CN106153690A - A kind of self energizing sensor for alcohol detection and preparation method thereof - Google Patents
A kind of self energizing sensor for alcohol detection and preparation method thereof Download PDFInfo
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- CN106153690A CN106153690A CN201610606399.7A CN201610606399A CN106153690A CN 106153690 A CN106153690 A CN 106153690A CN 201610606399 A CN201610606399 A CN 201610606399A CN 106153690 A CN106153690 A CN 106153690A
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Abstract
The invention discloses a kind of self energizing sensor for alcohol detection and preparation method thereof, belong to self energizing active gas sensor field.The self energizing sensor that the present invention provides includes glass substrate, interdigital electrode, air-sensitive film layer, insulating polymer film layer, conductive electrode and insulating supporting structure.This self energizing sensor can collect the mechanical energy of human body exhaled air flow for self providing the energy, and the curtage exported by testing circuit is realized the mensuration of alcohol concentration in incoming call gas；The present invention is compared with traditional alcohol sensor, and preparation process is simple, low cost, practicality are high, need not extra electric power system.And the self energizing sensor construction that the present invention proposes is novel and takes full advantage of the energy of nature, can be widely used for the detection of drunk driving.
Description
Technical field
The invention belongs to self energizing active gas sensor field, be specifically related to a kind of self energizing for alcohol detection
Sensor and preparation method thereof.
Background technology
Gas sensor is a kind of transducer that gas volume fraction to be measured changes into the corresponding signal of telecommunication, utilizes gas to pass
Gas is analyzed being an important step of scientific research, production process and environment measuring by sensor.Traditional gas sensing
Device often relies on the change of electric capacity or resistance, needs external power source to provide energy, it is impossible to meet sensors with auxiliary electrode work for a long time
Demand.Its air-sensitive original paper mainly has gas sensing resistance and the big class of air-sensitive electric capacity two, but, measure resistance or electric capacity it is generally required to one
Individual Circuits System, this makes gas sensor need a lot of additional devices, and complicated integral structure, energy consumption are high.Especially to setting
Put for the sensor of Different high risk sites or remote districts, it is achieved the outside of long time stability directly powers relatively difficult.Cause
This, collect energy by self energizing technology from external environment, becomes and solves a kind of preferable of the long-term autonomous power supply of sensor
Scheme.
Nowadays, the direction, forward position of research field during the exploration of energy collection technology and new forms of energy just becomes each subject.
Although traditional power technology has been developed nearly two a century, but the mankind are to new energy and the exploration of novel energy collection method
The most never stopped, such as photoelectric effect, piezoelectric effect, pyroelectric effect, electrochemical reaction and electrostatic induction etc..In recent years
Coming, the collection to ambient mechanical energy has been increasingly becoming the energy and the focus and emphasis in investigation of materials field.As nature
For one of universal form of energy, mechanical energy have widely distributed, huge, clean environment firendly, can the direct feature such as collection.Kind
Planting research to show, the collection to ambient mechanical energy is a kind of Energy harvesting methods green, continuable.
Triboelectrification is the most universal a kind of phenomenon in daily life.It refers to by producing in physical contact between object
Raw charge transfer process.Triboelectric processes is also the origin of daily electrostatic.The formation of triboelectric charge depends on contact material
The electropolar difference of friction.Although this universal phenomenon of triboelectrification is by the time of human knowledge's nearly one thousand years, but it is formed
Mechanism is not studied clear the most completely.At present, comparing a kind of explanation theeed admit is, bi-material contacts when,
Chemical bond is defined at its contact position portion.Electric charge transfers to the another kind of material electrification with both balances from a kind of material
Learn gesture.The electric charge of transfer can be electronics, ion or molecule.When separating when, some key atoms of contact surface can retain
Living unnecessary electronics, other key atoms then can abandon unnecessary electronics, thus form triboelectric charge on contact surface surface.Mostly
In the case of number, the generation of electrostatic charge is commercial production and daily life does one's utmost the negative effect avoided.
But, the team of the Wang Zhonglin professor of Georgia Institute of Technology in 2012 utilizes the coupling of triboelectrification and electrostatic induction
Cooperation is with invented can be by friction nanometer power generator (TENG) that changes mechanical energy is electric energy.Collection of energy at above-mentioned electromotor
During, the material that two kinds of franklinic electricity polarity is different contact after in Surface Creation triboelectric charge, electric potential difference can be produced during separation
Thus in external circuitry, define electric current output.This novel electromotor is based on triboelectrification and the coupling of electrostatic induction principle
Cooperation use, may be used for collecting various forms of mechanical energy.If it is possible to the franklinic electricity being difficult to collect is applied to certainly
In generating equipment, bring to the life of people more convenient.
Summary of the invention
Based on mentioned above, the present invention provides a kind of self energizing sensor for alcohol detection and preparation method thereof, this
Invention, without configuring other power supplys, may be used for whether drunk driving detects, can solve to be generally basede on piezoelectric effect self energizing gas and pass
Sensor sensitivity is low, output signal is weak, need the problems such as External Force Acting source, can be efficiently used for radio sensing network and carry out gas
Health check-up is surveyed.
The present invention provides following technical scheme:
A kind of self energizing sensor for alcohol detection, including first component and second component；
Described first component includes gas sensor unit and the lower conduction electricity being deposited on glass substrate upper and lower surface
Pole；Described gas sensor unit includes interdigital electrode and the air-sensitive film layer being deposited in interdigital electrode, and described air-sensitive film layer can
Response alcohol gas；
Described second component include insulating polymer film layer and with described insulating polymer film layer upper surface directly against
The upper conductive electrode closed, described insulating polymer film layer material is flexible material；
Described first component and described second component are fixed by insulating carriage so that described air-sensitive film layer and described
Insulating polymer film is arranged and mutually isolated face-to-face；Under airflow function, described insulating polymer film layer can be with described
Air-sensitive film layer forms contact-separation circulation, thus produces charge inducing, and by described upper conductive electrode and lower conductive electrode
Exporting the signal of telecommunication to testing circuit, described testing circuit can measure and cause owing to the electrology characteristic of air-sensitive film layer changes
Gas sensor unit electrical parameter changes.
Preferably, there is franklinic electricity between material and the material of described air-sensitive film layer of described insulating polymer film layer
Pole sequence difference；
In the present invention, the material of air-sensitive film layer uses metal oxide semiconductor material, is preferably, SnO2、γ-Fe2O3、
α-Fe2O3Or ZnO2；Above-mentioned air-sensitive thin film material is effective to ethanol response, and concrete principle is air-sensitive thin film material and ethanol gas
Body contacts and occurs electronic reciprocal effect to cause the electrical conductivity of air-sensitive thin film material to change, thus realizes people's expired gas
The detection of body, during detection, alcohol concentration is tested substantially without impact by other compositions of people's exhaled gas；
In the present invention, insulating polymer film layer is flexible, and can be by the disturbance of external force institute, existing various flexibilities
Material all can become the selection making insulating polymer film layer, but be preferably the disturbance to external force and react sensitivity, easily quilt
The material of disturbance, is the most easily flowed through the material of the fluid institute disturbance of surrounding, and is met aforementioned and air-sensitive film layer material
There is friction electrode sequence difference in material；It is preferably, nylon, Teflon, polyvinyl fluoride or polyimides.
In the present invention, the material of interdigital electrode is Al or Au, and the parameter of described interdigital electrode is specific as follows: width: 25 μm～
50 μm, spacing: 25 μm～50 μm, length: 800 μm～4500 μm, thickness: 100nm～200nm.
In the present invention, the material of upper conductive electrode or lower conductive electrode is Al, Ni, Cu, Ag or Au, and its thickness range is 30
～70 microns.
The preparation method of a kind of self energizing sensor for alcohol detection, it is characterised in that comprise the following steps:
Step A: the preparation of first component；Conductive electrode under glass substrate bottom surface deposition clean, that be dried, and described
Glass substrate end face prepares interdigital electrode, then uses film-forming process deposition gas sensitive film layer in described interdigital electrode；
Step B: the preparation of second component；Deposition conduction electricity in the one side of insulating polymer film layer with flexibility
Pole；
Step C: the preparation of sensor；Described first component and described second component are fixed by insulation support layer, makes
In first component in air-sensitive film layer and described second component insulating polymer film layer be isolated and arrange face-to-face, and
Contact-separation circulation can be formed under airflow function, thus convert mechanical energy into electric energy；Then connection detection circuit is with detection
The electrical parameter change of air-sensitive film and collection electric energy.
Wherein, there is friction electrode between material and the material of described air-sensitive film layer of described insulating polymer film layer
Sequence difference, wherein, the material of air-sensitive film layer is SnO2、γ-Fe2O3、α-Fe2O3Or ZnO2, the material of insulating polymer film layer
Material is nylon, Teflon, polyvinyl fluoride or polyimides.
Wherein, the parameter of described interdigital electrode is specific as follows: width: 25 μm～50 μm, spacing: 25 μm～50 μm, length:
800 μm～4500 μm, thickness: 100nm～200nm, the material of interdigital electrode is Al or Au.
Wherein, the material of described upper conductive electrode or lower conductive electrode is Al, Ni, Cu, Ag or Au, and its thickness range is 30
～70 microns.
Compared with prior art, there is advantages that
1, the self energizing sensor of the present invention causes flexible insulation polymer film layer to vibrate by human body blow gas, and
Contact generation triboelectric charge with air-sensitive film layer, then both produce electric potential difference when being separated, thus are formed in external circuitry
Electric current output；Ethanol selectivity is adsorbed by air-sensitive film layer simultaneously, makes voltage pulse output or electric current by interdigital electrode
Signal can be used for detecting the concentration of ethanol in characteristics of contaminated respiratory droplets gas.
2, self energizing gas sensor utensil based on piezoelectric effect compared by the self energizing sensor of the present invention has bigger
Output signal, can solve to be generally basede on that the sensitivity that the self energizing gas sensor of piezoelectric effect exists is low, output signal is weak, need
Want the problems such as External Force Acting source, radio sensing network can be efficiently used for and carry out gas detecting.
3, the self energizing sensor construction of the present invention is simple, easy to make, with low cost, the most portable, it is adaptable to actual
Microsensor in production application, it is not necessary to special working environment, therefore has the highest compatibility.
Accompanying drawing explanation
The preparation technology flow chart of the self energizing sensor that Fig. 1 provides for the present invention；Wherein, 1 is glass substrate, under 21 are
Conductive electrode, 22 is upper conductive electrode, and 3 is interdigital electrode, and 4 is air-sensitive film layer, and 5 is insulating polymer film, and 6 is conductive silver
Slurry, 7A is A port conductive lead wire, and 7B is B port conductive lead wire, and 7C is C port conductive lead wire, and 7D is D port conductive lead wire, 8
For insulating carriage.
The power supply mechanism schematic diagram of the self energizing sensor that Fig. 2 provides for the present invention.
The equivalent operation circuit diagram of the self energizing sensor that Fig. 3 provides for the present invention.
The structural representation of interdigital electrode in the self energizing sensor that Fig. 4 provides for the present invention.
Signal deteching circuit in the self energizing sensor that Fig. 5 provides for the present invention.
The test result figure of the self energizing sensor that Fig. 6 provides for the present invention.
Detailed description of the invention
Below in conjunction with specific embodiment and Figure of description, the present invention is described in detail:
The preparation technology schematic flow sheet of the self energizing sensor that Fig. 1 provides for the present invention, preparation method of the present invention is concrete
Comprise the following steps:
Step A: the preparation of first component；Bottom surface deposition thickness glass substrate 1 (such as figure (a)) clean, that be dried is
The copper film of 30～70 microns is as lower conductive electrode 21 (such as figure (b)), and prepares interdigital electrode at the end face of described glass substrate 1
3 (such as figures (c)), the material of described interdigital electrode 3 uses Al or Au, and the design parameter of interdigital electrode 3 is as follows: width: 25 μm～
50 μm, spacing: 25 μm～50 μm, length: 800 μm～4500 μm, (Fig. 4 is the structure of interdigital electrode to thickness: 100nm～200nm
Schematic diagram)；Then film-forming process deposition gas sensitive film layer 4 (such as figure (d)) in described interdigital electrode 3 is used；Described air-sensitive is thin
The material of film layer is preferably SnO2、γ-Fe2O3、α-Fe2O3、ZnO2；
Step B: the preparation of second component；A deposit thickness scope at the insulating polymer film layer 5 with flexibility
It is that the copper film of 30～70 microns is as upper conductive electrode 22 (such as figure (e))；The material of described insulating polymer film layer 5 is preferably
Nylon, Teflon, polyvinyl fluoride or polyimides；
Step C: the preparation of sensor；By the two ends of interdigital electrode 3, upper conductive electrode 22 and lower conductive electrode 21 by leading
Electricity silver slurry 6 and conductive lead wire connect (as figure (f) show 7B port and 7D port) formed four ports (7A port, 7B port,
7C port and 7D port)；Then described first component and described second component are fixed by insulation support layer 9 so that first
In parts, in air-sensitive film layer 4 and described second component, insulating polymer film layer 5 is isolated and arranges face-to-face, and at air-flow
Contact-separation circulation can be formed under Zuo Yong, thus convert mechanical energy into electric energy (such as figure (g))；Then by four ports
Connection detection circuit (the most as shown in Figure 5) changes with the electrical parameter detecting air-sensitive film and collects electric energy.
Heretofore described " friction electrode sequence " refers to be ranked up the attraction degree of electric charge, so far according to material
Till the present, also there is no the mechanism that the explanation electric charge that a kind of unified theory can be complete shifts.Can be generally considered as, two kinds of existence
The material of friction electrode sequence difference in the moment contacted with each other, negative charge polarity calibration from friction electrode sequence on the contact surface
Material surface is transferred to the material surface that in friction electrode sequence, polarity is relatively born.It should be noted that friction electrode sequence simply one
Statistical result based on experience, i.e. bi-material differ the most remote in the sequence, after contact the positive negativity of produced electric charge and should
The probability that sequence is consistent is the biggest, and the result of reality is affected by various factors, such as material surface roughness, ring
Border humidity and whether have Relative friction etc..
According to general knowledge known in this field, the material of conductive electrode is possible not only to select copper, it would however also be possible to employ Al, Ni,
Ag or Au is as preferably.
As in figure 2 it is shown, for the present invention provide self energizing sensor detect alcohol gas time power supply the principle；Respectively will
The opposite face of insulating polymer film layer and air-sensitive film layer is defined as first surface and second surface, owing to insulating polymer is thin
The material of film layer is flexible material, can cause compliant member that similar shaking occurs when fluid flows through when it is caused disturbance by compliant member
The reaction of dynamic formula, it is easy to form being contacting and separating, therefore, when first surface and second between compliant member and miscellaneous part
Surface there occurs physical contact under airflow function, owing to having difference between material and the material of second surface of first surface
Franklinic electricity polarity, therefore the strong material (air-sensitive film layer material) of electronic capability by from the weak material of electronic capability (absolutely
Edge thin polymer film layer material) on attract electronics, so that positively charged on first surface, and electronegative on second surface
Lotus, two contacts are worn the electric charge of first-class amount contrary sign, are fricative electric charge；Then after bi-material separates, the first table
The electric potential difference that can produce between face and second surface.
Being coupled together by load by the conductive electrode of polymer film layer and air-sensitive film layer each back side, electric potential difference will
Electronics is flowed between two conductive electrodes, poor to balance the electrostatic potential between first surface and second surface；Treat two
First surface contacts again with second surface, and the electric potential difference that triboelectric charge produces disappears, so that electronics reverse flow.So exist
Under airflow function, the first surface of polymer film layer and the second surface of air-sensitive film layer are constantly contacting and separating, self energizing
The power supply outfan of sensor is by the current pulse signal of output alternation, thus converts mechanical energy into electric energy.
The alternating current that the present invention exports based on contact-separate type triboelectricity device can regard a substrate capacitance as
Discharge and recharge, and the electrology characteristic of gas sensor is equivalent to a variable resistance, the self energizing sensor that therefore present invention provides
Equivalent operation circuit diagram as it is shown on figure 3, wherein, Rref is external resistance, and R is gas sensor unit resistance；
Under the different gas concentrations to be measured, the change of gas sensor resistance value translates into output electric current and output voltage
Change, so output electric current and output voltage by monitoring devices just can learn the concentration of gas to be measured, in the present invention, air-sensitive
Dividing potential drop on element is:
Wherein, Open Output Voltage based on contact-separate type triboelectricity device during Voc is the present invention.
And for contact-separate type friction generator, its Open Output Voltage is represented by:
Wherein σ is contact surface triboelectric charge density, ε0For permittivity of vacuum, d is aforementioned dielectric polymer film layer
Vertical interval between the second surface of first surface and air-sensitive film layer.In view of above it can be seen that output voltage Voc is with exhausted
The frequency of oscillation of edge polymer film layer is unrelated, only relevant with device architecture.Therefore, the device of ad hoc structure is in different in flow rate
Gas effect under, output voltage Voc is constant.Understand in conjunction with formula (1) and formula (2), dividing potential drop V on gas sensor with
Air-flow velocity is unrelated, is solely dependent upon the size of gas sensor unit resistance R.Under gas with various concentration, the change of gas sensor unit resistance R will
Being changed into output electric current and the change of output voltage, therefore output electric current and output voltage by monitoring devices just can be learnt and treat
Survey the concentration of gas.
Fig. 5 is the signal deteching circuit of one specific embodiment of the present invention, and its function is for blowing absolutely when characteristics of contaminated respiratory droplets air-flow
Edge polymer film layer shakes so that the first surface of polymer film layer constantly contacts with the second surface of air-sensitive film layer
And separation, thus produce charge inducing the current signal by power supply outfan output alternation, then utilize rectification circuit to incite somebody to action
Alternating current is changed into DC signal.The dense of gas to be measured (alcohol gas) is judged by galvanometer reading (angle of deflection)
Degree.
Before using, when the concentration of alcohol gas is zero, reconcile Rf resistance so that it is meet following formula:
When there being finite concentration alcohol gas to pass through, now galvanometer can deflect, its deflection angle and alcohol gas concentration
It is directly proportional.Such as formula (4), in formula, θ is galvanometric deflection angle, and n is the concentration of alcohol gas, and K is proportionality coefficient:
θ=Kn (4)
In the case of gas concentration to be measured reaches necessarily, now lumination of light emitting diode, and luminous intensity is along with gas
The increase of concentration and become strong, therefore, just be can determine that the concentration range of extraneous gas to be measured by the light and shade state of light emitting diode.
Fig. 6 is that the present invention detects variable concentrations air-flow test result figure, as can be seen from Figure 6: along with gas to be measured is dense
The increase of degree, the output electric current of the self energizing sensor that the present invention provides increases.
The principle of above-described embodiment only illustrative present invention and effect thereof, not for limiting the present invention.Any ripe
Above-described embodiment all can be modified under the spirit and the scope of the present invention or change by the personage knowing this technology.Cause
This, have usually intellectual such as complete with institute under technological thought without departing from disclosed spirit in art
All equivalences become are modified or change, and must be contained by the claim of the present invention.
Claims (10)
1. the self energizing sensor for alcohol detection, it is characterised in that include first component and second component；
Gas sensor unit that described first component includes being deposited on glass substrate upper and lower surface and lower conductive electrode；Institute
Stating gas sensor unit and include interdigital electrode and the air-sensitive film layer being deposited in interdigital electrode, described air-sensitive film layer can respond second
Alcohol gas；
Described second component includes insulating polymer film layer and directly fits with described insulating polymer film layer upper surface
Upper conductive electrode, described insulating polymer film layer material is flexible material；
Described first component and described second component are fixed by insulating carriage so that described air-sensitive film layer and described insulation
Thin polymer film is arranged and mutually isolated face-to-face；Under airflow function, described insulating polymer film layer can be with described air-sensitive
Thin layer forms contact-separation circulation, thus produces charge inducing, and passes through described upper conductive electrode and lower conductive electrode to energy
Enough measure the testing circuit output signal of telecommunication of gas sensor unit electrical parameter change.
A kind of self energizing sensor for alcohol detection the most according to claim 1, it is characterised in that described insulation gathers
Friction electrode sequence difference is there is between material and the material of described air-sensitive film layer of compound thin layer.
A kind of self energizing sensor for alcohol detection the most according to claim 2, it is characterised in that described insulation gathers
The material of compound thin layer is nylon, Teflon, polyvinyl fluoride or polyimides.
A kind of self energizing sensor for alcohol detection the most according to claim 2, it is characterised in that described air-sensitive is thin
The material of film layer is SnO2、γ-Fe2O3、α-Fe2O3Or ZnO2。
A kind of self energizing sensor for alcohol detection the most according to claim 1, it is characterised in that described interdigital electricity
Parameter specific as follows: width: 25 μm～50 μm, spacing: 25 μm～50 μm, length: 800 μm～4500 μm, thickness: 100nm
～200nm；The material of interdigital electrode is Al or Au.
A kind of self energizing sensor for alcohol detection the most according to claim 1, it is characterised in that described upper conduction
The material of electrode or lower conductive electrode is Al, Ni, Cu, Ag or Au, and its thickness range is 30～70 microns.
7. the preparation method for the self energizing sensor of alcohol detection, it is characterised in that comprise the following steps:
Step A: the preparation of first component；Conductive electrode under glass substrate bottom surface deposition clean, that be dried, and at described glass
Substrate top surface prepares interdigital electrode, then uses film-forming process deposition gas sensitive film layer in described interdigital electrode；
Step B: the preparation of second component；The one side of insulating polymer film layer with flexibility deposits conductive electrode；
Step C: the preparation of sensor；Described first component and described second component are fixed by insulating carriage so that the
In one parts, in air-sensitive film layer and second component, insulating polymer film layer is isolated and arranges face-to-face, and makees at air-flow
Contact-separation circulation can be formed under with, thus convert mechanical energy into electric energy；Then connection detection circuit is to collect electric energy also
The electrical parameter change of detection gas sensor unit.
The preparation method of a kind of self energizing sensor for alcohol detection the most according to claim 7, it is characterised in that
Existence friction electrode sequence difference between material and the material of described air-sensitive film layer of described insulating polymer film layer, wherein,
The material of air-sensitive film layer is SnO2、γ-Fe2O3、α-Fe2O3Or ZnO2, the material of insulating polymer film layer is nylon, ferrum fluorine
Dragon, polyvinyl fluoride or polyimides.
The preparation method of a kind of self energizing sensor for alcohol detection the most according to claim 7, it is characterised in that
The parameter of described interdigital electrode is specific as follows: width: 25 μm～50 μm, spacing: 25 μm～50 μm, length: 800 μm～4500 μ
M, thickness: 100nm～200nm, the material of interdigital electrode is Al or Au.
The preparation method of a kind of self energizing sensor for alcohol detection the most according to claim 7, its feature exists
In, the material of described upper conductive electrode or lower conductive electrode is Al, Ni, Cu, Ag or Au, and its thickness range is 30～70 microns.
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