CN106662498B - 薄膜腔中的气体密度增加的测量 - Google Patents

薄膜腔中的气体密度增加的测量 Download PDF

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CN106662498B
CN106662498B CN201580013920.XA CN201580013920A CN106662498B CN 106662498 B CN106662498 B CN 106662498B CN 201580013920 A CN201580013920 A CN 201580013920A CN 106662498 B CN106662498 B CN 106662498B
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丹尼尔·维茨格
德克尔·西尔维奥
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    • G01M3/3281—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators removably mounted in a test cell
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    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
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    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
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Abstract

本发明涉及在测试腔体(10)中对样本(16)进行泄漏测试的方法，所述测试腔体(10)的腔壁的至少一部分由柔性材料构成，所述样本被放入所述测试腔体中，所述测试腔体随后被抽空；所述方法的特征在于所述泄漏测试通过在所述样本(16)外部的区域中测量所述测试腔体(10)内部的气体密度来实现。

Description

薄膜腔中的气体密度增加的测量
技术领域
本发明涉及在具有至少一个柔性腔壁部分的测试腔体中对试样进行气密性测试的方法。
背景技术
在试样被放置到测试腔体中之后，此类测试腔体会被抽空，从而使其柔性腔壁部分紧贴所述试样，以便减小所述试样之外的区域中的所述测试腔体的剩余的残留体积。所述测试腔体的腔壁可以例如完全由柔性薄膜制成。此类测试腔体即为薄膜腔体。
所述试样可以是包装袋，例如食品包装袋。所述试样被放置到所述测试腔体中，而后所述测试腔体被气密地封闭并抽空。在这里该术语“抽空”并不意味着绝对的真空，而是一种压力下降，其降到一个低于环绕所述测试腔体的大气中的大气压的压力。
根据德国专利DE102005027023，在抽空所述测试腔体后再测量所述试样之外的区域中的所述测试腔体内部的压力，是已知的技术手段。这是以下面的事实为基础的：逸出所述试样的气体导致所述试样之外的区域中的所述测试腔体中的压力增加。为了达到这个目的，所述测试腔体的残留体积必须尽可能地小，这是通过紧贴所述试样的所述薄膜实现的。
所述测试腔体内部的全部压力增量与温度有关。一方面，与所述测试腔体内部的温度相比，被加热的包装材料可能引起温度变化，从而使得逸出的泄漏气体导致温度升高。另一方面，所述测试腔体内的气压下降会导致所述测试腔体内部的气体被冷却。所述测试腔体内部的气体的每次温度变化都会影响所述测试腔体的压力。在与温度有关的压力变化和由逸出的泄漏气体导致的压力变化之间作出简单的区分是不可能的。
发明内容
本发明的一个目的是提供一种改进的对柔性测试腔体内的试样进行气密性测试的方法。
根据本发明所述的方法被权利要求1的特征限定。据此，为了达到在将所述试样放入到所述测试腔体之后、以及在抽空所述测试腔体之后进行气密性测试的目的，所述试样之外的区域中的所述测试腔体内部的气体的密度被测量。这可以特别地通过测量所述气体密度的时间剖面来进行。当气体因为泄漏而逸出所述试样并进入所述测试腔体的体积时，所述气体密度增加。在封闭体积中的所述气体密度与温度无关，从而使根据本发明所述的气密性测试方法可以在与温度无关的情况下执行。
因此，根据本发明所述的气密性测试的结果不会被温度变化影响和歪曲。当气体的温度增加时，所述气体的能量以及其分子和原子的运动速率也会增加。虽然较高的速率会导致压力的增加，但是气体密度，亦即每个体积单位中的微粒的质量或数量，在温度增加时是与温度无关且恒定的。
所述气密性测量借助物理测量方法进行，所述物理测量方法并非测量“单位面积受力”(气压)，而是测量整体上的气体微粒的特性，该特性仅与一定体积中的微粒数量(气体密度)存在比例关系，而与意味着温度依赖性的微粒热运动速率无关。例如，该方法可能通过测量电荷、红外吸收、瑞利散射、拉曼散射、气体分子/原子的荧光反应、或者气体的热传导来进行。所述气体密度测量也可以借助气体特性传感器(例如氧气传感器/“兰布达探头”)或者基于如英福康公司所提供的智能技术的传感器来进行。
附图说明
下面，本发明的示例性实施方式被参考附图进行描述。其中：
图1示出了第一个示例性实施方式；
图2示出了第二个示例性实施方式；以及
图3示出了第三个示例性实施方式。
具体实施方式
在所有的示例性实施方式中，所述测试腔体10为具有上薄膜层12和下薄膜层14的薄膜腔。所述两个薄膜层12、14被环绕着试样16放置，并且在所述试样16之外的区域中被彼此叠置。在所述薄膜层12、14之间、以及在它们处于所述试样之外的边界区域中，插入有密封圈18，用于气密地封闭所述测试腔体10。所述密封圈18仅用来描述在所述薄膜层12、14的边界区域气密性地密封所述薄膜层12、14的原理。作为对所述密封圈的替代，也可以使用双重的密封。
通过抽空所述测试腔体10直到所述薄膜层12、14完全紧贴所述试样16，所述试样16之外的区域中的所述测试腔体10内部的所述测试腔体体积20被减小。抽空，亦即所述测试腔体10内部的压力的减小，是通过真空泵22来进行的，所述真空泵22被通过阀门组件24与所述测试腔体体积20连接。
在每个示例性实施方式中，所述气体密度被借助位于所述测试腔体体积20中的红外线吸收测量单元26来测量，但是其他的密度测量方法也是可以想到的。
在第一个示例性实施方式中，所述真空泵22和所述测量单元26被通过三通阀和所述测试腔体体积20连接。这样，通到所述真空泵22、通到所述测量单元26以及通到所述测试腔体体积20的气体管线路径中的每一个都可以被单独地且独立于彼此地打开或关闭。
在图2的示例性实施方式中，所述真空泵22被通过双通阀与所述测试腔体体积20连接，其中所述测试单元26和处于所述测试腔体10与所述阀门组件24之间的气体管线通路以气体传导方式连接。
第三个示例性实施方式与第二个示例性实施方式的区别在于所述测量单元26被容纳在从所述测试腔体10到所述阀门组件24的气体管线通路中。
所述试样16，其可以是柔性食品包装袋，首先被放置在所述薄膜层12、14之间，然后所述薄膜层被密封。借助所述真空泵22，所述测试腔体10随后被抽空，使得所述试样16之外的区域中的所述测试腔体体积20达到最小。而后，借助于所述阀门组件24，所述真空泵22被和所述测试腔体10断开。从所述试样16逸出的气体流入到所述测试腔体10中，被提供给所述红外线吸收测量单元26。在所述测量单元26中，所述气体的密度被测定。所述气体密度在一个预定的时间段内被监测，其中所述气体密度的增加指示出所述试样16中的泄漏。经过一段时间的所述气体密度的增加被用于测定所述泄漏的量级。

Claims (6)

1.一种用于测试腔体中的试样的气密性测试的方法，其中所述测试腔体至少部分地由柔性材料制成，所述方法包括：
将所述试样放置到所述测试腔体中；
抽空所述测试腔体，以使得所述测试腔体中的压力低于所述测试腔体周围大气中的气压但大于绝对真空中的压力；以及
测量所述试样之外的区域中的所述测试腔体内部的气体密度；其特征在于，
所述气密性测试被通过测量所述试样之外的区域中的所述测试腔体内部的所有气体粒子的总密度来执行。
2.如权利要求1所述的用于气密性测试的方法，其特征在于：对所述气体密度的测量被通过对电荷、红外线吸收、瑞利散射、雷曼散射、荧光效应、气体热传导的测量或者借助氧气传感器或智能技术传感器来执行。
3.如权利要求1所述的用于气密性测试的方法，其特征在于：对于所述气密性测试，不执行对所述试样之外的区域中的所述测试腔体内的气压的测量。
4.如权利要求1所述的用于气密性测试的方法，其特征在于：来自所述测试腔体的气体被提供给测量单元，在所述测量单元中所述气密性测量被执行。
5.如权利要求1所述的用于气密性测试的方法，其特征在于：所述测试腔体为薄膜腔，其腔壁由柔性薄膜制成。
6.如权利要求1所述的用于气密性测试的方法，其特征在于：所述气密性测试被通过测量所述气体密度的时间轮廓来执行。
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Families Citing this family (6)

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DE102014218399A1 (de) * 2014-09-15 2016-03-17 Inficon Gmbh Folienkammer mit Messvolumen zur Grobleckerkennung
DE102014224799A1 (de) * 2014-12-03 2016-06-09 Inficon Gmbh Dichtheitsprüfung mit Trägergas in Folienkammer
DE102017201004A1 (de) * 2017-01-23 2018-07-26 Inficon Gmbh Folienkammer mit Doppelfolie
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CN116223445A (zh) * 2023-05-05 2023-06-06 安徽中科智泰光电测控科技有限公司 一种矿用井下多气体检测仪和检测系统

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0741288A1 (en) * 1995-05-04 1996-11-06 Sara Lee/DE N.V. Method and apparatus for testing at least one flexible package for the presence of a leak
US5578747A (en) * 1994-06-06 1996-11-26 Jean-Marie Gatto Device for testing imperviousness of a flexible membrane mounted on a rigid support
US6121617A (en) * 1997-02-26 2000-09-19 Fuji Electric Co., Ltd. Infrared gas analyzer
CN1447912A (zh) * 2000-08-16 2003-10-08 因菲康有限公司 用于气体发生器密封性测试的方法和装置

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4031742A (en) * 1972-10-10 1977-06-28 Michael Gerald C Leak detector using mass concentration gauge
JPS60111246U (ja) * 1984-11-22 1985-07-27 オーバル機器工業株式会社 密封管又は密封容器の気体循環路中の気体漏洩量測定装置
JPS6294740A (ja) 1985-10-18 1987-05-01 Matsushita Seiko Co Ltd 壁掛形室内機
US5386717A (en) * 1991-02-08 1995-02-07 Yamaha Corporation Gas leakage testing method
JPH06294740A (ja) * 1993-04-09 1994-10-21 Mitsubishi Heavy Ind Ltd ガスの温度及び成分濃度計測法
JPH07129870A (ja) * 1993-10-28 1995-05-19 Toshiba Corp ガス絶縁開閉装置のガス漏れ検出装置
EP0803055B1 (de) * 1995-01-14 2000-12-13 Gerhart Schroff Photoakustische Dichtheitsprüfung mit geregeltem Laser
DE19642099A1 (de) * 1996-10-12 1998-04-16 Leybold Vakuum Gmbh Prüfung der Dichtheit von Verpackungen
JP3688083B2 (ja) 1996-12-26 2005-08-24 東洋自動機株式会社 密封体の漏れ検査方法および装置
JP4671462B2 (ja) * 2000-02-22 2011-04-20 パナソニック株式会社 ニッケル水素二次電池の気密検査方法
US20040159144A1 (en) * 2003-02-14 2004-08-19 Thomas Abelen Method and device for performing a leak test on a gas generator
JP2006329650A (ja) * 2005-05-23 2006-12-07 Shimadzu System Solutions Co Ltd 包装リーク検査装置
DE102005027023A1 (de) 2005-06-11 2006-12-14 Gerhart Schroff Verfahren und Anordnung zur integralen Dichtheitsprüfung
KR100781968B1 (ko) * 2007-08-14 2007-12-06 코리아디지탈 주식회사 광경로 길이를 변경할 수 있는 비분산 적외선 가스 농도측정장치
WO2012005199A1 (ja) * 2010-07-05 2012-01-12 国立大学法人山口大学 漏れ検査装置及び漏れ検査方法
DE102010048982B4 (de) * 2010-09-03 2022-06-09 Inficon Gmbh Lecksuchgerät
DE102011086486B4 (de) * 2011-11-16 2023-01-19 Inficon Gmbh Vorrichtung und Verfahren zur schnellen Lecksuche an formsteifen/schlaffen Verpackungen ohne Zusatz von Prüfgas
DE102012200063A1 (de) 2012-01-03 2013-07-04 Inficon Gmbh Verfahren zur Lecksuche an einem nicht formstarren Prüfling
DE102014224799A1 (de) * 2014-12-03 2016-06-09 Inficon Gmbh Dichtheitsprüfung mit Trägergas in Folienkammer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5578747A (en) * 1994-06-06 1996-11-26 Jean-Marie Gatto Device for testing imperviousness of a flexible membrane mounted on a rigid support
EP0741288A1 (en) * 1995-05-04 1996-11-06 Sara Lee/DE N.V. Method and apparatus for testing at least one flexible package for the presence of a leak
US6121617A (en) * 1997-02-26 2000-09-19 Fuji Electric Co., Ltd. Infrared gas analyzer
CN1447912A (zh) * 2000-08-16 2003-10-08 因菲康有限公司 用于气体发生器密封性测试的方法和装置

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AU2015233669B2 (en) 2019-02-14
WO2015140041A1 (de) 2015-09-24
CN106662498A (zh) 2017-05-10
US10514317B2 (en) 2019-12-24
EP3120127B1 (de) 2018-05-09
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