CN106575029A - Zoom microscope - Google Patents

Zoom microscope Download PDF

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Publication number
CN106575029A
CN106575029A CN201580040959.0A CN201580040959A CN106575029A CN 106575029 A CN106575029 A CN 106575029A CN 201580040959 A CN201580040959 A CN 201580040959A CN 106575029 A CN106575029 A CN 106575029A
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CN
China
Prior art keywords
lens
zoom
zoom microscope
image
lens group
Prior art date
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Granted
Application number
CN201580040959.0A
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Chinese (zh)
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CN106575029B (en
Inventor
约翰内斯·温特罗特
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Carl Zeiss Microscopy GmbH
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Carl Zeiss Microscopy GmbH
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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B15/00—Optical objectives with means for varying the magnification
    • G02B15/14—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective
    • G02B15/146—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective having more than five groups
    • G02B15/1461—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective having more than five groups the first group being positive
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/02—Objectives
    • G02B21/025—Objectives with variable magnification

Abstract

The invention relates to a modular zoom microscope. The modular zoom microscope is provided with a replaceable objective (03, 13); a zoom assembly (04) with at least two movable lens groups, the assembly being arranged downstream of the objective (03, 13) in an observation beam path; a tubular assembly (08) which is arranged downstream of the zoom assembly (04); and an imaging unit with an image sensor (09), which is positioned downstream of the tubular assembly (08) and on an image plane, for detecting an image of a sample arranged on an object plane. According to the modular zoom microscope, the objective (03, 13) has a focal length such that an image-side focal point of the objective lies within the zoom assembly, and one of the movable lens groups has a diaphragm (07). In an advantageous embodiment, the movable lens groups can be set in at least one first position such that an inlet pupil of the zoom assembly lies in the image-side focal point of the objective.

Description

Zoom microscope
Technical field
The present invention relates to a kind of zoom microscope as described in the preamble according to claim 1.
Background technology
In optical measuring technique, especially in the inspection of some parts, the imaging without perspective distortion is needed, and Imaging scale also in the range of restriction keeps constant in the direction of the optical axis.As long as it means that telecentricity is present in predetermined scape In deep scope, but the object of differing heights same size also shows same size in imaging.
In order to measure various sizes of object, areas imaging should be as fully as possible utilized, therefore for very little Object must amplify imaging scale.This is completed using a kind of zoom system, pancreatic system that must keep telecentricity.For this purpose, image-side is remote The heart is also useful.
The telecentric optics of both sides do not have in theory proportional error when defocusing.
Known various telecentricity zoom microscopes with or without intermediate image from the prior art.
System without intermediate image has shorter structure length, therefore advantageously especially can be applied to alternate survey Amount task, observation mission and filing task.
Additionally, when being coupled in light path in object side filter lenss or axis incident light illumination, in object side telecentricity Zoom system, pancreatic system is only particularly advantageous.
The A1 of US 2010/0014154 disclose a kind of zoom microscope, and it is had when using different Interchangeable lens The zoom magnification scope of expansion, the zoom microscope by the image-side focus of interchangeable objective lenses configure aperture diaphragm come Produce object side telecentricity.Here problem is, for the object lens of larger focal length, needs more structure spaces.
The A1 of US 2004/0246592 disclose a kind of zoom microscope with image-side telecentricity.Zoom system, pancreatic system includes four Individual lens group, wherein two middle lens groups are moved for setting amplification.Object side of the zoom system, pancreatic system in the first lens group With the entrance pupils that the emergent pupil with object lens is substantially overlapped.Thus, it is always necessary to the phase between zoom system, pancreatic system and object lens To larger interval.
The content of the invention
Now, task of the invention is to provide a kind of compact microscope, and it makes to be preferred for the object for measuring purpose It is undistorted to zoom into as being possibly realized.
The task is completed by a kind of modularity zoom microscope of the feature with claim 1.
Modularity zoom microscope includes：Object plane, can place thereon object to be seen；Replaceable lens, it is matched somebody with somebody Put away from object stage constant distance；Variable focus package；Tube lens component；And image-generating unit, it is used for the figure of detection object Picture.
In object plane, microscope is in most of the cases provided with known manner object stage.Preferably, object Planar configuration is away from object lens constant distance.
Object lens, variable focus package, tube lens group and image-generating unit from object plane start to be configured in the order light path or In person's observation optical path.
Object lens have such focal length so that the image-side focus of object lens is located in variable focus package.
Variable focus package includes at least two movable lens groups.According to the present invention, the side in movable lens group includes Aperture.
Now, in an Advantageous embodiments, movable lens group so can set at least one first position, make The entrance pupils for obtaining variable focus package are located in the image-side focus of object lens.In other embodiment, also movable lens Second or other such position or setting of group.
By the aperture, the object side of zoom microscope and the telecentricity of image-side are substantially produced.
Variable focus package is afocal lens system.
The lens combination for neither playing optically focused effect and not playing astigmatism effect is considered as without Jiao.In other words, parallel incidence Although light beam is reflected in system in the way of assembling or dissipating, but the other lens or reflecting mirror in light path make light again Secondary parallel orientation ground outgoing.In other words, parallel to the incident light of optical axis, also again secondary axes abreast leave system.(source：Dimension Base encyclopaedia)
Advantageously, using zoom microscope of the invention, by for relatively large object field is in predetermined amplification Object lens are replaced in the range of rate and zoom is manipulated, it is possible to achieve 25 times of scale factor is up to about.
In a preferred embodiment, aperture has fixed dimension, but can also be in an alternative embodiment chi It is very little variable.
In a particularly preferred embodiment, variable focus package three including a fixed lens group and just is removable saturating Microscope group, these lens groups start to configure in the following order from object lens：It is fixed first lens group (positive refracting power), removable second saturating Microscope group (negative refractive power), removable 3rd lens group (positive refracting power), removable 4th lens group (negative refractive power).In this enforcement In mode, aperture is configured in the 3rd lens group.Advantageously, the movement of three movable lens groups is so harmonized each other so that Constant position is obtained by (virtual) imaging of the aperture of the first lens group.Move integrally and be aligned to constant picture position.
In order to keep telecentricity, image-side focus is in the position of (virtual) image of aperture.
Tube lens system is preferably included in known manner for the multiple lens by image focusing in the plane of delineation Group, is configured with imageing sensor in the plane of delineation.
When for example microlens array is configured in before imageing sensor, image-side telecentricity is just especially favourable.Tool This sensor for having microlens array is inclined especially sensitive due to the optics of preposition connection to chief ray.
Certainly, zoom movement perhaps can automatically be implemented with electronic.
The position of lens group can in a variety of ways be detected and apply in image-generating unit or display unit, so as to It is determined that scaling and/or in the picture enforcement measurement.
Unlimited ray space is respectively present in the front and back of variable focus package, the known ground of the unlimited ray space is especially fitted Being coupled into or being coupled out together in part light path, filter lenss etc..
Axis incident light illumination can be entered with preferred coupled in object side infinite space.
Description of the drawings
Particularly preferred embodiment of the invention is described with reference to the accompanying drawings.In the accompanying drawings：
Fig. 1 illustrates the schematic diagram of the optical system of the particularly preferred embodiment of the zoom microscope with the first object lens；
Fig. 2 illustrates the schematic diagram of the optical system of zoom microscope, wherein, the first object lens are replaced by the second object lens.
Specific embodiment
Fig. 1 optical system of 5 particularly preferred embodiments for illustrating modularity zoom microscope of the invention The light path of system.
The optical system of zoom microscope includes object field 01, and it is located on object stage (not shown) or object plane In.Object 02 is configured with object field 01, its observation portion a) changes into scheming e) in figure in terms of its size.Now, scheme A) very little object is shown, figure e) illustrates the object of filler body field 01.
F is being configured with away from the constant distance of object field 01oThe object lens 03 of the focal length of=80mm.Object lens 03 are replaceable 's.
Adjacent with object lens 03 is with zoom factor Γ=0.5 ..., and 5 variable focus package 04, variable focus package 04 includes four Lens group：The first lens group LGI with positive refracting power is configured in a position-stable manner.Second lens group LG2 is removable along optical axis 06 Move and with negative refractive power.3rd lens group LG3 equally may move and with positive refracting power along optical axis 06.4th lens group LG4 may move and with negative refractive power also along optical axis 06.
Aperture 07 is arranged in the 3rd lens group LG3.Now, aperture 07 be preferably firmly connected with lens group LG3 and with this Lens group LG3 is removable along optical axis 06.In the present embodiment, aperture has the fixed diameter of 12.7mm.
In the illustrated embodiment, barrel assembly 08 has focal length fT=200mm and including：With the saturating of positive refracting power Microscope group LG5, lens group LG6 with negative refractive power and lens group LG7 with positive refracting power.The lens group of barrel assembly 08 LG5, LG6 and LG7 are configured in a position-stable manner.There is infinite space between variable focus package 04 and barrel assembly 08.
Imageing sensor 09 in the plane of delineation after be placed in barrel assembly 08 to configure.Imageing sensor 09 can be had It is suitable for the form of optical system and any of imageing sensor of resolution.Those skilled in the art can select properly Imageing sensor.
Imageing sensor is a part for image-generating unit, and image-generating unit is used to detect sample 02 in a way known Image.
Below, it is illustrated that the optical characteristics data of system is listed with tabular form.
Now, the data of radius refer to the radius of lens.It is the plane with radius=unlimited that U is assumed to be.Interval difference Limit from the interval of next element.The lens material of lens group is by refractive index neWith Abbe number veTo limit.In addition, listing each Lens group image-side focal length f'.
Object lens f'=80mm：
Zoom f'=100...1000 and barrel assembly：
Whole system has variable power β=1.25...12.5.In the present embodiment, object plane and the plane of delineation Interval be 352mm.
Exemplify light beam 11 as light path, light beam 11 from deep object point, by the light of zoom microscope System deflection is multiple and is consequently focused on imageing sensor.
A) e) axial displacement by lens group LG2, LG3 and LG4 can be seen that according to light path to figure from figure, it is different big Little object 02 is imaged at respectively on the whole image face of imageing sensor 09.Variable magnification of telescope Γ without burnt zoom Focal length f' obtained by producing with the focal length of tube lens.
Following table shows the setting of the variable interval V1 to V4 that achievable certain focal length or amplifier stage are used：
f' 100 133.36 177.84 237.12 316.24 421.68 562.32 749.92 1000
V1 25.26 24.40 23.01 20.05 16.70 15.63 14.83 13.33 11.23
V2 1.88 8.69 16.72 25.18 33.69 45.38 60.61 78.57 99.49
V3 76.76 58.70 45.89 38.83 32.46 23.23 15.72 10.44 6.55
V4 19.26 31.37 37.54 39.10 40.30 38.92 31.99 20.81 5.89
In described embodiment, the position of entrance pupils is set up for just four amplifier stages, the position is in thing Side and image-side provide widest telecentricity.When definitely telecentricity must be kept, these positions are preferably used.For this purpose, lens It is micro- that the corresponding interval of group or absolute position and attached amplification are stored in zoom as fixed " telecentricity " amplifier stage In the control unit of mirror, and when needed in a limiting fashion processing.
Using this design, whole system has amplification β=1.25...12.5 and maximum numerical aperture NAmax= 0.15。
Fig. 2 illustrates above-mentioned optical system, but difference is, object lens 03 are by the object lens with focal length fo=40mm 13 replace.Certainly, here like reference represents identical part, further describes so as to save here.
In figure a) is extremely schemed e), various sizes of object 02 is imaged at again in the whole surface of imageing sensor 09, Wherein, movable lens group LG2, LG3 and LG4 of variable focus package has diverse location.Using this design, whole system has Amplification β=2.5...25 and maximum numerical aperture NAmax=0.3.
Reference numerals list
01 object plane
02 object
03 object lens
04 variable focus package
05 -
06 optical axis
07 aperture
08 barrel assembly
09 imageing sensor
The lens group of LG1 ... LG4 variable focus packages
The lens group of LG5 ... LG7 barrel assemblies

Claims (10)

1. a kind of modularity zoom microscope, it includes：
Replaceable object lens (03,13)；
Variable focus package (04), it is placed at least two movable lens of the object lens (03,13) after having in observation optical path Group；
Barrel assembly (08), is placed in thereafter the variable focus package (04)；
Image-generating unit, it is placed in the barrel assembly (08) and is positioned at the imageing sensor in the plane of delineation (09) after having, The image of the sample being configured in for detection in object plane,
Characterized in that, the object lens (03,13) are with such focal length so that the image-side focus of the object lens is located at described In variable focus package, and the side in the movable lens group includes aperture (07).
2. zoom microscope according to claim 1, it is characterised in that the entrance pupils of the variable focus package (04) are in institute State at least one first position of movable lens group and substantially overlapped with the described image side focus of the object lens (03,13).
3. zoom microscope according to claim 2, it is characterised in that the entrance pupils of the variable focus package (04) Position be positive in whole zooming range, and the described of the object lens (03,13) is located at least in whole zooming range Image-side near focal point.
4. zoom microscope according to claim 3, it is characterised in that the position of the entrance pupils is in the zoom group The interior not monotone variation of the zooming range of part (04).
5. the zoom microscope according to any one of claim 2 to 4, it is characterised in that the variable focus package (04) The position of the entrance pupils has at least two identical values in zooming range.
6. zoom microscope according to any one of claim 1 to 5, it is characterised in that variable focus package (04) bag Include a fixed lens group and just three movable lens groups.
7. zoom microscope according to claim 6, it is characterised in that the lens group of the variable focus package (04) from The object lens (03,13) start to configure in the following order：Fixed first lens group, removable second lens group, the removable 3rd Lens group, removable 4th lens group.
8. zoom microscope according to claim 7, it is characterised in that the aperture (07) is configured in the 3rd lens In group.
9. zoom microscope according to any one of claim 1 to 8, it is characterised in that the aperture (07) is in its chi Very little aspect is variable.
10. zoom microscope according to any one of claim 1 to 9, it is characterised in that the object lens (03,13) are matched somebody with somebody Put away from the object plane constant distance.
CN201580040959.0A 2014-07-31 2015-07-13 zoom microscope Active CN106575029B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102014215100.7A DE102014215100A1 (en) 2014-07-31 2014-07-31 Zoom microscope
DE102014215100.7 2014-07-31
PCT/EP2015/065921 WO2016015978A1 (en) 2014-07-31 2015-07-13 Zoom microscope

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CN106575029A true CN106575029A (en) 2017-04-19
CN106575029B CN106575029B (en) 2018-12-21

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JP (1) JP6595576B2 (en)
CN (1) CN106575029B (en)
DE (1) DE102014215100A1 (en)
WO (1) WO2016015978A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111123494A (en) * 2019-12-03 2020-05-08 宁波永新光学股份有限公司 Optical system of high zoom ratio continuous zooming stereomicroscope
CN113272704A (en) * 2018-12-27 2021-08-17 徕卡仪器（新加坡）有限公司 Optical system and method for imaging an object

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102116667B1 (en) * 2020-03-09 2020-05-29 (주)하이비젼시스템 Telecentric lighting system for microscope objectives

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US20040246592A1 (en) * 2003-06-06 2004-12-09 Nikon Corporation Zoom lens system for microscope and microscope using the same
CN1788221A (en) * 2004-04-20 2006-06-14 索尼株式会社 Zoom lens and imaging device
US20100014154A1 (en) * 2004-11-29 2010-01-21 Nikon Corporation Zoom Microscope
WO2014037274A2 (en) * 2012-09-04 2014-03-13 Werth Messtechnik Gmbh Method and apparatus for determining the geometry of an object by means of a zoom lens system
US20140168763A1 (en) * 2012-12-19 2014-06-19 Carl Zeiss Microscopy Gmbh Variable imaging system with an objective of fixed focal length

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JP4061152B2 (en) * 2002-08-08 2008-03-12 オリンパス株式会社 Zoom photography optics
JP2006154230A (en) * 2004-11-29 2006-06-15 Nikon Corp Zoom microscope
TWI413800B (en) * 2007-08-31 2013-11-01 Asia Optical Co Inc A microscopic optical system and a digital microscope with this optical system
DE102010002722B4 (en) * 2010-03-10 2019-06-27 Leica Microsystems (Schweiz) Ag Afocal zoom system for a microscope, microscope with such a zoom system and method for operating such a zoom system
DE102013201632B4 (en) * 2013-01-31 2020-10-08 Leica Microsystems (Schweiz) Ag Microscope with zoom aperture coupling and zoom system for a microscope

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040246592A1 (en) * 2003-06-06 2004-12-09 Nikon Corporation Zoom lens system for microscope and microscope using the same
CN1788221A (en) * 2004-04-20 2006-06-14 索尼株式会社 Zoom lens and imaging device
US20100014154A1 (en) * 2004-11-29 2010-01-21 Nikon Corporation Zoom Microscope
WO2014037274A2 (en) * 2012-09-04 2014-03-13 Werth Messtechnik Gmbh Method and apparatus for determining the geometry of an object by means of a zoom lens system
US20140168763A1 (en) * 2012-12-19 2014-06-19 Carl Zeiss Microscopy Gmbh Variable imaging system with an objective of fixed focal length

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113272704A (en) * 2018-12-27 2021-08-17 徕卡仪器（新加坡）有限公司 Optical system and method for imaging an object
CN111123494A (en) * 2019-12-03 2020-05-08 宁波永新光学股份有限公司 Optical system of high zoom ratio continuous zooming stereomicroscope

Also Published As

Publication number Publication date
JP6595576B2 (en) 2019-10-23
DE102014215100A1 (en) 2016-02-04
CN106575029B (en) 2018-12-21
WO2016015978A1 (en) 2016-02-04
JP2017521729A (en) 2017-08-03

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