CN106605149A - Detector for detecting electrostatic charge in charged body and measuring device for same - Google Patents
Detector for detecting electrostatic charge in charged body and measuring device for same Download PDFInfo
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- CN106605149A CN106605149A CN201580040084.4A CN201580040084A CN106605149A CN 106605149 A CN106605149 A CN 106605149A CN 201580040084 A CN201580040084 A CN 201580040084A CN 106605149 A CN106605149 A CN 106605149A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/24—Arrangements for measuring quantities of charge
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Abstract
Proposed are a detector for detecting an electrostatic charge in a charged body and a measuring device for same. More particularly, provided are a ''detector for detecting an electrostatic charge in a charged body and a measuring device for same'', which are capable of detecting and measuring the amount of electrostatic charge existing in a charged body, by using a conductive shutter plate that opens and closes a conductive plate separated a predetermined distance from the charged body at predetermined intervals, to generate a predetermined current in the conductive plate and convert the current to voltage for measuring same. When the proposed detector for detecting an electrostatic charge in a charged body and the measuring device for same are used, the amount of electrostatic charge existing in a charged body can be detected in real time, so that measures can immediately be taken when a charged body such as a wafer or a display has more than a certain level of electrostatic charge. Also, because the detector can be manufactured in a small size, there is the advantage that it can be easily installed in a tight space.
Description
Technical field
The present invention relates to a kind of electrical body static detector and its determine device, more particularly to one kind can by according to
The electric conductivity shield (shutter plate) that the specific cycle pair is covered with the conductive plate that electrical body keeps at a certain distance away
Specific electric current is formed in conductive plate under effect and voltage is converted thereof into, so as to detect and is determined and is taken out of included in electric body
Static content " electrical body static detector and its determine device ".
Background technology
Generally, electrostatic detection technology refers to the change using electrostatic to the change of outside input and external status, powered
The technology that presence or absence of body etc. is detected, this electrostatic detection technology can be applied to such as to go out using the change-detection of electrostatic
The touch detecting apparatus of user's touch action, by rising more than liquid, the dust particle etc. of air and gradually in dielectric constant
Near the electrode being included in rank detection means when the static capacity that increases and the rank of substance to be measured is examined
(refer to needs to liquid, liquid particle or powder the grade detection means of survey in industry automation equipment or individual's equipment
The device that the grade (height) of shape particle etc. is used when being measured, is such as added by being installed to the fuel tank of automobile to its fuel oil
Fluence is measured or carries out to being filled into the amount for filling the infusion being injected in product after tank in automation engineering
The device of measure), temperature change is detected temperature-detecting device using the change of electrostatic etc., and in recent years to can be real
When ground contactless static detector that electrostatic rank produced in quasiconductor or display screen engineer operation detected
Demand quickly increases.
(the title of invention of United States Patent (USP) USPN 8,536,879 illustrated in Fig. 1：Rotating electric field sensor,
Rotating electric-field sensor) in disclose it is a kind of can in a non contact fashion to the static capacity of electrical body
The contactless electrostatic technique for being sensed, in leading patent documentation, to can be by the shield rotated with motor shaft
In the presence of the quantity of electric charge of generation sensed in sensing electrode be converted to " electric field instrument, the electric field mill " of electric current
Learning concept is illustrated.
But in leading patented technology as above, since it is desired that being difficult to produce using motor etc. small-sized quiet
Photodetector, but also because vibrations or motor are difficult in quasiconductor or flat pannel display when working the problems such as produced dust
Use inside screen equipment, while also having the excessive problem of consumption electric power.
In order to solve the above problems, relevant contactless static capacity detection method and detection are currently actively developed
Polytype research of device technology, but because the using area of detector, the type for detecting target electrical body and its detection knot
Accuracy of fruit etc. can cause the larger difference in terms of product quality, so can improve above-mentioned asking in the urgent need to developing one kind
The static detector of topic.
The content of the invention
The present invention relates to a kind of another form of above-mentioned existing contactless static detector, there is provided one kind can pass through
Installed in film line, semiconductor production line or display screen production line etc., in the presence of thin film, chip, display screen etc.
Electrostatic carries out the detector of the brand new of real-time detection.
Additionally, another object of the present invention is to provide a kind of noise less and can effectively evade the wind of the generations such as dust
Danger, such that it is able to static detector safely used in semiconducter engineering etc..
For this purpose, it is an object of the invention to provide one kind can be by periodically pair with electrical body being spaced a spacing
From the shield that covered of conductive plate in the presence of the electrostatic of generation is sensed in conductive plate by the electrostatic in electrical body
Amount is periodically determined, so as to carry out the measure device of the real time measure to the static content in the presence of electrical body.
Be suitable for the 1st embodiment provided by the present invention for the detector that is measured to the electrostatic of electrical body, it is special
Levy and be, including：
1st and the 2nd electric magnet, level formation separated by a distance；
Contact rod, between above-mentioned 1st and the 2nd electric magnet, with length-specific along with above-mentioned 1st and the 2nd electric magnet
The vertical direction configuration of the magnetic direction that formed；
Permanent magnet, between above-mentioned 1st and the 2nd electric magnet and is pasted on the side of above-mentioned contact rod, along with it is upper
State the vertical direction configuration of the length direction of magnetic direction that the 1st and the 2nd electric magnet formed and above-mentioned contact rod；
Electric conductivity shield, is pasted on the side afterbody of above-mentioned contact rod；
Conductive plate, is configured at the side portion lower section of above-mentioned electric conductivity shield, senses under the electrostatic interaction of above-mentioned electrical body
Generate specific charge；
Wherein, when above-mentioned permanent magnet is in the rotation of generating period in the presence of above-mentioned 1st and the 2nd electric magnet, companion
With the rotation of the above-mentioned contact rod being glued in above-mentioned permanent magnet, above-mentioned electric conductivity shield will periodically cover above-mentioned
Conductive plate.
In the 1st embodiment of the present invention is suitable for, will paste respectively in the top side and bottom side of above-mentioned contact rod
The side of elastomeric element, and the opposite side of above-mentioned elastomeric element will be adhered in insulative substrate, so as in above-mentioned permanent magnetic
Ferrum can be such that above-mentioned contact rod rotates therewith when rotating in the presence of above-mentioned 1st and the 2nd electric magnet.
In the 1st embodiment of the present invention is suitable for, specific reference voltage will be loaded to above-mentioned contact rod.
Be suitable for the 2nd embodiment provided by the present invention for the device that is measured to the electrostatic of electrical body, its feature
It is, including：
1st and the 2nd electric magnet, level formation separated by a distance；
Contact rod, between above-mentioned 1st and the 2nd electric magnet, with length-specific along with above-mentioned 1st and the 2nd electric magnet
The vertical direction configuration of the magnetic direction that formed；
Permanent magnet, between above-mentioned 1st and the 2nd electric magnet and is pasted on the side of above-mentioned contact rod, along with it is upper
State the vertical direction configuration of the length direction of magnetic direction that the 1st and the 2nd electric magnet formed and above-mentioned contact rod；
Electric conductivity shield, is pasted on the side afterbody of above-mentioned contact rod；
Conductive plate, is configured at the side portion lower section of above-mentioned electric conductivity shield, senses under the electrostatic interaction of above-mentioned electrical body
Generate specific charge；
Non-inverting amplifier, with the input terminal being connected with above-mentioned conductive plate；
Inverting amplifier, receives the output signal of above-mentioned non-inverting amplifier；
Switching part, periodically selects the output signal of above-mentioned non-inverting amplifier and inverting amplifier；
Outfan amplifier, receives the output electricity of the above-mentioned non-inverting amplifier or inverting amplifier exported by switching part
Pressure；
Wherein, when above-mentioned permanent magnet is in the rotation of generating period in the presence of above-mentioned 1st and the 2nd electric magnet, companion
With the rotation of the above-mentioned contact rod being glued in above-mentioned permanent magnet, above-mentioned electric conductivity shield will periodically cover above-mentioned
Conductive plate, so as to specific electric current being generated in above-mentioned conductive plate and being fed in above-mentioned non-inverting amplifier.
Using the static detector for being suitable for the present invention because reality can be carried out to the size of the electrostatic in the presence of electrical body
When detection and can be to more than certain rank, the electrical body such as chip or display screen of electrostatic is taken (such as more than marginal value)
Timely follow-up, and because can realize that miniaturization makes and can be conveniently mounted in narrow space.
Description of the drawings
Fig. 1 is the example based on the electrostatic testing apparatus of prior art.
Fig. 2 is electrical body static detector provided by the present invention.
Fig. 3 is the operating diagram of static detector illustrated in Fig. 2.
Fig. 4 is the functional schematic using electrostatic measuring device illustrated in Fig. 2.
Fig. 5 to Fig. 8 is sequentially in time to the position between electric conductivity shield 140 and conductive plate 150 illustrated in Fig. 4
Put the schematic diagram that change is illustrated.
Specific embodiment
Below, accompanying drawing will be combined row information explanation will be entered to static detector provided by the present invention and its measure device.
Fig. 2 is static detector provided by the present invention.
The static detector for being suitable for the present invention as shown in Figure 2 is used to carry out the real time measure to static content, including for giving birth to
2 electric magnet 110 and 112, the permanent magnet 120 between 2 electric magnet into flux, it is pasted in permanent magnet 120
Contact rod 130, be pasted on the electric conductivity shield 140 of the side afterbody of contact rod 130, be configured at the bottom of electric conductivity shield 140
Conductive plate 150.
Below, each element will be described in more detail.
2 electric magnet 110,112 for generating variable flux are configured in the form of keeping at a certain distance away in the horizontal direction,
The magnetic field on equidirectional is generated by property synchronizing cycle each other.That is, the electric magnet 110,112 in Fig. 2 is periodically
Ground generates right side and the magnetic field on left direction.
Next, the contact rod 130 of the metal material with length-specific is configured between electric magnet 110,112.
Contact rod 130 is configured along the direction vertical with the induced field direction that above-mentioned electric magnet 110,112 is formed.
That is, configuration is extended along the very wise move direction in accompanying drawing.
Next, pasting permanent magnet 120 in the side of contact rod 130.Using alite paste etc. by with N poles and S poles
Permanent magnet 120 pastes the side of contact rod 130 so as between the electric magnet 110,112 of formation separated by a distance.
Additionally, the elastomeric element i.e. one end of spring is pasted with respectively in the both sides up and down of the contact rod 130 for pasting permanent magnet 120,
And the other end of spring is fixedly combined to the base for being equipped with the static detector for being suitable for the present invention by combinations such as solderings
The side of plate (not shown).Used as reference, the material of the spring for being used in the present invention is intensity highest and resistance in copper alloy
Corrosivity, the outstanding beryllium copper such as wearability, endurance limit, spring performance.
Next, the direction of the N poles of permanent magnet 120 and S poles be along with electric magnet 110, the 112 magnetic field sides for being formed
To and contact rod 130 length direction it is vertical direction configuration.
In the present invention as illustrated, permanent magnet 120 pastes the one of contact rod 130 along the direction on insertion ground
Side.As reference, it has been attached to the S of permanent magnet 120 is very viscous in contact rod in the present invention, but present invention when pasting N poles
Action it is also same.
Next, the side tail end in contact rod 130 pastes electric conductivity shield 140.
Electric conductivity shield 140 is used for the certain area or Zone Full of the conductive plate 150 to follow-up explanation to be carried out periodically
Masking, be shaped to as needed from rectangle, square, circle etc., and the shape of shield can also carry out difference
Selection.
Used as reference, in the present invention permanent magnet 120 is the induced field direction to be formed in electric magnet 110,112
On be pasted with axle centered on the contact rod 130 of spring and rotated along the direction in above-mentioned magnetic field so that electric conductivity shield 140
Can rotate.
Next, configuration can be generated by the electrostatic induction of electrical body 200 below the side portion of electric conductivity shield 140
The conductive plate 150 of specific charge.
Conductive plate 150 is the electrically conductive plate for referring to be generated by the electrostatic line of force sensing of electrical body 200 specific charge.
The static content for sensing generation during the material of conductive plate 150 difference for being used in conductive plate 150 will be different, and in electrical body
Spacing distance between 200 and conductive plate 150 also will be different when different.Used as reference, the sensing in conductive plate 150 is generated
Static content it is different according to the material of conductive plate 150, be because conductive plate 150 difference in dielectric constant can cause sensing
The difference of the quantity of electric charge.
Additionally, the contact rod 130 for being suitable for the present invention is connected to specific reference voltage (Vref), and reference voltage can be selected
Selecting property it is set as positive voltage or negative voltage or connects low-voltage etc..
Next, will be described in detail to the technological concept of the basic actss of static detector provided by the present invention.
First, the static detector for being suitable for the present invention is installed in the position kept at a certain distance away with electrical body 200.
In the early stage during action, the conductive plate 150 of static detector keeps and the opposite state of electrical body 200.
Now, under the electrostatic line of force effect of electrical body 200, the sensing in conductive plate 150 is generated into specific two electric charge
(hereinafter referred to as Q), and the above-mentioned quantity of electric charge that generation is sensed in conductive plate 150 is when the electrostatic of electrical body 200 changes
Also will change in real time therewith.
Next, when by the way that the direction in magnetic field is made to electric magnet 110,112 loading currents towards right side, permanent magnet
120 S poles are by the direction of electric magnet 110, N poles will be moved to the direction of electric magnet 112.That is, permanent magnet 120 will
Specific angle is rotated clockwise.Now, being pasted on contact rod 130 in permanent magnet 120 also will be to clockwise
Direction is rotated, and its result will cause the electric conductivity shield 140 for being pasted onto the side tail end of contact rod 130 to conductive plate 150
Covered in a part of region.Wherein, the specific region of the conductive plate 150 for being covered by electric conductivity shield 140 will be according to electric magnet
110th, between the intensity in the magnetic field formed in 112 and conductive plate 150 and electric conductivity shield 140 horizontal interval distance and have
Institute is different.
In the present invention, the reason for being covered to conductive plate 150 by rotary conductive shield 140 is to lead
Sensing in electroplax forms specific electric current.
Specifically, by electric conductivity shield 150 top of the specific region of conductive plate 150 is covered in the present invention
When, the electric charge of generation is sensed in conductive plate 150 will change, and change of the electric charge within the unit interval will be in conductive plate 150
Middle sensing generates specific electric current, eventually through the static content for determining corresponding voltage and being just capable of detecting when electrical body.
Below, what the electrostatic of electrical body was measured will be used for utilizing provided in the present invention with reference to Fig. 4 to Fig. 8
The technological thought of the measure device of static detector is described in detail.As conduction illustrated in reference, Fig. 5 to Fig. 8
Property shield 140 and the shape of conductive plate 150 be only suitable for one embodiment of the invention, can as needed to electric conductivity shield
140 and the shape of conductive plate 150 carry out various changes.
Fig. 4 is an embodiment of the measure device being measured to the electrostatic of electrical body using static detector, and Fig. 5 is to figure
8 is that the change in location between electric conductivity shield 140 and conductive plate 150 illustrated in Fig. 4 is illustrated sequentially in time
Schematic diagram.
As shown in figure 4, non-inverting amplifier 310 and inverting amplifier 320 are made using op amplifiers, it is anti-phase to put
The amplification ratio of big device 320 is set to 1.
Switching part SW takes can select the lead-out terminal a of non-inverting amplifier 310 and anti-phase amplification by the cycle of 180 degree
The composition of the lead-out terminal b of device 320, and outfan amplifier 330 is then according to specific ratio to being to export in the cycle with 180 degree
The voltage signal exported in terminal a and lead-out terminal b is amplified output, will represent that outfan is put with Vout in the present invention
The output signal of big device 330.
In course of action, the initial position of electric conductivity shield 140 is being configured to enter the half of conductive plate 150
After the reference position of row masking, electric conductivity shield 140 is opened and closed as follows, so as to suitable according to the time
Sequence makes the quantity of electric charge for sensing generation in conductive plate 150 in the presence of electrical body change.
In t0, electric conductivity shield 140 is located at the reference position (referring to Fig. 5) of conductive plate 150；
In t1, conductive plate 150 is fully exposed (mobile 90 degree) (refering to Fig. 6)；
In t2, electric conductivity shield 140 is located at the reference position (referring to Fig. 7) of conductive plate 150；
In t3, conductive plate 150 is completely obscured (mobile -90 spend) (refering to Fig. 8)；
In t4, electric conductivity shield 140 is located at the reference position (referring to Fig. 5) of conductive plate 150；
In the implementation process of the present invention, 1 week of the electric conductivity shield 140 for rotating in the manner described above
Phase (t0 to t4) is about 16 to 17Hz, but this can at any time be adjusted according to the translational speed of electrical body.
In superincumbent content, the anglec of rotation of electric conductivity shield 140 is retouched with 90 degree of the left and right of reference position
State, but the anglec of rotation of electric conductivity shield 140 also can be different according to the size of conductive plate 150.That is, according to conductive plate
The difference of 150 sizes, the left rotation and right rotation angle of electric conductivity shield 140 can be adjusted to 60 degree, 70 degree or 110 degree, 110 degree
Deng.That is, according to the size between electric conductivity shield 140 and conductive plate 150, the anglec of rotation can be changed at any time.
Below, the action of present invention when rotating to electric conductivity shield is illustrated.In the present invention, drive division
The sense of current in 160 pairs of coils for flowing through electric magnet 11,112 is controlled, so that electric conductivity shield 140 can be according to upper
State mode periodically to work.According to the sense of current flow through in electric magnet 110,112, electric conductivity shield 140 will be from benchmark
Position starts according to being completely exposed, reference position, completely obscured, reference position order are sent out while movement with the specific cycle
Raw rotation, the electric current of generation is now sensed in conductive plate 150 will be loaded in non-inverting amplifier 310.
Switching part SW is interior during t0 to t2 to be connected with lead-out terminal a, and interior then noninverting with reception during t2～t4
The lead-out terminal b connections of the inverting amplifier of the output signal of amplifier 310.
The output voltage of lead-out terminal a, b for being selected by switching part SW, will be output as spy by outfan amplifier 330
Fixed output voltage Vout.
The reason for being switched over to switching part SW as the cycle with 180 degree is, because the sensing generation in conductive plate 150
Size of current can make its sense of current change by the cycle of 180 degree according to the gate cycle of electric conductivity shield 140, so needing
Output it and observed after the voltage for identical polar.
Below, the action of the present invention as above will be described in detail.
First, when having specific+electric charge in electrical body 200, conductive plate 150 is by into corresponding-electric charge band
Electricity condition simultaneously forms specific electric field E.
Next, when electric conductivity shield 140 carries out week in the presence of electric magnet 110,112 in the top of conductive plate 150
When doing back and forth movement to phase property, the specific-electric charge with electric forming will change therewith in conductive plate 150, and this also leads to
The change of the electric field E of generation is sensed between electrical body 200 and conductive plate 150.
When electric field E changes with the rotation of electric conductivity shield 140, with the specific of electric forming in conductive plate 150
- electric charge (hereinafter referred to as q) also will change therewith.Its result will cause the quantity of electric charge with electric forming in conductive plate 150
Also by the fact changes with the rotation of electric conductivity shield 140, and specific electric current (i=dq/dt) is subsequently formed, finally
In being loaded into the input terminal of non-inverting amplifier 310.
Whereby, the noninverting of specific variable current is received by the periodic on-off action of electric conductivity shield 140
Corresponding specific voltage will be delivered to outfan amplifier by amplifier 310 or inverting amplifier 320 by the cycle of 180 degree
330, finally realize the output of specific output voltage Vout.
I.e., in the present invention, in the dynamic of the electric conductivity shield 140 being opened and closed to conductive plate 150 according to the specific cycle
Drive down, will form specific electric current in conductive plate 150 and supply via non-inverting amplifier 310 or inverting amplifier 320
Should be in the amplifier 330 of outfan.Whereby, observed by the output voltage to outfan amplifier 330, can be to band
The static content of electric body 200 is measured.
Additionally, can also carry to the contact rod 1340 being connected with electric conductivity shield 140 as reference voltage in the present invention
For specific positive voltage, can play a part of to raise the reference voltage of conductive plate 150 in this case, and can whereby will be non-
The reference voltage of the input terminal of inverting amplifier 310 is promoted to positive voltage rank.
Using being suitable in the measure device that the static detector of the present invention is measured to the electrostatic of electrical body, it is exported
Voltage Vout will be exported in the form of sine wave.But, after electric conductivity shield 140 is shielded reference position is restored to
Interval be 180 to 360 rotation it is interval in, its phase place will be by reversion output.
Its reason is as described above, be because that the sense of current per 180 during opening and closing all will change.
Whereby, by being suitable for electrostatic measuring device of the invention, can in real time be detected in the form of particular voltage level
Static content in the presence of electrical body.
As described above, the major technique thought of static detector provided by the present invention is, there is provided one kind is configured at band
In the presence of electric body and the electrostatic in above-mentioned electrical body between the conductive plate of sensing generation specific charge and with periodically right
The electric conductivity shield that the mode that the specific region of the conductive plate opposite with electrical body is covered is rotated, wherein, by profit
Made to be connected to the polar orientation generating period of the permanent magnet set up in the contact rod of electric conductivity shield side with electric magnet
It is rotationally-varying so that contact rod and connected electric conductivity shield are rotated.Before based on above-mentioned technological thought
The change for only carrying out to its shape or the change that carries out to part element or deletion are put, all should be interpreted and the present invention
Technological thought it is identical or used the present invention technological thought.
By being suitable for the static detector of the present invention as above and its determining device, because can be to institute in electrical body
The amount of the electrostatic of presence carries out real-time detection and can be to electrical bodies such as the chip with certain rank above electrostatic or display screens
Timely follow-up is taken, and because can realize that miniaturization makes and can be conveniently mounted in narrow space.
Additionally, in the present invention by provide it is a kind of can utilize solenoid actuated electric conductivity shield structure, additionally it is possible to
There is provided noise it is less, dust will not be produced and light-weighted static detector can be realized.
Claims (6)
1. a kind of electrical body static detector, it is characterised in that：
A kind of static detector for being measured to the electrostatic of electrical body, including：
1st and the 2nd electric magnet, level formation separated by a distance；
Contact rod, between above-mentioned 1st and the 2nd electric magnet, with length-specific along with above-mentioned 1st and the 2nd electric magnet institute shape
Into magnetic direction it is vertical direction configuration；
Permanent magnet, between above-mentioned 1st and the 2nd electric magnet and is pasted on the side of above-mentioned contact rod, along with the above-mentioned 1st
And the 2nd the vertical direction of length direction of the magnetic direction that formed of electric magnet and above-mentioned contact rod set up configuration；
Electric conductivity shield, is pasted on the side afterbody of above-mentioned contact rod；
Conductive plate, is configured at the side portion lower section of above-mentioned electric conductivity shield, and the sensing under the electrostatic interaction of above-mentioned electrical body is generated
Specific charge；
Spring, in order that the permanent magnet being attached in above-mentioned contact rod can be in the drive of above-mentioned 1st and the 2nd electromagnet action
Under rotated centered on the length direction of above-mentioned contact rod, the both sides up and down of above-mentioned contact rod are fixed；
Wherein, when above-mentioned permanent magnet is in the rotation of generating period in the presence of above-mentioned 1st and the 2nd electric magnet, it is accompanied by
The rotation of the above-mentioned contact rod being glued in above-mentioned permanent magnet, above-mentioned electric conductivity shield will periodically cover above-mentioned conduction
Plate.
2. electrical body static detector according to claim 1, it is characterised in that：
The material of above-mentioned spring is beryllium copper.
3. electrical body static detector according to claim 1, it is characterised in that：
The side of elastomeric element will be respectively pasted in the top side and bottom side of above-mentioned contact rod, and above-mentioned elastomeric element
Opposite side will be adhered in insulative substrate, so as to send out in the presence of above-mentioned 1st and the 2nd electric magnet in above-mentioned permanent magnet
During raw rotation, above-mentioned contact rod can be made to rotate motion therewith.
4. electrical body static detector according to claim 3, it is characterised in that：
Specific reference voltage is loaded in above-mentioned contact rod.
5. a kind of static detector for being detected to the electrostatic of electrical body, it is characterised in that：
A kind of static detector for being measured to the electrostatic of electrical body, including：
Be configured at electrical body and electrostatic in above-mentioned electrical body in the presence of sensing generate specific charge conductive plate it
Between and leading of rotating in the way of the specific region of the periodically pair conductive plate opposite with above-mentioned electrical body is covered
Electrical shield,
The polarity for being connected to the permanent magnet set up in the contact rod of above-mentioned electric conductivity shield side is made by using electric magnet
Direction rotates change so that above-mentioned contact rod is rotated, and the rotation by means of above-mentioned contact rod makes above-mentioned electric conductivity
Shield is rotated.
6. a kind of electrical body electrostatic measuring device, it is characterised in that：
1st and the 2nd electric magnet, level formation separated by a distance；
Contact rod, between above-mentioned 1st and the 2nd electric magnet, with length-specific along with above-mentioned 1st and the 2nd electric magnet institute shape
Into magnetic direction it is vertical direction configuration；
Permanent magnet, between above-mentioned 1st and the 2nd electric magnet and is pasted on the side of above-mentioned contact rod, along with the above-mentioned 1st
And the 2nd the magnetic direction that formed of electric magnet and above-mentioned contact rod the vertical direction configuration of length direction；
Electric conductivity shield, is pasted on the side afterbody of above-mentioned contact rod；
Conductive plate, is configured at the side portion lower section of above-mentioned electric conductivity shield, and the sensing under the electrostatic interaction of electrical body generates specific
Electric charge；
Non-inverting amplifier, with the input terminal being connected with above-mentioned conductive plate；
Inverting amplifier, receives the output signal of above-mentioned non-inverting amplifier；
Switching part, periodically selects the output signal of above-mentioned non-inverting amplifier and inverting amplifier；
Outfan amplifier, receives the output voltage of the above-mentioned non-inverting amplifier or inverting amplifier exported by switching part；
Wherein, when above-mentioned permanent magnet is in the rotation of generating period in the presence of above-mentioned 1st and the 2nd electric magnet, it is accompanied by
The rotation of the above-mentioned contact rod being glued in above-mentioned permanent magnet, above-mentioned electric conductivity shield will periodically cover above-mentioned conduction
Plate, so as to specific electric current being generated in above-mentioned conductive plate and being fed in above-mentioned non-inverting amplifier.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020140081572A KR101554509B1 (en) | 2014-07-01 | 2014-07-01 | Sensor for electrostatic charge of a charged body and a measuring device of the electrostatic charge |
| KR10-2014-0081572 | 2014-07-01 | ||
| PCT/KR2015/006690 WO2016003153A1 (en) | 2014-07-01 | 2015-06-30 | Detector for detecting electrostatic charge in charged body and measuring device for same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106605149A true CN106605149A (en) | 2017-04-26 |
Family
ID=54248755
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201580040084.4A Pending CN106605149A (en) | 2014-07-01 | 2015-06-30 | Detector for detecting electrostatic charge in charged body and measuring device for same |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR101554509B1 (en) |
| CN (1) | CN106605149A (en) |
| WO (1) | WO2016003153A1 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI627424B (en) * | 2017-04-26 | 2018-06-21 | 廣達電腦股份有限公司 | Electrostatic discharge detection devices and methods thereof |
| TWI639010B (en) | 2017-12-28 | 2018-10-21 | 財團法人工業技術研究院 | Electrostatic detecting device |
| CN112610124A (en) * | 2021-01-07 | 2021-04-06 | 南京洛岸池贸易有限公司 | But automated inspection's intelligent static security door |
| KR102504492B1 (en) | 2021-03-29 | 2023-02-28 | (주)선재하이테크 | Sensor module for electrostatic charge measurement and system for electrostatic charge monitoring using the same |
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| CN101527489A (en) * | 2008-03-06 | 2009-09-09 | Hoya株式会社 | Drive device |
| CN103019432A (en) * | 2011-09-22 | 2013-04-03 | 黄立新 | Charged body sensing system |
| US8536879B2 (en) * | 2008-06-02 | 2013-09-17 | The Regents Of The University Of Michigan | Rotating electric-field sensor |
| US20130307554A1 (en) * | 2012-04-23 | 2013-11-21 | Koganei Corporation | Potential measuring device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US6608483B1 (en) * | 2001-11-13 | 2003-08-19 | John P. Hill | Quadrature differential charge commutation sensor enabling wide bandwith field mills and other electrostatic field measuring devices |
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| CN1320295A (en) * | 1998-12-04 | 2001-10-31 | 林忠司 | Magnetic force rotating device |
| CN1638032A (en) * | 2003-12-26 | 2005-07-13 | 精工爱普生株式会社 | Thin film formation method and apparatus. method of manufacturing organic electroluminescence device, |
| CN101115937A (en) * | 2005-02-15 | 2008-01-30 | 康卓彬德电磁技术有限公司 | Electromagnetic permanent magnet brake |
| CN101527489A (en) * | 2008-03-06 | 2009-09-09 | Hoya株式会社 | Drive device |
| US8536879B2 (en) * | 2008-06-02 | 2013-09-17 | The Regents Of The University Of Michigan | Rotating electric-field sensor |
| CN103019432A (en) * | 2011-09-22 | 2013-04-03 | 黄立新 | Charged body sensing system |
| US20130307554A1 (en) * | 2012-04-23 | 2013-11-21 | Koganei Corporation | Potential measuring device |
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| KR101554509B1 (en) | 2015-09-22 |
| WO2016003153A1 (en) | 2016-01-07 |
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