CN106525910A - Self-energized humidity sensor and preparation method thereof - Google Patents
Self-energized humidity sensor and preparation method thereof Download PDFInfo
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- CN106525910A CN106525910A CN201611075380.0A CN201611075380A CN106525910A CN 106525910 A CN106525910 A CN 106525910A CN 201611075380 A CN201611075380 A CN 201611075380A CN 106525910 A CN106525910 A CN 106525910A
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/048—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance for determining moisture content of the material
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Abstract
The invention discloses a self-energized humidity sensor and a preparation method thereof. The self-energized humidity sensor comprises a sensing unit, an energy storage unit and a passive power supply unit, wherein the sensing unit comprises a humidity-sensitive element and a detection circuit; the energy storage unit comprises a rectifying circuit and an energy storage element; a friction power generation device formed by a first friction component and a second friction component is used as the passive power supply unit. According to the self-energized humidity sensor disclosed by the invention, an external power supply system is not needed, and compared with a self-energized gas sensor based on a piezoelectric effect, the self-energized humidity sensor has larger output signals; the self-energized humidity sensor is simple in structural design, and is capable of integrating an energy collection and conversion function and a humidity detection function; with the design of an elastic supporting structure, output voltage of a power supply unit can be adjusted; through detachable connection, the maintenance is convenient, and the cost is reduced; in addition, the preparation method of the self-energized humidity sensor is simple, the cost is low, and industrial production and large-scale application can be realized.
Description
Technical field
Present invention relates particularly to a kind of self energizing humidity sensor based on friction nanometer power generator and preparation method thereof.
Background technology
Humidity sensor is widely used in the aspects such as military affairs, meteorology, agricultural, industry, medical treatment, building and household electrical appliance,
Detection and analysis to humidity is an important step of scientific research, production process and environment measuring.Traditional humidity sensor
Device often relies on external power source and provides energy, and this characteristic strongly limit the range of application of humidity sensor, on the one hand,
For being arranged at the humidity sensor of remote districts or outside work, realize that the outside of long time stability directly powers ratio
It is more difficult, therefore, enable humidity sensor to realize that set function is with a wide range of applications by passive techniques；It is another
Aspect, with development in science and technology, more and more miniature functions and MEMS are applied in daily life, but
The miniaturization of device limits the volume of its power supply unit, and for conventional batteries, little volume means that reserve of electricity is little, and one
Denier electricity exhausts, and device just loses feature, and this just significantly limit the service life of device, therefore, humidity sensor
While miniature needs are met, the endurance of its power supply unit is particularly important in actual applications.
In sum, how to realize humidity sensor without additional power source just can independent operating, and collect in environment
Energy is converted to electric energy as supplement, extends its service life so as to reach on the basis of set function is completed, and reduces the energy
Loss, becomes technical problem to be solved in research.
Self energizing technology is a kind of without the need for additional power source, and in collecting surrounding environment, other forms energy is (such as solar energy, wind
Energy, mechanical energy, heat energy etc.) and electric energy is converted thereof into, safe and stable, efficient electric energy supply technology is provided for electronic equipment.
Self energizing technology becomes a kind of ideal side for solving the long-term autonomous power supply of humidity sensor with its exclusive self-sustaining feature
Case.For this purpose, needing a kind of self energizing humidity sensor that can integrate collection of energy translation function and detection humidity function badly.
The content of the invention
It is based on mentioned above, of the invention for a kind of self energizing humidity sensor of offer and its preparation side of solving the above problems
Method, self energizing humidity sensor of the present invention, can be according to the outputs of nano friction generator through theory analysis and experimental verification
Voltage impedance response obtains the working relative humidity of humidity sensor, so as to realize collection of energy translation function and detection humidity function in
Integrally.
For achieving the above object, the present invention is achieved through the following technical solutions：
One aspect of the present invention discloses a kind of self energizing humidity sensor, including sensing unit, energy-storage units and passive confession
Electric unit, the sensing unit include dew cell and detection circuit, and the energy-storage units include rectification circuit and energy-storage travelling wave tube,
The passive power supply unit is the triboelectricity device being made up of the first friction means and the second friction means；
Wherein, the first friction means include that bottom surface deposition has the first insulated substrate of the first metal layer, the second friction means
The negative polarity for the second insulated substrate for having second metal layer being deposited including top surface and directly being fitted with second metal layer top surface is rubbed
Wipe layer；
First friction means pass through elastic support structure and the mutually isolated setting of the second friction means, and cause described first
Metal level and negative polarity frictional layer are arranged face-to-face, and under external force, the first metal layer of the first friction means is by elasticity
Supporting construction deformation energy and negative polarity frictional layer form contact-separation circulation, so as to produce charge inducing, and pass through the first metal
Layer and second metal layer are connected with energy-storage units input as electrode；
Dew cell includes depositing the 3rd insulated substrate of interdigital electrode and is deposited on the wet of the interdigital electrode surface
Sensitive film layer；
The Single port of the interdigital electrode is connected with energy-storage units output end, and another port is connected to export with detection circuit
The electrical parameter change of dew cell.
Further, in energy-storage units of the present invention, the alternating current that friction generator is exported is converted to direct current by rectification circuit
Output, and energy-storage travelling wave tube, adopt capacitor more, the capacitor is collected the electric charge of friction generator generation and then rear end is detected
Circuit carries out discharge and recharge.
Further, elastic support structure of the present invention is to be vertically installed in the first friction means and the second friction means are opposite
Spring between face.
Preferably, elastic support structure of the present invention also includes the fixation spring and adjusts the first friction means and second rubbing
Wipe the securing member of distance between part.
Specifically, the securing member is screw bolt and nut, and by being opened in the first insulated substrate and the second insulated substrate
On through hole realize bolt connection, concrete connected mode is：The head of the bolt is installed on the second insulated substrate bottom surface, bolt
Screw rod be set in spring by the through hole of the second insulated substrate bottom surface and by the nut located at the first insulated substrate top surface
It is fixed；Wherein, the through-hole diameter is between bolt head diameter and screw diameter.
According to the preferred embodiment of the present invention, the material of spring of the present invention is metal, and metal spring two ends are provided with insulation spacer,
The insulation spacer is annular, and its annular diameters is less than spring diameter, and its outer annular diameter is more than spring diameter.
Further, the material of the first metal layer of the present invention or second metal layer is any one in aluminium, nickel, copper, silver and gold；
The thickness of the first metal layer or second metal layer is 30～70 μm.
Further, the material of interdigital electrode of the present invention is aluminium or gold, and the parameter of interdigital electrode is as follows：Width be 25 μm～
50 μm, spacing is 25 μm～50 μm, and length is 800 μm～4500 μm, and thickness is 100nm～200nm.
Further, the material of negative polarity frictional layer of the present invention is organic polymer, preferably, described to have
Machine polymer rubs layer material for nylon (Nylon), Teflon (PTFE), polyvinyl fluoride (PDMS) or polyimides (PI), on
The thickness range for stating organic polymer formation frictional layer is 10～50 microns.
Further, the material of humidity sensitive thin film layer of the present invention is polyethylene glycol oxide, polyethyleneimine, polystyrolsulfon acid
Any one composite for being formed with conductor oxidate of any one or its in sodium, polyaniline and polyimides.
Another aspect of the present invention discloses a kind of preparation method of self energizing humidity sensor, comprises the following steps：
Step A：The preparation of friction means；
In the surface deposition the first metal layer of the first insulated substrate that is clean, being dried, the first friction means are obtained, are being washed
Only, a surface depositing second metal layer of the second insulated substrate being dried, then prepares negative pole on the second metal layer surface
Frottage layer, is obtained the second friction means；
Step B：The preparation of dew cell：
Interdigital electrode is produced using photoetching, sputtering and stripping technology on the surface of the 3rd insulated substrate that is clean, being dried,
Then humidity sensitive thin film layer is deposited on the interdigital electrode surface using film-forming process, dew cell is obtained；
Step C：Assembling；
Elastic support structure is set between the first friction means and the second friction means and is allowed to mutually isolated so that first
Metal level and negative polarity frictional layer are arranged face-to-face, and under external force, the first metal layer of the first friction means passes through bullet
Property supporting construction deformation energy and negative polarity frictional layer formed contact-separate circulation
The first metal layer and second metal layer are accessed into the input of energy-storage units as electrode, then by energy-storage units
Output end be connected with one end of interdigital electrode in dew cell, then by the other end of interdigital electrode with detection circuit be connected with defeated
Go out the electrical parameter change of dew cell.
Further, elastic support structure of the present invention is spring, and concrete fixed form is：Both ends of the spring is perpendicularly fixed at
Between the first metal layer and negative polarity frictional layer forward surface；The fixed form of the spring can be using bonding or any suitable
Fixed form, preferably, the material of the first insulated substrate and the second insulated substrate should be exhausted using flexible, lightweight
Edge material, to mitigate the endurance of spring.
Preferably, elastic support structure of the present invention also includes the fixation spring and adjusts the first friction means and second rubbing
The securing member of distance between part is wiped, the securing member is nuts and bolt, and concrete fixed form is as follows：In the first insulated substrate
With on the second insulated substrate correspondence open up through hole, the through-hole diameter between the head diameter and bolt shank diameter of bolt,
The head of bolt is installed on the second insulated substrate bottom surface through hole so that the bar portion of bolt passes through the second insulated substrate through hole,
Sheathed spring in the bar portion of bolt, and fixed by the nut located at the first insulated substrate top surface.
Specifically, spring materials can be metallic resilient material or other insulating elastic materials, and metal spring two ends should be entered
Row insulation-encapsulated becomes insulation processing, so as to avoid producing impact to electric charge during frictional electricity, is specifically as follows：
Metal spring two ends and friction means contact position are arranged into insulation spacer, the insulation spacer is annular, and spring diameter is situated between
Between annular insulating mat internal diameter and external diameter；Can also be by spring wire Surface coating flexible insulating material.
Further, energy-storage units of the present invention include by alternating current be converted to galvanic rectification circuit and storage electricity with
The energy-storage travelling wave tube of supply detection circuit, the energy-storage travelling wave tube mostly are capacitor.
Further, the material of the first metal layer of the present invention or second metal layer is any one in aluminium, nickel, copper, silver and gold；
The thickness of the first metal layer or second metal layer is 30～70 μm.
Further, the material of interdigital electrode of the present invention is aluminium or gold, and the parameter of interdigital electrode is as follows：Width be 25 μm～
50 μm, spacing is 25 μm～50 μm, and length is 800 μm～4500 μm, and thickness is 100nm～200nm.
Further, the material of negative polarity frictional layer of the present invention is organic polymer, preferably, described to have
Machine polymer be nylon (Nylon), Teflon (PTFE), polyvinyl fluoride (PDMS) or polyimides (PI), organic polymer shape
Thickness range into frictional layer is 10～50 microns.
Further, the material of humidity sensitive thin film layer of the present invention is polyethylene glycol oxide, polyethyleneimine, polystyrolsulfon acid
Any one composite for being formed with conductor oxidate of any one or its in sodium, polyaniline and polyimides.
The invention has the beneficial effects as follows：
First, reasonable in design, the present invention passes through first and second friction means and elastic support structure is realized collecting extraneous ring
Energy in border is simultaneously converted to electric energy, so as to being measurement humidity and its complementary energy consumption energy supply；The setting of energy-storage units is relatively reasonable, its
Including rectification circuit and energy-storage travelling wave tube the alternating current that triboelectricity is produced can be converted to required direct current, and electric energy is stored up
Continue energy supply for detection circuit in being stored in capacitor；Elastic support structure of the present invention is not limited to using elasticity realize that friction is sent out
Electricity, and the fastener constructions that can be fixed spring and adjust the first friction means and the second friction means spacing are increased,
It is easy to the distance between flexible modulation friction means, so as to the power supply unit output voltage for realizing self energizing humidity sensor can
Adjust；In addition the securing member mounting design of elastic support structure is relatively reasonable, in the case that damaging occur in first and second friction means,
Removed easily by dismounting securing member and changed, it is cost-effective, maintain easily.
2nd, performance is more excellent, and the present invention can be to the sub- content response of Environmental Water, by inspection based on humidity sensitive thin film layer
Slowdown monitoring circuit judges the air humidity corresponding to humidity sensitive thin film difference change in resistance, so as to reach the function of moisture measurement；Compare
In traditional humidity sensor, humidity sensor of the present invention does not need exterior power supply plant；Compare the confession based on piezo-electric effect
Energy gas sensor utensil has larger output signal, and humidity sensor of the present invention can solve the confession for being generally basede on piezo-electric effect
Can the susceptibility that exists of gas sensor it is low, the problems such as output signal is weak.
3rd, preparation method is simple, makes
It is honest and clean, suitable for actual production and application.
Description of the drawings
Fig. 1 is the structural representation of self energizing humidity sensor of the present invention；
Fig. 2 is the structural representation of interdigital electrode provided in an embodiment of the present invention；
Fig. 3 is that the electric power supply the principle of contact separation formula self energizing humidity sensor provided in an embodiment of the present invention friction is illustrated
Figure；
Fig. 4 is self energizing humidity sensor preparation technology flow chart provided in an embodiment of the present invention；
Fig. 5 is the equivalent operation circuit diagram of self energizing humidity sensor provided in an embodiment of the present invention；
Fig. 6 is the signal deteching circuit of confession humidity sensor provided in an embodiment of the present invention；
Fig. 7 for it is provided in an embodiment of the present invention confession humidity sensor detection different humidity when dew cell both end voltage with
The test result figure of ambient humidity change.
Fig. 8 is contact separation formula friction nanometer power generator output open circuit voltage provided in an embodiment of the present invention；
Fig. 9 is the scanning electron microscope (SEM) photograph of Teflon frictional layer texturized surface structure after femtosecond laser processing；
Figure 10 is Teflon friction layer surface image under an atomic force microscope after femtosecond laser processing；
Wherein, 101 is the first insulated substrate, and 102 is the second insulated substrate, and 201 is the first metal layer, and 202 is the second gold medal
Category layer, 3 is negative polarity frictional layer, and 4 is interdigital electrode, and 5 is humidity sensitive thin film layer, and 6 is conductive silver paste, and 7 is conductive lead wire, 7APort
With 7BPort be respectively triboelectricity device in the first metal layer as electrode and second metal layer as electrode and energy-storage units
Interface, 7cPort is the interface of interdigital electrode one end and energy-storage units, 7DPort is the interdigital electrode other end and detection circuit
Interface, 8 is energy-storage units, and 9 are detection circuit, and 11 is insulating supporting structure, and 1101 is spring, and 1102 is bolt, and 1103 is spiral shell
Mother, 1104 is insulation spacer.
Specific embodiment
The specific embodiment of the present invention is described in detail below in conjunction with technical scheme and accompanying drawing：
Embodiment 1：
As shown in figure 1, self energizing humidity sensor of the present invention includes sensing unit, energy-storage units and passive power supply unit,
The sensing unit includes dew cell and detection circuit 9, and the energy-storage units 8 include rectification circuit and energy-storage travelling wave tube, described
Passive power supply unit is the triboelectricity device being made up of the first friction means and the second friction means；Wherein, the first friction portion
Part includes that bottom surface deposition has the first insulated substrate 101 of the first metal layer 201, and the second friction means include that top surface deposition has second
The second insulated substrate 102 of metal level 202 and the negative polarity frictional layer 3 directly fitted with 202 top surface of second metal layer；First
Friction means pass through elastic support structure 11 and the mutually isolated setting of the second friction means, and cause the first metal layer 201
Arranged with negative polarity frictional layer 3 face-to-face, under external force, the first metal layer 201 of the first friction means is by elasticity
11 deformation energy of support structure and negative polarity frictional layer 3 form contact-separate circulation, so as to produce charge inducing, and by the first metal
Layer 201 and second metal layer 202 pass through conductive silver paste 6 as electrode and conductive lead wire 7 is connected with the input of energy-storage units 8；
Dew cell includes that the 3rd insulated substrate 103 for depositing interdigital electrode 4 is thin with the wet sensitive for being deposited on 4 surface of the interdigital electrode
Film layer 5；The Single port of the interdigital electrode 4 passes through conductive silver paste 6 and conductive lead wire 7 is connected with the output end of energy-storage units 8, separately
Single port is passed through conductive silver paste 6 and conductive lead wire 7 and is connected to export the electrical parameter change of dew cell with detection circuit 9.
As shown in Fig. 2 in sensing unit of the present invention in dew cell interdigital electrode 4 structural representation, as preferred reality
Apply mode, the material of interdigital electrode of the present invention 4 is aluminium or gold, the parameter of interdigital electrode 4 is as follows：Width is 25 μm～50 μm,
Away from for 25 μm～50 μm, length is 800 μm～4500 μm, and thickness is 100nm～200nm.
The electricity that the first metal layer 201 and second metal layer 202 will be produced between first friction means and the second friction means
Lotus by wire draw, therefore as electrode, the first metal layer 201 or second metal layer 202 material be preferably aluminium, nickel, copper,
Silver and gold in any one；In order to the thickness for more preferably realizing function, the first metal layer 201 or second metal layer 202 is 30～70 μm.
The first metal layer 201 is not only electrode and is also frictional layer, and according to those skilled in the art's common knowledge, metal is appearance
Volatile de-electromation, is presented the material of positive electricity, and the friction polarity of metal is positive polarity, therefore, the material of relative negative polarity frictional layer 3
Expect the electronics that is easy to get, negative polarity be presented, preferably, the material of the negative polarity frictional layer 3 is organic polymer,
The organic polymer is preferably nylon (Nylon), Teflon (PTFE), polyvinyl fluoride (PDMS) or polyimides (PI), on
The thickness range for stating organic polymer formation frictional layer is 10～50 microns.
In dew cell, the material of humidity sensitive thin film layer 5 is preferably polyethylene glycol oxide, polyethyleneimine, polystyrolsulfon acid
Any one composite for being formed with conductor oxidate of any one or its in sodium, polyaniline and polyimides.
Elastic support structure 11 can be spring 1101, be vertically fixed on first by bonding or any suitable mode
Cause the first friction means and the second friction means mutually isolated between metal level 201 and negative polarity frictional layer 3, as preferred reality
Mode is applied, in order to the material for reducing the support force of spring 1101, the first friction means and the second friction means should be using flexible, light
Matter insulating materials；According to above-mentioned fixed spring mode, in practice according to nano friction generator setting spring rational in infrastructure
1101 length and insulated substrate area, the triboelectricity device different to form required output voltage.
In view of being easily installed and dismantling and install steadiness, spring 1101 is fixed using securing member, and with friction
Part is realized being detachably connected.
It is adjustable in view of power supply unit output voltage, it is correspondingly arranged in the first insulated substrate 101 and the second insulated substrate 102
Through hole, is selected to be fastenedly connected the part bolt 1102 and matching nut of two substrates with through hole
1103, nut 1103 can be screwed off from bolt 1102 and realize fixed effect, it is also possible to screw out so as to realize dismounting；It is concrete to connect
Mode is：The head of bolt 1102 is located at 102 bottom surface of the second insulated substrate, and the screw rod of bolt 1102 passes through the second insulated substrate
Fix during the through hole of 102 bottom surfaces is set in spring 1101 and by the nut 1103 located at 101 top surface of the first insulated substrate；Its
In, the through-hole diameter is between the head diameter and screw diameter of bolt 1102.
Impact can be produced on triboelectricity process when being metal in view of the material of spring 1101, it is (outstanding so metal spring
Which is and friction means contact position) insulation measures should be taken, specifically, metal spring two ends are provided with insulation spacer 1104, institute
It is annular to state insulation spacer 1104, and, less than metal spring diameter, its outer annular diameter is more than metal spring diameter for its annular diameters.
Protective effect in view of being convenient for carrying and to device, should also be cased using insulator seal according to actual needs will be above-mentioned
Whole system integration packaging.
Be so designed that, self energizing sensor of the present invention power supply unit and sensing unit are carried out it is integrated, by extraneous applying
Active force makes elastic support structure deform upon and form contact-separate circulation, based on triboelectrification and quiet by friction means
Electric induction principle, using the friction pole sequence official post between different materials obtain frictional layer during contact separation constantly accumulation or
Release electric charge, so as to produce alternating current in external circuit, and is supplied to dew cell and detection circuit to survey ambient humidity
Examination.Elastic support structure is reasonable in design, in the case where damaging occur in friction means, can dismantle securing member, spring and be tieed up
Repair or change, then retighten, whole triboelectricity device need not be changed, it is cost-effective；Using bolt, the fastening of nut
Mode can realize the regulation of distance between friction means, so that power supply unit output voltage is adjustable, optimize performance.
It is below the electricity generating principle of power supply unit in self energizing humidity sensor of the present invention, as shown in Figure 3：The present invention is adopted
Be contact-separate structure (such as Fig. 3 a), under external force, the layers of copper plated by generator upper end insulated substrate bottom surface will be with
The organic polymer thin film frictional layer of lower end insulated substrate top surface comes in contact, and when definition contacts with each other, layers of copper contact surface is first
Surface, organic polymer thin film frictional layer contact surface are second surface, due to copper with organic polymer material (such as Teflon
PTFE than larger, during both contacts, second surface will obtain electronics from first surface to the electrode sequence difference that rubs between), so that
The electric charge of equivalent contrary sign on two contact surface bands, that is, produce triboelectric charge (such as Fig. 3 b).Once external force disappears, in resilient support knot
Under the elastic force effect of structure, upper end insulated substrate will be flicked, so that layers of copper is separated with organic polymer thin film frictional layer, two
Electrical potential difference will be produced between contact surface, the layers of copper of organic polymer thin film frictional layer bottom surface will in the presence of electrostatic induction
Induced positive is produced, using upper and lower two layers of copper as electrode, if accessing one with wire between upper and lower two copper electrodes
Load, by by loading release with the positive charge produced by organic polymer thin film friction, electronics will lead to Top electrode from bottom electrode
Overload is transferred to Top electrode to balance the electrical potential difference between Top electrode and organic polymer thin film (such as Fig. 3 c).Contact when two
When the distance between face reaches maximum, the charge inducing density on bottom electrode is up to maximum (such as Fig. 3 d).Under external force,
Upper end insulated substrate vibrates downwards again, as upper end layers of copper moves closer to lower end organic polymer thin film frictional layer, in electrostatic
In the presence of sensing, the first surface of upper end layers of copper will gradually produce one layer of induced positive, and now electronics will be by negative
Load is transferred to bottom electrode (such as Fig. 3 e) from Top electrode, until upper end layers of copper is connect again with lower end organic polymer thin film frictional layer
Touch, now two contact surfaces carry equivalent heterocharge (such as Fig. 3 b).Periodically it is contacting and separating through repeatedly above-mentioned, rubs
Nano generator will export the current pulse signal of alternation, then AC signal is changed into direct current output by rectification circuit, so as to
Power for dew cell.
Embodiment 2：
A kind of preparation method of self energizing humidity sensor, comprises the following steps：
Step A：The preparation of friction means；
The pmma substrate that 3 sizes are 10 centimetres of 10 cm x is cleaned respectively, and is dried up with nitrogen, named respectively
For the first pmma substrate, the second pmma substrate and the 3rd pmma substrate；
Physical vaporous deposition deposit thickness is adopted for 70 μm of the first layers of copper on a surface of the first pmma substrate,
The first friction means are obtained, are 70 μm of second layers of copper in a surface deposit thickness of the second pmma substrate, then described
Second layers of copper surface mount a layer thickness is 50 μm of polyimides (PI) frictional layer, and the second friction means are obtained；
Step B：The preparation of dew cell：
Golden interdigital electrode is produced using photoetching, sputtering and stripping technology on the surface of the 3rd pmma substrate, then
The laminated film formed with graphene oxide in the golden interdigital electrode surface deposition kayexalate using film-forming process
Layer, is obtained dew cell；
Step C：Assembling；
Between the first friction means and the second friction means, vertical fixed spring is allowed to mutually isolated, and causes the first bronze medal
Layer and polyimides (PI) frictional layer are arranged face-to-face, and under external force, the first layers of copper of the first friction means passes through bullet
Spring deformation energy and polyimides (PI) frictional layer form contact-separation circulation, wherein：Spring material select insulating elastic material or
Person is externally provided with insulating coating in spring wire, and the spring of the above-mentioned insulation processings of Jing is fixed using bonding mode；
The first layers of copper and the second layers of copper are accessed bridge rectifier by conductive silver paste and conductive lead wire as electrode will
The alternating current of friction nanometer power generator output is converted into direct current output, and with the electric capacity of a 1uf collecting generator generation
Electric charge, bridge rectifier and luf electric capacity composition energy-storage units, then by the output end of the energy-storage units pass through conductive silver
Slurry and conductive lead wire are connected with one end of golden interdigital electrode in dew cell, then the other end of golden interdigital electrode is passed through conductive silver
Slurry and conductive lead wire are connected to export dew cell with detection circuitElectrical parameter changes.
Preferably, the material to prepare first insulated substrate and the second insulated substrate of friction means should
Using flexible, light weight insulating material, to mitigate spring supporting power, it is to avoid bond effect is damaged due to insulated substrate weight reasons
It is bad.
Embodiment 3：
As shown in figure 4, a kind of preparation method of self energizing humidity sensor, comprises the following steps：
Step A：The preparation of friction means；
The pmma substrate that 3 sizes are 10 centimetres of 10 cm x is cleaned respectively, and is dried up with nitrogen, named respectively
For the first pmma substrate, the second pmma substrate and the 3rd pmma substrate；
In the first layers of copper that a surface physics vapour deposition process deposit thickness of the first pmma substrate is 30 μm, it is obtained
First friction means, are 30 μm of second layers of copper in a surface deposit thickness of the second pmma substrate, then described second
Layers of copper surface mount a layer thickness is 10 μm of Teflon (PTFE) frictional layer, and the second friction means are obtained；
Step B：The preparation of dew cell：On the surface of the 3rd pmma substrate using photoetching, sputtering and stripping technology
Aluminium interdigital electrode is produced, polyethylene oxide thin film layer, system are deposited on the aluminium interdigital electrode surface using film-forming process then
Obtain dew cell；
Step C：Assembling；
On the first friction means and the second friction means, correspondence opens up through hole the screw bolt and nut by being cased with spring
Fixation it is mutually isolated so that the first layers of copper and Teflon (PTFE) frictional layer are arranged face-to-face, and under external force, first
First layers of copper of friction means can form contact-separation circulation with Teflon (PTFE) frictional layer by spring deformation, wherein：Institute
Through-hole diameter is stated between the head diameter and bolt shank diameter of bolt, the head of bolt is logical located at the second pmma substrate
At hole, the bar portion of bolt is arranged with spring, and the afterbody of bolt passes through the first pmma substrate through hole and by having located at first
The nut of machine glass substrate top surface is fixed, and both ends of the spring is provided with insulation spacer, the felt pad with pmma substrate contact position
Piece is annular, and spring diameter is between the internal diameter and external diameter of annular insulating mat piece；
The first layers of copper and the second layers of copper are accessed bridge rectifier by conductive silver paste and conductive lead wire as electrode will
The alternating current of friction nanometer power generator output is converted into direct current output and (corresponds to 7 respectivelyAPort and 7BPort), and with a 1uf
Electric capacity come collect generator generation electric charge, bridge rectifier and luf electric capacity composition energy-storage units, then by the energy storage
The output end of unit passes through one end connected (corresponding 7 of conductive silver paste and conductive lead wire and golden interdigital electrode in dew cellCEnd
Mouthful), then the other end of golden interdigital electrode is connected to export dew cell with detection circuit by conductive silver paste and conductive lead wire
Electrical parameter change (correspondence 7DPort).
The equivalent circuit of self energizing humidity sensor is obtained for the present embodiment as shown in figure 5, contact-separate type friction nanometer is sent out
The alternating current of motor output can regard the discharge and recharge of a capacity plate antenna as, and dew cell (includes the fork on insulated substrate
Refer to the humidity sensitive thin film of electrode and gas blowout on interdigital electrode surface) electrology characteristic again equivalent to a variable resistor；DIFFERENT WET
The change of the lower dew cell resistance value of degree will be linear with the change of output current and voltage, so by monitoring devices
Output current or output voltage can just learn air humidity to be measured.
According to Fig. 5, the partial pressure on dew cell is：
Wherein, VocFor the output voltage of friction nanometer power generator, R is external resistance, and Rs is gas sensor resistance.
As described above, regarding contact-separate type friction nanometer power generator as a capacity plate antenna, its output voltage is as follows：
Wherein, σ is contact surface triboelectric charge density, ε0It is permittivity of vacuum, d is the spacing of upper and lower two contact surfaces.
It can be seen that, the output voltage of friction nanometer power generator is unrelated with upper end pmma substrate up-down vibration frequency, only and device architecture
It is relevant.Therefore, under the external force effect of different frequency, its output voltage is constant to specific generator structure.With reference to formula (1)
(2) understand, the partial pressure of dew cell is solely dependent upon the resistance sizes of dew cell.The electricity of dew cell under different air humiditys
Resistance changes the change for translating into output current and output voltage, so the output current and output voltage by monitoring devices
The humidity of air to be measured can just be learnt.
Fig. 6 is the detection circuit of self energizing humidity sensor of the present invention, wherein, 7APort and 7BPort respectively rubs and sends out
In electric installation the first metal layer as electrode and second metal layer as electrode and energy-storage units interface, 7cPort is interdigital electricity
Pole one end and the interface of energy-storage units, 7DPort is the interface of the interdigital electrode other end and detection circuit, can be directly perceived with reference to Fig. 4
Understand the circuit connecting mode between each several part；The resistance of suitable resistance is wherein selected to cause R1、R2、RfAnd RsBetween meet close
It is formula R1=kRf、R2=kRs.Self energizing humidity sensor is gone to be put in the environment for treating measuring moisture, due to the nanometer generating that rubs
The output characteristics of machine determined by self structure, obtain stable defeated at capacitor two ends so being believed that when response reaches stable
Go out voltage and stable output current.During test, humidity sensor of the present invention is placed on into the environment that relative humidity is 7% first
Among, reconcile RfResistance so as to meet following formula：-
It is zero to then flow through galvanometric electric current, so galvanometer will not be deflected.When ambient humidity is changed, now electric current
Meter can be deflected, and its deflection angle is directly proportional to the relative humidity of air.
When stable, the resistance of sensitive resistance is by RsIt is changed into Rs+ΔRs, when response is stable, the output of friction nanometer power generator
Electric current is certain, and output current meets relationship below in detection circuit：
Then flowing through galvanometric electric current is：
By experiment, resistance R of the dew cell of the friction nanometer power generator adaptation in the designsShould be in M Ω level special talents
There is optimal output effect, relative to the change in resistance Δ R for being placed in dew cell under different humiditys, due to Δ Rs/Rs＜ ＜ 1,
Can be obtained according to formula (5) with lower aprons：
WhereinUnderstand that galvanometer deflection angle theta is joined with itself by galvanometric operation principle
Count and be directly proportional by its electric current I, physical relationship is as follows：
Convolution (6) and formula (7), as the changing value of resistance has Δ R with humidity is linearS=K2H, can release
Galvanometer deflection angle is linear with the change in resistance of dew cell, such as following formula：
θ=K ' H (8)
In formula, θ is galvanometric deflection angle, and H is the relative humidity of air, and K ' is proportionality coefficient, is hadIt can be seen that proportionality coefficient is only exported with friction nanometer power generator
The intrinsic parameter of electric current, galvanometer is relevant with initial resistance proportionality coefficient.
With the increase of relative humidity, dew cell resistance knots modification Δ RsIncrease, is increased therewith by galvanometric electric current
Greatly, galvanometric deflection angle also increases therewith, can intuitively judge humidity size.
Dew cell both end voltage obtained by when Fig. 7 is present invention detection different humidity is tied with the test that ambient humidity changes
Fruit scheme, this test result is the theory deduction according to formula (1)～(8) in embodiment 1, by the change of galvanometer deflection angle with
Institute's measuring moisture is corresponding.It can be seen that with the increase of relative humidity, the voltage at dew cell two ends reduces therewith,
And the quantity of electric charge that generator stable is exported when exporting is necessarily, that is, the electric current for flowing through circuit is certain, it follows that the resistance of dew cell
Value linearly changes with the change of ambient humidity.
Fig. 8 is the output open circuit voltage of friction nanometer power generator in the embodiment of the present invention, as can be seen from the figure generator
Output is stable, and output voltage is close to 200V.
Embodiment 4：
The operation of the present embodiment is substantially the same manner as Example 3, simply by Teflon PTFE frictional layers in example 3 through regeneration
Amplifying ti∶sapphire laser femto-second laser carries out physical modification formation rough surface.The design parameter of used femto-second laser is as follows：
Centre wavelength is 800nm, and repetitive rate is 1kHz, and pulse width is 200fs, and pulse power is 400mW, and distance between centers of tracks is 50um.
Then the Teflon PTFE frictional layers Jing after femtosecond laser processing are respectively adopted into ESEM and atomic force microscopy
Sem observation, it is as a result as follows：
The scanning electron microscope (SEM) photograph of Teflon frictional layer texturized surface structure after femtosecond laser is processed is illustrated in figure 9, by figure
As can be seen that, become finer and close through the surface texture of the modified friction material in surface, present obvious bulked structure.
It is Teflon friction layer surface image under an atomic force microscope after femtosecond laser processing as shown in Figure 10, passes through
Image can be seen apparent mastoid process micro-structural, and the height of the mastoid process micro-structural is about 50～70nm.As can be seen here, pass through
Carry out surface to be modified to Teflon material, increase its surface roughness, by increasing capacitance it is possible to increase the friction area between material.Theoretical table
Bright, extra friction can effectively increase contact charge density, and the presence of these mastoid process structures can improve sending out for the present invention
The power output of motor, accordingly, as preferred embodiment, on the premise of frictional layer is not destroyed, can be by suitable side
Method increases the degree of roughness of its contact surface, and then friction area is increased to reach raising self energizing humidity sensor of the present invention
The power output of power supply unit.
The principle and its effect of above-described embodiment only illustrative present invention, it is of the invention not for limiting.The present invention
Can expand to any new feature for disclosing in this manual or any new combination, and the arbitrary new method that discloses or
The step of process or any new combination.Any person skilled in the art all can be in the spirit and the scope without prejudice to the present invention
Under, modifications and changes are carried out to above-described embodiment.Therefore, such as those of ordinary skill in the art without departing from this
All equivalent modifications completed under the disclosed spirit of invention and technological thought or change, should be by the claim of the present invention
Covered.
Claims (10)
1. a kind of self energizing humidity sensor, it is characterised in that including passive power supply unit, energy-storage units and sensing unit, institute
Stating sensing unit includes dew cell and detection circuit (9), and the energy-storage units include rectification circuit and energy-storage travelling wave tube, the nothing
Source power supply unit includes the triboelectricity device being made up of the first friction means and the second friction means；
Wherein, the first friction means include that bottom surface deposition has first insulated substrate (101) of the first metal layer (201), and second rubs
Wiping part includes that top surface deposition is had the second insulated substrate (102) of second metal layer (201) and pushed up with second metal layer (202)
The negative polarity frictional layer (3) that face is directly fitted；First friction means pass through elastic support structure (11) and the second friction means phase
Mutually isolation is arranged, and the first metal layer (201) and negative polarity frictional layer (3) are arranged face-to-face, under external force, first
The first metal layer (201) of friction means by elastic support structure (11) deformation energy and negative polarity frictional layer (3) formed contact-
Circulation is separated, so as to produce charge inducing, and electrode is used as with storage by the first metal layer (201) and second metal layer (202)
The input of energy unit (8) is connected；
Dew cell includes that deposition has the 3rd insulated substrate (103) of interdigital electrode (4) and is deposited on the interdigital electrode (4) table
The humidity sensitive thin film layer (5) in face；The Single port of the interdigital electrode (4) is connected with the output end of energy-storage units (8), another port with
Detection circuit (9) is connected with the electrical parameter change of output dew cell.
2. self energizing humidity sensor according to claim 1, it is characterised in that the negative polarity frictional layer (3)
Material is organic polymer, specially nylon, Teflon, polyvinyl fluoride or polyimides, and the organic polymer forms friction
The thickness range of layer is 10～50 microns；The material of the humidity sensitive thin film layer is polyethylene glycol oxide, polyethyleneimine, polystyrene
In sodium sulfonate, polyaniline and polyimides any one or any one with conductor oxidate formed composite.
3. self energizing humidity sensor according to claim 1, it is characterised in that the elastic support structure (11) is vertical
The spring (1101) being directly arranged between the first friction means and the second friction means forward surface.
4. self energizing humidity sensor according to claim 3, it is characterised in that the elastic support structure (11) is also wrapped
Include the fixation spring (1101) and adjust the securing member of distance between the first friction means and the second friction means.
5. self energizing humidity sensor according to claim 4, it is characterised in that the securing member be bolt (1102) and
Nut (1103), and realize that bolt connects by the through hole being opened on the first insulated substrate (101) and the second insulated substrate (102)
Connect, specially：The head of the bolt (1102) is installed on the second insulated substrate (102) bottom surface, and the bar portion of bolt (1102) is led to
Cross the second insulated substrate (102) through hole be set in spring (1101) in and by being installed on the first insulated substrate (101) top surface
Nut (1103) it is fixed；Wherein, the through-hole diameter is between the head diameter and screw diameter of bolt (1102).
6. self energizing humidity sensor according to claim 5, it is characterised in that the material of the spring (1101) is gold
Category, also includes the insulation spacer (1104) located at metal spring two ends, and the insulation spacer (1104) is annular, its annular diameters
Less than metal spring diameter, its outer annular diameter is more than metal spring diameter.
7. a kind of preparation method of self energizing humidity sensor, it is characterised in that comprise the following steps：
Step A：The preparation of friction means；
On surface deposition the first metal layer (201) of the first insulated substrate (101) that is clean, being dried, the first friction portion is obtained
Part, in a surface depositing second metal layer (202) of the second insulated substrate (102) that is clean, being dried, then in second gold medal
Category layer (202) surface prepares negative polarity frictional layer (3), and the second friction means are obtained；
Step B：The preparation of dew cell：
Interdigital electrode is produced using photoetching, sputtering and stripping technology on the surface of the 3rd insulated substrate (103) that is clean, being dried
(4), then using film-forming process on the interdigital electrode (4) surface deposition humidity sensitive thin film layer (5), dew cell is obtained；
Step C：Assembling；
Elastic support structure (11) is set between the first friction means and the second friction means and is allowed to mutually isolated so that first
Metal level (201) and negative polarity frictional layer (3) are arranged face-to-face, and under external force, the first metal of the first friction means
Layer (201) forms contact-separation circulation by elastic support structure (11) deformation energy and negative polarity frictional layer (3)
The first metal layer (201) and second metal layer (201) are accessed into the input of energy-storage units (8) as electrode, then
The output end of energy-storage units (8) is connected with one end of interdigital electrode in dew cell (4), then by the another of interdigital electrode (4)
Hold to be connected with detection circuit (9) and changed with the electrical parameter for exporting dew cell.
8. a kind of preparation method of self energizing humidity sensor according to claim 7, it is characterised in that the elasticity
Support structure is spring (1101), and concrete fixed form is：By spring (1101) two ends be vertically fixed on the first metal layer (201) with
Between negative polarity frictional layer (3) forward surface.
9. a kind of preparation method of self energizing humidity sensor according to claim 8, it is characterised in that the elasticity
Support structure also includes the fixation spring (1101) and adjusts the fastening of distance between the first friction means and the second friction means
Part, the securing member are nut (1103) and bolt (1102), and concrete fixed form is as follows：In the first insulated substrate (101) and
On the second insulated substrate (102), correspondence opens up through hole, and the through-hole diameter is straight between the head diameter and screw rod of bolt (1102)
Between footpath, the head of bolt (1102) is installed on the second insulated substrate (102) bottom surface through hole so that the bar portion of bolt (1102)
Through the second insulated substrate (102) through hole, sheathed spring (1101) in the bar portion of bolt (1102), and by exhausted located at first
The nut (1103) of edge substrate (101) top surface is fixed.
10. a kind of preparation method of self energizing humidity sensor according to claim 9, it is characterised in that the spring
(1101) material is metal, and metal spring two ends are provided with insulation spacer (1104), the felt pad with friction means contact position
Piece (1104) is annular, and metal spring diameter is between the internal diameter and external diameter of annular insulating mat piece.
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