CN107655236B - Ultralow vibration cryostat - Google Patents
Ultralow vibration cryostat Download PDFInfo
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- CN107655236B CN107655236B CN201710872600.0A CN201710872600A CN107655236B CN 107655236 B CN107655236 B CN 107655236B CN 201710872600 A CN201710872600 A CN 201710872600A CN 107655236 B CN107655236 B CN 107655236B
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- 238000013016 damping Methods 0.000 claims abstract description 36
- 239000001307 helium Substances 0.000 claims abstract description 35
- 229910052734 helium Inorganic materials 0.000 claims abstract description 35
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims abstract description 35
- 238000007789 sealing Methods 0.000 claims abstract description 10
- 238000005452 bending Methods 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 2
- 239000000945 filler Substances 0.000 abstract description 7
- 238000002474 experimental method Methods 0.000 abstract description 5
- 238000001816 cooling Methods 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000002955 isolation Methods 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000005057 refrigeration Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000002096 quantum dot Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000017260 vegetative to reproductive phase transition of meristem Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B25/00—Machines, plants or systems, using a combination of modes of operation covered by two or more of the groups F25B1/00 - F25B23/00
- F25B25/005—Machines, plants or systems, using a combination of modes of operation covered by two or more of the groups F25B1/00 - F25B23/00 using primary and secondary systems
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2500/00—Problems to be solved
- F25B2500/13—Vibrations
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Containers, Films, And Cooling For Superconductive Devices (AREA)
- Vibration Prevention Devices (AREA)
Abstract
The present invention provides a kind of ultralow vibration cryostat comprising: bracket, it is mobile thereon to be equipped with cold head support platform, fixed Cryo Refrigerator in the cold head support platform；Interior vacuum (-tight) housing, its lower section for being located at the cold head support platform, the upper end of the interior vacuum (-tight) housing is connected by flexible pipe with Cryo Refrigerator sealing, the lower end of the Cryo Refrigerator is arranged in the interior vacuum (-tight) housing, the interior vacuum (-tight) housing, the flexible pipe and the Cryo Refrigerator, which enclose, to be set to form helium chamber, and the interior vacuum (-tight) housing is equipped with the filler line being connected to the helium chamber；Outer vacuum (-tight) housing, sealing cover at outside the interior vacuum (-tight) housing, and the bottom wall in the outer vacuum (-tight) housing is equipped with sample stage, and the lower end of the interior vacuum (-tight) housing is connected by vibration damping thermally conductive sheet with the sample stage.The present invention is able to achieve ultralow vibration, and experiment is accurate, at low cost, applied widely.
Description
Technical field
The present invention relates to a kind of cryostat, specifically a kind of ultralow vibration cryostat.
Background technique
Currently, the cryostat used in the fields such as accurate measurement, technology of quantum dots, cryogenic optics, not only to low
Temperature, cooling capacity of the sample stage of warm thermostat etc. require, and also require the vibration of sample stage extremely low, to avoid or reduce vibration pair
The influence of experiment measurement and apparatus, such as gravitational wave detector not only need low temperature environment, and to reduce thermal noise, there are also poles
The requirement of low vibration, and the level that its desired vibration values is vibrated in the earth.
Current cryostat is generally taken to be vibrated as flowering structure is reduced: (1) connecting Cryo Refrigerator using rubber tube
With the sample stage of thermostat, vibration is isolated, usually using after the oscillation damping method, the vibration values of sample stage can achieve ±
300nm is able to satisfy the use demand of general low vibration, but its requirement for being unable to satisfy ultralow vibration；(2) by sample stage with
Refrigeration machine second level cold head connection mechanical structure and cold screen connection mechanical structure add vibration isolation system, while converting the vibration of cold head
Dynamic frequency, to meet the use demand of ultralow vibration, still, increased frequency conversion system easily generates electromagnetism to most of experiments
Interference influences experimental precision, while the manufacture installation accuracy of vibration isolation system requires very high, manufacture difficulty, and cost is very high.
In view of the above-mentioned problems of the prior art, the present inventor combines the design and use of related manufacturing field many years
Experience provides a kind of ultralow vibration cryostat, to overcome drawbacks described above.
Summary of the invention
The object of the present invention is to provide a kind of ultralow vibration cryostats, to solve using Cryo Refrigerator as cold source
The sample stage of cryostat vibrates excessive problem, and being able to achieve vibration values is the ultralow vibration of nanoscale, and experiment is accurate, at
This is low, applied widely.
Following technical proposal can be used to realize in above-mentioned purpose of the invention:
The present invention provides a kind of ultralow vibration cryostat comprising: bracket, the mobile cold head that is equipped with supports thereon
Platform, fixed Cryo Refrigerator in the cold head support platform；Interior vacuum (-tight) housing is located at the lower section of the cold head support platform,
The upper end of the interior vacuum (-tight) housing is connected by flexible pipe with Cryo Refrigerator sealing, and the lower end of the Cryo Refrigerator is worn
Set to form helium chamber in the interior vacuum (-tight) housing, the interior vacuum (-tight) housing, the flexible pipe and the Cryo Refrigerator enclose, it is described in
Vacuum (-tight) housing is equipped with the filler line being connected to the helium chamber；Outer vacuum (-tight) housing, sealing cover at outside the interior vacuum (-tight) housing, institute
It states the bottom wall in outer vacuum (-tight) housing and is equipped with sample stage, the lower end of the interior vacuum (-tight) housing passes through vibration damping thermally conductive sheet and the sample stage phase
Even.
In a preferred embodiment, the Cryo Refrigerator includes the level-one cold head and two in the interior vacuum (-tight) housing
Grade cold head, the level-one cold head are equipped with level-one cold header heat exchanger, and the second level cold head is equipped with second level cold header heat exchanger, described
Level-one cold header heat exchanger and the second level cold header heat exchanger are connected with the interior vacuum (-tight) housing.
In a preferred embodiment, the level-one cold header heat exchanger includes upper and lower part, and the top is fixedly arranged on institute
State level-one cold head, the lower part is connected with the inner wall of the interior vacuum (-tight) housing, the top and the lower part along peripheral wall at equal intervals
Crack equipped with multiple, two-by-two it is adjacent it is described crack between form heat exchanger fin, it is mutually chimeric on the top and the lower part
The heat exchanger fin being inserted in described crack under state and this crack between there is gap.
In a preferred embodiment, the second level cold header heat exchanger includes upper and lower part, and institute is fixed on the top
State second level cold head, the lower part is connected with the inner wall of the interior vacuum (-tight) housing, the top and the lower part along peripheral wall at equal intervals
Crack equipped with multiple, two-by-two it is adjacent it is described crack between form heat exchanger fin, it is mutually chimeric on the top and the lower part
The heat exchanger fin being inserted in described crack under state and this crack between there is gap.
In a preferred embodiment, cold screen is equipped between the interior vacuum (-tight) housing and the outer vacuum (-tight) housing, the cold screen
Upper end is connected with the level-one cold header heat exchanger, and the lower end of the cold screen is connected with the outer vacuum (-tight) housing, and the sample stage is located at
In the cold screen.
In a preferred embodiment, sample rack is installed on the bottom wall of the outer vacuum (-tight) housing, the sample stage is set up
Fluted, the sample stage is fixedly arranged in the groove, the sample rack on the lower end of the cold screen and the outer vacuum (-tight) housing
Groove is connected.
In a preferred embodiment, the ultralow vibration cryostat further includes optical platform, the outer vacuum (-tight) housing
It is fixedly arranged on the optical platform.
In a preferred embodiment, the vibration damping thermally conductive sheet is equipped at least twice bending section.
In a preferred embodiment, the radius of the bending section of the vibration damping thermally conductive sheet is 5mm, the vibration damping thermally conductive sheet
With a thickness of 0.5mm.
In a preferred embodiment, the flexible pipe is rubber bellows, and the vibration damping thermally conductive sheet is made of oxygen-free copper.
The characteristics of ultralow vibration cryostat of the invention and advantage are:
1, the present invention can not only weaken the vibration that Cryo Refrigerator generates during as cold source by flexible pipe, moreover it is possible to
The vibration that Cryo Refrigerator is cut down by the intracavitary helium of helium, can also further decrease vibration by vibration damping thermally conductive sheet, so that
The vibration that vibration damping thermally conductive sheet passes to sample stage is extremely low, and because sample stage is fixed on by sample rack the bottom wall of outer vacuum (-tight) housing
On, so that the vibration at sample stage is in ultralow level of vibration, guarantees that its vibration values reaches nano-scale, compared to existing skill
By the way that for rubber tube vibration damping, the vibration of sample stage of the invention is lower, reduces two orders of magnitude, application range is more in art
Extensively, compared to the prior art in by setting vibration isolation system carry out vibration damping for, sample stage of the invention can guarantee
Under the premise of ultralow level of vibration, it is not necessarily to frequency conversion system, electromagnetic interference will not be generated, wider using the range, manufacture installation is more
It is easy, processing cost is lower.
2, the present invention passes through level-one cold header heat exchanger and the cooling helium of second level cold header heat exchanger using Cryo Refrigerator as cold source
Helium in air cavity, helium after cooling make sample by the lower part of second level cold header heat exchanger and the cooling sample stage of vibration damping thermally conductive sheet
The cryogenic temperature of sample platform realization 4.2K.
Detailed description of the invention
To describe the technical solutions in the embodiments of the present invention more clearly, make required in being described below to embodiment
Attached drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for
For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings other
Attached drawing.
Fig. 1 is the structural schematic diagram of the ultralow vibration cryostat of the present invention.
Drawing reference numeral explanation:
1, Cryo Refrigerator；2, cold head support platform；3, flexible pipe；4, fill port；5, level-one cold header heat exchanger；6, cold
Screen；7, second level cold header heat exchanger；8, vibration damping thermally conductive sheet；9, sample rack；10, sample stage；11, optical platform；12, outer vacuum
Cover；13, second level cold head；14, helium chamber；15, level-one cold head；16, bracket；17, interior vacuum (-tight) housing；18, helium；19, filler line.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
In addition to non-individual defines the direction pointed out, the upper and lower equal directions being referred to herein are shown in the present invention
Fig. 1 in upper and lower equal directions subject to, meanwhile, the ultralow vibration being referred to herein refers to that nanoscale is vibrated, specially
Vibration of the vibration values less than 10 nanometers, low temperature refer to that temperature is lower than -263 DEG C of temperature, illustrate in this together.
As shown in Figure 1, the present invention provides a kind of ultralow vibration cryostat comprising: bracket 16, it is mobile thereon
Equipped with cold head support platform 2, fixed Cryo Refrigerator 1 in the cold head support platform 2；Interior vacuum (-tight) housing 17 is located at described cold
The upper end of the lower section of head support platform 2, the interior vacuum (-tight) housing 17 is connected by flexible pipe 3 with the Cryo Refrigerator 1 sealing, institute
Stating the lower end of Cryo Refrigerator 1, to be arranged in the interior vacuum (-tight) housing 17 intracavitary, the interior vacuum (-tight) housing 17, the flexible pipe 3 and described
Cryo Refrigerator 1, which encloses, to be set to form helium chamber 14, and the interior vacuum (-tight) housing 17 is equipped with the filler line 19 being connected to the helium chamber 14；
Outer vacuum (-tight) housing 12, sealing cover at outside the interior vacuum (-tight) housing 17, and the bottom wall in the outer vacuum (-tight) housing 12 is equipped with sample stage
10, the lower end of the interior vacuum (-tight) housing 17 is connected by vibration damping thermally conductive sheet 8 with the sample stage 10.
Specifically, extending straight up with pedestal and from pedestal as shown in Figure 1, bracket 16 is fixedly arranged on ground
Fixed frame, cold head support platform 2 are substantially in tabular, and one end can move up and down vertically along bracket 16, cold head support platform 2
The end is equipped with sleeve, and sleeve can be integrally formed with cold head support platform 2, can also be weldingly connected with cold head support platform 2, sleeve
It is sheathed on the fixed frame of bracket 16, and is slided up and down vertically along the fixed frame of bracket 16, and can be fixed by fixture nut etc.
Sleeve is fixed on suitable position by part, Cryo Refrigerator 1 can be realized by adjusting position of the sleeve on bracket 16
The adjusting of height and position.
As shown in Figure 1, interior vacuum (-tight) housing 17 of the invention is upwardly extended to bend again from the upper end and is downwardly extending substantially
Ladder tubular, outer vacuum (-tight) housing 12 are substantially in the tubular of upper end opening, and the setting of interior vacuum (-tight) housing 17 and outer vacuum (-tight) housing 12 is for subtracting
Leakage heat in small gas conductive process, the both ends of flexible pipe 3 are in sealing O loop-shaped, in order to seal helium, flexible pipe 3 it is upper
End is connected by flange with the mounting surface of Cryo Refrigerator 1, and the lower end of flexible pipe 3 passes through the upper end phase of flange and interior vacuum (-tight) housing 17
Even, filler line 19 is fixedly arranged on the flange of 3 lower end of flexible pipe connection and is arranged in interior vacuum (-tight) housing 17, and the outside of filler line 19 is equipped with
Fill port 4, fill port 4 are connected with helium tank, to fill helium into helium chamber 14 by fill port 4 and filler line 19, to protect
It holds 14 internal pressure of helium chamber to stablize within the scope of atmospheric pressure ± 10Kpa, and then guarantees flexible pipe 3 (such as rubber bellows)
Flexibility guarantees the damping property of flexible pipe 3, and the cold head part of Cryo Refrigerator 1 is arranged in interior vacuum (-tight) housing 17, interior vacuum (-tight) housing 17
Enclosed with the cold head part of flexible pipe 3 and Cryo Refrigerator 1 and set the helium chamber 14 to be formed for accommodating helium, outer vacuum (-tight) housing 12 it is upper
End is connected by flange with the sealing of flexible pipe 3, and leakage heat is reduced.
The flexible pipe 3 of the invention is rubber bellows, with by the setting of flexible pipe 3 reduce Cryo Refrigerator 1 to
The transmitting vibration of sample stage 10, it can also be the flexible pipe of other forms certainly, herein with no restrictions；Vibration damping thermally conductive sheet of the invention
8 have both thermally conductive and vibration damping effect, and the vibration damping thermally conductive sheet 8 is made of high-purity oxygen-free copper, to conduct cooling capacity by its thermal conductivity
To sample stage 10, the vibration damping thermally conductive sheet 8 is equipped at least twice bending section, bending section and is radially outward convexly curved, with logical
Vibration damping is realized in the bending section for crossing vibration damping thermally conductive sheet 8, and the radius of the bending section of the vibration damping thermally conductive sheet is 5mm, and the vibration damping is thermally conductive
Piece with a thickness of 0.5mm, can also be set as needed certainly as other sizes, herein with no restrictions, in this way, making of the invention
The vibration values of the sample stage 10 of the ultralow vibration cryostat are ± 10nm, realize ultralow vibration, experiment is accurate, cost
It is low.
Further, as shown in Figure 1, the Cryo Refrigerator 1 includes the level-one cold head in the interior vacuum (-tight) housing 17
15 and second level cold head 13, the level-one cold head 15 is equipped with level-one cold header heat exchanger 5, and it is cold that the second level cold head 13 is equipped with second level
Head heat exchanger 7, the level-one cold header heat exchanger 5 and the second level cold header heat exchanger 7 are connected with the interior vacuum (-tight) housing 17, with logical
Cross level-one cold header heat exchanger 5 and the cooling helium 18 being located in helium chamber 14 of second level cold header heat exchanger 7, wherein Cryo Refrigerator 1
It from top to bottom successively include motor part and cold head part, the motor part of Cryo Refrigerator 1 is located at the upper of cold head support platform 2
Side, the cold head part of Cryo Refrigerator 1 are located at the lower section of cold head support platform 2, for being located at electricity with the mounting surface of flanged joint
Between machine part and cold head part, the level-one cold head 15 of cold head part is located at the top of second level cold head 13, and realization is freezed step by step,
When stablizing, temperature is 40K or so at level-one cold header heat exchanger 5 in helium chamber 14, is the low temperature of 4.2K at second level cold header heat exchanger.
Further, as shown in Figure 1, the level-one cold header heat exchanger 5 includes upper and lower part, the top is fixedly arranged on
The level-one cold head 15, the lower part are connected with the inner wall of the interior vacuum (-tight) housing 17, and the top and the lower part are along peripheral wall
Be equipped at equal intervals it is multiple crack, two-by-two it is adjacent it is described crack between form heat exchanger fin, it is mutual on the top and the lower part
The heat exchanger fin being inserted in described crack in the state of chimeric and this crack between there is gap, that is, the wall surface to crack with
Heat exchanger fin does not contact, specifically, the upper and lower part of level-one cold header heat exchanger 5 is in the tubular of circular ring shape, top passes through bolt
It is fixedly arranged on level-one cold head 15, lower part and the inner wall of interior vacuum (-tight) housing 17 are weldingly connected, and multiple crack uniformly opened up can increase
Heat exchange area improves heat exchange rate and efficiency.Similarly, the second level cold header heat exchanger 7 includes upper and lower part, and the top is solid
Due to the second level cold head 13, the lower part is connected with the inner wall of the interior vacuum (-tight) housing 17, the equal edge in the top and the lower part
Peripheral wall be equipped at equal intervals it is multiple crack, two-by-two it is adjacent it is described crack between form heat exchanger fin, on the top and the lower part
In the state of mutually chimeric, the heat exchanger fin being inserted in described crack and this crack between there is gap, that is, the wall to crack
Face is not contacted with heat exchanger fin, specifically, the upper and lower part of second level cold header heat exchanger 7 is in the tubular of circular ring shape, top passes through
Bolt is fixedly arranged on second level cold head 13, and lower part and the inner wall of interior vacuum (-tight) housing 17 are weldingly connected, the multiple energy that crack uniformly opened up
Increase heat exchange area, improves heat exchange rate and efficiency.
Further, described cold as shown in Figure 1, being equipped with cold screen 6 between the interior vacuum (-tight) housing 17 and the outer vacuum (-tight) housing 12
The upper end of screen 6 is connected with the level-one cold header heat exchanger 5, and the lower end of the cold screen 6 is connected with the outer vacuum (-tight) housing 12, the sample
Sample platform 10 is located in the cold screen 6, specifically, cold screen 6 is substantially cylindrical in shape, the upper end be connected with level-one cold header heat exchanger 5 or with
Interior vacuum (-tight) housing 17 is connected, and regard level-one cold header heat exchanger 5 as cold source, provides cooling capacity for cold screen 6, guarantees that the 40K's of cold screen 6 is low
Temperature is respectively positioned on the part cold head part (such as second level cold head 13) of sample stage 10, vibration damping thermally conductive sheet 8 and Cryo Refrigerator 1 cold
In screen 6, to reduce loss of refrigeration capacity caused by radiation, between interior vacuum (-tight) housing 17 and the top of outer vacuum (-tight) housing 12 and cold screen 6 and outer true
Space between the lower part of sky cover 12, is vacuumized by vacuum pump group, its interior pressure is made to reach 0.01Pa hereinafter, closed to realize
Vacuum chamber, avoid gas conduction leakage heat.
Further, sample rack 9 is installed on the bottom wall of the outer vacuum (-tight) housing 12, the sample rack 9 is equipped with groove,
The sample stage 10 is fixedly arranged in the groove, and the lower end of the cold screen 6 is recessed with the sample rack 9 on the outer vacuum (-tight) housing 12
Slot is connected, and is made specifically, sample rack 9 embeds stainless steel by thin-wall stainless steel, is in concave shape, is bolted
In on the bottom wall of outer vacuum (-tight) housing 12, making the sample stage 10 in it be fixed on outer vacuum (-tight) housing 12 by sample rack 9, to fix sample
And reduce leakage heat.
Further, the ultralow vibration cryostat further includes optical platform 11, and the outer vacuum (-tight) housing 12 is fixedly arranged on
On the optical platform 11, preferably, outer vacuum (-tight) housing 12 can be firmly fixed on optical platform 11 by bolt, it is outer vacuum
Cover 12 provides support, reduces influence of the external vibration to sample stage 10.
At work, Cryo Refrigerator 1 is used as cold source to the ultralow vibration cryostat of the present invention, passes through its level-one cold head
15, the second level cold header heat exchanger 7 on the level-one cold header heat exchanger 5 on level-one cold head 15, second level cold head 13 and second level cold head 13 is cold
But the helium in helium chamber 14, helium after cooling by be fixedly arranged on the second level cold header heat exchanger 7 of interior vacuum (-tight) housing 17 lower part and
Vibration damping thermally conductive sheet 8 cools down sample stage 10, and sample stage 10 is made to realize the cryogenic temperature of 4.2K；Cryo Refrigerator 1 is as cold source mistake
The vibration generated in journey can be weakened by flexible pipe 3, can also be cut down by the helium in helium chamber 14, and thermally conductive by vibration damping
Sample stage 10 is passed to after the further decreasing of piece 8, because sample stage 10 is fixed on by sample rack 9 bottom wall of outer vacuum (-tight) housing 12
On, keep the level of vibration at sample stage 10 extremely low, guarantees that its vibration values is 10 rans.
The characteristics of ultralow vibration cryostat of the invention and advantage are:
1, the present invention can not only weaken the vibration that Cryo Refrigerator 1 generates during as cold source by flexible pipe 3, also
The vibration that Cryo Refrigerator 1 can be cut down by the helium in helium chamber 14, also can further decrease vibration by vibration damping thermally conductive sheet 8
It is dynamic, so that the vibration that vibration damping thermally conductive sheet 8 passes to sample stage 10 is extremely low, and it is fixed on outside because sample stage 10 passes through sample rack 9
On the bottom wall of vacuum (-tight) housing 12, the vibration at sample stage 10 is made to be in ultralow level of vibration, guarantees that its vibration values is 10 rans,
Its compared to the prior art in by the way that for rubber tube vibration damping, the vibration of sample stage 10 of the invention is lower, reduces two numbers
Magnitude, application range is wider, compared to the prior art in by setting vibration isolation system carry out vibration damping for, it is of the invention
Sample stage 10 is not necessarily to frequency conversion system, electromagnetic interference will not be generated, using the range under the premise of can guarantee ultralow level of vibration
Wider, manufacture is easily installed, and processing cost is lower.
2, the present invention is cold by level-one cold header heat exchanger 5 and second level cold header heat exchanger 7 using Cryo Refrigerator 1 as cold source
But the helium 18 in helium chamber 14, helium 18 after cooling are cooling by the lower part of second level cold header heat exchanger 7 and vibration damping thermally conductive sheet 8
Sample stage 10 makes sample stage 10 realize the cryogenic temperature of 4.2K.
The above is only presently preferred embodiments of the present invention, not does limitation in any form to the present invention, though
So the present invention has been disclosed as a preferred embodiment, and however, it is not intended to limit the invention, has in any technical field
Usual skill, in the range of not departing from technical solution of the present invention, when the technology contents using the disclosure above make it is a little
The equivalent embodiment of equivalent variations, but anything that does not depart from the technical scheme of the invention content are changed or are modified to, according to the present invention
Technical spirit any simple modification, equivalent change and modification to the above embodiments, still fall within the technology of the present invention side
In the range of case.
Claims (8)
1. a kind of ultralow vibration cryostat, which is characterized in that the ultralow vibration cryostat includes:
Bracket, it is mobile thereon to be equipped with cold head support platform, fixed Cryo Refrigerator in the cold head support platform；
Interior vacuum (-tight) housing, is located at the lower section of the cold head support platform, the upper end of the interior vacuum (-tight) housing by flexible pipe with it is described
Cryo Refrigerator sealing is connected, and the lower end of the Cryo Refrigerator is arranged in the interior vacuum (-tight) housing, the interior vacuum (-tight) housing, described
Flexible pipe and the Cryo Refrigerator, which enclose, to be set to form helium chamber, and the interior vacuum (-tight) housing is equipped with the filling being connected to the helium chamber
Pipe；
Outer vacuum (-tight) housing, sealing cover at outside the interior vacuum (-tight) housing, and the bottom wall in the outer vacuum (-tight) housing is equipped with sample stage, institute
The lower end for stating interior vacuum (-tight) housing is connected by vibration damping thermally conductive sheet with the sample stage；
The Cryo Refrigerator includes the level-one cold head and second level cold head in the interior vacuum (-tight) housing, is set on the level-one cold head
There is level-one cold header heat exchanger, the second level cold head is equipped with second level cold header heat exchanger, the level-one cold header heat exchanger and described two
Grade cold header heat exchanger is connected with the interior vacuum (-tight) housing；
Cold screen, the upper end of the cold screen and the level-one cold header heat exchanger are equipped between the interior vacuum (-tight) housing and the outer vacuum (-tight) housing
It is connected, the lower end of the cold screen is connected with the outer vacuum (-tight) housing, and the sample stage is located in the cold screen.
2. ultralow vibration cryostat according to claim 1, which is characterized in that the level-one cold header heat exchanger includes
Upper and lower part, the top are fixedly arranged on the level-one cold head, and the lower part is connected with the inner wall of the interior vacuum (-tight) housing, it is described on
Portion and the lower part be equipped at equal intervals along peripheral wall it is multiple crack, two-by-two it is adjacent it is described crack between form heat exchanger fin, in institute
State top and the lower part it is mutually chimeric in the state of, the heat exchanger fin being inserted in described crack and this crack between have
Gap.
3. ultralow vibration cryostat according to claim 1, which is characterized in that the second level cold header heat exchanger includes
The second level cold head is fixed on upper and lower part, the top, and the lower part is connected with the inner wall of the interior vacuum (-tight) housing, it is described on
Portion and the lower part be equipped at equal intervals along peripheral wall it is multiple crack, two-by-two it is adjacent it is described crack between form heat exchanger fin, in institute
State top and the lower part it is mutually chimeric in the state of, the heat exchanger fin being inserted in described crack and this crack between have
Gap.
4. ultralow vibration cryostat according to claim 1, which is characterized in that solid on the bottom wall of the outer vacuum (-tight) housing
Equipped with sample rack, the sample stage sets up fluted, and the sample stage is fixedly arranged in the groove, the lower end of the cold screen with
The groove of sample rack on the outer vacuum (-tight) housing is connected.
5. ultralow vibration cryostat according to claim 1, which is characterized in that the ultralow vibration cryostat
It further include optical platform, the outer vacuum (-tight) housing is fixedly arranged on the optical platform.
6. ultralow vibration cryostat according to claim 1, which is characterized in that the vibration damping thermally conductive sheet is equipped at least
Twice bending section.
7. ultralow vibration cryostat according to claim 6, which is characterized in that the bending section of the vibration damping thermally conductive sheet
Radius be 5mm, the vibration damping thermally conductive sheet with a thickness of 0.5mm.
8. ultralow vibration cryostat according to claim 1, which is characterized in that the flexible pipe is rubber corrugated
Pipe, the vibration damping thermally conductive sheet are made of oxygen-free copper.
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| CN110132791B (en) * | 2019-05-17 | 2021-11-26 | 杭州仰仪科技有限公司 | Cold-conducting vibration-isolating sample container for testing low-temperature fluidity of liquid |
| CN110440912A (en) * | 2019-08-19 | 2019-11-12 | 中国电子科技集团公司第四十一研究所 | A kind of use for laboratory low temperature radiometer |
| CN114739031B (en) * | 2022-05-06 | 2023-09-15 | 中船重工鹏力（南京）超低温技术有限公司 | Dilution refrigeration system |
| CN118258146A (en) * | 2024-05-28 | 2024-06-28 | 北京飞斯科科技有限公司 | Integrated single-hair type He-3 refrigerator thermostat and working method thereof |
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