CN111022737B - Flow control method and proportional control valve - Google Patents
Flow control method and proportional control valve Download PDFInfo
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- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
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Abstract
The invention provides a flow control method and a proportional control valve, wherein the method comprises the following steps: acquiring the maximum flow value of each gas path and the ratio of the maximum flow value to the preset flow ratio, wherein the maximum flow value is the flow value corresponding to the maximum opening of the proportional control valve on each gas path; taking the gas path with the minimum maximum flow value in all gas paths as a reference gas path; calculating the maximum flow value ratio and the ratio of the other gas circuits except the reference gas circuit to the reference gas circuit; comparing the maximum flow value ratios corresponding to the gas circuits with the ratio ratios corresponding to the gas circuits in a one-to-one correspondence manner; and according to the comparison result, calculating to obtain the use flow value of each gas circuit, and outputting an opening value corresponding to the use flow value to the proportional control valve on each gas circuit. The invention can ensure the constant proportion of each gas circuit and the maximum gas flow of each gas circuit.
Description
Technical Field
The invention relates to the field of semiconductor manufacturing, in particular to a flow control method and a proportional control valve.
Background
At present, a silicon epitaxial process is a key process in the field of integrated circuits and semiconductors, and according to the reaction mechanism of the silicon epitaxial technology, the process of large-size silicon wafers can be met only when the air input of each process gas in a chamber is required to be kept as large as possible, and meanwhile, the epitaxial wafer can have good characteristics only when the proportion of each process gas entering the chamber is required to be constant. In the existing semiconductor equipment, needle valves or flow controllers are mainly adopted to adjust the gas proportion of multiple process gases entering a chamber, wherein the needle valves are mainly manually adjusted, and the manual adjustment precision is difficult to effectively control; the flow controller is inaccurate in controlling the flow proportion value of the mixed gas, and the proportion of each path of gas is difficult to ensure to be constant.
As shown in fig. 1, a needle valve P is installed in the gas path of the process gas, and when the process parameters are changed, the needle valve P in the gas path is adjusted according to the value of the gas flowmeter M on each gas path, so that each gas path reaches a certain proportion; when the equipment needs to realize different process requirements, each path of needle valve P needs to be manually adjusted again, and the proportion of the gas entering each path of gas path in the reaction chamber is determined again. Therefore, the needle valve cannot be automatically adjusted, the automatic control of equipment is not facilitated, the accuracy of manually adjusting the needle valve is low, and the required air inlet proportion of each air path is difficult to quickly obtain only by referring to the value of the flow meter.
Disclosure of Invention
The invention aims to solve at least one technical problem in the prior art and provides a flow control method and a proportional control valve.
To achieve the object of the present invention, there is provided a flow control method including:
acquiring the ratio of the maximum flow value of each gas path to a preset flow ratio, wherein the maximum flow value is a flow value corresponding to the maximum opening of a proportional control valve on each gas path;
taking the gas path with the minimum maximum flow value in all the gas paths as a reference gas path;
calculating the maximum flow value ratio and the ratio of the other gas circuits except the reference gas circuit to the reference gas circuit;
comparing the maximum flow value ratios corresponding to the gas circuits with the ratio ratios corresponding to the gas circuits in a one-to-one correspondence manner;
if all the maximum flow value ratios are larger than the ratio, calculating to obtain the used flow value of each gas circuit according to the maximum flow value of the reference gas circuit and the ratio, and outputting an opening value corresponding to the used flow value to the proportional control valve on each gas circuit;
if the maximum flow value ratio is smaller than the ratio, calculating the ratio of the maximum flow value of the gas circuit corresponding to each maximum flow value ratio smaller than the ratio to the ratio, and taking the value with the minimum ratio as the used flow value of the reference gas circuit; and calculating to obtain the use flow value of each gas circuit according to the use flow value of the reference gas circuit and the ratio, and outputting an opening value corresponding to the use flow value to the proportional control valve on each gas circuit.
Preferably, the step of calculating and obtaining the usage flow value of each gas path according to the maximum flow value of the reference gas path and the ratio includes:
calculating a product value of the maximum flow value of the reference gas circuit and the ratio value corresponding to each gas circuit except the reference gas circuit, and taking the product value as the use flow value of each gas circuit except the reference gas circuit;
and taking the maximum flow value of the reference gas path as the used flow value of the reference gas path.
Preferably, the step of obtaining the usage flow value of each gas path by calculating according to the usage flow value of the reference gas path and the ratio includes:
and calculating a product value of the ratio of the used flow value of the reference gas path to the ratio corresponding to each gas path except the reference gas path, and taking the product value as the used flow value of each gas path except the reference gas path.
Preferably, in the step of obtaining the maximum flow value of each gas path and the ratio in the preset flow ratio, the maximum flow value of each gas path is obtained from a flow opening relation table, where the flow opening relation table includes a correspondence between an opening value of a proportional control valve on each gas path and a flow value of a medium conveyed by each gas path.
Preferably, after the step of outputting an opening value corresponding to the usage flow value to the proportional control valve on each of the gas paths, the method further includes:
acquiring an actual flow value of each gas path;
calculating the difference between the actual flow value corresponding to each gas circuit and the used flow value corresponding to each gas circuit;
if at least one difference value exceeds a preset threshold value range, alarming;
and if the difference value corresponding to each gas path is within the preset threshold range, ending the process.
A proportional control valve provided on each gas line in a flow control system that employs the flow control method described in the present application, the proportional control valve comprising: a valve body assembly, a driving source and a transmission mechanism, wherein,
the driving source is used for providing rotary power;
the transmission mechanism is connected with a driving shaft of the driving source and the valve body assembly respectively, and can move along the axis of the driving shaft.
Preferably, the transmission mechanism comprises:
a valve body connecting piece, with valve body subassembly fixed connection, and be provided with linear bearing in the valve body connecting piece, the drive shaft of driving source with linear bearing connects, just linear bearing can follow the axis of drive shaft removes.
Preferably, the valve body assembly comprises: the locking cover, the valve seat, the valve core and the push rod; wherein,
the locking cover is connected with the valve seat in a sealing mode to form a cavity, a threaded hole is formed in the locking cover, one end of the threaded hole is connected with the cavity, and the other end of the threaded hole penetrates through the locking cover along the direction parallel to the axis of the driving shaft;
an air inlet channel and an air outlet channel which are communicated with the cavity are arranged in the valve seat;
the push rod penetrates through the threaded hole, is provided with an external thread and is in threaded connection with the threaded hole; one end of the push rod is connected with the transmission mechanism, the other end of the push rod is connected with the valve core positioned in the cavity,
the valve core is arranged to move between a first position or a second position along with the movement of the push rod in the direction parallel to the axis of the driving shaft, wherein the first position is a position where the valve core blocks the port of the air inlet channel or the air outlet channel in the cavity; the second position is a farthest position of the valve core from the port of the air inlet channel or the air outlet channel in the cavity.
Preferably, the valve body assembly further includes an elastic member disposed between the locking cap and the valve core to apply an elastic force toward the valve core to move the valve core toward the second position.
Preferably, the valve core comprises a central convex part and an annular membrane surrounding the central convex part, wherein the central convex part is connected with the push rod in a sealing manner, and the central convex part is used for plugging the port of the air inlet channel or the air outlet channel in the cavity;
the inner periphery of the annular film is connected with the central convex part in a sealing mode, and the outer periphery of the annular film is connected with the inner cavity wall of the cavity in a sealing mode.
The invention has the following beneficial effects:
the flow control method provided by the invention obtains the maximum flow value of each gas path and the ratio of the maximum flow value to the preset flow proportion, wherein the maximum flow value is the flow value corresponding to the maximum opening of the proportional control valve on each gas path; taking the gas path with the minimum maximum flow value in all gas paths as a reference gas path; calculating the maximum flow value ratio and the ratio of the other gas circuits except the reference gas circuit to the reference gas circuit; comparing the maximum flow value ratios corresponding to the gas circuits with the ratio ratios corresponding to the gas circuits in a one-to-one correspondence manner; and obtaining the maximum flow value or the use flow value of the reference gas circuit according to the comparison condition of the maximum flow value ratio and the ratio, calculating the use flow value of each gas circuit according to the maximum flow value or the use flow value of the reference gas circuit, and outputting the opening value corresponding to the use flow value to the proportional control valve on each gas circuit. Therefore, the gas circuit with the minimum maximum flow value in all the gas circuits is obtained through the maximum flow value of each gas circuit, namely the reference gas circuit, the minimum value of the maximum flow value ratio and the proportion ratio is selected according to the maximum flow value ratio and the proportion ratio of the other gas circuits except the reference gas circuit and the reference gas circuit obtained through calculation, and therefore the constant proportion of each gas circuit can be guaranteed, and the gas flow of each gas circuit can be guaranteed to be maximum.
The proportional control valve provided by the present invention is provided in each gas path in the flow control system of the flow control method of the present application, and includes: the valve comprises a valve body assembly, a driving source and a transmission mechanism, wherein the driving source is used for providing rotary power, the transmission mechanism is respectively connected with the driving source and the valve body assembly, and the transmission mechanism can move along the axis of a driving shaft. Therefore, the transmission mechanism can drive the valve body assembly to rotate and move along the axis of the driving shaft at the same time, and the movement stability of the proportional control valve is ensured.
Drawings
FIG. 1 is a schematic diagram of a prior art process gas flow control system;
fig. 2 is a flow chart of a flow control method according to an embodiment of the present invention;
fig. 3 is a flow chart of a flow control method according to another embodiment of the present invention;
FIG. 4 is a diagram illustrating a relationship table of flow and opening degrees according to an embodiment of the present invention;
fig. 5 is a flow chart of a flow control method according to a third embodiment of the present invention;
FIG. 6 is a schematic diagram of a proportional control valve according to an embodiment of the present invention;
FIG. 7 is a schematic view of a valve body assembly according to an embodiment of the present invention;
fig. 8 is another schematic structural diagram of a valve body assembly in an embodiment of the invention.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the flow control method and the proportional control valve provided by the present invention are described in detail below with reference to the accompanying drawings.
As shown in fig. 2, a flow chart of a flow control method according to an embodiment of the present invention is shown, where in the embodiment of the present invention, the flow control method includes:
step 101: and acquiring the ratio of the maximum flow value in each gas path to the preset flow ratio, wherein the maximum flow value is the flow value corresponding to the maximum opening of the proportional control valve on each gas path.
Step 102: and taking the gas path with the minimum maximum flow value in all the gas paths as a reference gas path.
Step 103: and calculating the maximum flow value ratio and the ratio of the other gas circuits except the reference gas circuit to the reference gas circuit.
Specifically, n (n is more than or equal to 2) paths of air paths are provided, the air path with the minimum maximum flow value is the nth path, and the ratio of the 1 st path to the nth path is PSThe ratio of the (1, n) th path to the nth path is PS(2, n), the ratio of the n-1 th path to the n-th path is PS(n-1, n); at the moment, the preset flow proportion of each gas circuit is met, and the corresponding proportion of each gas circuit in the n circuits is FS1、FS2、FS3、…FSnAnd then the relation between each other gas circuit except the reference gas circuit and the reference gas circuit is as follows:
ratio P of 1 st path to n th pathS(1，n)＝FS1/FSn；
Ratio P of 2 nd path to n th pathS(2，n)＝FS2/FSn；
…
Ratio P of n-1 th path to n-th pathS(n-1，n)＝FSn-1/FSn；
The flow value of each gas circuit corresponds to the opening V of each proportional valves1、Vs2…、VsnFrom the above formula, it can be seen that: to meet the purpose of maximum air inflow of the system, the flow of each path needs to be maximized, so that the reference air path flow needs to be maximized, namely FSnAnd max.
The maximum flow of each air passage when the opening of the proportional control valve is maximum is respectively F1, F2, … and Fn, and the using flow of all the air passages cannot exceed the maximum flow range. The maximum flow value ratios of other gas circuits except the reference gas circuit to the reference gas circuit are respectively P (1, n), P (2, n) … and P (n-1, n), and then:
the maximum flow rate ratio P (1, n) of the 1 st path and the n-th path is F1/Fn；
The maximum flow rate ratio P (2, n) of the 2 nd path to the n th path is F2/Fn；
…
The maximum flow value ratio P (n-1, n) of the n-1 th path to the n-th path is Fn-1/Fn；
Step 104: comparing the maximum flow value ratios corresponding to the gas circuits with the ratio ratios corresponding to the gas circuits in a one-to-one correspondence manner; if all the maximum flow value ratios are larger than the ratio, executing the step 105; if the maximum flow ratio is smaller than the ratio, step 108 is executed.
Specifically, the maximum flow value ratio corresponding to each gas circuit is compared with the ratio corresponding to each gas circuit one to one, and there are three conditions:
in the first case: the ratio of all the gas paths is greater than or equal to the ratio of the maximum flow value.
According to the ratio P of the 1 st path to the reference path (the n-th path)sWhen the (1, n) is more than or equal to the maximum flow value ratio P (1, n), the maximum flow of the two paths is ensured, and the maximum flow F of the 1 st path is taken1Obtaining a reference flow value F of the reference gas paths(1, n) wherein,
similarly, if the ratio P of the 2 nd path to the reference gas pathsWhen the (2, n) is more than or equal to the maximum flow value ratio P (2, n), a reference flow value F of the reference gas circuit is obtaineds(2, n) wherein,
by analogy, the reference flow values of n paths of gas with n-1 minimum flow gas paths, namely the reference value set { F }s(1，n)，Fs(2，n)，…，Fs(n-1, n) }, the minimum value in the set can only be selected as the use flow value of the reference gas circuit, and the regulation of all gas circuits can only be met.
In the second case: the ratio of all the gas paths is smaller than the ratio of the maximum flow value.
When the ratio P of the 1 st path to the reference pathsWhen (1, n) is less than P (1, n), the maximum flow of the two paths is ensured, and the maximum flow (namely F) is taken as the maximum flow of the proportional control valve opening of the reference gas pathn) As a reference value Fs(1，n)＝FnIf the ratio of all the paths is smaller than the ratio of the maximum flow value, only one reference flow value of the system is obtained, namely the flow F when the opening of the proportional control valve of the reference gas path is maximumn。
In the third case: the ratio of the gas paths is smaller than the ratio of the maximum flow value, and the ratio of the other gas paths is larger than or equal to the ratio of the maximum flow value.
When the ratio of the proportion of part of the gas circuit to the reference gas circuit is smaller than the ratio of the maximum flow value, according to the second condition, the flow F when the opening of the proportional control valve with the reference flow value as the minimum flow gas circuit is maximum is obtainednOther gas paths are calculated according to the first condition to obtain a reference value set, and the numerical value in the reference value set is certainly smaller than FnTherefore, in the third case, the used flow value F of the reference gas path is solvedsnShould a reference set be calculated according to the calculation method of the first case, and the minimum value in the reference set is selected as the used flow value Fsn。
Step 105: and calculating to obtain the used flow value of each gas circuit according to the maximum flow value and the ratio of the reference gas circuit.
Specifically, step 105 comprises:
calculating a product value of the maximum flow value of the reference gas path and the ratio value corresponding to each gas path except the reference gas path, and taking the product value as the use flow value of each gas path except the reference gas path; and taking the maximum flow value of the reference gas path as the used flow value of the reference gas path.
Step 106: and outputting opening values corresponding to the used flow values to the proportional control valves on the gas paths.
Step 107: and (6) exiting.
Step 108: and calculating the ratio of the maximum flow value to the ratio of the maximum flow value of the gas circuit corresponding to the ratio, and taking the minimum value of the ratio as the use flow value of the reference gas circuit.
Step 109: and calculating to obtain the use flow value of each gas circuit according to the use flow value and the ratio of the reference gas circuit, and executing the step 106.
Specifically, step 109 includes:
and calculating a product value of the ratio of the used flow value of the reference gas path to the ratio corresponding to each gas path except the reference gas path, and taking the product value as the used flow value of each gas path except the reference gas path.
The flow control method provided by the embodiment of the invention obtains the maximum flow value of each gas path and the ratio of the maximum flow value to the preset flow proportion, wherein the maximum flow value is the flow value corresponding to the maximum opening of the proportional control valve on each gas path; taking the gas path with the minimum maximum flow value in all gas paths as a reference gas path; calculating the maximum flow value ratio and the ratio of the other gas circuits except the reference gas circuit to the reference gas circuit; comparing the maximum flow value ratios corresponding to the gas circuits with the ratio ratios corresponding to the gas circuits in a one-to-one correspondence manner; and obtaining the maximum flow value or the use flow value of the reference gas circuit according to the comparison condition of the maximum flow value ratio and the ratio, calculating the use flow value of each gas circuit according to the maximum flow value or the use flow value of the reference gas circuit, and outputting the opening value corresponding to the use flow value to the proportional control valve on each gas circuit. Therefore, the gas circuit with the minimum maximum flow value in all the gas circuits is obtained through the maximum flow value of each gas circuit, namely the reference gas circuit, the minimum value of the maximum flow value ratio and the proportion ratio is selected according to the maximum flow value ratio and the proportion ratio of the other gas circuits except the reference gas circuit and the reference gas circuit obtained through calculation, and therefore the constant proportion of each gas circuit can be guaranteed, and the gas flow of each gas circuit can be guaranteed to be maximum.
As shown in fig. 3, a flow chart of a flow control method according to another embodiment of the present invention is shown, where in the embodiment of the present invention, the flow control method includes:
step 201: and acquiring the maximum flow value of each gas path by using a flow opening relation table, wherein the flow opening relation table comprises the corresponding relation between the opening value of the proportional control valve on each gas path and the flow value of the medium conveyed by each gas path, and the maximum flow value is the flow value corresponding to the maximum opening of the proportional control valve on each gas path.
Specifically, the flow opening relation table may obtain a characteristic relation between the opening value of the proportional control valve and the medium flow value when the inlet pressure of each gas path is the same, and the characteristic may be repeated, for example, when the same proportional control valve passes through different types of gas with the same opening value, the gas flow values are different, and the characteristic is as shown in fig. 4. In fig. 4, the abscissa is the opening degree of the proportional control valve of each gas path, the ordinate is the flow rate value of the medium transported in each gas path, and curves of different gas paths among g1, g2, g3, gn are shown in fig. 4, and the corresponding flow rate values are F1, F2, F3, Fn at the maximum opening degree Vmax of each proportional control valve. And the corresponding gas path gn of the Fn is the gas path with the minimum maximum flow value, and the gn gas path is the reference gas path. Therefore, for multi-path gas, the same proportional valve with the same opening degree can obtain the flow curves of various gases when different gases pass through.
Step 202: and acquiring the ratio of each gas path in the preset flow ratio.
Step 203: and taking the gas path with the minimum maximum flow value in all the gas paths as a reference gas path.
Step 204: and calculating the maximum flow value ratio and the ratio of the other gas circuits except the reference gas circuit to the reference gas circuit.
Step 205: comparing the maximum flow value ratios corresponding to the gas circuits with the ratio ratios corresponding to the gas circuits in a one-to-one correspondence manner; if all the maximum flow value ratios are greater than the ratio, execute step 206; if the maximum flow rate ratio is smaller than the ratio, step 209 is executed.
Step 206: and calculating to obtain the used flow value of each gas circuit according to the maximum flow value and the ratio of the reference gas circuit.
Step 207: and outputting opening values corresponding to the used flow values to the proportional control valves on the gas paths.
In this embodiment, the flow value and the opening value of each path may be obtained according to the flow opening relation table, and the opening value of the proportional control valve corresponding to the flow value used by each path may be obtained through calculation, so as to adjust the opening of the proportional control valve.
Step 208: and (6) exiting.
Step 209: and calculating the ratio of the maximum flow value to the ratio of the maximum flow value of the gas circuit corresponding to the ratio, and taking the minimum value of the ratio as the use flow value of the reference gas circuit.
Step 210: and calculating to obtain the use flow value of each gas circuit according to the use flow value and the ratio of the reference gas circuit, and executing step 207.
According to the flow control method provided by the embodiment of the invention, the maximum flow value of each gas circuit is obtained through the flow opening relation table, and the flow opening relation table can obtain the characteristic relation between the opening value of the proportional control valve and the medium flow value when the inlet pressure of each gas circuit is the same, so that convenience is provided for flow control, and the accuracy of flow control is ensured.
As shown in fig. 5, a flow chart of a flow control method according to a third embodiment of the present invention is shown, where in the embodiment of the present invention, the flow control method includes:
step 301: and acquiring the maximum flow value of each gas path by using a flow opening relation table, wherein the flow opening relation table comprises the corresponding relation between the opening value of the proportional control valve on each gas path and the flow value of the medium conveyed by each gas path, and the maximum flow value is the flow value corresponding to the maximum opening of the proportional control valve on each gas path.
Step 302: and acquiring the ratio of each gas path in the preset flow ratio.
Step 303: and taking the gas path with the minimum maximum flow value in all the gas paths as a reference gas path.
Step 304: and calculating the maximum flow value ratio and the ratio of the other gas circuits except the reference gas circuit to the reference gas circuit.
Step 305: comparing the maximum flow value ratios corresponding to the gas circuits with the ratio ratios corresponding to the gas circuits in a one-to-one correspondence manner; if all the maximum flow value ratios are larger than the ratio, executing step 306; if the maximum flow ratio is smaller than the ratio, step 313 is executed.
Step 306: and calculating to obtain the used flow value of each gas circuit according to the maximum flow value and the ratio of the reference gas circuit.
Step 307: and outputting opening values corresponding to the used flow values to the proportional control valves on the gas paths.
In this embodiment, the flow value and the opening value of each path may be obtained according to the flow opening relation table, and the opening value of the proportional control valve corresponding to the flow value used by each path may be obtained through calculation, so as to adjust the opening of the proportional control valve.
Step 308: and acquiring the actual flow value of each gas path.
Step 309: and calculating the difference between the actual flow value corresponding to each gas circuit and the used flow value corresponding to each gas circuit.
Step 310: judging whether all the difference values are within a preset threshold range, if so, executing step 311; if not, go to step 312.
Step 311: and (6) exiting.
Step 312: and alarming and executing step 311.
Step 313: and calculating the ratio of the maximum flow value to the ratio of the maximum flow value of the gas circuit corresponding to the ratio, and taking the minimum value of the ratio as the use flow value of the reference gas circuit.
Step 314: and calculating to obtain the use flow value of each gas circuit according to the use flow value and the ratio of the reference gas circuit, and executing step 307.
According to the flow control method provided by the embodiment of the invention, after the opening values corresponding to the used flow values are output to the proportional control valves on the gas circuits, the actual flow values of the gas circuits are obtained, the difference values between the actual flow values corresponding to the gas circuits and the used flow values corresponding to the gas circuits are calculated, and whether the gas circuits are abnormal in transmission or not is determined according to the difference values, so that the safety of flow control is ensured.
The flow control method provided by the invention is applied to a flow control system, and the working process of the flow control method specifically comprises the following steps: the method comprises the steps that a user inputs the proportion of each air path in a preset flow proportion on a control interface of a proportional controller, the proportional controller determines the air path with the minimum maximum flow value in all the air paths according to a flow opening relation table, namely a reference air path, the proportional controller calculates the maximum flow value ratio P (1,n), P (2, n), … … P (n-1, n), and the ratio of all gas paths to the reference gas path is defined as PS(1，n)，PS(2，n)，……PS(n-1, n). The proportional controller compares all PSThe sizes of (n-1, n) and P (n-1, n) are calculated to obtain the use flow F of the reference gas pathnCalculating F of each gas paths1、Fs2、Fsn-1The corresponding opening degree V is obtained by combining the flow and opening degree relation table in the systems1、Vs2…Vsn. The opening values are respectively sent to the proportional control valves of the corresponding gas circuits by the proportional controller, the motor of the proportional control valves drives the driving mechanism to enable the opening of the valve body assembly to reach the calculated opening value, at the moment, the driving mechanism records the current position information and feeds the current position information back to the proportional controller, the position information is stored by the proportional controller to serve as the position information of the process, and when the two processes are switched, the process position information stored in the proportional controller is directly called by a proportional control program of the proportional controller, and the processes are directly switched.
In view of the above flow rate control method, the present invention further provides a proportional control valve, as shown in fig. 6, which is provided on each gas path in the flow rate control system of the flow rate control method of the present invention, the proportional control valve including: valve body assembly 1, driving source 2 and drive mechanism 3.
Wherein the drive source 2 is used to provide rotational power. Further, the drive source 2 may include: the motor (not shown) is provided with an encoder, the encoder can reflect the rotation dynamic state of the valve body in a time dynamic manner, and can accurately determine the rotation degree, so that different process parameters of the proportional control valve can be conveniently adjusted; further, the drive source 2 includes: the driving base 21, the driving base 21 is connected with the transmission base 32, and the transmission base 32 is installed on the valve body assembly 1.
The transmission mechanism 3 is connected to the drive shaft of the drive source 2 and the valve body assembly 1, respectively, and the transmission mechanism 3 is movable along the axis of the drive shaft.
In this embodiment, drive mechanism can drive the valve body subassembly and carry out the axis motion along the drive shaft when rotatory, has guaranteed the stability of proportional control valve motion.
Specifically, as shown in fig. 6, the transmission mechanism 3 includes: the valve body connecting member 31 is fixedly connected to the valve body assembly 1, and a linear bearing 312 is disposed in the valve body connecting member 31, the driving shaft of the driving source 2 is connected to the linear bearing 312, and the linear bearing 312 can move along the axis of the driving shaft, as shown in fig. 6, the valve body connecting member 31 further includes: the rotating shaft 313 of the driving rotating block 311 and the valve body rotating block 314, the rotating shaft 313 fixes the driving rotating block 311, the linear bearing 312 is embedded in the valve body rotating block 314, and the linear bearing 312 is matched with the rotating shaft 313. The rotating shaft 313 is matched with the linear bearing 5 to form a sliding connection capable of moving up and down, so that the up and down movement in the rotating process is realized, and one end of the valve body rotating block 314 is connected with the valve body assembly 1.
In this embodiment, the rotating shaft 313 is parallel to the driving shaft of the driving source 2, the driving shaft of the driving source 2 is connected to the driving rotating block 311 to provide a rotating power to the driving rotating block 311, while the rotating shaft 313 rotates with the driving rotating block 311, moves along the axis of the driving shaft through the linear bearing 312, and the rotating shaft 313 can also provide a rotating power to the valve body rotating block 314 to enable the valve body rotating block 314 to drive the valve body assembly 1 to rotate.
Specifically, as shown in fig. 7, which is a schematic structural diagram of a valve body assembly in an embodiment of the present invention, in fig. 7, a valve body assembly 1 includes: locking lid 11, valve seat 12, case 13 and push rod 14.
Wherein, locking lid 11 and valve seat 12 sealing connection form cavity 4, and are provided with screw hole 111 in locking lid 11, and the one end of screw hole 111 is connected with cavity 4, and the other end of screw hole 111 link through locking lid 11 along the direction that is on a parallel with the axis of drive shaft.
The valve seat 12 is provided therein with an inlet passage 121 and an outlet passage 122 both communicating with the cavity 4.
The push rod 14 is arranged in the threaded hole 111 in a penetrating manner, and the push rod 14 is provided with an external thread (not shown) and is in threaded connection with the threaded hole 111; one end of the push rod 14 is connected with the transmission mechanism 3, and the other end is connected with the valve core 13 positioned in the cavity 4.
The valve element 13 is arranged to move with the push rod 14 in a direction parallel to the axis of the drive shaft and between a first position, in which the valve element 13 blocks the port of the inlet passage 121 or the outlet passage 122 in the cavity 4, and a second position; the second position is the furthest position of the spool 13 from the port of the inlet channel 121 or outlet channel 122 in the cavity 4.
Specifically, the valve core 13 includes a central convex portion 131 and an annular membrane 132 surrounding the central convex portion 131, wherein the central convex portion 131 is connected with the push rod 14 in a sealing manner, and the central convex portion 131 is used for blocking the port of the air inlet channel 121 or the air outlet channel 122 in the cavity 4. In fig. 7, the central protrusion 131 serves to close off the port of the inlet channel 121 in the cavity 4.
The inner periphery of the annular membrane 132 is sealingly connected to the central protrusion 131, and the outer periphery of the annular membrane 132 is sealingly connected to the inner cavity wall of the cavity 4. In the context of figure 7 of the drawings,
in the embodiment of the invention, the annular film can ensure the upward elasticity of the valve core, so that the valve core is tightly attached to the push rod, and the repeatability error of the valve body assembly is ensured to be minimum.
Further, as shown in fig. 8, which is another schematic structural diagram of a valve body assembly in an embodiment of the present invention, with respect to the valve body assembly 1 shown in fig. 7, the valve body assembly 1 shown in fig. 8 further includes: and an elastic member 15, the elastic member 15 being disposed between the locking cover 11 and the valve core 13 to apply an elastic force to the valve core 13 to move the valve core 13 toward the second position.
The push rod 14 is connected with the locking cover 11 through threads, an elastic part 15 is arranged between the push rod and the locking cover 11, the elastic part 15 can be a spring, therefore, the thread distance is reduced, the transmission precision is guaranteed, the locking cover 11 presses the valve core 13 onto the valve seat 12, metal sealing is carried out between the valve core 13 and the valve seat 12, and the sealing reliability is guaranteed. In fig. 8, the conical surface of the valve element 13 is matched with the conical surface of the valve seat 12 to ensure the sealing when the valve body is fully closed, and the distances between the conical surfaces of the valve element and the valve seat are different, so that the flow passing through the valve body is different.
In the embodiment of the invention, the elastic part is arranged between the locking cover and the valve core, so that the vertical jumping of the push rod caused by the thread clearance in the rotating process can be greatly reduced, the precision error caused by the thread clearance is ensured not to occur, and the precision of the proportional control valve is improved.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
Claims (7)
1. A method of flow control, the method comprising:
acquiring the ratio of the maximum flow value of each gas path to a preset flow ratio, wherein the maximum flow value is a flow value corresponding to the maximum opening of a proportional control valve on each gas path;
taking the gas path with the minimum maximum flow value in all the gas paths as a reference gas path;
calculating the maximum flow value ratio and the ratio of the other gas circuits except the reference gas circuit to the reference gas circuit;
comparing the maximum flow value ratios corresponding to the gas circuits with the ratio ratios corresponding to the gas circuits in a one-to-one correspondence manner;
if all the maximum flow value ratios are larger than the ratio, calculating to obtain the used flow value of each gas circuit according to the maximum flow value of the reference gas circuit and the ratio, and outputting an opening value corresponding to the used flow value to the proportional control valve on each gas circuit;
if the maximum flow value ratio is smaller than the ratio, calculating the ratio of the maximum flow value of the gas circuit corresponding to each maximum flow value ratio smaller than the ratio to the ratio, and taking the value with the minimum ratio as the used flow value of the reference gas circuit; calculating to obtain the use flow value of each gas circuit according to the use flow value of the reference gas circuit and the ratio, and outputting an opening value corresponding to the use flow value to the proportional control valve on each gas circuit; wherein,
the step of calculating and obtaining the use flow value of each gas circuit according to the maximum flow value of the reference gas circuit and the ratio comprises the following steps:
calculating a product value of the maximum flow value of the reference gas circuit and the ratio value corresponding to each gas circuit except the reference gas circuit, and taking the product value as the use flow value of each gas circuit except the reference gas circuit;
taking the maximum flow value of the reference gas circuit as the use flow value of the reference gas circuit; and,
the step of calculating and obtaining the use flow value of each gas circuit according to the use flow value of the reference gas circuit and the ratio comprises the following steps:
and calculating a product value of the ratio of the used flow value of the reference gas path to the ratio corresponding to each gas path except the reference gas path, and taking the product value as the used flow value of each gas path except the reference gas path.
2. The flow control method according to claim 1, wherein in the step of obtaining the ratio between the maximum flow value of each gas path and the preset flow ratio, the maximum flow value of each gas path is obtained from a flow opening relation table, and the flow opening relation table includes a correspondence between an opening value of a proportional control valve on each gas path and a flow value of a medium conveyed by each gas path.
3. The flow control method according to claim 2, characterized in that after the step of outputting an opening value corresponding to the usage flow value to the proportional control valve on each of the gas paths, the method further comprises:
acquiring an actual flow value of each gas path;
calculating the difference between the actual flow value corresponding to each gas circuit and the used flow value corresponding to each gas circuit;
if at least one difference value exceeds a preset threshold value range, alarming;
and if the difference value corresponding to each gas path is within the preset threshold range, ending the process.
4. A proportional control valve provided in each gas line in a flow control system that employs the flow control method according to any one of claims 1 to 3, the proportional control valve comprising: a valve body assembly, a driving source and a transmission mechanism, wherein,
the valve body assembly includes: the locking cover, the valve seat, the valve core and the push rod; wherein,
the locking cover is connected with the valve seat in a sealing mode to form a cavity, a threaded hole is formed in the locking cover, one end of the threaded hole is connected with the cavity, and the other end of the threaded hole penetrates through the locking cover along the direction parallel to the axis of the driving shaft;
an air inlet channel and an air outlet channel which are communicated with the cavity are arranged in the valve seat;
the push rod penetrates through the threaded hole, is provided with an external thread and is in threaded connection with the threaded hole; one end of the push rod is connected with the transmission mechanism, the other end of the push rod is connected with the valve core positioned in the cavity,
the valve core is arranged to move along with the push rod in a direction parallel to the axis of the driving shaft and between a first position and a second position, wherein the first position is a position where the valve core blocks the port of the air inlet channel or the air outlet channel in the cavity; the second position is the farthest position of the valve core from the port of the air inlet channel or the air outlet channel in the cavity;
the driving source is used for providing rotary power;
the transmission mechanism is connected with a driving shaft of the driving source and the valve body assembly respectively, and can move along the axis of the driving shaft.
5. The proportional control valve of claim 4, wherein the transmission mechanism comprises:
a valve body connecting piece, with valve body subassembly fixed connection, and be provided with linear bearing in the valve body connecting piece, the drive shaft of driving source with linear bearing connects, just linear bearing can follow the axis of drive shaft removes.
6. The proportional control valve of claim 4, wherein the valve body assembly further comprises a resilient member disposed between the locking cap and the valve spool to apply a spring force toward the valve spool that moves the valve spool toward the second position.
7. The proportional control valve of claim 4 or 6, wherein the valve spool comprises a central protrusion and an annular membrane surrounding the central protrusion, wherein the central protrusion is in sealing connection with the push rod, and the central protrusion is used for plugging a port of the gas inlet channel or the gas outlet channel in the cavity;
the inner periphery of the annular film is connected with the central convex part in a sealing mode, and the outer periphery of the annular film is connected with the inner cavity wall of the cavity in a sealing mode.
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| CN114415747B (en) * | 2021-12-21 | 2023-10-27 | 成都中科唯实仪器有限责任公司 | Pressure regulating method of vacuum regulating valve |
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| CN105065683A (en) * | 2015-07-20 | 2015-11-18 | 江苏通达船用阀泵有限公司 | Novel air reducing valve |
| CN205618798U (en) * | 2016-05-16 | 2016-10-05 | 浙江纽沃阀门有限公司 | Gate valve with case guard action |
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| CN109470324B (en) * | 2018-09-18 | 2021-01-15 | 北京七星华创流量计有限公司 | Gas flow calibration method and device, control system and storage medium |
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Address after: 100176 4s01, 4th floor, building 1, No.8 courtyard, Wenchang Avenue, Beijing Economic and Technological Development Zone, Daxing District, Beijing Patentee after: Beijing Huacheng Electronics Co.,Ltd. Country or region after: China Address before: 100176 room 506, building 1, 8 Wenchang Avenue, Beijing Economic and Technological Development Zone, Beijing Patentee before: BEIJING SEVENSTAR FLOW Co.,Ltd. Country or region before: China |