KR101554509B1 - Sensor for electrostatic charge of a charged body and a measuring device of the electrostatic charge - Google Patents

Abstract

The present invention relates to an electrostatic charge sensor and an electrostatic charge measuring device for a charged body, and more specifically, to an electrostatic charge sensor and an electrostatic charge measuring device for a charged body which use a conductive shutter plate which opens and closes a conduction plate separated from a charged body by a prescribed distance at a prescribed frequency to generate a prescribed current in the conduction plate and convert the current into a voltage to measure the voltage to sense and measure an amount of electrostatic charges present in the charged body. The electrostatic charge sensor to measure static electricity of a charged body according to the present invention comprises a conductive shielding plate disposed between a charged body and a conduction plate in which prescribed electric charges are induced by static electricity of the charged body to periodically rotate and shield a prescribed area of the conduction plate facing the charged body, and uses an electromagnet to rotate a polar direction of a permanent magnet installed on a conduction bar connected to one side of the conductive shielding plate to rotate the conduction bar and rotate the conductive shielding plate according to rotation of the conduction bar. If the electrostatic charge sensor and an electrostatic charge measuring device for a charged body according to the present invention is used, since an amount of electrostatic charges present in a charged body can be sensed in real time, an immediate action can be taken for a charged body such as a wafer or a display having static electricity higher than or equal to a certain level. And since the electrostatic charge sensor can be manufactured in a small size, the electrostatic charge sensor can be conveniently installed in a small space.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrostatic charge detector,

More particularly, the present invention relates to an electrostatic charge detector using a conductive shutter plate that opens and closes a conductive plate spaced a predetermined distance from the entire main body by a predetermined period to generate a predetermined current Quot; large-scale static charge detector and its measuring device "capable of detecting and measuring the amount of static charge existing in the entirety of a battery by converting it into a voltage.

In general, the electrostatic charge sensing technology refers to a technique of detecting changes in external input and external states, presence of the entire body, etc., by utilizing changes in electrostatic charge. Such electrostatic charge sensing technology uses a change in electrostatic charge, A level sensing device that senses the level of a measured object by using a capacitance that rises as the electrode approaches the electrode included in the level sensing device while a liquid such as a liquid having a dielectric constant larger than that of the air, (Height) of liquid, liquid particles or powder particles to an automation device or a personal device, and is used, for example, in an oil tank of an automobile to be used for measuring the amount of charged oil. Also used to measure the amount of injected product that is charged to the tank and injected into the product) There is an increasing demand for a non-contact type electrostatic charge detector that can detect the level of static charge occurring in a semiconductor or a display process in real time in real time.

The electric field measuring system of USPN 5,315, 232 and the USPN 8,536,879 (entitled Rotating electric-field sensor) shown in FIGS. 1 a and 1 b are used to measure the electrostatic capacitance of the whole large- This prior art describes a theoretical concept of an "electric field mill" which converts the amount of charge introduced into a sensing electrode into a current using a shutter rotating about the motor axis. .

However, in this prior art, since it is difficult to fabricate a small static electricity detector due to the use of a motor and dust and dust due to vibration and motor operation, it is difficult to use in a semiconductor or flat panel display equipment and consumption And the power is large.

In order to compensate for these problems, there are various types of techniques for detecting noncontact corrected capacitance detection and sensors. However, depending on the location of the detector, the type of the object to be detected, and the accuracy of the detection result, There is an increasing demand for an electrostatic charge detector which has improved these points.

1. US patent USPN 5,315,232 (entitled " Electric Field Measuring System " 2. U.S. Patent USPN 8,536,879 (entitled Rotating electric-field sensor)

The present invention relates to another type of non-contact type static electricity detector described above, and it relates to a non-contact type static electricity detector which is installed in a film manufacturing line, a semiconductor manufacturing line, a display manufacturing line, Structure sensor.

Another object of the present invention is to provide an electrostatic charge detector that can be used safely in a semiconductor process or the like by reducing noise and eliminating the risk of generation of dust and the like

To this end, in the present invention, the amount of static charge induced in the conductive plate by the static electricity of the entire main body is measured periodically by using a shutter that periodically shields the conductive plate spaced a predetermined distance from the vertical arc, And to provide a measuring device capable of real-time measurement of the amount of static electricity present on the entire body.

In the first embodiment proposed by the present invention, the sensor for measuring the static charge of the large-

First and second electromagnets spaced horizontally,

A conductive bar positioned between the first and second electromagnets and disposed in a direction perpendicular to a magnetic field generated by the first and second electromagnets,

A permanent magnet disposed between the first and second electromagnets and attached to one side of the conductive rod and disposed in a direction perpendicular to a direction of a magnetic field generated by the first and second electromagnets and a longitudinal direction of the conductive rod; ,

A conductive shutter plate attached to one end of the conductive rod;

And a conductive plate disposed below one side of the conductive shutter plate and inducing a predetermined electric charge by static electricity of the entire base,

And the conductive shutter plate periodically shields the conductive plate according to the rotation of the conductive rod attached to the permanent magnet when the permanent magnet periodically rotates according to the operation of the first and second electromagnets.

According to the first embodiment of the present invention, one side of the elastic member is attached to one side of the upper side and the other side of the lower side of the conductive rod, and the other side of the elastic member is attached to the insulating substrate, And the conductive bar rotates when the permanent magnet rotates.

In the first embodiment of the present invention, a predetermined reference voltage may be applied to the conductive bar.

The apparatus for measuring the static charge of the whole of the apparatus as the second embodiment proposed in the present invention

First and second electromagnets spaced horizontally,

A conductive bar positioned between the first and second electromagnets and disposed in a direction perpendicular to a magnetic field generated by the first and second electromagnets,

A permanent magnet disposed between the first and second electromagnets and attached to one side of the conductive rod and disposed in a direction perpendicular to a direction of a magnetic field generated by the first and second electromagnets and a longitudinal direction of the conductive rod; ,

A conductive shutter plate attached to one end of the conductive rod;

A conductive plate disposed below one side of the conductive shutter plate and inducing a predetermined charge by static electricity of the whole of the base;

A non-inverting amplifier having an input terminal connected to the conductive plate,

An inverting amplifier for receiving an output signal of the non-inverting amplifier,

A switching unit for periodically selecting output signals of the non-inverting amplifier and the inverting amplifier,

And an amplifier of an output stage which is supplied with the output voltage of the non-inverting amplifier or the inverting amplifier output through the switching unit,

When the permanent magnet is periodically rotated according to the operation of the first and second electromagnets, the conductive shutter plate periodically shields the conductive plate according to the rotation of the conductive rod attached to the permanent magnet, Current is generated and supplied to the non-inverting amplifier.

When the static electricity detector according to the present invention is used, the size of the static electricity existing in the entire area can be sensed in real time, so that a large amount of static electricity And can be manufactured in a small size, so that it can be easily installed in a narrow space.

1A and 1B show an example of a conventional static charge sensing device.
FIG. 2 is a block diagram of an electrostatic charge detector according to the present invention.
FIG. 3 is a view for explaining the operation of the static charge detector shown in FIG. 2. FIG.
FIG. 4 is a view for explaining a function of the static charge measuring device using the static charge detector shown in FIG. 2. FIG.
5A to 5D are diagrams showing the positional change between the conductive shutter plate 140 and the conductive plate 150 shown in FIG. 4 in chronological order.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an electrostatic charge detector and a measuring apparatus thereof according to the present invention will be described in detail with reference to the drawings.

2 is a static charge detector proposed in the present invention.

The electrostatic charge detector according to the present invention shown in FIG. 2 is for measuring in real time the amount of electrostatic charge of the entire main body 200, and includes two electromagnets 110 and 112 for generating a magnetic flux, A conductive bar 140 attached to one end portion of the conductive bar 130 and a lower portion of the conductive shutter plate 140 attached to the end of the conductive bar 130. [ And a conductive plate 150 disposed on the conductive plate 150.

Hereinafter, each component will be described in more detail.

The two electromagnets 110 and 112 for generating a variable magnetic flux are arranged at predetermined intervals in the horizontal direction and are synchronized with each other to periodically generate a magnetic field in the same direction. In other words, the electromagnet of FIG. 2 (110, 112) generates a magnetic field periodically in the right and left directions.

Next, a conductive bar 130 made of a metal having a predetermined length is positioned between the electromagnets 110 and 112.

The conductive bar 130 is disposed in a direction perpendicular to the induced magnetic field generated by the electromagnets 110 and 112. That is, it is arranged to extend upward in the drawing.

Next, a permanent magnet 120 is attached to one side of the conductive bar 130. The permanent magnets 120 having N poles and S poles are attached to one side of the conductive rod 130 using an adhesive or the like so as to be positioned between the electromagnets 110 and 112 spaced from each other. One end of a spring as an elastic member is attached to the upper and lower sides of the conductive bar 130 to which the permanent magnet 120 is attached and the other end of the spring is attached to one side of a substrate (not shown) on which the static charge sensor of the present invention is mounted Such as soldering. For reference, the material of the spring used in the present invention is beryllium copper having the highest strength among the copper alloy and superior in corrosion resistance, heat resistance, abrasion resistance, fatigue limit, and spring characteristics.

Next, the N pole and S pole directions of the permanent magnet 120 are preferably arranged in a direction perpendicular to the direction of the magnetic field generated by the electromagnets 110 and 112 and the longitudinal direction of the conductive bar 130.

In the case of the present invention, as shown in the drawing, the permanent magnet 120 is attached to one side of the conductive bar 130 in a direction passing through the paper. For reference, in the present invention, the S pole of the permanent magnet 120 is attached to the conductive rod, but the operation of the present invention is the same even when the N pole is attached.

Next, a conductive shutter plate 140 is attached to one end of the conductive bar 130.

The conductive shutter plate 140 periodically shields a certain region or an entire region of the conductive plate 150 to be described later, and the shape thereof may be variously selected depending on needs, such as a rectangular shape, a rectangular shape, a circular shape, Can be selected in various shapes.

In accordance with the present invention, the permanent magnets 120 rotate along the direction of the magnetic field with the conductive rod 130 having the spring attached thereto along the direction of the induced magnetic field formed by the electromagnets 110 and 112 So that the conductive shutter plate 140 is rotatable.

Next, a conductive plate 150 on which a predetermined charge is induced by the static electricity of the grand body 200 is positioned below one side of the conductive shutter plate 140.

The conductive plate 150 refers to a conductive plate through which a predetermined charge is guided by the electrostatic force line of the large body 200. The amount of static charge induced in the conductive plate 150 may vary depending on the material of the conductive plate 150 , And the distance between the large main body 200 and the conductive plate 150 may vary. The reason why the amount of static charge induced in the conductive plate 150 differs depending on the material of the conductive plate 150 is that there is a difference in the amount of induced charge depending on the difference in permittivity of the conductive plate 150.

Meanwhile, the conductive bar 130 of the present invention is connected to a predetermined reference voltage Vref. The reference voltage may be selectively set such as a positive voltage, a negative voltage, or a ground voltage.

Hereinafter, the technical concept of the basic operation of the static charge detector proposed by the present invention will be described.

First, the static electricity detector of the present invention is installed at a predetermined distance from the entire body 200.

In the initial operation, the conductive plate 150 of the static charge detector maintains a state opposed to the large-

Then, a predetermined amount of electric charge (hereinafter referred to as Q) is induced in the conductive plate 150 by the electrostatic force line of the large body 200 and the amount of the electric charge induced in the conductive plate 150 in this manner is It will change instantaneously with static charge change.

Next, when the direction of the magnetic field is directed to the right by conducting a current to the electromagnets 110 and 112, the S pole of the permanent magnet 120 is moved in the direction of the electromagnet 110 and the N pole is moved in the direction of the electromagnet 112 . That is, the permanent magnet 120 is rotated clockwise by a predetermined angle. The conductive bar 130 attached with the permanent magnet 120 also rotates clockwise so that the conductive shutter plate 140 attached to one end of the conductive bar 130 contacts the predetermined Area. Here, the predetermined area of the conductive plate 150 shielded by the conductive shutter plate 140 is a distance between the strength of the magnetic field generated in the electromagnets 110 and 112 and the horizontal distance between the conductive plate 150 and the conductive shutter plate 140 Can vary.

In the present invention, the reason why the conductive shutter plate 140 is rotated to shield the conductive plate 150 is to induce a predetermined current to the conductive plate 150.

More specifically, in the present invention, when the upper portion of a predetermined region of the conductive plate 150 is closed by the conductive shutter plate 140, the induced charge in the conductive plate 150 is varied, Since the induced current is generated in the conductive plate 150, it is possible to detect the amount of static electricity of the whole of the battery by measuring it as a voltage.

Hereinafter, the technical idea of the measuring device using the static charge detector for measuring static electricity of the whole large scale proposed in the present invention will be described in detail with reference to FIG. 4 and FIGS. 5A to 5D. The shapes of the conductive shutter plate 140 and the conductive plate 150 shown in FIGS. 5A to 5D are merely examples of the present invention. The shapes of the conductive shutter plate 140 and the conductive plate 150 It is changeable.

FIG. 4 is an embodiment of a measuring apparatus for measuring the static charge on the entire body by using an electrostatic charge detector, FIGS. 5A to 5D are diagrams showing a change in position between the conductive shutter plate 140 and the conductive plate 150 In the order of time.

In FIG. 4, the non-inverting amplifier 310 and the inverting amplifier 320 are fabricated from an op amp, and the amplification ratio of the inverting amplifier 320 is set to 1. FIG.

The switching unit SW is configured to select the output terminal a of the non-inverting amplifier 310 and the output terminal b of the inverting amplifier 320 at intervals of 180 degrees and the amplifier 330 at the output stage outputs The voltage signal output from the terminal a and the output terminal b is amplified at a predetermined ratio and output. In the present invention, the output signal of the amplifier 330 at the output terminal is represented by Vout.

The conductive shutter plate 140 is positioned at a reference position for shielding half of the conductive plate 150 and then the conductive shutter plate 140 is opened and closed as follows so that the conductive plate 150 150) is varied with time.

t0, the conductive shutter plate 140 is positioned at the reference position of the conductive plate 150 (see Fig. 5A)

t1, full exposure (90 degree movement) of the conductive plate 150; (See FIG. 5B)

t2, the conductive shutter plate 140 is positioned at the reference position of the conductive plate 150 (see Fig. 5C)

t3, the conductive plate 150 is completely closed (movement of -90 degrees); (See Fig. 5D)

t4, the conductive shutter plate 140 is positioned at the reference position of the conductive plate 150 (see Fig. 5A)

One cycle (t0 to t4) of the conductive shutter plate 140 rotating in the above-described manner is approximately 16 to 17 Hz in the present invention, but it can be changed at any time according to the moving speed of the entire large screen.

Although the rotation angle of the conductive shutter plate 140 is 90 degrees from the reference position, the rotation angle of the conductive shutter plate 140 may vary depending on the size of the conductive plate 150. That is, depending on the size of the conductive plate 150, for example, the left and right rotation angles of the conductive shutter plate 140 may be changed to 60 degrees, 70 degrees, or 100 degrees or 110 degrees. That is, depending on the size between the conductive shutter plate 140 and the conductive plate 150, the angle of rotation can be changed at any time.

Hereinafter, the operation of the present invention according to the rotation of the conductive shutter plate will be described.

In the present invention, the driving unit 160 controls the direction of the current flowing through the coils of the electromagnets 110 and 112 so that the conductive shutter plate 140 operates at the above-described period.

The conductive shutter plate 140 rotates in a predetermined cycle while moving in the order of the full exposure, the reference position, the full close, and the reference position at the reference position in accordance with the current direction flowing through the electromagnets 110 and 112, Is applied to the non-inverting amplifier (310).

The switch SW is connected to the output terminal a from t0 to t2 and to the output terminal b of the inverting amplifier receiving the output signal of the non-inverting amplifier 310 from t2 to t4.

The output voltages of the output terminals a and b selected by the switching unit SW are output to the predetermined output voltage Vout through the amplifier 330 at the output stage.

The reason why the switching unit SW is switched at a cycle of 180 degrees is because the magnitude of the current induced in the conductive plate 150 changes in accordance with the opening and closing cycle of the conductive shutter plate 140 in the direction of 180 degrees, So as to observe it.

Hereinafter, the operation of the present invention will be further described.

First, when a predetermined positive charge is present in the large-size whole body 200, a predetermined electric charge corresponding to the predetermined positive electric charge is formed on the conductive plate 150, and a predetermined electric field E is formed.

Next, when the conductive shutter plate 140 periodically reciprocates on the conductive plate 150 by the electromagnets 110 and 112, the predetermined-charge charged on the conductive plate 150 is varied, ) And the conductive plate 150. In this case,

When the electric field E changes with the rotation of the conductive shutter plate 140, the predetermined-charge (hereinafter referred to as q) charged on the conductive plate 150 will be variable. As a result, the amount of charge charged on the conductive plate 150 varies in real time as the conductive shutter plate 140 rotates, and a predetermined current (i = dq / dt) .

Therefore, the non-inverting amplifier 310 or the inverting amplifier 320, which has been supplied with the predetermined variable current according to the periodic opening and closing operations of the conductive shutter plate 140, supplies the predetermined voltage corresponding thereto at 180- And as a result, a predetermined output voltage Vout is output.

That is, according to the present invention, a predetermined current is generated in the conductive plate 150 by the operation of the conductive shutter plate 140 that opens and closes the conductive plate 150 at a predetermined period. This is because the non-inverting amplifier 310 or the inverting amplifier (320), and is supplied to an amplifier (330) at an output stage. Therefore, by observing the output voltage of the amplifier 330 at the output stage, it is possible to measure the electrostatic charge amount of the grand total 200.

Meanwhile, in the present invention, a predetermined positive voltage may be supplied as a reference voltage to the conductive rod 130 connected to the conductive shutter plate 140. In this case, the reference voltage of the conductive plate 150 is boosted, The reference voltage of the input terminal of the non-inverting amplifier 310 may be raised to a positive level.

In the case of using a measuring device for measuring the static charge of the whole of the main body using the static charge detector according to the present invention, the output voltage Vout is outputted as a sinusoidal waveform. However, in the case of the section from the closing time of the conductive shutter plate 140 to the reference position, that is, the rotation section of 180 to 360 degrees, its phase will be inverted and output.

The reason for doing this is that, as described above, the direction of the current changes every 180 degrees according to opening and closing.

Therefore, when the electrostatic charge measuring apparatus according to the present invention is used, the amount of static electricity present in the entirety of the apparatus can be detected in real time at a predetermined voltage value.

As described above, the main technical idea of the electrostatic charge sensor proposed in the present invention is to arrange the electrostatic charge detector between the whole of the electrostatic charger and the conductive plate from which a predetermined charge is induced by the static electricity of the whole electrostatic charger, The conductive shield plate is rotated while shielding a predetermined region periodically. The polarized direction of the permanent magnet attached to the conductive rod connected to one side of the conductive shield plate is periodically rotated using an electromagnet, The present invention is not limited to these embodiments, and various modifications may be made without departing from the spirit and scope of the invention.

When the electrostatic charge detector and its measuring device according to the present invention described above are used, the amount of electrostatic charge existing in the entirety of the electrostatic charge detector can be sensed in real time, so that a wafer or a display There is an advantage that an immediate action can be performed for the whole, and since it can be manufactured in a small size, there is an advantage that it can be easily installed in a narrow space.

Also, in the case of the present invention, a structure for operating the conductive shutter plate using an electromagnet is proposed, thereby providing an electrostatic charge detector capable of reducing noises, generating no dust, and being lightweight.

110, 112: electromagnet
130: conductive bar
140: conductive shutter plate
150: conductive plate
200: Large Full
310: non-inverting amplifier
320: inverting amplifier
330: Amplifier

Claims (7)

An electrostatic charge detector for measuring the static charge of the whole body,
First and second electromagnets spaced horizontally,
A conductive bar positioned between the first and second electromagnets and disposed in a direction perpendicular to a magnetic field generated by the first and second electromagnets,
A permanent magnet disposed between the first and second electromagnets and attached to one side of the conductive rod and arranged in a direction perpendicular to a direction of a magnetic field generated by the first and second electromagnets and a longitudinal direction of the conductive rod, The magnet,
A conductive shutter plate attached to one end of the conductive rod;
A conductive plate disposed below one side of the conductive shutter plate and inducing a predetermined charge by static electricity of the whole of the stand;
And a spring for fixing the upper and lower sides of the conductive rod so that the permanent magnet attached to the conductive rod can rotate around the longitudinal direction of the conductive rod according to the operation of the first and second electromagnets,
Wherein when the permanent magnet periodically rotates according to the operation of the first and second electromagnets, the conductive shutter plate periodically shields the conductive plate according to the rotation of the conductive rod attached to the permanent magnet. Of static charge detector. delete The method according to claim 1,
Wherein the spring material is beryllium copper. The method according to claim 1,
One side of an elastic member is attached to one side of an upper side and one side of a lower side of the conductive rod, and the other side of the elastic member is attached to an insulating substrate. When the permanent magnet is rotated according to the operation of the first and second electromagnets, So that it can rotate. 5. The method of claim 4,
And a predetermined reference voltage is applied to the conductive bar. An electrostatic charge detector for measuring the static charge of the whole body,
And a conductive shield plate disposed between the conductive strip and a conductive plate through which a predetermined electric charge is induced by static electricity of the whole of the strip, and which is rotated while periodically shielding a predetermined region of the conductive plate,
Wherein the conductive shielding plate is rotated by rotating the conductive rod by rotating the polarity direction of the permanent magnet attached to the conductive rod connected to one side of the conductive shielding plate using an electromagnet, An electrostatic sensor for measuring the total static charge. First and second electromagnets spaced horizontally,
A conductive bar positioned between the first and second electromagnets and disposed in a direction perpendicular to a magnetic field generated by the first and second electromagnets,
A permanent magnet disposed between the first and second electromagnets and attached to one side of the conductive rod and disposed in a direction perpendicular to a direction of a magnetic field generated by the first and second electromagnets and a longitudinal direction of the conductive rod; ,
A conductive shutter plate attached to one end of the conductive rod;
A conductive plate disposed below one side of the conductive shutter plate and inducing a predetermined charge by static electricity of the whole of the base;
A non-inverting amplifier having an input terminal connected to the conductive plate,
An inverting amplifier for receiving an output signal of the non-inverting amplifier,
A switching unit for periodically selecting output signals of the non-inverting amplifier and the inverting amplifier,
And an amplifier of an output stage which is supplied with the output voltage of the non-inverting amplifier or the inverting amplifier output through the switching unit,
When the permanent magnet is periodically rotated according to the operation of the first and second electromagnets, the conductive shutter plate periodically shields the conductive plate according to the rotation of the conductive rod attached to the permanent magnet, And a current is generated and supplied to the non-inverting amplifier.

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