CN106596403A - Clamping device for measuring reflectivity of curved mirror - Google Patents
Clamping device for measuring reflectivity of curved mirror Download PDFInfo
- Publication number
- CN106596403A CN106596403A CN201611058936.5A CN201611058936A CN106596403A CN 106596403 A CN106596403 A CN 106596403A CN 201611058936 A CN201611058936 A CN 201611058936A CN 106596403 A CN106596403 A CN 106596403A
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- sample
- clamping device
- compressing tablet
- curved mirror
- substrate
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention discloses a clamping device for measuring the reflectivity of a curved mirror. The clamping device for measuring the reflectivity of a curved mirror comprises a base plate, a sample clamping slot, a sample clamping pressure sheets, a front positioning holes and side positioning slots, wherein the sample clamping slot is formed in the center of the base plate; a to-be-measured sample can be placed in the sample clamping slot; the sample clamping pressure sheets are detachably arranged on the base plate and at the periphery of the sample clamping slot; the front positioning holes are formed in the base plate and at the boundary of the four horizontal and vertical directions of the sample clamping slot; and the side positioning slots are formed in the base plate and in the horizontal direction of the center of the sample clamping slot. The clamping device for measuring the reflectivity of the curved mirror disclosed by the invention has the advantage of simple structure.
Description
Technical field
The present invention relates to optical reflectivity fields of measurement, and in particular to a kind of clamping dress for the measurement of curved mirror reflection rate
Put.
Background technology
Optical reflectivity measurement is one of the metering system on the most simple basis of current optical field, is used for many occasions,
Such as spectrometer, ellipsometer.Its basic structure is to be launched Ray Of Light irradiating sample by light source and reflected, using receiver
Reflected light is received, the interaction of sample and light is detected by the reflected light for detecting, and then deduce the basic nature of sample
Matter.
The measurement experiment of optical reflectivity needs order to be accurately irradiated in detector by the light that sample reflects.In reality
In operation, the position relationship of optical light source and detector is typically first set, the crosspoint of straight line that both are located is sensing point, is also sample
The sample spot that product should be placed.When sample is placed on sample spot, and by debuging operation after, sample should be with optical light source and detector institute
It is vertical in plane (i.e. the plane of incidence), and make the geometrical relationship of straight line that both are located meet reflection law.For planar sample,
General debugs operating process including the regulation of sample spot position and the regulation at angle of inclination.Wherein, sample spot position includes again
Sample surfaces (are often described with the regulation of sensing point distance in the plane of incidence in horizontal instrument (plane of incidence is perpendicular to horizontal plane)
For " height ", be commonly described as " z is to position " in vertical instrument (plane of incidence is parallel to horizontal plane)) and sample surface in target
The regulation of test point position.The former gradually adjusts sample under the conditions of straight-through light (i.e. optical light source and detector is just in 180 ° of angles)
The luminous intensity that highly (or z is to position) record detector is received, can obtain a Spline smoothing of light intensity, and it is corresponded to
Height and position in the middle of " step " is sensing point position；The latter need under reflected light path, make sample in sample surface gradually
Change (x, y direction) is adjusted to target detection point to determine the boundary position of sample all around (or up and down).Sample
Adjusting for product point angle of inclination includes the angular adjustment parallel to the plane of incidence and the angular adjustment perpendicular to the plane of incidence again, both
Its intensity for detecting can be taken by under reflected light path, gradually changing sample surface parallel (vertical) in the angle of the plane of incidence
Maximum of points is adjusted for the mode of desired value.Several parameters of debuging are often interrelated due to more than, in order to ensure to debug
The accuracy of position, typically makes the parameter of several regulations intercouple, finally in practical operation by the way of adjusting repeatedly
Obtain debuging result in a precision allowed band.
Process of debuging above is a basic regulation process, is also a kind of general regulative mode.In this kind of reflection
In rate measuring instrument, a sample stage for placing sample or sample clamping device is typically had, sample stage can do three directions
And the motion of two angles, and sample clamping device can generally fix the flat board of sample, it is possible to by clamping device
Location structure be fixed in instrument.It is effective for the regulation very simple of planar sample, but for curved surface sample,
Due to the presence of sample edge curvature, it is impossible to by reflected light come accurate judgement sample position, and then cannot learn that sample is taken up an official post
The reflection optical position of what point, also cannot just carry out the side amount of reflectivity..
The content of the invention
It is contemplated that overcoming the defect that prior art is present, the present invention to employ the following technical solutions：
The invention provides a kind of clamping device for the measurement of curved mirror reflection rate.It is described to survey for curved mirror reflection rate
The clamping device of amount includes：Substrate, sample clamping groove, sample clamping compressing tablet, front location hole and side locating slot；The sample
Product holding tank is arranged on the center of the substrate, and the sample clamping groove can house testing sample；The sample clamping compressing tablet can
Releasably arrange on the substrate, and the sample clamping compressing tablet is arranged on the surrounding of the sample clamping groove；The front
Location hole is arranged on the substrate, and the front location hole is arranged on the side of the horizontal and vertical four direction of sample clamping groove
At boundary；The side locating slot is arranged on the substrate, and the side locating slot is arranged on the sample clamping groove center
The horizontal direction of position.
In certain embodiments, the sample clamping compressing tablet includes compressing tablet, screw hole and securing member；The screw hole sets
Put on the compressing tablet, and can be by the compressing tablet pressure holding on the substrate by the securing member.
In certain embodiments, the sample clamping compressing tablet is 4, and 4 sample clamping compressing tablets symmetrically divide
Cloth is around the sample clamping groove.
In certain embodiments, the front location hole is 4, and 4 front location holes are uniformly and symmetrically distributed
Around the sample clamping groove.
In certain embodiments, the clamping device also includes clamping device location structure, the clamping device positioning knot
Structure is arranged on the edge of the substrate.
In certain embodiments, the clamping device location structure falls 45° angle and is formed by the substrate edges.
In certain embodiments, the securing member is screw.
In certain embodiments, the compressing tablet is copper compressing tablet.
In certain embodiments, each two compressing tablet is symmetrical with respect to front location hole each described.
In certain embodiments, the side locating slot is two, and the side locating slot is arranged on the two of which
On the horizontal extension line of front location hole.
The technique effect of the present invention：Provided by the present invention for the clamping device simple structure of curved mirror reflection rate measurement,
And can conveniently carry out the measurement of curved surface specular reflectivity.
Description of the drawings
Fig. 1 is the spherical reflector schematic diagram according to one embodiment of the invention；
Fig. 2 is the structural representation of the clamping device for the measurement of curved mirror reflection rate according to one embodiment of the invention
Figure.
Specific embodiment
In order that the objects, technical solutions and advantages of the present invention become more apparent, below in conjunction with accompanying drawing and it is embodied as
Example, the present invention will be described in further detail.It should be appreciated that specific embodiment described herein is only to explain this
It is bright, and be not construed as limiting the invention.
It is a kind of clamping device 100 for the measurement of curved mirror reflection rate of present invention offer with reference to shown in Fig. 2.With reference to
Shown in Fig. 1, the clamping device 100 for the measurement of curved mirror reflection rate includes：
Substrate 1, sample clamping groove 2, sample clamping compressing tablet 3, front location hole 4 and side locating slot 5；The specimen holder
Hold the center that groove 2 is arranged on the substrate 1, the housed testing sample of the sample clamping groove 2；The sample clamping compressing tablet 3
It is removably disposed on the substrate 1, and the sample clamping compressing tablet 3 is arranged on the surrounding of the sample clamping groove 2；It is described
Front location hole 4 is arranged on the substrate 1, and the front location hole 4 is arranged on sample clamping groove 2 horizontal and vertical four
The boundary in direction；The side locating slot 5 is arranged on the substrate 1, and the side locating slot 5 is arranged on the sample
The horizontal direction of the center of holding tank 2.Wherein, the housed testing sample of sample clamping groove 2 refers to the sample clamping groove 2
Size it is suitable with testing sample size, i.e. the size of the sample clamping groove 2 and testing sample consistent size, or the sample
The size of product holding tank 2 is bigger than the testing sample size, can accommodate the testing sample.The substrate 1 can be aluminium sheet.
In certain embodiments, the sample clamping compressing tablet 3 includes compressing tablet, screw hole and securing member；The screw hole
It is arranged on the compressing tablet, and can be by the compressing tablet pressure holding on the substrate 1 by the securing member.
In certain embodiments, the sample clamping compressing tablet 3 is 4, and 4 sample clamping compressing tablets 3 are symmetrically
It is distributed in around the sample clamping groove 2.
In certain embodiments, the front location hole 4 is 4, and 4 front location holes 4 are uniformly and symmetrically distributed
Around the sample clamping groove 2.
In certain embodiments, the clamping device also includes clamping device location structure 6, the clamping device positioning knot
Structure 6 is arranged on the edge of the substrate 1.
In certain embodiments, the clamping device location structure 6 falls 45° angle and is formed by the edge of the substrate 1.
In certain embodiments, the securing member is screw.
In certain embodiments, the compressing tablet is copper compressing tablet.
In certain embodiments, each two compressing tablet is symmetrical with respect to front location hole 4 each described.
In certain embodiments, the side locating slot 5 is two, and the side locating slot 5 is arranged on described wherein two
On the horizontal extension line of individual front location hole 4.
It is provided in an embodiment of the present invention for curved mirror reflection to illustrate so that spherical reflector is to measure sample as an example below
The clamping device 100 of rate measurement.
As shown in figure 1, the diameter 30mm of the spherical reflector 10 1, the spherical reflector of thickness 5mm.The spherical reflector
10 working surface diameter is 25mm, and spheric curvature is 168.08mm.
The clamping device 100 is the aluminum metal sheets of 152mm*152mm*10.5mm, is provided with sample clamping groove
2nd, 4 side locating slots 5 of front location hole 4,2 of sample clamping compressing tablet 3,4, and clamping device location structure 6.Wherein,
The diameter of sample clamping groove 2DepthSample clamping compressing tablet 3 is respectively by M3 screws, screw and copper
Compressing tablet is constituted, and wherein copper compressing tablet one end is that 4mm*4mm is square, and centre is diameter 3mm holes, passes through can M3 screws, one end
For 5mm*1mm rectangles, and it is bent downwardly, the chucking power to sample is provided by the toughness of metal；Front location hole 4 is 4
The through hole of 30mm*7mm, respectively in upper and lower, left and right four direction, can position to the border of sample four direction；Side
Face locating slot 5 be located at the center of substrate 1 horizontal direction groove, long 152mm, wide 7mm, deep 6mm；61～64 clamping devices are determined
Bit architecture is that 45 ° of chamferings at lower four edges on substrate 1 are constituted, in its embedded albedo measurement instrument that can be consolidated.
Sample actually to debug process as follows：
The first step, sample 10 is placed in sample clamping groove 2, and is fixed with sample clamping compressing tablet 3, and by whole 1 sample
Product clamping device is put in instrument, is positioned and fixed by the location structure 6 of clamping device 100.
Second step, adjusts optical light source and detector position so as to reach 180 ° of angles, that is, lead directly to light state, adjusts sample stage
Sample clamping device 100 is made perpendicular to optical light source and detector place straight line.And rule of thumb make light be irradiated to the center of sample
Near position, it is believed that now the position at sample center for (0,0,0).In the horizontal direction (x directions) is gradually moved from -16mm to 16mm
Dynamic sample stage, detector can detect the process that light intensity becomes again strong by dying down by force, and its trailing edge center is sample
Left margin, is designated as xL, its rising edge center is the right margin of sample, is designated as xR.Thus in obtaining sample levels direction
Heart position xC=(xL+xR)/2, adjust sample levels direction position to xC, samples vertical direction (y directions) can be obtained in the same manner
Center yC。
3rd step, keeps light path to lead directly to light state, and adjusting sample stage makes sample clamping device 100 parallel to light source and visit
Survey device place straight line.Sample stage is gradually adjusted from -5mm to 5mm in z directions, detector can detect what light intensity changed from weak to strong
Change, its rising edge center is the position z of sample surface0, it is z with the position relationship at sample centerC=z0-zd, wherein
zdIt is 0.465mm for the distance on sample sphere summit to sample surfaces.
4th step, keeps light path to lead directly to light state, and sample stage keeps sample clamping device 100 parallel to light source and detection
Device place straight line.It is (x to adjust sample stage position coordinatesC,yC,z0).Sample stage is gradually adjusted parallel to optical light source and detector institute
Rectilinear direction deflection angle from -5 ° to 5 °, detector can detect light intensity and gradually become and die down again by force, its maximum intensity position
As the sample angle parallel with the line of ray detector one, is designated as w.
5th step, keeps light path to lead directly to light state, and sample stage is adjusted to into (xC,yC,z0, third and fourth is repeated in w) position
Step, until z0Keep constant with w.
6th step, regulation light path makes 2 times that the angle of optical light source and detector is target incident angle i, that is, reflect light state, this
Target incident angle is i=6 ° used in embodiment, then it is 12 ° to adjust optical light source and detector angle.Sample stage is adjusted to (xC,yC,
zC, 90 ° of-i+w) and position.Gradually adjust sample stage the deflection angle perpendicular to optical light source and detector place rectilinear direction from -5 ° to
5 °, detector can detect light intensity and gradually become and die down again by force, and its maximum intensity position is sample and the line of ray detector one
Parallel angle, is designated as a.
7th step, keeps reflection light state.Adjust and gradually adjust sample stage parallel to optical light source and detector place straight line
From 82 ° to 86 °, detector can detect light intensity and gradually become and die down again by force the deflection angle in direction, and its maximum intensity position is
Specimen apex tangent plane meets the horizontal tilt angle of reflection law perpendicular to incident light and the angle of reflection optic angle separated time, is designated as
wC。
8th step, keeps light path to reflect light state, and sample stage is adjusted to into (xC,yC,zC,wC, a) position repeats the
6th, the 7th step, until wCKeep constant with a.
Below vertex position on curved surface sample is obtained debugs parameter, and any test point can be according to it on curved surface
It is calculated with the relative position relation on summit.
The technique effect of the present invention：Provided by the present invention for the clamping device simple structure of curved mirror reflection rate measurement,
And can conveniently carry out the measurement of curved surface specular reflectivity.
In describing the invention, it is to be understood that term " " center ", " longitudinal direction ", " horizontal ", " length ", " width ",
" thickness ", " on ", D score, "front", "rear", "left", "right", " vertical ", " level ", " top ", " bottom " " interior ", " outward ", " up time
The orientation or position relationship of the instruction such as pin ", " counterclockwise ", " axial direction ", " radial direction ", " circumference " be based on orientation shown in the drawings or
Position relationship, is for only for ease of the description present invention and simplifies description, rather than indicates or imply that the device or element of indication must
With specific orientation, with specific azimuth configuration and operation, therefore must be not considered as limiting the invention.
Additionally, term " first ", " second " are only used for describing purpose, and it is not intended that indicating or implying relative importance
Or the implicit quantity for indicating indicated technical characteristic.Thus, define " first ", the feature of " second " can express or
Implicitly include at least one this feature.
In the present invention, unless otherwise clearly defined and limited, term " installation ", " connected ", " connection ", " fixation " etc.
Term should be interpreted broadly, for example, it may be fixedly connected, or be detachably connected, or it is integral；Can be that machinery connects
Connect, or electrically connect；Can be joined directly together, it is also possible to be indirectly connected to by intermediary, can be in two elements
The connection in portion or the interaction relationship of two elements, unless otherwise clearly restriction.For one of ordinary skill in the art
For, can as the case may be understand above-mentioned term concrete meaning in the present invention.
In the present invention, unless otherwise clearly defined and limited, fisrt feature second feature " on " or D score can be with
It is the first and second feature directly contacts, or the first and second features are by intermediary mediate contact.And, fisrt feature exists
Second feature " on ", " top " and " above " but fisrt feature are directly over second feature or oblique upper, or be merely representative of
Fisrt feature level height is higher than second feature.Fisrt feature second feature " under ", " lower section " and " below " can be
One feature is immediately below second feature or obliquely downward, or is merely representative of fisrt feature level height less than second feature.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
The description of example " or " some examples " etc. means to combine specific features, structure, material or spy that the embodiment or example are described
Point is contained at least one embodiment of the present invention or example.In this manual, to the schematic representation of above-mentioned term not
Identical embodiment or example must be directed to.And, the specific features of description, structure, material or feature can be with office
Combine in an appropriate manner in one or more embodiments or example.Additionally, in the case of not conflicting, the skill of this area
Art personnel can be tied the feature of the different embodiments or example described in this specification and different embodiments or example
Close and combine.
Although embodiments of the invention have been shown and described above, it is to be understood that above-described embodiment is example
Property, it is impossible to limitation of the present invention is interpreted as, one of ordinary skill in the art within the scope of the invention can be to above-mentioned
Embodiment is changed, changes, replacing and modification.
The specific embodiment of present invention described above, does not constitute limiting the scope of the present invention.Any basis
Various other corresponding change and deformation done by the technology design of the present invention, should be included in the guarantor of the claims in the present invention
In the range of shield.
Claims (10)
1. it is a kind of for curved mirror reflection rate measurement clamping device, it is characterised in that include：
Substrate, sample clamping groove, sample clamping compressing tablet, front location hole and side locating slot；
The sample clamping groove is arranged on the center of the substrate, and the sample clamping groove can house testing sample；
The sample clamping compressing tablet is removably disposed on the substrate, and the sample clamping compressing tablet is arranged on the sample
The surrounding of holding tank；
The front location hole is arranged on the substrate, and the front location hole to be arranged on sample clamping groove horizontal and vertical
The boundary of four direction；
The side locating slot is arranged on the substrate, and the side locating slot is arranged on the sample clamping groove center position
The horizontal direction put.
2. it is according to claim 1 for curved mirror reflection rate measurement clamping device, it is characterised in that the specimen holder
Compressing tablet is held including compressing tablet, screw hole and securing member；
The screw hole is arranged on the compressing tablet, and can be by the compressing tablet pressure holding on the substrate by the securing member.
3. it is according to claim 2 for curved mirror reflection rate measurement clamping device, it is characterised in that the specimen holder
Compressing tablet is held for 4, and 4 sample clamping compressing tablets are uniformly and symmetrically distributed around the sample clamping groove.
4. it is according to claim 3 for curved mirror reflection rate measurement clamping device, it is characterised in that the front determine
Position hole is 4, and 4 front location holes are uniformly and symmetrically distributed around the sample clamping groove.
5. it is according to claim 1 for curved mirror reflection rate measurement clamping device, it is characterised in that also including clamping
Device location structure, the clamping device location structure is arranged on the edge of the substrate.
6. the clamping device for the measurement of curved mirror reflection rate according to claim 5, it is characterised in that clamping dress
Put location structure and fall 45° angle by the substrate edges and formed.
7. it is according to claim 2 for curved mirror reflection rate measurement clamping device, it is characterised in that the securing member
For screw.
8. the clamping device for the measurement of curved mirror reflection rate according to claim 2, it is characterised in that the compressing tablet is
Copper compressing tablet.
9. it is according to claim 4 for curved mirror reflection rate measurement clamping device, it is characterised in that each two
Compressing tablet is symmetrical with respect to front location hole each described.
10. it is according to claim 4 for curved mirror reflection rate measurement clamping device, it is characterised in that the side
Locating slot is two, and the side locating slot is arranged on the horizontal extension line of two of which front location hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611058936.5A CN106596403A (en) | 2016-11-25 | 2016-11-25 | Clamping device for measuring reflectivity of curved mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611058936.5A CN106596403A (en) | 2016-11-25 | 2016-11-25 | Clamping device for measuring reflectivity of curved mirror |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106596403A true CN106596403A (en) | 2017-04-26 |
Family
ID=58593459
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611058936.5A Pending CN106596403A (en) | 2016-11-25 | 2016-11-25 | Clamping device for measuring reflectivity of curved mirror |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106596403A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109827850A (en) * | 2019-01-15 | 2019-05-31 | 广东工业大学 | A kind of fexible film stretch bending device |
| CN111725041A (en) * | 2020-07-01 | 2020-09-29 | 中国科学院自然科学史研究所 | Sample stage and electron microscope |
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| JPH09321956A (en) * | 1996-05-31 | 1997-12-12 | Fuji Photo Optical Co Ltd | Filter changeover device in original reader |
| CN1440512A (en) * | 2000-03-31 | 2003-09-03 | 株式会社尼康 | Method and device for holding optical member, optical device, exposure apparatus and device manufacturing method |
| CN100464210C (en) * | 2006-02-09 | 2009-02-25 | 三菱电机株式会社 | Apparatus for measuring reflectance, method for measuring reflectance and method for manufacturing display panel |
| CN101694455A (en) * | 2009-09-29 | 2010-04-14 | 武汉理工大学 | Horizontal sample frame of Fourier infrared spectrograph |
| CN102162900A (en) * | 2011-05-18 | 2011-08-24 | 中国科学院长春光学精密机械与物理研究所 | Device for clamping reflector at high accuracy |
| CN102621107A (en) * | 2012-03-09 | 2012-08-01 | 中国科学院长春光学精密机械与物理研究所 | In-situ optical measurement device for aerospace material space environment irradiation measurement |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09321956A (en) * | 1996-05-31 | 1997-12-12 | Fuji Photo Optical Co Ltd | Filter changeover device in original reader |
| CN1440512A (en) * | 2000-03-31 | 2003-09-03 | 株式会社尼康 | Method and device for holding optical member, optical device, exposure apparatus and device manufacturing method |
| CN100464210C (en) * | 2006-02-09 | 2009-02-25 | 三菱电机株式会社 | Apparatus for measuring reflectance, method for measuring reflectance and method for manufacturing display panel |
| CN101694455A (en) * | 2009-09-29 | 2010-04-14 | 武汉理工大学 | Horizontal sample frame of Fourier infrared spectrograph |
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| CN109827850A (en) * | 2019-01-15 | 2019-05-31 | 广东工业大学 | A kind of fexible film stretch bending device |
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| CN111725041B (en) * | 2020-07-01 | 2024-05-28 | 中国科学院自然科学史研究所 | Sample stage and electron microscope |
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