CN106556806A - A kind of very big Measurement Method for Magnetic Field and device - Google Patents

A kind of very big Measurement Method for Magnetic Field and device Download PDF

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Publication number
CN106556806A
CN106556806A CN201611019155.5A CN201611019155A CN106556806A CN 106556806 A CN106556806 A CN 106556806A CN 201611019155 A CN201611019155 A CN 201611019155A CN 106556806 A CN106556806 A CN 106556806A
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magnetization
magnetic field
tunnel magneto
magneto resistance
resistance
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CN106556806B (en
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欧阳勇
何金良
胡军
王善祥
赵根
王中旭
曾嵘
庄池杰
张波
余占清
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Tsinghua University
Sichuan Energy Internet Research Institute EIRI Tsinghua University
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Tsinghua University
Sichuan Energy Internet Research Institute EIRI Tsinghua University
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Priority to PCT/CN2017/090549 priority patent/WO2018090637A1/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09Magnetoresistive devices
    • G01R33/098Magnetoresistive devices comprising tunnel junctions, e.g. tunnel magnetoresistance sensors

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Hall/Mr Elements (AREA)
  • Measuring Magnetic Variables (AREA)

Abstract

The invention discloses a kind of very big Measurement Method for Magnetic Field and device, are related to magnetic field measurement technology field.Technical key point includes:1:The tunnel magneto resistance of four orthogonal configurations is placed in externally-applied magnetic field, and obtains the resistance of each tunnel magneto resistance;2:According to the angle of each tunnel magneto resistance free layer direction of magnetization of computing the resistor value and the reference layer direction of magnetization of four tunnel magneto resistance;3:According to magnetic field intensity H of the angle calcu-lation externally-applied magnetic field of the first tunnel magneto resistance, the free layer direction of magnetization of the 3rd tunnel magneto resistance and the reference layer direction of magnetization1And direction θ1;According to magnetic field intensity H of the angle calcu-lation externally-applied magnetic field of the second tunnel magneto resistance, the free layer direction of magnetization of the 4th tunnel magneto resistance and the reference layer direction of magnetization2And direction θ2;4:According to magnetic field intensity H1With magnetic field intensity H2Determine final magnetic field intensity H of externally-applied magnetic field, according to direction θ2With direction θ1Determine the final direction θ of externally-applied magnetic field.

Description

A kind of very big Measurement Method for Magnetic Field and device
Technical field
The present invention relates to magnetic field measurement technology field, especially a kind of measurement side of the magnetic field intensity for tremendous range Method.
Background technology
When magnetic field to be measured is less with the good linearity, certainty of measurement preferably, works as external magnetic field to tunnel magneto resistance Greatly (160Oe~2500Oe, Oe are unit of magnetic field strength --- oersted) when, tunnel magneto reference layer magnetic domain occurs significantly to revolve Turn, tunnel magneto resistance enters saturation region.Existing measuring method does not adapt to the measurement in very big magnetic field completely, needs proposition one Plant new, it is adaptable to very big Measurement Method for Magnetic Field.
The content of the invention
The technical problem to be solved is:For above-mentioned problem, there is provided a kind of to be applied to very big magnetic field Measuring method and device.
A kind of very big Measurement Method for Magnetic Field that the present invention is provided, including:
Step 1:The tunnel magneto resistance of four orthogonal configurations is placed in externally-applied magnetic field, and obtains each tunnel magneto The resistance of resistance;First tunnel magneto resistance and the 3rd tunnel magneto resistance are located on straight line, the second tunnel magneto resistance It is located on another straight line with the 4th tunnel magneto resistance, the straight line is vertical with the another straight line;
Step 2:According to each tunnel magneto resistance free layer direction of magnetization of computing the resistor value and ginseng of four tunnel magneto resistance Examine the angle of layer direction of magnetization;
Step 3:According to the free layer direction of magnetization of the first tunnel magneto resistance and the angle of the reference layer direction of magnetization and The magnetic field intensity of the free layer direction of magnetization of the 3rd tunnel magneto resistance and the angle calcu-lation externally-applied magnetic field of the reference layer direction of magnetization H1And direction θ1;According to the angle and the 4th of the free layer direction of magnetization and the reference layer direction of magnetization of the second tunnel magneto resistance Magnetic field intensity H of the free layer direction of magnetization of tunnel magneto resistance and the angle calcu-lation externally-applied magnetic field of the reference layer direction of magnetization2And Direction θ2
Step 4:According to magnetic field intensity H1With magnetic field intensity H2Determine final magnetic field intensity H of externally-applied magnetic field, according to direction θ2 With direction θ1Determine the final direction θ of externally-applied magnetic field.
Further, in step 2, magnetized according to its free layer direction of magnetization of computing the resistor value and the reference layer of tunnel magneto resistance The angle equation in direction is:
In formula, Ravg=(Rmax+Rmin)/2, Δmax=(Rmax-Rmin)/Ravg, when the free layer direction of magnetization and reference layer magnetic When change direction is identical, the resistance of tunnel magneto resistance is minimum, is Rmin;When the free layer direction of magnetization and reference layer direction of magnetization phase Inverse time, the resistance of tunnel magneto resistance are maximum, are RmaxMagnetize with reference layer for the tunnel magneto free layer direction of magnetization The angle in direction;R is resistance of the tunnel magneto resistance in the externally-applied magnetic field.
Further, in step 3, magnetic field intensity H1And direction θ1Computing formula be:
In formula, HBRFor the amplitude of the reference layer internal bias field of four tunnel magneto resistance;For the first tunnel magneto The angle of the resistance free layer direction of magnetization and the reference layer direction of magnetization;For the 3rd tunnel magneto resistance free layer direction of magnetization With the angle of the reference layer direction of magnetization.
Further, in step 3, magnetic field intensity H2And direction θ2Computing formula be:
In formula, HBRFor the amplitude of the reference layer internal bias field of four tunnel magneto resistance;For the second tunnel magneto The angle of the resistance free layer direction of magnetization and the reference layer direction of magnetization;For the 4th tunnel magneto resistance free layer direction of magnetization With the angle of the reference layer direction of magnetization.
Further, the step of final magnetic field intensity H of externally-applied magnetic field and final direction θ are determined in step 4 is further wrapped Include,
H=H1=H2
A kind of very big magnetic field measuring device that the present invention is provided, including:
Tunnel magneto resistance acquisition module, for obtaining four tunnel magneto resistance of orthogonal configuration in externally-applied magnetic field Resistance;Wherein, the first tunnel magneto resistance and the 3rd tunnel magneto resistance are located on straight line, the second tunnel magneto resistance It is located on another straight line with the 4th tunnel magneto resistance, the straight line is vertical with the another straight line;
The tunnel magneto resistance free layer direction of magnetization and reference layer direction of magnetization angle calcu-lation module, for according to four tunnels Wear each tunnel magneto resistance free layer direction of magnetization of computing the resistor value of magnetic resistance resistance and the angle of the reference layer direction of magnetization;
The magnetic field intensity and direction precalculation module of externally-applied magnetic field, for the free layer magnetic according to the first tunnel magneto resistance The free layer direction of magnetization for changing direction with the angle and the 3rd tunnel magneto resistance of the reference layer direction of magnetization is magnetized with reference layer Magnetic field intensity H of the angle calcu-lation externally-applied magnetic field in direction1And direction θ1;According to the free layer magnetization side of the second tunnel magneto resistance To the free layer direction of magnetization and the reference layer direction of magnetization of the angle with the reference layer direction of magnetization and the 4th tunnel magneto resistance Angle calcu-lation externally-applied magnetic field magnetic field intensity H2And direction θ2
The magnetic field intensity and direction determining module of externally-applied magnetic field, for according to magnetic field intensity H1With magnetic field intensity H2It is determined that outer Plus magnetic field intensity H that magnetic field is final, according to direction θ2With direction θ1Determine the final direction θ of externally-applied magnetic field.
The tunnel magneto resistance free layer direction of magnetization is further used for reference layer direction of magnetization angle calcu-lation module, according to Its free layer direction of magnetization of the computing the resistor value of tunnel magneto resistance with the angle equation of the reference layer direction of magnetization is:
In formula, Ravg=(Rmax+Rmin)/2, Δmax=(Rmax-Rmin)/Ravg, when the free layer direction of magnetization and reference layer magnetic When change direction is identical, the resistance of tunnel magneto resistance is minimum, is Rmin;When the free layer direction of magnetization and reference layer direction of magnetization phase Inverse time, the resistance of tunnel magneto resistance are maximum, are RmaxMagnetize with reference layer for the tunnel magneto free layer direction of magnetization The angle in direction;R is resistance of the tunnel magneto resistance in the externally-applied magnetic field.
The magnetic field intensity and direction precalculation module calculating magnetic field intensity H of externally-applied magnetic field1And direction θ1Formula be:
In formula, HBRFor the amplitude of the reference layer internal bias field of four tunnel magneto resistance;For the first tunnel magneto The angle of the resistance free layer direction of magnetization and the reference layer direction of magnetization;For the 3rd tunnel magneto resistance free layer direction of magnetization With the angle of the reference layer direction of magnetization.
The magnetic field intensity and direction precalculation module calculating magnetic field intensity H of externally-applied magnetic field2And direction θ2Formula be:
In formula, HBRFor the amplitude of the reference layer internal bias field of four tunnel magneto resistance;For the second tunnel magneto The angle of the resistance free layer direction of magnetization and the reference layer direction of magnetization;For the 4th tunnel magneto resistance free layer direction of magnetization With the angle of the reference layer direction of magnetization.
Using below equation, the magnetic field intensity and direction determining module of externally-applied magnetic field determines that the final magnetic field of externally-applied magnetic field is strong Degree H and final direction θ:
H=H1=H2
In sum, as a result of above-mentioned technical proposal, the invention has the beneficial effects as follows:
The very big Measurement Method for Magnetic Field that the present invention is provided realizes the accurate measurement to very big magnetic field, expands tunnel magneto The magnetic field intensity measurement range of resistance.
Description of the drawings
Examples of the present invention will be described by way of reference to the accompanying drawings, wherein:
Fig. 1 is the scattergram of tunnel magneto resistance in externally-applied magnetic field.
Fig. 2 is very big magnetic-field measurement vectogram.
Specific embodiment
All features disclosed in this specification, or disclosed all methods or during the step of, except mutually exclusive Feature and/or step beyond, can combine by any way.
Any feature disclosed in this specification, unless specifically stated otherwise, can be equivalent or with similar purpose by other Alternative features are replaced.I.e., unless specifically stated otherwise, each feature is an example in a series of equivalent or similar characteristics .
First, the tunnel magneto resistance (I hereinafter referred to as resistance) of four orthogonal configurations, arrangement are placed in externally-applied magnetic field As shown in Figure 1.Wherein resistance R1 and resistance R3 is located on straight line, and resistance R2 and resistance R4 is located on another straight line, and two Bar line orthogonal.
According to above-mentioned arrangement, the very big magnetic-field measurement scattergram of four tunnel magneto resistance is as shown in Figure 2.With resistive reference Layer biases field direction for reference direction, and four resistance are rotated by 90 ° quadrature arrangement successively.H in figure, θ are externally-applied magnetic field amplitude and side To;FL is the compound direction of the free layer direction of magnetization of four resistance, can be approximately considered identical with externally-applied magnetic field direction;Four Vector HBRRepresent amplitude and the direction of the reference layer internal bias field of four magnetic resistance resistance, four magnetic resistance resistance phases in the present embodiment Together, it is taken as that their reference layer internal bias field amplitude is identical, the reference layer internal bias of adjacent two magnetic resistance resistance Field direction is orthogonal;RL1,2,3,4The reference layer direction of magnetization of four resistance is expressed as, itself and externally-applied magnetic field and respective reference The compound direction of layer internal bias field is consistent;For four resistance free layer direction of magnetizations and the reference layer direction of magnetization Angle.
By the vector correlation of Fig. 2, the relation that can obtain four chip direction of magnetizations and externally-applied magnetic field is:
The amplitude of externally-applied magnetic field and direction can be calculated by the two of which of above-mentioned equation group.But only two electric Resistance cannot calculate the magnetic field of whole two dimensional surface, such as when selecting resistance R1 and resistance R3 to calculate externally-applied magnetic field, it is clear that additional magnetic When field is 0 °~180 ° and 180 °~360 °, minute surface is symmetrical, it is therefore necessary to first judge externally-applied magnetic field direction by two other resistance Scope, then selects suitable two resistance to be calculated.
Using resistance R1 and resistance R3 as one group, can be calculated:
In formula, H1, θ1Respectively pass through R1And R3Calculated externally-applied magnetic field amplitude and direction.
Using resistance R2 and resistance R4 as another group, can be calculated:
In formula, H2, θ2Respectively pass through the calculated externally-applied magnetic field amplitudes of R2 and R4 and direction.
By the angle of above-mentioned two formula of comparison, externally-applied magnetic field amplitude can be obtained and direction is:
H=H1=H2
In above-mentioned formula, the angle of each tunnel magneto resistance free layer direction of magnetization and the reference layer direction of magnetization be to What lower formula was tried to achieve.
The resistance of tunnel magneto resistance depends on the angle of its free layer direction of magnetization and the reference layer direction of magnetization.Work as freedom When layer is identical with the reference layer direction of magnetization, resistance value is minimum, is Rmin, when free layer and the contrary reference layer direction of magnetization, resistance Value is maximum, is Rmax。RminAnd RmaxCan be obtained by demarcation.
In externally-applied magnetic field, resistance value R of tunnel magneto resistance with the relation of free layer, the reference layer direction of magnetization is:
In formula, Ravg=(Rmax+Rmin)/2 be average resistance, Δmax=(Rmax-Rmin)/RavgFor maximum magnetic flux resistance variations Rate.
Present invention also offers a set of and one-to-one floppy disk system of said method step.
The invention is not limited in aforesaid specific embodiment.The present invention is expanded to and any is disclosed in this manual New feature or any new combination, and the arbitrary new method that discloses or the step of process or any new combination.

Claims (10)

1. a kind of very big Measurement Method for Magnetic Field, it is characterised in that include:
Step 1:The tunnel magneto resistance of four orthogonal configurations is placed in externally-applied magnetic field, and obtains each tunnel magneto resistance Resistance;First tunnel magneto resistance and the 3rd tunnel magneto resistance are located on straight line, the second tunnel magneto resistance and the Four tunnel magneto resistance are located on another straight line, and the straight line is vertical with the another straight line;
Step 2:According to each tunnel magneto resistance free layer direction of magnetization of computing the resistor value and reference layer of four tunnel magneto resistance The angle of the direction of magnetization;
Step 3:According to the angle and the 3rd of the free layer direction of magnetization and the reference layer direction of magnetization of the first tunnel magneto resistance Magnetic field intensity H of the free layer direction of magnetization of tunnel magneto resistance and the angle calcu-lation externally-applied magnetic field of the reference layer direction of magnetization1And Direction θ1;According to the free layer direction of magnetization of the second tunnel magneto resistance and the angle of the reference layer direction of magnetization and the 4th tunnelling Magnetic field intensity H of the free layer direction of magnetization of magnetic resistance resistance and the angle calcu-lation externally-applied magnetic field of the reference layer direction of magnetization2And direction θ2
Step 4:According to magnetic field intensity H1With magnetic field intensity H2Determine final magnetic field intensity H of externally-applied magnetic field, according to direction θ2With side To θ1Determine the final direction θ of externally-applied magnetic field.
2. a kind of very big Measurement Method for Magnetic Field according to claim 1, it is characterised in that in step 2, according to tunnel magneto resistance Its free layer direction of magnetization of computing the resistor value with the angle equation of the reference layer direction of magnetization be:
In formula, Ravg=(Rmax+Rmin)/2, Δmax=(Rmax-Rmin)/Ravg, when the free layer direction of magnetization and reference layer magnetization side To it is identical when, the resistance of tunnel magneto resistance is minimum, is Rmin;When the free layer direction of magnetization and the contrary reference layer direction of magnetization, The resistance of tunnel magneto resistance is maximum, is RmaxFor the tunnel magneto free layer direction of magnetization and the reference layer direction of magnetization Angle;R is resistance of the tunnel magneto resistance in the externally-applied magnetic field.
3. a kind of very big Measurement Method for Magnetic Field according to claim 1, it is characterised in that in step 3, magnetic field intensity H1And Direction θ1Computing formula be:
In formula, HBRFor the amplitude of the reference layer internal bias field of four tunnel magneto resistance;For the first tunnel magneto resistance The angle of the free layer direction of magnetization and the reference layer direction of magnetization;For the 3rd tunnel magneto resistance free layer direction of magnetization and ginseng Examine the angle of layer direction of magnetization.
4. a kind of very big Measurement Method for Magnetic Field according to claim 1, it is characterised in that in step 3, magnetic field intensity H2And Direction θ2Computing formula be:
In formula, HBRFor the amplitude of the reference layer internal bias field of four tunnel magneto resistance;For the second tunnel magneto resistance The angle of the free layer direction of magnetization and the reference layer direction of magnetization;For the 4th tunnel magneto resistance free layer direction of magnetization and ginseng Examine the angle of layer direction of magnetization.
5. a kind of very big Measurement Method for Magnetic Field according to claim 1, it is characterised in that externally-applied magnetic field is determined in step 4 The step of final magnetic field intensity H and final direction θ further includes,
H=H1=H2
&theta; = &theta; 1 , &theta; 1 &GreaterEqual; 0 , &theta; 2 &GreaterEqual; 0 - &theta; 1 , &theta; 1 &GreaterEqual; 0 , &theta; 2 < 0 &theta; 1 + &pi; , &theta; 1 < 0 , &theta; 2 &GreaterEqual; 0 - &theta; 1 - &pi; , &theta; 1 < 0 , &theta; 2 < 0 .
6. a kind of very big magnetic field measuring device, it is characterised in that include:
Tunnel magneto resistance acquisition module, for obtaining the resistance of four tunnel magneto resistance of orthogonal configuration in externally-applied magnetic field Value;Wherein, the first tunnel magneto resistance and the 3rd tunnel magneto resistance are located on straight line, the second tunnel magneto resistance and the Four tunnel magneto resistance are located on another straight line, and the straight line is vertical with the another straight line;
The tunnel magneto resistance free layer direction of magnetization and reference layer direction of magnetization angle calcu-lation module, for according to four tunnelling magnetic The each tunnel magneto resistance free layer direction of magnetization of computing the resistor value of resistance resistance and the angle of the reference layer direction of magnetization;
The magnetic field intensity and direction precalculation module of externally-applied magnetic field, for the free layer magnetization side according to the first tunnel magneto resistance To the free layer direction of magnetization and the reference layer direction of magnetization of the angle with the reference layer direction of magnetization and the 3rd tunnel magneto resistance Angle calcu-lation externally-applied magnetic field magnetic field intensity H1And direction θ1;According to the free layer direction of magnetization of the second tunnel magneto resistance with The free layer direction of magnetization of the angle of the reference layer direction of magnetization and the 4th tunnel magneto resistance and the folder of the reference layer direction of magnetization Angle calculates magnetic field intensity H of externally-applied magnetic field2And direction θ2
The magnetic field intensity and direction determining module of externally-applied magnetic field, for according to magnetic field intensity H1With magnetic field intensity H2Determine additional magnetic Final magnetic field intensity H in field, according to direction θ2With direction θ1Determine the final direction θ of externally-applied magnetic field.
7. a kind of very big magnetic field measuring device according to claim 6, it is characterised in that tunnel magneto resistance free layer magnetic Change direction to be further used for reference layer direction of magnetization angle calcu-lation module, according to computing the resistor value its freedom of tunnel magneto resistance Layer the direction of magnetization with the angle equation of the reference layer direction of magnetization be:
In formula, Ravg=(Rmax+Rmin)/2, Δmax=(Rmax-Rmin)/Ravg, when the free layer direction of magnetization and reference layer magnetization side To it is identical when, the resistance of tunnel magneto resistance is minimum, is Rmin;When the free layer direction of magnetization and the contrary reference layer direction of magnetization, The resistance of tunnel magneto resistance is maximum, is RmaxFor the tunnel magneto free layer direction of magnetization and the reference layer direction of magnetization Angle;R is resistance of the tunnel magneto resistance in the externally-applied magnetic field.
8. a kind of very big magnetic field measuring device according to claim 6, it is characterised in that the magnetic field intensity of externally-applied magnetic field and Direction precalculation module calculating magnetic field intensity H1And direction θ1Formula be:
In formula, HBRFor the amplitude of the reference layer internal bias field of four tunnel magneto resistance;For the first tunnel magneto resistance The angle of the free layer direction of magnetization and the reference layer direction of magnetization;For the 3rd tunnel magneto resistance free layer direction of magnetization and ginseng Examine the angle of layer direction of magnetization.
9. a kind of very big magnetic field measuring device according to claim 6, it is characterised in that the magnetic field intensity of externally-applied magnetic field and Direction precalculation module calculating magnetic field intensity H2And direction θ2Formula be:
In formula, HBRFor the amplitude of the reference layer internal bias field of four tunnel magneto resistance;For the second tunnel magneto resistance The angle of the free layer direction of magnetization and the reference layer direction of magnetization;For the 4th tunnel magneto resistance free layer direction of magnetization and ginseng Examine the angle of layer direction of magnetization.
10. a kind of very big magnetic field measuring device according to claim 6, it is characterised in that the magnetic field intensity of externally-applied magnetic field And direction determining module determines final magnetic field intensity H of externally-applied magnetic field and final direction θ using below equation:
H=H1=H2
&theta; = &theta; 1 , &theta; 1 &GreaterEqual; 0 , &theta; 2 &GreaterEqual; 0 - &theta; 1 , &theta; 1 &GreaterEqual; 0 , &theta; 2 < 0 &theta; 1 + &pi; , &theta; 1 < 0 , &theta; 2 &GreaterEqual; 0 - &theta; 1 - &pi; , &theta; 1 < 0 , &theta; 2 < 0 .
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PCT/CN2017/090549 WO2018090637A1 (en) 2016-11-18 2017-06-28 Maximal magnetic field measurement method and device

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018090633A1 (en) * 2016-11-18 2018-05-24 清华大学 Optimized extremely-large magnetic field measuring method and device
WO2018090637A1 (en) * 2016-11-18 2018-05-24 清华大学 Maximal magnetic field measurement method and device

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CN103890598A (en) * 2011-10-17 2014-06-25 株式会社电装 Magnetic sensor
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CN106556806B (en) * 2016-11-18 2018-03-13 清华大学 A kind of greatly Measurement Method for Magnetic Field and device
CN106772149B (en) * 2016-11-18 2018-07-06 清华大学 The very big Measurement Method for Magnetic Field and device of a kind of optimization

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Publication number Priority date Publication date Assignee Title
CN1229196A (en) * 1997-09-24 1999-09-22 西门子公司 Sensing device for measuring external magnetic-field direction using magneto-resistance effect sensing device
CN1754080A (en) * 2003-02-24 2006-03-29 Hl-平面技术有限公司 Magnetoresistive sensor for determining an angle or a position
CN102707246A (en) * 2011-03-28 2012-10-03 新科实业有限公司 Method for measuring longitudinal bias magnetic field in tunneling magnetoresistive sensor
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018090633A1 (en) * 2016-11-18 2018-05-24 清华大学 Optimized extremely-large magnetic field measuring method and device
WO2018090637A1 (en) * 2016-11-18 2018-05-24 清华大学 Maximal magnetic field measurement method and device
US11156679B2 (en) 2016-11-18 2021-10-26 Tsinghua University Optimized extremely-large magnetic field measuring method and device

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