CN106584441A - Heavy load mechanical hand mechanism - Google Patents
Heavy load mechanical hand mechanism Download PDFInfo
- Publication number
- CN106584441A CN106584441A CN201510676643.2A CN201510676643A CN106584441A CN 106584441 A CN106584441 A CN 106584441A CN 201510676643 A CN201510676643 A CN 201510676643A CN 106584441 A CN106584441 A CN 106584441A
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- forearm
- arm
- mechanical hand
- large arm
- mechanical
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Abstract
The invention relates to a heavy load mechanical hand mechanism. The heavy mechanical hand mechanism includes a mechanical hand big arm, a mechanical hand small arm, a tray, a vertical column, a big arm drive motor, and a small arm drive motor; the mechanical hand small arm includes a small arm drive connection rod and a small arm driven connection rod; one ends of the small arm drive connection rod and the small arm driven connection rod are connected to the mechanical hand big arm through a drive rotation shaft and a driven rotation shaft respectively; the other ends of the small arm drive connection rod and the small arm driven connection rod are connected to the tray through two tray rotation shafts; the mechanical hand big arm is connected to the vertical column through a big arm rotation shaft; and the small arm drive connection rod rotates to drive the tray to expand and contract so as to achieve transmission of slice boxes. A loading and unloading manner of semiconductors in a large-scale production platform is changed into the mechanical hand tray bearing manner, the working time is shortened greatly, and the production efficiency is improved.
Description
【Technical field】
The present invention relates to technical field of manufacturing semiconductors, and in particular to a kind of heavy load mechanical arm mechanism.
【Background technology】
At present, global semiconductor consumption market and industry growth rate are very swift and violent, and especially domestic half
Conductor consumption market and industry growth rate are the whole world more than 10 times.With semicon industry it is extremely fierce
Competition under, semiconductor industry has increasing need for the integrated of great scale.The transportation technology of quasiconductor
It is increasingly becoming the key factor of restriction industry development.General loading sets out mode and bears for robotic transfer
Little semiconductor crystal wafer and silicon chip are carried, this mode seriously restricts the work tempo time.
【The content of the invention】
The technical problem to be solved in the present invention is to overcome techniques as described above defect, there is provided a kind of
Heavy load mechanical arm mechanism.
In order to solve the problems, such as techniques as described above, the present invention takes technical scheme below：
A kind of heavy load mechanical arm mechanism, including it is mechanical hand large arm, mechanical arm, pallet, vertical
Post, large arm motor and forearm rotary drive motor；Wherein, mechanical hand large arm is rotated by large arm
Axle is connected to column；Mechanical arm includes forearm drive connecting rod and forearm follower link, and forearm is actively
One end of connecting rod and one end of forearm follower link pass through active rotation axle respectively and driven rotation axle connects
To mechanical hand large arm；Pallet connects the another of the forearm drive connecting rod respectively by two pallet rotary shafts
One end and the other end of the forearm follower link；Large arm motor is connected to mechanical hand large arm, and
Mechanical hand large arm is driven to rotate centered on large arm rotary shaft；Forearm rotary drive motor is connected to forearm
Drive connecting rod, and drive forearm drive connecting rod to rotate centered on active rotation axle.
In certain embodiments, large arm motor is arranged in column.
In certain embodiments, forearm rotary drive motor is arranged on outside mechanical arm.
In certain embodiments, pallet is silicon chip film magazine pallet.
In certain embodiments, mechanical hand large arm, mechanical arm, pallet and column are rigid structure.
Compared with prior art, the beneficial effects of the present invention is：Will be the production of quasiconductor great scale flat
Mode is set out on platform and is changed to mechanical arm pallet bearing mode, when greatly reducing work tempo
Between, improve production efficiency, and the equipment mechanism is simple, and it is very easy to control.
Additionally, mechanical hand large arm and mechanical arm are respectively by large arm motor, forearm rotation driving
Motor is operated alone, and does not include the gas driving members easy to wear, volatile such as Timing Belt, steel band, has
Benefit the acquisition of the condition of high vacuum degree and high-cleanness, high of chamber residing for mechanical hand.Meanwhile, by mechanical hand large arm,
Forearm drive connecting rod, forearm follower link and pallet constitute a compact plane double leval jib arm mechanism,
The rigidity of mechanical arm device is greatly improved, the heavy load and high rigidity for meeting vacuum mechanical-arm will
Ask.
【Description of the drawings】
Schematic top plan views of the Fig. 1 for the mechanical arm of the embodiment of the present invention.
Elevational schematic views of the Fig. 2 for the mechanical arm of the embodiment of the present invention.
Tray retracted in place schematic diagrams of the Fig. 3 for the mechanical arm mechanism of the embodiment of the present invention.
Fig. 4 stretches out schematic diagram in place for the pallet of the mechanical arm mechanism of the embodiment of the present invention.
Mechanical arm mechanism operation principle schematic diagrams of the Fig. 5 for the embodiment of the present invention.
Reference：
Mechanical hand large arm 1；Mechanical arm 2；Pallet 3；Column 4；Forearm rotation driving
Motor 5；Forearm drive connecting rod 6；Forearm follower link 7.
【Specific embodiment】
In order that the objects, technical solutions and advantages of the present invention become more apparent, below in conjunction with accompanying drawing
And embodiment, the present invention will be described in further detail.It should be appreciated that described herein concrete
Embodiment only to explain the present invention, is not intended to limit the present invention.
Embodiment 1：
Referring to Fig. 1, Fig. 2, the structure of the heavy load mechanical arm of the embodiment of the present invention 1 is shown, including
Mechanical hand large arm 1, mechanical arm 2, pallet 3, column 4, forearm rotary drive motor 5, forearm
Drive connecting rod 6, forearm follower link 7 and large arm motor (not shown).
Mechanical hand large arm 1 connects column 4 by large arm rotary shaft；
Mechanical arm 2, including forearm drive connecting rod 6 and forearm follower link 7, forearm drive connecting rod
6 one end and one end of forearm follower link 7 are connected to by active rotation axle and driven rotation axle respectively
The mechanical hand large arm 1；
Pallet 3 by two pallet rotary shafts connect respectively the forearm drive connecting rod 6 the other end and
The other end of the forearm follower link 7.Pallet 3 is preferably silicon chip film magazine pallet.
It can be seen that, mechanical hand large arm 1 and forearm drive connecting rod 6, mechanical hand large arm 1 and forearm follower link
7th, pallet 3 is connected by rotary shaft respectively with forearm drive connecting rod 6, pallet 3 and forearm follower link 7
Pick up and, collectively form a kind of lanar four rod mechanism, the mechanical hand of lanar four rod mechanism configuration is little
The rigidity of arm 2 is higher, and forearm rotary drive motor 5 directly drives mechanical arm 2, and transmission stiffness is more
Height, more preferably, the terminal angle precision of pallet 3 is only relevant with forearm rotary drive motor 5 for transmission accuracy,
Precision is higher.
Mechanical hand large arm 1 is operated alone and is driven by the large arm motor (not shown) in column 4
Mechanical hand large arm 1 is rotated centered on large arm rotary shaft.Mechanical arm 2 is by little installed in mechanical hand
Forearm rotary drive motor 5 outside arm 2 drives, and forearm rotary drive motor 5 drives the forearm
Drive connecting rod 6 is rotated centered on active rotation axle, the rotation driving pallet 3 of forearm drive connecting rod 6
It is flexible, the flexible transfer function for realizing silicon chip film magazine of pallet 3.
Referring to Fig. 3, Fig. 4, the respectively tray retracted of mechanical arm mechanism is illustrated in place with stretching out in place
Figure, wherein mechanical hand large arm 1 rotate 0 degree, i.e. mechanical hand large arm 1 and maintain static.Pallet 3 is by machine
Tool handss large arm 1 and mechanical arm 2 drive, and mechanical arm 2 drives pallet 3 to complete to stretch.If
Mechanical arm 2 stretches out extreme position and retraction extreme position meets the transmission position of pallet 3 using will
Ask, then mechanical hand large arm 1 need not rotate., whereas if mechanical arm 2 stretches out limit position
Put and retraction extreme position is unsatisfactory for the transmission position use requirement of pallet 3, then mechanical hand large arm 1 is revolved
Turn and mechanical arm 2 combines the position for adjusting arm end pallet 3.
Illustrate Fig. 3,4 to show two working conditions of manipulator arm, complete taking for silicon chip film magazine
With put back to.
Referring to Fig. 5, the operation principles of the heavy load mechanical arm mechanism of the present invention are simplified as：The mechanism
Degree of freedom with X, Y both direction, connecting rod ABE is equivalent to mechanical hand large arm 1, connecting rod BC
Equivalent to forearm drive connecting rod 6, connecting rod DE constitutes machine equivalent to forearm follower link 7, BC, DE
Tool arm 2, connecting rod CD equivalent to pallet 3,4 center of column equivalent to rotating shaft A, in column 4
Large arm motor (not shown) drive link ABE rotate around A, forearm rotary drive motor 5
Drive link BC is rotated around B points, and BCDE lanar four rod mechanisms determine C points movement locus,
Drive link AB and connecting rod BC make its rotation constitute simple fit correlation respectively, make connecting rod CD with
The track operation of job demand.
Above-mentioned mechanical hand large arm 1 and forearm drive connecting rod 6 drive which to revolve by respective driving machine respectively
Turn and do not include the driving member of the gases easy to wear, volatile such as Timing Belt, steel band, be beneficial to machinery
Use of the handss under vacuum clean environment, is beneficial to the condition of high vacuum degree and high-cleanness of chamber residing for mechanical hand
The acquisition of degree.Meanwhile, the motor of mechanical arm 2 can be directly installed on outside mechanical arm
Portion, omits middle running part, the transmission stiffness of mechanical arm is greatly improved.
One is constituted by mechanical hand large arm 1, forearm drive connecting rod 6, forearm follower link 7 and pallet 3
Compact plane double leval jib arm mechanism, is greatly improved mechanism's rigidity of mechanical arm device, meets
The heavy load of vacuum mechanical-arm and high rigidity are required.
Above-mentioned mechanical hand large arm 1, mechanical arm 2, pallet 3 and column 4 are rigid structure,
Meet the requirement of the mechanical arm mechanism heavy load and high rigidity.
To sum up, a kind of heavy load arm mechanism that the present invention is provided is mainly used in semiconductor vacuum transmission
The box-packed loading of semiconductor chip of platform and unloading set out.This heavy load arm mechanism mainly includes machine
Tool handss large arm, mechanical arm, pallet, column, large arm motor and forearm rotation driving electricity
Machine.The apparatus structure is simple, is capable of achieving picking and placeing for quasiconductor film magazine, is effectively reduced pitch time,
Improve production efficiency.
The foregoing is only presently preferred embodiments of the present invention, not to limit the present invention, it is all
Any modification, equivalent and improvement for being made within the spirit and principles in the present invention etc., all should include
Within protection scope of the present invention.
Claims (5)
1. a kind of heavy load mechanical arm mechanism, it is characterised in that including mechanical hand large arm, mechanical hand
Forearm, pallet, column, large arm motor and forearm rotary drive motor；
The mechanical hand large arm is connected to the column by large arm rotary shaft；
The mechanical arm includes forearm drive connecting rod and forearm follower link, forearm drive connecting rod
One end of one end and forearm follower link is connected to described respectively by active rotation axle and driven rotation axle
Mechanical hand large arm；
The pallet by two pallet rotary shafts connect respectively the forearm drive connecting rod the other end and
The other end of the forearm follower link；
The large arm motor is connected to the mechanical hand large arm, and drives mechanical hand large arm with large arm
Rotate centered on rotary shaft；
The forearm rotary drive motor is connected to the forearm drive connecting rod, and drives the forearm master
Dynamic connecting rod is rotated centered on active rotation axle.
2. heavy load mechanical arm mechanism as claimed in claim 1, it is characterised in that the large arm
Motor is arranged in column.
3. heavy load mechanical arm mechanism as claimed in claim 1, it is characterised in that the forearm
Rotary drive motor is arranged on the outside of mechanical arm.
4. heavy load mechanical arm mechanism as claimed in claim 1, it is characterised in that the pallet
For silicon chip film magazine pallet.
5. heavy load mechanical arm mechanism as claimed in claim 1, it is characterised in that the machinery
Handss large arm, mechanical arm, pallet and column are rigid structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510676643.2A CN106584441A (en) | 2015-10-19 | 2015-10-19 | Heavy load mechanical hand mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510676643.2A CN106584441A (en) | 2015-10-19 | 2015-10-19 | Heavy load mechanical hand mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106584441A true CN106584441A (en) | 2017-04-26 |
Family
ID=58554121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510676643.2A Pending CN106584441A (en) | 2015-10-19 | 2015-10-19 | Heavy load mechanical hand mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106584441A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090196718A1 (en) * | 2008-02-05 | 2009-08-06 | Inotera Memories, Inc. | Holding apparatus |
| CN101908497A (en) * | 2010-07-14 | 2010-12-08 | 哈尔滨工业大学 | Double-arm transmission robot applied to high-cleanliness environment |
| CN202948907U (en) * | 2013-01-30 | 2013-05-22 | 上海微电子装备有限公司 | Substrate transmission robot arm |
| CN103908394A (en) * | 2014-04-02 | 2014-07-09 | 华中科技大学 | Portable 2-DOF wrist joint rehabilitation robot |
| CN104308832A (en) * | 2014-10-23 | 2015-01-28 | 重庆华数机器人有限公司 | Four-axis swing-arm articulated robot |
| CN204136065U (en) * | 2014-08-21 | 2015-02-04 | 中山市乾润精密钢球制造有限公司 | Cold headers manipulator |
| CN204209684U (en) * | 2014-10-15 | 2015-03-18 | 浙江理工大学 | The high speed SCARA robot that full fixed electrical machinery drives |
-
2015
- 2015-10-19 CN CN201510676643.2A patent/CN106584441A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090196718A1 (en) * | 2008-02-05 | 2009-08-06 | Inotera Memories, Inc. | Holding apparatus |
| CN101908497A (en) * | 2010-07-14 | 2010-12-08 | 哈尔滨工业大学 | Double-arm transmission robot applied to high-cleanliness environment |
| CN202948907U (en) * | 2013-01-30 | 2013-05-22 | 上海微电子装备有限公司 | Substrate transmission robot arm |
| CN103908394A (en) * | 2014-04-02 | 2014-07-09 | 华中科技大学 | Portable 2-DOF wrist joint rehabilitation robot |
| CN204136065U (en) * | 2014-08-21 | 2015-02-04 | 中山市乾润精密钢球制造有限公司 | Cold headers manipulator |
| CN204209684U (en) * | 2014-10-15 | 2015-03-18 | 浙江理工大学 | The high speed SCARA robot that full fixed electrical machinery drives |
| CN104308832A (en) * | 2014-10-23 | 2015-01-28 | 重庆华数机器人有限公司 | Four-axis swing-arm articulated robot |
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Application publication date: 20170426 |
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