CN106575029B - zoom microscope - Google Patents

zoom microscope Download PDF

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Publication number
CN106575029B
CN106575029B CN201580040959.0A CN201580040959A CN106575029B CN 106575029 B CN106575029 B CN 106575029B CN 201580040959 A CN201580040959 A CN 201580040959A CN 106575029 B CN106575029 B CN 106575029B
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CN
China
Prior art keywords
lens
variable focus
lens group
zoom microscope
microscope according
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Active
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CN201580040959.0A
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Chinese (zh)
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CN106575029A (en
Inventor
约翰内斯·温特罗特
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Carl Zeiss Microscopy GmbH
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Carl Zeiss Microscopy GmbH
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Publication of CN106575029A publication Critical patent/CN106575029A/en
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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B15/00—Optical objectives with means for varying the magnification
    • G02B15/14—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective
    • G02B15/146—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective having more than five groups
    • G02B15/1461—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective having more than five groups the first group being positive
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/02—Objectives
    • G02B21/025—Objectives with variable magnification

Abstract

The present invention relates to a kind of modularization zoom microscopes, include replaceable object lens (03,13)；Variable focus package (04) has at least two movable lens groups that object lens (03,13) are placed in observation optical path；Barrel assembly (08) is placed on variable focus package (04)；And imaging unit, have and be placed on barrel assembly (08) and be located in the imaging sensor in the plane of delineation (09), for detecting the image for configuring the sample in object plane.According to the present invention, object lens (03,13) have such focal length, so that the image-side focus of object lens is located in variable focus package, and the side in movable lens group includes aperture (07).At this point, movable lens group can be adjusted so at least one first position in an Advantageous embodiments, so that the entrance pupil of variable focus package is located in the image-side focus of object lens.

Description

Zoom microscope
Technical field
The present invention relates to a kind of zoom microscopes as described in the preamble according to claim 1.
Background technique
In optical measuring technique, especially in the inspection of certain components, the imaging of not perspective distortion is needed, and Imaging scale is also kept constant in restriction range in the direction of the optical axis.It means that as long as telecentricity is present in scheduled scape In deep range, the object of different height but identical size also shows identical size in imaging.
In order to measure various sizes of object, areas imaging should be utilized as fully as possible, therefore for very small Object must amplify imaging scale.This is the zoom system, pancreatic system of telecentricity must to be kept to complete using one kind.For this purpose, image-side is remote The heart is also useful.
The telecentric optics of two sides do not have proportional error theoretically when defocusing.
The known various telecentricity zoom microscopes with or without intermediate image from the prior art.
Not having the system of intermediate image has shorter structure length, therefore advantageously especially can be applied to alternately survey Amount task, observation mission and filing task.
In addition, when object side optical filtering or axis incident light illumination should be coupled into optical path, in object side telecentricity Zoom system, pancreatic system is just particularly advantageous.
2010/0014154 A1 of US discloses a kind of zoom microscope, has when using different Interchangeable lens Widened zoom magnification range, the zoom microscope by the image-side focus of interchangeable objective lens configure aperture diaphragm come Generate object side telecentricity.Here the problem of is, for the object lens of larger focal length, to need more structure spaces.
2004/0246592 A1 of US discloses a kind of zoom microscope with image-side telecentricity.Zoom system, pancreatic system includes four A lens group, wherein two intermediate lens groups are mobile for setting magnifying power.Zoom system, pancreatic system is in the object side of the first lens group The entrance pupil substantially overlapped with the emergent pupil with object lens.Thus, it is always necessary to the phase between zoom system, pancreatic system and object lens To biggish interval.
Summary of the invention
Now, the task of the present invention is a kind of compact microscope is provided, make the object for being preferred for measuring purpose Undistorted amplification is possibly realized.
The task is completed by a kind of modularization zoom microscope of feature with claim 1.
Modularization zoom microscope includes: object plane, can place object to be seen on it；Replaceable lens, match It sets at from objective table constant distance；Variable focus package；Tube lens component；And imaging unit, it is used for the figure of detection object Picture.
In object plane, microscope is in most cases provided with objective table in known manner.Preferably, object Planar configuration is at from object lens constant distance.
Object lens, variable focus package, tube lens group and imaging unit configure in the order since object plane in optical path or In person's observation optical path.
Object lens have such focal length, so that the image-side focus of object lens is located in variable focus package.
Variable focus package includes at least two movable lens groups.According to the present invention, the side in movable lens group includes Aperture.
At this point, movable lens group can so be set at least one first position in an Advantageous embodiments, make The entrance pupil for obtaining variable focus package is located in the image-side focus of object lens.In other embodiment, there are also movable lens Second or other such position of group or setting.
Pass through the aperture, the substantially telecentricity of the object side of generation zoom microscope and image-side.
Variable focus package is afocal lens system.
Neither playing focusing light effect and not playing the lens system of astigmatism is considered as no coke.This is to say, parallel incident Although light beam is reflected in a manner of assembling or dissipating in system, the other lens or reflecting mirror in optical path make light again Secondary parallel orientation it is emitted.In other words, being parallel to the light of optical axis incidence, also secondary axes leave system in parallel again.(source: dimension Base encyclopaedia)
Advantageously, using zoom microscope according to the present invention, by for relatively large object field in scheduled amplification Object lens are replaced within the scope of rate and manipulate zoom, may be implemented to be up to about 25 times of scale factor.
In a preferred embodiment, aperture has fixed dimension, but is also possible to ruler in an alternative embodiment It is very little variable.
In a particularly preferred embodiment, variable focus package three including a fixed lens group and just removable saturating Microscope group, these lens groups configure in the following order since object lens: fixed first lens group (positive refracting power), removable second are thoroughly Microscope group (negative refractive power), removable the third lens group (positive refracting power), removable 4th lens group (negative refractive power).In this implementation In mode, aperture is configured in the third lens group.Advantageously, the movement of three movable lens groups is so harmonized each other, so that Constant position is obtained by (virtual) imaging of the aperture of the first lens group.Overall movement is aligned to constant picture position.
In order to keep telecentricity, image-side focus is in the position of (virtual) image of aperture.
Tube lens system is preferably included in known manner for image to be focused on to multiple lens in the plane of delineation Group is configured with imaging sensor in the plane of delineation.
When for example microlens array configuration is before imaging sensor, image-side telecentricity is just especially advantageous.Tool There is this sensor of microlens array due to the optical device of preposition connection and chief ray is tilted especially sensitive.
Certainly, zoom movement electronic perhaps can be implemented automatically.
The position of lens group can be detected in various ways and apply in imaging unit or display unit, so as to It determines scaling and/or implements measurement in the picture.
It is respectively present unlimited ray space in the front and back of variable focus package, the known ground of the unlimited ray space is especially suitable Being coupled into or being coupled out together in part optical path, optical filtering etc..
Axis incident light illumination can be entered with preferred coupled in the infinite space of object side.
Detailed description of the invention
Particularly preferred embodiment of the invention is described with reference to the accompanying drawings.In the accompanying drawings:
Fig. 1 shows the schematic diagram of the optical system of the particularly preferred embodiment of the zoom microscope with the first object lens；
Fig. 2 shows the schematic diagrams of the optical system of zoom microscope, wherein the first object lens are replaced by the second object lens.
Specific embodiment
Fig. 1 illustrates the optical system of the particularly preferred embodiment of modularization zoom microscope according to the present invention with 5 The optical path of system.
The optical system of zoom microscope includes object field 01, be located at objective table (not shown) on or object plane In.Object 02 is configured in object field 01, observation portion a) is extremely schemed to change in terms of its size in e) in figure.At this point, figure A) very small object is shown, figure e) shows the object of filler body field 01.
F is configured at from 01 constant distance of object fieldoThe object lens 03 of the focal length of=80mm.Object lens 03 are replaceable 's.
With object lens 03 it is adjacent be the variable focus package 04 with zoom factor Γ=0.5 ... 5, variable focus package 04 includes four Lens group: the first lens group LGI with positive refracting power is configured in a position-stable manner.Second lens group LG2 is removable along optical axis 06 It moves and there is negative refractive power.The third lens group LG3 is equally removable along optical axis 06 and has positive refracting power.4th lens group LG4 is removable also along optical axis 06 and has negative refractive power.
Aperture 07 is arranged on the third lens group LG3.At this point, aperture 07 preferably securely connect with lens group LG3 and with this Lens group LG3 is removable along optical axis 06.In the present embodiment, aperture has the fixed diameter of 12.7mm.
In the illustrated embodiment, barrel assembly 08 has focal length fT=200mm and include: with the saturating of positive refracting power Microscope group LG5, the lens group LG6 with negative refractive power and the lens group LG7 with positive refracting power.The lens group of barrel assembly 08 LG5, LG6 and LG7 are configured in a position-stable manner.There are infinite spaces between variable focus package 04 and barrel assembly 08.
Imaging sensor 09 is placed on barrel assembly 08 in the plane of delineation to configure.Imaging sensor 09, which can be, to be had It is suitable for the format of optical system and any of imaging sensor of resolution ratio.Those skilled in the art can choose properly Imaging sensor.
Imaging sensor is a part of imaging unit, and imaging unit is used to detect in a way known sample 02 Image.
In the following, the optical characteristics data of diagram system is listed with tabular form.
At this point, the data of radius refer to the radius of lens.It is the plane with radius=unlimited that U, which is assumed to be,.Interval difference Limit the interval from next element.The lens material of lens group is by refractive index neWith Abbe number veTo limit.In addition, listing respectively Lens group image-side focal length f'.
Object lens f'=80mm:
Zoom f'=100...1000 and barrel assembly:
Whole system has variable power β=1.25...12.5.In the present embodiment, object plane and the plane of delineation Interval be 352mm.
Light beam 11 is exemplified as optical path, light beam 11 passes through the light of zoom microscope from deep object point System deflection is multiple and is consequently focused on imaging sensor.
The axial displacement by lens group LG2, LG3 and LG4 e) a) can be seen that according to optical path to figure from figure, it is different big Small object 02 is imaged at respectively on the whole image face of imaging sensor 09.Variable magnification of telescope Γ without burnt zoom Obtained focal length f' is generated with the focal length of tube lens.
Following table shows the setting that variable interval V1 to V4 used in certain focal length or amplifying stage can be achieved:
f' 100 133.36 177.84 237.12 316.24 421.68 562.32 749.92 1000
V1 25.26 24.40 23.01 20.05 16.70 15.63 14.83 13.33 11.23
V2 1.88 8.69 16.72 25.18 33.69 45.38 60.61 78.57 99.49
V3 76.76 58.70 45.89 38.83 32.46 23.23 15.72 10.44 6.55
V4 19.26 31.37 37.54 39.10 40.30 38.92 31.99 20.81 5.89
In the described embodiment, the position of entrance pupil is set up for just four amplifying stages, the position is in object Side and image-side provide widest telecentricity.When absolutely telecentricity must be kept, it is preferable to use these positions.For this purpose, lens It is micro- that the corresponding interval or absolute position and attached magnifying power of group as " telecentricity " amplifying stage of fixation are stored in zoom In the control unit of mirror, and handle in a limiting fashion when needed.
Using this design, whole system has magnifying power β=1.25...12.5 and maximum numerical aperture NAmax= 0.15。
Fig. 2 shows above-mentioned optical systems, but the difference is that, object lens 03 are by the object lens with focal length fo=40mm 13 replacements.Certainly, here like appended drawing reference indicates identical component, further describes to save here.
To scheme a) extremely to scheme in e), various sizes of object 02 is imaged at again in the whole surface of imaging sensor 09, Wherein, movable lens group LG2, LG3 and LG4 of variable focus package have different location.Using this design, whole system has Magnifying power β=2.5...25 and maximum numerical aperture NAmax=0.3.
Reference signs list
01 object plane
02 object
03 object lens
04 variable focus package
05 -
06 optical axis
07 aperture
08 barrel assembly
09 imaging sensor
The lens group of LG1 ... LG4 variable focus package
The lens group of LG5 ... LG7 barrel assembly

Claims (10)

1. a kind of modularization zoom microscope comprising:
Replaceable object lens (03,13)；
Variable focus package (04) has at least two movable lens that the object lens (03,13) are placed in observation optical path Group；
Barrel assembly (08) is placed on the variable focus package (04)；
Imaging unit has and is placed on the barrel assembly (08) and is located in the imaging sensor in the plane of delineation (09), For detecting the image for configuring the sample in object plane,
It is characterized in that, the object lens (03,13) have such focal length, so that the image-side focus of the object lens is positioned at described A side in variable focus package, and in the movable lens group includes aperture (07).
2. zoom microscope according to claim 1, which is characterized in that the entrance pupil of the variable focus package (04) is in institute The described image side focus at least one first position of movable lens group with the object lens (03,13) is stated to substantially overlap.
3. zoom microscope according to claim 2, which is characterized in that the entrance pupil of the variable focus package (04) Position be positive in entire zooming range, and the described of the object lens (03,13) is located at least in entire zooming range Image-side near focal point.
4. zoom microscope according to claim 3, which is characterized in that the position of the entrance pupil is in the zoom group It is not monotonically changed in the zooming range of part (04).
5. zoom microscope according to any one of claim 2 to 4, which is characterized in that the variable focus package (04) The position of the entrance pupil has at least two identical values in zooming range.
6. zoom microscope according to any one of claim 1 to 4, which is characterized in that variable focus package (04) packet Include a fixed lens group and just three movable lens groups.
7. zoom microscope according to claim 6, which is characterized in that the lens group of the variable focus package (04) from The object lens (03,13) start configuration in the following order: fixed first lens group, removable second lens group, removable third Lens group, removable 4th lens group.
8. zoom microscope according to claim 7, which is characterized in that aperture (07) configuration is in the third lens In group.
9. zoom microscope according to any one of claim 1 to 4, which is characterized in that the aperture (07) is in its ruler Very little aspect is variable.
10. zoom microscope according to any one of claim 1 to 4, which is characterized in that the object lens (03,13) are matched It sets at from the object plane constant distance.
CN201580040959.0A 2014-07-31 2015-07-13 zoom microscope Active CN106575029B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102014215100.7A DE102014215100A1 (en) 2014-07-31 2014-07-31 Zoom microscope
DE102014215100.7 2014-07-31
PCT/EP2015/065921 WO2016015978A1 (en) 2014-07-31 2015-07-13 Zoom microscope

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Publication Number Publication Date
CN106575029A CN106575029A (en) 2017-04-19
CN106575029B true CN106575029B (en) 2018-12-21

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DE (1) DE102014215100A1 (en)
WO (1) WO2016015978A1 (en)

Families Citing this family (3)

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Publication number Priority date Publication date Assignee Title
EP3674771A1 (en) * 2018-12-27 2020-07-01 Leica Instruments (Singapore) Pte. Ltd. Optical system and method for imaging an object
CN111123494B (en) * 2019-12-03 2021-07-27 宁波永新光学股份有限公司 Optical system of high zoom ratio continuous zooming stereomicroscope
KR102116667B1 (en) * 2020-03-09 2020-05-29 (주)하이비젼시스템 Telecentric lighting system for microscope objectives

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CN1788221A (en) * 2004-04-20 2006-06-14 索尼株式会社 Zoom lens and imaging device
US20100014154A1 (en) * 2004-11-29 2010-01-21 Nikon Corporation Zoom Microscope
WO2014037274A2 (en) * 2012-09-04 2014-03-13 Werth Messtechnik Gmbh Method and apparatus for determining the geometry of an object by means of a zoom lens system
US20140168763A1 (en) * 2012-12-19 2014-06-19 Carl Zeiss Microscopy Gmbh Variable imaging system with an objective of fixed focal length

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JP4061152B2 (en) * 2002-08-08 2008-03-12 オリンパス株式会社 Zoom photography optics
JP2006154230A (en) * 2004-11-29 2006-06-15 Nikon Corp Zoom microscope
TWI413800B (en) * 2007-08-31 2013-11-01 Asia Optical Co Inc A microscopic optical system and a digital microscope with this optical system
DE102010002722B4 (en) * 2010-03-10 2019-06-27 Leica Microsystems (Schweiz) Ag Afocal zoom system for a microscope, microscope with such a zoom system and method for operating such a zoom system
DE102013201632B4 (en) * 2013-01-31 2020-10-08 Leica Microsystems (Schweiz) Ag Microscope with zoom aperture coupling and zoom system for a microscope

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040246592A1 (en) * 2003-06-06 2004-12-09 Nikon Corporation Zoom lens system for microscope and microscope using the same
CN1788221A (en) * 2004-04-20 2006-06-14 索尼株式会社 Zoom lens and imaging device
US20100014154A1 (en) * 2004-11-29 2010-01-21 Nikon Corporation Zoom Microscope
WO2014037274A2 (en) * 2012-09-04 2014-03-13 Werth Messtechnik Gmbh Method and apparatus for determining the geometry of an object by means of a zoom lens system
US20140168763A1 (en) * 2012-12-19 2014-06-19 Carl Zeiss Microscopy Gmbh Variable imaging system with an objective of fixed focal length

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Publication number Publication date
CN106575029A (en) 2017-04-19
JP6595576B2 (en) 2019-10-23
DE102014215100A1 (en) 2016-02-04
WO2016015978A1 (en) 2016-02-04
JP2017521729A (en) 2017-08-03

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