CN106546201A - Location detecting apparatus - Google Patents

Location detecting apparatus Download PDF

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Publication number
CN106546201A
CN106546201A CN201610819882.3A CN201610819882A CN106546201A CN 106546201 A CN106546201 A CN 106546201A CN 201610819882 A CN201610819882 A CN 201610819882A CN 106546201 A CN106546201 A CN 106546201A
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CN
China
Prior art keywords
detecting apparatus
location detecting
component
signal
kinematic
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201610819882.3A
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Chinese (zh)
Inventor
S.施密特
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Robert Bosch GmbH
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Robert Bosch GmbH
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Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of CN106546201A publication Critical patent/CN106546201A/en
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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/204Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
    • G01D5/2053Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable non-ferromagnetic conductive element
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24457Failure detection
    • G01D5/24461Failure detection by redundancy or plausibility
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24457Failure detection
    • G01D5/24466Comparison of the error value to a threshold
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/249Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using pulse code
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00Testing or calibrating of apparatus or devices covered by the preceding groups
    • G01P21/02Testing or calibrating of apparatus or devices covered by the preceding groups of speedometers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P7/00Measuring speed by integrating acceleration

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

The present invention relates to a kind of location detecting apparatus(100)And this location detecting apparatus(100)Application, the location detecting apparatus have position fix component(105), relative to its movable component(150)With kinematic parameter sensor, wherein, location detecting apparatus(100)It is designed to detect the signal of kinematic parameter sensor, and thus asks for movable component(150)Relative to the component that position is fixed(105)At least one first kinematic parameters, wherein, be provided with relative to movable component(150)The acceleration transducer that position is fixedly disposed(180), wherein, location detecting apparatus(100)It is designed to detect acceleration transducer(180)Signal, and thus ask at least one second kinematic parameters.

Description

Location detecting apparatus
Technical field
The present invention relates to the application of a kind of location detecting apparatus and this location detecting apparatus, location detecting apparatus tool There is component that position fixes and can the relative component which moves.
Background technology
Different location detecting apparatus, also referred to as position sensor, can be used for position detection.There is for example so-called increasing Amount formula location detecting apparatus, in the incremental position testing equipment, detect measurement scale using sensor unit, to ask Take relative or absolute position.This location detecting apparatus with measurement scale are for example by DE 10 2,008 018 Known to 355 A1.
Location detecting apparatus can for example be applied to different electromechanical axles or hydraulic axis for example in commercial Application, or Apply in the different systems with guide rail.
The content of the invention
A kind of location detecting apparatus with independent claims feature and its application are proposed according to the present invention.Favourable changes Enter the theme for being dependent claims and follow-up explanation.
Location detecting apparatus of the invention have component, relative its movable component and the motion ginseng that position is fixed Number sensor such as magnetic or optical displacement transducer.Location detecting apparatus are designed to detect kinematic parameter sensor Signal, and thus ask at least one first kinematic parameters of the component that movable component is fixed relative to position.It is additional Ground, is provided with the acceleration transducer being fixedly disposed relative to movable member position, wherein, location detecting apparatus are designed For detecting the signal of acceleration transducer, and thus ask at least the one of the component that movable component is fixed relative to position Individual second kinematic parameter.Kinematic parameter be particularly position, speed, acceleration and rock or these parameters change(That is position Change, velocity variations, acceleration change and rock change).Kinematic parameter sensor is preferably position sensor or speed is passed Sensor.
Utilize proposed location detecting apparatus pass through additional acceleration transducer to provide independently of utilization(Tradition 's)The information of other motions with regard to movable component that kinematic parameter sensor is asked for.For example can be by utilizing The time integral of the acceleration that acceleration transducer is obtained asks for speed(The change of speed), and the time again can be passed through Integration asks for the position as at least one second kinematic parameters(The change of position).Now, in this way can be in position Simulation of Dual-channel is produced in testing equipment, i.e., the information with regard to kinematic parameter is provided using two kinds of approach independent of each other.This can be very Multipair reliability is vital to realize higher reliability using in, and this is especially weighed in the application for having operator to participate in Will.Additionally, here only needs slightly to change hardware, however, for example making using additional movable component and also if necessary The component fixed with additional position needs to significantly increase hsrdware requirements and space requirement to provide during Simulation of Dual-channel, and this also draws Play considerably higher cost.Particularly acceleration transducer for example can be used as MEMS(MEMS)Obtain, the system(It is special It is not due to its little size and quality)Can be integrated into without any problems in existing location detecting apparatus.
Preferably, location detecting apparatus be designed to asked for by the signal of acceleration transducer at least one first Kinematic parameter and it is compared by least one second kinematic parameters that the signal of kinematic parameter sensor is asked for.Thus for example may be used To verify that this is favourable to being particularly positional information using the first kinematic parameter that motion sensor is obtained with traditional method In the trustworthiness for improving kinematic parameter.
In order to compare two kinematic parameters, it may be advantageous that using position, speed, acceleration and/or rock as kinematic parameter, Wherein, at least one first kinematic parameters and/or at least one second kinematic parameters are asked for using integration or differential.For example, Positional value can be asked for by the time integral twice of the acceleration to carrying out acceleration sensor, the positional value can be direct It is compared with the corresponding positional value of the kinematic parameter sensor for being configured to position sensor.In turn, it is also possible to para-position Putting carries out two subdifferentials, and is compared with acceleration.It is also contemplated that, to integrated acceleration once, and to position Differential once, or by the use of the kinematic parameter sensor direct measurement speed constructed as velocity sensor(Such as rotating speed), from And two velocity amplitudes can be compared to each other.It is also contemplated that two or more described schemes that compare are combined.Use this The method of kind, particularly simple can be verified.
Advantageously, the mistake that the location detecting apparatus are designed to by comparing be informed at least one signal And/or identify the failure of at least one signal or sensor.Here, can compare for example with the value for identifying a signal It is more than predetermined threshold value in the deviation of the value of another signal.In this way, reliability is further improved.For example can be in identification To mistake or signal failure in the case of cause machine shut down.
Advantageously, the reliable numerical value of kinematic parameter is asked for by two signals.Reliable numerical value can relatively mean, For example so-called SIL of the reliability class of the numerical value or safety grade are higher than the initial value being considered as the numerical value, institute Initial value is stated in the current numerical value for being kinematic parameter sensor and acceleration transducer.In other words, can be by existing in principle Two values with less SIL present in two separate channels, ask for the numerical value with larger SIL by combination.Example Such as a SIL-3- numerical value can be asked for by two SIL-2- numerical value.
Preferably, acceleration transducer is arranged on movable component or the inside.This can realize particularly compact and simple Single ground design attitude testing equipment, because for integrated acceleration transducer, compared with traditional location detecting apparatus, example Such as, without the need for installing other components in the application using machine or other systems.
Advantageously, the component that position is fixed has measurement scale, the measurement scale passive movement parameter sensors Sensor unit is scanned.This measurement scale can for example be being arranged side by side along measuring route, optical or magnetic Different labellings.In this regard, kinematic parameter sensor can valuably have magnetic or vicariouss or optical sensor Unit.Here, magnetic or vicariouss sensor unit can have coils that are for example multiple, being arranged side by side, these coils Suitably connect and be applied in signal so that produced output signal changing relative to the position of magnetic marker according to coil Become.For the description of details, here is for example, see in 10 2,008 018 355 A1 of already mentioned DE.
It is particularly preferred that the component that position is fixed has ferromagnetic measurement scale, and kinematic parameter sensing utensil There is the sensor unit of vicariouss.Specifically, here, position fix component and movable component be so structured that it is differential Transformator.For differential transformer or " linear variable difference transformer "(LVDT)For, such as three coils are on iron core Fang Yundong.When signal is produced on middle coil, the coil of two outsides is anti-phase connected in series.Here, in outside Signal caused by sensing in coil, produced is changed relative to position unshakable in one's determination according to coil.
In addition alternatively it is preferably, component, movable component and the kinematic parameter sensor that position is fixed is configured to Potentiometer.Movable component with kinematic parameter sensor then can for example be the moveable component in impedance, lead to Cross the component and ask for the impedance between the point and reference point that movable component touches impedance place.
The position detection that the whole embodiments being previously mentioned of location detecting apparatus are all may be used in different applications sets Standby, these location detecting apparatus can be by the application for being proposed of acceleration transducer very simply and inexpensively Simulation of Dual-channel Ground design.
Of the invention a kind of application of location detecting apparatus of the invention is, to machinery, electromechanical, hydraulic pressure Or electro-hydraulic axle executor position detection, or, to using the movable system of guide rail position examine Survey.Such as introductory song it has been mentioned that for many commercial Applications axle as already mentioned or guide rail, reliable position is examined Measurement equipment is necessary or at least desired, and this can pass through proposed location detecting apparatus to provide.
The other advantages of the present invention and design are drawn by specification and drawings.
Self-evident, feature that is foregoing and being next still to illustrate may be applied not only in the combination for providing respectively In, and can be applicable in other combinations, or can be used alone, without departing from scope of the invention.
The present invention is schematically described by the embodiment in accompanying drawing, and is described in detail referring next to accompanying drawing.
Description of the drawings
Fig. 1 schematically shows location detecting apparatus of the invention in one preferred embodiment.
Fig. 2 is in an other preferred implementation and one preferably schematically shows position of the invention using in Put testing equipment.
Fig. 3 is schematically shown in one preferred embodiment is used for position in location detecting apparatus of the invention Put the process of determination.
Specific embodiment
Location detecting apparatus of the invention 100 in being schematically illustrated in one in FIG preferred embodiment. The location detecting apparatus 100 have the component 105 and movable component 150 of position fixation.
The component 105 that position is fixed can for example be track, and movable component 150 movingly or movably sets Put on that track.It is noted here that in the figure, the component that movable component is fixed with position for the sake of only understanding Dividually illustrate.
The component 105 that position is fixed has measurement scale 110.The measurement scale can for example be particularly by ferromagnetic The bonding jumper that metal is made, opens up out vacancy 115 on the bonding jumper.
Movable component for example has the kinematic parameter sensor 160 for being configured to inductosyn, and the motion is joined Number sensor for example has two coils, 161, two coils 162 and two coils 165 as sensor unit, for a mesh So, only reference has been marked in these coils respectively.Can be produced using coil 161 and 162 opposite each other And vibration magnetic field, these magnetic fields cause signal in coil 165 affiliated respectively.If there is no other impacts, by two The effect in the magnetic field that individual coil 161,162 causes is offset just.
But if inductosyn 160 is above measurement scale 110, then the magnetic field for being produced by coil 161,162 Will differently be affected by vacancy 115, be produced with measurement scale 110 in phase in coil 165 in this way The signal for being definitely designed with pass at off position x.
Therefore, the sensor 160 in movable component 150 and then vicariouss enters relative to the component 105 that position is fixed And when moving relative to measurement scale, it is being produced by the sensor 160 of vicariouss on the whole, by the signal of two coils 165 The signal of composition also changes.In this way, the change of position x can be asked for, as movable component 150 relative to The kinematic parameter of the motion of component 105 that position is fixed.
Depending on type, the particularly moulding of vacancy and its layout depending on measurement scale, changing for position can not only be asked for Become(Equivalent to speed), and relative and/or absolute position x can be asked for.If necessary, it is also possible to be provided with and vacancy is adopted With another inductosyn of another measurement scale and correlation of other layout type, for asking for absolute position.Should Another measurement scale can for example be arranged on the opposite side of the component of position fixation.
Additionally, in movable component 150, being provided with acceleration transducer 180, particularly MEMS- acceleration transducers. Here, acceleration transducer 180 can be connected on processor for example with appropriate mode, on the one hand the processor can be examined Survey and process acceleration transducer signal, on the other hand can by the signal if necessary after processing with coil 165 Signal be compared.For the detailed description of the process compared for two signals, here is with reference to Fig. 3 and related description.
Electric-liquid last item 200 is schematically shown in fig. 2.Motor 220 is connected to hydraulic pump 230, and the hydraulic pump leads to again Cross hydraulic circuit to be connected with hydraulic load 210, the hydraulic load has orientable part 215.The hydraulic load for example can be with It is hydraulic cylinder, part 215 is correspondingly movable piston.Additionally, being provided with such as drive control device or security control instrument shape The control device 205 of formula, can control motor 220 by the control device.
Additionally, location detecting apparatus of the invention 240 are illustrated in another preferred implementation.Here, the position Put the component 245 that testing equipment 240 is fixed with the position that movable component 280 and here are for example configured to potentiometer.
It means that the component that position is fixed has the impedance compoment of electricity, the impedance compoment is along orientable part 215 The direction of motion extend.Here is arranged on 250 here of movable component of the outer end of orientable part 215 and is able to detect that Electricity between the upper end in the figure of the component 245 that position is fixed and point corresponding with the position x of orientable part 215 Impedance, here, the point is illustrated using the arrow of the component 245 fixed towards position from movable component 250.
Here, the impedance of electricity detected or measurement characterizes the position x of orientable part 215.Here, to the electricity The detection of impedance can for example utilize simple electric current and voltage measurement to realize with known method.
Additionally, acceleration transducer 280, particularly acceleration transducer are provided with movable component 250.Here, The acceleration transducer 280 for example can be connected to processor with appropriate method, and on the one hand the processor can detect and locate Reason acceleration transducer signal, on the other hand can by the signal if necessary after treatment with corresponding to by the resistance for measuring The signal of the anti-position asked for is compared.For the detailed description of the process compared for two signals, here with reference to Fig. 3 and Related description.
In addition it can be stated that by the signal transmission with regard to position x to control device 205, resistance of the signal by the electricity for measuring It is anti-to obtain, and/or obtained by the comparison with the signal of acceleration transducer 280.In can be in control device 205 utilize For example it is used for controlling position x with regard to the signal of position x.
Diagrammatically illustrating in figure 3 is used for position in a preferred embodiment for location detecting apparatus of the invention Put the process of determination.In step 300, the position of the component fixed relative to position with regard to movable component is detected first Signal, and the position is thus asked for as the first kinematic parameter.
The signal of acceleration transducer is detected in the step 310.Next in step 315 acceleration transducer is somebody's turn to do Signal carries out such as time integral twice.In this way, can be asked for by accekeration or be calculated as the second motion The positional value of parameter.
Available now with two values with regard to position, these values are obtained with incoherent method each other.In step 320 In, the two values can for example be mutually authenticated or be compared to each other.This for example can be used as diagnostic function in the detection of position In discovery mistake.
Then in step 320, subsequent treatment can be provided for regard to the signal through checking of position.With this The signal ratio with regard to position that method is produced has higher reliability level only by the signal that traditional position detection is asked for.
Self-evident, the comparison of two signals can also be realized by other methods, and such as introductory song is it has been mentioned that i.e. example Such as by carrying out time diffusion twice to the signal with regard to position.
In addition need to refer to, the process and its application for diverse location testing equipment described here can be identical 's.Particularly, the process not only can be applied to the embodiment that illustrates in fig. 1 and 2, and mention suitable for introductory song Other embodiment.

Claims (12)

1. a kind of location detecting apparatus(100、240), with the component that position is fixed(105、245), it is movable relative to which Component(150、250)With kinematic parameter sensor(160),
Wherein, location detecting apparatus(100、240)It is designed to detect the signal of kinematic parameter sensor, and thus ask for can The component of motion(150、250)Relative to the component that position is fixed(105、245)At least one first kinematic parameters(x),
It is characterized in that the acceleration transducer being fixedly disposed relative to movable component (150,250) position(180、 280), wherein, location detecting apparatus(100、240)It is designed to detect acceleration transducer(180、280)Signal, and by This asks at least one second kinematic parameters.
2. according to the location detecting apparatus of claim 1(100、240), wherein, the location detecting apparatus(100、240)Set Count for by acceleration transducer(180、280)At least one second kinematic parameters asked for of signal and passed by kinematic parameter Sensor(160)At least one first kinematic parameters asked for of signal(x)It is compared.
3. according to the location detecting apparatus of claim 2(100、240), wherein, respectively by position, speed, acceleration, rock And/or the change of these parameters is turned at least one first kinematic parameters and at least one second kinematic parameters are compared, its In, at least one first kinematic parameters and/or at least one second motion ginsengs are asked for by the integration or differential to signal Number.
4. according to the location detecting apparatus of Claims 2 or 3(100、240), its be designed to by comparing be informed in Failure that is wrong and/or identifying at least one signal or sensor in a few signal.
5. according to the location detecting apparatus of any one of claim 2 to 4(100、240), wherein, motion is asked for by two signals The more reliable value of parameter.
6. according to the location detecting apparatus of any one of aforementioned claim(100、240), wherein, acceleration transducer(180、 280)It is arranged on movable component(150、250)Upper or the inside, and/or it is configured to MEMS- acceleration transducers.
7. according to the location detecting apparatus of any one of aforementioned claim(100、240), wherein, the component that position is fixed (105)With measurement scale(110), the measurement scale passive movement parameter sensors(160)Sensor unit scanning.
8. according to the location detecting apparatus of claim 7(100、240), wherein, kinematic parameter sensor(160)With magnetic, Vicariouss and/or optical sensor unit.
9. according to the location detecting apparatus of any one of aforementioned claim(100、240), wherein, the component that position is fixed has Ferromagnetic measurement scale.
10. according to the location detecting apparatus of claim 9(100、240), wherein, the component of position fixation, movable component Differential transformer is configured to kinematic parameter sensor.
11. according to any one of claim 1 to 9 location detecting apparatus(100、240), wherein, the component that position is fixed (245), movable component(250)Potentiometer is configured to kinematic parameter sensor.
12. according to any one of aforementioned claim location detecting apparatus(240)Application, for machinery, electromechanical, liquid Pressure or electro-hydraulic axle(200)Executor(210)Position detection, or for by the movable of guide rail System position detection.
CN201610819882.3A 2015-09-18 2016-09-13 Location detecting apparatus Pending CN106546201A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102015217907.9A DE102015217907A1 (en) 2015-09-18 2015-09-18 Position sensing device
DE102015217907.9 2015-09-18

Publications (1)

Publication Number Publication Date
CN106546201A true CN106546201A (en) 2017-03-29

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DE (1) DE102015217907A1 (en)
IT (1) IT201600092505A1 (en)

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CN112729181A (en) * 2020-12-25 2021-04-30 上海广川科技有限公司 Device and method for carrying out wafer positioning detection
CN113039716A (en) * 2018-09-25 2021-06-25 罗伯特·博世有限公司 Method for operating an electric drive unit, preferably for adjusting a component in a motor vehicle, and drive unit for carrying out the method
DE102022120830A1 (en) 2022-08-18 2024-02-29 Turck Holding Gmbh Sensor unit for detecting a distance and method for operating a sensor unit

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DE102022211049A1 (en) * 2022-10-19 2024-04-25 Robert Bosch Gesellschaft mit beschränkter Haftung Sensor system for determining at least one rotational property of an element rotating about at least one rotation axis

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