CN101196258A - Method for swaying valve and controlling reaction chamber pressure - Google Patents
Method for swaying valve and controlling reaction chamber pressure Download PDFInfo
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- CN101196258A CN101196258A CNA2006101649043A CN200610164904A CN101196258A CN 101196258 A CN101196258 A CN 101196258A CN A2006101649043 A CNA2006101649043 A CN A2006101649043A CN 200610164904 A CN200610164904 A CN 200610164904A CN 101196258 A CN101196258 A CN 101196258A
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- reaction chamber
- control
- pressure
- pendulum valve
- bleeding point
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Abstract
The invention discloses a swing valve and the method controlling pressure in reacting cavity through the swing valve, which is characterized in that: the swing valve is positioned at an air suction port of the reacting cavity, which is hinged with the reacting cavity through a shaft and is able to rotate horizontally along the shaft to make the swing valve to move in level opposite to the air suction port; besides, the swing valve is able to rotate vertically along the shaft to facilitate the swing valve rotating opposite to the air suction port; and the two moving as in level or rotate are can be performer symmetrically as well independently. A control device can automatically control the moving and rotating of the swing valve based on the set pressure value and the gas flux supplies for the reacting cavity, so as to control the size that the swing valve opening to the air suction port and further to control the pressure in the reacting cavity. The invention is mainly suitable for reacting cavity used for semiconductor etching equipment and other reacting cavities.
Description
Technical field
The present invention relates to a kind of valve and reach the technology of passing through this valve pilot pressure, relate in particular to the valve that a kind of can regulate is opened size, and pass through the method for the big or small control chamber chamber pressure of unlatching of regulating valve.
Background technique
The pendulum valve is that a kind of can the adjusting according to setting air pressure opened big or small valving.In the etching processing procedure that semiconductor is made, the stable uniformity and the stability to etching of pressure in reaction chamber is most important, and the control of pressure stability is mainly realized by the pendulum valve, the pendulum valve is arranged at the bleeding point place of reaction chamber, by regulating the unlatching size of pendulum valve, the pressure in the may command reaction chamber.Therefore, the pendulum valve performance has crucial influence to the etching result.Have certain defective but put valve pressure control ability at present, especially at high pressure conditions, the pressure control ability is poor.
The structure of pendulum valve of the prior art and the mode of pressure control thereof are shown in Fig. 1 a, Fig. 1 b, and Fig. 1 a is a pendulum valve closed condition, and Fig. 1 b is a pendulum valve half-open position.The pendulum valve is a circular pendulum valve, and shutoff is at the bleeding point place.This circle pendulum valve can be around an axial direction rotation, and the mode of pendulum valve and bleeding point relative movement is the mode of translational motion.
After setting a force value, feed the gas of certain flow to reaction chamber, putting valve then can rotate according to the flow and the setup pressure value that feed gas in the reaction chamber, be translated apart bleeding point, by the unlatching size of control pendulum valve, the pressure in the control reaction chamber reaches the force value of setting.
As shown in Figure 2, will put valve, be divided into for 1000 steps by being closed to complete opening fully, feeding flow to reaction chamber is the process gas of 50sccm, utilizes the pressure in the above-mentioned pendulum valve control reaction chamber, obtains putting the corresponding relation figure of opening of valves step number and pressure, detail parameters changes as shown in table 1
Table 1: the relation table of pendulum opening of valves step number and pressure.
| Pressure (millitorr) | 10 | 20 | 30 | 40 | 50 | 60 | 70 | 80 | 90 |
| Step number (step) | 380 | 155 | 132 | 116 | 108 | 103 | 98 | 96 | 95 |
As can be seen, along with the rising of pressure, every variation 10 millitorrs of pressure, the variable quantity of the step number of pendulum valve reduces, especially in high pressure, for example in 80 millitorrs, the step number of pendulum valve was 96 steps, and pressure increases by 10 millitorrs time 90 millitorrs, the step number of pendulum valve only reduces by 1 step, and the difference in this 1 step is with respect to pendulum valve 1000 steps from the full cut-off to the standard-sized sheet, and is very little, and the pendulum valve is depended merely on the mode pressure control of translation, and the pressure control ability is poor.
Summary of the invention
The purpose of this invention is to provide the strong pendulum valve of a kind of pressure control ability and pass through the method that this pendulum valve is controlled reaction chamber pressure.
The objective of the invention is to be achieved through the following technical solutions:
Pendulum valve of the present invention is installed on the bleeding point place of reaction chamber, is used to control the pressure of reaction chamber, and described pendulum valve is hinged by axle and reaction chamber,
Described pendulum valve can be done laterally rotation around axle, makes the relative bleeding point of pendulum valve do translational motion;
Described pendulum valve can vertically rotate around axle, and the relative bleeding point of pendulum valve is rotated;
Described translational motion with rotatablely move and can carry out simultaneously, also can carry out separately.
Described pendulum valve is electrically connected with control gear, and described control gear is controlled the translational motion of pendulum valve automatically and/or rotatablely moved.
The method of control reaction chamber pressure of the present invention, by controlling above-mentioned pendulum valve to the unlatching of bleeding point size control reaction chamber pressure, described pendulum valve is to the translational motion and/or the realization that rotatablely moves by the relative bleeding point of pendulum valve of the unlatching size of bleeding point.
The translational motion of described pendulum valve and/or rotatablely move is controlled according to the force value of setting automatically by control gear.
Described control gear is also put the translational motion of valve according to the gas flow control that infeeds to reaction chamber and/or is rotatablely moved.
When the gas flow that infeeds to reaction chamber is 50sccm, and the pressure of setting is during smaller or equal to 50mT, and control gear is by the pressure of the translational motion control reaction chamber of the relative bleeding point of control pendulum valve;
When the gas flow that infeeds to reaction chamber is 50sccm, and the pressure of setting is during greater than 50mT, and control gear is by the translational motion of the relative bleeding point of control pendulum valve and the pressure of the control reaction chamber that rotatablely moves.
When the gas flow that infeeds to reaction chamber is 75sccm, and the pressure of setting is during smaller or equal to 45mT, and control gear is by the pressure of the translational motion control reaction chamber of the relative bleeding point of control pendulum valve;
When the gas flow that infeeds to reaction chamber is 75sccm, and the pressure of setting is during greater than 45mT, and control gear is by the translational motion of the relative bleeding point of control pendulum valve and the pressure of the control reaction chamber that rotatablely moves.
When the gas flow that infeeds to reaction chamber is 100sccm, and the pressure of setting is during smaller or equal to 40mT, and control gear is by the pressure of the translational motion control reaction chamber of the relative bleeding point of control pendulum valve;
When the gas flow that infeeds to reaction chamber is 100sccm, and the pressure of setting is during greater than 40mT, and control gear is by the translational motion of the relative bleeding point of control pendulum valve and the pressure of the control reaction chamber that rotatablely moves.
When the gas flow that infeeds to reaction chamber is 150sccm, and the pressure of setting is during smaller or equal to 35mT, and control gear is by the pressure of the translational motion control reaction chamber of the relative bleeding point of control pendulum valve;
When the gas flow that infeeds to reaction chamber is 150sccm, and the pressure of setting is during greater than 35mT, and control gear is by the translational motion of the relative bleeding point of control pendulum valve and the pressure of the control reaction chamber that rotatablely moves.
When the gas flow that infeeds to reaction chamber is 200sccm, and the pressure of setting is during smaller or equal to 30mT, and control gear is by the pressure of the translational motion control reaction chamber of the relative bleeding point of control pendulum valve;
When the gas flow that infeeds to reaction chamber is 200sccm, and the pressure of setting is during greater than 30mT, and control gear is by the translational motion of the relative bleeding point of control pendulum valve and the pressure of the control reaction chamber that rotatablely moves.
As seen from the above technical solution provided by the invention, the method for pendulum valve of the present invention and control reaction chamber pressure because the pendulum valve can be done laterally rotation around axle, makes the relative bleeding point of pendulum valve do translational motion; Also can vertically rotate, the relative bleeding point of pendulum valve is rotated around axle; Translational motion with rotatablely move and can carry out simultaneously, also can carry out separately.Can be simultaneously or separately control pendulum valve translational motion and rotatablely move, in order to the unlatching size of control pendulum valve, and then the control reaction chamber pressure to bleeding point.The pressure control ability is strong.
Mainly be applicable to the reaction chamber of semiconductor etching device, also be applicable to other similar chamber.
Description of drawings
Fig. 1 a is a pendulum valve closing state schematic representation in the prior art;
Fig. 1 b is the view of pendulum opening of valves pressure control in the prior art;
Fig. 2 is for feeding flow when being the process gas of 50sccm to reaction chamber in the prior art, the step number of pendulum opening of valves and the interior pressure dependence figure of reaction chamber;
Fig. 3 a is pendulum valve closing state schematic representation among the present invention;
Fig. 3 b among the present invention in the view of low-pressure state bottom opening of valves pressure control;
Fig. 3 c among the present invention in the view of high pressure conditions bottom opening of valves pressure control.
Embodiment
Pendulum valve of the present invention is installed on the bleeding point place of reaction chamber, is used to control the pressure of reaction chamber, and described pendulum valve is hinged by axle and reaction chamber, and described reaction chamber mainly refers to the reaction chamber of semiconductor etching device, also can be other chamber.The reaction chamber chamber is provided with air supply opening and bleeding point, and process gas infeeds reaction chamber by air supply opening, and reacted gas is taken away by bleeding point.
Its preferable embodiment is shown in Fig. 3 a, Fig. 3 b, Fig. 3 c, and the pendulum valve can be done laterally rotation around axle, makes the relative bleeding point of pendulum valve do translational motion; Also can vertically rotate, the relative bleeding point of pendulum valve is rotated around axle; Described translational motion with rotatablely move and can carry out simultaneously, also can carry out separately.
The pendulum valve is electrically connected with control gear, and control gear can be controlled the translational motion of pendulum valve automatically and rotatablely move.
The method of control reaction chamber pressure of the present invention, by controlling above-mentioned pendulum valve to the unlatching of bleeding point size control reaction chamber pressure, described pendulum valve is to the translational motion and the realization that rotatablely moves by the relative bleeding point of pendulum valve of the unlatching size of bleeding point.
Shown in Fig. 3 a, be the complete closing state of pendulum valve, put valve with the bleeding point complete closed this moment.
Shown in Fig. 3 b, control the unlatching size of pendulum valve by the translational motion of the relative bleeding point of control pendulum valve to bleeding point, and then the pressure in the control reaction chamber.This control generally is to be applied in the force value of setting lower the time.
Shown in Fig. 3 c, by rotatablely moving or translation and rotation integrated motion of the relative bleeding point of control pendulum valve, control the unlatching size of pendulum valve to bleeding point, and then the pressure in the control reaction chamber.This control generally is to be applied in the force value of setting higher the time.
Above-mentioned control all be by control gear according to the force value of setting control automatically, in the control procedure preferably also in conjunction with the translational motion of the gas flow control pendulum valve that infeeds to reaction chamber or rotatablely move.Principle according to flow control is: when flow hour, control the pressure of reaction chamber by the translational motion of control pendulum valve; When flow is big, by control pendulum valve rotatablely moving or translation and rotation integrated motion are controlled pressure in the reaction chamber.
Generally be to select a force value in concrete the application,, select the translation control mode for use when setting pressure during smaller or equal to this force value according to the different gas flows that infeeds; When setting pressure during, select translation and rotation Comprehensive Control pattern for use greater than this force value.The force value of this selection can be selected according to experiment, experience or theory.
Specific embodiment one:
When the gas flow that infeeds to reaction chamber is 50sccm, and the pressure of setting is during smaller or equal to 50mT, and control gear is by the pressure of the translational motion control reaction chamber of the relative bleeding point of control pendulum valve;
When the gas flow that infeeds to reaction chamber is 50sccm, and the pressure of setting is during greater than 50mT, and control gear is by the translational motion of the relative bleeding point of control pendulum valve and the pressure of the control reaction chamber that rotatablely moves.
Specific embodiment two:
When the gas flow that infeeds to reaction chamber is 75sccm, and the pressure of setting is during smaller or equal to 45mT, and control gear is by the pressure of the translational motion control reaction chamber of the relative bleeding point of control pendulum valve;
When the gas flow that infeeds to reaction chamber is 75sccm, and the pressure of setting is during greater than 45mT, and control gear is by the translational motion of the relative bleeding point of control pendulum valve and the pressure of the control reaction chamber that rotatablely moves.
Specific embodiment three:
When the gas flow that infeeds to reaction chamber is 100sccm, and the pressure of setting is during smaller or equal to 40mT, and control gear is by the pressure of the translational motion control reaction chamber of the relative bleeding point of control pendulum valve;
When the gas flow that infeeds to reaction chamber is 100sccm, and the pressure of setting is during greater than 40mT, and control gear is by the translational motion of the relative bleeding point of control pendulum valve and the pressure of the control reaction chamber that rotatablely moves.
Specific embodiment four:
When the gas flow that infeeds to reaction chamber is 150sccm, and the pressure of setting is during smaller or equal to 35mT, and control gear is by the pressure of the translational motion control reaction chamber of the relative bleeding point of control pendulum valve;
When the gas flow that infeeds to reaction chamber is 150sccm, and the pressure of setting is during greater than 35mT, and control gear is by the translational motion of the relative bleeding point of control pendulum valve and the pressure of the control reaction chamber that rotatablely moves.
Specific embodiment five:
When the gas flow that infeeds to reaction chamber is 200sccm, and the pressure of setting is during smaller or equal to 30mT, and control gear is by the pressure of the translational motion control reaction chamber of the relative bleeding point of control pendulum valve;
When the gas flow that infeeds to reaction chamber is 200sccm, and the pressure of setting is during greater than 30mT, and control gear is by the translational motion of the relative bleeding point of control pendulum valve and the pressure of the control reaction chamber that rotatablely moves.
The above; only for the preferable embodiment of the present invention, but protection scope of the present invention is not limited thereto, and anyly is familiar with those skilled in the art in the technical scope that the present invention discloses; the variation that can expect easily or replacement all should be encompassed within protection scope of the present invention.
Claims (10)
1. pendulum valve is installed on the bleeding point place of reaction chamber, is used to control the pressure of reaction chamber, and described pendulum valve is hinged by axle and reaction chamber, it is characterized in that,
Described pendulum valve can be done laterally rotation around axle, makes the relative bleeding point of pendulum valve do translational motion;
Described pendulum valve can vertically rotate around axle, and the relative bleeding point of pendulum valve is rotated;
Described translational motion with rotatablely move and can carry out simultaneously, also can carry out separately.
2. pendulum valve according to claim 1 is characterized in that, described pendulum valve is electrically connected with control gear, and described control gear is controlled the translational motion of pendulum valve automatically and/or rotatablely moved.
3. method of controlling reaction chamber pressure, by controlling the unlatching size control reaction chamber pressure of above-mentioned pendulum valve to bleeding point, it is characterized in that described pendulum valve is to the translational motion and/or the realization that rotatablely moves by the relative bleeding point of pendulum valve of the unlatching size of bleeding point.
4. the method for conditioned reaction chamber pressure according to claim 3 is characterized in that, the translational motion of described pendulum valve and/or rotatablely move is controlled according to the force value of setting automatically by control gear.
5. the method for conditioned reaction chamber pressure according to claim 4 is characterized in that, described control gear is also put the translational motion of valve according to the gas flow control that infeeds to reaction chamber and/or rotatablely moved.
6. the method for conditioned reaction chamber pressure according to claim 5 is characterized in that,
When the gas flow that infeeds to reaction chamber is 50sccm, and the pressure of setting is during smaller or equal to 50mT, and control gear is by the pressure of the translational motion control reaction chamber of the relative bleeding point of control pendulum valve;
When the gas flow that infeeds to reaction chamber is 50sccm, and the pressure of setting is during greater than 50mT, and control gear is by the translational motion of the relative bleeding point of control pendulum valve and the pressure of the control reaction chamber that rotatablely moves.
7. the method for conditioned reaction chamber pressure according to claim 5 is characterized in that,
When the gas flow that infeeds to reaction chamber is 75sccm, and the pressure of setting is during smaller or equal to 45mT, and control gear is by the pressure of the translational motion control reaction chamber of the relative bleeding point of control pendulum valve;
When the gas flow that infeeds to reaction chamber is 75sccm, and the pressure of setting is during greater than 45mT, and control gear is by the translational motion of the relative bleeding point of control pendulum valve and the pressure of the control reaction chamber that rotatablely moves.
8. the method for conditioned reaction chamber pressure according to claim 5 is characterized in that,
When the gas flow that infeeds to reaction chamber is 100sccm, and the pressure of setting is during smaller or equal to 40mT, and control gear is by the pressure of the translational motion control reaction chamber of the relative bleeding point of control pendulum valve;
When the gas flow that infeeds to reaction chamber is 100sccm, and the pressure of setting is during greater than 40mT, and control gear is by the translational motion of the relative bleeding point of control pendulum valve and the pressure of the control reaction chamber that rotatablely moves.
9. the method for conditioned reaction chamber pressure according to claim 5 is characterized in that,
When the gas flow that infeeds to reaction chamber is 150sccm, and the pressure of setting is during smaller or equal to 35mT, and control gear is by the pressure of the translational motion control reaction chamber of the relative bleeding point of control pendulum valve;
When the gas flow that infeeds to reaction chamber is 150sccm, and the pressure of setting is during greater than 35mT, and control gear is by the translational motion of the relative bleeding point of control pendulum valve and the pressure of the control reaction chamber that rotatablely moves.
10. the method for conditioned reaction chamber pressure according to claim 5 is characterized in that,
When the gas flow that infeeds to reaction chamber is 200sccm, and the pressure of setting is during smaller or equal to 30mT, and control gear is by the pressure of the translational motion control reaction chamber of the relative bleeding point of control pendulum valve;
When the gas flow that infeeds to reaction chamber is 200sccm, and the pressure of setting is during greater than 30mT, and control gear is by the translational motion of the relative bleeding point of control pendulum valve and the pressure of the control reaction chamber that rotatablely moves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2006101649043A CN101196258A (en) | 2006-12-07 | 2006-12-07 | Method for swaying valve and controlling reaction chamber pressure |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2006101649043A CN101196258A (en) | 2006-12-07 | 2006-12-07 | Method for swaying valve and controlling reaction chamber pressure |
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| CN101196258A true CN101196258A (en) | 2008-06-11 |
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| CNA2006101649043A Pending CN101196258A (en) | 2006-12-07 | 2006-12-07 | Method for swaying valve and controlling reaction chamber pressure |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104879506A (en) * | 2015-05-08 | 2015-09-02 | 王淑萍 | Quick valve |
| CN106523780A (en) * | 2016-11-30 | 2017-03-22 | 上海华力微电子有限公司 | Pendulum valve locking ring component of semiconductor etching equipment and locking ring handle extending fixture of pendulum valve locking ring component |
| CN112992718A (en) * | 2019-12-16 | 2021-06-18 | 中微半导体设备(上海)股份有限公司 | Air extraction device, air extraction method and multi-cavity plasma processor |
| CN114483972A (en) * | 2020-11-11 | 2022-05-13 | 中国科学院微电子研究所 | Semiconductor equipment chamber pressure regulating valve assembly, pressure regulating method and equipment chamber |
-
2006
- 2006-12-07 CN CNA2006101649043A patent/CN101196258A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104879506A (en) * | 2015-05-08 | 2015-09-02 | 王淑萍 | Quick valve |
| CN104879506B (en) * | 2015-05-08 | 2017-07-11 | 王淑萍 | Fast gate valve |
| CN106523780A (en) * | 2016-11-30 | 2017-03-22 | 上海华力微电子有限公司 | Pendulum valve locking ring component of semiconductor etching equipment and locking ring handle extending fixture of pendulum valve locking ring component |
| CN112992718A (en) * | 2019-12-16 | 2021-06-18 | 中微半导体设备(上海)股份有限公司 | Air extraction device, air extraction method and multi-cavity plasma processor |
| CN112992718B (en) * | 2019-12-16 | 2023-12-01 | 中微半导体设备(上海)股份有限公司 | Air extraction device, air extraction method and multi-cavity plasma processor |
| CN114483972A (en) * | 2020-11-11 | 2022-05-13 | 中国科学院微电子研究所 | Semiconductor equipment chamber pressure regulating valve assembly, pressure regulating method and equipment chamber |
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Open date: 20080611 |