CN110501114A - Three-dimensional force sensor Calibration of Dynamic device and method - Google Patents
Three-dimensional force sensor Calibration of Dynamic device and method Download PDFInfo
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- CN110501114A CN110501114A CN201910776572.1A CN201910776572A CN110501114A CN 110501114 A CN110501114 A CN 110501114A CN 201910776572 A CN201910776572 A CN 201910776572A CN 110501114 A CN110501114 A CN 110501114A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
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Abstract
The invention discloses three-dimensional force sensor Calibration of Dynamic device and methods, comprising: utilize three-dimensional force sensor Calibration of Dynamic device, the three-dimensional force sensor being calibrated in three-dimensional force sensor installation pedestal will be mounted on to be adjusted in the dynamic force load space of X-axis solid lifter, Y-axis solid lifter and Z axis solid lifter, realize load of the dynamic force on three-dimensional force sensor；Using three-dimensional force sensor Calibration of Dynamic method, the dynamic characteristic Evaluation model for being calibrated three-dimensional force sensor is established, realizes the judgement of the trace performance of three-dimensional force sensor.The present invention can carry out the measurement and calibration of dynamic characteristic to three-dimensional force sensor, realize the dynamic calibration of various forms of impact forces and sinusoidal force.Meet the needs of the dynamic calibration at complex industrial metering scene based on above-mentioned three-dimensional force sensor Calibration of Dynamic device and method.
Description
Technical field
The invention belongs to mechanics field of measuring techniques, are related to three-dimensional force sensor Calibration of Dynamic device and method,
Calibration of Dynamic and qualification suitable for force snesor judge.
Background technique
Dynamic load is usually to be measured using force snesor, and measurement accuracy affects Hang ﹑ traffic fortune of Hang sky
The application power of the high-end precision mechanics equipment such as defeated, weapon.For example, the wing of aircraft is subject to the main portion of housing construction load
Part, reliable wing design are the guarantees of flight safety.Therefore it in the design process of wing, needs through the testing of materials, knot
The dynamic loads measurement means such as structure strength test and aerodynamic experiment, to evaluate the reliability and structural life-time of wing structure.
In this process, force snesor is the Measure Guarantee for realizing dynamic load measurement, and wing performance is commented in the accuracy of measurement
Valence has decisive role.Therefore, carrying out calibration to force snesor dynamic characteristic has very necessary metering meaning.
Currently, there are three types of the calibration methods of force snesor dynamic characteristic, respectively sinusoidal force calibration method, impact force calibration method
With step force calibration method.Wherein, sinusoidal force calibration method generates specified sine by the exciting device that function occurs with waveform
Power carrys out the calibration of force sensor steady-state characteristic；Impact force calibration method generated by way of dropping hammer and freely colliding impact force come
The calibration of force sensor transient response；Step force calibration method is special come force sensor dynamic by way of impacting off-load
The calibration of property.Although these methods can realize that standard force value exports well, it is typically only capable to realize the one dimension force of single axial
Dynamic calibration.With science and technology and application environment complication, three-dimensional force sensor using more more and more universal.Therefore,
Realize that the Calibration of Dynamic of three-dimensional force sensor is particularly important.
Summary of the invention
In view of the deficiencies of the prior art, the present invention proposes three-dimensional force sensor Calibration of Dynamic device and methods.
Three-dimensional force sensor Calibration of Dynamic device of the present invention, specifically includes: X-axis dynamic calibration platform, Y-axis dynamic school
Quasi- platform, Z axis dynamic calibration platform, test platform and vibrating isolation foundation；Wherein, X-axis dynamic calibration platform, Y-axis dynamic calibration are flat
Platform, Z axis dynamic calibration platform and test platform are successively fixedly mounted on vibrating isolation foundation, make X-axis mobile platform the direction of motion,
The direction of motion of Y-axis mobile platform and the direction of motion of Z axis weighted platform are orthogonal；
X-axis dynamic calibration platform includes: X-axis No.1 servo motor, X-axis No.1 shaft coupling, X-axis roller screw, X-axis movement
Platform, X-axis limit switch bracket, the initial limit switch of X-axis, X-axis dead space switch, No. two servo motors of X-axis, X-axis two
Shaft coupling, X-axis weighted platform bracket, X-axis weighted platform, X-axis solid lifter, X-axis refer to force snesor；
X-axis No.1 servo motor is fixedly connected by X-axis No.1 shaft coupling with X-axis roller screw, X-axis roller screw and X
Axis mobile platform is threadedly coupled；X-axis limit switch bracket is fixedly mounted on vibrating isolation foundation, makes the peace of X-axis limit switch bracket
Dress face faces X-axis mobile platform, and the initial limit switch of X-axis and X-axis final limit are separately installed on X-axis limit switch bracket
Switch, wherein the initial limit switch of X-axis is located at close to the side of X-axis No.1 servo motor, and X-axis dead space switch is located at remote
It is mobile that the induction end of side from X-axis No.1 servo motor, the initial limit switch of X-axis and X-axis dead space switch faces X-axis
Platform；It is horizontally installed with X-axis weighted platform bracket on X-axis mobile platform, is sequentially installed with X-axis two on X-axis weighted platform bracket
Number servo motor, No. two shaft couplings of X-axis and X-axis weighted platform, wherein No. two servo motors of X-axis by No. two shaft couplings of X-axis with
X-axis weighted platform is threadedly coupled, and X-axis solid lifter is coaxially installed on X-axis weighted platform and X-axis refers to force snesor, wherein X
Axis is located at one end of X-axis solid lifter with reference to force snesor, for measuring the dynamic force on X-axis solid lifter；X-axis weighted platform
Moving direction perpendicular to X-axis mobile platform moving direction；
X-axis dynamic calibration platform is used to generate the dynamic force of X-direction, its working principle is that: when starting X-axis No.1 servo
Motor will drive X-axis mobile platform to move horizontally along guide rail, adjust the X on X-axis weighted platform by X-axis roller screw
The end center position of axis solid lifter；When starting No. two servo motors of X-axis, X-axis weighted platform will be driven to drive X-axis rigid
Property push rod move horizontally, thus by No. two servo motors of X-axis export when variable displacement be converted into the dynamic on X-axis solid lifter carry
Lotus；The Dynamic Loading of output is to first end face for being calibrated three-dimensional force sensor measuring block, to generate X-direction
Dynamic force；
Y-axis dynamic calibration platform includes: Y-axis No.1 servo motor, Y-axis No.1 shaft coupling, X-axis mobile platform, Y-axis limit
The initial limit switch of switch bracket, Y-axis, Y-axis dead space switch, No. two servo motors of Y-axis, Y-axis No. two shaft couplings, Y-axis add
Carrying platform bracket, Y-axis weighted platform, Y-axis solid lifter, Y-axis refer to force snesor；
Y-axis No.1 servo motor is threadedly coupled by Y-axis No.1 shaft coupling with Y-axis mobile platform；Y-axis limit switch bracket
It is fixedly mounted on vibrating isolation foundation, the mounting surface of Y-axis limit switch bracket is made to face Y-axis mobile platform, Y-axis limit switch branch
The initial limit switch of Y-axis and Y-axis dead space switch are separately installed on frame, wherein the initial limit switch of Y-axis is located at close to Y
The side of axis No.1 servo motor, Y-axis dead space switch are located remotely from the side of Y-axis No.1 servo motor, and Y-axis initially limits
The induction end of switch and Y-axis dead space switch faces Y-axis mobile platform；Y-axis load is horizontally installed on Y-axis mobile platform
It is flat to be sequentially installed with No. two servo motors of Y-axis, No. two shaft couplings of Y-axis and Y-axis load on Y-axis weighted platform bracket for platform support
Platform, wherein No. two servo motors of Y-axis are threadedly coupled by No. two shaft couplings of Y-axis with Y-axis weighted platform, are pacified on Y-axis weighted platform
Force snesor is referred to equipped with Y-axis solid lifter and Y-axis, wherein Y-axis is located at one end of Y-axis solid lifter with reference to force snesor, uses
Dynamic force on measurement Y-axis solid lifter；Moving direction of the moving direction of Y-axis weighted platform perpendicular to Y-axis mobile platform；
Y-axis dynamic calibration platform is used to generate the dynamic force of Y direction, its working principle is that: when starting Y-axis No.1 servo
When motor, just Y-axis mobile platform is driven to move horizontally along guide rail, so as to adjust the Y-axis solid lifter on Y-axis weighted platform
End center position；When starting No. two servo motors of Y-axis, it will drive Y-axis weighted platform that Y-axis solid lifter level is driven to move
It is dynamic, so that the when variable displacement that No. two servo motors of Y-axis export is converted into the dynamic load on Y-axis solid lifter；Output is moved
State load is applied to second end face for being calibrated three-dimensional force sensor measuring block, to generate the dynamic force of Y direction；
Z axis dynamic calibration platform includes: that Z axis servo motor, Z axis weighted platform bracket, Z axis weighted platform, Z axis rigidly push away
Bar, Z axis weighted platform bracket fixing plate, Z axis mounting rack, Z axis refer to force snesor；
Z axis mounting rack is fixed on vibrating isolation foundation, is fixed with Z axis weighted platform bracket and Z axis on the Z axis mounting rack
Weighted platform bracket fixing plate, the Z axis weighted platform bracket fixing plate is for further fixing Z axis weighted platform bracket；Z
It is sequentially installed with Z axis servo motor and Z axis weighted platform on axis weighted platform bracket, wherein Z axis servo motor and Z axis load are flat
Platform is threadedly coupled by shaft coupling；Z axis solid lifter and Z axis are installed with reference to force snesor, Z axis rigidity on Z axis weighted platform
Push rod passes through the upper surface central through hole of Z axis mounting rack, and wherein Z axis is located at one end of Z axis solid lifter with reference to force snesor, uses
Dynamic force on measurement Z axis solid lifter；The moving direction of Z axis weighted platform is perpendicular to vibrating isolation foundation；
Z axis dynamic calibration platform is used to generate the dynamic force of Z-direction, its working principle is that: when starting Z axis servo electricity
Machine will drive Z axis weighted platform that Z axis solid lifter is driven vertically to move, thus the time-varying that Z axis servo motor is exported
It is displaced the dynamic load being converted on Z axis solid lifter；The Dynamic Loading of output is measured to three-dimensional force sensor is calibrated
The third end face of block, to generate the dynamic force of Z-direction；
Test platform includes: to be calibrated three-dimensional force sensor measuring block, be calibrated three-dimensional force sensor, be calibrated three-dimensional force
Sensor installation pedestal；It is calibrated three-dimensional force sensor installation pedestal to be fixedly mounted on vibrating isolation foundation, makes to be calibrated three-dimensional force
The centre of gyration of sensor installation pedestal is located at the underface of the upper surface central through hole of Z axis mounting rack；It is calibrated three-dimensional force biography
The mode that sensor is connected through a screw thread is coaxially mounted to be calibrated the upper surface of three-dimensional force sensor installation pedestal；It is calibrated three
Dimensional force sensor measuring block is connected through a screw thread mode, is coaxially mounted to be calibrated the upper surface of three-dimensional force sensor；It is calibrated
Three-dimensional force sensor measuring block is for receiving the dynamic force from X-axis solid lifter, Y-axis solid lifter and Z axis solid lifter, institute
The dynamic force of X-direction, Y direction and the Z-direction stated is acted on by being calibrated three-dimensional force sensor measuring block and is calibrated
On three-dimensional force sensor.
Three-dimensional force sensor Calibration of Dynamic method of the present invention, specifically comprises the following steps:
S1: installation is calibrated three-dimensional force sensor, adjusts X-axis solid lifter, Y-axis solid lifter and Z axis solid lifter
Spatial position；
S2: using X-axis solid lifter, Y-axis solid lifter and the Z axis solid lifter in step S1, respectively to being calibrated three
Dimensional force sensor applies dynamic force, establishes the dynamic performance model for being calibrated three-dimensional force sensor；
S3: according to the dynamic characteristic Evaluation model for being calibrated three-dimensional force sensor established in step S2, judgement is calibrated
The trace performance of three-dimensional force sensor.
In step S1, the spatial position of adjustment X-axis solid lifter, Y-axis solid lifter and Z axis solid lifter:
Three-dimensional force sensor will be calibrated and be calibrated three-dimensional force sensor measuring block from bottom to top successively according to coaxial
Mode is mounted on the upper surface for being calibrated three-dimensional force sensor installation pedestal；Start X-axis No.1 servo motor and Y-axis No.1 simultaneously
Servo motor, driving X-axis weighted platform move along a straight line along Y direction, and Y-axis weighted platform moves along a straight line along X-direction, makes
The end center for obtaining X-axis solid lifter faces the side end face for being calibrated three-dimensional force sensor measuring block, Y-axis solid lifter
End center faces another side end face for being calibrated three-dimensional force sensor measuring block；Start X-axis No. two servo motors, Y simultaneously
No. two servo motors of axis and Z axis servo motor, effect is: driving X-axis solid lifter moves along a straight line along X-axis, and Y-axis rigidly pushes away
Bar moves along a straight line along Y-axis, and Z axis solid lifter moves along a straight line along Z axis, so that the end of X-axis solid lifter is withstood and is calibrated
One side end face of three-dimensional force sensor measuring block, the end of Y-axis solid lifter, which is withstood, is calibrated three-dimensional force sensor measuring block
The upper surface for being calibrated three-dimensional force sensor measuring block is withstood in another side end face, the end of Z axis solid lifter.
In step S2, the dynamic performance model for being calibrated three-dimensional force sensor is established:
If it is F that X-axis solid lifter, which acts on and is calibrated the dynamic force of a side end face of three-dimensional force sensor measuring block,X(t),
For X-axis dynamic force；It is F that Y-axis solid lifter, which acts on and is calibrated the dynamic force of another side end face of three-dimensional force sensor measuring block,Y
It (t), is Y-axis dynamic force；It is F that Z axis solid lifter, which acts on and is calibrated the dynamic force of the upper surface of three-dimensional force sensor measuring block,Z
It (t), is Z axis dynamic force, the X-axis dynamic force, Y-axis dynamic force and Z axis dynamic force are generated by load generation model respectively, i.e.,
In formula, M is the amplitude of preset dynamic force；△ t is pulse width；T is time variable；ω is angular frequency；For phase
Position；By adjust M, △ t, ω,Parameter size, F can be changedi(t) form and size；FXIt (t) is to utilize X-axis two
The displacement feeding amount l of servo motorX(t) it generates, FYIt (t) is the displacement feeding amount l for utilizing No. two servo motors of Y-axisY(t) it produces
Raw, FZIt (t) is the displacement feeding amount l for utilizing Z axis servo motorZ(t) it generates, three dynamic forces and displacement feeding
Meet following mathematical relationship between amount:
In formula, kiFor the stiffness factor of i axis solid lifter, i.e. kXFor the stiffness factor of X-axis solid lifter；kYFor Y-axis rigidity
The stiffness factor of push rod；kZFor the stiffness factor of Z axis solid lifter；
In order to complete above-mentioned displacement feeding amount, using LabVIEW to No. two described No. two servo motors of X-axis, Y-axis servos
Motor and Z axis servo motor send corresponding pulse signal and generate F to get t momenti(t) the pulsed quantity p needed fori(t) it is
In formula, pi(t) pulsed quantity sent for LabVIEW to servo motor, i.e. pX(t) it is watched for LabVIEW to X-axis two
Take the pulsed quantity of motor transmission；pY(t) pulsed quantity sent for LabVIEW to No. two servo motors of Y-axis；pZIt (t) is LabVIEW
The pulsed quantity sent to Z axis servo motor；P is that roller screw is rotated by 360 ° pulsed quantity used；S is the lead of roller screw；
P is sent to No. two servo motors of X-axis, No. two servo motors of Y-axis and Z axis servo motor respectively in t momentX(t)、pY
(t) and pZ(t) after pulsed quantity, each respective shaft solid lifter will apply dynamic force to three-dimensional force sensor is calibrated；Together
When, the power output for being calibrated three-dimensional force sensor is f (t)=(fX(t),fY(t),fZ(t)), wherein fXIt (t) is t moment by school
The X-axis of quasi- three-dimensional force sensor exports dynamic force；fY(t) Y-axis for being calibrated three-dimensional force sensor for t moment exports dynamic force；fZ
(t) Z axis for being calibrated three-dimensional force sensor for t moment exports dynamic force；It establishes pulsed quantity and is calibrated three-dimensional force sensor
Relationship between power output f (t) obtains the dynamic performance model for being calibrated three-dimensional force sensor, i.e.,
In formula, TX(t)、TY(t)、TZIt (t) is respectively X-axis dynamic force carry-over factor, the Y-axis for being calibrated three-dimensional force sensor
Dynamic force carry-over factor, Z axis dynamic force carry-over factor.
In step S3, according to the dynamic characteristic Evaluation model for being calibrated three-dimensional force sensor, judgement is calibrated three-dimensional force biography
The dynamic property of sensor:
The trace performance tolerance that each axis is set separately is δi, it may be assumed that the X-axis output for being calibrated three-dimensional force sensor is dynamic
The trace performance tolerance of state power is set as δX0；The trace performance for being calibrated the Y-axis output dynamic force of three-dimensional force sensor is permitted
Perhaps deviation setting is δY0；The trace performance tolerance for being calibrated the Z axis output dynamic force of three-dimensional force sensor is set as δZ0；
Sliding-model control is carried out to sampling time sequence signal: setting the sampling interval as t0, by the dynamic force acquired in the t time point
At N number of sample, i.e. N=t/t0；Therefore, in N number of sample, t at the time of n-th of sample corresponds ton=nt0, wherein n=1,
2,…,N；
Establish determination strategy:
Meet when simultaneouslyWhen, then determine the dynamic for being calibrated three-dimensional force sensor
Characteristic is qualified；Conversely, then determining that the dynamic characteristic for being calibrated three-dimensional force sensor is unqualified.
Three-dimensional force sensor Calibration of Dynamic device and method of the present invention, the beneficial effect is that: three-dimensional force can be passed
The measurement and calibration that sensor carries out dynamic characteristic are calibrated using three-dimensional force sensor Calibration of Dynamic device by being mounted on
Three-dimensional force sensor in three-dimensional force sensor installation pedestal is adjusted to X-axis solid lifter, Y-axis solid lifter and Z axis and rigidly pushes away
In the dynamic force load space of bar, load of the dynamic force on three-dimensional force sensor is realized；It is special using three-dimensional force sensor dynamic
Property calibration method, establish and be calibrated the dynamic characteristic Evaluation model of three-dimensional force sensor, realize the followability of three-dimensional force sensor
The judgement of energy.Based on above-mentioned three-dimensional force sensor Calibration of Dynamic device and method can be realized various forms of impact forces and
The dynamic calibration of sinusoidal force meets the needs of complex industrial scene dynamic calibration.
Detailed description of the invention
Fig. 1 is side view of the invention；
Fig. 2 is top view of the invention；
Fig. 3 is front view of the invention；
Fig. 4 is right view of the invention；
Wherein:
1-1, X-axis No.1 servo motor, 1-2, X-axis No.1 shaft coupling, 1-3, X-axis roller screw, 1-4, X-axis are mobile flat
Platform, 1-5, X-axis limit switch bracket, the initial limit switch of 1-6, X-axis, 1-7, X-axis dead space switch, 1-8, X-axis two watch
Motor is taken, No. two 1-9, X-axis shaft couplings, 1-10, X-axis weighted platform bracket, 1-11, X-axis weighted platform, 1-12, X-axis rigidly push away
Bar, 1-13, X-axis refer to force snesor；
2-1, Y-axis No.1 servo motor, 2-2, Y-axis No.1 shaft coupling, 2-3, Y-axis mobile platform, 2-4, Y-axis limit switch
Bracket, the initial limit switch of 2-5, Y-axis, 2-6, Y-axis dead space switch, No. two 2-7, Y-axis servo motors, 2-8, Y-axis No. two numbers
Shaft coupling, 2-9, Y-axis weighted platform bracket, 2-10, Y-axis weighted platform, 2-11, Y-axis solid lifter, 2-12, Y-axis reference load pass
Sensor；
3-1, Z axis servo motor, 3-2, Z axis weighted platform bracket, 3-3, Z axis weighted platform, 3-4, Z axis solid lifter,
3-5, Z axis weighted platform bracket fixing plate, 3-6, Z axis refer to force snesor；
4-1, Z axis mounting rack；
5-1, it is calibrated three-dimensional force sensor measuring block, 5-2, is calibrated three-dimensional force sensor, 5-3, is calibrated three-dimensional force
Sensor installation pedestal；
6-1, vibrating isolation foundation；
Specific embodiment
As shown in Figure 1, Figure 2, Figure 3 and Figure 4, the present embodiment provides three-dimensional force sensor Calibration of Dynamic devices, specifically
Include:
X-axis dynamic calibration platform, Y-axis dynamic calibration platform, Z axis dynamic calibration platform, test platform and vibrating isolation foundation；Its
In, X-axis dynamic calibration platform, Y-axis dynamic calibration platform, Z axis dynamic calibration platform and test platform be successively fixedly mounted on every
It shakes on ground 6-1, makes the direction of motion of X-axis mobile platform 1-4, the direction of motion and Z axis weighted platform of Y-axis mobile platform 2-3
The direction of motion of 3-3 is orthogonal；
X-axis dynamic calibration platform includes: X-axis No.1 servo motor 1-1, X-axis No.1 shaft coupling 1-2, X-axis roller screw 1-
3, X-axis mobile platform 1-4, X-axis limit switch bracket 1-5, the initial limit switch 1-6 of X-axis, X-axis dead space switch 1-7, X-axis
No. two servo motor 1-8, No. two shaft coupling 1-9 of X-axis, X-axis weighted platform bracket 1-10, X-axis weighted platform 1-11, X-axis rigidity
Push rod 1-12, X-axis refer to force snesor 1-13；
X-axis No.1 servo motor 1-1 is fixedly connected by X-axis No.1 shaft coupling 1-2 with X-axis roller screw 1-3, described
X-axis roller screw 1-4 is threadedly coupled with X-axis mobile platform；X-axis limit switch bracket 1-5 is fixedly mounted on vibrating isolation foundation, is made
The mounting surface of the X-axis limit switch bracket faces X-axis mobile platform 1-4, distinguishes on the X-axis limit switch bracket
X-axis initial limit switch 1-6 and X-axis dead space switch 1-7 are installed, wherein the X-axis initial limit switch 1-6
In the side close to X-axis No.1 servo motor 1-2, the X-axis dead space switch 1-7 is located remotely from X-axis No.1 servo electricity
The induction end of the side of machine, the initial limit switch of the X-axis and X-axis dead space switch faces X-axis mobile platform 1-4；
Be horizontally installed with X-axis weighted platform bracket 1-10 on the X-axis mobile platform, on the X-axis weighted platform bracket 1-10 according to
It is secondary that No. two servo motor 1-8 of X-axis, X-axis No. two shaft coupling 1-9 and X-axis weighted platform 1-11 are installed, wherein the X-axis two
Number servo motor 1-8 is threadedly coupled by No. two shaft coupling 1-9 of X-axis with X-axis weighted platform 1-11, the X-axis weighted platform
X-axis solid lifter 1-12 and X-axis are coaxially installed on 1-11 with reference to force snesor 1-13, wherein X-axis is located at X with reference to force snesor
One end of axis solid lifter, for measuring the dynamic force on X-axis solid lifter；The mobile side of the X-axis weighted platform 1-11
To the moving direction perpendicular to X-axis mobile platform 1-4；
X-axis dynamic calibration platform is used to generate the dynamic force of X-direction, its working principle is that: when starting X-axis No.1 servo
Motor 1-1 will drive X-axis mobile platform 1-4 to move horizontally along guide rail by X-axis roller screw 1-3, adjustment X-axis load
The end center position of X-axis solid lifter 1-12 on platform 1-11；As starting No. two servo motor 1-8 of X-axis, will drive
X-axis weighted platform 1-11 drives X-axis solid lifter 1-12 to move horizontally, thus by described No. two servo motor outputs of X-axis
When variable displacement be converted into the dynamic force on X-axis solid lifter；The dynamic force of output, which is applied to, is calibrated three-dimensional force sensor measurement
First end face of block 5-1, generates the dynamic force of X-direction；
Y-axis dynamic calibration platform includes: Y-axis No.1 servo motor 2-1, Y-axis No.1 shaft coupling 2-2, X-axis mobile platform 2-
3, No. two initial limit switch 2-5 of Y-axis limit switch bracket 2-4, Y-axis, Y-axis dead space switch 2-6, Y-axis servo motor 2-
7, No. two shaft coupling 2-8 of Y-axis, Y-axis weighted platform bracket 2-9, Y-axis weighted platform 2-10, Y-axis solid lifter 2-11, Y-axis reference
Force snesor 2-12；
Y-axis No.1 servo motor 2-1 is threadedly coupled by Y-axis No.1 shaft coupling 2-2 with Y-axis mobile platform 2-3；Y-axis limit
Bit switch bracket 2-4 is fixedly mounted on vibrating isolation foundation 6-1, and the mounting surface of Y-axis limit switch bracket 2-4 is made to face Y-axis shifting
The initial limit switch 2-5 of Y-axis and Y-axis final limit are separately installed on moving platform 2-3, the Y-axis limit switch bracket 2-4
Switch 2-6, wherein the initial limit switch 2-5 of the Y-axis is located at close to the side of Y-axis No.1 servo motor 2-1, the Y-axis
Dead space switch 2-6 is located remotely from the side of Y-axis No.1 servo motor, the initial limit switch 2-5 of the Y-axis and Y-axis terminal
The induction end of limit switch 2-6 faces Y-axis mobile platform 2-3；Y-axis load is horizontally installed on the Y-axis mobile platform 2-3
Platform support 2-9 is sequentially installed with No. two No. two servo motor 2-7 of Y-axis, Y-axis shaft coupling 2- on the Y-axis weighted platform bracket
8 and Y-axis weighted platform 2-10, No. two servo motor 2-7 of the Y-axis pass through No. two shaft coupling 2-8 of Y-axis and Y-axis weighted platform 2-
10 are threadedly coupled, and Y-axis solid lifter 2-11 and Y-axis are equipped on the Y-axis weighted platform with reference to force snesor 2-12, the Y
Axis is located at one end of Y-axis solid lifter 2-11 with reference to force snesor 2-12, for measuring the dynamic force on Y-axis solid lifter；Y-axis
Moving direction of the moving direction of weighted platform perpendicular to Y-axis mobile platform；
Y-axis dynamic calibration platform is used to generate the dynamic force of Y direction, its working principle is that: Y-axis No.1 servo motor 2-
1 driving Y-axis mobile platform 2-3 is moved horizontally along guide rail, adjusts the Y-axis solid lifter 2-11's on Y-axis weighted platform 2-10
End center position；No. two servo motor 2-7 driving Y-axis weighted platform 2-10 of the Y-axis drive Y-axis solid lifter 2-11 water
Translation is dynamic, and the when variable displacement that No. two servo motors of the Y-axis export is converted into the dynamic force on the top of Y-axis solid lifter；It is defeated
Dynamic force out is applied to second end face for being calibrated three-dimensional force sensor measuring block 5-1, generates the dynamic force of Y direction；
Z axis dynamic calibration platform include: Z axis servo motor 3-1, Z axis weighted platform bracket 3-2, Z axis weighted platform 3-3,
Z axis solid lifter 3-4, Z axis weighted platform bracket fixing plate 3-5, Z axis mounting rack 4-1, Z axis refer to force snesor 3-6；
Z axis mounting rack 4-1 is fixed on vibrating isolation foundation 6-1, is fixed with Z axis weighted platform on the Z axis mounting rack 4-1
Bracket 3-2 and Z axis weighted platform bracket fixing plate 3-5, the Z axis weighted platform bracket fixing plate 3-5 are for further solid
Determine Z axis weighted platform bracket 3-2；It is sequentially installed with Z axis servo motor 3-1 on the Z axis weighted platform bracket and Z axis load is flat
Platform 3-3, the Z axis servo motor 3-1 and Z axis weighted platform 3-3 are threadedly coupled by shaft coupling；The Z axis weighted platform 3-3
On Z axis solid lifter 3-4 and Z axis are installed pass through Z axis mounting rack 4-1 with reference to force snesor 3-6, the Z axis solid lifter 3-4
Upper surface central through hole, the Z axis is located at one end of Z axis solid lifter 3-4 with reference to force snesor 3-6, rigid for measuring Z axis
The dynamic force at property push rod end center；The moving direction of Z axis weighted platform is perpendicular to vibrating isolation foundation 6-1；
Z axis dynamic calibration platform is used to generate the dynamic force of Z-direction, its working principle is that: Z axis servo motor 3-1 drives
Dynamic Z axis weighted platform 3-3 drives Z axis solid lifter 3-4 vertically to move, the when variable displacement that Z axis servo motor 3-1 is exported
It is converted into the dynamic force at the end center of Z axis solid lifter 3-4；The dynamic force of output, which is applied to, is calibrated three-dimensional force sensor survey
The third end face of gauge block 5-1, generates the dynamic force of Z-direction；
Test platform includes: to be calibrated three-dimensional force sensor measuring block 5-1, be calibrated three-dimensional force sensor 5-2, be calibrated
Three-dimensional force sensor installation pedestal 5-3；The three-dimensional force sensor installation pedestal 5-3 that is calibrated is fixedly mounted on vibrating isolation foundation
On 6-1, the upper surface center for making the centre of gyration for being calibrated three-dimensional force sensor installation pedestal 5-3 be located at Z axis mounting rack 4-1 is logical
The underface in hole；The mode that three-dimensional force sensor 5-2 is connected through a screw thread is calibrated to be coaxially mounted to be calibrated three-dimensional force sensing
The upper surface of device installation pedestal 5-3；Be calibrated three-dimensional force sensor measuring block 5-1 be connected through a screw thread mode be coaxially mounted to by
Calibrate the upper surface of three-dimensional force sensor 5-2；Be calibrated three-dimensional force sensor measuring block 5-1 for receive come from X-axis rigidly push away
The dynamic force of bar 1-12, Y-axis solid lifter 2-11 and Z axis solid lifter 3-4, the X-direction, Y direction and Z-direction
Dynamic force acted on by being calibrated three-dimensional force sensor measuring block 5-1 and be calibrated on three-dimensional force sensor 5-2.
The present embodiment also provides three-dimensional force sensor Calibration of Dynamic method, specifically includes the following steps:
S1: installation is calibrated three-dimensional force sensor 5-2, adjustment X-axis solid lifter 1-12, Y-axis solid lifter 2-11 and Z axis
The spatial position of solid lifter 3-4；
S2: using X-axis solid lifter described in step S1, Y-axis solid lifter and Z axis solid lifter, respectively to by school
Quasi- three-dimensional force sensor applies dynamic force, establishes the dynamic performance model for being calibrated three-dimensional force sensor；
S3: according to the dynamic characteristic Evaluation model for being calibrated three-dimensional force sensor established in step S2, judgement is calibrated
The dynamic property of three-dimensional force sensor.
In step S1, the spatial position of adjustment X-axis solid lifter, Y-axis solid lifter and Z axis solid lifter:
To be calibrated three-dimensional force sensor 5-2 and be calibrated three-dimensional force sensor measuring block 5-1 from bottom to top successively according to
Coaxial mode is mounted on the upper surface for being calibrated three-dimensional force sensor installation pedestal 5-3；Start X-axis No.1 servo motor simultaneously
1-1 and Y-axis No.1 servo motor 2-1, driving X-axis weighted platform 1-11 move along a straight line along Y direction, Y-axis weighted platform 2-
10 move along a straight line along X-direction, so that the end center of X-axis solid lifter 1-12, which faces, is calibrated three-dimensional force sensor survey
A side end face of gauge block 5-1, the end center of Y-axis solid lifter 2-11, which faces, is calibrated three-dimensional force sensor measuring block 5-1
Another side end face；Start No. two servo motor 1-8 of X-axis, Y-axis No. two servo motor 2-7 and Z axis servo motor 3-1 simultaneously,
Effect is: driving X-axis solid lifter 1-12 moves along a straight line along X-axis, and Y-axis solid lifter 2-11 moves along a straight line along Y-axis, Z axis
Solid lifter 3-4 moves along a straight line along Z axis, so that the end of X-axis solid lifter, which is withstood, is calibrated three-dimensional force sensor measuring block
A side end face, the end of Y-axis solid lifter withstands another side end face for being calibrated three-dimensional force sensor measuring block, Z axis rigidity
Withstand the upper surface for being calibrated three-dimensional force sensor measuring block in the end of push rod.
In step S2, the dynamic performance model for being calibrated three-dimensional force sensor is established:
If X-axis solid lifter 1-12 acts on the dynamic force for being calibrated a side end face of three-dimensional force sensor measuring block 5-1
For FXIt (t), is X-axis dynamic force；Y-axis solid lifter acts on the dynamic of another side end face for being calibrated three-dimensional force sensor measuring block
State power is FYIt (t), is Y-axis dynamic force；Z axis solid lifter acts on the dynamic of the upper surface for being calibrated three-dimensional force sensor measuring block
State power is FZIt (t), is Z axis dynamic force, by load mould occurs for the X-axis dynamic force, Y-axis dynamic force and Z axis dynamic force respectively
Type generates, i.e.,
In formula, M is the amplitude of preset dynamic load；△ t is pulse width；T is time variable；ω is angular frequency；
For phase；By adjust M, △ t, ω,Parameter size, F can be changedi(t) form and size；FXIt (t) is to utilize X-axis
The displacement feeding amount l of No. two servo motor 1-8X(t) it generates, FYIt (t) is the displacement feeding for utilizing No. two servo motor 2-7 of Y-axis
Measure lY(t) it generates, FZIt (t) is the displacement feeding amount l for utilizing Z axis servo motor 3-1Z(t) it generates, three dynamics
Meet following mathematical relationship between power and displacement feeding amount:
In formula, kiFor the stiffness factor of i axis solid lifter, i.e. kXFor the stiffness factor of X-axis solid lifter；kYFor Y-axis rigidity
The stiffness factor of push rod；kZFor the stiffness factor of Z axis solid lifter；
In order to complete above-mentioned displacement feeding amount, using LabVIEW to No. two described No. two servo motors of X-axis, Y-axis servos
Motor and Z axis servo motor send corresponding pulse signal and generate F to get t momenti(t) the pulsed quantity p needed fori(t) it is
In formula, pi(t) pulsed quantity sent for LabVIEW to servo motor, i.e. pX(t) it is watched for LabVIEW to X-axis two
Take the pulsed quantity of motor transmission；pY(t) pulsed quantity sent for LabVIEW to No. two servo motors of Y-axis；pZIt (t) is LabVIEW
The pulsed quantity sent to Z axis servo motor；P is that roller screw is rotated by 360 ° pulsed quantity used；S is the lead of roller screw；
P is sent to No. two servo motors of X-axis, No. two servo motors of Y-axis and Z axis servo motor respectively in t momentX(t)、pY
(t) and pZ(t) after pulsed quantity, each respective shaft solid lifter will apply dynamic force to three-dimensional force sensor 5-2 is calibrated；
Meanwhile the power output for being calibrated three-dimensional force sensor is f (t)=(fX(t),fY(t),fZ(t)), wherein fXIt (t) is t moment quilt
The X-axis for calibrating three-dimensional force sensor exports dynamic force；fY(t) the Y-axis output dynamic of three-dimensional force sensor is calibrated for t moment
Power；fZ(t) Z axis for being calibrated three-dimensional force sensor for t moment exports dynamic force；It establishes pulsed quantity and is calibrated three-dimensional force sensing
Relationship between the power output f (t) of device obtains the dynamic performance model for being calibrated three-dimensional force sensor, i.e.,
In formula, TX(t)、TY(t)、TZIt (t) is respectively X-axis dynamic force carry-over factor, the Y-axis for being calibrated three-dimensional force sensor
Dynamic force carry-over factor, Z axis dynamic force carry-over factor.
In step S3, according to the dynamic characteristic Evaluation model for being calibrated three-dimensional force sensor, judgement is calibrated three-dimensional force biography
The dynamic property of sensor:
The trace performance tolerance that each axis is set separately is δi, it may be assumed that the X-axis output for being calibrated three-dimensional force sensor is dynamic
The trace performance tolerance of state power is set as δX0；The trace performance for being calibrated the Y-axis output dynamic force of three-dimensional force sensor is permitted
Perhaps deviation setting is δY0；The trace performance tolerance for being calibrated the Z axis output dynamic force of three-dimensional force sensor is set as δZ0；
Sliding-model control is carried out to sampling time sequence signal: setting the sampling interval as t0, by the dynamic force acquired in the t time point
At N number of sample, i.e. N=t/t0；Therefore, in N number of sample, t at the time of n-th of sample corresponds ton=nt0, wherein n=1,
2,…,N；
Establish determination strategy:
Meet when simultaneouslyWhen, then determine the dynamic for being calibrated three-dimensional force sensor
Characteristic is qualified；Conversely, then determining that the dynamic characteristic for being calibrated three-dimensional force sensor is unqualified.
Claims (6)
1. three-dimensional force sensor Calibration of Dynamic device and method, feature includes three-dimensional force sensor Calibration of Dynamic dress
It sets and three-dimensional force sensor Calibration of Dynamic method.
2. three-dimensional force sensor Calibration of Dynamic device and method as described in claim 1, which is characterized in that the three-dimensional
Force snesor Calibration of Dynamic device specifically includes:
X-axis dynamic calibration platform, Y-axis dynamic calibration platform, Z axis dynamic calibration platform, test platform and vibrating isolation foundation；Wherein, X
Axis dynamic calibration platform, Y-axis dynamic calibration platform, Z axis dynamic calibration platform and test platform are with being successively fixedly mounted on vibration isolation
On base, keep the direction of motion of the direction of motion of X-axis mobile platform, the direction of motion of Y-axis mobile platform and Z axis weighted platform mutual
Vertically；
X-axis dynamic calibration platform includes: that X-axis No.1 servo motor, X-axis No.1 shaft coupling, X-axis roller screw, X-axis are mobile flat
Platform, X-axis limit switch bracket, the initial limit switch of X-axis, X-axis dead space switch, No. two servo motors of X-axis, X-axis two connection
Axis device, X-axis weighted platform bracket, X-axis weighted platform, X-axis solid lifter, X-axis refer to force snesor；
X-axis No.1 servo motor is fixedly connected by X-axis No.1 shaft coupling with X-axis roller screw, and X-axis roller screw and X-axis are moved
Moving platform is threadedly coupled；X-axis limit switch bracket is fixedly mounted on vibrating isolation foundation, makes the mounting surface of X-axis limit switch bracket
X-axis mobile platform is faced, the initial limit switch of X-axis is separately installed on X-axis limit switch bracket and X-axis final limit is opened
It closes, wherein the initial limit switch of X-axis is located at close to the side of X-axis No.1 servo motor, and X-axis dead space switch is located remotely from X
It is mobile flat that the induction end of the side of axis No.1 servo motor, the initial limit switch of X-axis and X-axis dead space switch faces X-axis
Platform；It is horizontally installed with X-axis weighted platform bracket on X-axis mobile platform, X-axis two are sequentially installed on X-axis weighted platform bracket
Servo motor, No. two shaft couplings of X-axis and X-axis weighted platform, wherein No. two servo motors of X-axis pass through No. two shaft couplings of X-axis and X
Axis weighted platform is threadedly coupled, and X-axis solid lifter is coaxially installed on X-axis weighted platform and X-axis refers to force snesor, wherein X
Axis is located at one end of X-axis solid lifter with reference to force snesor, for measuring the dynamic force on X-axis solid lifter；X-axis weighted platform
Moving direction perpendicular to X-axis mobile platform moving direction；
X-axis dynamic calibration platform is used to generate the dynamic force of X-direction, its working principle is that: when starting X-axis No.1 servo electricity
Machine will drive X-axis mobile platform to move horizontally along guide rail, adjust the X-axis on X-axis weighted platform by X-axis roller screw
The end center position of solid lifter；When starting No. two servo motors of X-axis, X-axis weighted platform will be driven to drive X-axis rigidity
Push rod moves horizontally, and carries so that the when variable displacement that No. two servo motors of X-axis export is converted into the dynamic on X-axis solid lifter
Lotus；The Dynamic Loading of output is to first end face for being calibrated three-dimensional force sensor measuring block, to generate X-direction
Dynamic force；
Y-axis dynamic calibration platform includes: Y-axis No.1 servo motor, Y-axis No.1 shaft coupling, X-axis mobile platform, Y-axis limit switch
The initial limit switch of bracket, Y-axis, Y-axis dead space switch, No. two servo motors of Y-axis, No. two shaft couplings of Y-axis, Y-axis load are flat
Platform bracket, Y-axis weighted platform, Y-axis solid lifter, Y-axis refer to force snesor；
Y-axis No.1 servo motor is threadedly coupled by Y-axis No.1 shaft coupling with Y-axis mobile platform；Y-axis limit switch bracket is fixed
It is mounted on vibrating isolation foundation, the mounting surface of Y-axis limit switch bracket is made to face Y-axis mobile platform, on Y-axis limit switch bracket
It is separately installed with the initial limit switch of Y-axis and Y-axis dead space switch, wherein the initial limit switch of Y-axis is located at close to Y-axis one
The side of number servo motor, Y-axis dead space switch are located remotely from the side of Y-axis No.1 servo motor, the initial limit switch of Y-axis
Y-axis mobile platform is faced with the induction end of Y-axis dead space switch；Y-axis weighted platform is horizontally installed on Y-axis mobile platform
Bracket is sequentially installed with No. two servo motors of Y-axis, No. two shaft couplings of Y-axis and Y-axis weighted platform on Y-axis weighted platform bracket,
In, No. two servo motors of Y-axis are threadedly coupled by No. two shaft couplings of Y-axis with Y-axis weighted platform, are equipped with Y on Y-axis weighted platform
Axis solid lifter and Y-axis refer to force snesor, and wherein Y-axis is located at one end of Y-axis solid lifter with reference to force snesor, for measuring
Dynamic force on Y-axis solid lifter；Moving direction of the moving direction of Y-axis weighted platform perpendicular to Y-axis mobile platform；
Y-axis dynamic calibration platform is used to generate the dynamic force of Y direction, its working principle is that: when starting Y-axis No.1 servo motor
When, just Y-axis mobile platform is driven to move horizontally along guide rail, so as to adjust the end of the Y-axis solid lifter on Y-axis weighted platform
Center position；When starting No. two servo motors of Y-axis, it will drive Y-axis weighted platform that Y-axis solid lifter is driven to move horizontally,
To which the when variable displacement of No. two servo motors of Y-axis output is converted into the dynamic load on Y-axis solid lifter；The dynamic of output carries
Lotus is applied to second end face for being calibrated three-dimensional force sensor measuring block, to generate the dynamic force of Y direction；
Z axis dynamic calibration platform includes: Z axis servo motor, Z axis weighted platform bracket, Z axis weighted platform, Z axis solid lifter, Z
Axis weighted platform bracket fixing plate, Z axis mounting rack, Z axis refer to force snesor；
Z axis mounting rack is fixed on vibrating isolation foundation, and Z axis weighted platform bracket and Z axis load are fixed on the Z axis mounting rack
Platform support fixed plate, the Z axis weighted platform bracket fixing plate is for further fixing Z axis weighted platform bracket；Z axis adds
Z axis servo motor and Z axis weighted platform are sequentially installed on carrying platform bracket, wherein Z axis servo motor and Z axis weighted platform are logical
Cross shaft coupling threaded connection；Z axis solid lifter and Z axis are installed with reference to force snesor, Z axis solid lifter on Z axis weighted platform
Across the upper surface central through hole of Z axis mounting rack, wherein Z axis is located at one end of Z axis solid lifter with reference to force snesor, for surveying
Measure the dynamic force on Z axis solid lifter；The moving direction of Z axis weighted platform is perpendicular to vibrating isolation foundation；
Z axis dynamic calibration platform is used to generate the dynamic force of Z-direction, its working principle is that: when starting Z axis servo motor, just
It can drive Z axis weighted platform that Z axis solid lifter is driven vertically to move, thus the when variable displacement that Z axis servo motor is exported
The dynamic load being converted on Z axis solid lifter；The Dynamic Loading of output is to being calibrated three-dimensional force sensor measuring block
Third end face, to generate the dynamic force of Z-direction；
Test platform includes: to be calibrated three-dimensional force sensor measuring block, be calibrated three-dimensional force sensor, be calibrated three-dimensional force sensing
Device installation pedestal；It is calibrated three-dimensional force sensor installation pedestal to be fixedly mounted on vibrating isolation foundation, makes to be calibrated three-dimensional force sensing
The centre of gyration of device installation pedestal is located at the underface of the upper surface central through hole of Z axis mounting rack；It is calibrated three-dimensional force sensor
The mode being connected through a screw thread is coaxially mounted to be calibrated the upper surface of three-dimensional force sensor installation pedestal；It is calibrated three-dimensional force
Sensor measurement block is connected through a screw thread mode, is coaxially mounted to be calibrated the upper surface of three-dimensional force sensor；It is calibrated three-dimensional
Force sensor measuring block is described for receiving the dynamic force from X-axis solid lifter, Y-axis solid lifter and Z axis solid lifter
The dynamic force of X-direction, Y direction and Z-direction is acted on by being calibrated three-dimensional force sensor measuring block and is calibrated three-dimensional
On force snesor.
3. three-dimensional force sensor Calibration of Dynamic device and method as described in claim 1, which is characterized in that the three-dimensional
Force snesor Calibration of Dynamic method includes the following steps:
S1: installation is calibrated three-dimensional force sensor, the space of adjustment X-axis solid lifter, Y-axis solid lifter and Z axis solid lifter
Position；
S2: using X-axis solid lifter, Y-axis solid lifter and the Z axis solid lifter in step S1, respectively to being calibrated three-dimensional force
Sensor applies dynamic force, establishes the dynamic performance model for being calibrated three-dimensional force sensor；
S3: according to the dynamic characteristic Evaluation model for being calibrated three-dimensional force sensor established in step S2, judgement is calibrated three-dimensional
The trace performance of force snesor.
4. three-dimensional force sensor Calibration of Dynamic method as claimed in claim 3, which is characterized in that the adjustment X-axis is rigid
The spatial position of property push rod, Y-axis solid lifter and Z axis solid lifter are as follows:
Three-dimensional force sensor will be calibrated and be calibrated three-dimensional force sensor measuring block from bottom to top successively according to coaxial mode
It is mounted on the upper surface for being calibrated three-dimensional force sensor installation pedestal；Start X-axis No.1 servo motor and Y-axis No.1 servo simultaneously
Motor, driving X-axis weighted platform move along a straight line along Y direction, and Y-axis weighted platform moves along a straight line along X-direction, so that X
The end center of axis solid lifter faces the side end face for being calibrated three-dimensional force sensor measuring block, the end of Y-axis solid lifter
Head center faces another side end face for being calibrated three-dimensional force sensor measuring block；Start X-axis No. two servo motors, Y-axis simultaneously
No. two servo motors and Z axis servo motor, effect is: driving X-axis solid lifter moves along a straight line along X-axis, Y-axis solid lifter
It moves along a straight line along Y-axis, Z axis solid lifter moves along a straight line along Z axis, so that the end of X-axis solid lifter withstands and is calibrated three
One side end face of dimensional force sensor measuring block, the end of Y-axis solid lifter, which is withstood, is calibrated the another of three-dimensional force sensor measuring block
The upper surface for being calibrated three-dimensional force sensor measuring block is withstood in one side end face, the end of Z axis solid lifter.
5. three-dimensional force sensor Calibration of Dynamic method as claimed in claim 3, which is characterized in that described to be calibrated three-dimensional
The dynamic performance model of force snesor:
T moment generates F on being calibrated three-dimensional force sensori(t) dynamic force, required pulsed quantity pi(t) it is
In formula, M is the amplitude of preset dynamic force；△ t is pulse width；T is time variable；ω is angular frequency；For phase；
kiFor the stiffness factor of i axis solid lifter, i.e. kXFor the stiffness factor of X-axis solid lifter；kYFor the stiffness system of Y-axis solid lifter
Number；kZFor the stiffness factor of Z axis solid lifter；pi(t) pulsed quantity sent for LabVIEW to servo motor, i.e. pX(t) it is
The pulsed quantity that LabVIEW is sent to No. two servo motors of X-axis；pY(t) arteries and veins sent for LabVIEW to No. two servo motors of Y-axis
Momentum；pZ(t) pulsed quantity sent for LabVIEW to Z axis servo motor；P is that roller screw is rotated by 360 ° pulse used
Amount；S is the lead of roller screw；
It is calibrated the dynamic performance model of three-dimensional force sensor, i.e.,
In formula, TX(t)、TY(t)、TZIt (t) is respectively the X-axis dynamic force carry-over factor for being calibrated three-dimensional force sensor, Y-axis dynamic
Power carry-over factor, Z axis dynamic force carry-over factor.
6. three-dimensional force sensor Calibration of Dynamic method as claimed in claim 3, which is characterized in that described to be calibrated three-dimensional
The dynamic property determination strategy of force snesor are as follows:
Meet when simultaneouslyWhen, then determine the dynamic characteristic for being calibrated three-dimensional force sensor
It is qualified；Conversely, then determining that the dynamic characteristic for being calibrated three-dimensional force sensor is unqualified.
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