CN106547253B - One kind is removed photoresist work step recognition methods and device - Google Patents
One kind is removed photoresist work step recognition methods and device Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 188
- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 147
- 230000008569 process Effects 0.000 claims abstract description 157
- 238000004519 manufacturing process Methods 0.000 claims abstract description 42
- 239000000284 extract Substances 0.000 claims abstract description 8
- 230000005540 biological transmission Effects 0.000 claims description 8
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- 238000010586 diagram Methods 0.000 description 9
- 230000019771 cognition Effects 0.000 description 6
- 239000002253 acid Substances 0.000 description 5
- 238000004590 computer program Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 230000006870 function Effects 0.000 description 4
- 238000012163 sequencing technique Methods 0.000 description 4
- 238000003860 storage Methods 0.000 description 4
- 238000005554 pickling Methods 0.000 description 3
- 238000012512 characterization method Methods 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- FFBHFFJDDLITSX-UHFFFAOYSA-N benzyl N-[2-hydroxy-4-(3-oxomorpholin-4-yl)phenyl]carbamate Chemical compound OC1=C(NC(=O)OCC2=CC=CC=C2)C=CC(=C1)N1CCOCC1=O FFBHFFJDDLITSX-UHFFFAOYSA-N 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000001727 in vivo Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
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- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
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- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
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Abstract
It removes photoresist work step recognition methods and device the invention discloses one kind, this method comprises: being identified according to the product batches of acquisition, it extracts to the corresponding process mark of leapfrog work step and work step mark, and obtains to the quasi- corresponding process mark of target work step and work step mark jumped of leapfrog work step；According to the corresponding process mark of leapfrog work step process mark corresponding with work step mark, target work step and work step mark, determine the work step information of this skipped work step of leapfrog operation, if in the work step information of skipped work step including the work step identification marking that removes photoresist, then sending operation warning and reminding does not allow leapfrog, it whether can be achieved in the work step that accurately differentiation leapfrog operation is skipped comprising going photoresist step, board processing error caused by avoiding because of leapfrog operation, is conducive to improve product yield and production efficiency.
Description
Technical field
It removes photoresist work step recognition methods and device the present invention relates to technical field of semiconductors more particularly to one kind.
Background technique
In the MES (Manufacturing Execution System, production executive system) of field of semiconductor manufacture, root
The basic process of production is executed according to service logic sequencing, is frequently necessary to carry out leapfrog operation in basic process, for example,
The operations of certain process is skipped when product batches are needed to be implemented by production, for example, step 7 is jumped to from process 3, if
Include the steps that photoresist in the step 4 being skipped to step 6, then entrained by the product that direct leapfrog to step 7 obtains
Photoresist will not be removed, and be will cause the board production error of subsequent job in this way, influenced product quality.For example, if subsequent
Operation is acid tank cleaning, will result in acid tank pollution, and the product for resulting even in entire batch is contaminated when pickling and becomes
Substandard products.
In order to avoid such case generation, before leapfrog operation, carrying out the step of artificial judgment leapfrog operation is skipped is
No includes to go photoresist step, but artificial cognition is easy error, once misjudgment, the board that will lead to entire batch is raw
Production all malfunctions, and increases substandard products quantity, is unfavorable for improving product yield.
To sum up, in existing semiconductor fabrication process there is can not accurately differentiate in work step that leapfrog operation is skipped whether
The problem of comprising going photoresist step, board handling ease being caused to malfunction.
Summary of the invention
The embodiment of the present invention provides one kind and removes photoresist work step recognition methods and device, to solve existing semiconductor fabrication process
Present in whether can not accurately differentiate in work step that leapfrog operation is skipped comprising going photoresist step, cause board processing to be held
Error-prone problem.
The embodiment of the present invention provides one kind
It in above-described embodiment, is identified, is extracted to the corresponding process mark of leapfrog work step and work according to the product batches of acquisition
Step mark, and obtain and be nested in MES to the quasi- corresponding process mark of target work step jumped of leapfrog work step and work step mark, triggering
In remove photoresist work step identification device according to identified to leapfrog work step corresponding process mark and work step, the corresponding process of target work step
Mark and work step mark, determine the work step information of this skipped work step of leapfrog operation, if in the work step information of skipped work step
Including the work step identification marking that removes photoresist, then sending operation warning and reminding does not allow leapfrog, it can be achieved that accurately differentiating leapfrog operation institute
Whether comprising going photoresist step in the work step skipped, compared with artificial cognition, identify in the skipped work step of leapfrog operation whether
Accuracy rate comprising step of removing photoresist is higher, can be conducive to improve product to avoid because of board processing error caused by leapfrog operation
Yield.
Detailed description of the invention
To describe the technical solutions in the embodiments of the present invention more clearly, make required in being described below to embodiment
Attached drawing is briefly introduced, it should be apparent that, drawings in the following description are only some embodiments of the invention, for this
For the those of ordinary skill in field, without any creative labor, it can also be obtained according to these attached drawings
His attached drawing.
Fig. 1 is that a kind of leapfrog operation for providing of inventive embodiments is removed photoresist the method flow diagram of work step identification；
Fig. 2 is that a kind of leapfrog operation provided in an embodiment of the present invention is removed photoresist the method flow diagram of work step identification；
Fig. 3 is that a kind of leapfrog operation provided in an embodiment of the present invention is removed photoresist the structural schematic diagram of work step identification device.
Specific embodiment
To make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with attached drawing to the present invention make into
It is described in detail to one step, it is clear that the described embodiments are only some of the embodiments of the present invention, rather than whole implementation
Example.Based on the embodiments of the present invention, obtained by those of ordinary skill in the art without making creative efforts
All other embodiment, shall fall within the protection scope of the present invention.
Work step in the embodiment of the present invention is the abbreviation of processing step.In order to avoid because caused by leapfrog operation board process
Error improves product yield, removes photoresist work step recognition methods and device the embodiment of the invention provides one kind, specifically according to acquisition
Product batches mark, extract to leapfrog work step corresponding process mark and work step mark, and obtain and jump to leapfrog work step is quasi-
Target work step corresponding process mark and work step mark, trigger the work step identification device that removes photoresist being nested in MES according to wait jump
The corresponding process mark of work step process mark corresponding with work step mark, target work step and work step mark are walked, determines this leapfrog
The work step information of the skipped work step of operation is sent if including the work step identification marking that removes photoresist in the work step information of skipped work step
Operation warning, which is reminded, does not allow leapfrog, it can be achieved that whether comprising removing photoresist in the work step that accurately differentiation leapfrog operation is skipped
Step, compared with artificial cognition, identify in the skipped work step of leapfrog operation whether include remove photoresist step accuracy rate it is higher, can be with
Board processing error caused by avoiding because of leapfrog operation, is conducive to improve product yield.If identifying leapfrog operation institute
Skipping includes the work step that removes photoresist in work step, can be reminded according to the operation of transmission and directly trace back to the corresponding board group of the work step that removes photoresist
Subsequent processing is done, avoids checking error reason for a long time, the influence of manufacturing schedule will can be preferably minimized, be conducive to improve life
Produce efficiency.Wherein, Multi Skip is nested in MES production executive system, identifies this leapfrog for the data according to acquisition
Whether include the work step that removes photoresist in the work step that operation is skipped.The work step identification device that removes photoresist may be other with the same function
It can control the device of board processing.
The embodiment of the present invention as shown in Figure 1 provides one kind and removes photoresist work step recognition methods, this method comprises:
Step 101, it obtains and is identified to the product batches of leapfrog work step；
Step 102, it is identified according to the product batches of acquisition, the product batches information to leapfrog work step is extracted, to leapfrog work
It is included at least in the product batches information of step to the corresponding process mark of leapfrog work step and work step mark；
Step 103, it obtains to the quasi- corresponding process mark of target work step and work step mark jumped of leapfrog work step；
Step 104, it is identified according to the corresponding process mark of leapfrog work step process corresponding with work step mark, target work step
It is identified with work step, determines the work step information of this skipped work step of leapfrog operation；
Step 105, if in the work step information of skipped work step including the work step identification marking that removes photoresist, operation warning is sent,
If not including, this leapfrog is executed.
Above method process is detected by remove photoresist work step identification device or the work step that removes photoresist being nested in production executive system MES
Device executes, and is nested in remove photoresist work step identification device or the work step detection device of removing photoresist in production executive system MES for knowing
It whether include step of removing photoresist between the work step skipped in other leapfrog operation.
In above-mentioned steps 101, according to the data that input equipment inputs, obtains and identified to the product batches of leapfrog work step.To
Leapfrog work step refers to the work step just executed before leapfrog operation.
In step 102, the product batches information to leapfrog work step includes the product batches mark Lot_ID to leapfrog work step,
Work step identifies Operration/Step_ID, and process identifies Layer_ID, craft label Process_ID, product number
Product_ID, process menu identify the information such as Recipe_ID, the step for realization be based on that MES system executes should be to leapfrog
When work step, storage is identified as the product batches information of each work step of index, and the product to leapfrog work step with the product batches
Batch information is newest storage, when the work step identification device that removes photoresist obtains the product batches mark of input equipment input, meeting
The product batches for automatically extracting newest storage before leapfrog identify the corresponding product batches information to leapfrog work step.
After step 102, further includes: product batches information of the display to leapfrog work step.
In above method process, each process identifies corresponding at least one work step mark, in general, in semiconductor production
In execution system MES, a technique is made of multiple processes, each process corresponding one unique process mark, and a work
Sequence may include multiple work steps, each work step corresponding one unique work step mark.
The embodiment of the invention provides the methods for the work step information for determining skipped work step when leapfrog between the same process, i.e.,
If it is identical to identify process mark corresponding with target work step to the corresponding process of leapfrog work step, include: basis in step 104 to
The corresponding work step mark of leapfrog work step, the work step mark of target work step and process identify corresponding work step list, determine this
The work step information of the skipped work step of leapfrog operation.The work step information of skipped work step is at least the corresponding work step mark of skipped work step
Know, may also comprise work step and identify corresponding board group identification, work step identifies corresponding process mark etc..
Wherein, if a process includes multiple work steps, process identifies corresponding work step list and refers to that the process is corresponding
The corresponding relationship of the work step mark for all work steps that process mark includes with the process.For example, a process includes 5 work steps,
The process of the work step is identified as Layer1_ID, and the work step mark of 5 work steps arranged according to the sequencing of execution is respectively
Step1_ID, Step2_ID, Step3_ID, Step4_ID, Step5_ID, then being index with Layer1_ID, with Step1_
ID1, Step2_ID2, Step3_ID, Step4_ID, Step5_ID are that the list item of index content is that process identifies corresponding work
List is walked, and identifies the mark of the work step in corresponding work step list in process and is arranged according to the sequencing of execution.Therefore, exist
When carrying out leapfrog operation in the same process, is identified, searched according to the work step to the corresponding work step mark of leapfrog work step, target work step
The process of the process identifies corresponding work step list, that is, can determine that the work step information of this skipped work step of leapfrog operation.Example
Such as, process 2 includes 7 work steps, if leapfrog operation needs to jump to the process 7 of process 2 from the work step 3 of process 2, according to work step
3 work step mark, the work step of work step 7 identify, and the process for searching process 2 identifies corresponding work step list, that is, can determine that this
The work step 4 that leapfrog operation is skipped to work step 7 work step information.
The embodiment of the invention also provides when leapfrog, determine the side of the work step information of skipped work step between different processes
Method, it is even different to the corresponding process mark of leapfrog work step process mark corresponding from target work step, then include: in step 104
The process mark for determining that this leapfrog operation is skipped is identified according to the process of process mark and target work step to leapfrog work step；
Corresponding work step list is identified according to the work step mark to leapfrog work step and the process to leapfrog work step, this leapfrog operation is jumped
The process crossed identifies corresponding work step list, and the work step mark of target work step and the process of target work step identify corresponding work step column
Table determines the work step information of this skipped work step of leapfrog operation.
For example, technique A includes process 1 to process 5, according to the normal sequence of operation, successively execution each process is corresponding each
A work step.If process 2 includes 7 work steps, process 3 includes 2 work steps, and process 4 includes 4 work steps, according to certain special need
After need to finishing from the 1st work step of process 2, the 3rd work step of direct leapfrog to process 4 is then process 2 to leapfrog work step
Work step 1, target work step are the work step 3 of process 4, if process is identified as Layer_ID, work step is identified as Step_ID, determines this
The work step information of the skipped work step of leapfrog operation includes:
(1) the process mark for the process 3 that this leapfrog operation is skipped according to Layer2_ID and Layer4_ID, can be determined
Layer3_ID；
(2) according to the corresponding work step list of the Step1_ID of process 2 and Layer2_ID, determine that this leapfrog operation is jumped
The Layer2_ID crossed corresponding Step2_ID, Step3_ID, Step4_ID, Step5_ID, Step6_ID, Step7_ID；
(3) according to the corresponding work step list of the Layer3_ID of process 3, the Layer3_ that this leapfrog operation is skipped is determined
ID corresponding Step1_ID, Step2_ID；
(4) according to the corresponding work step list of the Step3_ID of process 4 and Layer4_ID, determine that this leapfrog operation is jumped
The Layer3_ID crossed corresponding Step1_ID, Step2_ID.
If above-mentioned steps 105 include: to find the work step of skipped work step to be marked with the work step identification marking that removes photoresist,
Send operation warning；Alternatively, if the work step for finding skipped work step, which identifies corresponding board group identification, is marked with work of removing photoresist
Identification marking is walked, then sends operation warning.
In specific implementation, pass through the data table items in MES production executive system for being configured to work step information
In, it is arranged and the work step for storing each work step identifies and the incidence relation of the board group identification of corresponding board group.Also pass through
Data table items in MES production executive system for being configured to board group information, are arranged and store to be marked with and remove photoresist
The board group identification of work step identification marking marks the board group for the work step identification marking that removes photoresist for executing the work step that removes photoresist.This
Sample, step 104 determine the work step information of this skipped work step of leapfrog operation later, it can be achieved that being jumped according to this leapfrog operation
The work step mark for including in the work step information of work step is crossed, the work step for searching skipped work step, which identifies corresponding board group identification, is
No label has work step identification marking.If the work step for finding skipped work step identifies corresponding board group identification and is marked with
Remove photoresist work step identification marking, then sends operation warning.
In the data table items that can also be used to be configured work step information in MES production executive system, it is arranged and deposits
Storage is marked with the work step mark for the work step identification marking that removes photoresist, and such step 104 determines the work of this skipped work step of leapfrog operation
, it can be achieved that identifying according to the work step for including in the work step information of this skipped work step of leapfrog operation after step information, institute is searched
The work step for skipping work step identifies whether to be marked with the work step identification marking that removes photoresist, if finding the work step mark label of skipped work step
Remove photoresist work step identification marking, then sends operation warning.
Usually in MES, each process includes a large amount of work step, the corresponding board group of each work step.And for same
One board group, can execute multiple and different work steps, i.e. a work step identifies a corresponding board group identification, but one
Board group identification can correspond to multiple work step marks, if each work step mark will be marked the work step identification mark that removes photoresist
The setting of knowledge can then have large batch of work step information setting workload.Therefore, the machine for the work step identification marking that removes photoresist will be marked with
Basis of characterization of the platform group identification as the work step that removes photoresist removes photoresist with the work step mark for being marked with the work step identification marking that removes photoresist to be used as
The basis of characterization of work step is compared, and can mitigate the workload of a large amount of setting work to a certain extent, have better practicability.
After making staff receive operation warning, can trace which specific work step be remove photoresist work step or
Which board group executes the work step that removes photoresist, and above-mentioned steps 105 are sent after operation warning, further includes: show this leapfrog operation
The corresponding work step mark of the work step that removes photoresist for including in skipped work step, and/or, the corresponding board group identification of the work step that removes photoresist.
In this way, can remind and show according to the operation of transmission if identifying to include the work step that removes photoresist in the skipped work step of leapfrog operation
Remove photoresist the specifying information of work step, directly traces back to the corresponding board group of the work step that removes photoresist and does subsequent processing.What display identified
The problem of remove photoresist the specifying information of work step, can be avoided the specifying information that can not trace the work step that removes photoresist skipped, when avoiding long
Between check which work step in the work step skipped influences whole manufacturing schedule Wei work step is removed photoresist, can be by the influence to manufacturing schedule
It is preferably minimized, is conducive to improve production efficiency.
It may also include and send work step identification report of removing photoresist to specified mailbox, including this leapfrog in the work step that removes photoresist identification report
The corresponding work step mark of the work step that removes photoresist for including in the skipped work step of operation, and/or, the corresponding board group mark of the work step that removes photoresist
Know.Mail notification Production Engineer is sent out, is checked and is confirmed by Production Engineer, can be produced to avoid because of board caused by leapfrog operation
Error plays the role of not regarding to stock utilization and finished product yield is improved.If the post-job process of leapfrog is into acid tank
Pickling does not allow leapfrog then, and suspend production, through product when identifying in the skipped step of leapfrog operation comprising the work step that removes photoresist
Engineer inspection's confirmation could can thus avoid acid tank pollution problem, and then improve into acid tank pickling after executing step of removing photoresist
Production efficiency and yield.
Identify in the skipped work step of leapfrog operation to include sending operation warning after removing photoresist work step or showing the work step that removes photoresist
Relevant information, or to specified mailbox transmission remove photoresist work step identification report, it can be achieved that according to the operation of transmission prompting directly chase after
Trace back and do subsequent processing to the corresponding board group of the work step that removes photoresist, avoid for a long time check error reason, can will to produce into
The influence of degree is preferably minimized, and is conducive to improve production efficiency.
In above method process, identified according to the product batches of acquisition, extract to leapfrog work step corresponding process mark and
Work step mark, and obtain and be nested in the quasi- corresponding process mark of target work step jumped of leapfrog work step and work step mark, triggering
The work step identification device that removes photoresist in MES is according to corresponding with work step mark, target work step to the corresponding process mark of leapfrog work step
Process mark and work step mark, determine the work step information of this skipped work step of leapfrog operation, if the work step of skipped work step is believed
It include the work step identification marking that removes photoresist in breath, then sending operation warning and reminding does not allow leapfrog, it can be achieved that accurately differentiating that leapfrog is made
Whether comprising going photoresist step in the work step that industry is skipped, compared with artificial cognition, identify in the skipped work step of leapfrog operation
Whether the accuracy rate comprising step of removing photoresist is higher, can be conducive to improve to avoid because of board processing error caused by leapfrog operation
Product yield, and if identifying in the skipped work step of leapfrog operation includes the work step that removes photoresist, it can be reminded according to the operation of transmission
It directly traces back to the corresponding board group of the work step that removes photoresist and does subsequent processing, avoid checking error reason for a long time, it can will be right
The influence of manufacturing schedule is preferably minimized, and is conducive to improve production efficiency.
Below with reference to remove photoresist the concrete application of work step identification to carrying out leapfrog operation in the same process, to the above method
Process is described in detail.Following methods process by leapfrog operation remove photoresist work step identification device MultiSkip execute, Multi
Skip is nested in MES production executive system, and being identified in work step that this leapfrog operation is skipped for the data according to acquisition is
It is no to include the work step that removes photoresist.Before Multi Skip work, need to carry out in MES it is arranged below, referring specifically to step A1 and
A2。
Step A1, the board group for being provided with the work step identification marking that removes photoresist slightly identify；
Concrete operations are as follows: the data table items in MES production executive system for being configured to board group information are (such as
Edit Tool Group_Basic information) in setting execute the corresponding board group, board group of work step of removing photoresist
It identifies (Tool Capablity ID), that is to say, that establish board group identification and the work step identification marking (Glue that removes photoresist
Capablity_YES incidence relation) can add multiple execution in this list item and remove photoresist the board group identifications of work step.
Step A2, setting work step identify the corresponding relationship with board group identification；
Concrete operations are as follows: data table items (such as Edit in MES production executive system for being configured to work step information
Step the board group identification (Tool of work step mark (Step2_ID) and corresponding board group of each work step of setting in)
Capablity ID) incidence relation.
Whether comprising the work step that removes photoresist in the work step that Multi Skip is skipped by following steps identification leapfrog operation.Referring to
Fig. 2, specifically:
Step B1: it obtains and is identified to the product batches of leapfrog work step, and identified according to the product batches of acquisition, extract and show
Show the product batches information to leapfrog work step；
Specifically, process menu main interface of the staff in MES production executive system, selects multistep Jump Menu option
" Multi Skip " then inputs the product batches to the affiliated product batches of leapfrog work step at the interface " Multi Skip " of pop-up
Lot_ID is identified, the leapfrog operation work step identification device that removes photoresist is made to obtain Lot_ID to leapfrog work step.
Multi Skip extracts the Lot to leapfrog work step according to the Lot_ID of acquisition from MES data library
Information, and show the Lot Information to leapfrog work step, wherein Lot Information includes to leapfrog
The Lot_ID of work step, Operration/Step_ID, Layer_ID, Process_ID, Product_ID, Recipe_ID etc..
Step B2: it obtains to the quasi- corresponding process mark of target work step and work step mark jumped of leapfrog work step；
Specifically, showing the display interface input of Lot Information to the quasi- mesh jumped of leapfrog work step in step B2
The corresponding Step_ID of corresponding process mark New Layer_ID and the New Layer_ID of work step is marked, and clicks " OK " option, is made
Multi Skip is obtained to the quasi- target work step corresponding Layer_ID and Step_ID jumped of leapfrog work step；
Wherein, because the work step that removes photoresist that this method process is the leapfrog operation in the same process identifies, therefore, the New of input
Layer_ID waits for that the Layer_ID of leapfrog work step is identical with step B1.
Step B3: it is identified according to the corresponding process mark of leapfrog work step process corresponding with work step mark, target work step
It is identified with work step, determines the work step mark of this skipped work step of leapfrog operation；
Specifically, Step_ID and Layer_ID to leapfrog work step of the Multi Skip according to acquisition, target work step
Layer_ID and Step_ID, because the Layer_ID to leapfrog work step is identical with the Layer_ID of target work step, therefore, according to
The Step_ID of the leapfrog work step and Step_ID of target work step searches the corresponding work step list of the Layer_ID being locally stored,
It can determine that the work step mark of this skipped work step of leapfrog operation.Wherein, it is wrapped in the corresponding work step list of the Layer_ID
Include the corresponding Step_ID according to each work step for executing sequencing arrangement of the Layer_ID.
Step B4 determines that the work step of this skipped work step of leapfrog operation identifies according to step B3, searches skipped work step
Work step identify whether corresponding board group identification is marked with the work step identification marking that removes photoresist.
Specifically, the work step mark of work step has been stored in advance in database and has executed the board group of the board group of the work step
The incidence relation of mark is organized, the board group identification for being marked with the work step identification marking that removes photoresist has been stored in advance in database, is marked
The remove photoresist board group of work step identification marking removes photoresist work step for executing.
If the work step for finding skipped work step identifies corresponding board group identification and is marked with the work step identification marking that removes photoresist,
B5 to B7 is thened follow the steps, if each work step of skipped work step identifies the corresponding unmarked work step that removes photoresist of board group identification
Identification marking thens follow the steps B8.
Step B5: the operation warning of pause production is sent；Specifically, the operation warning sent is removed photoresist not allow to skip this
Work step and HOLD (pause production) product batches, can skip is not the work step of work step of removing photoresist, and rests on the work step that removes photoresist.
Step B6: to talk with the work step information of removing photoresist that box form shows that this leapfrog operation skipped；
The corresponding work step mark of the work step that removes photoresist for including in this skipped work step of leapfrog operation is shown to talk with box form
Board group identification corresponding with the work step that removes photoresist, such as show the work step number for the work step skipped, and display " board group
The board group for being identified as EFASOXXA, which executes, removes photoresist work step, and remove photoresist work step between the work step skipped, and does not allow leapfrog " net
Page dialog box.
B7: Xiang Zhiding mailbox of step sends identification report；
Including in this skipped work step of leapfrog operation into the work step identification report of removing photoresist that specified mailbox is sent includes
The corresponding work step of the work step that removes photoresist identifies board group identification corresponding with the work step that removes photoresist, it is of course possible to directly by the webpage of display
Addition is sent to Production Engineer in mail after dialog box screenshot, is confirmed by Production Engineer.
Step B8: directly execution leapfrog operation.
In above method process, identified according to the product batches of acquisition, extract to leapfrog work step corresponding process mark and
Work step mark, and obtain and be nested in the quasi- corresponding process mark of target work step jumped of leapfrog work step and work step mark, triggering
The work step identification device that removes photoresist in MES is according to corresponding with work step mark, target work step to the corresponding process mark of leapfrog work step
Process mark and work step mark, determine the work step information of this skipped work step of leapfrog operation, if the work step of skipped work step is believed
It include the work step identification marking that removes photoresist in breath, then sending operation warning and reminding does not allow leapfrog, it can be achieved that accurately differentiating that leapfrog is made
Whether comprising going photoresist step in the work step that industry is skipped, compared with artificial cognition, identify in the skipped work step of leapfrog operation
Whether the accuracy rate comprising step of removing photoresist is higher, can be conducive to improve to avoid because of board processing error caused by leapfrog operation
Product yield, and if identifying in the skipped work step of leapfrog operation includes the work step that removes photoresist, it can be reminded according to the operation of transmission
It directly traces back to the corresponding board group of the work step that removes photoresist and does subsequent processing, avoid checking error reason for a long time, it can will be right
The influence of manufacturing schedule is preferably minimized, and is conducive to improve production efficiency.
For above method process, the embodiment of the present invention also provides one kind and removes photoresist work step identification device, the tool of these devices
Hold in vivo and be referred to above method implementation, details are not described herein.
One kind as shown in Figure 3 is removed photoresist work step identification device, comprising:
First acquisition unit 301, for obtaining the product batches mark to leapfrog work step；
Extraction unit 302, for being identified according to the product batches of acquisition, product batches information of the extraction to leapfrog work step,
To be included at least in the product batches information of leapfrog work step to the corresponding process mark of leapfrog work step and work step mark；
Second acquisition unit 303, for obtaining to the quasi- corresponding process mark of target work step and work jumped of leapfrog work step
Step mark；
Determination unit 304, for according to corresponding with work step mark, target work step to the corresponding process mark of leapfrog work step
Process mark and work step mark, determine the work step information of this skipped work step of leapfrog operation；
Processing unit 305, if sending work for including the work step identification marking that removes photoresist in the work step information of skipped work step
Industry warning, if not including, executes this leapfrog.
It further, further include display unit；Display unit is used for:
After extraction unit 302 is extracted to the product batches information of leapfrog work step, the product batch to leapfrog work step is shown
Secondary information.
Further, each process identifies corresponding at least one work step mark；
Determination unit 304 is specifically used for:
If identical to the corresponding process mark of leapfrog work step process mark corresponding with target work step,
Corresponding work is identified according to the corresponding work step mark of leapfrog work step, the work step mark of target work step and process
List is walked, determines the work step information of this skipped work step of leapfrog operation；Alternatively,
If different to the corresponding process mark of leapfrog work step process mark corresponding from target work step,
It is identified according to the process of process mark and target work step to leapfrog work step and determines what this leapfrog operation was skipped
Process mark；
Corresponding work step list, this leapfrog are identified according to the work step mark to leapfrog work step and the process to leapfrog work step
The process that operation is skipped identifies corresponding work step list, and the work step mark of target work step is corresponding with the process of target work step mark
Work step list, determine the work step information of this skipped work step of leapfrog operation.
Further, the work step information of skipped work step is at least the corresponding work step mark of skipped work step；
Processing unit 305 is specifically used for:
If the work step for finding skipped work step is marked with the work step identification marking that removes photoresist, operation warning is sent；Or
Person,
If the work step for finding skipped work step identifies corresponding board group identification and is marked with the work step identification marking that removes photoresist,
Then send operation warning.
Further, display unit is also used to: after sending operation warning, being shown in this skipped work step of leapfrog operation
Including the work step that removes photoresist corresponding work step mark, and/or, the corresponding board group identification of the work step that removes photoresist；
Processing unit 305 is also used to send work step identification report of removing photoresist to specified mailbox, wraps in the work step that removes photoresist identification report
The corresponding work step mark of the work step that removes photoresist for including in this skipped work step of leapfrog operation is included, and/or, the work step that removes photoresist is corresponding
Board group identification.
It in above-described embodiment, is identified, is extracted to the corresponding process mark of leapfrog work step and work according to the product batches of acquisition
Step mark, and obtain and be nested in MES to the quasi- corresponding process mark of target work step jumped of leapfrog work step and work step mark, triggering
In remove photoresist work step identification device according to identified to leapfrog work step corresponding process mark and work step, the corresponding process of target work step
Mark and work step mark, determine the work step information of this skipped work step of leapfrog operation, if in the work step information of skipped work step
Including the work step identification marking that removes photoresist, then sending operation warning and reminding does not allow leapfrog, it can be achieved that accurately differentiating leapfrog operation institute
Whether comprising going photoresist step in the work step skipped, compared with artificial cognition, identify in the skipped work step of leapfrog operation whether
Accuracy rate comprising step of removing photoresist is higher, can be conducive to improve product to avoid because of board processing error caused by leapfrog operation
Yield, and if identifying to include the work step that removes photoresist in the skipped work step of leapfrog operation, it can be reminded according to the operation of transmission direct
It traces back to the corresponding board group of the work step that removes photoresist and does subsequent processing, avoid checking error reason for a long time, it can will be to production
The influence of progress is preferably minimized, and is conducive to improve production efficiency.
The present invention be referring to according to the method for the embodiment of the present invention, the process of equipment (system) and computer program product
Figure and/or block diagram describe.It should be understood that every one stream in flowchart and/or the block diagram can be realized by computer program instructions
The combination of process and/or box in journey and/or box and flowchart and/or the block diagram.It can provide these computer programs
Instruct the processor of general purpose computer, special purpose computer, Embedded Processor or other programmable data processing devices to produce
A raw machine, so that being generated by the instruction that computer or the processor of other programmable data processing devices execute for real
The device for the function of being specified in present one or more flows of the flowchart and/or one or more blocks of the block diagram.
These computer program instructions, which may also be stored in, is able to guide computer or other programmable data processing devices with spy
Determine in the computer-readable memory that mode works, so that it includes referring to that instruction stored in the computer readable memory, which generates,
Enable the manufacture of device, the command device realize in one box of one or more flows of the flowchart and/or block diagram or
The function of being specified in multiple boxes.
These computer program instructions also can be loaded onto a computer or other programmable data processing device, so that counting
Series of operation steps are executed on calculation machine or other programmable devices to generate computer implemented processing, thus in computer or
The instruction executed on other programmable devices is provided for realizing in one or more flows of the flowchart and/or block diagram one
The step of function of being specified in a box or multiple boxes.
Although preferred embodiments of the present invention have been described, it is created once a person skilled in the art knows basic
Property concept, then additional changes and modifications may be made to these embodiments.So it includes excellent that the following claims are intended to be interpreted as
It selects embodiment and falls into all change and modification of the scope of the invention.
Obviously, various changes and modifications can be made to the invention without departing from essence of the invention by those skilled in the art
Mind and range.In this way, if these modifications and changes of the present invention belongs to the range of the claims in the present invention and its equivalent technologies
Within, then the present invention is also intended to include these modifications and variations.
Claims (10)
- The work step recognition methods 1. one kind is removed photoresist characterized by comprisingIt obtains and is identified to the product batches of leapfrog work step；It is identified according to the product batches of acquisition, extracts the product batches information to leapfrog work step, it is described to leapfrog work It is included at least in the product batches information of step described to the corresponding process mark of leapfrog work step and work step mark；It obtains described to the quasi- corresponding process mark of target work step and work step mark jumped of leapfrog work step；According to described to the corresponding process mark of leapfrog work step process mark corresponding with work step mark, the target work step and work Step mark, determines the work step information of this skipped work step of leapfrog operation；If in the work step information of skipped work step including the work step identification marking that removes photoresist, operation warning is sent, if not including, is held This leapfrog of row.
- 2. the method as described in claim 1, which is characterized in that it is described to be identified according to the product batches of acquisition, extract institute After stating the product batches information to leapfrog work step, further includes:The display product batches information to leapfrog work step.
- 3. the method as described in claim 1, which is characterized in that each process identifies corresponding at least one work step mark；According to described to the corresponding process mark of leapfrog work step process mark corresponding with work step mark, the target work step and work Step mark, determines the work step information of this skipped work step of leapfrog operation, comprising:If described identical to the corresponding process mark of leapfrog work step process mark corresponding with the target work step, according to Corresponding work step column are identified to the corresponding work step mark of leapfrog work step, the work step mark of the target work step and the process Table determines the work step information of this skipped work step of leapfrog operation；Alternatively,If described different to the corresponding process mark of leapfrog work step process mark corresponding from the target work step, according to The process mark for determining that this leapfrog operation is skipped is identified to the process mark of leapfrog work step and the process of the target work step；Corresponding work step list is identified according to the work step mark to leapfrog work step and the process to leapfrog work step, this The process that leapfrog operation is skipped identifies corresponding work step list, work step mark and the target work step of the target work step Process identifies corresponding work step list, determines the work step information of this skipped work step of leapfrog operation.
- 4. the method as described in any one of claims 1 to 3, which is characterized in that the work step information of skipped work step is at least To be skipped the corresponding work step mark of work step；If in the work step information of skipped work step including the work step identification marking that removes photoresist, operation warning is sent, comprising:If the work step for finding skipped work step is marked with the work step identification marking that removes photoresist, operation warning is sent；Alternatively,If the work step for finding skipped work step identifies corresponding board group identification and is marked with the work step identification marking that removes photoresist, send out Operation is sent to alert.
- 5. method according to any one of claims 1 to 3, which is characterized in that after transmission operation warning, further includes:Show the corresponding work step mark of the work step that removes photoresist for including in this skipped work step of leapfrog operation, and/or, the work step that removes photoresist Corresponding board group identification；And work step identification report of removing photoresist is sent to specified mailbox, including this leapfrog operation in the work step identification report of removing photoresist The corresponding work step mark of the work step that removes photoresist for including in skipped work step, and/or, the corresponding board group identification of the work step that removes photoresist.
- The work step identification device 6. one kind is removed photoresist characterized by comprisingFirst acquisition unit, for obtaining the product batches mark to leapfrog work step；Extraction unit, for being identified according to the product batches of acquisition, the extraction product batches information to leapfrog work step, It is included at least in the product batches information to leapfrog work step described to the corresponding process mark of leapfrog work step and work step mark；Second acquisition unit, it is described to the quasi- corresponding process mark of target work step jumped of leapfrog work step and work step mark for obtaining Know；Determination unit, for according to described corresponding with work step mark, the target work step to the corresponding process mark of leapfrog work step Process mark and work step mark, determine the work step information of this skipped work step of leapfrog operation；Processing unit, if sending operation warning for including the work step identification marking that removes photoresist in the work step information of skipped work step, If not including, this leapfrog is executed.
- 7. device as claimed in claim 6, which is characterized in that further include display unit；The display unit is used for:After extraction unit extraction is described to the product batches information of leapfrog work step, the display production to leapfrog work step Product batch information.
- 8. device as claimed in claim 6, which is characterized in that each process identifies corresponding at least one work step mark；The determination unit is specifically used for:If described identical to the corresponding process mark of leapfrog work step process mark corresponding with the target work step,According to described to the corresponding work step mark of leapfrog work step, the work step mark of the target work step and process mark Corresponding work step list determines the work step information of this skipped work step of leapfrog operation；Alternatively,If described different to the corresponding process mark of leapfrog work step process mark corresponding from the target work step,It identifies to the process mark of leapfrog work step and the process of the target work step according to described and determines that this leapfrog operation is jumped The process mark crossed；Corresponding work step list is identified according to the work step mark to leapfrog work step and the process to leapfrog work step, this The process that leapfrog operation is skipped identifies corresponding work step list, work step mark and the target work step of the target work step Process identifies corresponding work step list, determines the work step information of this skipped work step of leapfrog operation.
- 9. the device as described in any one of claim 6 to 8, which is characterized in that the work step information of skipped work step is at least To be skipped the corresponding work step mark of work step；The processing unit is specifically used for:If the work step for finding skipped work step is marked with the work step identification marking that removes photoresist, operation warning is sent；Alternatively,If the work step for finding skipped work step identifies corresponding board group identification and is marked with the work step identification marking that removes photoresist, send out Operation is sent to alert.
- 10. device as described in claim 7, which is characterized in that the display unit is also used to: sending operation and alert it Afterwards, the corresponding work step mark of the work step that removes photoresist for including in this skipped work step of leapfrog operation is shown, and/or, the work step that removes photoresist Corresponding board group identification；The processing unit, is also used to send work step identification report of removing photoresist to specified mailbox, and the work step that removes photoresist identifies in report The corresponding work step mark of the work step that removes photoresist including including in this skipped work step of leapfrog operation, and/or, the work step that removes photoresist is corresponding Board group identification.
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Effective date of registration: 20220722 Address after: 518116 founder Microelectronics Industrial Park, No. 5, Baolong seventh Road, Baolong Industrial City, Longgang District, Shenzhen, Guangdong Province Patentee after: SHENZHEN FOUNDER MICROELECTRONICS Co.,Ltd. Address before: 100871, Beijing, Haidian District Cheng Fu Road 298, founder building, 5 floor Patentee before: PEKING UNIVERSITY FOUNDER GROUP Co.,Ltd. Patentee before: SHENZHEN FOUNDER MICROELECTRONICS Co.,Ltd. |