuring element, the temperatures of the first temperature measuring element and the second temperature measuring element are both equal to the temperature of the phase change point.
2. The mechanically vibration isolated liquid helium recondensation cryogenic refrigeration system of claim 1, wherein the closed cycle refrigerator is one of a gifford-mcmahon refrigerator, a stirling-type refrigerator, and a pulse tube refrigerator.
3. The mechanical vibration isolation liquid helium recondensation cryogenic refrigeration system of claim 1, wherein the liquid helium recondensation refrigeration vibration isolation system is made of stainless steel and an oxygen free copper material and is compatible with ultra-high vacuum environments.
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PCT/CN2017/082517 WO2018107643A1 (en) 2016-12-16 2017-04-28 Mechanical vibration isolation liquid helium re-condensation low-temperature refrigeration system
US16/075,515 US20190063790A1 (en) 2016-12-16 2017-04-28 Mechanical vibration isolation liquid helium re-condensation low-temperature refrigeration system

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