CN106597660B - A step scanning control device and control method of an electrothermal micromirror for photoacoustic scanning - Google Patents

A step scanning control device and control method of an electrothermal micromirror for photoacoustic scanning Download PDF

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CN106597660B
CN106597660B CN201710004401.8A CN201710004401A CN106597660B CN 106597660 B CN106597660 B CN 106597660B CN 201710004401 A CN201710004401 A CN 201710004401A CN 106597660 B CN106597660 B CN 106597660B
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micromirror
voltage
deflection angle
micro mirror
value
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CN106597660A (en
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杨思华
李林钢
熊科迪
邢达
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South China Normal University
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors

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Abstract

The invention discloses the step-scan control device and control method of a kind of electrothermal micro mirror for optical acoustic scanning, device includes fpga core arithmetic element, D/A converter module, amplifying circuit and the overvoltage protection and filter module for receiving external timing signal and operation output binary voltage value；The fpga core arithmetic element is after receiving external timing signal; it is triggered in clock leading edge; the binary voltage value that output is obtained by special algorithm operation; the voltage signal is converted into analog voltage signal by D/A converter module; after the signal amplified with amplifying circuit is by overvoltage protection and filter module; it is supplied to the actuator of electrothermal micro mirror, then micro mirror is driven to make corresponding deflection action；The present invention need to only change voltage used in control algolithm-mechanical deflection angle relation function for the micro mirror of different versions, so that it may flexibly be applicable in.In addition, being conducive to the raising of whole device precision the present disclosure additionally applies for the application of optical scanner needs and peripheral equipment synchronous collaboration.

Description

A kind of step-scan control device of the electrothermal micro mirror for optical acoustic scanning and control Method
Technical field
The present invention relates to the research field of optical acoustic scanning, in particular to a kind of step-scan control device of electrothermal micro mirror And control method.
Background technique
MEMS (Micro-Electro-Mechanical Sustem, MEMS) is with semiconductor integrated circuit What the development of micrometer-nanometer processing technology and ultraprecise mechanical manufacturing technology got up, can with batch making, collect micro mechanism, Microsensor, micro actuator and signal processing and control circuit, interface, communication and power supply etc. (are included at least in one One movable structure meets certain mechanism) microdevice or system.MEMS micromirror is exactly a kind of by voltage or electricity The effect of stream or electrostatic etc. allows to movable miniature essence and completely subtracts rotate or put down, to change the propagation of input light Direction or phase.Electrothermal micromirror systems mainly include three mirror surface, support arm, actuating arm parts, and actuating arm is as actuator Deformation is generated by electrocaloric effect to drive mirror deflection.
Electrothermal micro mirror includes two groups of symmetrical frames of actuating arm around micro mirror, and x group actuating arm is x+ actuating arm and x- driving respectively Arm, for driving micro mirror to rotate movement；Y group actuating arm is y+ actuating arm and y- actuating arm respectively, for driving micro mirror to bow Face upward movement；Apply certain voltage to any actuating arm, then micro mirror mirror surface is deflected to the side actuating arm.
Existing electrothermal micromirror control system technical solution does not account for external clock and synchronizes to drive micro mirror to carry out stepping Scanning, but in a variety of applications for needing accurate point by point scanning, for example laser is needed when photoacoustic imaging application mems micro mirror The each checkpoint of beam step-scan needs synchronous with pulse laser, optoacoustic transducer and data collecting card.This just needs electric heating Decline mirror control system be capable of providing external clock triggering micro mirror step-scan control.
Summary of the invention
The shortcomings that it is a primary object of the present invention to overcome the prior art and deficiency, provide a kind of electricity for optical acoustic scanning The step-scan control device and control method of hot type micro mirror needs to answer with peripheral equipment synchronous collaboration suitable for optical acoustic scanning With occasion, be conducive to the raising of whole device precision.
In order to achieve the above object the invention adopts the following technical scheme:
The invention discloses a kind of step-scan control devices of electrothermal micro mirror for optical acoustic scanning, including receive outer Portion's clock signal and the operation output fpga core arithmetic element of binary voltage value, D/A converter module, amplifying circuit and Overvoltage protection and filter module；The fpga core arithmetic element triggers after receiving external timing signal in clock leading edge, The binary voltage value that output is obtained by special algorithm operation, the voltage signal are converted into simulation electricity by D/A converter module Signal is pressed, after the signal amplified with amplifying circuit is by overvoltage protection and filter module, is supplied to the actuator of electrothermal micro mirror, Then driving micro mirror makes corresponding deflection action；
The fpga core arithmetic element exports each external clock and arrives according to the processing mathematical algorithm stored in it Micro mirror next step deflection angle afterwards corresponds to voltage needed for actuating arm；
The special algorithm is stored in the control voltage computational algorithm of the micro mirror in fpga core arithmetic element, the algorithm By, along counting, in conjunction with voltage-mechanical deflection angle relation function of controlled micro mirror, obtaining actuating arm voltage value to external clock Decimal value；Then the decimal value is converted into meeting the binary sequence of the code requirement of analog-digital chip；
The output digit signals of fpga core arithmetic element are converted into analog voltage simultaneously by the D/A converter module Signal；
The amplifying circuit utilizes operational amplifier by voltage amplification to micro mirror required voltage；
The overvoltage protection and filter module is to carry out voltage to the analog voltage signal of micro mirror actuator to be applied to The limitation of amplitude, and to control signal filtering and eliminating noise and carry out the amplification of electric current.
The fpga core arithmetic element is using Cyclone4EP4CE6E22C8N chip as a preferred technical solution, , FPGA core core with 50MHz crystal oscillator；The fpga chip intensional logic unit, register, multiplier resources.
The invention also discloses a kind of step-scan control method of electrothermal micro mirror for optical acoustic scanning, including it is following Step:
S1, two groups of actuating arms for arranging electrothermal micro mirror are x and y, and x group includes x+ actuating arm and x- actuating arm, and y group includes Y+ actuating arm and y- actuating arm；
S2, according to the nominal data of micro mirror to be controlled, fit the voltage for needing to be applied to actuator and micro mirror be mechanical partially The functional relation of gyration: V=g (D), wherein V is the voltage value for needing to be applied to some actuating arm of electrothermal micro mirror, and D refers to : only the actuating arm is after by voltage in four actuating arms, the angle of micro mirror deflection；
S3, after detecting commencing signal, and no reset signal arrive in the case where, fpga core arithmetic element docking The external clock forward position received counts；
S4, count value are divided by the columns value for being intended to scanning lattice, and remainder as a result is as the checkpoint to be scanned institute in next step Column coordinate, wherein scanning starting column coordinate be zero；
S5, count value are divided by the columns value for being intended to scanning lattice, and mould as a result is as where the checkpoint to be scanned of next step Row coordinate, wherein scanning initial row coordinate be zero；
S6, the parity for judging row coordinate, if row coordinate is even number, with the half way of optical angle range to be rotated The product of rotation optical angle resolving power and column coordinate is subtracted, for difference divided by 2, result is inclined as the electroluminescent micro mirror in x+ actuating arm side The difference of gyration and the electroluminescent micro mirror deflection angle in x- actuating arm side, is set as Δ Dx；If row coordinate is odd number, Δ Dx and row The analog value symbol for the case where coordinate is even number is opposite；
S7, the symbol for judging Δ Dx, if its symbol is positive, the electroluminescent micro mirror deflection angle for defining x+ actuating arm side is The value of Δ Dx, and the electroluminescent micro mirror deflection angle of x- actuating arm side is 0；If the symbol of Δ Dx is negative, x+ actuating arm is defined The electroluminescent micro mirror deflection angle of side is 0, and the electroluminescent micro mirror deflection angle of x- actuating arm side is the absolute value of Δ Dx；
S8, the difference for calculating the electroluminescent micro mirror deflection angle in y+ actuating arm side Yu the electroluminescent micro mirror deflection angle in y- actuating arm side simultaneously Value, is set as Δ Dy, it is that the product of pitching optical angle resolving power and row coordinate subtracts the half way for being intended to pitching optical angle range Resulting difference divided by 2 result；
S9, the symbol for judging Δ Dy, if its symbol is positive, the electroluminescent micro mirror deflection angle for defining y+ actuating arm side is The value of Δ Dy, and the electroluminescent micro mirror deflection angle of y- actuating arm side is 0；If the symbol of Δ Dy is negative, y+ actuating arm is defined The electroluminescent micro mirror deflection angle of side is 0, and the electroluminescent micro mirror deflection angle of y- actuating arm side is the absolute value of Δ Dx；
S10, the function obtained in step S2 is substituted into the electroluminescent micro mirror deflection angle for four actuating arms that each step obtains Relational expression: V=g (D), to obtain the voltage value that should be applied to four actuating arms；
S11, fpga core arithmetic element carry out the applicable binary system of subsequent DAC module to four voltage values to be exported and compile After code, output exports difference to subsequent DAC circuit module, amplifying circuit and overvoltage protection and filter module, final controller Corresponding four actuating arm pins for connecing electrothermal micro mirror and publicly.
Further include the steps that the electric deflection for arranging micro mirror in step S1 as a preferred technical solution, arranges micro mirror Electric deflection is the deflection of micro mirror after only powering on to an actuating arm in four actuating arms；Electric deflection is different from micro mirror Passive deflection: micro mirror actuating arm side is not by electricity, but since the actuating arm of symmetric position in same group produces electricity to micro mirror Deflection turns, and causes this not produced by electric drive arm side and is forced angular displacement.
Nominal data described in step S2 as a preferred technical solution, is primarily referred to as the driving to micro mirror to be controlled Arm applies the electric deflection angle that voltage corresponds to the micro mirror.
Further include following step as a preferred technical solution, in step S3:
The count value is set when reaching all checkpoint number summations to be scanned, is zeroed；If fpga core is transported During calculating cell operation, reset signal is received, then counting value returns.
Micro mirror is bow font scanning to the scanning of lattice array to be checked as a preferred technical solution,.
Compared with the prior art, the invention has the following advantages and beneficial effects:
1, the step-by-step movement micro mirror scanning technique means that the present invention is triggered using external clock, to reach optical acoustic scanning just It is synchronized in peripheral equipments such as other lasers, ultrasound emission receiver, data collectors, improves optical acoustic scanning The technical effect of scanning accuracy；
2, present invention employs extremely cheap and industrial widely used FPGA core core, DAC module, simple calculations to put Big device IC and common pressure limiting filter circuit, so that the design for reaching the micro mirror sweeping scheme for field of photoacoustic imaging is concise, Cost of implementation is extremely low, is suitble to the technical effect promoted；
3, the present invention does not need to do any type of change to the micro mirror as control target, so that applicability is extremely strong.
Detailed description of the invention
Fig. 1 is the device of the invention figure；
Fig. 2 is signified four actuating arm schematic diagrames of electrothermal micro mirror of the invention；
Fig. 3 is the opto-acoustic imaging devices schematic diagram of embodiment；
Fig. 4 is control flow chart of the invention.
Specific embodiment
Present invention will now be described in further detail with reference to the embodiments and the accompanying drawings, but embodiments of the present invention are unlimited In this.
Embodiment
As shown in Figure 1, a kind of step-scan control device of the electrothermal micro mirror for optical acoustic scanning of the present embodiment, including Receive the fpga core arithmetic element, D/A converter module, amplification electricity of external timing signal and operation output binary voltage value Road and overvoltage protection and filter module；The fpga core arithmetic element is after receiving external timing signal, before clock The binary voltage value obtained along triggering, output by special algorithm operation, the voltage signal are converted by D/A converter module Electrothermal micro mirror is supplied to after the signal amplified with amplifying circuit is by overvoltage protection and filter module at analog voltage signal Actuator, then drive micro mirror make corresponding deflection action；
The fpga core arithmetic element exports each external clock and arrives according to the processing mathematical algorithm stored in it Micro mirror next step deflection angle afterwards corresponds to voltage needed for actuating arm；
The output digit signals of fpga core arithmetic element are converted into analog voltage simultaneously by the D/A converter module Signal；
The amplifying circuit utilizes operational amplifier by voltage amplification to micro mirror required voltage；
The overvoltage protection and filter module is to carry out voltage to the analog voltage signal of micro mirror actuator to be applied to The limitation of amplitude, and to control signal filtering and eliminating noise and carry out the amplification of electric current.
The scan control method of the external trigger step-scan control device of above-mentioned electrothermal micro mirror, includes the following steps:
Two groups of actuating arms of 0. agreement electrothermal micro mirror are x and y, and x group includes x+ actuating arm and x- actuating arm, and y group includes y + actuating arm and y- actuating arm, as shown in Figure 2；
Agreement micro mirror electric deflection be to only being powered on to an actuating arm in four actuating arms after, the deflection of micro mirror； Electric deflection is different from the passive deflection of micro mirror: micro mirror drives wall side not by electricity, but due to symmetric position in same group Actuating arm produces electric deflection to micro mirror, causes this not produced by electric drive arm side and is forced angular displacement；
1. fitting the voltage and micro mirror mechanical deflection for needing to be applied to actuator according to the nominal data of micro mirror to be controlled The functional relation of angle: V=g (D), wherein V is the voltage value for needing to be applied to some actuating arm of electrothermal micro mirror, what D referred to It is the only actuating arm after by voltage in four actuating arms, the angle that micro mirror can deflect；
2. after detecting commencing signal, and in the case where no reset signal arrives, when FPGA is to the outside received Clock forward position counts；The count value is set when reaching all checkpoint number summations to be scanned, is zeroed；If fpga is operated In the process, reset signal is received, then counting value returns；
3. count value, divided by the columns value for being intended to scanning lattice, remainder as a result is as where the checkpoint to be scanned of next step Column coordinate (scanning starting column coordinate be zero)；
4. count value, divided by the columns value for being intended to scanning lattice, mould as a result is as where the checkpoint to be scanned in next step Row coordinate (scanning initial row coordinate is zero)；
5. the parity of row coordinate is judged, if row coordinate is even number, with the half way of optical angle range to be rotated The product of rotation optical angle resolving power and column coordinate is subtracted, difference is again divided by 2, and result is as the electroluminescent micro mirror in x+ actuating arm side The difference of deflection angle and the electroluminescent micro mirror deflection angle in x- actuating arm side, is set as Δ Dx；If row coordinate is odd number, Δ Dx with The analog value symbol for the case where row coordinate is even number is opposite；
6. judging the symbol of Δ Dx, if its symbol is positive, the electroluminescent micro mirror deflection angle for defining x+ actuating arm side is The value of Δ Dx, and the electroluminescent micro mirror deflection angle of x- actuating arm side is 0；If the symbol of Δ Dx is negative, x+ actuating arm is defined The electroluminescent micro mirror deflection angle of side is 0, and the electroluminescent micro mirror deflection angle of x- actuating arm side is the absolute value of Δ Dx；
7. calculating the difference of the electroluminescent micro mirror deflection angle in y+ actuating arm side Yu the electroluminescent micro mirror deflection angle in y- actuating arm side simultaneously Value, is set as Δ Dy, it is that the product of pitching optical angle resolving power and row coordinate subtracts the half way for being intended to pitching optical angle range Resulting difference again divided by 2 result；
8. judging the symbol of Δ Dy, if its symbol is positive, the electroluminescent micro mirror deflection angle for defining y+ actuating arm side is The value of Δ Dy, and the electroluminescent micro mirror deflection angle of y- actuating arm side is 0；If the symbol of Δ Dy is negative, y+ actuating arm is defined The electroluminescent micro mirror deflection angle of side is 0, and the electroluminescent micro mirror deflection angle of y- actuating arm side is the absolute value of Δ Dx；
9. the electroluminescent micro mirror deflection angle for four actuating arms that pair each step obtains substitutes into the functional relation obtained in step 1 Formula: V=g (D), to know the voltage value that should be applied to four actuating arms；
After 10.fpga carries out the applicable binary coding of subsequent DAC module to four voltage values to be exported, after output is given After DAC circuit module, amplifying circuit and overvoltage protection and filter module, final controller output, which respectively corresponds, to be connect electric heating and declines Four actuating arm pins of mirror and publicly.
In above-mentioned steps, wherein rotation and pitching are that (rotation is similar to left and right and shakes the head, and bows in instruction some deflection directions Face upward and be similar to new line of nodding), it is the common technical term of aviation field.
In the present embodiment, illustrate for an application by electrothermal micro mirror on photoacoustic imaging, embodiment is as follows:
As shown in figure 3, issuing repetition rate in the 20ns arteries and veins of 10KHz using the solid state laser of 532nm diode pumping Wide pulse laser, laser pass through spatial light and fiber coupler, pop one's head in into optoacoustic is transmitted in multimode or single mode optical fiber Position；In probe, laser tail optical fiber lock pin and self-focusing lens coaxially adjacent fixation, laser are emitted by self-focusing lens, are hit It beats in electrothermal mems micro mirror (the micro- Austria in Wuxi, wm-u2 type), the checkpoint in space is hit by mirror-reflection；Micro mirror exists It is step-type under the control of micromirror controller of the present invention, to bend zig-zag path, traverse each checkpoint.To each The impact of a checkpoint is carried out under the specification of external synchronization clock；External synchronization clock is supplied at least four peripheries and is set It is standby: laser, mems micromirror controller, ultrasonic signal receivers, data acquisition module.
Laser issues laser pulse in each clock leading edge, calculates by precision test, in laser hits space Behind some checkpoint and before laser is to checkpoint completion light strike next time, the other three peripheral equipment is made that as follows Movement: mems micromirror controller controls micro mirror stepping deflection, is directed toward next checkpoint on scanning route；Photoacoustic signal receives Device starting receives the photoacoustic signal that the checkpoint examined by ultrasonic transducer issues；Data acquisition module starting is directed to this single step The photoacoustic signal of scanning receives operation, the processing imaging of typing host computer.
As shown in figure 4, micro mirror control flow therein is described as follows:
Setting rotation and pitching optical angle are 40 degree, need the space inspection dot matrix scale traversed by step-scan It is 101*101；Count value variable when fpga is run is indicated with count；Check that the ranks coordinate of dot matrix uses Row and Col respectively It indicates；No matter when micro mirror rotation or pitching, corresponding optical angle resolving power is set as 0.4 degree；Pass through fitting calibrating The data of test know the functional relation for needing to be applied to the voltage V and micro mirror mechanical deflection angle D of actuator: V=g (D)；About Fixed complementation operator mathematically is %, the division sign is/, multiplication sign is *；The electroluminescent micro mirror deflection angle for arranging x+ actuating arm side becomes Measuring Dxp indicates, the electroluminescent micro mirror deflection angle of x- actuating arm side is indicated with variables D xm, the electroluminescent micro mirror deflection of y+ actuating arm side Angle indicates that the electroluminescent micro mirror deflection angle of y- actuating arm side is indicated with variables D ym with variables D yp；X+ actuating arm need to apply electricity Pressure indicates that x- actuating arm need to apply voltage to be indicated with variable V xm with variable V xp, and y+ actuating arm need to apply voltage variable V yp table Show, y- actuating arm need to apply voltage to be indicated with variable V ym；
In the case where then arriving after receiving the start command of host computer and without reset signal, micromirror controller is from zero Start to count to the synchronised clock of outside access, count value is count；
Controller carries out following concurrent operation:
Col=count%101；
Row=(count-Col)/101；
It is corresponding
Δ Dx=10-0.2*Col (Row is even number)
Δ Dx=0.2*Col-10 (Row is odd number)
If Δ Dx is just Dxp=| Δ Dx |；Dxm=0；If Δ Dx is negative, Dxp=0；Dxm=| Δ Dx |；
Δ Dy=0.2*Row-10
If Δ Dy is just Dyp=| Δ Dy |；Dym=0；If Δ Dy is negative, Dyp=0；Dym=| Δ Dy |；
Vxp=g (Dxp)；
Vxm=g (Dxm)；
Vyp=g (Dyp)；
Vym=g (Dym)；
Above four voltage values are encoded according to the binary coding demand of used D/A converter module, are turned for digital-to-analogue Mold changing block is converted into analog voltage and the suitable multiple of amplification, and output gives micro mirror corresponding four actuators (actuating arm), drives micro mirror Then it is deflected according to predetermined angular.
The above embodiment is a preferred embodiment of the present invention, but embodiments of the present invention are not by above-described embodiment Limitation, other any changes, modifications, substitutions, combinations, simplifications made without departing from the spirit and principles of the present invention, It should be equivalent substitute mode, be included within the scope of the present invention.

Claims (7)

1.一种用于光声扫描的电热式微镜的步进扫描控制装置，其特征在于，包括接收外部时钟信号和运算输出二进制电压值的FPGA核心运算单元、数模转换模块、放大电路、以及过压保护与滤波模块；所述FPGA核心运算单元在接收到外部时钟信号后，在时钟前沿触发，输出经过特定算法运算得出的二进制电压值，该二进制电压值经过数模转换模块转换成模拟电压信号，用放大电路放大的模拟电压信号通过过压保护与滤波模块后，供应给电热式微镜的执行器，继而驱动微镜做出相应的偏转动作；1. a step-by-step scanning control device for the electrothermal micromirror of photoacoustic scanning, it is characterized in that, comprise the FPGA core arithmetic unit, digital-to-analog conversion module, amplifying circuit that receive external clock signal and the arithmetic output binary voltage value, and Overvoltage protection and filtering module; after receiving the external clock signal, the FPGA core operation unit is triggered at the leading edge of the clock, and outputs a binary voltage value obtained through a specific algorithm operation, and the binary voltage value is converted into an analog voltage value through a digital-to-analog conversion module. The voltage signal, after the analog voltage signal amplified by the amplifier circuit passes through the overvoltage protection and filtering module, is supplied to the actuator of the electrothermal micromirror, and then drives the micromirror to make corresponding deflection actions; 所述的FPGA核心运算单元根据储存其内的处理运算算法，输出每次外部时钟到来后的微镜下一步偏转角对应驱动臂所需电压；The FPGA core operation unit outputs the voltage required by the driving arm corresponding to the next deflection angle of the micromirror after each external clock arrives according to the processing operation algorithm stored therein; 所述的特定算法是储存于FPGA核心运算单元中的微镜控制电压计算算法，该特定算法通过对外部时钟沿计数，结合所控制微镜的电压-机械偏转角关系函数，得出驱动臂电压值的十进制数值；继而将该十进制数值转换成符合数模转换芯片的编码需求的二进制序列；The specific algorithm is a micromirror control voltage calculation algorithm stored in the FPGA core operation unit. The specific algorithm calculates the voltage of the driving arm by counting the external clock edges and combining the voltage-mechanical deflection angle relationship function of the controlled micromirror. The decimal value of the value; then convert the decimal value into a binary sequence that meets the coding requirements of the digital-to-analog conversion chip; 所述的数模转换模块同时将FPGA核心运算单元的输出数字信号转换成模拟电压信号；The digital-to-analog conversion module simultaneously converts the output digital signal of the FPGA core operation unit into an analog voltage signal; 所述的放大电路利用运算放大器将电压放大至微镜需要的电压；The amplifying circuit utilizes an operational amplifier to amplify the voltage to the voltage required by the micromirror; 所述的过压保护与滤波模块是对欲施加给微镜执行器的模拟电压信号进行电压幅值的限制，以及对控制信号滤波除噪、并进行电流的放大。The overvoltage protection and filtering module is used to limit the voltage amplitude of the analog voltage signal to be applied to the micromirror actuator, filter and denoise the control signal, and amplify the current. 2.根据权利要求1所述的用于光声扫描的电热式微镜的步进扫描控制装置，其特征在于，所述FPGA核心运算单元是采用Cyclone4EP4CE6E22C8N芯片的、具有50MHz晶振的FPGA核心板；该FPGA核心板内含逻辑单元、寄存器、乘法器资源。2. the step-by-step scanning control device for the electrothermal micromirror of photoacoustic scanning according to claim 1, is characterized in that, described FPGA core arithmetic unit adopts Cyclone4EP4CE6E22C8N chip, has the FPGA core board of 50MHz crystal oscillator; The FPGA core board contains logic units, registers, and multiplier resources. 3.一种用于光声扫描的电热式微镜的步进扫描控制方法，其特征在于，包括下述步骤：3. a step scanning control method for the electrothermal micromirror of photoacoustic scanning, is characterized in that, comprises the following steps: S1、约定电热式微镜的两组驱动臂为x和y，x组包括x+驱动臂和x-驱动臂，y组包括y+驱动臂和y-驱动臂；S1. It is agreed that the two groups of driving arms of the electrothermal micromirror are x and y, the x group includes the x+ driving arm and the x- driving arm, and the y group includes the y+ driving arm and the y- driving arm; S2、根据欲控制微镜的标定数据，拟合出需要施加给执行器的电压与微镜机械偏转角度的函数关系：V＝g(D)，其中V是需要施加给电热式微镜某一个驱动臂的电压值，D指的是：在四个驱动臂中仅该驱动臂受电压后，微镜偏转的角度；S2. According to the calibration data of the micromirror to be controlled, fit the functional relationship between the voltage that needs to be applied to the actuator and the mechanical deflection angle of the micromirror: V=g(D), where V is the driver that needs to be applied to the electrothermal micromirror The voltage value of the arm, D refers to: the deflection angle of the micromirror after only the driving arm is subjected to voltage among the four driving arms; S3、检测到开始信号后，且在没有重置信号到来的情况下，FPGA核心运算单元对接收到的外部时钟前沿计数；S3. After the start signal is detected, and in the absence of the arrival of the reset signal, the FPGA core operation unit counts the front edge of the received external clock; S4、外部时钟前沿计数值除以欲扫描点阵的列数值，结果的余数作为下一步要扫描的检查点所在的列坐标，其中，扫描起始列坐标为零；S4. The count value of the front edge of the external clock is divided by the column value of the dot matrix to be scanned, and the remainder of the result is used as the column coordinate of the checkpoint to be scanned in the next step, wherein the scan start column coordinate is zero; S5、外部时钟前沿计数值除以欲扫描点阵的列数值，结果的模作为下一步要扫描的检查点所在的行坐标，其中，扫描起始行坐标为零；S5. The count value of the front edge of the external clock is divided by the column value of the lattice to be scanned, and the modulus of the result is taken as the row coordinate of the checkpoint to be scanned in the next step, wherein the scan start row coordinate is zero; S6、判断行坐标的奇偶性，如果行坐标是偶数，那么用欲转动光学角度范围的半程减去转动光学角度分辨力与列坐标的乘积，差值除以2，其结果作为x+驱动臂侧电致微镜偏转角度与x-驱动臂侧电致微镜偏转角度的差值，设为ΔDx；如果行坐标是奇数，则ΔDx与行坐标为偶数的情况的相应值符号相反；S6. Determine the parity of the row coordinates. If the row coordinates are even, subtract the product of the optical angle resolution and the column coordinate from the half of the optical angle range to be rotated, and divide the difference by 2, and the result is used as x+drive arm The difference between the deflection angle of the side electromicromirror and the deflection angle of the x-drive arm side electromicromirror is set as ΔDx; if the row coordinate is odd, the sign of ΔDx is opposite to the corresponding value in the case where the row coordinate is even; S7、判断ΔDx的符号，如果其符号为正，则定义x+驱动臂侧的电致微镜偏转角度为ΔDx的值，而x-驱动臂侧的电致微镜偏转角度为0；如果ΔDx的符号为负，则定义x+驱动臂侧的电致微镜偏转角度为0，而x-驱动臂侧的电致微镜偏转角度为ΔDx的绝对值；S7. Determine the sign of ΔDx, if its sign is positive, define the deflection angle of the EM mirror on the x+ drive arm side as the value of ΔDx, and the deflection angle of the EM mirror on the x- drive arm side is 0; if the value of ΔDx is If the sign is negative, the deflection angle of the EM on the x+ drive arm side is defined as 0, and the deflection angle of the EM mirror on the x- drive arm side is the absolute value of ΔDx; S8、同时计算y+驱动臂侧电致微镜偏转角度与y-驱动臂侧电致微镜偏转角度的差值，设为ΔDy，它是俯仰光学角度分辨力与行坐标的乘积减去欲俯仰光学角度范围的半程所得的差值除以2的结果；S8. Simultaneously calculate the difference between the deflection angle of the y+ drive arm side electromicromirror and the y- drive arm side electromicromirror deflection angle, and set it as ΔDy, which is the product of the pitch optical angle resolution and the row coordinate minus the desired pitch The result of dividing the difference obtained by half of the optical angle range by 2; S9、判断ΔDy的符号，如果其符号为正，则定义y+驱动臂侧的电致微镜偏转角度为ΔDy的值，而y-驱动臂侧的电致微镜偏转角度为0；如果ΔDy的符号为负，则定义y+驱动臂侧的电致微镜偏转角度为0，而y-驱动臂侧的电致微镜偏转角度为ΔDx的绝对值；S9. Determine the sign of ΔDy. If the sign is positive, define the deflection angle of the y+ drive arm side as ΔDy, and the deflection angle of the y- drive arm side as 0; If the sign is negative, the deflection angle of the electromicromirror on the side of the y+ drive arm is defined as 0, and the deflection angle of the electromicromirror on the side of the y- drive arm is the absolute value of ΔDx; S10、对每一步得到的四个驱动臂的电致微镜偏转角度代入步骤S2中获取的函数关系式：V＝g(D)，从而得到应当施加给四个驱动臂的电压值；S10. Substitute the deflection angles of the electromicromirrors of the four drive arms obtained in each step into the functional relationship obtained in step S2: V=g(D), thereby obtaining the voltage values that should be applied to the four drive arms; S11、FPGA核心运算单元对欲输出的四个电压值进行后续DAC模块适用的二进制编码后，输出给后继DAC电路模块、放大电路和过压保护及滤波模块，最终的控制器输出分别对应接电热式微镜的四个驱动臂引脚和公共地。S11. The FPGA core operation unit performs binary coding on the four voltage values to be outputted by the subsequent DAC module, and outputs it to the subsequent DAC circuit module, amplifying circuit, and overvoltage protection and filtering module. The final controller output corresponds to the electric heating The four drive arm pins and the common ground of the micromirror. 4.根据权利要求3所述的一种用于光声扫描的电热式微镜的步进扫描控制方法，其特征在于，步骤S1中还包括约定微镜的电致偏转的步骤，约定微镜的电致偏转是仅对四个驱动臂中的一个驱动臂上电后，微镜的偏转；电致偏转区别于微镜的被动偏转：微镜某驱动臂侧并未受电，但是由于同组中对称位置的驱动臂对微镜产生了电致偏转，导致该未受电驱动臂侧产生了被迫角位移。4. a kind of step-by-step scanning control method for the electrothermal micromirror of photoacoustic scanning according to claim 3, is characterized in that, in step S1, also comprises the step of stipulating the electro-deflection of the Electrodeflection is the deflection of the micromirror after only one of the four drive arms is powered on; the electrodeflection is different from the passive deflection of the micromirror: a drive arm side of the micromirror is not powered, but due to the same group of The drive arm at the mid-symmetrical position produces an electro-deflection on the micromirror, resulting in a forced angular displacement on the side of the unpowered drive arm. 5.根据权利要求3所述的一种用于光声扫描的电热式微镜的步进扫描控制方法，其特征在于，步骤S2中所述的标定数据，是指对欲控制微镜的驱动臂施加电压对应该微镜的电致偏转角度。5. a kind of step-by-step scanning control method for the electrothermal micromirror of photoacoustic scanning according to claim 3, is characterized in that, the calibration data described in step S2 refers to the drive arm that wants to control the micromirror The applied voltage corresponds to the deflection angle of the micromirror. 6.根据权利要求3所述的一种用于光声扫描的电热式微镜的步进扫描控制方法，其特征在于，步骤S3中，还包括下述步骤：6. a kind of step scanning control method for the electrothermal micromirror of photoacoustic scanning according to claim 3, is characterized in that, in step S3, also comprises the following steps: 设置该外部时钟前沿计数值在达到所有欲扫描的检查点个数总和时候，归零；如果FPGA核心运算单元运作过程中，接收到重置信号，则外部时钟前沿计数值归零。Set the count value of the front edge of the external clock to zero when the total number of checkpoints to be scanned is reached; if the FPGA core operation unit receives a reset signal during the operation, the count value of the front edge of the external clock returns to zero. 7.根据权利要求3所述的一种用于光声扫描的电热式微镜的步进扫描控制方法，其特征在于，微镜对欲检查点阵列的扫描是弓字形扫描。7 . The step-scanning control method of an electrothermal micromirror for photoacoustic scanning according to claim 3 , wherein the scanning of the micromirror to the array of points to be checked is arcuate scanning. 8 .
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