CN104901162A - Laser array beam combining device - Google Patents
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- CN104901162A CN104901162A CN201510284331.7A CN201510284331A CN104901162A CN 104901162 A CN104901162 A CN 104901162A CN 201510284331 A CN201510284331 A CN 201510284331A CN 104901162 A CN104901162 A CN 104901162A
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Abstract
The invention provides a laser array beam combining device. Laser beams emitted by a laser array enter a fast-axis collimating mirror; the laser beams which pass through the fast-axis collimating mirror form one-dimensional quasi parallel beams A; the one-dimensional parallel beams enter a cylindrical mirror and then form two-dimensional quasi parallel beams B; the quasi parallel beams B enter a dispersion unit; the beams which pass through the dispersion unit are returned to the cylindrical mirror according to an original path, and pass through the cylindrical mirror, and then are focused and form a common image point; and therefore, the wave length of each light-emitting point of the laser array can be locked, and the single array beams can be automatically combined together to form a single-point beam, and the brightness of the beams of the laser array can be improved.
Description
Technical field
The present invention relates to diode laser matrix beam shaping and coupling, be specifically related to a kind of laser array beam merging apparatus.
Background technology
The most significant advantage of semiconductor laser array is that electrical efficiency is high, is applicable to very much industrial processes and selects, but shortcoming to be beam quality bad, thus have impact on the scope of commercial Application.
At present, the technology improving its beam quality generally comprises coherent superposition and non-coherent addition two class.Wherein, coherent superposition essence is the superposition of light wave amplitude, effectively can improve the beam quality that semiconductor array exports, but need each superposition sub-light source Phase synchronization to lock, and this technical difficulty is comparatively large, and is not easy to obtain the stable output of powerful homophase; Non-coherent addition is the superposition of light intensity, the methods such as beam shaping method, the polarization addition method and wavelength superposition, existing light intensity superimposing technique is difficult to the light beam obtaining super brightness, and it is limited to the improvement of beam quality, most technology all belongs to passive technology, and under existing array parameter, total beam quality can only be improved by beam shaping passively.
Summary of the invention
Have in view of that, be necessary to provide a kind of laser array beam merging apparatus, this laser array beam merging apparatus by locking laser array each luminous point wavelength and single array beams can being made automatically to synthesize a single-point light beam, thus improves the brightness of laser array light beam.
For achieving the above object, the present invention adopts following technical proposals:
A kind of laser array beam merging apparatus, it is characterized in that, comprise the laser array unit, cylindrical mirror and the dispersion element that set gradually along beam Propagation direction, described laser array unit comprises at least one laser array and the fast axis collimation mirror that arrange corresponding to described laser array;
The laser beam of described laser array outgoing enters to inject described fast axis collimation mirror, laser beam after described fast axis collimation mirror forms One Dimensional Quasi collimated light beam A, two-dimentional quasi-parallel light beam B is formed after described quasi-parallel light beam A enters to inject described cylindrical mirror, described quasi-parallel light beam B enters to inject described dispersion element, light beam after described dispersion element is back to described cylindrical mirror by former road, and after described cylindrical mirror, focus on the common picture point of formation.
In certain embodiments, described laser array is semiconductor laser array or the fiber laser array with gain characteristic.
In certain embodiments, described laser array unit comprises the first laser array, second laser array, the first fast axis collimation mirror that arrange corresponding to described first laser array, the second fast axis collimation mirror that arrange corresponding to described second laser array and bar shaped light combination mirror, described bar shaped light combination mirror comprises spaced diaphotoscope and speculum successively, the laser beam of described first laser array outgoing forms the first quasi-parallel light beam after described first fast axis collimation mirror, diaphotoscope described in described first quasi-parallel light beam transmission, the laser beam of described second laser array outgoing forms the second quasi-parallel light beam after described second fast axis collimation mirror, described second quasi-parallel light beam is reflected by described speculum, formed through the light beam of described diaphotoscope transmission and the light beam that reflects through described speculum and close light beams and enter to inject described cylindrical mirror.
In certain embodiments, described first laser array is placed with described second laser array is mutually vertical.
In certain embodiments, described cylindrical mirror is the focal length of described cylindrical mirror apart from the distance of described laser array.
In certain embodiments, described dispersion element is full-internal reflection type phase grating.
In certain embodiments, described full-internal reflection type phase grating comprises body and is formed at the grating on described body, and described body is fused quartz material.
In certain embodiments, the rectangular or right-angled triangle of described body or oblique angled triangle or spheric.
In certain embodiments, the angle of described oblique angled triangle is Brewster's angle
In certain embodiments, also comprise the selective reflecting unit being arranged at described common picture point place plane, the light beam through described focus of cylindrical mirror is back to described laser array successively after described selective reflecting unit, described cylindrical mirror, described dispersion element, described cylindrical mirror, described fast axis collimation mirror.
In certain embodiments, described selective reflecting unit is cylindrical mirror or fillet speculum, and described fillet speculum comprises the glass mirror with transmission effect and the part reflectance coating being plated on described glass mirror subregion.
The technique effect that the present invention adopts technique scheme to bring is:
On the one hand, laser array beam merging apparatus provided by the invention, the laser beam of described laser array outgoing enters to inject described fast axis collimation mirror, laser beam after described fast axis collimation mirror forms One Dimensional Quasi collimated light beam A, two-dimentional quasi-parallel light beam B is formed after described first quasi-parallel light beam enters to inject described cylindrical mirror, described quasi-parallel light beam B enters to inject described dispersion element, light beam after described dispersion element is back to described cylindrical mirror by former road, and after described cylindrical mirror, focus on the common picture point of formation, thus laser array each luminous point wavelength can be locked and make single array beams automatically synthesize single-point light beam, improve the brightness of laser array light beam.
On the other hand, laser array beam merging apparatus provided by the invention also comprises selective reflecting unit, light beam through described focus of cylindrical mirror is back to described laser array successively after described selective reflecting unit, described cylindrical mirror, described dispersion element, described cylindrical mirror, described fast axis collimation mirror, the light beam being back to described laser array is exaggerated, thus achieves its function as laser generation feedback cavity; Simultaneously, light beam again through described laser array outgoing can be back to described laser array again after described selective reflecting parts, such selective reflecting parts serve the effect of exocoel output coupling mirror, thus achieve the different object point in space through comprising the object that dispersion imaging exocoel has identical public picture point, further increase the brightness of laser array.
Accompanying drawing explanation
Fig. 1 is the structural representation of the laser array beam merging apparatus that the embodiment of the present invention one provides.
Fig. 2 is the embodiment of the present invention structural representation of laser array unit that provides of preferred mode one by one.
The structural representation of Fig. 3 is body when being rectangular body full-internal reflection type phase grating.
The structural representation of Fig. 4 is body when being right-angled triangle body full-internal reflection type phase grating.
The structural representation of Fig. 5 is body when being oblique angled triangle body full-internal reflection type phase grating.
The structural representation of Fig. 6 is body when being spheric body full-internal reflection type phase grating.
Fig. 7 is the structural representation of the laser array beam merging apparatus that the embodiment of the present invention two provides.
Fig. 8 is two kinds of distribution forms of the fillet reflectance of reflector distribution that the embodiment of the present invention provides.
Fig. 9 is the two kind situation schematic diagrames of cylindrical mirror as public image point position during selective reflecting unit.
Embodiment
For the ease of understanding the present invention, below with reference to relevant drawings, the present invention is described more fully.Better embodiment of the present invention is given in accompanying drawing.But the present invention can realize in many different forms, is not limited to execution mode described herein.On the contrary, provide the object of these execution modes be make to disclosure of the present invention understand more thorough comprehensively.
" first ", " second " described in the present invention, just to being convenient to the technical program is described, is not limit the technical program." rectangle ", " right-angled triangle ", " oblique angled triangle " described in the present invention, " spheric " are only a kind of modes given wherein, are not limited to mentioned mode.Term as used herein " vertical ", " level ", "left", "right" and similar statement just for illustrative purposes, do not represent it is unique execution mode.
Unless otherwise defined, all technology used herein and scientific terminology are identical with belonging to the implication that those skilled in the art of the present invention understand usually.The object of term used in the description of the invention herein just in order to describe concrete execution mode, is not intended to be restriction the present invention.Term as used herein " and/or " comprise arbitrary and all combinations of one or more relevant Listed Items.
As shown in Figure 1, the laser array beam merging apparatus 100 provided for the embodiment of the present invention one comprises: the laser array unit 110 set gradually along beam Propagation direction, cylindrical mirror 120 and dispersion element 130.Described laser array unit 110 comprises at least one laser array 111 and the fast axis collimation mirror 112 that arrange corresponding to described laser array 111.Wherein, described laser array 110 is for having semiconductor laser array or the fiber laser array of gain characteristic.Described cylindrical mirror 120 is the focal length of described cylindrical mirror 120 apart from the distance of described laser array 111.
The working method of above-mentioned laser array beam merging apparatus 100 is: the laser beam of described laser array 111 outgoing enters to inject described fast axis collimation mirror 112, laser beam after described fast axis collimation mirror 112 forms quasi-parallel light beam A, quasi-parallel light beam B is formed after described quasi-parallel light beam A enters to inject described cylindrical mirror, described quasi-parallel light beam B enters to inject described dispersion element 130, light beam after described dispersion element 130 is back to described cylindrical mirror 120 by former road, and after described cylindrical mirror 120, focus on the common picture point of formation.
Be appreciated that, because laser array 111 is several independently luminous elements, assuming that it has different wavelength, the quasi-parallel light beam that above-mentioned luminous element becomes some bundle different directions after cylindrical mirror 120 enters dispersion element 130 and carries out diffraction, diffraction light incides cylindrical mirror 120 again by former road Return-ing direction substantially, different wavelength angle of diffraction after dispersion element 130 is different, but always there is such a case to occur, the incident light of several different wave lengths above-mentioned, after different angle incoming dispersive unit 130, its respective diffraction light is with an identical angle outgoing, and same point burnt through cylindrical mirror 120 post-concentration again, be referred to as common picture point, thus laser array each luminous point wavelength can be locked and make single array beams automatically synthesize single-point light beam, improve the brightness of laser array light beam.
Refer to Fig. 2, for the embodiment of the present invention structural representation of laser array unit 110 that provides of preferred mode one by one, comprise: the first laser array 113, second laser array 114, corresponding with described first laser array 113 arrange the first fast axis collimation mirror 115, with corresponding the second fast axis collimation mirror 116 that arranges of described second laser array 114 and bar shaped light combination mirror 117, described bar shaped light combination mirror 117 comprises spaced diaphotoscope 118 and speculum 119 successively.
The working method of above-mentioned laser array unit 110 is: the laser beam of described first laser array 113 outgoing forms the first quasi-parallel light beam after described first fast axis collimation mirror 115, diaphotoscope 118 described in described first quasi-parallel light beam transmission, the laser beam of described second laser array 114 outgoing forms the second quasi-parallel light beam after described second fast axis collimation mirror 116, described second quasi-parallel light beam is reflected by described speculum 119, light beam through described diaphotoscope transmission 118 and the light beam formation conjunction light beams through described speculum 119 reflection enter to inject described cylindrical mirror 120.
Be appreciated that, first laser array 113 and the second laser array 114 are respectively the two-dimentional light-emitting area battle array of two independent array compositions, independently fast axis collimation mirror is added with before the battle array of respective face, as the first fast axis collimation mirror 115, second fast axis collimation mirror 116, each array spacing is 2d, bar shaped light combination mirror 117 comprises spaced diaphotoscope 118 and speculum 119 successively, wherein, the corresponding incident beam of diaphotoscope 118 is anti-reflection, adjacent speculum 119 is completely reflecting mirror, place vertical with the second laser array 114 for the first laser array 113, through bar shaped light combination mirror 117 at quick shaft direction six linear array Spatial Couplings of the first laser array 113 and the second laser array 114 outgoing, combine latter two adjacent linear array spacing and become d, thus effectively increase the beam density of quick shaft direction, light beam after this combination, the conjunction bundle Laser output that brightness is higher can be obtained.
Described dispersion element 130 is full-internal reflection type phase grating.Described full-internal reflection type phase grating comprises body and is formed at the grating on described body, and described body is fused quartz material.Rectangular or the right-angled triangle of described body or oblique angled triangle or spheric.Be appreciated that and direct bulk material makes the efficiency gratings that grating can obtain anti-high damage threshold, as, grating is directly produced on fused quartz material, to specific wavelength under total internal reflection and auto-collimation service condition ,-1 order diffraction light can higher than 99%, and Zero-order diffractive is less than 1%; Total internal reflection grating material in the present invention is not limited to quartz material, and other optical materials or crystalline material also can make this type of grating.
Refer to Fig. 3, the structural representation of body full-internal reflection type phase grating 131 when body is rectangular, as can be seen from Figure 3, n2 is the refractive index of air, rectangular raster groove depth is D, and groove width is w, and grating constant is d, during light grating incident from quartz material with auto-collimation angle, when screen periods meets certain condition, incident light is all reflected back toward in quartz prism, and along the opposite direction diffraction of incident grating, its-1 order diffraction up to 99% efficiency, zero order light is less than 1% under normal circumstances.The total internal reflection grating made by this principle does intra-cavity dispersion parts, can obtain the conjunction Shu Xiaoguo closing bundle efficiency and be greater than 90%.
Refer to Fig. 4, the structural representation of body full-internal reflection type phase grating 132 when body is right-angled triangle, as can be seen from Figure 4, light beam incides in quartz with nearly zero degree incidence angle from a right-angle surface, to inclined edge surfaces grating in quartz, its incidence angle is about 45 degree, design screen periods, duty ratio and groove depth, meet collimation condition,-1 order diffraction light returns along incident light direction, from the right-angle surface outgoing of incidence, but having a very little deviation angle perpendicular to the direction of diffraction and incident beam, almost to return efficiency identical on road former in ideal for diffraction efficiency.
Refer to Fig. 5, the structural representation of body full-internal reflection type phase grating 133 when body is oblique angled triangle, as can be seen from Figure 5, the total internal reflection grating that oblique prism makes, its angle can be designed to Brewster's angle, when incident light beam strikes is to air and quartzy interface, can save the technique of plating anti-reflection film to the polarised light in vertical incidence face, and 0 order diffraction light is along another side outgoing, utilization is had to improve its stability of a system to extra heavy conjunction bundle.Special instruction, above-mentioned prism also can use from the right-angle prism only stayed along b, c Linear cut above, and effect is identical.
Refer to Fig. 6, the structural representation of body full-internal reflection type phase grating 134 when body is spheric, as can be seen from Figure 6, the grating of quartz material is looked like fruit and is had certain curvature, on of the present invention setting, can substitute the cylindrical mirror effect before full-internal reflection type phase grating, with single block of such sphere total internal reflection grating, the light emitting array adding selective reflecting parts and have a gain just can form described beam merging apparatus.
The grating advantage of above-mentioned all kinds of concrete structure is that raster density can up to 2200 lines/mm, if do not met to the laser of 980nm the condition that grating equation retrains in atmosphere, grating is not containing multilayer dielectric film, and antibody Monoclonal threshold value is high, suitable with the damage threshold of material itself.
As shown in Figure 7, for the laser array beam merging apparatus 200 that the embodiment of the present invention two provides, be with embodiment one difference, also comprise: the selective reflecting unit 140 being arranged at described common picture point place plane, the light beam focused on through described cylindrical mirror 120 is back to described laser array 111 successively after described selective reflecting unit 140, described cylindrical mirror 120, described dispersion element 130, described cylindrical mirror 120, described fast axis collimation mirror 112.
Preferably, described selective reflecting unit 140 is cylindrical mirror or fillet speculum.When described selective reflecting unit 140 is fillet speculum, it is glass mirror light beam being carried out to transmission in most of region, intermediate position is coated with a very narrow reflectance coating, the width of reflectance coating can be 20um-200um, reflectivity can be 4%-80%, its effect optionally feeds back in different luminous points by the fraction light as zone position of overlap, play the effect selecting optical maser wavelength, refer to Fig. 8, give two kinds of distribution forms of fillet reflectance of reflector distribution, and in reality, its reflectivity distribution can be various curve form; When described selective reflecting unit 140 is cylindrical mirror, also luminous point can be postbacked to the light as branch of district one of described common picture point place plane, cylindrical mirror also can plate fillet reflecting part and strengthen locking effect, bundle rate is closed in further raising, selects suitable curvature and reflectivity to obtain optimum output power in reality.Especially, described cylindrical mirror also can with convex surface as selective reflecting face, and it is identical that its effect and above-mentioned concave surface close Shu Zuoyong.
The selection of above-mentioned reflectance coating can have various distribution in very narrow region, also can plate as narrower two-wire reflective-mode, such as, in the region of 50um, the narrow line reflection of plating two 15um, the anti-reflection interval of spacing difference 20um, also can obtain very high conjunction bundle rate single-point laser and export.
As can be seen from Figure 9, the light beam of laser array 111 outgoing is by corresponding fast axis collimation mirror 112, and become quasi-parallel light output in x direction, linear array is slow-axis direction along the y-axis direction, and slow-axis direction array as shown in the figure comprises three luminescence units, again by cylindrical mirror 120, respective linear array luminescence unit is transformed at slow-axis direction three prescriptions to incide right-angle surface from total internal reflection grating to different quasi-parallel light, grating diffration direction is carried out in y-axis direction, z-axis is the direction of incident light, the direction outgoing of diffraction direction edge-z-axis, but depart from a low-angle with former input path in x-axis direction, arrive on selective reflecting unit 140 after propagating certain distance, by selective reflecting unit 140, the light in light beam a certain region is along the y-axis direction formed outside cavity gas laser with low-angle by its respective luminous point being reflected back linear array along anti-incident direction, through laser amplifier vibration zlasing mode through above-mentioned exocoel, selective reflecting region on selective reflecting unit 140 defines the public picture point of respective luminous point, but respective longitudinal-mode wavelength is slightly different, so the output on selective reflecting unit 140 only has the picture point output beam of a luminescence unit on linear array y direction, but what participate in imaging is each luminous point power summation.Select suitable reflectivity, each luminescence unit can be made to only have in gain bandwidth meet the pattern of public picture point to exist, other pattern can not be vibrated, and linear array multiple spot output beam has been transformed into the characteristic of output on single point light beam.Become in three arrays in the x-direction, the space of three points is closed bundle side by side and is exported.Be appreciated that in actual coelosis process, the position of selective reflecting unit 140 in the scope that the plane annex of common picture point is certain, all can meet the condition of public imaging but the size of trickle change in location to public imaging point has a certain impact.
Especially, if when selective reflecting unit 140 adopts cylindrical mirror to do selective reflecting, the public picture point of selective reflecting on cylinder, also can be adjusted to cylinder sphere center position.When cylindrical mirror is as shown in Figure 8 as selective reflecting unit, two kinds of situations of public image point position, Q point and the imaging of P point, the picture of P point is less than Q's usually.
Be appreciated that, object point due to laser array luminescence respective in laser array unit 110 its wavelength gradient general does not meet the condition of above-mentioned setting, add that the light that the luminous object point of respective laser array sends has certain spectrum width, the plane at common picture point place can be interrupted or continuous print line segment, this depends on object point luminous spectrum width, certain point on line segment represents a specific optical maser wavelength, exceed certain width, respective picture point just has overlap, the light beam of lap is respectively from different luminescence units, there is different wavelength, if now in the plane at common picture point place, the optics that has selective reflecting is placed in the region of heavily falling of imaging, a part of heavily falling region is selected to be back to respective luminous object point with low-angle light beam along former road, as the feedback cavity of laser generation, this part light returned can be exaggerated, the light of other parts does not feed back amplification, disappearance can be decreased to gradually, and the light beam of outgoing again will automatically again through selective reflecting parts, return again thing luminescence unit, selective reflecting parts play exocoel output coupling mirror, automatically the different object point in space is achieved in essence through comprising the object that dispersion imaging exocoel has identical public picture point.It is emphasized that the beam parameter product of common picture point is identical with the beam parameter product of respective thing luminous point, the beam parameter product of object point when not feeding back can be less than under given conditions, if viewed from exocoel output coupling mirror, the power of laser is that thing luminescence is counted and taken advantage of single thing luminous point power, total beam parameter product is identical with a thing luminous point, improves the brightness of laser array in essence.
Above-described embodiment of the present invention, does not form limiting the scope of the present invention.Any amendment done within the spirit and principles in the present invention, equivalent replacement and improvement etc., all should be included within claims of the present invention.
Claims (11)
1. a laser array beam merging apparatus, it is characterized in that, comprise the laser array unit, cylindrical mirror and the dispersion element that set gradually along beam Propagation direction, described laser array unit comprises at least one laser array and the fast axis collimation mirror that arrange corresponding to described laser array;
The laser beam of described laser array outgoing enters to inject described fast axis collimation mirror, laser beam after described fast axis collimation mirror forms One Dimensional Quasi collimated light beam A, two-dimentional quasi-parallel light beam B is formed after described quasi-parallel light beam A enters to inject described cylindrical mirror, described quasi-parallel light beam B enters to inject described dispersion element, light beam after described dispersion element is back to described cylindrical mirror by former road, and after described cylindrical mirror, focus on the common picture point of formation.
2. laser array beam merging apparatus according to claim 1, it is characterized in that, described laser array is semiconductor laser array or the fiber laser array with gain characteristic.
3. laser array beam merging apparatus according to claim 1, it is characterized in that, described laser array unit comprises the first laser array, second laser array, the first fast axis collimation mirror that arrange corresponding to described first laser array, the second fast axis collimation mirror that arrange corresponding to described second laser array and bar shaped light combination mirror, described bar shaped light combination mirror comprises spaced diaphotoscope and speculum successively, the laser beam of described first laser array outgoing forms the first quasi-parallel light beam after described first fast axis collimation mirror, diaphotoscope described in described first quasi-parallel light beam transmission, the laser beam of described second laser array outgoing forms the second quasi-parallel light beam after described second fast axis collimation mirror, described second quasi-parallel light beam is reflected by described speculum, formed through the light beam of described diaphotoscope transmission and the light beam that reflects through described speculum and close light beams and enter to inject described cylindrical mirror.
4. laser array beam merging apparatus according to claim 3, is characterized in that, described first laser array is placed with described second laser array is mutually vertical.
5. laser array beam merging apparatus according to claim 1, it is characterized in that, described cylindrical mirror is the focal length of described cylindrical mirror apart from the distance of described laser array.
6. laser array beam merging apparatus according to claim 1, it is characterized in that, described dispersion element is full-internal reflection type phase grating.
7. laser array beam merging apparatus according to claim 6, is characterized in that, described full-internal reflection type phase grating comprises body and is formed at the grating on described body, and described body is fused quartz material.
8. laser array beam merging apparatus according to claim 7, is characterized in that, the rectangular or right-angled triangle of described body or oblique angled triangle or spheric.
9. laser array beam merging apparatus according to claim 8, is characterized in that, the angle of described oblique angled triangle is Brewster's angle.
10. laser array beam merging apparatus according to claim 1, it is characterized in that, also comprise the selective reflecting unit being arranged at described common picture point place plane, the light beam through described focus of cylindrical mirror is back to described laser array successively after described selective reflecting unit, described cylindrical mirror, described dispersion element, described cylindrical mirror, described fast axis collimation mirror.
11. laser array beam merging apparatus according to claim 10, it is characterized in that, described selective reflecting unit is cylindrical mirror or fillet speculum, and described fillet speculum comprises one to be had the glass mirror of transmission effect and is plated on the part reflectance coating of described glass mirror subregion.
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Application publication date: 20150909 |