CN106646293B - Device and method for non-contact measurement of magneto-induced strain with high precision and large range - Google Patents
Device and method for non-contact measurement of magneto-induced strain with high precision and large range Download PDFInfo
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Abstract
Description
技术领域technical field
本发明涉及测量技术领域，特别涉及一种高精度大量程非接触式测量磁致应变的装置及方法。The invention relates to the technical field of measurement, in particular to a high-precision, large-range non-contact measurement device and method for magneto-induced strain.
背景技术Background technique
Ni-Mn-Ga铁磁形状记忆合金不但具有传统形状记忆合金受温度场控制的热弹性形状记忆效应，而且具有受磁场控制的磁形状记忆效应。在外加磁场的条件下，可以通过马氏体孪晶变体的再取向产生大的磁致应变，磁致应变量能够达到6～12％。Ni-Mn-Ga铁磁形状记忆合金在大功率水下声纳、微位移器、震动和噪声控制、线性马达、微波器件等领域有重要应用，已成为继压电陶瓷和磁致伸缩材料之后的新一代驱动与传感材料。因此精确测量Ni-Mn-Ga铁磁形状记忆合金的磁致应变性能对其在工程领域的应用有着及其重要的意义。The Ni-Mn-Ga ferromagnetic shape memory alloy not only has the thermoelastic shape memory effect controlled by the temperature field of the traditional shape memory alloy, but also has the magnetic shape memory effect controlled by the magnetic field. Under the condition of an external magnetic field, a large amount of magneto-induced strain can be generated through the re-orientation of the martensitic twinned variant, and the amount of magneto-induced strain can reach 6-12%. Ni-Mn-Ga ferromagnetic shape memory alloys have important applications in high-power underwater sonar, microdisplacers, vibration and noise control, linear motors, microwave devices, etc. A new generation of actuation and sensing materials. Therefore, accurate measurement of the magneto-strain properties of Ni-Mn-Ga ferromagnetic shape memory alloys is of great significance for its application in engineering.
Ni-Mn-Ga铁磁形状记忆合金包括互为孪晶关系的马氏体A和马氏体B，在外加磁场的作用下，Ni-Mn-Ga铁磁形状记忆合金产生磁致应变的机理是两个互为孪晶关系的马氏体变体的再取向，其磁致应变表现为剪切应变，制作Ni-Mn-Ga铁磁形状记忆合金的样品，样品的形状为长方体，当磁场方向与样品的马氏体A的易磁化轴方向平行时，马氏体A的尺寸会缩短，马氏体B的尺寸就会伸长，反之，当磁场方向与样品的马氏体B的易磁化轴方向平行时，马氏体B的尺寸会缩短，马氏体A的尺寸就会伸长，表现在样品上即样品会在磁场的作用下，实现长度方向的伸长，宽度方向的缩短或者长度方向的缩短，宽度方向的伸长，而样品在高度方向的尺寸变化较小可以忽略不计，因此可以仅测量样品与磁场平行方向的应变或者仅测量样品与磁场垂直方向的应变即可表征其磁致应变性能。Ni-Mn-Ga ferromagnetic shape memory alloy includes martensite A and martensite B which are twinned with each other. Under the action of an external magnetic field, the mechanism of magneto-induced strain in Ni-Mn-Ga ferromagnetic shape memory alloy It is the reorientation of two martensitic variants that are twinned with each other, and its magneto-induced strain is expressed as shear strain. A sample of Ni-Mn-Ga ferromagnetic shape memory alloy is made. The shape of the sample is a cuboid. When the magnetic field When the direction is parallel to the easy magnetization axis of martensite A of the sample, the size of martensite A will be shortened, and the size of martensite B will be elongated. When the direction of the magnetization axis is parallel, the size of martensite B will be shortened, and the size of martensite A will be elongated, which is manifested in the sample, that is, the sample will realize the elongation in the length direction and the shortening in the width direction under the action of the magnetic field. Or the shortening in the length direction and the elongation in the width direction, and the dimensional change of the sample in the height direction is small and negligible, so it can be characterized by only measuring the strain of the sample in the direction parallel to the magnetic field or only by measuring the strain in the direction perpendicular to the magnetic field. its magnetostrictive properties.
目前，测量Ni-Mn-Ga铁磁形状记忆合金磁致应变的方法是采用贴应变片的方式进行测量，又称接触式测量，即将贴有应变片的样品置于磁场中，当样品在磁场的作用下，产生磁致应变时，应变片的尺寸会随着样品的尺寸同时改变，在应变片的尺寸发生变化时，应变片的电阻值会发生变化，通过数据采集卡和采集软件读取应变片电阻值变化产生的电压信号，可以计算出样品的应变值。但在使用应变片方法进行测量的过程中发现，由于Ni-Mn-Ga铁磁形状记忆合金的磁致应变非常大，最大应变量12％，即假如样品长度尺寸为10mm时，其最大应变量可达到1.2mm，但应变片本身的变形量有限，当样品的应变量大于应变片的最大变形量时，即使样品继续产生应变，应变片的尺寸不会继续随着样品的尺寸同时改变，使得测量的数据小于样品实际的形变量，同时，由于，应变片是粘结在样品的表面上，当样品产生变形量较大时，粘结在样品表面的应变片会阻碍样品的变形，因此接触式测量的方法会影响测量结果的精度。At present, the method of measuring the magneto-induced strain of Ni-Mn-Ga ferromagnetic shape memory alloy is to measure the strain gauge, also known as contact measurement, that is, the sample with the strain gauge is placed in a magnetic field, when the sample is in the magnetic field Under the action of the magneto-induced strain, the size of the strain gauge will change with the size of the sample at the same time. When the size of the strain gauge changes, the resistance value of the strain gauge will change, which can be read through the data acquisition card and acquisition software. The voltage signal generated by the change of the resistance value of the strain gauge can calculate the strain value of the sample. However, during the measurement using the strain gauge method, it was found that due to the very large magneto-induced strain of the Ni-Mn-Ga ferromagnetic shape memory alloy, the maximum strain amount is 12%, that is, if the length of the sample is 10mm, the maximum strain amount It can reach 1.2mm, but the deformation of the strain gauge itself is limited. When the strain of the sample is greater than the maximum deformation of the strain gauge, even if the sample continues to generate strain, the size of the strain gauge will not continue to change with the size of the sample at the same time, so that The measured data is smaller than the actual deformation of the sample. At the same time, since the strain gauge is bonded to the surface of the sample, when the sample is deformed greatly, the strain gauge bonded to the surface of the sample will hinder the deformation of the sample, so the contact The method of measurement will affect the accuracy of the measurement results.
发明内容SUMMARY OF THE INVENTION
为了解决现有技术中存在的当样品的应变量大于应变片的最大变形量时，应变片的尺寸不会继续随着样品的尺寸同时改变，使得测量的数据小于样品实际的形变量，以及当样品产生变形量较大时，粘结在样品表面的应变片会阻碍样品的变形的问题，一方面，本发明实施例提供了一种高精度大量程非接触式测量磁致应变的装置，所述装置包括：电磁铁底座、电磁铁固定支架、第一电磁铁、第二电磁铁、第一支撑杆、第二支撑杆、第一旋钮、第二旋钮、测量固定台、样品台、第一三轴位移台、第二三轴位移台、第一激光位移传感器、第二激光位移传感器、第一连接板、第二连接板和数据处理装置；In order to solve the problem in the prior art that when the strain of the sample is greater than the maximum deformation of the strain gauge, the size of the strain gauge will not continue to change simultaneously with the size of the sample, so that the measured data is smaller than the actual deformation of the sample, and when When the deformation of the sample is large, the strain gauges adhered to the surface of the sample will hinder the deformation of the sample. The device includes: an electromagnet base, an electromagnet fixing bracket, a first electromagnet, a second electromagnet, a first support rod, a second support rod, a first knob, a second knob, a measurement fixing stage, a sample stage, a first A three-axis displacement stage, a second three-axis displacement stage, a first laser displacement sensor, a second laser displacement sensor, a first connecting board, a second connecting board, and a data processing device;
电磁铁固定支架倾斜固定在电磁铁底座上，电磁铁固定支架设有安装槽，第一电磁铁和第二电磁铁分别安装在安装槽的两侧，第一电磁铁接近第二电磁铁的一侧焊接有第一圆锥形极头，第二电磁铁接近第一电磁铁的一侧焊接有第二圆锥形极头，第一支撑杆支撑在第一电磁铁和电磁铁底座之间，第二支撑杆支撑在第二电磁铁和电磁铁底座之间，第一旋钮穿过电磁铁固定支架与第一电磁铁连接，第二旋钮穿过电磁铁固定支架与第二电磁铁连接；The electromagnet fixing bracket is inclined and fixed on the electromagnet base, the electromagnet fixing bracket is provided with an installation slot, the first electromagnet and the second electromagnet are respectively installed on both sides of the installation slot, and the first electromagnet is close to one side of the second electromagnet. The side is welded with a first conical pole, the side of the second electromagnet close to the first electromagnet is welded with a second conical pole, the first support rod is supported between the first electromagnet and the electromagnet base, the second The support rod is supported between the second electromagnet and the electromagnet base, the first knob is connected with the first electromagnet through the electromagnet fixing bracket, and the second knob is connected with the second electromagnet through the electromagnet fixing bracket;
测量固定台包括水平板、垂直板、固定块、第三连接板和第四连接板，水平板位于第一电磁铁和第二电磁铁之间，垂直板支撑在水平板一侧的底面与电磁铁底座之间，固定块安装在水平板另一侧的顶面且固定块与第三连接板的一侧连接，第三连接板的另一侧与第四连接板连接，第四连接板的倾斜角度与电磁铁固定支架的倾斜角度相同，且第四连接板安装在电磁铁固定支架上；The measurement fixed table includes a horizontal plate, a vertical plate, a fixed block, a third connecting plate and a fourth connecting plate. The horizontal plate is located between the first electromagnet and the second electromagnet, and the vertical plate is supported on the bottom surface of the horizontal plate and the electromagnetic. Between the iron bases, the fixing block is installed on the top surface of the other side of the horizontal plate, and the fixing block is connected to one side of the third connecting plate, the other side of the third connecting plate is connected to the fourth connecting plate, and the The inclination angle is the same as the inclination angle of the electromagnet fixing bracket, and the fourth connecting plate is installed on the electromagnet fixing bracket;
样品台安装在测量固定台的中心，第一三轴位移台和第二三轴位移台安装在测量固定台上，第一三轴位移台和第二三轴位移台位于样品台的两侧，第一三轴位移台的中心和第二三轴位移台的中心的连线与第一电磁铁的中心和第二电磁铁的中心的连线垂直；The sample stage is installed in the center of the measurement fixed stage, the first three-axis stage and the second three-axis stage are installed on the measurement stage, and the first three-axis stage and the second three-axis stage are located on both sides of the sample stage. The line connecting the center of the first three-axis stage and the center of the second three-axis stage is perpendicular to the line connecting the center of the first electromagnet and the center of the second electromagnet;
第一激光位移传感器通过第一连接板安装在第一三轴位移台的Z方向调整块上，第二激光位移传感器通过第二连接板安装在第二三轴位移台的Z方向调整块上；The first laser displacement sensor is installed on the Z-direction adjustment block of the first three-axis displacement stage through the first connecting plate, and the second laser displacement sensor is installed on the Z-direction adjustment block of the second three-axis displacement stage through the second connecting plate;
所述第一激光位移传感器以及所述第二激光位移传感器分别和所述数据处理装置连接，所述第一电磁铁以及所述第二电磁铁分别与所述数据处理装置连接。The first laser displacement sensor and the second laser displacement sensor are respectively connected to the data processing device, and the first electromagnet and the second electromagnet are respectively connected to the data processing device.
另一方面，本发明实施例提供了一种使用所述高精度大量程非接触式测量磁致应变的装置测量磁致应变的方法，所述方法包括：On the other hand, an embodiment of the present invention provides a method for measuring magneto-induced strain by using the device for measuring magneto-induced strain with high precision and large range, and the method includes:
步骤1：将样品固定放置于所述样品台上，打开所述第一激光位移传感器和所述第二激光位移传感器，调整所述第一三轴位移台，使第一激光位移传感器发出的激光处在样品的第一面，调整所述第二三轴位移台，使第二激光位移传感器发出的激光处在样品的第二面，第一面和第二面互相平行；Step 1: Fix the sample on the sample stage, turn on the first laser displacement sensor and the second laser displacement sensor, and adjust the first three-axis displacement stage so that the laser light emitted by the first laser displacement sensor On the first surface of the sample, adjust the second three-axis stage, so that the laser emitted by the second laser displacement sensor is on the second surface of the sample, and the first surface and the second surface are parallel to each other;
步骤2：通过数据处理装置设定需要测量的磁场数值，在磁场的作用下，样品的第一面和第二面分别产生位移变化，处在第一面上的激光的反射光路发生变化，处在第二面上的激光的反射光路发生变化，使第一激光位移传感器和第二激光位移传感器产生电压信号，当磁场大小达到设定值时，数据处理装置读取第一激光位移传感器产生的第一电压信号，读取第二激光位移传感器产生的第二电压信号；Step 2: Set the value of the magnetic field to be measured by the data processing device. Under the action of the magnetic field, the displacement of the first surface and the second surface of the sample changes respectively, and the reflected optical path of the laser on the first surface changes. The reflected light path of the laser on the second surface changes, so that the first laser displacement sensor and the second laser displacement sensor generate voltage signals. When the magnetic field reaches the set value, the data processing device reads the output generated by the first laser displacement sensor. the first voltage signal, read the second voltage signal generated by the second laser displacement sensor;
步骤3：数据处理装置将第一电压信号和第二电压信号转化成数字信号，并根据电压与位移变化值的线性对应关系，分别计算出第一电压信号对应的位移变化值ΔL1以及第二电压信号对应的位移变化值ΔL2，并根据如下公式计算出样品的应变量：Step 3: The data processing device converts the first voltage signal and the second voltage signal into digital signals, and calculates the displacement change value ΔL 1 corresponding to the first voltage signal and the second displacement change value according to the linear correspondence between the voltage and the displacement change value. The displacement change value ΔL 2 corresponding to the voltage signal, and the strain amount of the sample is calculated according to the following formula:
其中，ε为样品的应变量，L为样品的初始长度或宽度。where ε is the strain amount of the sample, and L is the initial length or width of the sample.
本发明实施例中的高精度大量程非接触式测量磁致应变的装置，在测量Ni-Mn-Ga铁磁形状记忆合金样品的应变时，通过第一激光位移传感器和第二激光位移传感器射出的激光在样品表面产生的反射回路的变化来计算样品发生的应变量，在此过程中无需与样品进行接触，实现了对样品的非接触式测量，如此无需在样品的表面贴应变片，因此，样品在发生应变的过程中不会受到应变片最大变形量的限制，也避免了粘结在样品表面的应变片阻碍样品的变形的问题，使得测量的数据准确，提高了测量的精度，其中第一激光位移传感器和第二激光位移传感器的最大量程均为2mm，因此可以测量的样品的最大位移变化值为4mm，进而使得该装置可以测量的应变量的量程较大，本发明中的装置操作方便，而且制作过程简单，可以在实验室内进行推广，能够有效地测量Ni-Mn-Ga铁磁形状记忆合金的磁致应变性能，对Ni-Mn-Ga铁磁形状记忆合金在大功率水下声纳、微位移器、震动和噪声控制、线性马达、微波器件等领域的研究起到重要意义。In the embodiment of the present invention, the high-precision and large-range non-contact measurement device for magneto-induced strain, when measuring the strain of the Ni-Mn-Ga ferromagnetic shape memory alloy sample, is emitted through the first laser displacement sensor and the second laser displacement sensor. The change of the reflection circuit generated by the laser on the surface of the sample is used to calculate the amount of strain that occurs in the sample. In this process, there is no need to contact the sample, and the non-contact measurement of the sample is realized. In this way, there is no need to attach strain gauges on the surface of the sample, so , the sample will not be limited by the maximum deformation of the strain gauge in the process of strain, and it also avoids the problem that the strain gauge adhered to the surface of the sample hinders the deformation of the sample, so that the measured data is accurate and the measurement accuracy is improved. The maximum range of the first laser displacement sensor and the second laser displacement sensor are both 2mm, so the maximum displacement change value of the sample that can be measured is 4mm, and the range of the strain amount that can be measured by the device is larger. The device in the present invention The operation is convenient, and the production process is simple, which can be promoted in the laboratory, and can effectively measure the magneto-induced strain properties of Ni-Mn-Ga ferromagnetic shape memory alloys. Research in the fields of underwater sonar, micro-displacer, vibration and noise control, linear motor, and microwave devices plays an important role.
附图说明Description of drawings
为了更清楚地说明本发明实施例中的技术方案，下面将对实施例描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。In order to illustrate the technical solutions in the embodiments of the present invention more clearly, the following briefly introduces the accompanying drawings used in the description of the embodiments. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can also be obtained from these drawings without creative effort.
图1是本发明实施例一提供的高精度大量程非接触式测量磁致应变的装置的结构示意图；1 is a schematic structural diagram of a device for non-contact measurement of magneto-induced strain with high precision and a large range provided by Embodiment 1 of the present invention;
图2是本发明实施例一提供的高精度大量程非接触式测量磁致应变的装置的剖面图；2 is a cross-sectional view of a device for non-contact measurement of magneto-induced strain with high precision and large range provided by Embodiment 1 of the present invention;
图3是本发明实施例一提供的高精度大量程非接触式测量磁致应变的装置的局部示意图；3 is a partial schematic diagram of a device for high-precision, large-range non-contact measurement of magneto-induced strain provided by Embodiment 1 of the present invention;
图4是本发明实施例一提供的高精度大量程非接触式测量磁致应变的装置的测量原理图；4 is a measurement principle diagram of a device for high-precision, large-range non-contact measurement of magneto-induced strain provided by Embodiment 1 of the present invention;
图5是本发明实施例二提供的数据处理装置测量磁致应变的流程图；FIG. 5 is a flow chart of measuring magneto-induced strain by the data processing device provided in the second embodiment of the present invention;
图6是本发明实施例二提供的高精度大量程非接触式测量磁致应变的装置对某定向凝固Ni-Mn-Ga铁磁形状记忆合金样品进行测量后得到的应变曲线。6 is a strain curve obtained after measuring a directional solidified Ni-Mn-Ga ferromagnetic shape memory alloy sample by the device for high-precision, large-range non-contact measurement of magneto-induced strain provided in the second embodiment of the present invention.
其中，in,
1电磁铁底座；2电磁铁固定支架，21安装槽；3第一电磁铁；1 electromagnet base; 2 electromagnet fixing bracket, 21 installation slot; 3 first electromagnet;
4第二电磁铁，41电磁铁线圈，42磁极，43软磁芯；5第一支撑杆；6第二支撑杆；7第一旋钮；8第二旋钮；4 Second electromagnet, 41 electromagnet coil, 42 magnetic pole, 43 soft magnetic core; 5 first support rod; 6 second support rod; 7 first knob; 8 second knob;
9测量固定台，91水平板，92垂直板，93固定块；9 measuring fixed table, 91 horizontal plate, 92 vertical plate, 93 fixed block;
10样品台；10 sample tables;
11第一三轴位移台，111Z方向调整块，112Y方向上调整块，113Y方向下调整块，114X方向上调整块，115X方向下调整块，116第一三轴位移台的固定底座；11 The first three-axis stage, 111Z direction adjustment block, 112Y direction adjustment block, 113Y direction downward adjustment block, 114X direction upward adjustment block, 115X direction downward adjustment block, 116 Fixed base of the first three-axis stage;
12第二三轴位移台，121Z方向调整块，122Y方向上调整块，123Y方向下调整块，124X方向上调整块，125X方向下调整块，126固定底座；12 The second three-axis translation stage, 121Z direction adjustment block, 122Y direction adjustment block, 123Y direction downward adjustment block, 124X direction upward adjustment block, 125X direction downward adjustment block, 126 Fixed base;
13第一激光位移传感器；14第二激光位移传感器；15第一连接板；16第二连接板；13 The first laser displacement sensor; 14 The second laser displacement sensor; 15 The first connection board; 16 The second connection board;
17样品，17A样品的第一面，17B样品的第二面；17 samples, the first side of 17A samples, the second side of 17B samples;
A第一圆锥形极头；B第二圆锥形极头。A first conical pole tip; B second conical pole tip.
具体实施方式Detailed ways
为了解决现有技术中存在的当样品的应变量大于应变片的最大变形量时，应变片的尺寸不会继续随着样品的尺寸同时改变，使得测量的数据小于样品实际的形变量，以及当样品产生变形量较大时，粘结在样品表面的应变片会阻碍样品的变形的问题，本发明实施例提供了一种高精度大量程非接触式测量磁致应变的装置，如图1所示，且参见图2和图3，该装置包括：电磁铁底座1、电磁铁固定支架2、第一电磁铁3、第二电磁铁4、第一支撑杆5、第二支撑杆6、第一旋钮7、第二旋钮8、测量固定台9、样品台10、第一三轴位移台11、第二三轴位移台12、第一激光位移传感器13、第二激光位移传感器14、第一连接板15、第二连接板16和数据处理装置；In order to solve the problem in the prior art that when the strain of the sample is greater than the maximum deformation of the strain gauge, the size of the strain gauge will not continue to change simultaneously with the size of the sample, so that the measured data is smaller than the actual deformation of the sample, and when When the deformation of the sample is large, the strain gauges adhered to the surface of the sample will hinder the deformation of the sample. The embodiment of the present invention provides a high-precision and large-range non-contact measurement device for magneto-induced strain, as shown in Figure 1. 2 and 3, the device includes: an electromagnet base 1, an electromagnet fixing bracket 2, a first electromagnet 3, a second electromagnet 4, a first support rod 5, a second support rod 6, a first A knob 7, a second knob 8, a measurement fixture 9, a sample stage 10, a first three-axis stage 11, a second three-axis stage 12, a first laser displacement sensor 13, a second laser displacement sensor 14, a first connecting board 15, second connecting board 16 and data processing device;
电磁铁固定支架2倾斜固定在电磁铁底座1上，电磁铁固定支架2设有安装槽21，第一电磁铁3和第二电磁铁4分别安装在安装槽21的两侧，第一电磁铁3接近第二电磁铁4的一侧焊接有第一圆锥形极头A，第二电磁铁4接近第一电磁铁3的一侧焊接有第二圆锥形极头B，第一支撑杆5支撑在第一电磁铁3和电磁铁底座1之间，第二支撑杆6支撑在第二电磁铁4和电磁铁底座1之间，第一旋钮7穿过电磁铁固定支架2与第一电磁铁3连接，第二旋钮8穿过电磁铁固定支架2与第二电磁铁4连接；The electromagnet fixing bracket 2 is obliquely fixed on the electromagnet base 1. The electromagnet fixing bracket 2 is provided with an installation slot 21. The first electromagnet 3 and the second electromagnet 4 are respectively installed on both sides of the installation slot 21. The first electromagnet 3. The side close to the second electromagnet 4 is welded with a first conical pole head A, and the side of the second electromagnet 4 close to the first electromagnet 3 is welded with a second conical pole head B, and the first support rod 5 supports Between the first electromagnet 3 and the electromagnet base 1, the second support rod 6 is supported between the second electromagnet 4 and the electromagnet base 1, and the first knob 7 passes through the electromagnet fixing bracket 2 and the first electromagnet 3 is connected, the second knob 8 is connected with the second electromagnet 4 through the electromagnet fixing bracket 2;
在本发明实施例中，通过旋转第一旋钮7和第二旋钮8可以调整第一圆锥形极头A和第二圆锥形极头B之间的距离，第一电磁铁3和第二电磁铁4可以采用某公司生产的型号为EM7的电磁铁，如图2所示，第二电磁铁4包括电磁铁线圈41、磁极42和软磁芯43，第一电磁铁3和第二电磁铁4的结构相同；In the embodiment of the present invention, the distance between the first conical pole tip A and the second conical pole tip B can be adjusted by rotating the first knob 7 and the second knob 8, the first electromagnet 3 and the second electromagnet 4. The electromagnet of the model EM7 produced by a certain company can be used. As shown in Figure 2, the second electromagnet 4 includes an electromagnet coil 41, a magnetic pole 42 and a soft magnetic core 43, and the first electromagnet 3 and the second electromagnet 4. have the same structure;
测量固定台9包括水平板91、垂直板92、固定块93、第三连接板94和第四连接板95，水平板91位于第一电磁铁3和第二电磁铁4之间，垂直板92支撑在水平板91一侧的底面与电磁铁底座1之间，固定块93安装在水平板91另一侧的顶面且固定块93与第三连接板94的一侧连接，第三连接板94的另一侧与第四连接板95连接，第四连接板95的倾斜角度与电磁铁固定支架2的倾斜角度相同，且第四连接板95安装在电磁铁固定支架2上；The measurement fixing table 9 includes a horizontal plate 91, a vertical plate 92, a fixed block 93, a third connecting plate 94 and a fourth connecting plate 95. The horizontal plate 91 is located between the first electromagnet 3 and the second electromagnet 4, and the vertical plate 92 Supported between the bottom surface of one side of the horizontal plate 91 and the electromagnet base 1, the fixed block 93 is installed on the top surface of the other side of the horizontal plate 91, and the fixed block 93 is connected to one side of the third connecting plate 94. The third connecting plate The other side of 94 is connected with the fourth connecting plate 95, the inclination angle of the fourth connecting plate 95 is the same as the inclination angle of the electromagnet fixing bracket 2, and the fourth connecting plate 95 is installed on the electromagnet fixing bracket 2;
在本发明实施例中，水平板91、垂直板92、固定块93、第三连接板94和第四连接板95可以是金属板材，例如可以为高强铝合金，垂直板92与电磁铁底座1之间可以采用M6×20的螺栓连接，即螺纹直径为6mm，螺纹长度为20mm的螺栓，垂直板92与水平板91一侧的底面可以采用M6×20的螺栓连接，固定块93与水平板91另一侧的顶面之间可以采用M10×30的螺栓连接，固定块93与第三连接板94之间可以采用M10×30的螺栓连接，第三连接板94和第四连接板95之间可以采用M10×20的螺栓连接；In the embodiment of the present invention, the horizontal plate 91, the vertical plate 92, the fixing block 93, the third connecting plate 94 and the fourth connecting plate 95 may be metal plates, such as high-strength aluminum alloys. The vertical plate 92 and the electromagnet base 1 M6×20 bolts can be used for connection between them, that is, bolts with a thread diameter of 6mm and a thread length of 20mm, the bottom surface of the vertical plate 92 and the horizontal plate 91 can be connected by M6×20 bolts, and the fixing block 93 and the horizontal plate can be connected by M6×20 bolts. The top surface of the other side of 91 can be connected by M10×30 bolts, the fixing block 93 and the third connecting plate 94 can be connected by M10×30 bolts, and the third connecting plate 94 and the fourth connecting plate 95 can be connected by M10×30 bolts. M10×20 bolts can be used for connection between them;
样品台10安装在测量固定台9的中心，第一三轴位移台11和第二三轴位移台12安装在测量固定台9上，第一三轴位移台11和第二三轴位移台12位于样品台10的两侧，第一三轴位移台11的中心和第二三轴位移台12的中心的连线与第一电磁铁3的中心和第二电磁铁4的中心的连线垂直；The sample stage 10 is installed in the center of the measurement fixed stage 9, the first three-axis stage 11 and the second three-axis stage 12 are installed on the measurement stage 9, the first three-axis stage 11 and the second three-axis stage 12 Located on both sides of the sample stage 10, the line connecting the center of the first three-axis stage 11 and the center of the second three-axis stage 12 is perpendicular to the line connecting the center of the first electromagnet 3 and the center of the second electromagnet 4 ;
第一激光位移传感器13通过第一连接板15安装在第一三轴位移台11的Z方向调整块111上，第二激光位移传感器14通过第二连接板16安装在第二三轴位移台12的Z方向调整块121上；The first laser displacement sensor 13 is installed on the Z direction adjustment block 111 of the first three-axis displacement stage 11 through the first connecting plate 15 , and the second laser displacement sensor 14 is installed on the second three-axis displacement stage 12 through the second connecting plate 16 . on the Z direction adjustment block 121;
在本发明实施例中，样品台10可以安装在水平板91的中心，采用M4×20的螺栓连接；In the embodiment of the present invention, the sample stage 10 can be installed in the center of the horizontal plate 91 and connected by M4×20 bolts;
本发明中的第一三轴位移台11和第二三轴位移台12可以采用某公司生产的型号为LV-612的xyz三轴位移台，如图2所示，第一三轴位移台11可以在竖直Z方向进行调整，进而带动第一激光位移传感器13进行上下运动，第一三轴位移台11还可以分别在水平面的X方向以及Y方向进行调整，进而带动第一激光位移传感器13在水平面内进行运动，该第一三轴位移台11包括Z方向调整块111、Y方向上调整块112，Y方向下调整块113，X方向上调整块114、X方向下调整块115和固定底座116；第二三轴位移台12可以在竖直Z方向进行调整，进而带动第二激光位移传感器14进行上下运动，第二三轴位移台12还可以分别在水平面的X方向以及Y方向进行调整，进而带动第二激光位移传感器14在水平面内进行运动，该第二三轴位移台12包括Z方向调整块121、Y方向上调整块122，Y方向下调整块123，X方向上调整块124、X方向下调整块125和固定底座126；第一三轴位移台11和第二三轴位移台12的每个轴的行程均为±21mm，其中，第一三轴位移台11的固定底座116和第二三轴位移台12的固定底座126均可以采用M4×20的螺栓固定在水平板91上；The first three-axis translation stage 11 and the second three-axis translation stage 12 in the present invention may adopt an xyz three-axis translation stage with a model of LV-612 produced by a company. As shown in FIG. 2 , the first three-axis translation stage 11 It can be adjusted in the vertical Z direction, thereby driving the first laser displacement sensor 13 to move up and down, and the first three-axis displacement stage 11 can also be adjusted in the X and Y directions of the horizontal plane, thereby driving the first laser displacement sensor 13. Moving in the horizontal plane, the first three-axis displacement stage 11 includes a Z-direction adjustment block 111, a Y-direction adjustment block 112, a Y-direction lower adjustment block 113, an X-direction adjustment block 114, an X-direction lower adjustment block 115 and a fixed The base 116; the second three-axis displacement stage 12 can be adjusted in the vertical Z direction, thereby driving the second laser displacement sensor 14 to move up and down, and the second three-axis displacement stage 12 can also be carried out in the X direction and the Y direction of the horizontal plane respectively. adjustment, and then drive the second laser displacement sensor 14 to move in the horizontal plane. The second three-axis displacement stage 12 includes a Z-direction adjustment block 121, a Y-direction adjustment block 122, a Y-direction downward adjustment block 123, and an X-direction adjustment block 124. The downward adjustment block 125 and the fixed base 126 in the X direction; the stroke of each axis of the first three-axis stage 11 and the second three-axis stage 12 is ±21mm, wherein the first three-axis stage 11 is fixed Both the base 116 and the fixed base 126 of the second three-axis displacement stage 12 can be fixed on the horizontal plate 91 by M4×20 bolts;
本发明实施例中的第一激光位移传感器13和第二激光位移传感器14可以采用某公司生产的型号为MTI LTS-025-02的激光位移传感器，该激光位移传感器的数字分辨率为0.038微米，动态分辨率为0.12微米，测量范围为±1mm，即每个激光位移传感器能够测量的样品的位移变化值在－1mm至+1mm之间，因此，本发明实施例中通过两个激光位移传感器共同进行感应测量，使得可以测量的最大量程为4mm，每个激光位移传感器能够测量的位移变化值在－1mm至+1mm之间，位移变化值对应的激光位移传感器产生电压为－0.9V至+0.9V，该激光位移传感器产生的电压与位移变化值成线性关系。The first laser displacement sensor 13 and the second laser displacement sensor 14 in the embodiment of the present invention may adopt a laser displacement sensor with a model of MTI LTS-025-02 produced by a certain company, and the digital resolution of the laser displacement sensor is 0.038 μm. The dynamic resolution is 0.12 microns, and the measurement range is ±1 mm, that is, the displacement change value of the sample that can be measured by each laser displacement sensor is between -1 mm and +1 mm. Inductive measurement is performed, so that the maximum range that can be measured is 4mm, the displacement change value that each laser displacement sensor can measure is between -1mm and +1mm, and the voltage generated by the laser displacement sensor corresponding to the displacement change value is -0.9V to +0.9 V, the voltage generated by the laser displacement sensor has a linear relationship with the displacement change value.
本发明实施例中的第一连接板15和第二连接板16可以使用金属板材，例如高强铝合金板材制成，第一连接板15可以采用M4×10的螺栓分别与第一三轴位移台11的Z方向调整块111和第一激光位移传感器13连接，第二连接板16可以采用M4×10的螺栓分别与第二三轴位移台12的Z方向调整块121和第二激光位移传感器14连接。In the embodiment of the present invention, the first connecting plate 15 and the second connecting plate 16 can be made of metal plates, such as high-strength aluminum alloy plates, and the first connecting plate 15 can be made of M4×10 bolts, which are respectively connected with the first three-axis displacement stage. The Z direction adjustment block 111 of 11 is connected to the first laser displacement sensor 13, and the second connecting plate 16 can be respectively connected to the Z direction adjustment block 121 of the second three-axis displacement stage 12 and the second laser displacement sensor 14 using M4×10 bolts. connect.
现有技术中，第一电磁铁3接近第二电磁铁4的一侧设有一个极头，第二电磁铁4接近第一电磁铁3的一侧也设有一个极头，现有的两个极头尺寸较大，在测量磁致应变的过程中，若想获得较大的磁场，两块电磁铁上的极头必须离的很近，当极头之间的距离较近时，由于极头的尺寸较大，会与第一位移传感器和第二位移传感器产生干涉，因此，为了既保证磁场大小又防止极头与两个位移传感器产生干涉，本发明实施例在第一电磁铁3的极头上焊接第一圆锥形极头A，在第二电磁铁4的极头上焊接第二圆锥形极头B，第一圆锥形极头A和第二圆锥形极头B的形状都为圆锥台，其中圆锥台的底面分别与现有的极头焊接在一起，圆锥台的顶面的直径设置为20mm，底面直径设置为76mm，圆锥台的高度设置为38mm，如此，可以保证正常安装第一激光位移传感器13和第二激光位移传感器14，且当需要较大磁场时，第一圆锥形极头A和第二圆锥形极头B之间的距离即使很小，也不会对第一激光位移传感器13和第二激光位移传感器14产生影响。In the prior art, the side of the first electromagnet 3 close to the second electromagnet 4 is provided with a pole, and the side of the second electromagnet 4 close to the first electromagnet 3 is also provided with a pole. The size of the poles is large. In the process of measuring the magneto-induced strain, if you want to obtain a large magnetic field, the poles on the two electromagnets must be very close. When the distance between the poles is short, due to The size of the pole head is large, which will interfere with the first displacement sensor and the second displacement sensor. Therefore, in order to ensure the size of the magnetic field and prevent the pole head from interfering with the two displacement sensors, the first electromagnet 3 is used in the embodiment of the present invention. The first conical pole tip A is welded on the pole tip of the second electromagnet 4, and the second conical pole tip B is welded on the pole tip of the second electromagnet 4. The shapes of the first conical pole tip A and the second conical pole tip B are both It is a truncated cone, in which the bottom surface of the truncated cone is welded with the existing poles, the diameter of the top surface of the truncated cone is set to 20mm, the diameter of the bottom surface is set to 76mm, and the height of the truncated cone is set to 38mm. Install the first laser displacement sensor 13 and the second laser displacement sensor 14, and when a large magnetic field is required, even if the distance between the first conical pole tip A and the second conical pole tip B is small, it will not affect the sensor. The first laser displacement sensor 13 and the second laser displacement sensor 14 have an influence.
本发明实施例中，第一激光位移传感器13和第二激光位移传感器14与数据处理装置连接，其中，数据处理装置可以为计算机，如图4所示，为本发明的高精度大量程非接触式测量磁致应变的装置的测量原理图，测试原理如下：当需要测量样品17的磁致应变时，可以先制作长方体结构的样品17，将样品17固定在样品台10上，当第一电磁铁3和第二电磁铁4之间没有磁场时，样品的长度为L；当向第一电磁铁3和第二电磁铁4通电时，第一电磁铁3和第二电磁铁4之间产生磁场，磁场方向垂直于纸面，在磁场的作用下，若此时样品17的应变状态是样品的长度伸长，此时产生应变后的样品17为图中的虚线所示，即样品17的第一面17A和第二面17B都产生了的位移，因此，此时射在第一面17A上的激光的反射光路发生变化，第一激光位移传感器13根据反射回的激光产生第一电压信号，并将第一电压信号通过数据线传输给数据处理装置，同时射在第二面17B上的激光的反射光路也发生变化，第二激光位移传感器14根据反射回的激光产生第二电压信号，并将第二电压信号通过数据线传输给数据处理装置，数据处理装置将第一电压信号和第二电压信号转换成数字信号，并且根据电压与位移变化值之间的线性关系(激光位移传感器产生的电压与位移变化值之间存在的线性关系为已知的，在购买激光位移传感器时厂家会给出该线性关系)，计算出第一电压信号对应的ΔL1以及第二电压信号对应的ΔL2，ΔL1即为样品的第一面的位移变化值，ΔL2即为样品的第二面的位移变化值，并根据公式(1)计算出样品的应变量：In the embodiment of the present invention, the first laser displacement sensor 13 and the second laser displacement sensor 14 are connected to a data processing device, wherein the data processing device can be a computer, as shown in FIG. The measurement principle diagram of the device for measuring magneto-induced strain is shown in the figure. When there is no magnetic field between the iron 3 and the second electromagnet 4, the length of the sample is L; when the first electromagnet 3 and the second electromagnet 4 are energized, there is a Magnetic field, the direction of the magnetic field is perpendicular to the paper surface, under the action of the magnetic field, if the strain state of the sample 17 is the elongation of the length of the sample, the strained sample 17 is shown by the dotted line in the figure, that is, the sample 17 Both the first surface 17A and the second surface 17B are displaced. Therefore, the reflected optical path of the laser light incident on the first surface 17A changes, and the first laser displacement sensor 13 generates a first voltage signal according to the reflected laser light. , and transmit the first voltage signal to the data processing device through the data line, at the same time, the reflected light path of the laser light on the second surface 17B also changes, and the second laser displacement sensor 14 generates a second voltage signal according to the reflected laser light, The second voltage signal is transmitted to the data processing device through the data line, and the data processing device converts the first voltage signal and the second voltage signal into a digital signal, and according to the linear relationship between the voltage and the displacement change value (the laser displacement sensor generates The linear relationship between the voltage and the displacement change value is known, and the manufacturer will give the linear relationship when purchasing the laser displacement sensor), and calculate the ΔL 1 corresponding to the first voltage signal and the ΔL corresponding to the second voltage signal. 2 , ΔL 1 is the displacement change value of the first surface of the sample, ΔL 2 is the displacement change value of the second surface of the sample, and the strain of the sample is calculated according to formula (1):
其中，ε为样品的应变量，L为样品的初始长度或宽度。where ε is the strain amount of the sample, and L is the initial length or width of the sample.
在本发明实施例中，数据处理装置还分别与第一电磁铁3和第二电磁铁4连接，第一电磁铁3和第二电磁铁4均与电源连接，通过数据处理装置控制输入给两个电磁铁的电流大小进而控制磁场强度，可以通过数据处理装置设定需要测量的磁场数值，数据处理装置根据设定的磁场数值分别向第一电磁铁3和第二电磁铁4输入电流，使第一电磁铁3和第二电磁铁4产生的磁场达到所需数值，并在该磁场数值下对样品17的应变进行测量。In the embodiment of the present invention, the data processing device is further connected to the first electromagnet 3 and the second electromagnet 4 respectively, the first electromagnet 3 and the second electromagnet 4 are both connected to the power supply, and the data processing device controls the input to the two electromagnets. The magnitude of the current of each electromagnet is used to control the intensity of the magnetic field. The value of the magnetic field to be measured can be set by the data processing device. The magnetic field generated by the first electromagnet 3 and the second electromagnet 4 reaches the desired value, and the strain of the sample 17 is measured at the value of the magnetic field.
本发明实施例中的高精度大量程非接触式测量磁致应变的装置，在测量Ni-Mn-Ga铁磁形状记忆合金样品的应变时，通过第一激光位移传感器13和第二激光位移传感器14射出的激光在样品表面产生的反射回路的变化来计算样品发生的应变量，在此过程中无需与样品进行接触，实现了对样品的非接触式测量，如此无需在样品的表面贴应变片，因此，样品在发生应变的过程中不会受到应变片最大变形量的限制，也避免了粘结在样品表面的应变片阻碍样品的变形的问题，使得测量的数据准确，提高了测量的精度，其中第一激光位移传感器13和第二激光位移传感器14的最大量程均为2mm，因此可以测量的样品的最大位移变化值为4mm，进而使得该装置可以测量的应变量的量程较大，本发明中的装置操作方便，而且制作过程简单，可以在实验室内进行推广，能够有效地测量Ni-Mn-Ga铁磁形状记忆合金的磁致应变性能，对Ni-Mn-Ga铁磁形状记忆合金在大功率水下声纳、微位移器、震动和噪声控制、线性马达、微波器件等领域的研究起到重要意义。In the embodiment of the present invention, the high-precision and large-range non-contact measurement device for magneto-induced strain is used to measure the strain of the Ni-Mn-Ga ferromagnetic shape memory alloy sample through the first laser displacement sensor 13 and the second laser displacement sensor. 14. The change of the reflection circuit generated by the emitted laser on the surface of the sample is used to calculate the strain amount of the sample. During this process, there is no need to contact the sample, and the non-contact measurement of the sample is realized, so there is no need to attach strain gauges on the surface of the sample. , therefore, the sample will not be limited by the maximum deformation of the strain gauge in the process of strain, and it also avoids the problem that the strain gauge adhered to the surface of the sample hinders the deformation of the sample, so that the measured data is accurate and the measurement accuracy is improved. , wherein the maximum range of the first laser displacement sensor 13 and the second laser displacement sensor 14 is 2mm, so the maximum displacement change value of the sample that can be measured is 4mm, which makes the range of the strain amount that can be measured by the device larger. The device in the invention is easy to operate, and the production process is simple, can be promoted in the laboratory, can effectively measure the magneto-induced strain performance of the Ni-Mn-Ga ferromagnetic shape memory alloy, and can effectively measure the magnetic strain performance of the Ni-Mn-Ga ferromagnetic shape memory alloy. Alloys play an important role in the research of high-power underwater sonar, micro-displacers, vibration and noise control, linear motors, and microwave devices.
实施例二Embodiment 2
本发明实施例提供了一种使用实施例一中的高精度大量程非接触式测量磁致应变的装置测量磁致应变的方法，该方法包括：An embodiment of the present invention provides a method for measuring magneto-induced strain by using the device for measuring magneto-induced strain with high precision and large range in the first embodiment, and the method includes:
步骤1：将样品固定放置于样品台10上，打开第一激光位移传感器13和第二激光位移传感器14，调整第一三轴位移台11，使第一激光位移传感器13发出的激光处在样品的第一面(17A)，调整第二三轴位移台12，使第二激光位移传感器14发出的激光处在样品的第二面(17B)，第一面(17A)和第二面(17B)互相平行；Step 1: Fix the sample on the sample stage 10, turn on the first laser displacement sensor 13 and the second laser displacement sensor 14, and adjust the first three-axis displacement stage 11 so that the laser light emitted by the first laser displacement sensor 13 is located in the sample. the first surface (17A) of the sample, adjust the second three-axis stage 12 so that the laser light emitted by the second laser displacement sensor 14 is located on the second surface (17B), the first surface (17A) and the second surface (17B) of the sample ) are parallel to each other;
步骤2：通过数据处理装置设定需要测量的磁场数值，在磁场的作用下，样品17的第一面17A和第二面17B分别产生位移变化，处在第一面17A上的激光的反射光路发生变化，处在第二面17B上的激光的反射光路发生变化，使第一激光位移传感器13和第二激光位移传感器14产生电压信号，当磁场大小达到设定值时，数据处理装置读取第一激光位移传感器13产生的第一电压信号，读取第二激光位移传感器14产生的第二电压信号；Step 2: The value of the magnetic field to be measured is set by the data processing device. Under the action of the magnetic field, the displacement of the first surface 17A and the second surface 17B of the sample 17 are respectively changed, and the reflected light path of the laser light on the first surface 17A is generated. When the change occurs, the reflected optical path of the laser light on the second surface 17B changes, so that the first laser displacement sensor 13 and the second laser displacement sensor 14 generate voltage signals. When the magnetic field reaches the set value, the data processing device reads The first voltage signal generated by the first laser displacement sensor 13 is read, and the second voltage signal generated by the second laser displacement sensor 14 is read;
步骤3：数据处理装置将第一电压信号和第二电压信号转化成数字信号，并根据电压与位移变化值的线性对应关系，分别计算出第一电压信号对应的位移变化值ΔL1以及第二电压信号对应的位移变化值ΔL2，并根据公式(1)计算出样品17的应变量ε。Step 3: The data processing device converts the first voltage signal and the second voltage signal into digital signals, and calculates the displacement change value ΔL 1 corresponding to the first voltage signal and the second displacement change value according to the linear correspondence between the voltage and the displacement change value. The displacement change value ΔL 2 corresponding to the voltage signal, and the strain amount ε of the sample 17 is calculated according to formula (1).
在本发明实施例中，如图5所示，为本发明中的数据处理装置测量磁致应变的流程图，可以通过数据处理装置打开第一激光位移传感器13和第二激光位移传感器14，第一激光位移传感器13和第二激光位移传感器14可以通过RS232串口与数据处理装置连接。还可以通过数据处理装置控制第一电磁铁3和第二电磁铁4产生的磁场，第一电磁铁3和第二电磁铁4可以通过RS232串口与数据处理装置连接，通过数据处理装置设定需要测量的磁场数值，在本发明实施例中，可以通过设定最大磁场数值E以及采样点数S来得出需要测量的磁场数值，其中，E>0，S为大于0的整数，其中，需要测量的磁场数值分别为E/S、2E/S、3E/S、4E/S……SE/S，在磁场的强度从零逐渐增加到E的过程中，每当磁场达到需要测量的数值时，则数据处理装置读取第一激光位移传感器13产生的第一电压信号以及读取第二激光位移传感器14产生的第二电压信号，根据电压信号与位移变化值的线性关系，得出第一电压信号对应的位移变化值ΔL1以及第二电压信号对应的位移变化值ΔL2，如此，可以根据公式(1)得出在每个需要测量的磁场数值下，样品17的应变量；In the embodiment of the present invention, as shown in FIG. 5, it is a flow chart of the data processing device in the present invention for measuring magneto-induced strain. The first laser displacement sensor 13 and the second laser displacement sensor 14 can be turned on through the data processing device, and the A laser displacement sensor 13 and a second laser displacement sensor 14 can be connected to the data processing device through an RS232 serial port. The magnetic field generated by the first electromagnet 3 and the second electromagnet 4 can also be controlled by the data processing device. The first electromagnet 3 and the second electromagnet 4 can be connected to the data processing device through the RS232 serial port, and the data processing device can set the requirements. The measured magnetic field value, in this embodiment of the present invention, can be obtained by setting the maximum magnetic field value E and the number of sampling points S to obtain the magnetic field value to be measured, where E>0, S is an integer greater than 0, wherein, the value of the magnetic field to be measured The values of the magnetic field are E/S, 2E/S, 3E/S, 4E/S...SE/S. In the process of gradually increasing the intensity of the magnetic field from zero to E, whenever the magnetic field reaches the value to be measured, then The data processing device reads the first voltage signal generated by the first laser displacement sensor 13 and the second voltage signal generated by the second laser displacement sensor 14, and obtains the first voltage signal according to the linear relationship between the voltage signal and the displacement change value The corresponding displacement change value ΔL 1 and the displacement change value ΔL 2 corresponding to the second voltage signal, in this way, the strain amount of the sample 17 under each magnetic field value to be measured can be obtained according to formula (1);
例如，设定最大磁场为10000奥斯特，采样点是100个点，则磁场从0逐渐增加到10000奥斯特的过程中，在磁场强度达到100奥斯特时读取第一电压信号和第二电压信号，并根据电压和位移变化值的线性关系以及公式(1)计算出磁场强度在100奥斯特时样品17的应变量；当磁场强度达到200奥斯特时读取第一电压信号和第二电压信号，并根据电压和位移变化值的线性关系以及公式(1)计算出磁场强度在200奥斯特时样品17的应变量；如此类推，当磁场强度达到10000奥斯特时读取第一电压信号和第二电压信号，并根据电压和位移变化值的线性关系以及公式(1)计算出磁场强度在10000奥斯特时样品17的应变量，此时测试已经完成，数据处理装置导出数据，将测试得到的数据以应变曲线的方式表示出来。即将磁场强度做为x轴，每个磁场强度对应的应变量做为y轴，即可作出磁致应变曲线。For example, if the maximum magnetic field is set to 10000 oersteds and the sampling point is 100 points, then in the process of the magnetic field gradually increasing from 0 to 10000 oersteds, when the magnetic field strength reaches 100 oersteds, read the first voltage signal and the second voltage signal, and calculate the strain amount of the sample 17 when the magnetic field strength is 100 oersted according to the linear relationship between the voltage and the displacement change value and formula (1); when the magnetic field strength reaches 200 oersteds, read the first voltage signal and the second voltage signal, and calculate the strain of the sample 17 when the magnetic field strength is 200 oersted according to the linear relationship between the voltage and the displacement change value and formula (1); and so on, when the magnetic field strength reaches 10000 oersteds Read the first voltage signal and the second voltage signal, and calculate the strain amount of the sample 17 when the magnetic field strength is 10,000 oersted according to the linear relationship between the voltage and the displacement change value and formula (1). At this time, the test has been completed, and the data The processing device derives the data, and expresses the data obtained by the test in the form of a strain curve. Taking the magnetic field strength as the x-axis and the strain corresponding to each magnetic field strength as the y-axis, the magneto-induced strain curve can be drawn.
如图6所示，为使用本发明的高精度大量程非接触式测量磁致应变装置对某定向凝固Ni-Mn-Ga铁磁形状记忆合金样品进行测量后得到的应变曲线，其中，曲线C1和曲线C2分别表示施加磁场和去除磁场的过程中该样品的应变值，如曲线C1所示，当实际的磁场的强度较小时，很难驱动样品的马氏体变体发生再取向，因此，样品的应变值较小，当磁场强度超过2500奥斯特时，样品的应变值明显增大，在本发明实施例中，应变值为负值代表样品的尺寸在磁场的作用下发生了伸长，当磁场强度达到10000奥斯特时，样品的应变值达到了饱和，即该合金的磁致应变可以达到5000ppm，即该合金的最大应变量可以达到0.5％；如曲线C2所示，当磁场强度从10000奥斯特逐渐降低的过程中，该样品的应变值先是稍微增大后又逐渐减小，这是因为在磁场强度不断增大的过程中，马氏体变体已经发生了再取向，在磁场强度不断减小的过程中，发生了再取向的马氏体变体不能恢复至初始状态，因此，样品的应变值不能恢复到零，即样品的尺寸不能恢复到初始未施加任何磁场时的大小。As shown in FIG. 6 , it is the strain curve obtained after measuring a directional solidified Ni-Mn-Ga ferromagnetic shape memory alloy sample by using the high-precision and large-range non-contact measuring magneto-induced strain device of the present invention, wherein, curve C 1 and curve C 2 represent the strain values of the sample during the process of applying and removing the magnetic field, respectively. As shown by curve C 1 , when the actual strength of the magnetic field is small, it is difficult to drive the martensitic variant of the sample to reorient , therefore, the strain value of the sample is small. When the magnetic field strength exceeds 2500 Oersted, the strain value of the sample increases significantly. In the embodiment of the present invention, the negative value of the strain value indicates that the size of the sample occurs under the action of the magnetic field. For elongation, when the magnetic field strength reaches 10,000 Oersteds, the strain value of the sample reaches saturation, that is, the magneto-induced strain of the alloy can reach 5,000 ppm, that is, the maximum strain amount of the alloy can reach 0.5%; as shown by curve C 2 It shows that when the magnetic field intensity gradually decreases from 10,000 Oersted, the strain value of the sample first increases slightly and then decreases gradually. This is because in the process of increasing the magnetic field intensity, the martensitic variant has Re-orientation occurs, and in the process of decreasing magnetic field intensity, the re-oriented martensitic variant cannot be restored to the initial state, therefore, the strain value of the sample cannot be restored to zero, that is, the size of the sample cannot be restored to the initial state Size when no magnetic field is applied.
本发明实施例中的高精度大量程非接触式测量磁致应变的装置，主要用来测量Ni-Mn-Ga铁磁形状记忆合金的磁致应变，此外，对于位移变化量大于0.12微米的材料，也可以使用本发明的高精度大量程非接触式测量磁致应变的装置测量其在磁场作用下的应变大小。The high-precision and large-range non-contact measuring device for magneto-induced strain in the embodiment of the present invention is mainly used to measure the magneto-induced strain of Ni-Mn-Ga ferromagnetic shape memory alloy. , and the high-precision, large-range, non-contact measuring device for magneto-induced strain of the present invention can also be used to measure its strain under the action of a magnetic field.
本发明实施例中的高精度大量程非接触式测量磁致应变的装置，在测量Ni-Mn-Ga铁磁形状记忆合金样品17的应变时，通过第一激光位移传感器13和第二激光位移传感器14射出的激光在样品17表面产生的反射回路的变化来计算样品17发生的应变量，在此过程中无需与样品17进行接触，实现了对样品17的非接触式测量，如此无需使在样品17的表面贴应变片，因此，样品17在发生应变的过程中不会受到应变片最大变形量的限制，也避免了粘结在样品17表面的应变片阻碍样品17的变形的问题，使得测量的数据准确，提高了测量的精度，其中第一激光位移传感器13和第二激光位移传感器14的最大量程均为2mm，因此可以测量的样品17的最大位移变化值为4mm，进而使得该装置可以测量的应变量的量程较大，本发明中的装置操作方便，而且制作过程简单，可以在实验室内进行推广，能够有效地测量Ni-Mn-Ga铁磁形状记忆合金的磁致应变性能，对Ni-Mn-Ga铁磁形状记忆合金在大功率水下声纳、微位移器、震动和噪声控制、线性马达、微波器件等领域的研究起到重要意义。In the embodiment of the present invention, the high-precision and large-range non-contact measurement device for magneto-induced strain is used to measure the strain of the Ni-Mn-Ga ferromagnetic shape memory alloy sample 17 through the first laser displacement sensor 13 and the second laser displacement sensor. The change of the reflection circuit generated by the laser light emitted by the sensor 14 on the surface of the sample 17 is used to calculate the amount of strain generated by the sample 17. During this process, there is no need to contact the sample 17, and the non-contact measurement of the sample 17 is realized. The surface of sample 17 is attached with strain gauges. Therefore, sample 17 will not be limited by the maximum deformation of the strain gauge during the process of straining, and the problem that the strain gauge adhered to the surface of sample 17 hinders the deformation of sample 17 is avoided. The measured data is accurate, which improves the measurement accuracy. The maximum ranges of the first laser displacement sensor 13 and the second laser displacement sensor 14 are both 2 mm, so the maximum displacement change value of the sample 17 that can be measured is 4 mm, which makes the device The range of the measurable strain amount is large, the device in the present invention is convenient to operate, and the manufacturing process is simple, can be promoted in the laboratory, and can effectively measure the magneto-induced strain performance of the Ni-Mn-Ga ferromagnetic shape memory alloy , which plays an important role in the research of Ni-Mn-Ga ferromagnetic shape memory alloys in the fields of high-power underwater sonar, micro-displacers, vibration and noise control, linear motors, and microwave devices.
以上所述仅为本发明的较佳实施例，并不用以限制本发明，凡在本发明的精神和原则之内，所作的任何修改、等同替换、改进等，均应包含在本发明的保护范围之内。The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection of the present invention. within the range.
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102072704A (en) * | 2010-11-11 | 2011-05-25 | 清华大学 | Non-contact laser displacement measurement system used for cement-based materials |
| CN102707248A (en) * | 2012-05-30 | 2012-10-03 | 安泰科技股份有限公司 | Device for measuring magnetostriction in dual-channel capacitance method and method thereof |
| CN203551760U (en) * | 2013-10-30 | 2014-04-16 | 河北工业大学 | Magnetic characteristic testing instrument for magnetostrictive material |
| CN203811789U (en) * | 2014-04-22 | 2014-09-03 | 上海复旦天欣科教仪器有限公司 | Magnetostriction coefficient measurement device |
| CN104062610A (en) * | 2014-06-11 | 2014-09-24 | 温州大学 | Device and methods for detecting magnetic property of magnetostriction material |
| CN104406518A (en) * | 2014-11-14 | 2015-03-11 | 中国科学院上海光学精密机械研究所 | Large size laser neodymium glass cladding size and angle non-contact detection device and method |
| WO2015138505A1 (en) * | 2014-03-10 | 2015-09-17 | Qortek, Inc. | Non-contact magnetostrictive current sensor |
-
2016
- 2016-10-14 CN CN201610895945.3A patent/CN106646293B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102072704A (en) * | 2010-11-11 | 2011-05-25 | 清华大学 | Non-contact laser displacement measurement system used for cement-based materials |
| CN102707248A (en) * | 2012-05-30 | 2012-10-03 | 安泰科技股份有限公司 | Device for measuring magnetostriction in dual-channel capacitance method and method thereof |
| CN203551760U (en) * | 2013-10-30 | 2014-04-16 | 河北工业大学 | Magnetic characteristic testing instrument for magnetostrictive material |
| WO2015138505A1 (en) * | 2014-03-10 | 2015-09-17 | Qortek, Inc. | Non-contact magnetostrictive current sensor |
| CN203811789U (en) * | 2014-04-22 | 2014-09-03 | 上海复旦天欣科教仪器有限公司 | Magnetostriction coefficient measurement device |
| CN104062610A (en) * | 2014-06-11 | 2014-09-24 | 温州大学 | Device and methods for detecting magnetic property of magnetostriction material |
| CN104406518A (en) * | 2014-11-14 | 2015-03-11 | 中国科学院上海光学精密机械研究所 | Large size laser neodymium glass cladding size and angle non-contact detection device and method |
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