CN106646907B - Grating diffraction light deflection prism - Google Patents
Grating diffraction light deflection prism Download PDFInfo
- Publication number
- CN106646907B CN106646907B CN201611217716.2A CN201611217716A CN106646907B CN 106646907 B CN106646907 B CN 106646907B CN 201611217716 A CN201611217716 A CN 201611217716A CN 106646907 B CN106646907 B CN 106646907B
- Authority
- CN
- China
- Prior art keywords
- grating
- isosceles trapezoid
- beam splitter
- prism
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/4233—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/44—Grating systems; Zone plate systems
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
A grating diffraction light deflection prism comprises an isosceles trapezoid prism, a beam splitter, a light source and a grating, wherein the grating, the isosceles trapezoid prism and the beam splitter are sequentially arranged along the light emitting direction of diffraction light, the light source is arranged on the outer side of the beam splitter, light emitted by the light source is vertically incident on the side surface of the beam splitter, part of the light beam is reflected by the beam splitter and vertically emitted to the grating through the isosceles trapezoid prism, the light is vertically irradiated onto the grating to generate 0-order diffraction light and +/-1-order diffraction light, the 0-order diffraction light is vertical to the surface of the grating and emitted through the isosceles trapezoid prism and the beam splitter, the +/-1-order diffraction light is obliquely emitted into the isosceles trapezoid prism from the surface of the grating and is reflected through the inclined plane of the isosceles trapezoid prism, and is finally emitted through the isosceles trapezoid prism and the beam splitter and is parallel to the 0-order diffraction light. The deflection prism reduces the complexity and debugging difficulty of the optical path, reduces the volume of the optical path and improves the reliability of the optical path.
Description
Technical Field
The invention relates to the field of grating ruler measurement, in particular to a grating diffraction light deflection prism.
Background
The grating scale is an important measuring tool in precision measurement and precision machining, and the grating is used as a key part of the grating scale and plays a role of reference scales in measurement. The interferometric grating scale can only provide incremental displacement information during measurement, so absolute position correction by means of a reference point is required. The detection precision of the reference point is one of the determining factors of the precision of the grating ruler.
In the prior art, the detection of the reference point is generally performed by means of a specially designed reference point mask and reference point codes, and for the detection head device in the illustrated structure, light rays sequentially vertically pass through a light-transmitting area of the reference point mask to irradiate the reference point coding area, then are reflected by a reflecting area of the reference point coding area, then the reflected light rays pass through the light-transmitting area of the mask again, then irradiate the incident light rays to the upper part of the hypotenuse of the right-angle prism, and irradiate the light rays to the photodiode to generate photoelectric signals. In consideration of the requirements of shading performance and manufacturing cost, the mask plate generally uses a film or a stainless steel sheet, and the two materials have certain reflectivity. Therefore, when light passes through the mask plate for the first time, if the mask plane is perpendicular to the incident light, part of the light is reflected by the original path and directly irradiates on the photoelectric detector to form a direct current component of a photoelectric signal, and extra noise is introduced, and the interference needs to be filtered by an analog circuit or a numerical algorithm in subsequent signal processing. This adds additional cost and reduces the accuracy and reliability of the system.
Disclosure of Invention
The invention mainly aims to provide a grating diffraction light deflection prism, which is used for fundamentally eliminating the direct current component of a photoelectric signal generated by reflected light, reducing the noise of the photoelectric signal, simplifying the subsequent signal processing flow and improving the precision.
In order to achieve the purpose, the invention adopts the following technical scheme:
a grating diffraction light deflection prism comprises an isosceles trapezoid prism, a beam splitter, a light source and a grating, wherein the grating, the isosceles trapezoid prism and the beam splitter are sequentially arranged along the light emitting direction of diffraction light, the light source is arranged on the outer side of the beam splitter, light emitted by the light source is vertically incident to the side face of the beam splitter, part of the light beam is reflected by the beam splitter and is vertically emitted to the grating through the isosceles trapezoid prism, the light is vertically irradiated to the grating to generate 0-order diffraction light and +/-1-order diffraction light, the 0-order diffraction light is perpendicular to the surface of the grating and is emitted through the isosceles trapezoid prism and the beam splitter, the +/-1-order diffraction light is obliquely emitted into the isosceles trapezoid prism from the surface of the grating and is internally reflected through the inclined plane of the isosceles trapezoid prism, and is finally emitted through the isosceles trapezoid prism and the beam splitter and is parallel to the 0-order diffraction light.
The light source is a laser.
The beam splitter is a 45-degree beam splitting cube.
The grating is a reflection type grating, the plane of the grating is parallel to the YZ plane, the grid line is arranged along the Z direction, the grating, the isosceles trapezoid prism and the beam splitter are arranged along the X axis, and the isosceles trapezoid prism takes the X axis as a symmetry axis.
The deflection prism is connected with the beam splitting cube through optical bonding glue by an isosceles trapezoid prism.
The optical bonding glue is ultraviolet light curing glue.
The upper bottom of the isosceles trapezoid prism is far away from the beam splitter, the lower bottom of the isosceles trapezoid prism is close to the beam splitter, the grating period is recorded as k, the laser wavelength is recorded as lambda, the complementary angle of the included angle between the side surface of the beam splitter and the side surface of the isosceles trapezoid prism is alpha, the refractive index of the used optical glass is n, and parameters lambda, k, n and alpha satisfy the functional relationship: α =0.5 arcsin (λ/kn).
The lower bottom of the isosceles trapezoid prism is far away from the beam splitter, the upper bottom of the isosceles trapezoid prism is close to the beam splitter, the grating period is recorded as k, the laser wavelength is recorded as lambda, the lower bottom angle of the isosceles trapezoid prism is alpha, the refractive index of the used optical glass is n, and parameters lambda, k, n and alpha satisfy a functional relationship: sin α = n × sin (α - λ/kn).
The invention has the following beneficial effects:
compared with the prior art, the polarizing prism provided by the invention can integrate the prism group which is used for deflecting grating 0-order diffraction light and +/-1-order diffraction light to a parallel emergent state in the existing scheme into a single prism, thereby greatly reducing the complexity and debugging difficulty of an optical path, reducing the volume of the optical path and improving the reliability of the optical path.
Drawings
Fig. 1 is a grating diffraction light deflecting prism according to an embodiment of the present invention.
Fig. 2 is a grating diffractive light deflecting prism according to another embodiment of the present invention.
Detailed Description
The invention will be further described with reference to the drawings and preferred embodiments.
Referring to fig. 1 and 2, in some embodiments, a grating 1 diffraction light deflection prism includes an isosceles trapezoid prism 2, a beam splitter 4, a light source 5 and a grating 1, where the grating 1, the isosceles trapezoid prism 2 and the beam splitter 4 are sequentially arranged along a light emitting direction of diffracted light, the light source 5 is disposed outside the beam splitter 4, light emitted from the light source 5 is perpendicularly incident on a side surface of the beam splitter 4, a part of the light is reflected by the beam splitter 4 and perpendicularly irradiated to the grating 1 through the isosceles trapezoid prism 2, and the light is perpendicularly irradiated on the grating 1 to generate 0 th-order diffracted light 6 and ± 1 st-order diffracted light 7, where the 0 st-order diffracted light 6 is perpendicularly incident on a surface of the grating 1 through the isosceles trapezoid prism 2 and the beam splitter 4, and the ± 1 st-order diffracted light 7 is obliquely incident on the isosceles trapezoid prism 2 from the surface of the grating 1 and is internally reflected through an inclined surface of the isosceles trapezoid prism 2, and finally exits through the isosceles trapezoid prism 2 and the beam splitter 4 and is parallel to the 0 st-order diffracted light.
As shown in fig. 1, in a preferred embodiment of the present invention, the upper base of the isosceles trapezoid prism 2 is far from the beam splitter 4, the lower base of the isosceles trapezoid prism 2 is close to the beam splitter 4, the period of the grating 1 is denoted by k, the laser wavelength is denoted by λ, a complementary angle of an included angle between the side surface of the beam splitter 4 and the side surface of the isosceles trapezoid prism 2 (i.e., a complementary angle of the bottom angle of the lower base of the isosceles trapezoid prism 2) is α, the refractive index of the used optical glass is n, and parameters λ, k, n, α satisfy a functional relationship: α =0.5 arcsin (λ/kn).
Preferably, the light source 5 is a laser.
Preferably, the beam splitter 4 is a 45 ° beam splitting cube.
Preferably, the grating 1 is a reflective grating, a plane of the grating 1 is parallel to a YZ plane, a grating line is along a Z direction, the grating 1, the isosceles trapezoid prism 2 and the beam splitter 4 are arranged along an X axis, and the isosceles trapezoid prism 2 takes the X axis as a symmetry axis.
Preferably, the deflection prism is formed by an isosceles trapezoidal prism 2 and a beam splitting cube connected by an optical adhesive 3.
Preferably, the optical adhesive 3 is an ultraviolet light curable adhesive.
As shown in fig. 1, in another preferred embodiment of the present invention, the lower base of the isosceles trapezoid prism 2 is far away from the beam splitter 4, the upper base of the isosceles trapezoid prism 2 is close to the beam splitter 4, the period of the grating 1 is denoted by k, the laser wavelength is denoted by λ, the base angle of the lower base of the isosceles trapezoid prism 2 is α, the refractive index of the used optical glass is n, and the parameters λ, k, n, α satisfy the functional relationship: sin α = n × sin (α - λ/kn).
Preferably, the light source 5 is a laser.
Preferably, the beam splitter 4 is a 45 ° beam splitting cube.
Preferably, the grating 1 is a reflective grating, the plane of the grating 1 is parallel to the YZ plane, the grating line is along the Z direction, the grating 1, the isosceles trapezoid prism 2 and the beam splitter 4 are arranged along the X axis, and the isosceles trapezoid prism 2 uses the X axis as a symmetry axis.
Preferably, the deflection prism is formed by connecting an isosceles trapezoid prism 2 and a beam splitting cube by an optical adhesive 3.
Preferably, the optical adhesive 3 is an ultraviolet light curable adhesive.
Compared with the prior art, the polarizing prism provided by the invention can integrate the prism group which is used for deflecting the grating 10-order diffraction light and +/-1-order diffraction light to a parallel emergent state in the existing scheme into a single prism, thereby greatly reducing the complexity and debugging difficulty of an optical path, reducing the volume of the optical path and improving the reliability of the optical path.
In other embodiments, the invention also provides a method for manufacturing the grating diffraction light deflection prism.
Production example
The following is a specific fabrication example of the present invention:
1. the beam splitting cube of 15mm-15mm-15mm can be selected, the working bandwidth is matched with the laser frequency of the light source, and the accuracy of parallelism and perpendicularity of four side faces of the beam splitting cube is guaranteed.
2. The inclined plane inclination angle alpha of the isosceles trapezoid prism can be calculated according to the grating period and the laser wavelength.
3. And processing an isosceles trapezoid prism with a symmetrical inclined plane by taking the bonding surface as a reference surface, wherein the bottom edge of the trapezoid is 15mm as same as that of the beam splitting cube, and the processing precision of the inclined angle alpha of the trapezoid inclined plane is ensured.
4. As shown in fig. 1-2, the beam splitter and the isosceles trapezoid prism are glued together, and the gluing process of the ultraviolet curing glue is used to ensure that the symmetry axes of the beam splitter and the isosceles trapezoid prism are coincident and the side surfaces of the beam splitter and the isosceles trapezoid prism are parallel.
The grating diffraction light deflection prism of the above embodiment of the present invention can be applied to various measuring tools and measuring devices in precision measurement and precision machining.
The foregoing is a more detailed description of the invention in connection with specific preferred embodiments and it is not intended that the invention be limited to these specific details. For those skilled in the art to which the invention pertains, several equivalent substitutions or obvious modifications can be made without departing from the spirit of the invention, and all the properties or uses are considered to be within the scope of the invention.
Claims (4)
1. A grating diffraction light deflection prism used as a detection device of a grating comprises an isosceles trapezoid prism, a beam splitter, a light source and a grating, wherein the light source is a laser, the beam splitter is a 45-degree beam splitting cube, the grating, the isosceles trapezoid prism and the beam splitter are sequentially arranged along the light emitting direction of diffraction light, the light source is arranged on the outer side of the beam splitter, light emitted by the light source is vertically incident on the side surface of the beam splitter, part of light is reflected by the beam splitter and vertically emitted to the grating through the isosceles trapezoid prism, the light is vertically irradiated to the grating to generate 0-order diffraction light and +/-1-order diffraction light, the 0-order diffraction light is emitted through the isosceles trapezoid prism and the beam splitter in a manner that the 0-order diffraction light is perpendicular to the surface of the grating, the +/-1-order diffraction light is obliquely emitted into the isosceles trapezoid prism from the surface of the grating and is internally reflected through the inclined surface of the isosceles trapezoid prism, and is finally emitted through the isosceles trapezoid prism and the beam splitter and is parallel to the 0-order diffraction light; the upper bottom of the isosceles trapezoid prism is far away from the beam splitter, the lower bottom of the isosceles trapezoid prism is close to the beam splitter, the grating period is recorded as k, the laser wavelength is recorded as lambda, the complementary angle of the included angle between the side surface of the beam splitter and the side surface of the isosceles trapezoid prism is alpha, the refractive index of the used optical glass is n, and parameters lambda, k, n and alpha satisfy the functional relationship: α =0.5 arcsin (λ/kn); or the lower bottom of the isosceles trapezoid prism is far away from the beam splitter, the upper bottom of the isosceles trapezoid prism is close to the beam splitter, the grating period is recorded as k, the laser wavelength is recorded as lambda, the lower bottom angle of the isosceles trapezoid prism is alpha, the refractive index of the used optical glass is n, and parameters lambda, k, n and alpha satisfy a functional relationship: sin α = n sin (α - λ/kn); accordingly, the 0 th order diffraction light and the ± 1 st order diffraction light of the grating are deflected to the parallel emission state by the isosceles trapezoid prism.
2. The grating diffractive optical deflection prism of claim 1, wherein the grating is a reflective grating, the plane of the grating is parallel to the YZ plane, the grating lines are along the Z direction, the grating, the isosceles trapezoid prism, and the beam splitter are arranged along the X axis, and the isosceles trapezoid prism has the X axis as the axis of symmetry.
3. The grating diffractive light deflecting prism according to any one of claims 1 to 2, wherein the deflecting prism is composed of an isosceles trapezoidal prism and a beam splitting cube joined by an optical adhesive.
4. The grating diffractive light deflecting prism of claim 3, wherein the optical adhesive is an ultraviolet light curable adhesive.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611217716.2A CN106646907B (en) | 2016-12-26 | 2016-12-26 | Grating diffraction light deflection prism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611217716.2A CN106646907B (en) | 2016-12-26 | 2016-12-26 | Grating diffraction light deflection prism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106646907A CN106646907A (en) | 2017-05-10 |
| CN106646907B true CN106646907B (en) | 2023-01-24 |
Family
ID=58827490
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611217716.2A Active CN106646907B (en) | 2016-12-26 | 2016-12-26 | Grating diffraction light deflection prism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106646907B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107356234B (en) * | 2017-06-30 | 2020-08-18 | 清华大学 | Space attitude passive measuring head based on grating |
| CN107976666B (en) * | 2017-11-23 | 2021-08-10 | 吉林大学 | Multi-line laser radar and light emitter thereof |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1263338A (en) * | 2000-03-17 | 2000-08-16 | 清华大学 | Light-dividing device for reading digital colour multi-layer multi-stage optical disk signal |
| CN1936711A (en) * | 2006-10-18 | 2007-03-28 | 上海微电子装备有限公司 | Alignment system for photoetching device and stage jointing grating system |
| CN102944176A (en) * | 2012-11-09 | 2013-02-27 | 清华大学 | Displacement measuring system of heterodyne grating interferometer |
| CN103292744A (en) * | 2013-06-06 | 2013-09-11 | 西安交通大学 | Roll angle measuring device and method based on diffraction grating displacement |
| CN103424878A (en) * | 2012-12-02 | 2013-12-04 | 上海理工大学 | Polarization light-splitting device |
| CN103644849A (en) * | 2013-12-12 | 2014-03-19 | 哈尔滨工业大学 | Three-dimensional grating displacement measurement system capable of vertically measuring displacement |
| TW201539330A (en) * | 2013-12-27 | 2015-10-16 | Nec Corp | Authentication device and prism body for authentication |
| CN206431376U (en) * | 2016-12-26 | 2017-08-22 | 清华大学深圳研究生院 | A kind of optical grating diffraction light deviation prism |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2953945B1 (en) * | 2009-12-10 | 2011-12-30 | Fastlite | DEVICE FOR THE COMPENSATION OF TIME DISPERSION APPLIED TO THE GENERATION OF ULTRA BRIEF LUMINOUS PULSES. |
| KR101704591B1 (en) * | 2012-02-21 | 2017-02-08 | 에이에스엠엘 네델란즈 비.브이. | Inspection apparatus and method |
| CN104901162A (en) * | 2015-05-28 | 2015-09-09 | 温州泛波激光有限公司 | Laser array beam combining device |
-
2016
- 2016-12-26 CN CN201611217716.2A patent/CN106646907B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1263338A (en) * | 2000-03-17 | 2000-08-16 | 清华大学 | Light-dividing device for reading digital colour multi-layer multi-stage optical disk signal |
| CN1936711A (en) * | 2006-10-18 | 2007-03-28 | 上海微电子装备有限公司 | Alignment system for photoetching device and stage jointing grating system |
| CN102944176A (en) * | 2012-11-09 | 2013-02-27 | 清华大学 | Displacement measuring system of heterodyne grating interferometer |
| CN103424878A (en) * | 2012-12-02 | 2013-12-04 | 上海理工大学 | Polarization light-splitting device |
| CN103292744A (en) * | 2013-06-06 | 2013-09-11 | 西安交通大学 | Roll angle measuring device and method based on diffraction grating displacement |
| CN103644849A (en) * | 2013-12-12 | 2014-03-19 | 哈尔滨工业大学 | Three-dimensional grating displacement measurement system capable of vertically measuring displacement |
| TW201539330A (en) * | 2013-12-27 | 2015-10-16 | Nec Corp | Authentication device and prism body for authentication |
| CN206431376U (en) * | 2016-12-26 | 2017-08-22 | 清华大学深圳研究生院 | A kind of optical grating diffraction light deviation prism |
Non-Patent Citations (3)
| Title |
|---|
| Two-probe optical encoder for absolute positioning of precision stages by using an improved scale grating;Xinghui Li etc.;《Optics Express》;20160906;第24卷(第19期);第6页倒数第1段-第8页第1段，图4 * |
| 用于线值计量的光栅式双光束干涉仪;李赫钟;《光学精密工程》;19851231(第01期);全文 * |
| 衍射式光栅干涉测量系统发展现状及趋势;尚平等;《光学技术》;20110515;第37卷(第03期);全文 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106646907A (en) | 2017-05-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5100266B2 (en) | Encoder | |
| JP4608274B2 (en) | Displacement measuring device | |
| US8829420B2 (en) | Two dimensional encoder system and method | |
| US9097511B2 (en) | Displacement detecting device with a polarization change to a twice-diffracted beam | |
| JP5046780B2 (en) | Optical encoder | |
| JP6641650B2 (en) | Absolute grid scale | |
| US7480060B2 (en) | Interferometric optical position encoder employing spatial filtering of diffraction orders for improved accuracy | |
| US9303979B2 (en) | Optical position measuring device | |
| JP6320267B2 (en) | Optical position measuring device | |
| KR101142947B1 (en) | Interferometer | |
| CN109470177B (en) | Three-dimensional angle measuring method and device based on double gratings | |
| CN106646907B (en) | Grating diffraction light deflection prism | |
| JP5976390B2 (en) | Position measuring device | |
| CN109443219B (en) | Novel displacement sensor with refractive mirror and measuring method thereof | |
| JP2012242389A5 (en) | ||
| US9719809B2 (en) | Optical unit and displacement measuring device | |
| JPS58191907A (en) | Method for measuring extent of movement | |
| TW200631001A (en) | Method of detecting focus error singnal of optical head and optical recording/reproducing apparatus utilizing the same | |
| TW200734600A (en) | Optical measurement unit for real-time measuring angular error of platform and the method thereof | |
| CN206431376U (en) | A kind of optical grating diffraction light deviation prism | |
| US7705289B2 (en) | Scanning unit for an optical position-measuring device | |
| CN106403824A (en) | Grating interferometer based precision altimeter | |
| JPH0126005B2 (en) | ||
| CN108731715B (en) | Optical encoder | |
| CN203811135U (en) | Self focusing principle-based sensing system optical structure |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |