CN106526940A - 液晶显示面板的制造方法 - Google Patents
液晶显示面板的制造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 238000000034 method Methods 0.000 title claims description 25
- 239000000758 substrate Substances 0.000 claims abstract description 69
- 239000000463 material Substances 0.000 claims description 20
- 230000015572 biosynthetic process Effects 0.000 claims description 7
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
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- G—PHYSICS
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
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- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G02F1/1333—Constructional arrangements; Manufacturing methods
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- G02F1/133512—Light shielding layers, e.g. black matrix
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- G—PHYSICS
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
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Abstract
本发明是有关于一种液晶显示面板的制造方法,包括:提供一第一基板;提供一第二基板,其具有一显示区及一边框区,所述边框区位于所述第二基板边缘且环绕所述显示区;形成一滤色器层于所述第二基板的所述显示区上,所述滤色器层具有一第一厚度;形成一平坦层于所述第二基板的所述边框区上,且环绕于所述滤色器层;其中,所述平坦层具有一第二厚度,所述第二厚度与所述第一厚度具有相同厚度,使所述平坦层与所述滤色器层平齐,所述平坦层与所述滤色器层连接形成同一平面,以避免成盒时液晶扩散不良所造成的边缘真空泡问题。
Description
技术领域
本发明涉及一种液晶显示面板的制造方法,特别是涉及一种晶体管上滤色器型(Color Filter On TFT,COT)液晶显示面板的制造方法。
背景技术
近来,使用形成在第一基板处的薄膜晶体管(Thin Film Transistor,TFT)和滤色器的晶体管上滤色器(Color Filter On TFT,COT)型液晶显示器,由于使第一基板和第二基板的配向边距(Alignment Margin)最小化进而增加孔径比的优点而被使用。
目前COT技术的屏幕工艺,其显示区与边缘区容易因为地形上的差异造成断差,使得液晶扩散不良,导致成盒过程中出现边缘处产生真空泡的问题。因此克服边缘真空泡是COT工艺一直努力的课题。
发明内容
为了解决上述技术问题,本发明的目的在于,提供一种液晶显示面板的制造方法,其包括:
提供一第一基板;
提供一第二基板,其具有一显示区及一边框区,所述边框区位于所述第二基板边缘且环绕所述显示区;
形成一滤色器层于所述第二基板的所述显示区上,所述滤色器层具有一第一厚度;
形成一平坦层于所述第二基板的所述边框区上,且环绕于所述滤色器层,其中至少部分所述平坦层的材料是相同于所述滤色器层的至少部分材料;以及
形成液晶层于所述第一基板及所述第二基板之间;
其中,所述平坦层具有一第二厚度,所述第二厚度与所述第一厚度具有相同厚度,使所述平坦层与所述滤色器层平齐,所述平坦层与所述滤色器层连接形成同一平面。
在一些实施例中,所述平坦层包括一红色滤色器层、一绿色滤色器层及一蓝色滤色器层。
在一些实施例中,所述平坦层为一红色滤色器层、一绿色滤色器层或一蓝色滤色器层。
在一些实施例中,所述平坦层为一白色滤色器层。
在一些实施例中,所述平坦层为高分子材料层。
在一些实施例中,当形成所述平坦层时,形成次支撑柱于所述平坦层上。
本发明还提供一种液晶显示面板的制造方法,其包括:
提供一第一基板,所述第一基板设有支撑柱;
提供一第二基板,其具有一显示区及一边框区,所述边框区位于所述第二基板边缘且环绕所述显示区;
形成一滤色器层于所述第二基板的所述显示区上,所述滤色器层具有一第一厚度;
形成一平坦层于所述第二基板的所述边框区上,且环绕于所述滤色器层,其中至少部分所述平坦层的材料是相同于所述滤色器层的至少部分材料;以及
形成液晶层于所述第一基板及所述第二基板之间;
其中,所述平坦层具有一第二厚度,所述第二厚度与所述第一厚度具有相同厚度,使所述平坦层与所述滤色器层平齐,所述平坦层与所述滤色器层连接形成同一平面;
其中,当形成所述平坦层时,形成次支撑柱于所述平坦层上,其中所述次支撑柱的长度是小于所述支撑柱的长度。
本发明的有益效果在于通过滤色器层的制程,使所述平坦层与所述滤色器层平齐,所述平坦层与所述滤色器层连接形成同一平面,因此解决显示区与边缘区之间大段差导致成盒时液晶扩散不良所造成的边缘真空泡问题,且同时可所缩减边框区的电路区使用面积,达到基板更小的目的。
进一步地,本发明的有益效果在于通过滤色器层与所述平坦层接使用相同材料,因此可有效降地成本,提高成盒后良率。
附图说明
图1a是本发明已知工艺的COT技术的屏幕工艺示意图。
图1b是本发明已知工艺的COT技术的屏幕工艺真空泡产生处示意图。
图2a是本发明一实施例的液晶显示面板的平坦层示意图。
图2b是本发明一实施例的液晶显示面板的边缘区及显示区示意图。
图2c是本发明一实施例的液晶显示面板的闸极电路示意图。
图2d是本发明一实施例的液晶显示面板的平坦层覆盖闸极电路示意图。
图3a是本发明一实施例的液晶显示面板的平坦层为三色滤色器层示意图。
图3b是本发明一实施例的液晶显示面板的平坦层为单一滤色器层示意图。
图3c是本发明一实施例的液晶显示面板的平坦层为白色滤色器层示意图。
图4是本发明一实施例的液晶显示面板的平坦层及滤色器层示意图。
具体实施方式
以下各实施例的说明是参考附加的图式,用以例示本发明可用以实施的特定实施例。本发明所提到的方向用语,例如「上」、「下」、「前」、「后」、「左」、「右」、「内」、「外」、「侧面」等,仅是参考附加图式的方向。因此,使用的方向用语是用以说明及理解本发明,而非用以限制本发明。
附图和说明被认为在本质上是示出性的,而不是限制性的。在图中,结构相似的单元是以相同标号表示。另外,为了理解和便于描述,附图中示出的每个组件的尺寸和厚度是任意示出的,但是本发明不限于此。
在附图中,为了清晰起见,夸大了层、膜、面板、区域等的厚度。在附图中,为了理解和便于描述,夸大了一些层和区域的厚度。将理解的是,当例如层、膜、区域或基底的组件被称作“在”另一组件“上”时,所述组件可以直接在所述另一组件上,或者也可以存在中间组件。
另外,在说明书中,除非明确地描述为相反的,否则词语“包括”将被理解为意指包括所述组件,但是不排除任何其它组件。此外,在说明书中,“在......上”意指位于目标组件上方或者下方,而不意指必须位于基于重力方向的顶部上。
为更进一步阐述本发明为达成预定发明目的所采取的技术手段及功效,以下结合附图及较佳实施例,对依据本发明提出的一种COT型液晶显示器及其边框设计其具体实施方式、结构、特征及其功效,详细说明如后。
请参阅图1a和图1b,图1a是本发明范例性的COT技术的屏幕工艺示意图,图1b是本发明范例性的COT技术的屏幕工艺真空泡产生处示意图,COT技术的屏幕工艺,其显示区与边缘区容易因为地形上的差异造成断差D,使得液晶扩散不良,导致成盒过程中出现边缘处产生真空泡100的问题。请参阅图2a~2b,图2a是本发明一实施例的液晶显示面板的平坦层示意图,图2b是本发明一实施例的液晶显示面板的边缘区及显示区示意图。本发明液晶显示面板,包括:一第一基板,一第二基板10,具有一显示区11及一边框区12,所述边框区12位于所述第二基板10边缘且环绕所述显示区11;一滤色器层20,位于所述第二基板10的所述显示区11上,所述滤色器层20具有一第一厚度D1;一平坦层30,位于所述第二基板10的所述边框区12上,且环绕于所述滤色器层20,其特征在于,所述平坦层30具有一第二厚度D2,所述第二厚度D2与所述第一厚度D1具有相同厚度使所述平坦层30与所述滤色器层20平齐,所述平坦层30与所述滤色器层20连接形成有一同一平面,进一步地,一支撑柱40位于所述滤色器层20上,以及一第一基板50位于支撑柱40上,支撑柱40用以支撑第一基板50。
更进一步地,位于所述第一基板50与所述支撑柱40之间更包括黑色矩阵60。
请进一步参阅图2c~2d,图2c是本发明一实施例的液晶显示面板的闸极电路示意图。图2d是本发明一实施例的液晶显示面板的平坦层覆盖闸极电路示意图。在本发明的一实施例中,边缘区的闸极介电层31使用额外的光掩模版定义通孔以作为电路信号上面的桥接作用,因此平坦层30可直接覆盖闸极介电层31,且在平坦层30上不需不进行任何通孔设计。
接着,请参阅图3a,图3a是本发明一实施例的液晶显示面板的平坦层为三色滤色器层示意图。在本发明的一实施例中,所述平坦层30包括一红色滤色器层、一绿色滤色器层及一蓝色滤色器层,也就是三色的滤色器层同时存在。
另外,请参阅图3b,图3b是本发明一实施例的液晶显示面板的平坦层为单一滤色器层示意图。在本发明的一实施例中,所述平坦层30为一红色滤色器层、一绿色滤色器层或一蓝色滤色器层,也就是仅单色的滤色器层。
进一步参阅图3c,图3c是本发明一实施例的液晶显示面板的平坦层为白色滤色器层示意图,在本发明的一实施例中,所述平坦30层为一白色滤色器层。
在本发明的一实施例中,所述平坦层30为高分子材料层。
本发明的有益效果在于通过平坦层具有一第二厚度,所述第二厚度与所述第一厚度具有相同厚度,使所述平坦层与所述滤色器层平齐,所述平坦层与所述滤色器层连接形成同一平面,因此解决显示区与边缘区之间大段差导致成盒时液晶扩散不良所造成的边缘真空泡问题,且可有效缩减电路设计端的使用面积以及提高成盒后良率,达到基板更小的目的。
进一步地,本发明的有益效果在于通过滤色器层与所述平坦层接使用相同材料,因此可有效降地成本,提高成盒后良率。
进一步地,本发明更包括一种液晶显示装置包括:第一基板50;一第二基板10,及一液晶层,位于所述第一基板50及第二基板10之间,请再参阅图2a~图2b,图2a是本发明一实施例的液晶显示面板的平坦层示意图,图2b是本发明一实施例的液晶显示面板的边缘区及显示区示意图。其中,所述第二基板具有滤色器层20、平坦层30、一显示区11及一边框区12,所述边框区12位于所述第二基板10边缘且环绕所述显示区11;一滤色器层20,是位于所述第二基板10的所述显示区11上,所述滤色器层20具有一第一厚度D1;一平坦层30,是位于所述第二基板10的所述边框区12上,且环绕于所述滤色器层20,其特征在于,所述平坦层30具有一第二厚度D2,所述第二厚度D2与所述第一厚度D1具有相同厚度使所述平坦层30与所述滤色器层20平齐,所述平坦层30与所述滤色器层20连接形成有一同一平面,进一步地,一支撑柱40位于所述滤色器层20上,以及一第一基板50位于支撑柱40上,支撑柱40用以支撑第一基板50,更进一步地,位于所述第一基板50与所述支撑柱40之间更包括黑色矩阵60。
请再进一步参阅图2c和图2d,图2c是本发明一实施例的液晶显示面板的闸极电路示意图。图2d是本发明一实施例的液晶显示面板的平坦层覆盖闸极电路示意图。在本发明的一实施例中,边缘区的闸极介电层31使用额外的光掩模版定义通孔以作为电路信号上面的桥接作用,因此平坦层30可直接覆盖闸极介电层31,且在平坦层30上不需不进行任何通孔设计。
接着,请再参阅图3a,图3a是本发明一实施例的液晶显示面板的平坦层为三色滤色器层示意图。在本发明的一实施例中,所述平坦层30包括一红色滤色器层、一绿色滤色器层及一蓝色滤色器层,也就是三色的滤色器层同时存在。
另外,请再参阅图3b,图3b是本发明一实施例的液晶显示面板的平坦层为单一滤色器层示意图。在本发明的一实施例中,所述平坦层30为一红色滤色器层、一绿色滤色器层或一蓝色滤色器层,也就是仅单色的滤色器层。
请再进一步参阅图3c,图3c是本发明一实施例的液晶显示面板的平坦层为白色滤色器层示意图,在本发明的一实施例中,所述平坦30层为一白色滤色器层。
本发明的液晶显示面板的制造方法,其包括:
提供一第一基板50;
提供一第二基板10,其具有一显示区11及一边框区12,所述边框区位于所述第二基板边缘且环绕所述显示区;
形成一滤色器层20于所述第二基板10的所述显示区上,所述滤色器层具有一第一厚度;
形成一平坦层30于所述第二基板20的所述边框区12上,且环绕于所述滤色器层20,其中至少部分所述平坦层30的材料是相同于所述滤色器层20的至少部分材料;以及
形成液晶层(未显示)于所述第一基板50及所述第二基板10之间;
其中,所述平坦层30具有一第二厚度,所述第二厚度与所述第一厚度具有相同厚度,使所述平坦层与所述滤色器层20平齐,所述平坦层与所述滤色器层连接形成同一平面。
具体地,当形成滤色器层20的特定颜色滤色器时,可利用此特定颜色滤色器的材料来同时形成平坦层30。因此,至少部分所述平坦层30的材料可相同于所述滤色器层20的至少部分材料。
在本发明实施例中,滤色器层20是形成于第二基板10的主动开关(如TFT)数组(未标示)上。
请再进一步参阅图4,图4是本发明一实施例的液晶显示面板的平坦层及滤色器层示意图,在本发明的一实施例中,当形成所述平坦层30时,可同时形成次支撑柱301于所述平坦层上,其中所述次支撑柱301的长度是小于所述支撑柱40的长度。次支撑柱301可一体成型于平坦层30上,亦即次支撑柱301与平坦层30具有相同的材料,且次支撑柱301与平坦层30可在同一光罩制程中同时形成。
本发明的有益效果是本发明在于通过平坦层具有一第二厚度,所述第二厚度与所述第一厚度具有相同厚度,使所述平坦层与所述滤色器层平齐,所述平坦层与所述滤色器层连接形成同一平面,因此解决显示区与边缘区之间大段差导致成盒时液晶扩散不良所造成的边缘真空泡问题,且可有效缩减电路设计端的使用面积以及提高成盒后良率,达到基板更小的目的。
进一步地,本发明的有益效果是本发明在于通过滤色器层与所述平坦层接使用相同材料,因此可有效降地成本,提高成盒后良率。
“在一些实施例中”及“在各种实施例中”等用语被重复地使用。所述用语通常不是指相同的实施例;但它亦可以是指相同的实施例。“包含”、“具有”及“包括”等用词是同义词,除非其前后文意显示出其它意思。
以上所述,仅是本发明的较佳实施例而已,并非对本发明作任何形式上的限制,虽然本发明已以较佳实施例揭露如上,然而并非用以限定本发明,任何熟悉本专业的技术人员,在不脱离本发明技术方案范围内,当可利用上述揭示的技术内容作出些许更动或修饰为等同变化的等效实施例,但凡是未脱离本发明技术方案的内容,依据本发明的技术实质对以上实施例所作的任何简单修改、等同变化与修饰,均仍属于本发明技术方案的范围内。
Claims (7)
1.一种液晶显示面板的制造方法,其特征在于,包括:
提供一第一基板;
提供一第二基板,其具有一显示区及一边框区,所述边框区位于所述第二基板边缘且环绕所述显示区;
形成一滤色器层于所述第二基板的所述显示区上,所述滤色器层具有一第一厚度;
形成一平坦层于所述第二基板的所述边框区上,且环绕于所述滤色器层,其中至少部分所述平坦层的材料是相同于所述滤色器层的至少部分材料;以及
形成液晶层于所述第一基板及所述第二基板之间;
其中,所述平坦层具有一第二厚度,所述第二厚度与所述第一厚度具有相同厚度,使所述平坦层与所述滤色器层平齐,所述平坦层与所述滤色器层连接形成同一平面。
2.如权利要求1所述的液晶显示面板的制造方法,其特征在于,所述平坦层包括一红色滤色器层、一绿色滤色器层及一蓝色滤色器层。
3.如权利要求1所述的液晶显示面板的制造方法,其特征在于,所述平坦层为一红色滤色器层、一绿色滤色器层或一蓝色滤色器层。
4.如权利要求1所述的液晶显示面板的制造方法,其特征在于,所述平坦层为一白色滤色器层。
5.如权利要求1所述的液晶显示面板的制造方法,其特征在于,所述平坦层为高分子材料层。
6.如权利要求1所述的液晶显示面板的制造方法,其特征在于,当形成所述平坦层时,形成次支撑柱于所述平坦层上。
7.一种液晶显示面板的制造方法,其特征在于,包括:
提供一第一基板,所述第一基板设有支撑柱;
提供一第二基板,其具有一显示区及一边框区,所述边框区位于所述第二基板边缘且环绕所述显示区;
形成一滤色器层于所述第二基板的所述显示区上,所述滤色器层具有一第一厚度;
形成一平坦层于所述第二基板的所述边框区上,且环绕于所述滤色器层,其中至少部分所述平坦层的材料是相同于所述滤色器层的至少部分材料;以及
形成液晶层于所述第一基板及所述第二基板之间;
其中,所述平坦层具有一第二厚度,所述第二厚度与所述第一厚度具有相同厚度,使所述平坦层与所述滤色器层平齐,所述平坦层与所述滤色器层连接形成同一平面;
其中,当形成所述平坦层时,形成次支撑柱于所述平坦层上,其中所述次支撑柱的长度是小于所述支撑柱的长度。
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