CN106597660B - A kind of the step-scan control device and control method of the electrothermal micro mirror for optical acoustic scanning - Google Patents
A kind of the step-scan control device and control method of the electrothermal micro mirror for optical acoustic scanning Download PDFInfo
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
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Abstract
The invention discloses the step-scan control device and control method of a kind of electrothermal micro mirror for optical acoustic scanning, device includes fpga core arithmetic element, D/A converter module, amplifying circuit and the overvoltage protection and filter module for receiving external timing signal and operation output binary voltage value；The fpga core arithmetic element is after receiving external timing signal; it is triggered in clock leading edge; the binary voltage value that output is obtained by special algorithm operation; the voltage signal is converted into analog voltage signal by D/A converter module; after the signal amplified with amplifying circuit is by overvoltage protection and filter module; it is supplied to the actuator of electrothermal micro mirror, then micro mirror is driven to make corresponding deflection action；The present invention need to only change voltage used in control algolithm-mechanical deflection angle relation function for the micro mirror of different versions, so that it may flexibly be applicable in.In addition, being conducive to the raising of whole device precision the present disclosure additionally applies for the application of optical scanner needs and peripheral equipment synchronous collaboration.
Description
Technical field
The present invention relates to the research field of optical acoustic scanning, in particular to a kind of step-scan control device of electrothermal micro mirror
And control method.
Background technique
MEMS (Micro-Electro-Mechanical Sustem, MEMS) is with semiconductor integrated circuit
What the development of micrometer-nanometer processing technology and ultraprecise mechanical manufacturing technology got up, can with batch making, collect micro mechanism,
Microsensor, micro actuator and signal processing and control circuit, interface, communication and power supply etc. (are included at least in one
One movable structure meets certain mechanism) microdevice or system.MEMS micromirror is exactly a kind of by voltage or electricity
The effect of stream or electrostatic etc. allows to movable miniature essence and completely subtracts rotate or put down, to change the propagation of input light
Direction or phase.Electrothermal micromirror systems mainly include three mirror surface, support arm, actuating arm parts, and actuating arm is as actuator
Deformation is generated by electrocaloric effect to drive mirror deflection.
Electrothermal micro mirror includes two groups of symmetrical frames of actuating arm around micro mirror, and x group actuating arm is x+ actuating arm and x- driving respectively
Arm, for driving micro mirror to rotate movement；Y group actuating arm is y+ actuating arm and y- actuating arm respectively, for driving micro mirror to bow
Face upward movement；Apply certain voltage to any actuating arm, then micro mirror mirror surface is deflected to the side actuating arm.
Existing electrothermal micromirror control system technical solution does not account for external clock and synchronizes to drive micro mirror to carry out stepping
Scanning, but in a variety of applications for needing accurate point by point scanning, for example laser is needed when photoacoustic imaging application mems micro mirror
The each checkpoint of beam step-scan needs synchronous with pulse laser, optoacoustic transducer and data collecting card.This just needs electric heating
Decline mirror control system be capable of providing external clock triggering micro mirror step-scan control.
Summary of the invention
The shortcomings that it is a primary object of the present invention to overcome the prior art and deficiency, provide a kind of electricity for optical acoustic scanning
The step-scan control device and control method of hot type micro mirror needs to answer with peripheral equipment synchronous collaboration suitable for optical acoustic scanning
With occasion, be conducive to the raising of whole device precision.
In order to achieve the above object the invention adopts the following technical scheme:
The invention discloses a kind of step-scan control devices of electrothermal micro mirror for optical acoustic scanning, including receive outer
Portion's clock signal and the operation output fpga core arithmetic element of binary voltage value, D/A converter module, amplifying circuit and
Overvoltage protection and filter module；The fpga core arithmetic element triggers after receiving external timing signal in clock leading edge,
The binary voltage value that output is obtained by special algorithm operation, the voltage signal are converted into simulation electricity by D/A converter module
Signal is pressed, after the signal amplified with amplifying circuit is by overvoltage protection and filter module, is supplied to the actuator of electrothermal micro mirror,
Then driving micro mirror makes corresponding deflection action；
The fpga core arithmetic element exports each external clock and arrives according to the processing mathematical algorithm stored in it
Micro mirror next step deflection angle afterwards corresponds to voltage needed for actuating arm；
The special algorithm is stored in the control voltage computational algorithm of the micro mirror in fpga core arithmetic element, the algorithm
By, along counting, in conjunction with voltage-mechanical deflection angle relation function of controlled micro mirror, obtaining actuating arm voltage value to external clock
Decimal value；Then the decimal value is converted into meeting the binary sequence of the code requirement of analog-digital chip；
The output digit signals of fpga core arithmetic element are converted into analog voltage simultaneously by the D/A converter module
Signal；
The amplifying circuit utilizes operational amplifier by voltage amplification to micro mirror required voltage；
The overvoltage protection and filter module is to carry out voltage to the analog voltage signal of micro mirror actuator to be applied to
The limitation of amplitude, and to control signal filtering and eliminating noise and carry out the amplification of electric current.
The fpga core arithmetic element is using Cyclone4EP4CE6E22C8N chip as a preferred technical solution,
, FPGA core core with 50MHz crystal oscillator；The fpga chip intensional logic unit, register, multiplier resources.
The invention also discloses a kind of step-scan control method of electrothermal micro mirror for optical acoustic scanning, including it is following
Step:
S1, two groups of actuating arms for arranging electrothermal micro mirror are x and y, and x group includes x+ actuating arm and x- actuating arm, and y group includes
Y+ actuating arm and y- actuating arm；
S2, according to the nominal data of micro mirror to be controlled, fit the voltage for needing to be applied to actuator and micro mirror be mechanical partially
The functional relation of gyration: V=g (D), wherein V is the voltage value for needing to be applied to some actuating arm of electrothermal micro mirror, and D refers to
: only the actuating arm is after by voltage in four actuating arms, the angle of micro mirror deflection；
S3, after detecting commencing signal, and no reset signal arrive in the case where, fpga core arithmetic element docking
The external clock forward position received counts；
S4, count value are divided by the columns value for being intended to scanning lattice, and remainder as a result is as the checkpoint to be scanned institute in next step
Column coordinate, wherein scanning starting column coordinate be zero；
S5, count value are divided by the columns value for being intended to scanning lattice, and mould as a result is as where the checkpoint to be scanned of next step
Row coordinate, wherein scanning initial row coordinate be zero；
S6, the parity for judging row coordinate, if row coordinate is even number, with the half way of optical angle range to be rotated
The product of rotation optical angle resolving power and column coordinate is subtracted, for difference divided by 2, result is inclined as the electroluminescent micro mirror in x+ actuating arm side
The difference of gyration and the electroluminescent micro mirror deflection angle in x- actuating arm side, is set as Δ Dx；If row coordinate is odd number, Δ Dx and row
The analog value symbol for the case where coordinate is even number is opposite；
S7, the symbol for judging Δ Dx, if its symbol is positive, the electroluminescent micro mirror deflection angle for defining x+ actuating arm side is
The value of Δ Dx, and the electroluminescent micro mirror deflection angle of x- actuating arm side is 0；If the symbol of Δ Dx is negative, x+ actuating arm is defined
The electroluminescent micro mirror deflection angle of side is 0, and the electroluminescent micro mirror deflection angle of x- actuating arm side is the absolute value of Δ Dx；
S8, the difference for calculating the electroluminescent micro mirror deflection angle in y+ actuating arm side Yu the electroluminescent micro mirror deflection angle in y- actuating arm side simultaneously
Value, is set as Δ Dy, it is that the product of pitching optical angle resolving power and row coordinate subtracts the half way for being intended to pitching optical angle range
Resulting difference divided by 2 result；
S9, the symbol for judging Δ Dy, if its symbol is positive, the electroluminescent micro mirror deflection angle for defining y+ actuating arm side is
The value of Δ Dy, and the electroluminescent micro mirror deflection angle of y- actuating arm side is 0；If the symbol of Δ Dy is negative, y+ actuating arm is defined
The electroluminescent micro mirror deflection angle of side is 0, and the electroluminescent micro mirror deflection angle of y- actuating arm side is the absolute value of Δ Dx；
S10, the function obtained in step S2 is substituted into the electroluminescent micro mirror deflection angle for four actuating arms that each step obtains
Relational expression: V=g (D), to obtain the voltage value that should be applied to four actuating arms；
S11, fpga core arithmetic element carry out the applicable binary system of subsequent DAC module to four voltage values to be exported and compile
After code, output exports difference to subsequent DAC circuit module, amplifying circuit and overvoltage protection and filter module, final controller
Corresponding four actuating arm pins for connecing electrothermal micro mirror and publicly.
Further include the steps that the electric deflection for arranging micro mirror in step S1 as a preferred technical solution, arranges micro mirror
Electric deflection is the deflection of micro mirror after only powering on to an actuating arm in four actuating arms；Electric deflection is different from micro mirror
Passive deflection: micro mirror actuating arm side is not by electricity, but since the actuating arm of symmetric position in same group produces electricity to micro mirror
Deflection turns, and causes this not produced by electric drive arm side and is forced angular displacement.
Nominal data described in step S2 as a preferred technical solution, is primarily referred to as the driving to micro mirror to be controlled
Arm applies the electric deflection angle that voltage corresponds to the micro mirror.
Further include following step as a preferred technical solution, in step S3:
The count value is set when reaching all checkpoint number summations to be scanned, is zeroed；If fpga core is transported
During calculating cell operation, reset signal is received, then counting value returns.
Micro mirror is bow font scanning to the scanning of lattice array to be checked as a preferred technical solution,.
Compared with the prior art, the invention has the following advantages and beneficial effects:
1, the step-by-step movement micro mirror scanning technique means that the present invention is triggered using external clock, to reach optical acoustic scanning just
It is synchronized in peripheral equipments such as other lasers, ultrasound emission receiver, data collectors, improves optical acoustic scanning
The technical effect of scanning accuracy；
2, present invention employs extremely cheap and industrial widely used FPGA core core, DAC module, simple calculations to put
Big device IC and common pressure limiting filter circuit, so that the design for reaching the micro mirror sweeping scheme for field of photoacoustic imaging is concise,
Cost of implementation is extremely low, is suitble to the technical effect promoted；
3, the present invention does not need to do any type of change to the micro mirror as control target, so that applicability is extremely strong.
Detailed description of the invention
Fig. 1 is the device of the invention figure；
Fig. 2 is signified four actuating arm schematic diagrames of electrothermal micro mirror of the invention；
Fig. 3 is the opto-acoustic imaging devices schematic diagram of embodiment；
Fig. 4 is control flow chart of the invention.
Specific embodiment
Present invention will now be described in further detail with reference to the embodiments and the accompanying drawings, but embodiments of the present invention are unlimited
In this.
Embodiment
As shown in Figure 1, a kind of step-scan control device of the electrothermal micro mirror for optical acoustic scanning of the present embodiment, including
Receive the fpga core arithmetic element, D/A converter module, amplification electricity of external timing signal and operation output binary voltage value
Road and overvoltage protection and filter module；The fpga core arithmetic element is after receiving external timing signal, before clock
The binary voltage value obtained along triggering, output by special algorithm operation, the voltage signal are converted by D/A converter module
Electrothermal micro mirror is supplied to after the signal amplified with amplifying circuit is by overvoltage protection and filter module at analog voltage signal
Actuator, then drive micro mirror make corresponding deflection action；
The fpga core arithmetic element exports each external clock and arrives according to the processing mathematical algorithm stored in it
Micro mirror next step deflection angle afterwards corresponds to voltage needed for actuating arm；
The output digit signals of fpga core arithmetic element are converted into analog voltage simultaneously by the D/A converter module
Signal；
The amplifying circuit utilizes operational amplifier by voltage amplification to micro mirror required voltage；
The overvoltage protection and filter module is to carry out voltage to the analog voltage signal of micro mirror actuator to be applied to
The limitation of amplitude, and to control signal filtering and eliminating noise and carry out the amplification of electric current.
The scan control method of the external trigger step-scan control device of above-mentioned electrothermal micro mirror, includes the following steps:
Two groups of actuating arms of 0. agreement electrothermal micro mirror are x and y, and x group includes x+ actuating arm and x- actuating arm, and y group includes y
+ actuating arm and y- actuating arm, as shown in Figure 2；
Agreement micro mirror electric deflection be to only being powered on to an actuating arm in four actuating arms after, the deflection of micro mirror；
Electric deflection is different from the passive deflection of micro mirror: micro mirror drives wall side not by electricity, but due to symmetric position in same group
Actuating arm produces electric deflection to micro mirror, causes this not produced by electric drive arm side and is forced angular displacement；
1. fitting the voltage and micro mirror mechanical deflection for needing to be applied to actuator according to the nominal data of micro mirror to be controlled
The functional relation of angle: V=g (D), wherein V is the voltage value for needing to be applied to some actuating arm of electrothermal micro mirror, what D referred to
It is the only actuating arm after by voltage in four actuating arms, the angle that micro mirror can deflect；
2. after detecting commencing signal, and in the case where no reset signal arrives, when FPGA is to the outside received
Clock forward position counts；The count value is set when reaching all checkpoint number summations to be scanned, is zeroed；If fpga is operated
In the process, reset signal is received, then counting value returns；
3. count value, divided by the columns value for being intended to scanning lattice, remainder as a result is as where the checkpoint to be scanned of next step
Column coordinate (scanning starting column coordinate be zero)；
4. count value, divided by the columns value for being intended to scanning lattice, mould as a result is as where the checkpoint to be scanned in next step
Row coordinate (scanning initial row coordinate is zero)；
5. the parity of row coordinate is judged, if row coordinate is even number, with the half way of optical angle range to be rotated
The product of rotation optical angle resolving power and column coordinate is subtracted, difference is again divided by 2, and result is as the electroluminescent micro mirror in x+ actuating arm side
The difference of deflection angle and the electroluminescent micro mirror deflection angle in x- actuating arm side, is set as Δ Dx；If row coordinate is odd number, Δ Dx with
The analog value symbol for the case where row coordinate is even number is opposite；
6. judging the symbol of Δ Dx, if its symbol is positive, the electroluminescent micro mirror deflection angle for defining x+ actuating arm side is
The value of Δ Dx, and the electroluminescent micro mirror deflection angle of x- actuating arm side is 0；If the symbol of Δ Dx is negative, x+ actuating arm is defined
The electroluminescent micro mirror deflection angle of side is 0, and the electroluminescent micro mirror deflection angle of x- actuating arm side is the absolute value of Δ Dx；
7. calculating the difference of the electroluminescent micro mirror deflection angle in y+ actuating arm side Yu the electroluminescent micro mirror deflection angle in y- actuating arm side simultaneously
Value, is set as Δ Dy, it is that the product of pitching optical angle resolving power and row coordinate subtracts the half way for being intended to pitching optical angle range
Resulting difference again divided by 2 result；
8. judging the symbol of Δ Dy, if its symbol is positive, the electroluminescent micro mirror deflection angle for defining y+ actuating arm side is
The value of Δ Dy, and the electroluminescent micro mirror deflection angle of y- actuating arm side is 0；If the symbol of Δ Dy is negative, y+ actuating arm is defined
The electroluminescent micro mirror deflection angle of side is 0, and the electroluminescent micro mirror deflection angle of y- actuating arm side is the absolute value of Δ Dx；
9. the electroluminescent micro mirror deflection angle for four actuating arms that pair each step obtains substitutes into the functional relation obtained in step 1
Formula: V=g (D), to know the voltage value that should be applied to four actuating arms；
After 10.fpga carries out the applicable binary coding of subsequent DAC module to four voltage values to be exported, after output is given
After DAC circuit module, amplifying circuit and overvoltage protection and filter module, final controller output, which respectively corresponds, to be connect electric heating and declines
Four actuating arm pins of mirror and publicly.
In above-mentioned steps, wherein rotation and pitching are that (rotation is similar to left and right and shakes the head, and bows in instruction some deflection directions
Face upward and be similar to new line of nodding), it is the common technical term of aviation field.
In the present embodiment, illustrate for an application by electrothermal micro mirror on photoacoustic imaging, embodiment is as follows:
As shown in figure 3, issuing repetition rate in the 20ns arteries and veins of 10KHz using the solid state laser of 532nm diode pumping
Wide pulse laser, laser pass through spatial light and fiber coupler, pop one's head in into optoacoustic is transmitted in multimode or single mode optical fiber
Position；In probe, laser tail optical fiber lock pin and self-focusing lens coaxially adjacent fixation, laser are emitted by self-focusing lens, are hit
It beats in electrothermal mems micro mirror (the micro- Austria in Wuxi, wm-u2 type), the checkpoint in space is hit by mirror-reflection；Micro mirror exists
It is step-type under the control of micromirror controller of the present invention, to bend zig-zag path, traverse each checkpoint.To each
The impact of a checkpoint is carried out under the specification of external synchronization clock；External synchronization clock is supplied at least four peripheries and is set
It is standby: laser, mems micromirror controller, ultrasonic signal receivers, data acquisition module.
Laser issues laser pulse in each clock leading edge, calculates by precision test, in laser hits space
Behind some checkpoint and before laser is to checkpoint completion light strike next time, the other three peripheral equipment is made that as follows
Movement: mems micromirror controller controls micro mirror stepping deflection, is directed toward next checkpoint on scanning route；Photoacoustic signal receives
Device starting receives the photoacoustic signal that the checkpoint examined by ultrasonic transducer issues；Data acquisition module starting is directed to this single step
The photoacoustic signal of scanning receives operation, the processing imaging of typing host computer.
As shown in figure 4, micro mirror control flow therein is described as follows:
Setting rotation and pitching optical angle are 40 degree, need the space inspection dot matrix scale traversed by step-scan
It is 101*101；Count value variable when fpga is run is indicated with count；Check that the ranks coordinate of dot matrix uses Row and Col respectively
It indicates；No matter when micro mirror rotation or pitching, corresponding optical angle resolving power is set as 0.4 degree；Pass through fitting calibrating
The data of test know the functional relation for needing to be applied to the voltage V and micro mirror mechanical deflection angle D of actuator: V=g (D)；About
Fixed complementation operator mathematically is %, the division sign is/, multiplication sign is *；The electroluminescent micro mirror deflection angle for arranging x+ actuating arm side becomes
Measuring Dxp indicates, the electroluminescent micro mirror deflection angle of x- actuating arm side is indicated with variables D xm, the electroluminescent micro mirror deflection of y+ actuating arm side
Angle indicates that the electroluminescent micro mirror deflection angle of y- actuating arm side is indicated with variables D ym with variables D yp；X+ actuating arm need to apply electricity
Pressure indicates that x- actuating arm need to apply voltage to be indicated with variable V xm with variable V xp, and y+ actuating arm need to apply voltage variable V yp table
Show, y- actuating arm need to apply voltage to be indicated with variable V ym；
In the case where then arriving after receiving the start command of host computer and without reset signal, micromirror controller is from zero
Start to count to the synchronised clock of outside access, count value is count；
Controller carries out following concurrent operation:
Col=count%101；
Row=(count-Col)/101；
It is corresponding
Δ Dx=10-0.2*Col (Row is even number)
Δ Dx=0.2*Col-10 (Row is odd number)
If Δ Dx is just Dxp=| Δ Dx |；Dxm=0；If Δ Dx is negative, Dxp=0；Dxm=| Δ Dx |；
Δ Dy=0.2*Row-10
If Δ Dy is just Dyp=| Δ Dy |；Dym=0；If Δ Dy is negative, Dyp=0；Dym=| Δ Dy |；
Vxp=g (Dxp)；
Vxm=g (Dxm)；
Vyp=g (Dyp)；
Vym=g (Dym)；
Above four voltage values are encoded according to the binary coding demand of used D/A converter module, are turned for digital-to-analogue
Mold changing block is converted into analog voltage and the suitable multiple of amplification, and output gives micro mirror corresponding four actuators (actuating arm), drives micro mirror
Then it is deflected according to predetermined angular.
The above embodiment is a preferred embodiment of the present invention, but embodiments of the present invention are not by above-described embodiment
Limitation, other any changes, modifications, substitutions, combinations, simplifications made without departing from the spirit and principles of the present invention,
It should be equivalent substitute mode, be included within the scope of the present invention.
Claims (7)
1. a kind of step-scan control device of the electrothermal micro mirror for optical acoustic scanning, which is characterized in that external including receiving
Fpga core arithmetic element, D/A converter module, amplifying circuit and the mistake of clock signal and operation output binary voltage value
Pressure protection and filter module；The fpga core arithmetic element triggers after receiving external timing signal in clock leading edge, defeated
The binary voltage value obtained out by special algorithm operation, the binary voltage value are converted into simulating by D/A converter module
Voltage signal is supplied to electric heating to decline after the analog voltage signal amplified with amplifying circuit is by overvoltage protection and filter module
The actuator of mirror then drives micro mirror to make corresponding deflection action；
The fpga core arithmetic element is according to the processing mathematical algorithm stored in it, after exporting each external clock arrival
Micro mirror next step deflection angle corresponds to voltage needed for actuating arm；
The special algorithm is stored in the control voltage computational algorithm of the micro mirror in fpga core arithmetic element, the special algorithm
By, along counting, in conjunction with voltage-mechanical deflection angle relation function of controlled micro mirror, obtaining actuating arm voltage value to external clock
Decimal value；Then the decimal value is converted into meeting the binary sequence of the code requirement of analog-digital chip；
The output digit signals of fpga core arithmetic element are converted into analog voltage signal simultaneously by the D/A converter module；
The amplifying circuit utilizes operational amplifier by voltage amplification to micro mirror required voltage；
The overvoltage protection and filter module is to carry out voltage magnitude to the analog voltage signal of micro mirror actuator to be applied to
Limitation, and to control signal filtering and eliminating noise and carry out the amplification of electric current.
2. the step-scan control device of the electrothermal micro mirror according to claim 1 for optical acoustic scanning, feature exist
In the fpga core arithmetic element is using Cyclone4EP4CE6E22C8N chip, the FPGA core with 50MHz crystal oscillator
Core；The FPGA core core intensional logic unit, register, multiplier resources.
3. a kind of step-scan control method of the electrothermal micro mirror for optical acoustic scanning, which is characterized in that include the following steps:
S1, two groups of actuating arms for arranging electrothermal micro mirror are x and y, and x group includes x+ actuating arm and x- actuating arm, and y group is driven including y+
Swing arm and y- actuating arm；
S2, according to the nominal data of micro mirror to be controlled, fit need to be applied to actuator voltage and micro mirror mechanical deflection angle
The functional relation of degree: V=g (D), wherein V is the voltage value for needing to be applied to some actuating arm of electrothermal micro mirror, and D is referred to:
Only the actuating arm is after by voltage in four actuating arms, the angle of micro mirror deflection；
S3, after detecting commencing signal, and in the case where no reset signal arrives, fpga core arithmetic element is to receiving
External clock forward position count；
S4, external clock forward position count value are divided by the columns value for being intended to scanning lattice, and remainder as a result as being scanned in next step
Column coordinate where checkpoint, wherein scanning starting column coordinate is zero；
S5, external clock forward position count value are divided by the columns value for being intended to scanning lattice, and mould as a result is as the inspection to be scanned in next step
Row coordinate where making an inventory of, wherein scanning initial row coordinate is zero；
S6, the parity for judging row coordinate are subtracted if row coordinate is even number with the half way of optical angle range to be rotated
The product of optical angle resolving power and column coordinate is rotated, difference is divided by 2, and result is as the electroluminescent micro mirror deflection angle in x+ actuating arm side
The difference of degree and the electroluminescent micro mirror deflection angle in x- actuating arm side, is set as Δ Dx；If row coordinate is odd number, Δ Dx and row coordinate
The analog value symbol of the case where for even number is opposite；
S7, the symbol for judging Δ Dx, if its symbol is positive, the electroluminescent micro mirror deflection angle for defining x+ actuating arm side is Δ Dx
Value, and the electroluminescent micro mirror deflection angle of x- actuating arm side be 0；If the symbol of Δ Dx is negative, x+ actuating arm side is defined
Electroluminescent micro mirror deflection angle is 0, and the electroluminescent micro mirror deflection angle of x- actuating arm side is the absolute value of Δ Dx；
S8, the difference for calculating the electroluminescent micro mirror deflection angle in y+ actuating arm side Yu the electroluminescent micro mirror deflection angle in y- actuating arm side simultaneously,
It is set as Δ Dy, it is that the product of pitching optical angle resolving power and row coordinate subtracts obtained by the half way for being intended to pitching optical angle range
Difference divided by 2 result；
S9, the symbol for judging Δ Dy, if its symbol is positive, the electroluminescent micro mirror deflection angle for defining y+ actuating arm side is Δ Dy
Value, and the electroluminescent micro mirror deflection angle of y- actuating arm side be 0；If the symbol of Δ Dy is negative, y+ actuating arm side is defined
Electroluminescent micro mirror deflection angle is 0, and the electroluminescent micro mirror deflection angle of y- actuating arm side is the absolute value of Δ Dx；
S10, the functional relation obtained in step S2 is substituted into the electroluminescent micro mirror deflection angle for four actuating arms that each step obtains
Formula: V=g (D), to obtain the voltage value that should be applied to four actuating arms；
S11, fpga core arithmetic element carry out the applicable binary coding of subsequent DAC module to four voltage values to be exported
Afterwards, to subsequent DAC circuit module, amplifying circuit and overvoltage protection and filter module, final controller output is right respectively for output
Four actuating arm pins and publicly of electrothermal micro mirror should be connect.
4. a kind of step-scan control method of electrothermal micro mirror for optical acoustic scanning according to claim 3, special
Sign is, the electric deflection for arranging micro mirror is further included the steps that in step S1, and the electric deflection for arranging micro mirror is only to drive to four
After an actuating arm in swing arm powers on, the deflection of micro mirror；Electric deflection is different from the passive deflection of micro mirror: micro mirror actuating arm
Side causes this not driven by electricity not by electricity, but since the actuating arm of symmetric position in same group produces electric deflection to micro mirror
Swing arm side, which produces, is forced angular displacement.
5. a kind of step-scan control method of electrothermal micro mirror for optical acoustic scanning according to claim 3, special
Sign is that nominal data described in step S2 refers to and applies the electricity that voltage corresponds to the micro mirror to the actuating arm of micro mirror to be controlled
Deflection gyration.
6. a kind of step-scan control method of electrothermal micro mirror for optical acoustic scanning according to claim 3, special
Sign is, further includes following step in step S3:
The external clock forward position count value is set when reaching all checkpoint number summations to be scanned, is zeroed；If
In fpga core arithmetic element operation, reset signal is received, then external clock forward position counting value returns.
7. a kind of step-scan control method of electrothermal micro mirror for optical acoustic scanning according to claim 3, special
Sign is that micro mirror is bow font scanning to the scanning of lattice array to be checked.
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| JP2004219849A (en) * | 2003-01-16 | 2004-08-05 | Ricoh Co Ltd | Synchronization detection device, optical scanning device and image forming device |
| CN101093375A (en) * | 2006-06-21 | 2007-12-26 | 三星电子株式会社 | Light scanning unit and electrophotographic image forming apparatus including the same |
| CN101873396A (en) * | 2009-04-24 | 2010-10-27 | 京瓷美达株式会社 | Image display device and image processing system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2004219849A (en) * | 2003-01-16 | 2004-08-05 | Ricoh Co Ltd | Synchronization detection device, optical scanning device and image forming device |
| CN101093375A (en) * | 2006-06-21 | 2007-12-26 | 三星电子株式会社 | Light scanning unit and electrophotographic image forming apparatus including the same |
| CN101873396A (en) * | 2009-04-24 | 2010-10-27 | 京瓷美达株式会社 | Image display device and image processing system |
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