CN1065926C - 金刚石红外增透滤光窗口及其制备方法 - Google Patents
金刚石红外增透滤光窗口及其制备方法 Download PDFInfo
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- CN1065926C CN1065926C CN97125204A CN97125204A CN1065926C CN 1065926 C CN1065926 C CN 1065926C CN 97125204 A CN97125204 A CN 97125204A CN 97125204 A CN97125204 A CN 97125204A CN 1065926 C CN1065926 C CN 1065926C
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Application Number | Priority Date | Filing Date | Title |
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CN97125204A CN1065926C (zh) | 1997-12-26 | 1997-12-26 | 金刚石红外增透滤光窗口及其制备方法 |
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CN97125204A CN1065926C (zh) | 1997-12-26 | 1997-12-26 | 金刚石红外增透滤光窗口及其制备方法 |
Publications (2)
Publication Number | Publication Date |
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CN1191243A CN1191243A (zh) | 1998-08-26 |
CN1065926C true CN1065926C (zh) | 2001-05-16 |
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CN97125204A Expired - Fee Related CN1065926C (zh) | 1997-12-26 | 1997-12-26 | 金刚石红外增透滤光窗口及其制备方法 |
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Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6831742B1 (en) * | 2000-10-23 | 2004-12-14 | Applied Materials, Inc | Monitoring substrate processing using reflected radiation |
CN102590917B (zh) * | 2012-03-12 | 2014-05-14 | 杭州麦乐克电子科技有限公司 | 3.65微米至5微米宽带红外滤光片 |
CN105021288A (zh) * | 2015-08-05 | 2015-11-04 | 浙江大学 | 一种用于热丝化学气相沉积衬底表面温度测量的装置 |
CN105296926B (zh) * | 2015-12-04 | 2018-06-15 | 中国航空工业集团公司洛阳电光设备研究所 | 一种硬质增透复合膜光学窗口及其制备方法 |
CN106842401B (zh) * | 2017-01-19 | 2022-11-11 | 中国科学院上海技术物理研究所 | 一种以cvd金刚石为基底的远红外波段光学薄膜滤光片 |
CN107546109B (zh) * | 2017-08-31 | 2019-12-17 | 武汉工程大学 | 一种利用氢等离子体去除在硅衬底上制备的金刚石窗口的表面碳化硅的方法 |
WO2021046748A1 (zh) * | 2019-09-11 | 2021-03-18 | 深圳先进技术研究院 | 超薄金刚石薄膜及其制备方法及其应用 |
CN111982310A (zh) * | 2020-08-03 | 2020-11-24 | 烁光特晶科技有限公司 | 一种高压电力设备上使用的红外测温窗口 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05270982A (ja) * | 1992-03-27 | 1993-10-19 | Idemitsu Petrochem Co Ltd | ダイヤモンド膜の製造方法 |
CN1094455A (zh) * | 1993-12-30 | 1994-11-02 | 复旦大学 | 金刚石红外增透保护薄膜及制备工艺 |
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1997
- 1997-12-26 CN CN97125204A patent/CN1065926C/zh not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05270982A (ja) * | 1992-03-27 | 1993-10-19 | Idemitsu Petrochem Co Ltd | ダイヤモンド膜の製造方法 |
CN1094455A (zh) * | 1993-12-30 | 1994-11-02 | 复旦大学 | 金刚石红外增透保护薄膜及制备工艺 |
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CN1191243A (zh) | 1998-08-26 |
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Owner name: FUDAN UNIVERSITY; SHANGHAI BAO STEEL GROUP IRON AN Free format text: FORMER NAME OR ADDRESS: FUDAN UNIVERSITY; BAOSHAN STEEL GROUP IRON AND STEEL CO LTD Owner name: FUDAN UNIVERSITY; BAOSHAN IRON & STEEL CO., LTD. Free format text: FORMER NAME OR ADDRESS: FUDAN UNIVERSITY; SHANGHAI BAO STEEL GROUP IRON AND STEEL CO LTD |
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Patentee after: FUDAN University Patentee after: BAOSHAN IRON & STEEL Co.,Ltd. Patentee before: FUDAN University Patentee before: BAOSHAN IRON & STEEL CO.,LTD. Patentee after: FUDAN University Patentee after: BAOSHAN IRON & STEEL CO.,LTD. Patentee before: FUDAN University Patentee before: Baosteel Group Corporation |
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