CN106523780A - Pendulum valve locking ring component of semiconductor etching equipment and locking ring handle extending fixture of pendulum valve locking ring component - Google Patents
Pendulum valve locking ring component of semiconductor etching equipment and locking ring handle extending fixture of pendulum valve locking ring component Download PDFInfo
- Publication number
- CN106523780A CN106523780A CN201611075499.8A CN201611075499A CN106523780A CN 106523780 A CN106523780 A CN 106523780A CN 201611075499 A CN201611075499 A CN 201611075499A CN 106523780 A CN106523780 A CN 106523780A
- Authority
- CN
- China
- Prior art keywords
- lock ring
- pendulum valve
- handle
- ring handle
- tool
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K35/00—Means to prevent accidental or unauthorised actuation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/44—Mechanical actuating means
- F16K31/60—Handles
Abstract
The invention provides a pendulum valve locking ring component of semiconductor etching equipment and a locking ring handle extending fixture of the pendulum valve locking ring component. The pendulum valve locking ring component comprises a pendulum valve locking ring and a pendulum valve casing for accommodating the pendulum valve; a locking ring handle is arranged at the periphery of a ring body of the pendulum valve locking ring and is provided with a corresponding locking ring handle extending fixture; the locking ring handle extending fixture is arranged on an outer ring of the handle in a sleeving manner; and the locking ring handle extending fixture is used for extending the locking ring handle and driving the locking ring handle to rotate, so that the pendulum valve locking ring aligns to and is fixed with the pendulum valve casing. According to the pendulum valve locking ring component disclosed by the invention, the problem that the pendulum valve locking ring component is worn and deforms due to slot aligning in a mounting process is solved.
Description
Technical field
The present invention relates to technical field of semiconductors, the pendulum valve lock ring component of more particularly to a kind of semiconductor etching device and
Its lock ring handle extends tool.
Background technology
The pendulum valve lock ring component of existing semiconductor etching device generally includes pendulum valve lock ring and pendulum valve shell,
The pendulum valve shell is used to accommodate pendulum valve lock ring.Specifically, Fig. 1 is refer to, Fig. 1 show existing pendulum valve lock ring knot
Structure schematic diagram.The pendulum valve lock 1 has ring body, and the ring body is provided with multiple alignment draw-in grooves 3 for one week, and the ring body periphery sets
It is equipped with lock ring handle 2.Incorporated by reference to the structural representation of the existing pendulum valve shell shown in Fig. 2.On pendulum valve shell 4, correspondence sets
It is equipped with multiple dowel holes 5, the layout of the dowel hole 5, shape, number and the layout for being directed at draw-in groove 3 in the ring body,
Shape is consistent with number.
The structural representation of the pendulum valve lock ring component of the prior art with reference to shown in Fig. 3.The pendulum valve lock ring component
When mounted, by hand-held lock ring handle 2, rotate lock ring handle 2 and drive pendulum valve lock ring 1 to rotate so that on pendulum valve lock ring 1
Alignment draw-in groove 3 (with reference to Fig. 1) in dowel hole 5 on insertion pendulum valve shell 4, by pendulum valve lock ring 1 and pendulum valve shell 4
It is fixed, realize the assembling of pendulum valve lock ring component.
In the assembling process of above-mentioned pendulum valve lock ring component, Jing often occurs to be directed at draw-in groove abrasion deformation, and pendulum valve lock
The assembling of ring assemblies is wasted time and energy.
The content of the invention
The problem that the present invention is solved is to provide a kind of pendulum valve lock ring component and its lock ring handle of semiconductor etching device
Extend tool, can solve the problem that the alignment draw-in groove abrasion deformation problem in pendulum valve lock ring component mounting process, and be easily assembled to.
In order to solve the above problems, the present invention provides a kind of pendulum valve lock ring component of semiconductor etching device, the pendulum
Valve lock ring component includes：Pendulum valve lock ring and the pendulum valve shell for accommodating pendulum valve, the ring body of the pendulum valve lock ring
Periphery be provided with lock ring handle, there is the lock ring handle corresponding lock ring handle to extend tool, be sheathed on outside the handle
Circle；The lock ring handle extends tool for extending the lock ring handle and driving the lock ring handle to rotate, will be described
Pendulum valve lock ring is aligned and is fixed with the pendulum valve shell.
Alternatively, the material of the lock ring handle prolongation tool is different from the material of the lock ring handle, the lock ring hand
It is Teflon that handle extends the material of tool.
Alternatively, the length of the lock ring handle is 8-10 centimetre, and it is 18-22 that the lock ring handle extends the length of tool
Centimetre.
Alternatively, a diameter of 3.2-5.2 centimetre of the lock ring handle, weight are 1.5-2.5 kilogram, and the lock ring extends
The diameter range of tool is 4.2-6.2 centimetre.
Alternatively, the lock ring handle is extended tool and is fixed by dowel hole with the lock ring handle.
Alternatively, multiple alignment draw-in grooves are provided with the ring body of the pendulum valve, on the shell of the pendulum valve lock ring with
The corresponding position of the ring body is provided with multiple alignment pins, extends tool by the lock ring handle and drives the lock ring handle
Rotation realizes the alignment pin and the correspondence for being directed at draw-in groove.
Correspondingly, the present invention also provides a kind of pendulum valve lock ring handle prolongation tool of semiconductor etching device, for clock
The prolongation and fixation of pendulum valve lock ring handle, the pendulum valve lock ring handle extend tool and are socketed on the pendulum valve lock ring handle
Outside, and the pendulum lock ring handle extends tool for driving the pendulum valve lock ring handle to rotate.
Alternatively, the connection that the pendulum valve lock ring handle extends between tool and the pendulum valve handle is detachably to connect
Connect.
Alternatively, the pendulum valve lock ring handle prolongation tool is set in the pendulum valve lock ring handle outer.
Alternatively, the pendulum valve lock ring handle extends one end and the pendulum valve lock ring handle and the clock of tool
The peripheral contacts of pendulum valve lock ring, the pendulum valve lock ring handle extend the other end of tool beyond the pendulum valve lock ring handle
The length of the other end is 9-13 centimetre.
Compared with prior art, there is the lock ring handle of the pendulum valve lock that the present invention is provided corresponding lock ring handle prolongation to control
Tool, is sheathed on the handle outer ring, extends tool for extending the lock ring handle and driving institute by the lock ring handle
The rotation of lock ring handle is stated, the pendulum valve lock ring is aligned and is fixed with the pendulum valve shell, as a result of lock ring hand
Handle extends tool so that pendulum valve lock ring is more prone to be aligned with pendulum valve shell, it is to avoid the mill for causing in alignment procedures repeatedly
The problem of the alignment draw-in groove of damage, assembling pendulum valve lock ring component that can be time saving and energy saving；
Further optimize, the length of the lock ring handle is 8-10 centimetre, and it is 18- that lock ring handle extends the length of tool
22 centimetres, lock ring handle extends the length of tool pin lock ring handle and arranges, it is easier to drive lock ring handle to be rotated；The present invention
The lock ring handle of offer extends tool, is directly set in lock ring handle outer, easily can be dismantled in use
And install.
Description of the drawings
Fig. 1 is the pendulum valve lock ring structural representation of prior art；
Fig. 2 is the structural representation of the pendulum valve shell of prior art；
Fig. 3 is the structural representation of the pendulum valve lock ring component of prior art；
Fig. 4 is the structural representation of the pendulum valve lock ring of one embodiment of the invention；
Fig. 5 is the structural representation of the pendulum valve lock ring component of one embodiment of the invention.
Specific embodiment
In the assembling process of existing pendulum valve lock ring component, Jing often occurs to be directed at draw-in groove abrasion deformation, and pendulum valve
The assembling of lock ring component is wasted time and energy.With reference to Fig. 3, as the material of pendulum valve lock ring 1 and lock ring handle 2 is metal, clock
The weight of pendulum valve lock ring 1 is 1 kilogram, and the weight of lock ring handle 2 is 1 kilogram and the length of lock ring handle 2 is usually 9 centimetres.
When rotation lock ring handle 2 is attached to pendulum valve lock ring 1 on pendulum valve shell 4, it is difficult to promoted by shorter lock ring handle 2
More heavy pendulum valve lock ring, needs one hand to lift pendulum valve lock ring and realized being directed at fluting and determined by multiple rotation repeatedly
The alignment and positioning of position aperture, easily causes the deformation of alignment draw-in groove in alignment procedures repeatedly, and whole installation process is time-consuming to take
Power.
Inventor has found, for semiconductor etching device, pendulum valve lock ring 1 must have certain weight to meet half
The security of semiconductor process, the needs of stability, therefore, the weight of pendulum valve lock ring 1 cannot mitigate, and if list can be reduced
Hand rest lifts pendulum valve lock ring, and avoids repeatedly repeatedly in rotation process to being directed at the abrasion of draw-in groove, being just avoided that alignment draw-in groove
Deformation so that the assembling process of pendulum valve lock ring component is more easily and quickly.
With reference to Fig. 1, it is its heavier-weight to cause pendulum valve lock ring 1 to be difficult to one of the reason for rotating, and Another reason is
Lock ring handle 2 is too short relative to pendulum valve lock ring 1, and the diameter of the pendulum valve lock ring 1 is usually 27.5 centimetres, and weight is 2 kilograms,
And the length of lock ring handle 2 is only 9 centimetres, pendulum valve lock ring 1 is rotated by lock ring handle 2 during installation more difficult.If
The length of lock ring handle 2 can be extended, then can be relatively easy to apply external force to which, realize that lock ring handle 2 drives pendulum valve
The rotation of lock ring 1, but, as the design of semiconductor etching device etching cavity is limited, the length of lock ring handle 2 is to be relatively fixed
, the length for increasing lock ring handle 2 certainly will need the structure of the etching cavity to semiconductor etching device to be adjusted, and cost is too
It is high.In order to solve the above problems, inventor considers, the periphery of lock ring handle 2 is increased a mechanical mechanism, is tied by the machinery
Structure can apply external force to lock ring handle 2, promote lock ring handle 2 to drive pendulum valve lock ring 1 to carry out in the presence of the external force
Rotate.More preferred, the frame for movement can be flexibly installed and be split with lock ring handle 2, so locked in pendulum valve
After ring is completed with pendulum valve shell, the frame for movement can easily be removed.
Inventor considers, the frame for movement can be a hole being arranged in lock ring handle 2 and can be with the hole pair
The T word parts answered, the T word parts have horizontal part and the vertical portion below horizontal part, in use the vertical portion
Lower section insert in the hole, lock ring handle 2 can be rotated by the horizontal part of top, lock ring handle 2 can be promoted, realize pendulum valve
The rotation of lock ring 1 and alignment.But, such structure is complex, and needs accurate design T words portion, and needs
Punch in lock ring handle 2, and the size in the hole can be limited by lock ring handle 2, it is impossible to be excessive, and too little hole is unfavorable for T
The active force of word portion conductive outer.
More preferred, inventor proposes, the frame for movement should be arranged on the extended line of lock ring handle, and can
Convenient installing/dismounting.By promoting the frame for movement, it is possible to promote lock ring handle.Specifically, the present invention is in lock ring handle
Outside is arranged handle and extends tool (extending tool as aforesaid frame for movement by the use of the handle), and the handle extends tool can
Extend the lock ring handle along the radial direction of pendulum valve lock ring 1, and drive the lock ring handle to rotate, by the pendulum valve
Lock ring is aligned and is fixed with the pendulum valve shell.After the completion of pendulum valve lock ring assembling components, handle can be extended tool
Separate with lock ring handle.
Specifically, the structural representation of the pendulum valve lock ring of the one embodiment of the invention with reference to shown in Fig. 4.Pendulum valve is locked
Ring 10 has ring body, and the diameter range of pendulum valve lock ring 10 is 25.5-29 centimetre, such as in the present embodiment, the pendulum valve
A diameter of 27.5 centimetres of lock ring 10, material are aluminium alloy, and weight is 2 kilograms, and the ring body of pendulum valve lock ring 10 is provided with for one week
Multiple alignment draw-in grooves 30, described to be directed at the generally circular in shape of draw-in groove 30, a diameter of 27.5 centimetres, the alignment draw-in groove 30 is along ring body
It is uniformly distributed.The length range of lock ring handle 20 is 8-10 centimetre, in one embodiment of the invention, the lock ring handle 20
Length be 9 centimetres, the diameter range of lock ring handle 20 is 3.2-5.2 centimetre, and in the present embodiment, lock ring handle 20 is a diameter of
4.2 centimetres, its material is aluminium alloy, and the lock ring handle 20 is connected with the periphery of the ring body, and is fixedly connected on institute
State the outer of ring body to place.
The material that the lock ring handle extends tool 40 is different from the material of the lock ring handle, and the lock ring handle extends
The material of tool is Teflon.Lock ring handle extends the outer of one end of one end and the lock ring handle 20 of tool 40 and ring body
Enclose and contact, lock ring handle extends the other end of tool 40 and surmounts the other end of lock ring handle 20 and stretch out, lock ring hand
It is 11 centimetres that handle extends the length of the other end that the other end of tool 40 surmounts lock ring handle 20.So it is designed to greatest extent
Applying external force.In other examples, lock ring handle extend tool 40 one end can with the lock ring handle 20 in the middle of
Any position is fixed, and the other end extends, and can equally realize the effect of the prolongation and promotion of lock ring handle 20.
Used as one embodiment, the internal diameter that the lock ring handle extends tool 40 is bigger by 1 than the external diameter of the lock ring handle 20
Cm.The lock ring handle extends tool 40 and logical with the lock ring handle 20 directly can be inserted in, and need not pass through
Screw nut structure, can so be relatively easy to apply external force, and easy to disassemble.
Lock ring handle is extended the socket relation of tool 40 and lock ring handle 20 and can also be fixed by screw thread mode
Realize, or pin pin-and-hole mode is fixed or spring mode is fixed and realized.
Lock ring handle extends tool 40 and is also not limited to fix with the socket relation of lock ring handle 20, and both can not also consolidate
It is fixed, the prolongation of lock ring handle 20 can also be realized in certain circumstances and promotes lock ring handle 20 to rotate.Such as, lock ring handle
Extending has certain interval between tool 40 and lock ring handle 20, lock ring handle 20 is peripheral to be extended in tool with the lock ring handle
Side connects, as long as lock ring handle extends the side that one end of tool 40 is socketed on the lock ring handle 20, the other end exceedes lock ring
The opposite side of handle 20, just realizes the prolongation of lock ring handle 20, can extend tool 40 by lock ring handle and promote lock ring handle
20。
With reference to Fig. 5, multiple alignment pins are set, the shape of the alignment pin, position, layout and pendulum valve on pendulum valve shell 40
The shape of the alignment draw-in groove in the ring body of lock ring, position are corresponding with layout.Tool 40 is extended by the lock ring handle and drives institute
The rotation for stating lock ring handle 20 realizes the alignment pin and the correspondence for being directed at draw-in groove, realizes pendulum valve lock ring with pendulum valve shell
It is aligned and fixed.
Correspondingly, the present invention also provides a kind of pendulum valve lock ring handle prolongation tool 40 of semiconductor etching device, is used for
The prolongation and fixation of pendulum valve lock ring handle, the pendulum valve lock ring handle extend tool and are socketed on the pendulum valve lock ring handle
Outside, and the pendulum lock ring handle extends tool and is used to drive the pendulum valve lock ring handle to rotate.
More preferred, pendulum valve lock ring handle of the present invention extends between tool 40 and the pendulum valve handle 20
Connection be dismountable connection.In one embodiment of the invention, the pendulum valve lock ring handle extends tool 40 and passes through
It is peripheral that bolt thread mode is set in the pendulum valve lock ring handle 20, so more favorably transmits external force, is more prone to promote clock
Pendulum valve lock ring.
The pendulum valve lock ring handle extends one end of tool 40 and the pendulum valve lock ring handle 20 and the pendulum
The peripheral contacts of valve lock ring 10, the pendulum valve lock ring handle extend the other end of tool 40 and exceed the pendulum valve lock ring handle
The other end length be 11 centimetres.
To sum up, there is the lock ring handle of the pendulum valve lock that the present invention is provided corresponding lock ring handle to extend tool, be sheathed on
The handle outer ring, extends tool for extending the lock ring handle and driving the lock ring handle by the lock ring handle
Rotate, the pendulum valve lock ring be aligned and fixed with the pendulum valve shell, extend tool as a result of lock ring handle,
So that pendulum valve lock ring is more prone to be aligned with pendulum valve shell, it is to avoid the alignment draw-in groove of the abrasion for causing in alignment procedures repeatedly
Problem, assembling pendulum valve lock ring component that can be time saving and energy saving；
Further optimize, the length of the lock ring handle is 8-10 centimetre, and it is 18- that lock ring handle extends the length of tool
22 centimetres, lock ring handle extends the length of tool pin lock ring handle and arranges, it is easier to drive lock ring handle to be rotated；
The lock ring handle that the present invention is provided extends tool, is directly set in lock ring handle outer, in use can be with
Easily dismantled and installed.
Therefore, above-mentioned preferred embodiment technology design only to illustrate the invention and feature, its object is to allow and are familiar with this
The personage of item technology will appreciate that present disclosure and implement according to this, can not be limited the scope of the invention with this.It is all
The equivalence changes made according to spirit of the invention or modification, should all be included within the scope of the present invention.
Claims (10)
1. the pendulum valve lock ring component of a kind of semiconductor etching device, the pendulum valve lock ring component include：Pendulum valve lock ring and
For accommodating the pendulum valve shell of pendulum valve, it is characterised in that the periphery of the ring body of the pendulum valve lock ring is provided with lock ring hand
There is corresponding lock ring handle to extend tool for handle, the lock ring handle, be sheathed on the handle outer ring；The lock ring handle extends
Tool for the lock ring handle being extended and driving the lock ring handle to rotate, by the pendulum valve lock ring and the pendulum
Valve shell is aligned and fixes.
2. the pendulum valve lock ring component of semiconductor etching device as claimed in claim 1, it is characterised in that the lock ring handle
The material for extending tool is different from the material of the lock ring handle, and it is Teflon that the lock ring handle extends the material of tool.
3. the pendulum valve lock ring component of semiconductor etching device as claimed in claim 1, it is characterised in that the lock ring handle
Length be 8-10 centimetre, it is 18-22 centimetre that the lock ring handle extends the length of tool.
4. the pendulum valve lock ring component of semiconductor etching device as claimed in claim 1, it is characterised in that the lock ring handle
A diameter of 3.2-5.2 centimetre, weight is 1.5-2.5 kilogram, and it is 4.2-6.2 li that the lock ring extends the diameter range of tool
Rice.
5. the pendulum valve lock ring component of semiconductor etching device as claimed in claim 1, it is characterised in that the lock ring handle
Extend tool to fix by dowel hole with the lock ring handle.
6. the pendulum valve lock ring component of semiconductor etching device as claimed in claim 1, it is characterised in that the pendulum valve
Multiple alignment draw-in grooves are provided with ring body, position corresponding with the ring body is provided with multiple on the shell of the pendulum valve lock ring
Alignment pin, extends tool by the lock ring handle and drives the rotation of the lock ring handle to realize the alignment pin and be directed at draw-in groove
Correspondence.
7. a kind of pendulum valve lock ring handle of semiconductor etching device extends tool, prolongation for pendulum valve lock ring handle and solid
It is fixed, it is characterised in that the pendulum valve lock ring handle extends the outside that tool is socketed on the pendulum valve lock ring handle, and institute
State pendulum lock ring handle and extend tool for driving the pendulum valve lock ring handle to rotate.
8. the pendulum valve lock ring handle of semiconductor etching device as claimed in claim 7 extends tool, it is characterised in that described
The connection that pendulum valve lock ring handle extends between tool and the pendulum valve handle is to be detachably connected.
9. the pendulum valve lock ring handle of semiconductor etching device as claimed in claim 7 extends tool, it is characterised in that described
Pendulum valve lock ring handle extends tool and is set in the pendulum valve lock ring handle outer.
10. the pendulum valve lock ring handle of semiconductor etching device as claimed in claim 7 extends tool, it is characterised in that institute
The one end for stating pendulum valve lock ring handle prolongation tool is connect with the periphery of the pendulum valve lock ring handle and the pendulum valve lock ring
Touch, it is 9- beyond the length of the other end of the pendulum valve lock ring handle that the pendulum valve lock ring handle extends the other end of tool
13 centimetres.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611075499.8A CN106523780A (en) | 2016-11-30 | 2016-11-30 | Pendulum valve locking ring component of semiconductor etching equipment and locking ring handle extending fixture of pendulum valve locking ring component |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611075499.8A CN106523780A (en) | 2016-11-30 | 2016-11-30 | Pendulum valve locking ring component of semiconductor etching equipment and locking ring handle extending fixture of pendulum valve locking ring component |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106523780A true CN106523780A (en) | 2017-03-22 |
Family
ID=58354020
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611075499.8A Pending CN106523780A (en) | 2016-11-30 | 2016-11-30 | Pendulum valve locking ring component of semiconductor etching equipment and locking ring handle extending fixture of pendulum valve locking ring component |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106523780A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5577707A (en) * | 1995-12-18 | 1996-11-26 | Vat Holding Ag | Slide valve |
| FR2866961A1 (en) * | 2004-03-01 | 2005-09-02 | Jean Marc Villey | Adjustable-length handle e.g. for operating an overhead tap or grasping a strap when standing in public transport comprises rod that slides in sleeve and locks in various positions |
| CN1860318A (en) * | 2003-09-29 | 2006-11-08 | Mks仪器公司 | Valve assembly having improved conductance control |
| CN101196258A (en) * | 2006-12-07 | 2008-06-11 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Method for swaying valve and controlling reaction chamber pressure |
| CN103866399A (en) * | 2014-03-27 | 2014-06-18 | 上海华力微电子有限公司 | Airflow control device for decouple reaction ion etching equipment |
| DE202014005235U1 (en) * | 2014-06-25 | 2014-07-09 | Automatik Plastics Machinery Gmbh | Approach valve for a granulator |
| CN203880134U (en) * | 2014-06-20 | 2014-10-15 | 苏州都克安防科技有限公司 | Plug valve lock |
| CN104637766A (en) * | 2013-11-14 | 2015-05-20 | 中微半导体设备(上海)有限公司 | Reaction cavity structure and semiconductor plasma processing system |
-
2016
- 2016-11-30 CN CN201611075499.8A patent/CN106523780A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5577707A (en) * | 1995-12-18 | 1996-11-26 | Vat Holding Ag | Slide valve |
| CN1860318A (en) * | 2003-09-29 | 2006-11-08 | Mks仪器公司 | Valve assembly having improved conductance control |
| FR2866961A1 (en) * | 2004-03-01 | 2005-09-02 | Jean Marc Villey | Adjustable-length handle e.g. for operating an overhead tap or grasping a strap when standing in public transport comprises rod that slides in sleeve and locks in various positions |
| CN101196258A (en) * | 2006-12-07 | 2008-06-11 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Method for swaying valve and controlling reaction chamber pressure |
| CN104637766A (en) * | 2013-11-14 | 2015-05-20 | 中微半导体设备(上海)有限公司 | Reaction cavity structure and semiconductor plasma processing system |
| CN103866399A (en) * | 2014-03-27 | 2014-06-18 | 上海华力微电子有限公司 | Airflow control device for decouple reaction ion etching equipment |
| CN203880134U (en) * | 2014-06-20 | 2014-10-15 | 苏州都克安防科技有限公司 | Plug valve lock |
| DE202014005235U1 (en) * | 2014-06-25 | 2014-07-09 | Automatik Plastics Machinery Gmbh | Approach valve for a granulator |
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| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170322 |